CN107790897A - A kind of ultrasonic vibration auxiliary laser drilling method and device - Google Patents
A kind of ultrasonic vibration auxiliary laser drilling method and device Download PDFInfo
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- CN107790897A CN107790897A CN201711232599.1A CN201711232599A CN107790897A CN 107790897 A CN107790897 A CN 107790897A CN 201711232599 A CN201711232599 A CN 201711232599A CN 107790897 A CN107790897 A CN 107790897A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
- B23K26/1224—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The invention provides a kind of ultrasonic vibration auxiliary laser drilling method and device, the device includes power supply, supersonic generator, ultrasonic vibration servicing unit clamping unit, ultrasonic vibration generation unit, clamping workpiece unit and laser generating unit, power supply is connected by the first electric wire with supersonic generator, the supersonic generator is connected by the second electric wire with ultrasonic vibration generation unit, workpiece is installed on clamping workpiece unit, while laser boring is carried out, ultrasonic vibration acts on workpiece with the direction perpendicular to workpiece machining surface caused by ultrasonic vibration generation unit.The present invention contributes to fusing material during laser boring in hole to discharge, pass through the booster action of ultrasonic vibration, the removal of slag can be accelerated, improve the clearance of slag, solidify to form re cast layer again in hole wall so as to which melt be reduced or avoided, ultrasonic vibration simultaneously can also be obviously improved the surface quality of hole wall, so as to realize the quality of improvement laser boring and improve the purpose of perforating efficiency.
Description
Technical field
The present invention relates to advanced laser manufacturing and processing, belongs to laser manufacturing and processing field, and in particular to a kind of ultrasound
Vibrate auxiliary laser drilling method and device.
Background technology
It is more and more using the material that hardness is big, fusing point is high as the modern industry and scientific and technical develop rapidly, and pass
The processing method of system can not meet some technological requirements.Laser boring is to reach practical laser processing technology earliest,
It is one of main application fields of Laser Processing.Laser boring refers to using pulse laser beam irradiation workpiece surface, after focusing
Laser beam energy density it is high, focal position temperature can moment reach several thousand degrees celsius, workpiece material is in this high temperature
In the presence of can be sprayed under high pressure steam effect by rapid fusing, vaporization and formed aperture.This small hole forming method is
There is longer history, its advantage is self-evident, such as：Process velocity is fast, high financial profit, rapidoprint scope is wide, pollution-free
Deng having obvious advantage especially in the laser drilling multi-holes of aerospace industries.
Present laser boring is that workpiece is processed using laser as thermal source, and luminous energy is converted into heat energy, and material absorbs heat
Can after heat up and form molten bath on its surface, surfacing constantly melts removal, and this method is disadvantageous in that：Material exists
The complex process of high heat burnout and cooling condensation can be undergone in laser drilling process, finally forms re cast layer in micro-pore wall, due to
The effect of kickback pressure makes the smelt flow in hole and produces splashing, and the fused mass of splashing, which is easily adhered to produce on aperture wall, to be split
Line simultaneously influences hole inwall pattern.
The content of the invention
For Shortcomings in the prior art, the present invention provides a kind of method of ultrasonic vibration auxiliary laser punching；The party
Method is punched using the sound cavitation effect, acoustic streaming effect and mechanical effect of ultrasonic wave come auxiliary laser, passes through ultrasonic vibration, Ke Yijia
The removal of slag in fast laser drilling process, the clearance of slag is improved, is coagulated again in hole wall so as to which fused mass be reduced or avoided
Solid is into re cast layer, while ultrasonic vibration can also be obviously improved the surface quality of hole wall, reduce internal flaw, eliminate remaining answer
Power, crystal grain thinning and tissue, mechanical property is improved, so as to realize improvement quality of laser drilling and improve the purpose of perforating efficiency.
Meanwhile present invention also offers a kind of ultrasonic vibration auxiliary laser perforating device.
The present invention is to realize above-mentioned technical purpose by following technological means.
