CN107795708A - Seal vacuum pump isolating valve - Google Patents
Seal vacuum pump isolating valve Download PDFInfo
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- CN107795708A CN107795708A CN201710647670.6A CN201710647670A CN107795708A CN 107795708 A CN107795708 A CN 107795708A CN 201710647670 A CN201710647670 A CN 201710647670A CN 107795708 A CN107795708 A CN 107795708A
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- piston
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/42—Actuating devices; Operating means; Releasing devices actuated by fluid by means of electrically-actuated members in the supply or discharge conduits of the fluid motor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Compressor (AREA)
- Details Of Valves (AREA)
Abstract
The present invention discloses a kind of seal vacuum pump isolating valve.Vavuum pump isolation VPI valves are placed between vavuum pump and vacuum chamber.During vavuum pump normal operating, VPI valves are opened, so as to allow the fluid communication between vavuum pump and vacuum chamber.When vavuum pump for example becomes inoperable due to power-off, VPI valves are closed, so as to which vacuum chamber be isolated with vavuum pump.The closing of VPI valves is driven by the pressure at expulsion of vavuum pump.VPI valves are exposed to due to the opening of guide valve under pressure at expulsion, and the opening of the guide valve can occur because vavuum pump stops operation.By the construction, VPI valves seal and its operation is without surrounding air.
Description
Technical field
The present invention relates generally to a kind of isolating valve, the isolating valve in the case where vavuum pump shuts down with vavuum pump one
Rise using to protect the vacuum system of association.More particularly it relates to driven and closed by the gas pressure inside vavuum pump
The isolating valve closed.
Background technology
Various systems include needing in (very low, the subatmospheric) level of high vacuum (for example, less than 10-3Torr grasped under)
One or more interior chamber of work.These systems for example including spectrometric system, leakage testing system, microscope (such as electricity
Sub- microscope) system, microfabrication (such as vacuum moulding machine) system etc..The inner vacuum vessel of these systems is by one or more true
Empty pumping vacuum.For example, vacuum system can include " slightly taking out " pump or " prime " pump, these pumps are configured to drop vacuum system
As little as black vacuum degree, such as it is down to about 10-3Torr.Vacuum system can also include one or more high-vacuum pumps, these Gao Zhen
Empty pump is configured to make vacuum system be further reduced to condition of high vacuum degree.In such systems, roughing vacuum pump is used as the first of vavuum pump
Level and another grade of the operation that the high vacuum implemented by high-vacuum pump may be needed to evacuate.
Vacuum system can include vavuum pump isolation (VPI) valve, and the valve is configured to automatic in the case where fore pump powers off
The part of high vacuum system is isolated with high pressure (such as environmental pressure or atmospheric pressure) and protects the part of high vacuum system to exempt from
Influenceed by high pressure, then only reopened after fore pump is restarted and produce enough vacuum, the vacuum is for height
It is safe for the further operation of the part of vacuum system.If for example, high-vacuum pump of such as turbomolecular pump etc
In full-speed operation under about more than 200mTorr pressure, it will be corrupted to and be difficult to repair.Generally, VPI valves and prime
Pump is separated and is connected with environment (that is, the remainder of environment and vacuum system outside fore pump).Therefore, using routine
The system that VPI valves cause non-tight.
Fig. 1 is the schematic diagram using the example of the vacuum system 100 of conventional VPI valves 114.Vacuum system 100 includes prime
Pump 118, the fore pump connect via VPI valves with the high vacuum level 122 of vacuum system 100.Fore pump 118 is typically mechanical pump,
Such as vortex pump, rotating vane pump, membrane pump, Roots blower (positive displacement valve (positive displacement lobe))
Deng.High vacuum level 122 includes the one or more vacuum chambers 126 connected with fore pump 118, that is, the inner space to be vacuumized.
High vacuum level 122 also includes one or more high-vacuum pumps 130 (for example, turbomolecular pump, sputter ion pump etc.), the high vacuum
Pump is configured to (or multiple) vacuum chamber 126 being evacuated to more than only by the vacuum of 118 achievable vacuum of fore pump
Degree.During the normal operating of vacuum system 110, VPI valves 114 are opened, i.e. are provided from high vacuum level 122 to fore pump 118
The unrestricted working air current path of entrance 134.114 usual moveable piston of VPI valves, the piston is in vacuum system 100
(lifting) is opened during normal operating.The gas that fore pump 118 is exported at 138 is discharged into exhaust line 142.
Vacuum system 100 also include providing between environment and VPI valves 114 (specifically, environment and VPI valve pistons and
Between the relative side in working air current path, the working air current path is between high vacuum level 122 and fore pump 118) choosing
Another valve of selecting property connection, such as magnetic valve 146.Magnetic valve 146 need electric power be positively retained in by VPI valves 114 with
The closed mode being environmentally isolated, in the sense that, magnetic valve 146 are typically normally open valve.Can using identical power supply come to
Magnetic valve 146 and fore pump 118 are powered.During the normal operating of vacuum system 100, magnetic valve 146 is closed.If however,
Fore pump 118 is powered off, then magnetic valve 146 is opened, so as to allow surrounding air 150 to flow into VPI valves 114.Due to fore pump 118
Shut down, the final pressure difference at the piston both ends of VPI valves 114 forces piston in place, so as to close high vacuum level 122 and fore pump
Working air current path between 118 and high vacuum level 122 is isolated with caused elevated pressures.
The more specifically example of above-mentioned VPI constructions is described in United States Patent (USP) No.4,785,851.
From the foregoing, it will be seen that because isolation/protection stage of operation needs to be exposed in environment, vacuum system 100
Conventional configurations are non-tights.However, it is unfavorable many applications to exist under environment, such as need to make helium or some
The application of chemicals recycling, in this application, air should not enter into the system and working gas should not leave the system.Cause
This is, it is necessary to the vacuum system of the VPI valves using sealing.
