CN107797395A - A kind of recovery method and device for mixing useless light resistance washing agent - Google Patents

A kind of recovery method and device for mixing useless light resistance washing agent Download PDF

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Publication number
CN107797395A
CN107797395A CN201710907144.9A CN201710907144A CN107797395A CN 107797395 A CN107797395 A CN 107797395A CN 201710907144 A CN201710907144 A CN 201710907144A CN 107797395 A CN107797395 A CN 107797395A
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rectifying column
higher boiling
boiling components
light component
pipeline
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杨水清
庄可
滕海俊
蒋世平
徐康
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JIANGSU YINGTIAN CHEMICAL CO Ltd
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JIANGSU YINGTIAN CHEMICAL CO Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • G03F7/3092Recovery of material; Waste processing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor
    • G03F7/422Stripping or agents therefor using liquids only

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

The present invention relates to electronics industry admixture solvent recovery and reusing and recycling technical field, specifically, it is a kind of recovery method for mixing useless light resistance washing agent, useless light resistance washing agent filtering will be mixed using metal agglomeration filter core filter, filtrate is separated into higher boiling components and light component after flash distillation again, then higher boiling components and light component are obtained into one-component after rectifying respectively.The present invention on the premise of product quality and yield is ensured, improves organic efficiency, realizes resource reclaim recycling for the useless light resistance washing agent of mixing.

Description

A kind of recovery method and device for mixing useless light resistance washing agent
Technical field
The present invention relates to electronics industry admixture solvent recovery and reusing and recycling technical field, is a kind of mixing specifically The recovery method and device of useless light resistance washing agent.
Background technology
In electronics industry, in order to manufacture small electric used in liquid crystal display (LCD) circuit or semiconductor integrated circuit Road pattern, typically on substrate coating one kind includes the light resistance composition of fluoropolymer resin, Photoactive compounds and solvent, after by The steps such as temperature is dried, radiation development, the roasting, etching of heat are completed circuit pattern and made;And must be solid when make in next step Change photoresist layer to get rid of, existing use chemical method basic in the industry is light resistance washing agent removal method;Coating machine cleaning simultaneously, glass base Plate edge clean, board pipeline-cleaning etc. all largely use light resistance washing agent, along with the development of electronics industry in recent years, are used Substrate also develop towards maximization direction, therefore the usage amount of light resistance washing agent is also increasing.Therefore, with regard to economic, environmental protection side Face considers, it is necessary to carries out recycling to the mixing light resistance washing agent after use.
Patent CN201417363Y discloses a kind of circulation and stress device of photoresistance liquid, and it is set using a plurality of tempering tanks Count and obtain more sufficient cushion space, so can not only be directed to the photoresistance liquid reclaimed on preparation bucket and effectively be returned Receive, the photoresistance liquid after can more laying in compared with multiprocessing is for later use;Furthermore in processing procedure using vacuum extractor and The design of thermostat, it can avoid producing bubble in whipping process and temperature improves and influences product quality, so that returning Photoresistance liquid quality after receipts are treated is more stable and service life is longer.
Patent CN106773536A discloses the side of a kind of solvent recovering system and method and coating machine and coating photoresistance Method, it is using alembic, liquefaction cooling tank and filter, by the mixed waste liquor to be recycled containing photoresistance and solvent in alembic In distilled so that photoresistance and solvent gasification with photoresistance to separate, solvent after gasification is carried out through the cooling tank that liquefies successively Cool down and carry out filtering and impurity removing through the filter;Solvent in mixed waste liquor containing photoresistance can effectively be reclaimed, So as to save solvent supply cost, the great prospects for commercial application of energy-conserving and environment-protective.
Patent CN103728846A discloses a kind of blocking solution recovery system, including thin film evaporator, filter, returns Receive groove, discharge pipe, feed line, deslagging pipeline and recovery pipe, one end of wherein discharge pipe and be arranged in thin film evaporation The liquid outlet of device, the other end are arranged in the inflow entrance of filter;One end of feed line is arranged in the flow export of filter, The other end is then arranged in the inlet of thin film evaporator;Deslagging pipeline one end is communicated in discharge pipe, and the other end is then communicated in stream Enter pipeline;Recovery pipe one end is arranged in the slag-drip opening of filter, and the other end is then arranged in the recovery port of accumulator tank, foregoing each After individual device is interconnected by each pipeline, the recovery system of a blocking solution is just constituted;Reclaimed using blocking solution When system carries out waste sludge discharge operation, the flow export of blocking solution inherent filtration device enters in filter, and by waste residue band Walk, flowed into via slag-drip opening in recovery pipe, then flow into accumulator tank and reclaimed.