A kind of ultrasonic vibration auxiliary laser drilling method, comprises the following steps：
Step 1：By the correct clamping of the workpiece handled well on request on ultrasonic vibration auxiliary laser perforating device；
The ultrasonic vibration auxiliary laser perforating device includes power supply, supersonic generator, ultrasonic vibration servicing unit dress
Press from both sides unit, ultrasonic vibration generation unit, clamping workpiece unit and laser generating unit；
The power supply is connected by the first electric wire with supersonic generator, and the supersonic generator passes through the second electric wire
It is connected with ultrasonic vibration generation unit；
The ultrasonic vibration generation unit includes multiple oscillators, connected wires in oscillator, oscillator external cord and shell, described
Shell is the seal casinghousing provided with one section of fairlead, and multiple oscillators are distributed in the inside of shell, by interior between multiple oscillators
Connect wires and be connected in series, one end of the external cord is connected with the multiple oscillators connected, and the other end is drawn outer by fairlead
Shell, and be connected by the second electric wire with supersonic generator,
The ultrasonic vibration servicing unit clamping unit includes being used for the water tank and lathe base for holding water, the water tank peace
Loaded on lathe base, the shell is placed in water tank, and the fairlead on the shell is stretched out outside water tank；
The clamping workpiece unit is installed in the water tank and positioned at the top of ultrasonic vibration generation unit, the workpiece
It is installed on clamping workpiece unit, the upper surface of the water is located between the upper and lower surface of the workpiece；
The laser generating unit includes laser, condenser lens and nozzle, and laser beam caused by the laser passes through
Hot spot caused by over-focusing lens is located at the corresponding requirements opening position of workpiece, and the nozzle is used to spray auxiliary gas to workpiece；
Step 2：By controlling supersonic generator to control ultrasonic vibration generation unit to produce ultrasonic vibration, ultrasonic vibration
Action direction it is perpendicular to workpiece and parallel with the direction of laser beam；
Step 3：Start laser, laser beam caused by laser is located at workpiece by hot spot caused by condenser lens
Corresponding requirements opening position, while punching by nozzle to workpiece blow out auxiliary gas, the injection direction of the nozzle
It is coaxial with laser beam, make workpiece complete to beat under the collective effect of laser, ultrasonic vibration, plasma and coaxial auxiliary gas
Hole.
A kind of ultrasonic vibration auxiliary laser perforating device, including power supply, supersonic generator, ultrasonic vibration servicing unit dress
Press from both sides unit, ultrasonic vibration generation unit, clamping workpiece unit and laser generating unit；
The power supply is connected by the first electric wire with supersonic generator, and the supersonic generator passes through the second electric wire
It is connected with ultrasonic vibration generation unit；
The ultrasonic vibration generation unit includes multiple oscillators, connected wires in oscillator, oscillator external cord and shell, described
Shell is seal casinghousing, and shell is provided with one section of fairlead, and multiple oscillators are distributed in the inside of shell, led between multiple oscillators
Cross interior connect wires to be connected in series rear one end with the external cord and be connected, the other end of the external cord is drawn by fairlead
Go out shell, and be connected by the second electric wire with supersonic generator；
The ultrasonic vibration servicing unit clamping unit includes being used for the water tank and lathe base for holding water, the water tank peace
Loaded on lathe base, the shell is placed in water tank, and the fairlead on the shell is stretched out outside water tank；
The clamping workpiece unit is installed in the water tank and positioned at the top of ultrasonic vibration generation unit, the workpiece
It is installed on clamping workpiece unit, the upper surface of the water is located between the upper and lower surface of the workpiece；
The laser generating unit includes laser, condenser lens and nozzle, and laser beam caused by the laser passes through
Hot spot caused by over-focusing lens is located at the corresponding requirements opening position of workpiece, and the nozzle is used to spray auxiliary gas to workpiece.
