CN107796559B - Vacuum degree detection method of vacuum chamber - Google Patents
Vacuum degree detection method of vacuum chamber Download PDFInfo
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- CN107796559B CN107796559B CN201610800139.3A CN201610800139A CN107796559B CN 107796559 B CN107796559 B CN 107796559B CN 201610800139 A CN201610800139 A CN 201610800139A CN 107796559 B CN107796559 B CN 107796559B
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Abstract
The invention relates to a vacuum degree detection method of a vacuum chamber, wherein two parallel detection electrodes are arranged in the vacuum chamber, and the method comprises the following steps: providing voltage for the two detection electrodes in the vacuum cavity to continuously increase the gap voltage, wherein the gap voltage is the voltage of the preset gap; detecting a first gap voltage when the preset gap generates a field emission current and a second gap voltage when the preset gap breaks down; and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage. Because the preset gap is formed between the two detection electrodes, the gap is smaller, and the required first gap voltage and the second gap voltage are smaller, the vacuum degree can be detected when the vacuum switch is switched on, and the online detection is realized. In addition, the moving contact and the static contact of the arc extinguish chamber do not need to be pulled apart forcibly, and the influence on the normal operation and the service life of the arc extinguish chamber can be avoided.
Description
Technical Field
The invention relates to the technical field of vacuum, in particular to a vacuum degree detection method of a vacuum chamber.
Background
The vacuum circuit breaker can rapidly extinguish electric arc and restrain the current from expanding after cutting off a medium-high voltage power supply due to excellent insulating property in a vacuum state, and the higher the vacuum degree is, the more the capacity of starting current of the vacuum circuit breaker can be ensured.
With the increase of the working time of the vacuum circuit breaker, the vacuum degree is changed due to the problems of opening and closing of the contact, poor sealing and the like, so that the working performance of the vacuum circuit breaker is reduced, and normal work or fault current cannot be cut off in severe cases. The detection of the degree of vacuum is therefore particularly important.
At present, a plurality of methods for measuring the vacuum degree of the vacuum circuit breaker are available, including a shield cover potential method, a photoelectric conversion method, a coupling capacitance method, a cold cathode magnetron discharge method, a post-arc emission current method and the like of a rotary electric field probe. The coupling capacitance method is characterized in that a shielding box is arranged outside a vacuum chamber, the vacuum degree in the vacuum chamber is obtained by monitoring the potential of a shielding cover, and the coupling capacitance method has the advantages of low cost, simplicity in implementation and the like. However, in practical application, the potential of the shield can be affected by the voltage fluctuation of the power grid and the change of the ambient temperature, so that the accuracy of the monitored vacuum degree is low, the reliability is poor, the vacuum degree can be measured only by 10pa, and the requirement of high-precision online monitoring on the vacuum degree of the vacuum chamber cannot be met. The photoelectric conversion method uses an optical element Pockels as a probe, converts the change of an electric field corresponding to the vacuum degree into the change of luminous flux, and then transmits the change of the luminous flux to a low electric field or a detection system through an optical fiber for detection. However, the reliability of the long-term operation of the probe cannot be guaranteed, and temperature difference interference exists, so that the accuracy of the measurement result cannot be guaranteed by the method.
The vacuum degree measurement precision of the post-arc current emission method is high, and the measurement range is large, however, the post-arc current emission method needs to utilize hundreds of amperes of vacuum electric arc to remove the original adsorption layer on the surface of the contact, and obtains a clean surface with zero adsorption capacity, so that the measurement method is difficult to be put into practical use. In addition, the moving contact and the fixed contact of the arc extinguish chamber need to be forcibly pulled apart without applying a magnetic field, so that the normal operation and the service life of the arc extinguish chamber are possibly influenced to a certain extent, and online detection cannot be realized, namely, the vacuum degree detection cannot be carried out when the vacuum switch is switched on.
In addition, most of the existing vacuum degree testers are portable single-machine equipment, the detection process is completed by manual operation, the detection efficiency is low, and the vacuum degree tester is not suitable for the requirements of large-batch and high-efficiency detection.