Above-mentioned known photoresistance liquid recovery method is applied to the photoresistance waste liquid of single kind, and because photoresistance liquid species is numerous More, each workshop also has very big difference using species difference usage amount, it is contemplated that equipment cost will necessarily produce a large amount of mixing Useless light resistance washing agent;And common filter has great difficulty for filtering gluey solid content, has a strong impact on organic efficiency.Cause This, from the aspect of economic aspect, environment, industry it is expected for mix the recovery system of useless light resistance washing agent can have it is a set of More efficient way is reclaimed.
The content of the invention
It is an object of the present invention to overcome the above-mentioned technical problems, and to provide a kind of useless light resistance washing agent of electronics industry mixing is molten Agent recovery and reusing and recycling method obtains the solvent of one-component, and the present invention is to mix useless light resistance washing agent as raw material is filtered, sudden strain of a muscle Steam again the mode of rectifying to carry out recovery and be separated into each one-component, the technical scheme for solving above-mentioned technical problem is as follows:
A kind of recovery method for mixing useless light resistance washing agent, it is clear that useless photoresistance will be mixed using metal agglomeration filter core filter Lotion is filtered, then filtrate is separated into higher boiling components and light component after flash distillation, then respectively passes through higher boiling components and light component One-component is obtained after rectifying, described mixing gives up light resistance washing agent as water, tetrafluoropropanol, propylene glycol monomethyl ether, cyclohexanone, N, The mixture of N- dimethyl acetamides, METHYLPYRROLIDONE, its reclaimed water account for the useless light resistance washing agent mass percent of total mixing 1%~10%, the temperature of flash process is 130~135 DEG C, wherein, with the circulation of clear liquid mixing super-cell before filtering 1~10cm thick filter cakes are formed on metal agglomeration filter core, it is mixed using nitrogen or pressurized with compressed air purging removal residual after filtering Close useless light resistance washing agent.
Present invention also offers the retracting device of the useless light resistance washing agent of this mixing, including metal agglomeration filter core filtering dress Put, filtrate buffer tank, flash tank, height boiling distillation system and light component distillation system, described metal agglomeration filter core filter Charging aperture be connected with filtration feed pump by pipeline, discharging opening is connected with the charging aperture of filtrate buffer tank, and described filtrate is delayed The discharging opening for depositing tank is connected with flash tank feed pump by pipeline, and filtrate is delivered in flash tank by described flash tank feed pump Portion, the top of described flash tank is light component, and bottom is higher boiling components, described light fraction outlet and light component distillation system Connection, the outlet of described higher boiling components are connected with higher boiling components distillation system.
Further say, described light component distillation system includes light component rectifying column, described light component rectifying column Top is connected with light component rectifying column product receiving tank by the first pipeline, bottom and the first tower of described light component rectifying column Kettle reboiler is connected by pipeline, and the described import of light component rectifying column and the light fraction outlet of flash tank are connected by pipeline Connect, the feed rate of light component rectifying column inlet control valve control light component rectifying column is also set up on the connecting pipe.
Further say, light component rectifying column tower top condenser and light component are also disposed with the first described pipeline Rectifying column top return controller.
Further say, described higher boiling components distillation system includes higher boiling components rectifying column, described higher boiling components essence The top for evaporating tower is connected with higher boiling components rectifying column product receiving tank by second pipe, the bottom of described higher boiling components rectifying column Portion is connected with the second tower reactor reboiler by pipeline, and the described import of higher boiling components rectifying column and the higher boiling components of flash tank go out Mouth is connected by pipeline, and a higher boiling components rectifying column inlet control valve is also set up on the connecting pipe and higher boiling components feed pump is matched somebody with somebody Close the feed rate of control higher boiling components rectifying column.
Further say, higher boiling components rectifying column tower top condenser and height boiling are also disposed with described second pipe Component rectifying column top return controller.
Further say, described metal agglomeration filter core filter uses metal agglomeration filter core, and material is 304 stainless steels Or 316 stainless steels, length is 0.5~2m, a diameter of 2~20cm.
Further say, described light component rectifying column is ceramic corrugated filler, and it is 1~10 to control tower top reflux ratio:1.