Preferably, the clamping workpiece unit includes net basket, limited block and fixing bolt；The net basket is installed on water tank
In side wall, a pair of limited blocks and fixing bolt are arranged with the bottom surface inwall of the net basket, the limited block is fixed on net basket
On, the fixing bolt passes through the limited block, and with limited block bolt connection, for clamping workpiece；
The water tank top end opening, the laser beam at the top end opening of water tank by acting on workpiece.
Preferably, in addition to depth of water detection unit, the depth of water detection unit include being used for the depth for detecting water in water tank
Water depth sensor, the 3rd electric wire and computer, the water depth sensor pass through the 3rd electric wire with calculate mechatronics.
Preferably, ultrasonic power size can be adjusted caused by the supersonic generator.
Preferably, the top of the water tank is provided with cover plate, and the fairlead on the shell passes through cover plate, the fairlead
Rubber sheet gasket is provided between cover plate.
Preferably, the clamping workpiece unit also includes net basket fixing bolt and net basket hold-doun nut, and the net basket passes through
Net basket fixing bolt and net basket hold-doun nut are installed in the side wall of water tank.
Preferably, the bottom of the water tank is connected by four bolts of lower base being evenly distributed with lathe base.
The present invention has following beneficial effect：
1st, the present invention is shaken by applying the ultrasound perpendicular and parallel with beam direction with workpiece machining surface to workpiece
It is dynamic so that hole when workpiece to be processed up-down vibration in the presence of high frequency ultrasound vibration, ultrasonic vibration contribute to laser boring
Interior fusing material discharge, by the booster action of ultrasonic vibration, can accelerate the removal of slag, improve the clearance of slag,
Solidify to form re cast layer again in hole wall so as to which melt be reduced or avoided；Ultrasonic vibration simultaneously can also be obviously improved hole wall
Surface quality, reduce internal flaw, reduce even elimination residual stress, crystal grain thinning and tissue, mechanical property being improved, so as to real
Now improve quality of laser drilling and improve the purpose of perforating efficiency.
2nd, ultrasonic vibration generation unit is placed in water tank by the present invention, is used water as the medium of transonic, is effectively subtracted
Lack loss of the ultrasonic wave in the transmitting procedure of workpiece is acted on, ensure that auxiliaring effect of the ultrasonic vibration to laser boring.
Meanwhile this method for placing to ultrasonic vibration generation unit is also effectively protected equipment, it is single to improve ultrasonic vibration generation
The working life of member.
3rd, it is slightly above the lower surface of workpiece and less than the upper surface of workpiece the invention enables the medium water surface, so as on the one hand protect
The action effect of ultrasonic vibration has been demonstrate,proved, on the other hand and to the workpiece in processing effectively to cool, has made the heat on micropore periphery
The zone of influence reduces, while detrimental effect and influence of the water that it also avoid running into Laser Underwater drill process on laser beam.
Brief description of the drawings
Fig. 1 is a kind of schematic diagram of ultrasonic vibration auxiliary laser perforating device of the present invention.
Fig. 2 is the structural representation of ultrasonic vibration servicing unit of the present invention.
Fig. 3 is the structural representation of clamping workpiece unit of the present invention.
Fig. 4 is a kind of schematic diagram of ultrasonic vibration auxiliary laser drilling method of the present invention.
Fig. 5 is to utilize the micropore re cast layer pattern and thickness chart obtained in the embodiment of the present invention.
Fig. 6 is to utilize the tissue crystal grain figure obtained in the embodiment of the present invention.
Fig. 7 is the hardness profile of the micropore neighboring area of the embodiment of the present invention and common laser punching acquisition.
Fig. 8 is that the micropore re cast layer pattern and thickness chart obtained is punched using common laser.
Fig. 9 is that the tissue crystal grain figure obtained is punched using common laser.