Disclosure of Invention
Aiming at the defects, the invention provides the vacuum degree detection method of the vacuum chamber, which can detect the vacuum degree when the vacuum switch is switched on and has the feasibility of on-line detection.
In a first aspect, the present invention provides a vacuum degree detection method, in which a moving contact, a fixed contact, and two parallel detection electrodes having a preset gap are disposed in a vacuum chamber of a vacuum chamber, the method including:
providing voltage for the two detection electrodes in the vacuum cavity to continuously increase the gap voltage, wherein the gap voltage is the voltage of the preset gap;
detecting a first gap voltage when the preset gap generates a field emission current and a second gap voltage when the preset gap breaks down;
and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
Optionally, the determining the vacuum degree of the vacuum chamber according to the first gap voltage and the second gap voltage includes:
calculating a ratio of the first gap voltage and the second gap voltage;
and searching the vacuum degree corresponding to the ratio in a predetermined relationship between the vacuum degree and the gap voltage, wherein the vacuum degree is the vacuum degree in the vacuum cavity.
Optionally, before providing the voltage to the two detection electrodes in the vacuum chamber, the method further includes:
and connecting the two detection electrodes in the vacuum cavity with a power supply module outside the vacuum cavity, wherein the power supply module is used for providing voltage for the two detection electrodes.
Optionally, before providing the voltage to the two detection electrodes in the vacuum chamber, the method further includes:
and connecting the two detection electrodes in the vacuum cavity with a detection module outside the vacuum cavity, wherein the detection module is used for detecting the first gap voltage and the second gap voltage and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
Optionally, before providing the voltage to the two detection electrodes in the vacuum chamber, the method further includes:
and connecting the two detection electrodes in the vacuum cavity with a protection module outside the vacuum cavity, wherein the protection module is used for reducing the arc current when the preset gap is broken down.
In the vacuum degree detection method of the vacuum chamber, the voltage is provided for two detection electrodes in the vacuum chamber, the first gap voltage of the field emission current generated by the preset gap and the second gap voltage of the breakdown of the preset gap are detected, and then the vacuum degree in the vacuum chamber is determined according to the two gap voltages. The preset gap is formed between the two detection electrodes, the gap is small and has no relation with a moving contact and a fixed contact in the vacuum cavity, and the required first gap voltage and the second gap voltage are small, so that the vacuum degree can be detected when the vacuum switch is switched on, and online detection is realized.
In a second aspect, the present invention further provides a vacuum degree detection method for a vacuum chamber, in which a moving contact, a fixed contact, a static conductive rod connected to the fixed contact, and a detection electrode parallel to the static conductive rod are disposed in the vacuum chamber of the vacuum chamber, and a preset gap is formed between the static conductive rod and the detection electrode, the method including:
providing voltage for the static conductive rod and the detection electrode in the vacuum cavity to continuously increase the gap voltage, wherein the gap voltage is the voltage of the preset gap;
detecting a first gap voltage when the preset gap generates a field emission current and a second gap voltage when the preset gap breaks down;
and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
Optionally, the determining the vacuum degree of the vacuum chamber according to the first gap voltage and the second gap voltage includes:
calculating a ratio of the first gap voltage and the second gap voltage;
and searching the vacuum degree corresponding to the ratio in a predetermined relationship between the vacuum degree and the gap voltage, wherein the vacuum degree is the vacuum degree in the vacuum cavity.
Optionally, before providing the voltage for the static conductive rod and the detection electrode in the vacuum chamber, the method further includes:
and connecting the static conductive rod and the detection electrode in the vacuum cavity with a power module outside the vacuum cavity, wherein the power module is used for providing voltage for the static conductive rod and the detection electrode.