The content of the invention
In order to solve, those skilled in the art may have been observed all or part of above mentioned problem and/or other are asked
Topic, present disclose provides method, process, system, device, instrument and/or device, as in following embodiments by example
Described by mode.
According to one embodiment, vavuum pump isolation (VPI) valve includes：Pump intake housing, it surrounds inlet internal；Valve member
Part, it is arranged on inlet internal, and valve components are configured to switch between the open mode of VPI valves and the closed mode of VPI valves
And it is configured to be switched to closed mode in response to pressure, wherein, in the on-state, valve components allow intraoral via entering
Flow of fluid of the portion between vavuum pump and vacuum chamber, and in the closed state, valve components are prevented in vavuum pump and vacuum chamber
Between flow of fluid；And guide valve, it is configured to inlet internal with the exhaust gas inside pipeline of vavuum pump being connected, and is oriented to
Valve can switch opening to be oriented between valve position and closing guiding valve position, wherein, valve position is oriented to opening, guide valve is permitted
Perhaps exhaust from exhaust gas inside pipeline applies the pressure that valve components are effectively switched to closed mode to valve components, and
Close and be oriented to valve position, guide valve prevents the exhaust flowing from exhaust gas inside pipeline to valve components.
According to another embodiment, vavuum pump includes：According to the VPI valves of any embodiment disclosed herein；The pump housing, its
In, exhaust gas inside pipeline is arranged in the pump housing；First exhaust feed-line, it is internally provided between exhaust line and guide valve
It is in fluid communication；And second exhaust feed-line, it provides fluid communication between guide valve and control chamber volume.
According to another embodiment, vacuum insulation (VPI) valve includes：Valve seat, it is arranged in inlet internal；Piston, its
It is arranged in inlet internal, piston can move opening between piston mode and closure piston state, wherein, opening piston
Under state, piston allows the flow of fluid via inlet internal between vavuum pump and vacuum chamber, and in closure piston state
Under, piston that contacts the valve seating simultaneously prevents the flow of fluid between vavuum pump and vacuum chamber；Chamber volume is controlled, it is arranged on inlet internal
In and at least partly defined by piston, wherein, the volume of the mobile change of piston control chamber volume；And guide valve, it is constructed
It is connected into the exhaust gas inside pipeline with control chamber volume and vavuum pump, guide valve can be oriented to valve position in opening and closing is led
Switch between valve position, wherein, valve position is oriented to opening, guide valve allows the exhaust from exhaust gas inside pipeline to control
Chamber volume is forced into the pressure for effectively making piston be moved to closure piston state, and is oriented to valve position, guide valve closing
Prevent the exhaust flowing from exhaust gas inside pipeline to control chamber volume.
According to another embodiment, vavuum pump includes：According to the VPI valves of any embodiment disclosed herein；The pump housing, its
In, exhaust gas inside pipeline is arranged in the pump housing；First exhaust feed-line, it is internally provided between exhaust line and guide valve
It is in fluid communication；With second exhaust feed-line, it provides fluid communication between guide valve and inlet internal.
According to another embodiment, vacuum system includes：Vavuum pump, it includes exhaust gas inside pipeline；Vacuum chamber；With according to this
The VPI valves of any embodiment disclosed in text.
Vavuum pump can include pump stage, and it is arranged in the pump housing and is connected with inlet internal and exhaust gas inside pipeline
It is logical.Pump stage can include one or more static pumping elements and movable pumping element.Motor (the example of vavuum pump can be passed through
Such as, motor) drive mobile (or multiple) pumping element of (excitation).In certain embodiments, vavuum pump is to be vortexed
Pump.Vortex pump can have vortex pump stage.As understood by those skilled in the art, vortex pump stage can include static whirlpool
Capstan and the orbiting scroll disk that can be driven to carry out track motion relative to stationary scroll disk.
By checking the following drawings and detailed description, other devices of the invention, equipment, system, method, feature and advantage
It will be or will become to those skilled in the art apparent.All these spare systems, method, feature and advantage are intended to
It is contained in this specification, falls within the scope of the present invention and protected by appended claims.
Brief description of the drawings
The present invention may be better understood by reference to the following drawings.Part in accompanying drawing is not drawn necessarily to scale, and
It is to focus in the principle of the explanation present invention.In the accompanying drawings, identical reference represents the corresponding portion in different views
Point.
Fig. 1 is the schematic diagram using the example of the vacuum system of conventional vavuum pump isolation (VPI) valve.
Fig. 2 is the schematic diagram according to the example of the vacuum system of presently disclosed embodiment.
Fig. 3 A be according to the partial cross-sectional perspective view of the example of a part for the vavuum pump of presently disclosed embodiment, its
Show the VPI valves of vavuum pump in an open position.
Fig. 3 B are analogous to Fig. 3 A view but show the broken section of the vavuum pump of VPI valves in the closed position
Stereogram.
Fig. 4 is the side elevation in partial section of the vavuum pump shown in Fig. 3 A and Fig. 3 B.
Fig. 5 is the broken section top view of the vavuum pump shown in Fig. 3 A, Fig. 3 B and Fig. 4, wherein VPI valves and vavuum pump
Related pump intake is removed.