Wherein：
1st, power supply, the 2, first electric wire, 3, supersonic generator, the 4, second electric wire, 5, ultrasonic vibration servicing unit clamping list
Member, 6, ultrasonic vibration generation unit, 7, clamping workpiece unit, 8, depth of water detection unit, 9, shell, 10, water, 11, water tank, 12,
Cover plate, 13, rubber sheet gasket, 14, vertical-adjustment device, 15, condenser lens, 16, laser beam, 17, penetration-detection device, 18, net
Basket fixing bolt, 19, net basket hold-doun nut, 20, net basket, the 21, the 3rd electric wire, 22, computer, 23, water depth sensor, 24, work
Part, 25, fixing bolt, 26, limited block, 27, oscillator, 28, connect wires in oscillator, 29, oscillator external cord, 30, bolt, 31,
Lathe base, 32, splash, 33, auxiliary gas, 34, nozzle, 35, plasma, 36, melt-blown drop, 37, fused mass, 38,
Ultrasonic vibration.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment the present invention is further illustrated, but protection scope of the present invention is simultaneously
Not limited to this.
As shown in figure 1, a kind of ultrasonic vibration auxiliary laser perforating device of the present invention, including power supply 1, ultrasonic wave hair
Raw device 3, ultrasonic vibration servicing unit clamping unit 5, ultrasonic vibration generation unit 6, clamping workpiece unit 7, depth of water detection unit 8
And laser generating unit, power supply 1 are connected by the first electric wire 2 with supersonic generator 3, supersonic generator 3 passes through second
Electric wire 4 is connected with ultrasonic vibration generation unit 6, ultrasonic power caused by supersonic generator 3 and ultrasonic vibration generation unit 6
Size can be adjusted.
As shown in Fig. 2 the effect of ultrasonic vibration generation unit 6 is to produce ultrasonic vibration 38 and to be processed perpendicular to workpiece 24
The direction on surface acts in workpiece 24, including multiple oscillators 27, oscillator connect wires 28, oscillator external cord 29 and shell 9, outside
Shell 9 is the seal casinghousing provided with one section of fairlead, and multiple oscillators 27 are distributed in the inside of shell 9, led between multiple oscillators 27
Cross interior connect wires 28 to be connected in series rear one end with the external cord 29 and be connected, the other end of external cord 29 passes through fairlead
Shell 9 is drawn, and is connected by the second electric wire 4 with supersonic generator 3.
The effect of ultrasonic vibration servicing unit clamping unit 5 is to carry out ultrasonic vibration servicing unit and laser drilling system
Combination, including for holding the water tank 11 and lathe base 31 of water 10, the bottom of water tank 11 pass through four bottoms being evenly distributed
Seat bolt 30 is connected with lathe base 31, and shell 9 is placed in water tank 11, and the top end opening of water tank 11 is simultaneously provided with cover plate 12, on shell 9
Fairlead pass through cover plate 12, rubber sheet gasket 13 is provided between fairlead and cover plate 12.
As shown in Figures 2 and 3, clamping workpiece unit 7 is installed in the water tank 11 and is located at ultrasonic vibration generation unit
Top, including net basket 20, limited block 26, fixing bolt 25, net basket fixing bolt 18 and net basket hold-doun nut 19, net basket 20 is logical
Cross net basket fixing bolt 18 and net basket hold-doun nut 19 is installed in the side wall of water tank 11, symmetrically set on the bottom surface inwall of net basket 20
There are a pair of limited blocks 26 and fixing bolt 25, limited block 26 is fixed on net basket 20, and fixing bolt 25 passes through the limited block 26,
And with the bolt connection of limited block 26, by tighten two fixing bolts 25 with reach clamp workpiece 24 purpose, the upper table of water 10
Face is located between the upper and lower surface of the workpiece 24.
Depth of water detection unit 8 to detect the depth of the water 10 in water tank 11 to judge whether the depth of water meets job requirement,
Including the water depth sensor 23, the 3rd electric wire 21 and computer 22 for detecting the depth of water 10 in water tank 11, the depth of water passes
Sensor 23 is electrically connected by the 3rd electric wire 21 with computer 22.