Further say, described higher boiling components rectifying column is plate column, and theoretical cam curve is 40~60, and overhead reflux leads to Industrial reflux ratio controller control is crossed, it is 1~10 to control tower top reflux ratio:1.
Further say, whole removal process is intermittent operation.
The beneficial effects of the invention are as follows:
The invention is to mix useless light resistance washing agent (including water, tetrafluoropropanol, propylene glycol monomethyl ether, cyclohexanone, N, N- diformazans The mixture of yl acetamide, METHYLPYRROLIDONE, its reclaimed water account for the 1% of the useless light resistance washing agent mass percent of total mixing ~10%) filtered for raw material by metal agglomeration filter core filter, enter flash tank and be divided into light component and higher boiling components, enter respectively Light component rectifying column and higher boiling components rectifying column obtain one-component.The present invention is ensureing to produce for the useless light resistance washing agent of mixing On the premise of product quality and yield, organic efficiency is improved, realizes resource reclaim recycling.
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the present invention;
Wherein, 1 is filter, and 2 be filtrate buffer tank, and 3 be flash tank, and 4 be filtration feed pump, and 5 be that flash tank is fed Pump, 6 be light component rectifying column, and 7 be light component rectifying column product receiving tank, and 8 be the first pipeline, and 9 be the first tower reactor reboiler, 10 It is light component rectifying column tower top condenser for light component rectifying column inlet control valve, 11,12 be light component rectifying column top return Controller, 13 be higher boiling components rectifying column, and 14 be higher boiling components rectifying column product receiving tank, and 15 be second pipe, and 16 be second Tower reactor reboiler, 17 be higher boiling components rectifying column inlet control valve, and 18 be higher boiling components feed pump, and 19 be higher boiling components rectifying column Overhead condenser, 20 be higher boiling components rectifying column top return controller, and 21 be nitrogen or compressed air blowing cleaner.
Embodiment
Embodiment 1:
A kind of recovery method for mixing useless light resistance washing agent, the mixing give up light resistance washing agent as water, tetrafluoropropanol, propane diols Monomethyl ether, cyclohexanone, DMA, the mixture of METHYLPYRROLIDONE, its reclaimed water account for the useless photoresistance of total mixing The 1%~10% of cleaning agent mass percent, is concretely comprised the following steps, and it is clear to mix useless photoresistance using metal agglomeration filter core filter Lotion is filtered, then filtrate is separated into higher boiling components and light component after 130 DEG C of flash distillations, then respectively by higher boiling components and light component One-component is obtained after rectifying.Wherein light component is mainly tetrafluoropropanol and propylene glycol monomethyl ether, and higher boiling components are main It is cyclohexanone, DMAC N,N' dimethyl acetamide, METHYLPYRROLIDONE.
A kind of retracting device for mixing useless light resistance washing agent, including metal agglomeration filter core filter 1, filtrate buffer tank 2, Flash tank 3, height boiling distillation system and light component distillation system, the charging aperture and filtration feed of metal agglomeration filter core filter 1 Pump 4 is connected by pipeline, and the discharging opening of metal agglomeration filter core filter 1 is connected with the charging aperture of filtrate buffer tank 2, and filtrate is delayed The discharging opening for depositing tank 2 is connected with flash tank feed pump 5 by pipeline, and filtrate is delivered in flash tank 3 by flash tank feed pump 5 Portion, the top of flash tank 3 is light component, and bottom is higher boiling components, and light fraction outlet is connected with light component distillation system, height boiling group Sub-export is connected with higher boiling components distillation system.
Wherein, formation 1cm thick filter cakes, mistake on metal agglomeration filter core are circulated in clear liquid mixing super-cell before filtering The useless light resistance washing agent of residual mixing is removed using nitrogen or the pressure purge of compressed air blowing cleaner 21 after filter.
Light component distillation system includes light component rectifying column 6, top and the light component rectifying column product of light component rectifying column 6 Receiving tank 7 is connected by the first pipeline 8, and the bottom of light component rectifying column 6 is connected with the first tower reactor reboiler 9 by pipeline, gently The import of component rectifying column 6 is connected with the light fraction outlet of flash tank 3 by pipeline, and a light component is also set up on the connecting pipe Rectifying column inlet control valve 10 controls the feed rate of light component rectifying column.