Optionally, before providing the voltage for the static conductive rod and the detection electrode in the vacuum chamber, the method further includes:
and connecting the static conductive rod and the detection electrode in the vacuum cavity with a detection module outside the vacuum cavity, wherein the detection module is used for detecting a first gap voltage when the preset gap generates field emission current and a second gap voltage when the preset gap breaks down, and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
Optionally, before providing the voltage for the static conductive rod and the detection electrode in the vacuum chamber, the method further includes:
and connecting the two detection electrodes in the vacuum cavity with a protection module outside the vacuum cavity, wherein the protection module is used for reducing the arc current when the preset gap is broken down.
In the vacuum degree detection method of the vacuum chamber, voltage is provided for the static conductive rod and the detection electrode in the vacuum chamber, first gap voltage of field emission current generated by a preset gap and second gap voltage of breakdown are detected, and then the vacuum degree in the vacuum chamber is determined according to the two gap voltages. The preset gap is formed between the static conducting rod and the detection electrode, the gap is small, the gap has no relation with a moving contact and a static contact in the vacuum cavity, and the required first gap voltage and second gap voltage are small, so that the vacuum degree can be detected when the vacuum switch is switched on, and online detection is realized.
Drawings
The characteristic information and advantages of the invention will be more clearly understood by reference to the accompanying drawings, which are schematic and should not be understood as imposing any limitation on the invention, in which:
FIG. 1 is a schematic flow chart illustrating one embodiment of a vacuum degree detection method of a vacuum chamber according to the present invention;
FIG. 2 is a schematic view showing a structure of a vacuum chamber to which the vacuum degree detecting method of the vacuum chamber provided in FIG. 1 is applicable;
FIG. 3 is a schematic flow chart showing another embodiment of the vacuum degree detecting method of the vacuum chamber according to the present invention;
FIG. 4 is a schematic view showing a structure of a vacuum chamber to which the vacuum degree detecting method of the vacuum chamber provided in FIG. 3 is applicable;
description of reference numerals:
101. 101' -a vacuum chamber; 102. 102' -a shield can; 103. 103' -static contact; 104. 104' -moving contact; 105. 105' -a movable conducting rod; 106. 106' -bellows; 107. 107' -static conductive rods; 108. 108' -a detection electrode; 109. 109' -a power module; 110. 110' -a detection module; 111. 111' -protection module.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
The invention provides a vacuum degree detection method of a vacuum chamber, wherein a moving contact, a fixed contact and two parallel detection electrodes with preset gaps are arranged in the vacuum chamber of the vacuum chamber, and as shown in figure 1, the method comprises the following steps:
s1, providing voltage for the two detection electrodes in the vacuum cavity to enable the gap voltage to be continuously increased, wherein the gap voltage is the voltage of the preset gap;
s2, detecting a first gap voltage when the preset gap generates field emission current and a second gap voltage when the preset gap breaks down;
and S3, determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
The invention provides a vacuum degree detection method of a vacuum chamber, which provides voltage for two detection electrodes in the vacuum chamber, detects a first gap voltage of a preset gap generating field emission current and a second gap voltage of the preset gap when breakdown occurs, and then determines the vacuum degree in the vacuum chamber according to the two gap voltages. The preset gap is formed between the two detection electrodes, the gap is small and has no relation with a moving contact and a fixed contact in the vacuum cavity, and the required first gap voltage and the second gap voltage are small, so that the vacuum degree can be detected when the vacuum switch is switched on, and online detection is realized. In addition, the moving contact and the static contact of the arc extinguish chamber do not need to be pulled apart forcibly, and the influence on the normal operation and the service life of the arc extinguish chamber can be avoided.
Further, compared with the coupling capacitance method in the prior art, the vacuum degree detection method does not need to arrange a shielding box outside the vacuum chamber, so that the influence of the shielding box on detection due to power grid voltage fluctuation, environmental temperature change and other factors can be avoided, and the detection accuracy is improved. Compared with the photoelectric conversion method in the prior art, the method has the advantages that the reliability of long-term operation is improved due to the fact that the detection electrode has higher reliability relative to the probe in long-term operation, and the detection accuracy is higher compared with the method because the influence of temperature difference on the occurrence of field emission current and breakdown of the preset gap is very small. In addition, the detection method provided by the invention can be carried out on line or off line, improves the detection efficiency and is suitable for the detection requirements of large batch and high efficiency.