Laser generating unit includes laser, condenser lens 15, vertical-adjustment device 14 and nozzle 34, the laser
Caused laser beam 16 is located at the corresponding requirements opening position of workpiece 24 by hot spot caused by condenser lens 15, and the nozzle 34 is used
Gas 33 is aided in being sprayed to workpiece 24.
The operation principle of laser boring of the present invention generates plasma 35, molten as shown in figure 4, during laser boring
Hydrojet drop 36 and fused mass 37, workpiece to be machined 24 produce high frequency in the presence of ultrasonic vibration 38 along the axis of laser beam 16
Fusing material discharge hole wall when vibration, ultrasonic vibration 38 contribute to laser boring in hole, pass through ultrasonic vibration 38 and laser
Compound action, the removal of slag can be accelerated, improve the clearance of slag, so that fused mass 37 is reduced or avoided in hole wall again
Solidification forms re cast layer, while can improve the surface quality of hole wall, reduce internal flaw, crystal grain thinning and tissue, improves power
Learn performance.Suitably increase ultrasonic power during punching, vibration can be strengthened, cause ultrasonic cleaning more violent by vibration, can be to molten
Slag plays stronger removal effect, while further crystal grain thinning with organizing, can improve mechanical property, remnants are reduced or eliminated
Stress.
A kind of ultrasonic vibration auxiliary laser drilling method of the present invention, comprises the following steps：
Step 1：By size be 30 × 3 × 15mm the clamping of workpiece 24 on clamping workpiece unit 7, ensure workpiece 24 plus
Work perforated surface is mutually perpendicular to the direction of ultrasonic vibration 38 and clamping is solid and reliable；Cistern cover plate 12 is closed, is noted into water tank 11
Enter water 10, while the depth of water 10 is detected to reach requirement by depth of water detection unit 8 so that the upper surface of WATER AS FLOW MEDIUM 10 is slightly higher
In workpiece lower surface and it is less than workpiece surface；
Setting power supply 1 is AC power 220V；Setting supersonic generator electric current is 1.7A, power 528.916W；If
Putting laser parameter is specially：Pulse width 1.0ms, pulse frequency 55Hz, laser energy 2.5J, defocusing amount 0mm, expand than 3.5,
Auxiliary gas 33 is argon gas, and gas pressure 0.05MPa, the ring cutting number of turns 2 are enclosed, ring cutting speed 20mm/min.
Step 2：Ultrasonic wave, the direction of ultrasonic vibration 38 are generated by supersonic generator 3 and ultrasonic vibration generation unit 6
Vertical and parallel with the direction of laser beam 16 with the finished surface of workpiece 24, caused ultrasonic vibration 38 passes through the medium in water tank 11
Water 10 is transmitted and is applied on workpiece 24；
Step 3：Start laser, adjusting the position of condenser lens 15 about 14 by vertical-adjustment device makes through poly-
The focal point of the laser beam 16 of focus lens 15 is punched in the corresponding requirements opening position of workpiece 24, while is blown by nozzle 34
Go out to aid in gas 33, aid in direction and the coaxial workpiece 24 of laser beam 16 of gas 33, workpiece 24 is shaken in laser beam 16, ultrasound
Dynamic 38, punching is completed under the collective effect of plasma 35 and coaxial auxiliary gas 33.
The micropore re cast layer pattern and thickness obtained in the present embodiment is as shown in figure 5, organize crystal grain as shown in fig. 6, measurement
The hardness profile of micropore neighboring area is as shown in Figure 7；In order to compare improvement of the ultrasonic vibration to quality of laser drilling,
Other laser boring technological parameters used and laser process equipment and condition in the case where not using ultrasonic vibration to aid in, with this
Carry out laser boring, re cast layer thickness, tissue crystal grain and the micropore neighboring area of the micropore obtained are consistent in embodiment
Hardness profile as shown in Fig. 8, Fig. 9, Fig. 7.
