CN107782537A - A kind of vacuum Systems for optical inspection - Google Patents
A kind of vacuum Systems for optical inspection Download PDFInfo
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- CN107782537A CN107782537A CN201711252416.2A CN201711252416A CN107782537A CN 107782537 A CN107782537 A CN 107782537A CN 201711252416 A CN201711252416 A CN 201711252416A CN 107782537 A CN107782537 A CN 107782537A
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- vacuum tank
- vacuum
- low pressure
- interferometer
- analogue means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Vacuum Systems for optical inspection provided by the invention, including space optical remote sensor, low pressure analogue means, interferometer, for accommodating the vacuum tank of interferometer, for adjustment space optical sensor and the precision adjustment unit of vacuum tank, precision adjustment unit and vacuum tank are contained in low pressure analogue means, low pressure analogue means is the closed container with an opening, vacuum tank by bellows with opening flexible is closed connects, ambient atmosphere is connected by opening with vacuum tank, low pressure analogue means provides hypobaric for space optical remote sensor, pass through the position of precision adjustment unit adjustment space optical sensor and vacuum tank, make to be aligned according to predeterminated position relation between the focal plane of space optical remote sensor and the focal plane of interferometer, optical detection is carried out to space optical remote sensor under vacuum conditions so as to realize.
Description
Technical field
The present invention relates to technical field of optical detection, more particularly to a kind of vacuum Systems for optical inspection.
Background technology
It is operated in view of space optical remote sensor in space low pressure (near vacuum) environment, therefore in order to closer to very
The real performance for testing its optical system, carries out the detection work of optical system preferably under low air pressure condition.
Under existing technical conditions, what the detection of space optical remote sensor was usually carried out in laboratory conditions, with
The bore increase of optical sensor and focal length are elongated, and influence of the atmospheric perturbation to optical detection in laboratory environment is increasingly
Greatly.At present can only be steady by ensureing the air-flow in laboratory, to reduce influence of the atmospheric perturbation to optical system detection, and can not
It is inherently eliminated the disturbance of air and the adverse effect to optical detection result is present.
Detection for Space Remote Sensors Performance of Optical System, currently used method are surveyed using high-precision interferometer
The ripple difference of amount system.Existing interferometer, can not be directly in vacuum due to the limitation of its internal optics and electronic device
Used in environment, and the difficulty that radiated during interferometer work is caused in vacuum environment.
The content of the invention
In view of this, the embodiments of the invention provide a kind of vacuum Systems for optical inspection, space optical remote is both met
Device needs the engineering demand of vacuum optical detection, and and can solves the application limit that interferometer can only work under the conditions of normal atmosphere
System, simple in construction, the realization for being easy to optical detection to work.
The invention provides a kind of vacuum Systems for optical inspection, including it is space optical remote sensor, low pressure analogue means, dry
Interferometer, the vacuum tank for accommodating the interferometer, for adjusting the space optical remote sensor and the vacuum tank
Precision adjustment unit, the precision adjustment unit and the vacuum tank are contained in the low pressure analogue means, described
Low pressure analogue means is the closed vessel with an opening, the vacuum tank with the opening flexible is closed connects, the external world
Air is connected by the opening with the vacuum tank, and the low pressure analogue means provides for the space optical remote sensor
Hypobaric, the position of the space optical remote sensor and the vacuum tank is adjusted by the precision adjustment unit, with
So that it is aligned between the focal plane of the focal plane of the space optical remote sensor and the interferometer according to predeterminated position relation.
Alternatively, in addition to vavuum pump, the vavuum pump are used to vacuumize the low pressure analogue means.
Alternatively, be provided with bellows between the opening and the vacuum tank, the bellows respectively with the opening
And the closed connection of vacuum tank, the vacuum tank are connected by the bellows, the opening with ambient atmosphere.
Alternatively, the vacuum tank is provided with optical window, the interferometer towards the space optical remote sensor side
Vacuum detecting is carried out to the ripple difference of the space optical remote sensor by the optical window.
Alternatively, the low pressure analogue means is the closed vessel of cube structure.
Alternatively, the vacuum tank is barrel shaped structure, and the inner space of the barrel shaped structure is more than the interferometer
Envelope size.
Alternatively, bleeding point is additionally provided with the side wall of the low pressure analogue means, the bleeding point can be with the vacuum
Pump connects.
Alternatively, the vacuum tank has detachable end and the vessel coordinated with the end cap, the end
Be covered with through hole, the through hole with the bellows is closed connects.
Alternatively, use and be threadedly coupled between the end cap and the end cap and the vessel.
Alternatively, it is additionally provided with sealing ring between the end cap and the vessel.