Embodiment
(that is, it can be flowed in a vacuum tight manner as it is used herein, term " vacuum chamber " includes room as described below
The closing space of body sealing)：The room is in fluid communication as a part for vavuum pump disclosed herein or with the vavuum pump.Root
Background or stage according to operation, due to being operated to vavuum pump (i.e. vacuum chamber has been evacuated), " vacuum chamber " is in vacuum
(for example, in as little as 10 under pressure-9Under below Torr sub-atmospheric pressure), either due to the part as vavuum pump or with
Vavuum pump is in fluid communication, and " vacuum chamber " can at least be evacuated to vacuum pressure.Generally, according to application, vacuum chamber can be profit
With the one of any device or system (scientific instrument or manufacture instrument etc.) for evacuating region, or these devices or system
Part.The example of scientific instrument includes but is not limited to：Mass spectrograph, ionic migration spectrometer, gas leakdetector and electron microscopic
Mirror.The example of manufacture instrument includes but is not limited to：Using vacuumize reative cell manufacture the instrument of the part for microelectronics,
MEMS (MEMS), microfluid etc..Such manufacture instrument can for example utilize understood by one of ordinary skill in the art relate to
And the technology of vacuum moulding machine, plasma generation, electron beam generation, molecular beam generation, ion implanting etc..
Fig. 2 is the schematic diagram according to the example of the vacuum system 200 of presently disclosed embodiment.Vacuum system 200 is wrapped
Include at least one vavuum pump.In the present embodiment, vacuum system 200 includes fore pump 218.Fore pump 218 include vavuum pump every
From valve (VPI) valve 214, the pump intake 234 being connected via VPI valves 214 with the high vacuum level 222 of vacuum system 200 and by gas
Body is discharged into the pump discharge 238 in main exhaust pipeline 242.Fore pump 218 can be mechanical pump as described above.High vacuum level
222 one or more vacuum chambers 226 including being connected with fore pump 218.High vacuum level 222 can also include as described above
One or more high-vacuum pumps 230.The fluid that fore pump 218 also includes providing between main exhaust pipeline 242 and guide valve 246 connects
Logical first exhaust feed-line or port 254 and provide second of the fluid communication between guide valve 246 and VPI valves 214
Exhaust air feed line or port 258.For illustrative purposes, VPI valves 214 and exhaust air feed line 254 and 258 and fore pump
218 dividually schematically show.However, in certain embodiments, main structure or the housing one of VPI valves 214 and fore pump 218
Ground forms or positioned at the main structure or the inside of housing.Exhaust air feed line 254 and 258 can also be with the master of fore pump 218
Structure or housing are integrally formed or positioned at the main structure or the inside of shell.In other embodiments, first exhaust conveys
The all or part of pipeline 254 and guide valve 246 can be arranged on the main structure of fore pump 218 or the outside of housing.
Generally, guide valve 246 can be any kind of valve that can be actuated to open mode and closed mode.In allusion quotation
In the nonexcludability embodiment of type, guide valve 246 is configured to normally open valve, i.e. guide valve 246 needs electric power to be positively retained in
Closed mode.As an example, guide valve 246 can be electromagnetic actuating valve.Identical power supply can be utilized (for example, 24V is electric
Source) come to the power supply of both guide valve 246 and fore pump 218.
The example of operation vacuum system 200 will now be described.In this example, it is true to include offer first for vacuum system 200
Both the fore pump 218 of empty pump stage and at least one high-vacuum pump 230 of at least one extra vacuum pumping level of offer.
Since being closed fore pump 218, the interior zone (fore pump 218 and vacuum chamber 226 etc.) of vacuum system 200
Under atmospheric pressure, and VPI valves 214 are opened.VPI valves 214 generally include the movable valve element of such as piston etc, its
Opening can be biased under the action of the spring and (lifts) position, as described further below.Now, normally opened guide valve 246
And open.When subsequent fore pump 218 starts, powered to guide valve 246, (for example, by being powered to solenoid)
Guide valve 246 is closed, so as to which discharge/discharge side of VPI valves 214 and fore pump 218 be isolated.Now, VPI valves 214 are kept
Open.When fore pump 218 operates, vacuum starts to be formed in high vacuum level 222.The subsequent operation of high-vacuum pump 230 makes very
Sky reaches the level needed for the desired use of vacuum chamber 226.
If subsequent fore pump 218 powers off, such as is turned or switched off due to power failure or power failure, then guide valve 246
Open.For example, in the case of based on solenoidal guide valve, guide valve 246 equally powers off, and thus solenoid powers off so that
Guide valve 246 is moved to its normally open position.In the case where guide valve 246 is opened, the side of VPI valves 214 is now via first
Exhaust air feed line 254, guide valve 246 and second exhaust feed-line 258 are under the pressure of exhaust.Pressure at expulsion is for example
It may be at or close to atmospheric pressure, but under any circumstance all far above the pressure in the evacuation region of the opposite side of VPI valves 214
Power.As a result, the pressure difference for being enough to close VPI valves 214 is produced at the both ends of VPI valves 214.For example, as further described herein, VPI
Valve 214 can include spring biased piston, and pressure at expulsion forces the bias force of piston resistance spring and in place.VPI valves 214 can
To be configured to the quick closedown (for example, several milliseconds) when guide valve 246 is opened.The closing of VPI valves 214 causes high vacuum level 222
Working air current path (line 262 and 266 in Fig. 2) between fore pump 218 is closed.By this way, high vacuum level is kept
High-level vacuum in 222, until fore pump 218 operates again.
When fore pump 218 restarts, guide valve 246 is again switched off.Exhaust is removed and inhaled at VPI valves 214
Enter into the pump intake 234 of fore pump 218.When the pressure in VPI valves 214 becomes sufficiently low, VPI valves 214 are opened, so that will
High vacuum level 222 couples again with fore pump 218.
Closed from the above, it can be seen that VPI valves 214 are driven by internal mechanism (i.e. the pressure of the exhaust stream of internal path).
Surrounding air is not utilized and does not enter vacuum system 200.Therefore, fore pump 218 provides the sealing for vavuum pump isolation
Solution.
Fig. 3 A are the broken section solids according to the example of a part for the vavuum pump 318 including VPI valves 314 of embodiment
Figure.Vavuum pump 318 and VPI valves 314 could be arranged to a part for vacuum system.Therefore, as an example, vavuum pump 318 and VPI
Valve 314 can correspond to the fore pump 218 and VPI valves 214 of the vacuum system 200 shown in above-mentioned and Fig. 2.