With reference to Fig. 5 and Fig. 8, it can be found that the punching of ultrasonic vibration auxiliary laser can effectively reduce re cast layer thickness, so as to
Reduce metallurgical imperfection such as micro-crack, stomata etc. inside re cast layer.Comparison diagram 6 and Fig. 9, it can be found that ultrasonic vibration can refine
The crystal grain in laser boring region, and play a part of uniform formation.Analysis chart 7, it can be found that there is the laser that ultrasonic vibration aids in
Punching, perienchyma's hardness of micropore are significantly improved, and this also illustrates the addition of ultrasonic vibration, improves micropore periphery heat
The zone of influence is organized, and has refined crystal grain.
The embodiment is preferred embodiment of the invention, but the present invention is not limited to above-mentioned embodiment, not
Away from the present invention substantive content in the case of, those skilled in the art can make it is any it is conspicuously improved, replace
Or modification belongs to protection scope of the present invention.
Claims (8)
1. a kind of ultrasonic vibration auxiliary laser drilling method, it is characterised in that comprise the following steps：
Step 1：By the correct clamping of the workpiece handled well on request (24) on ultrasonic vibration auxiliary laser perforating device；
The ultrasonic vibration auxiliary laser perforating device includes power supply (1), supersonic generator (3), ultrasonic vibration servicing unit
Clamping unit (5), ultrasonic vibration generation unit (6), clamping workpiece unit (7) and laser generating unit；
The power supply (1) is connected by the first electric wire (2) with supersonic generator (3), and the supersonic generator (3) passes through
Second electric wire (4) is connected with ultrasonic vibration generation unit (6)；
The ultrasonic vibration generation unit include multiple oscillators (27), connect wires (28) in oscillator, oscillator external cord (29) and
Shell (9), the shell (9) are the seal casinghousing provided with one section of fairlead, and multiple oscillators (27) are distributed in shell (9)
Inside, it is connected in series by interior connect wires (28) between multiple oscillators (27), one end of the external cord (29) is with connecting
Multiple oscillators (27) connection, the other end draws shell (9) by fairlead, and passes through the second electric wire (4) and ultrasonic wave and occur
Device (3) connects,
The ultrasonic vibration servicing unit clamping unit (5) includes being used for the water tank (11) and lathe base for holding water (10)
(31), the water tank (11) is installed on lathe base (31), and the shell (9) is placed in water tank (11), on the shell (9)
Fairlead to stretch out water tank (11) outside；
The clamping workpiece unit (7) is installed in the water tank (11) and positioned at the top of ultrasonic vibration generation unit (6), institute
State workpiece (24) to be installed on clamping workpiece unit (7), the upper surface of the water (10) is located at the upper surface of the workpiece (24)
Between lower surface；
The laser generating unit includes laser, condenser lens (15) and nozzle (34), laser caused by the laser
Beam (16) is located at the corresponding requirements opening position of workpiece (24) by hot spot caused by condenser lens (15), and the nozzle (34) is used for
Auxiliary gas (33) is sprayed to workpiece (24)；
Step 2：By controlling supersonic generator (3) to control ultrasonic vibration generation unit (6) to produce ultrasonic vibration, ultrasound is shaken
Dynamic action direction is perpendicular to workpiece (24) and parallel with the direction of laser beam (16)；
Step 3：Start laser, laser beam caused by laser (16) is located at by hot spot caused by condenser lens (15)
The corresponding requirements opening position of workpiece (24), auxiliary gas is blown out to workpiece (24) by nozzle (34) while punching
(33), the injection direction of the nozzle (34) and laser beam (16) coaxially, make workpiece (24) laser, ultrasonic vibration (38), etc.
Punching is completed under gas ions (35) and the coaxially collective effect of auxiliary gas (33).