Light component rectifying column tower top condenser 11 and light component rectifying column top return are also disposed with first pipeline 8 Controller 12.
Higher boiling components distillation system includes higher boiling components rectifying column 13, the top of higher boiling components rectifying column 13 and higher boiling components Rectifying column product receiving tank 14 is connected by second pipe 15, the bottom of higher boiling components rectifying column 13 and the second tower reactor reboiler 16 Connected by pipeline, the import of higher boiling components rectifying column 13 is exported with the higher boiling components of flash tank 3 and is connected by pipeline, the connection A higher boiling components rectifying column inlet control valve 17 is also set up on pipeline and higher boiling components feed pump 18 coordinates control higher boiling components essence Evaporate the feed rate of tower.
Higher boiling components rectifying column tower top condenser 19 and higher boiling components rectifying tower are also disposed with second pipe 15 Push up counter flow controller 20.
Metal agglomeration filter core filter 1 uses metal agglomeration filter core, and material is 304 stainless steels, length 0.5m, diameter For 2cm.
Light component rectifying column 6 is ceramic corrugated filler, and it is 1 to control tower top reflux ratio:1.
Higher boiling components rectifying column 13 is plate column, theoretical cam curve 40, and overhead reflux passes through industrial reflux ratio controller Control, it is 1 to control tower top reflux ratio:1.
Whole removal process is intermittent operation.
Embodiment 2
A kind of recovery method for mixing useless light resistance washing agent, the mixing give up light resistance washing agent as water, tetrafluoropropanol, propane diols Monomethyl ether, cyclohexanone, DMA, the mixture of METHYLPYRROLIDONE, its reclaimed water account for the useless photoresistance of total mixing The 1%~10% of cleaning agent mass percent, is concretely comprised the following steps, and it is clear to mix useless photoresistance using metal agglomeration filter core filter Lotion is filtered, then filtrate is separated into higher boiling components and light component after 135 DEG C of flash distillations, then respectively by higher boiling components and light component One-component is obtained after rectifying.
A kind of retracting device for mixing useless light resistance washing agent, including metal agglomeration filter core filter 1, filtrate buffer tank 2, Flash tank 3, height boiling distillation system and light component distillation system, the charging aperture and filtration feed of metal agglomeration filter core filter 1 Pump 4 is connected by pipeline, and the discharging opening of metal agglomeration filter core filter 1 is connected with the charging aperture of filtrate buffer tank 2, and filtrate is delayed The discharging opening for depositing tank 2 is connected with flash tank feed pump 5 by pipeline, and filtrate is delivered in flash tank 3 by flash tank feed pump 5 Portion, the top of flash tank 3 is light component, and bottom is higher boiling components, and light fraction outlet is connected with light component distillation system, height boiling group Sub-export is connected with higher boiling components distillation system.
Wherein, formation 10cm thick filter cakes on metal agglomeration filter core are circulated in clear liquid mixing super-cell before filtering, The useless light resistance washing agent of residual mixing is removed using nitrogen or the pressure purge of compressed air blowing cleaner 21 after filtering.
Light component distillation system includes light component rectifying column 6, top and the light component rectifying column product of light component rectifying column 6 Receiving tank 7 is connected by the first pipeline 8, and the bottom of light component rectifying column 6 is connected with the first tower reactor reboiler 9 by pipeline, gently The import of component rectifying column 6 is connected with the light fraction outlet of flash tank 3 by pipeline, and a light component is also set up on the connecting pipe Rectifying column inlet control valve 10 controls the feed rate of light component rectifying column.
Light component rectifying column tower top condenser 11 and light component rectifying column top return are also disposed with first pipeline 8 Controller 12.
Higher boiling components distillation system includes higher boiling components rectifying column 13, the top of higher boiling components rectifying column 13 and higher boiling components Rectifying column product receiving tank 14 is connected by second pipe 15, the bottom of higher boiling components rectifying column 13 and the second tower reactor reboiler 16 Connected by pipeline, the import of higher boiling components rectifying column 13 is exported with the higher boiling components of flash tank 3 and is connected by pipeline, the connection A higher boiling components rectifying column inlet control valve 17 is also set up on pipeline and higher boiling components feed pump 18 coordinates control higher boiling components essence Evaporate the feed rate of tower.
Higher boiling components rectifying column tower top condenser 19 and higher boiling components rectifying tower are also disposed with second pipe 15 Push up counter flow controller 20.