Vavuum pump 318 generally includes to surround inside pump 324 pump housing 320.Static pumping element and motion pumping element are (not
Show) it is arranged in pump inside 324.Pumping element (such as scroll plate, blade, valve (lobe) etc.) depends on vavuum pump 318
Specific embodiment.Vavuum pump 318 includes pump intake 334.In the present embodiment, pump intake 334 is by pump intake housing (or pump intake
Flange) 336 limit, the pump intake housing is connected to the pump housing 320 in a vacuum tight manner.Pump intake housing 336 is configured to flow
Body is connected to vacuum system (high vacuum level as described above), as shown in arrow 322 in Fig. 3.Pump intake housing 336 includes being pumped into
Mouth port 340, VPI valves 314 are located in the pump inlet port 340.VPI valves 314 are positioned such that pump intake 334 according to VPI
The state of valve 314 optionally provides the fluid inside pump between 324 and the remainder of vacuum system (high vacuum level) 322
Connection.
Fig. 3 A show the VPI valves 314 in open mode.In the on-state, VPI valves 314 allow gas freely (by
In the operation of the pumping element of vavuum pump 318) from the inflow pump intake 334 of vacuum system 322, and via pump inlet port 340
324 inside into pump, as indicated by arrow 344.Therefore, VPI valves 314 can include movable member, the movable member can
Moved in the open position corresponding to open mode and corresponding between the closed position of closed mode.The closing of movable member
The closed mode of position and VPI valves 314 is shown in figure 3b, as further described below.
In the present embodiment, VPI valves 314 include the movable member of the form of piston 348.Piston 348 can be in open position
Put (in terms of Fig. 3 A visual angle, in vertical direction) mobile as the crow flies between (Fig. 3 A) and closed position (Fig. 3 B).Piston 348
Rectilinear movement or translation can be guided by piston guide part 352.In the present embodiment, piston guide part 352 is steady pin
Form, the steady pin extend on piston moving direction and extended in the centre bore of piston 348.Piston 348 can close
Biased in the presence of suitable spring 356 towards shown open position, the spring is around piston 348 and by one of piston 348
Or the inner surface of multiple outer surfaces and pump intake housing 336 is kept.In addition, in the present embodiment, piston 348 includes first and lived
Piston part (or primary piston body) 360 and with first piston portion 360 be attached (such as being threadably engaged) second piston portion 364 (or
Piston unt).Piston guide part 352 extends through the centre bore in second piston portion 364 and enters the center in first piston portion 360
In hole.
VPI valves 314 also include the annular diaphragm 368 made of suitable flexible material (such as rubber).Barrier film 368 is attached
To piston 348 and pump intake housing 336 and/or the pump housing 320.More specifically, in an illustrated embodiment, the inner circumferential of barrier film 368
Region is sandwiched between first piston portion 360 and second piston portion 364, and the outer region of barrier film 368 is sandwiched in pump intake
Between housing 336 and the pump housing 320.As illustrated, the outer region of barrier film 368 can include annular flange, the annular flange position
In the annular groove of pump intake housing 336.
Fig. 3 B are the offices of vavuum pump 318 that is similar with Fig. 3 A view but showing VPI valves 314 in the closed position
Portion's sectional block diagram.As being best shown in Fig. 3 B, variable volume controls chamber volume 372 (specifically, second to be lived by piston 348
Piston part 364), barrier film 368 and the pump housing 320 axially opposing with piston 348 (specifically, second piston portion 364) and towards work
The surface 376 for filling in 348 (specifically, second piston portions 364) limits.As viewed from the perspective of Fig. 3 A and Fig. 3 B, chamber volume is controlled
372 positioned at the lower section of piston 348 and barrier film 368.When piston 348 is in an open position (Fig. 3 A), the appearance of chamber volume 370 is controlled
Product is in minimum value, and the open position is the extreme lower position of piston 348 as viewed from the perspective of Fig. 3 A and Fig. 3 B.In open position,
Piston 348 (specifically, second piston portion 364) can abut pump housing surface 376.In certain embodiments and such as Fig. 3 A institutes
Show, in open position, a part for barrier film 368 can fold in itself.On the other hand, when piston 348 is moved to closed position
(Fig. 3 B), control chamber volume 370 volume enlargement to maximum, the closed position be piston as viewed from the perspective of Fig. 3 A and Fig. 3 B
348 extreme higher position.As shown in Figure 3 B, ring-shaped valve seats is abutted in closed position, piston 348 (specifically, first piston portion 360)
380.Valve seat 380 can be formed on the inner surface of pump intake housing 336.In order to strengthen the He of sealing piston 348 in closed position
Sealing engagement between valve seat 380, it is other inner surfaces than being not used in sealing that valve seat 380, which can be designed (such as machining),
More smooth (surface roughness is less) surface.In addition, piston 348 can include potted component 384 (for example, positioned at first
O-ring in the annular groove of piston portion 360), the potted component is in contact with valve seat 380 and can when being contacted with valve seat 380
To carry out a certain degree of deformation between piston 348 and valve seat 380.As Fig. 3 B further shown in, spring 356 is in close stance
The place of putting is compressed.
As described above with the embodiment shown in Fig. 2, vavuum pump 318 includes exhaust air feed line and guide valve, and the exhaust is defeated
Pipeline is sent to extend to VPI valves 314 from the main exhaust pipeline of vavuum pump 318, the guide valve is operably positioned at exhaust air feed line
In alternately to close (prevent gas flow through) exhaust air feed line and open and (allow gas to flow through) exhaust air feed line.Now
The example of the part of composition exhaust air feed line and guide valve will be described with reference to figure 3A, Fig. 3 B, Fig. 4 and Fig. 5.