In a specific implementation, the determining the vacuum degree of the vacuum chamber according to the first gap voltage and the second gap voltage includes:
calculating a ratio of the first gap voltage and the second gap voltage;
and searching the vacuum degree corresponding to the ratio in a predetermined relationship between the vacuum degree and the gap voltage, wherein the vacuum degree is the vacuum degree in the vacuum cavity.
The vacuum degree is determined in a searching mode, and the method is convenient and simple.
In a specific implementation, before providing the voltage to the two detection electrodes in the vacuum chamber, the method further includes: and connecting the two detection electrodes in the vacuum cavity with a power supply module outside the vacuum cavity, wherein the power supply module is used for providing voltage for the two detection electrodes.
The power supply module can be a power frequency voltage source or a direct current pulse voltage source.
In a specific implementation, before providing the voltage to the two detection electrodes in the vacuum chamber, the method further includes: and connecting the two detection electrodes in the vacuum cavity with a detection module outside the vacuum cavity, wherein the detection module is used for detecting the first gap voltage and the second gap voltage and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
In a specific implementation, before providing the voltage to the two detection electrodes in the vacuum chamber, the method further includes: the two detection electrodes in the vacuum cavity are connected with a protection module outside the vacuum cavity, and the protection module is used for reducing the arc current when the preset gap is broken down, so that the breakdown time can be shortened, the detection electrodes are protected, and the service life is prolonged.
Fig. 2 is a schematic structural diagram of a vacuum chamber to which the above detection method can be applied, the vacuum chamber includes a vacuum chamber 101, and the vacuum chamber further includes a fixed contact 103, a movable contact 104, a fixed conductive rod 107, and a movable conductive rod 105 disposed in the vacuum chamber, where:
the fixed contact 103 and the movable contact 104 are arranged in parallel, the fixed contact 103 is connected with the fixed conductive rod 107, the movable contact 104 is connected with the movable conductive rod 105, and both the fixed conductive rod 107 and the movable conductive rod 105 extend out of the vacuum chamber 101;
a bellows 106 can be sleeved on the movable conducting rod 105 in the vacuum cavity, and the bellows 106 is used for sealing between the movable conducting rod and the inner wall of the vacuum cavity;
the vacuum chamber also comprises a shielding cover 102 which is arranged in the vacuum chamber and surrounds the fixed contact and the movable contact;
the vacuum chamber also comprises a power supply module 109, a detection module 110, two detection electrodes 108 arranged in parallel and a protection module 111;
the two detection electrodes 108 are arranged inside the vacuum chamber 101;
the power module 109 is disposed outside the vacuum chamber 101, connected to the two detection electrodes 108, and configured to provide a voltage to the two detection electrodes 108 and continuously increase the voltage between the two detection electrodes 108;
the detection module 110 is disposed outside the vacuum chamber 101, connected to the two detection electrodes 108, and configured to detect a first gap voltage when a field emission current is generated in a preset gap and a second gap voltage when a breakdown occurs in the preset gap, and determine a vacuum degree of the vacuum chamber 101 according to the first gap voltage and the second gap voltage.
Wherein the predetermined gap is less than 0.5mm, so that field emission current and breakdown can occur at a small voltage.
The two detection electrodes 108 may be made of, but not limited to, copper-chromium alloy.
The voltage applied to the detection electrode 108 by the power module 109 may be a power frequency voltage source or a direct current pulse voltage source, and the output amplitude is adjustable.
It should be understood that the present invention is described herein by taking the vacuum chamber in fig. 2 as an example, but in actual practice, the vacuum chamber to which the present invention is applied does not necessarily have the parts such as the static conductive rod 107, the dynamic conductive rod 105, the shield case 102, and the bellows 106 shown in fig. 2.