Metal agglomeration filter core filter 1 uses metal agglomeration filter core, and material is 316 stainless steels, length 2m, a diameter of 20cm。
Light component rectifying column 6 is ceramic corrugated filler, and it is 10 to control tower top reflux ratio:1.
Higher boiling components rectifying column 13 is plate column, theoretical cam curve 60, and overhead reflux passes through industrial reflux ratio controller Control, it is 10 to control tower top reflux ratio:1.
Whole removal process is intermittent operation.
Embodiment 3
A kind of recovery method for mixing useless light resistance washing agent, the mixing give up light resistance washing agent as water, tetrafluoropropanol, propane diols Monomethyl ether, cyclohexanone, DMA, the mixture of METHYLPYRROLIDONE, its reclaimed water account for the useless photoresistance of total mixing The 1%~10% of cleaning agent mass percent, is concretely comprised the following steps, and it is clear to mix useless photoresistance using metal agglomeration filter core filter Lotion is filtered, then filtrate is separated into higher boiling components and light component after 132 DEG C of flash distillations, then respectively by higher boiling components and light component One-component is obtained after rectifying.
A kind of retracting device for mixing useless light resistance washing agent, including metal agglomeration filter core filter 1, filtrate buffer tank 2, Flash tank 3, height boiling distillation system and light component distillation system, the charging aperture and filtration feed of metal agglomeration filter core filter 1 Pump 4 is connected by pipeline, and the discharging opening of metal agglomeration filter core filter 1 is connected with the charging aperture of filtrate buffer tank 2, and filtrate is delayed The discharging opening for depositing tank 2 is connected with flash tank feed pump 5 by pipeline, and filtrate is delivered in flash tank 3 by flash tank feed pump 5 Portion, the top of flash tank 3 is light component, and bottom is higher boiling components, and light fraction outlet is connected with light component distillation system, height boiling group Sub-export is connected with higher boiling components distillation system.
Wherein, formation 6cm thick filter cakes, mistake on metal agglomeration filter core are circulated in clear liquid mixing super-cell before filtering The useless light resistance washing agent of residual mixing is removed using nitrogen or the pressure purge of compressed air blowing cleaner 21 after filter.
Light component distillation system includes light component rectifying column 6, top and the light component rectifying column product of light component rectifying column 6 Receiving tank 7 is connected by the first pipeline 8, and the bottom of light component rectifying column 6 is connected with the first tower reactor reboiler 9 by pipeline, gently The import of component rectifying column 6 is connected with the light fraction outlet of flash tank 3 by pipeline, and a light component is also set up on the connecting pipe Rectifying column inlet control valve 10 controls the feed rate of light component rectifying column.
Light component rectifying column tower top condenser 11 and light component rectifying column top return are also disposed with first pipeline 8 Controller 12.
Higher boiling components distillation system includes higher boiling components rectifying column 13, the top of higher boiling components rectifying column 13 and higher boiling components Rectifying column product receiving tank 14 is connected by second pipe 15, the bottom of higher boiling components rectifying column 13 and the second tower reactor reboiler 16 Connected by pipeline, the import of higher boiling components rectifying column 13 is exported with the higher boiling components of flash tank 3 and is connected by pipeline, the connection A higher boiling components rectifying column inlet control valve 17 is also set up on pipeline and higher boiling components feed pump 18 coordinates control higher boiling components essence Evaporate the feed rate of tower.
Higher boiling components rectifying column tower top condenser 19 and higher boiling components rectifying tower are also disposed with second pipe 15 Push up counter flow controller 20.
Metal agglomeration filter core filter 1 uses metal agglomeration filter core, and material is 316 stainless steels, length 1m, a diameter of 10cm。
Light component rectifying column 6 is ceramic corrugated filler, and it is 5 to control tower top reflux ratio:1.
Higher boiling components rectifying column 13 is plate column, theoretical cam curve 50, and overhead reflux passes through industrial reflux ratio controller Control, it is 5 to control tower top reflux ratio:1.
Whole removal process is intermittent operation.
The invention is filtered using mixing useless light resistance washing agent as raw material by metal agglomeration filter core filter, enters flash tank point For light component and higher boiling components, enter light component rectifying column respectively and higher boiling components rectifying column obtains one-component.The present invention is directed to The useless light resistance washing agent of mixing, on the premise of product quality and yield is ensured, improves organic efficiency, realizes resource reclaim again Utilize.