Fig. 4 is the side elevation in partial section of the vavuum pump 318 shown in Fig. 3 A and Fig. 3 B.Relative to regarding for Fig. 3 A and Fig. 3 B
Figure, Fig. 4 view rotate around vertical axis.As shown in figure 4, vavuum pump 318 includes guide valve 488.Before in the disclosure
Described in face, guide valve 488 generally can be any kind of valve that can be actuated to open mode and closed mode.In typical case
Nonexcludability embodiment in, guide valve 488 is configured to normally open valve, i.e. guide valve 488 needs electric power to be positively retained in pass
Closed state.As an example, guide valve 488 can be electromagnetic actuating valve.Power supply is via suitable electric wire 490 to guide valve
488 power supplies.Driving one of the identical power supply (such as 24V power supplys) to guide valve 488 and vavuum pump 318 can be utilized (or more
It is individual) movably both motors of pumping element (such as orbiting scroll disk of vortex pump) power supply.Guide valve 488 may be mounted at
Between first air guide block (or support) 492 and the second air guide block (or support) 394.Guide valve 488, the first air guide block 492 and
Two air guide block conducting blocks 394 can be located at the outside of the pump housing 320.
As understood by those skilled in the art, vavuum pump 318 includes main exhaust pipeline 442, and the main exhaust pipeline will be by
Waste side conduction of the gas of pumping element acting away from vavuum pump 318.As described above, in the present embodiment, main exhaust pipeline
442 connect with guide valve 488 via exhaust conveyance pipeline and transfer to connect with VPI valves 314 (Fig. 3 A and Fig. 3 B).In this implementation
In example, exhaust air feed line is collectively forming or limited by multiple gas passages (internal path).Gas passage is different from each other, and this is
It is arranged on due to them in different solid structures.Adjacent gas passage is at the tie point of Fluid Sealing and/or via stream
Body accessory suitably communicates with each other, wherein, in the joint of Fluid Sealing, different solid structures is engaged.
In the embodiment specifically illustrated in Fig. 4, exhaust air feed line includes first gas passage 421, second gas is led to
Road 425, third gas passage 429 (shown partially), the 4th gas passage 531 (not shown in Fig. 4, partly being shown in Fig. 5)
With the 5th gas passage 333 (not shown in Fig. 4, partly being shown in Fig. 3 A and Fig. 3 B), wherein, first gas passage is arranged on
In the outside housing 423 of the pump housing 320 and main exhaust pipeline 442 (it is also disposed in the housing 423 of outside) is fluidly coupled to, the
Two gas passages are arranged in the cast frame 427 of the pump housing 320 and are fluidly coupled to first gas passage 421, third gas
Passage is arranged in the first air guide block 492 and is fluidly coupled to second gas passage 425, and the 4th gas passage is arranged on guiding
In valve 488 and third gas passage 429 is fluidly coupled to, the 5th gas passage is arranged in the second air guide block 394 and fluid
It is connected to the 4th gas passage.Although in Fig. 4 partial sectional view, a part for third gas passage 429 illustrate only simultaneously
And not specifically illustrated 4th gas passage and the 5th gas passage, but pass through the first air guide block 492, guide valve 488 and second
The gas flowing of air guide block 394 is schematically shown by dotted line 435.Fluid connection or handing-over between gas with various passage can be with
It is fluid-tight by any suitable means.As an example, Fig. 4 shows the potted component for providing such as O-ring etc
433。
Fig. 3 A and Fig. 3 B show a part for the 5th gas passage 333 of the second air guide block 394 and its inside.In Fig. 3 A
With in the embodiment that is specifically illustrated in Fig. 3 B, exhaust air feed line also includes the 6th gas passage 339, and the 6th gas passage is set
Put in the pump housing 320 (for example, in cast frame 427) and be fluidly coupled to the 5th gas passage 333.From Fig. 3 A and Fig. 3 B's
From the point of view of visual angle, the 6th gas passage 339 includes horizontal part, and the horizontal part is fluidly coupled to the 5th gas passage 333 and led to
Vertical component effect (Fig. 3 B) with controlling the open communication of chamber volume 370.It is living in opening (reduction) position of the piston 348 shown in Fig. 3 A
348 (specifically, second piston portions 364) of plug can prevent or can not prevent fluid in the 6th gas passage 339 and control
Flowed between chamber volume 370.In either case, the state by guide valve 488 is flowed by the gas of exhaust air feed line
(opening or closing) determines.
Fig. 5 is the broken section top view of the vavuum pump 318 shown in Fig. 3 A, Fig. 3 B and Fig. 4, wherein, eliminate VPI
Valve 314 and the pump intake 334 (Fig. 3 A and Fig. 3 B) being connected.Exist along by guide valve 488, the second air guide block 394 and the pump housing 320
The plane of a part for the lower section of control chamber volume 370 is cut (Fig. 3 B).Cutting planes are positioned such that to be not shown first
The third gas passage 429 (Fig. 4) of air guide block 492, only shows the part of the 4th gas passage 531 of guide valve 488, only shows
A part for 5th gas passage 333 of the second air guide block 394, and only show the 6th gas passage 339 in the pump housing 320
Part (part for horizontal part and the cross section of vertical component effect, as shown in Figure 3 A and Figure 3 B).By these gas passages not
The gas flowing of the part shown is schematically shown by dotted line 535.4th gas passage 531 can be by the one of guide valve 488
Individual or multiple inner passages limit.According to its construction, guide valve 488 can include one or more valve components (typically at least one
Individual movable valve element), the valve components make guide valve 488 switch between its open mode and closed mode, logical so as to control
Cross the gas flowing of guide valve 488 and exhaust air feed line.