As shown in fig. 3, the present invention provides a vacuum degree detection method for a vacuum chamber, in which a moving contact, a fixed contact, a static conductive rod connected to the fixed contact, and a detection electrode parallel to the static conductive rod are disposed in the vacuum chamber of the vacuum chamber, and a preset gap is formed between the static conductive rod and the detection electrode, the method includes:
s1', providing voltage for the static conductive rod and the detection electrode in the vacuum cavity, and continuously increasing the gap voltage, wherein the gap voltage is the voltage of the preset gap;
s2', detecting a first gap voltage when the preset gap generates field emission current and a second gap voltage when the preset gap breaks down;
s3', determining a degree of vacuum of the vacuum chamber based on the first gap voltage and the second gap voltage.
In the vacuum degree detection method of the vacuum chamber, provided by the invention, voltage is provided for the static conductive rod and the detection electrode in the vacuum chamber, the first gap voltage of field emission current generated by the preset electrode and the second gap voltage generated during breakdown are detected, and then the vacuum degree in the vacuum chamber is determined according to the two gap voltages. The preset gap is formed between the static conducting rod and the detection electrode, the gap is small, the gap has no relation with a moving contact and a static contact in the vacuum cavity, and the required first gap voltage and second gap voltage are small, so that the vacuum degree can be detected when the vacuum switch is switched on, and online detection is realized. In addition, the moving contact and the static contact of the arc extinguish chamber do not need to be pulled apart forcibly, and the influence on the normal operation and the service life of the arc extinguish chamber can be avoided.
Further, compared with the coupling capacitance method in the prior art, the vacuum degree detection method does not need to arrange a shielding box outside the vacuum chamber, so that the influence of the shielding box on detection due to power grid voltage fluctuation, environmental temperature change and other factors can be avoided, and the detection accuracy is improved. Compared with the photoelectric conversion method in the prior art, the method has the advantages that the reliability of long-term operation is improved due to the fact that the detection electrode has higher reliability relative to the probe in long-term operation, and the detection accuracy is higher compared with the method because the influence of temperature difference on the occurrence of field emission current and breakdown of the preset gap is very small. In addition, the detection method provided by the invention can be carried out on line or off line, can realize the automation of detection, improves the detection efficiency and is suitable for the detection requirements of large batch and high efficiency.
In a specific implementation, the determining the vacuum degree of the vacuum chamber according to the first gap voltage and the second gap voltage includes:
calculating a ratio of the first gap voltage and the second gap voltage;
and searching the vacuum degree corresponding to the ratio in a predetermined relationship between the vacuum degree and the gap voltage, wherein the vacuum degree is the vacuum degree in the vacuum cavity.
The vacuum degree is determined in a searching mode, and the method is convenient and simple.
In practical implementation, before providing the voltage for the static conductive rod and the detection electrode in the vacuum chamber, the method further includes: and connecting the static conductive rod and the detection electrode in the vacuum cavity with a power module outside the vacuum cavity, wherein the power module is used for providing voltage for the static conductive rod and the detection electrode.
In specific implementation, the power supply module is a power frequency voltage source or a direct current pulse voltage source.
In practical implementation, before providing the voltage for the static conductive rod and the detection electrode in the vacuum chamber, the method further includes: and connecting the static conductive rod and the detection electrode in the vacuum cavity with a detection module outside the vacuum cavity, wherein the detection module is used for detecting a first gap voltage when the preset gap generates field emission current and a second gap voltage when the preset gap breaks down, and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
In practical implementation, before providing the voltage for the static conductive rod and the detection electrode in the vacuum chamber, the method further includes: and connecting the static conductive rod and the detection electrode in the vacuum cavity with a protection module outside the vacuum cavity, wherein the protection module is used for reducing the arc current when the preset gap is broken down.