It is described above, be only presently preferred embodiments of the present invention, any formal limitation not done to the present invention, it is every according to Any simply modification, the equivalent variations made in technical spirit according to the present invention to above example, each fall within the guarantor of the present invention Within the scope of shield.

Claims (10)

1. a kind of recovery method for mixing useless light resistance washing agent, it is characterised in that will be mixed using metal agglomeration filter core filter Close useless light resistance washing agent filtering, then filtrate be separated into higher boiling components and light component after flash distillation, then respectively by higher boiling components and Light component obtains one-component after rectifying, and described mixing gives up light resistance washing agent as water, tetrafluoropropanol, propane diols list first Ether, cyclohexanone, DMA, the mixture of METHYLPYRROLIDONE, its reclaimed water account for the useless photoresistance cleaning of total mixing The 1%~10% of agent mass percent, the temperature of flash process is 130~135 DEG C.
2. a kind of retracting device for mixing useless light resistance washing agent, it is characterised in that including metal agglomeration filter core filter, filtrate Buffer tank, flash tank, height boiling distillation system and light component distillation system, the charging aperture of described metal agglomeration filter core filter It is connected with filtration feed pump by pipeline, discharging opening is connected with the charging aperture of filtrate buffer tank, and described filtrate buffer tank goes out Material mouth is connected with flash tank feed pump by pipeline, and filtrate is delivered to inside flash tank by described flash tank feed pump, described The top of flash tank be light component, bottom is higher boiling components, and described light fraction outlet is connected with light component distillation system, institute The higher boiling components outlet stated is connected with higher boiling components distillation system.
3. retracting device according to claim 2, it is characterised in that described light component distillation system includes light component essence Tower is evaporated, the top of described light component rectifying column is connected with light component rectifying column product receiving tank by the first pipeline, described The bottom of light component rectifying column is connected with the first tower reactor reboiler by pipeline, the import and flash distillation of described light component rectifying column The light fraction outlet of tank is connected by pipeline, and a light component rectifying column inlet control valve is also set up on the connecting pipe and controls light group Divide the feed rate of rectifying column.
4. retracting device according to claim 3, it is characterised in that be also disposed with light group on the first described pipeline Divide rectifying column tower top condenser and light component rectifying column top return controller.
5. retracting device according to claim 2, it is characterised in that described higher boiling components distillation system includes height boiling group Divide rectifying column, the top of described higher boiling components rectifying column is connected with higher boiling components rectifying column product receiving tank by second pipe Connect, the bottom of described higher boiling components rectifying column is connected with the second tower reactor reboiler by pipeline, described higher boiling components rectifying The import of tower and the higher boiling components outlet of flash tank are connected by pipeline, and a higher boiling components rectifying column is also set up on the connecting pipe Inlet control valve and higher boiling components feed pump coordinate the feed rate of control higher boiling components rectifying column.
6. retracting device according to claim 5, it is characterised in that be also disposed with height boiling on described second pipe Component rectifying column tower top condenser and higher boiling components rectifying column top return controller.
7. retracting device according to claim 2, it is characterised in that described metal agglomeration filter core filter is using gold Belong to sintered filter core, material is 304 stainless steels or 316 stainless steels, and length is 0.5~2m, a diameter of 2~20cm.
8. retracting device according to claim 3, it is characterised in that described light component rectifying column is that ceramic ripple is filled out Material, it is 1~10 to control tower top reflux ratio:1.
9. retracting device according to claim 5, it is characterised in that described higher boiling components rectifying column is plate column, reason It is 40~60 by the number of plates, overhead reflux is controlled by industrial reflux ratio controller, and it is 1~10 to control tower top reflux ratio:1.
10. retracting device according to claim 2, it is characterised in that whole removal process is intermittent operation.
CN201710907144.9A 2017-09-29 2017-09-29 A kind of recovery method and device for mixing useless light resistance washing agent Pending CN107797395A (en)

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CN202822987U (en) * 2012-10-31 2013-03-27 哈尔滨汽轮机厂有限责任公司 Purification system for slot-type solar power generation system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108568131A (en) * 2018-05-13 2018-09-25 四川久远化工技术有限公司 A kind of stripper regenerating unit and regeneration technology
CN108568131B (en) * 2018-05-13 2023-11-28 四川久远化工技术有限公司 Stripping liquid regeneration device and stripping liquid regeneration process

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Application publication date: 20180313