Vavuum pump 318 generally can relatively operate as described above with the embodiment shown in Fig. 2.Assuming that vavuum pump 318
Do not operate, the interior zone of vavuum pump 318 and the other portions connected with vavuum pump 318 (vacuum level 322 etc.) of system
Office is under environment (such as air) pressure.Now, because piston 348 by spring 356 is biased to open position shown in Fig. 3 A,
VPI valves 314 are in open mode.Now, it is activated to its close stance because no electric power is supplied to guide valve 488
Put, therefore normally opened guide valve 488 is also at its open mode.
It is then possible to by being powered to the motor of vavuum pump 318 to start vavuum pump 318.Now, also to guide valve 488
Power supply, is switched to it and is maintained at its closed mode, the exhaust flowing in exhaust air feed line is thus prevented, so as to by VPI
Valve 314 is isolated with main exhaust pipeline 442.Now, the normal operating of vavuum pump 318.By via pump intake 334 (as generally by scheming
Shown in arrow 344 in 3A) gas molecule is drawn into pump inside 324 from vacuum level 322 and is transferred to gas molecule
In the main exhaust pipeline 442 of the waste side of vavuum pump 318, vavuum pump 318 is in its air inlet (suction) side and vacuum level 322
Form vacuum.Due to control chamber volume 372 in gas pressure be not enough to overcome applied by spring 356 to piston 348 it is inclined
Power is put, VPI valves 314 are maintained at its open mode.As shown in Figure 3 A and Figure 3 B, vavuum pump 318 can include path aperture 339,
The path aperture provides the fluid communication of limitation air guide between pump inlet port 340 and control chamber volume 372.Aperture 339 can
For making the pressure in control chamber volume 372 equal with the vacuum pressure in pump inlet port 340.Therefore, in vavuum pump 318
Normal operating during, pressure difference is not present at the both ends of piston 348.
If in the normal operation period sometime, vavuum pump 318 intentionally or due to operating trouble is closed, then lead
It can also be powered off to valve 488 and be switched to its open mode.Therefore, chamber volume 372 is controlled via the exhaust delivery pipe opened now
Line and main exhaust pipeline 442 (its can be at or close to atmospheric pressure) connect and fast by flowing into the exhaust in control chamber volume 372
Speed pressurization.Therefore, pressure difference quickly forms at the both ends of piston 348 and resists the bias force of spring 356 and force piston 348 to move
Move the closed position shown in Fig. 3 B.In closed position, piston 348 stops the gas stream between vacuum level 322 and pump intake 340
It is dynamic, so as to the vacuum pressure in vacuum level 322 is kept.Barrier film 368 prevents exhaust from flowing rapidly into vacuum from control chamber volume 372
In level 322.However, limitation air guide aperture 339 allow exhaust from control chamber volume 372 slowly through aperture 339, flow through and be pumped into
Mouth 340 simultaneously enters in pump inside 324.It can be used for preventing gas from main exhaust pipeline by the smaller gas flowing in aperture 339
442 are back in pump intake 340 by inside pump 324, so as to prevent oil or particle from entering pump intake 334.
When subsequent vavuum pump 318 restarts, guide valve 488 switches back into its closed mode, thus again in VPI valves
Fluid Sealing is established in exhaust air feed line between 314 and main exhaust pipeline 442.Because vavuum pump 318 is in the recovery operation
Period starts to produce vacuum again, vavuum pump 318 gradually will control chamber volume 372 in (and exhaust conveyance pipeline control hold
Part between product room 372 and the guide valve 488 closed now) exhaust pumped out via aperture 339.The pressure at the both ends of piston 348
Difference diminishes, and when controlling the pressure in chamber volume 372 to become sufficiently small, piston 348 (being aided in by spring 356), which is moved to, to be beaten
Open position, thus establish and be in fluid communication between vavuum pump 318 and vacuum level 322 again.
From the foregoing, it will be seen that such as in other embodiments disclosed herein, vavuum pump 318 provides seal and nothing
Surrounding air is needed to be used for the VPI valves of its operation.
As described above, vavuum pump disclosed herein can be vortex pump.As skilled in the art to understand, vortex pump
Pump stage can include stationary scroll disk and can be driven to around stationary scroll disk carry out track motion orbiting scroll disk.
The example of vortex pump is in such as A1 of U.S. Patent Application Publication No. US 2014/0271233；The A1 of US 2014/0271242 and US
It is further described through in 2016/0201674 A1, the respective content of these patents is fully incorporated herein by quoting.
It should be appreciated that such as " connecting " and " with ... connection " (for example, first component is connected with second component) etc
Term be used herein to mean that structure between two or more parts or element, function, machinery, electrically, signal, light
, magnetic, electromagnetism, ion or fluid relation.Thus, the fact that a part is considered as being connected with second component is not intended as
Exclude following possibility：Additional component is likely to be present between first component and second component and/or additional component and first
Part and second component are operatively associated or engaged.
It should be appreciated that without departing from the scope of the invention, thus it is possible to vary various aspects of the invention or details.
In addition, the purpose that description above is merely to illustrate that, rather than the purpose for limitation, the present invention are limited by claim
It is fixed.
Claims (20)
1. a kind of vavuum pump isolates VPI valves, it includes：
Pump intake housing, it surrounds inlet internal；
Valve components, it is arranged in the inlet internal, and the valve components are configured to open mode and institute in the VPI valves
State and switch between the closed mode of VPI valves, and be configured to be switched to the closed mode in response to pressure, wherein,
Under the open mode, the valve components allow the flow of fluid via the inlet internal between vavuum pump and vacuum chamber,
And under the closed mode, the valve components prevent the flow of fluid between the vavuum pump and the vacuum chamber；With
Guide valve, it is configured to the inlet internal with the exhaust gas inside pipeline of the vavuum pump being connected, the guiding
Valve can switch opening to be oriented between valve position and closing guiding valve position, wherein, valve position is oriented in described open, it is described
Guide valve allows the exhaust from the exhaust gas inside pipeline effectively to switch to the valve components to valve components application
The pressure of the closed mode, and valve position is oriented in described close, the guide valve is prevented from the exhaust gas inside pipeline
Exhaust to the valve components is flowed.