2. a kind of ultrasonic vibration auxiliary laser perforating device, it is characterised in that including power supply (1), supersonic generator (3), surpass
Acoustic vibration servicing unit clamping unit (5), ultrasonic vibration generation unit (6), clamping workpiece unit (7) and laser generating unit；
The power supply (1) is connected by the first electric wire (2) with supersonic generator (3), and the supersonic generator (3) passes through
Second electric wire (4) is connected with ultrasonic vibration generation unit (6)；
The ultrasonic vibration generation unit (6) in multiple oscillators (27), oscillator including connecting wires (28), oscillator external cord (29)
With shell (9), the shell (9) is seal casinghousing, and shell (9) is provided with one section of fairlead, and multiple oscillators (27) are uniform
Between the inside of shell (9), multiple oscillators (27) by it is interior connect wires (28) be connected in series after with the external cord (29)
One end connects, and the other end of the external cord (29) draws shell (9) by fairlead, and by the second electric wire (4) with surpassing
Sonic generator (3) connects；
The ultrasonic vibration servicing unit clamping unit (5) includes being used for the water tank (11) and lathe base for holding water (10)
(31), the water tank (11) is installed on lathe base (31), and the shell (9) is placed in water tank (11), on the shell (9)
Fairlead to stretch out water tank (11) outside；
The clamping workpiece unit (7) is installed in the water tank (11) and positioned at the top of ultrasonic vibration generation unit, described
Workpiece (24) is installed on clamping workpiece unit (7), the upper surface of the water (10) be located at the workpiece (24) upper surface and
Between lower surface；
The laser generating unit includes laser, condenser lens (15) and nozzle (34), laser caused by the laser
Beam (16) is located at the corresponding requirements opening position of workpiece (24) by hot spot caused by condenser lens (15), and the nozzle (34) is used for
Auxiliary gas (33) is sprayed to workpiece (24).
3. ultrasonic vibration auxiliary laser perforating device according to claim 2, it is characterised in that the clamping workpiece unit
(7) net basket (20), limited block (26) and fixing bolt (25) are included；
The net basket (20) is installed in the side wall of water tank (11), and a pair of limits are arranged with the bottom surface inwall of the net basket (20)
Position block (26) and fixing bolt (25), the limited block (26) are fixed on net basket (20), and the fixing bolt (25) passes through institute
State limited block (26), and with limited block (26) bolt connection, for clamping workpiece (24)；
Water tank (11) top end opening, the laser beam (16) at the top end opening of water tank (11) by acting on workpiece
(24)。
4. ultrasonic vibration auxiliary laser perforating device according to claim 2, it is characterised in that also detected including the depth of water single
First (8), the water depth sensor (23) of depth of the depth of water detection unit (8) including being used to detect water tank (11) interior water (10),
3rd electric wire (21) and computer (22), the water depth sensor (23) are electrically connected by the 3rd electric wire (21) with computer (22)
Connect.
5. ultrasonic vibration auxiliary laser perforating device according to claim 2, it is characterised in that the supersonic generator
(3) ultrasonic power size can be adjusted caused by.
6. ultrasonic vibration auxiliary laser perforating device according to claim 3, it is characterised in that the top of the water tank (11)
End is provided with cover plate (12), and the fairlead on the shell (9) passes through cover plate (12), is set between the fairlead and cover plate (12)
There is rubber sheet gasket (13).
7. ultrasonic vibration auxiliary laser perforating device according to claim 3, it is characterised in that the clamping workpiece unit
(7) net basket fixing bolt (18) and net basket hold-doun nut (19) are also included, the net basket (20) is by netting basket fixing bolt (18)
It is installed on net basket hold-doun nut (19) in the side wall of water tank (11).
8. ultrasonic vibration auxiliary laser perforating device according to claim 3, it is characterised in that the bottom of the water tank (11)
Portion is connected by four bolts of lower base (30) being evenly distributed with lathe base (31).
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| CN201711232599.1A CN107790897A (en) | 2017-11-30 | 2017-11-30 | A kind of ultrasonic vibration auxiliary laser drilling method and device |
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| CN201711232599.1A CN107790897A (en) | 2017-11-30 | 2017-11-30 | A kind of ultrasonic vibration auxiliary laser drilling method and device |
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