Fig. 4 is a schematic structural diagram of a vacuum chamber to which the above detection method can be applied, the vacuum chamber including: the vacuum chamber 101 'further comprises a fixed contact 103', a movable contact 104 'and a movable conductive rod 105' arranged in the vacuum chamber, wherein:
the fixed contact 103 ' and the movable contact 104 ' are arranged in parallel, the fixed contact 103 ' is connected with the fixed conductive rod 107 ', the movable contact 104 ' is connected with the movable conductive rod 105 ', and both the fixed conductive rod 107 ' and the movable conductive rod 105 ' extend out of the vacuum chamber 101 ';
a bellows 106 can be sleeved on the movable conducting rod 105' in the vacuum cavity, and the bellows 106 is used for sealing between the movable conducting rod and the inner wall of the vacuum cavity;
the vacuum chamber also comprises a shielding cover 102' which is arranged in the vacuum chamber and surrounds the fixed contact and the movable contact;
the vacuum chamber further comprises a power module 109 ', a detection module 110 ', a static conductive rod 107 ', a detection electrode 108 ' and a protection module 111 ';
a static conductive rod 107 ' and a detection electrode 108 ' are disposed inside the vacuum chamber 101 '; the power module 109 'is disposed outside the vacuum chamber 101' and connected to the static conductive rod 107 'and the detection electrode 108' for providing a voltage to the static conductive rod 107 'and the detection electrode 108' and continuously increasing the voltage of the preset gap;
the detection module 110 ' is disposed outside the vacuum chamber 101 ', is connected to the static conductive rod 107 ' and the detection electrode 108 ', and is configured to detect a first gap voltage when a preset gap generates a field emission current and a second gap voltage when a breakdown occurs, and determine a vacuum degree of the vacuum chamber 101 ' according to the first gap voltage and the second gap voltage.
Wherein the gap between the static conductive rod 107 'and the detection electrode 108' in the vacuum chamber is less than 0.5mm, so that the field emission current and the breakdown can occur under a small voltage.
The material of the detecting electrode 108' may be, but is not limited to, copper-chromium alloy.
The voltage applied to the static conductive rod 107 ' and the detection electrode 108 ' by the power module 109 ' may be a power frequency voltage source or a direct current pulse voltage source, and the output amplitude is adjustable.
It should be understood that the present invention is described herein by taking the vacuum chamber in fig. 4 as an example, but in actual use, the vacuum chamber to which the present invention is applied does not necessarily have the movable conductive rod 105 ', the shield case 102', the bellows 106, and the like shown in fig. 4.
The difference between the detection method shown in fig. 1 and the detection method shown in fig. 3 is that the method in fig. 1 is applied to a vacuum chamber having two detection electrodes, while the method in fig. 3 is applied to a vacuum chamber having one detection electrode, and since only one detection electrode is provided in the vacuum chamber, the possibility of gas leakage is reduced and the service life of the vacuum chamber is prolonged compared to a vacuum chamber provided with two detection electrodes.
Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope defined by the appended claims.
Claims (8)
1. A vacuum degree detection method of a vacuum chamber is characterized in that a movable contact, a fixed contact and two parallel detection electrodes with preset gaps are arranged in the vacuum chamber of the vacuum chamber, and the method comprises the following steps:
providing voltage for the two detection electrodes in the vacuum cavity to continuously increase the gap voltage, wherein the gap voltage is the voltage of the preset gap;
detecting a first gap voltage when the preset gap generates a field emission current and a second gap voltage when the preset gap breaks down;
determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage;
wherein the determining the vacuum degree of the vacuum chamber from the first gap voltage and the second gap voltage comprises:
calculating a ratio of the first gap voltage and the second gap voltage;
and searching the vacuum degree corresponding to the ratio in a predetermined relationship between the vacuum degree and the gap voltage, wherein the vacuum degree is the vacuum degree in the vacuum cavity.
2. The method of claim 1, further comprising, prior to providing voltages to two sensing electrodes within the vacuum chamber:
and connecting the two detection electrodes in the vacuum cavity with a power supply module outside the vacuum cavity, wherein the power supply module is used for providing voltage for the two detection electrodes.
3. The method of claim 1, further comprising, prior to providing voltages to two sensing electrodes within the vacuum chamber:
and connecting the two detection electrodes in the vacuum cavity with a detection module outside the vacuum cavity, wherein the detection module is used for detecting the first gap voltage and the second gap voltage and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
4. The method of claim 1, further comprising, prior to providing voltages to two sensing electrodes within the vacuum chamber:
and connecting the two detection electrodes in the vacuum cavity with a protection module outside the vacuum cavity, wherein the protection module is used for reducing the arc current when the preset gap is broken down.