2. VPI valves according to claim 1, including the valve seat being arranged in the inlet internal, wherein, the valve components
Including piston, the piston can be in the opening piston position of the open mode corresponding to the VPI valves and corresponding to institute
State and move between the closure piston position of the closed mode of VPI valves, and the piston connects in the closure piston position
Touch the valve seat.
3. VPI valves according to claim 2, including control chamber volume, the control chamber volume be arranged on it is described enter it is intraoral
At least partly defined in portion and by the piston, wherein, the motion of the piston changes the volume of the control chamber volume.
4. VPI valves according to claim 3, including flexible partition, the flexible partition is attached to the pump intake housing
With the piston, and at least partly define the control chamber volume, wherein, the flexible partition is with the movement of the piston
And move.
5. VPI valves according to claim 3, wherein, the control chamber volume is surrounded causing the control chamber volume extremely
Small part and the vacuum chamber fluid isolation.
6. VPI valves according to claim 3, including ingress port and limitation guiding aperture, the ingress port is by described in
It is connected between inlet internal and the vavuum pump, and the limitation guiding aperture holds the ingress port and the control
Product is connected between room.
7. VPI valves according to claim 1, including flexible partition, the flexible partition are arranged in the inlet internal,
And it is configured to the part being connected with the vacuum chamber of the guide valve and inlet internal fluid at least in part
Isolation.
8. VPI valves according to claim 1, including spring, the spring is configured to be biased to cut by the valve components
Change to the open mode.
9. VPI valves according to claim 1, wherein, the guide valve be configured to it is normally opened and in response to receiving electric power and
It is switched to described close and is oriented to valve position.
10. a kind of vavuum pump, it includes：
VPI valves according to claim 1；
The pump housing, wherein, the exhaust gas inside pipeline is arranged in the pump housing；
First exhaust feed-line, it provides fluid communication between the exhaust gas inside pipeline and the guide valve；With
Second exhaust feed-line, it provides fluid communication between the guide valve and the control chamber volume.
11. vavuum pump according to claim 10, wherein, the guide valve is constructed to respond to receive electric power and be maintained at
Guide valve state is closed, and the vavuum pump also includes pumping element, motor and power supply, and the motor structure is used to drive institute
The motion of pumping element is stated, the electric source structure is powered and in response to described into both the vavuum pump and the guide valve
Motor stops operation and cuts off supply to the electric power of the guide valve.
12. vavuum pump according to claim 10, wherein, the first exhaust feed-line and second exhaust conveying
Pipeline is isolated with the surrounding ambient fluid outside the vavuum pump.
13. vavuum pump according to claim 10, including vortex pump stage, the vortex pump stage is arranged on the pump housing
It is interior and be connected with inlet internal and the exhaust gas inside pipeline.
14. a kind of vavuum pump isolates VPI valves, it includes：
Valve seat, it is arranged in inlet internal；
Piston, it is arranged in the inlet internal, and the piston can be being opened between piston mode and closure piston state
It is mobile, wherein, under the opening piston mode, the piston allow via the inlet internal vavuum pump and vacuum chamber it
Between flow of fluid, and under the closure piston state, valve seat described in the piston contact and prevent the vavuum pump and
Flow of fluid between the vacuum chamber；
Chamber volume is controlled, it is arranged in the inlet internal and at least partly defined by the piston, wherein, the piston
Mobile change it is described control chamber volume volume；With
Guide valve, it is configured to be connected with the exhaust gas inside pipeline of the control chamber volume and the vavuum pump, the guiding
Valve can switch opening to be oriented between valve position and closing guiding valve position, wherein, valve position is oriented in described open, it is described
Guide valve, which allows the exhaust from the exhaust gas inside pipeline to be forced into the control chamber volume, effectively moves the piston
The pressure of the closure piston state is moved, and valve position is oriented in described close, the guide valve is prevented from the inside
Exhaust flowing of the exhaust line to the control chamber volume.
15. a kind of vavuum pump, it includes：
VPI valves according to claim 14；
The pump housing, wherein, the exhaust gas inside pipeline is arranged in the pump housing；
First exhaust feed-line, it provides fluid communication between the exhaust gas inside pipeline and the guide valve；With
Second exhaust feed-line, it provides fluid communication between the guide valve and the inlet internal.
16. a kind of vacuum system, it includes：
Vavuum pump, it includes exhaust gas inside pipeline；
Vacuum chamber；
Vacuum insulation VPI valves, it can switch between opening VPI valves state and closing VPI valve states, wherein, beaten described
To open under VPI valve states, the VPI valves allow the flow of fluid between the vavuum pump and the vacuum chamber, and in the pass
Close under VPI valve states, the VPI valves prevent the flow of fluid between the vavuum pump and the vacuum chamber；With
Guide valve, it is connected with the exhaust gas inside pipeline and the VPI valves, and the guide valve can open guide valve shape
Switch between state and closing guide valve state, wherein, under the opening guide valve state, the guide valve allows exhaust having
Effect ground will flow to the VPI under the pressure of the VPI Vavle switchings to the closing VPI valve states from the exhaust gas inside pipeline
Valve, and under the closing guide valve state, the guide valve is prevented from the exhaust gas inside pipeline to the row of the VPI valves
Flow of air.
17. vacuum system according to claim 16, wherein, the VPI valves include：
Pump intake housing, it surrounds inlet internal；
Valve components, it is arranged in the inlet internal, and the valve components are configured in the opening VPI valves state and described
Switch between closing VPI valve states, and be configured to be switched to the closing VPI valve states in response to pressure,
Wherein, under the opening guide valve state, the guide valve allows the exhaust from the exhaust gas inside pipeline to institute
State valve components and apply pressure.