5. A vacuum degree detection method of a vacuum chamber is characterized in that a movable contact, a fixed contact, a static conductive rod connected with the fixed contact and a detection electrode parallel to the static conductive rod are arranged in the vacuum chamber of the vacuum chamber, a preset gap is formed between the static conductive rod and the detection electrode, and the method comprises the following steps:
providing voltage for the static conductive rod and the detection electrode in the vacuum cavity to continuously increase the gap voltage, wherein the gap voltage is the voltage of the preset gap;
detecting a first gap voltage when the preset gap generates a field emission current and a second gap voltage when the preset gap breaks down;
determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage;
wherein the determining the vacuum degree of the vacuum chamber from the first gap voltage and the second gap voltage comprises:
calculating a ratio of the first gap voltage and the second gap voltage;
and searching the vacuum degree corresponding to the ratio in a predetermined relationship between the vacuum degree and the gap voltage, wherein the vacuum degree is the vacuum degree in the vacuum cavity.
6. The method of claim 5, further comprising, prior to providing voltages to the static conductive rods and the sensing electrodes within the vacuum chamber:
and connecting the static conductive rod and the detection electrode in the vacuum cavity with a power module outside the vacuum cavity, wherein the power module is used for providing voltage for the static conductive rod and the detection electrode.
7. The method of claim 5, further comprising, prior to providing voltages to the static conductive rods and the sensing electrodes within the vacuum chamber:
and connecting the static conductive rod and the detection electrode in the vacuum cavity with a detection module outside the vacuum cavity, wherein the detection module is used for detecting a first gap voltage when the preset gap generates field emission current and a second gap voltage when the preset gap breaks down, and determining the vacuum degree of the vacuum cavity according to the first gap voltage and the second gap voltage.
8. The method of claim 5, further comprising, prior to providing voltages to the static conductive rods and the sensing electrodes within the vacuum chamber:
and connecting the static conductive rod and the detection electrode in the vacuum cavity with a protection module outside the vacuum cavity, wherein the protection module is used for reducing the arc current when the preset gap is broken down.
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| FR2679653B1 (en) * | 1991-07-23 | 1993-09-24 | Commissariat Energie Atomique | IONIZATION VACUMETER. |
| JPH076671A (en) * | 1993-06-15 | 1995-01-10 | Toshiba Corp | Contact material and manufacture thereof for vacuum valve |
| JPH1031942A (en) * | 1996-07-17 | 1998-02-03 | Toshiba Corp | Contact material for vacuum circuit-breaker and its manufacture |
| CN1125978C (en) * | 2001-02-28 | 2003-10-29 | 清华大学 | In-line detection method for vacuum level of discharge-type vacuum arc-quenching chamber |
| CN1321465C (en) * | 2002-10-15 | 2007-06-13 | 中国科学技术大学 | Coulomb island style rectifying monomolecular diode and preparation thereof |
| US8890019B2 (en) * | 2011-02-05 | 2014-11-18 | Roger Webster Faulkner | Commutating circuit breaker |
| US8575509B2 (en) * | 2011-09-27 | 2013-11-05 | Eaton Corporation | Vacuum switching apparatus including first and second movable contact assemblies, and vacuum electrical switching apparatus including the same |
| CN102937622B (en) * | 2012-11-20 | 2015-06-17 | 复旦大学 | Tandem mass spectrometry analysis method performed in ion traps |
| CN103346039B (en) * | 2013-07-12 | 2015-07-08 | 华北电力大学 | Method for electrically detecting vacuum degree of vacuum circuit breaker through breakdown of auxiliary electrode |
| CN103606483B (en) * | 2013-11-23 | 2015-07-15 | 浙江紫光电器有限公司 | Vacuum degree monitoring device for high voltage vacuum circuit breaker arc extinguish chamber |
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