18. vacuum system according to claim 16, wherein, the VPI valves include：
Pump intake housing, it surrounds inlet internal；
Valve seat, it is arranged in the inlet internal；
Piston, it is arranged in the inlet internal, and the piston can be corresponding to first of the opening VPI valve states
Put and moved corresponding between the second place of the closing VPI valve states, wherein, in the first position, the piston is permitted
Perhaps the flow of fluid via the inlet internal between the vavuum pump and the vacuum chamber, and in the second place,
Valve seat described in the piston contact and prevent the flow of fluid between the vavuum pump and the vacuum chamber；With
Chamber volume is controlled, it is arranged in the inlet internal and at least partly defined by the piston, wherein, the piston
Mobile change it is described control chamber volume volume,
Wherein, under the opening guide valve state, the guide valve allows exhaust to the control chamber volume pressurization.
19. vacuum system according to claim 16, including first exhaust feed-line and second exhaust feed-line, institute
State first exhaust feed-line and fluid communication, the second exhaust are provided between the exhaust gas inside pipeline and the guide valve
Feed-line provides fluid communication between the guide valve and the VPI valves.
20. vacuum system according to claim 16, wherein, the vavuum pump is fore pump, and the vacuum system
Also include the high-vacuum pump being connected with the vacuum chamber, and wherein：
Under the opening VPI valve states, the VPI valves allow the fluid stream between the fore pump and the high-vacuum pump
It is dynamic, and under the closing VPI valve states, the VPI valves prevent the fluid between the fore pump and the high-vacuum pump
Flowing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/251,567 US20180058453A1 (en) | 2016-08-30 | 2016-08-30 | Hermetic vacuum pump isolation valve |
| US15/251,567 | 2016-08-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107795708A true CN107795708A (en) | 2018-03-13 |
Family
ID=61166773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710647670.6A Pending CN107795708A (en) | 2016-08-30 | 2017-08-01 | Seal vacuum pump isolating valve |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20180058453A1 (en) |
| JP (1) | JP2018066370A (en) |
| CN (1) | CN107795708A (en) |
| DE (1) | DE102017119596A1 (en) |
| GB (1) | GB2555212A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112032020A (en) * | 2020-09-10 | 2020-12-04 | 北京通嘉宏瑞科技有限公司 | Dry vacuum pump for intelligently purging gas based on chemical reaction principle and using method thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108626481B (en) * | 2018-05-24 | 2023-11-21 | 江苏一控真空注胶技术有限公司 | Vacuum air-release integrated valve |
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| US4193742A (en) * | 1974-10-31 | 1980-03-18 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh | Vacuum pump assembly with built-in shutoff valve |
| US4785851A (en) | 1987-07-20 | 1988-11-22 | Mks Instruments Inc. | Vacuum security valve having a buffer volume |
| US4968221A (en) * | 1989-04-03 | 1990-11-06 | Dresser Industries, Inc. | Intake valve for vacuum compressor |
| JP2677536B2 (en) * | 1995-09-01 | 1997-11-17 | シーケーディ株式会社 | Vacuum pressure control system |
| JP3415402B2 (en) * | 1997-08-15 | 2003-06-09 | 株式会社荏原製作所 | Turbo molecular pump |
| DE10212940A1 (en) * | 2002-03-22 | 2003-10-02 | Leybold Vakuum Gmbh | Eccentric pump and method for operating this pump |
| GB0214273D0 (en) * | 2002-06-20 | 2002-07-31 | Boc Group Plc | Apparatus for controlling the pressure in a process chamber and method of operating same |
| JP4694771B2 (en) * | 2003-03-12 | 2011-06-08 | 財団法人国際科学振興財団 | Pump and pump member manufacturing method |
| KR20100050746A (en) * | 2008-11-06 | 2010-05-14 | 주식회사 동부하이텍 | Isolation valve for semiconductor |
| EP2530325B1 (en) * | 2010-01-29 | 2018-10-17 | Ulvac Kiko, Inc. | Pump |
| US9435339B2 (en) | 2013-03-13 | 2016-09-06 | Agilent Technologies, Inc. | Vibration/noise management in a scroll compressor |
| US10473096B2 (en) | 2013-03-15 | 2019-11-12 | Agilent Technologies, Inc. | Modular pump platform |
| US9341186B2 (en) | 2013-04-30 | 2016-05-17 | Agilent Technologies, Inc. | Scroll vacuum pump and method of maintenance including replacing a tip seal of a scroll vacuum pump |
-
2016
- 2016-08-30 US US15/251,567 patent/US20180058453A1/en not_active Abandoned
-
2017
- 2017-08-01 CN CN201710647670.6A patent/CN107795708A/en active Pending
- 2017-08-02 JP JP2017149930A patent/JP2018066370A/en active Pending
- 2017-08-25 DE DE102017119596.3A patent/DE102017119596A1/en not_active Withdrawn
- 2017-08-25 GB GB1713723.3A patent/GB2555212A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112032020A (en) * | 2020-09-10 | 2020-12-04 | 北京通嘉宏瑞科技有限公司 | Dry vacuum pump for intelligently purging gas based on chemical reaction principle and using method thereof |
| CN112032020B (en) * | 2020-09-10 | 2022-01-14 | 北京通嘉宏瑞科技有限公司 | Dry vacuum pump for intelligently purging gas based on chemical reaction principle and using method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018066370A (en) | 2018-04-26 |
| DE102017119596A1 (en) | 2018-03-01 |
| GB201713723D0 (en) | 2017-10-11 |
| US20180058453A1 (en) | 2018-03-01 |
| GB2555212A (en) | 2018-04-25 |
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