As can be seen from the above technical solutions, the embodiment of the present invention has advantages below：
A kind of vacuum Systems for optical inspection provided by the invention, including it is space optical remote sensor, low pressure analogue means, dry
Interferometer, the vacuum tank for accommodating the interferometer, for adjusting the space optical remote sensor and the vacuum tank
Precision adjustment unit, the precision adjustment unit and the vacuum tank are contained in the low pressure analogue means, described
Low pressure analogue means is the closed vessel with an opening, the vacuum tank with the opening flexible is closed connects, the external world
Air is connected by the opening with the vacuum tank, and the low pressure analogue means provides for the space optical remote sensor
Hypobaric, the position of the space optical remote sensor and the vacuum tank is adjusted by the precision adjustment unit, with
So that being aligned between the focal plane of the focal plane of the space optical remote sensor and the interferometer according to predeterminated position relation, both solved
Space optical remote sensor needs the engineering demand of vacuum optical detection, and and can meets that interferometer can only be under the conditions of normal atmosphere
The application limitation of work, it is simple in construction, it is easy to detect the realization of work.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the vacuum Systems for optical inspection in the embodiment of the present invention.
Reference：
Space optical remote sensor 1, low pressure analogue means 2, interferometer 3, vacuum tank 4, precision adjustment unit 5, ripple
Pipe 6, end cap 7, optical window 8.
Embodiment
In order that those skilled in the art more fully understand the present invention program, below in conjunction with the embodiment of the present invention
Accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill people
The every other embodiment that member is obtained under the premise of creative work is not made, it should all belong to the model that the present invention protects
Enclose.
Term " first ", " second ", " the 3rd " in description and claims of this specification and above-mentioned accompanying drawing, "
The (if present)s such as four " are for distinguishing similar object, without for describing specific order or precedence.It should manage
The data that solution so uses can exchange in the appropriate case, so that the embodiments described herein can be with except illustrating herein
Or the order beyond the content of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that
Cover it is non-exclusive include, for example, containing the process of series of steps or unit, method, system, product or equipment need not limit
In those steps or unit for clearly listing, but may include not list clearly or for these processes, method, production
The intrinsic other steps of product or equipment or unit.
With reference to shown in Fig. 1, the invention provides a kind of vacuum Systems for optical inspection, including space optical remote sensor 1, low gas
Press analogue means 2, interferometer 3, the vacuum tank 4 for accommodating the interferometer 3, for adjusting the space optical remote sensor
1 and the precision adjustment unit 5 of the vacuum tank 4, the precision adjustment unit 5 and the vacuum tank 4 are contained in described
In low pressure analogue means 2, the low pressure analogue means 2 is the closed vessel with an opening, the vacuum tank 4 and institute
The closed connection of opening flexible is stated, ambient atmosphere is connected by the opening with the vacuum tank 4, the low pressure analogue means
2 be that the space optical remote sensor 1 provides hypobaric, and it is distant to adjust the space optics by the precision adjustment unit 5
The position of sensor 1 and the vacuum tank, to cause the focal plane of the focal plane of the space optical remote sensor 1 and the interferometer 3
Between according to predeterminated position relation be aligned.
Low pressure analogue means 2 provides inside hypobaric required during detection, and the device inner space is sufficiently large,
Ensure that the equipment such as optical sensor and interferometer 3 can be arranged in the device, specifically, the low pressure analogue means 2 can be with
For the closed vessel of cube structure, material can also use transparent material, such as safety glass, be easy to see experimentation
Examine, this is not limited.
Using the flexibility and seal of bellows 6, the vacuum tank 4 by bellows 6 and low pressure analogue means 2 it
Between realize flexible and be tightly connected, ensure the sealing of low pressure analogue means 2, outside atmosphere passes through bellows 6 and interferometer 3
Reservoir, interferometer 3 is set to be in atmospheric pressure environment.The power supply of interferometer 3 and signal-transmitting cable penetrate in bellows 6 with it is dry
Interferometer 3 is connected, and interferometer 3 can also be radiated by bellows 6 in addition.
The vacuum tank with the opening flexible is closed connects, be easy to vacuum tank to carry out position adjustment so that opening
Relative displacement can be produced between vacuum tank, in a kind of scheme, is provided between the opening and the vacuum tank
Bellows 6, respectively with the opening and vacuum tank is closed connects, the vacuum tank passes through described the bellows 6
Bellows 6, the opening connect with ambient atmosphere, can be using metal bellows also or rubber for the material of bellows 6
Bellows, this is not limited.
It should be noted that bellows 6 not only can be big by the inside of vacuum tank and the outside of low pressure analogue means 2
Gas connects, and can also penetrate the power supply of interferometer 3 and signal-transmitting cable in bellows 6 and be connected with interferometer 3, also may be used in addition
To be radiated by the bellows 6 to interferometer 3.
The needs of vacuum tank 4 ensure will not be to outside vacuum environment gas leakage under normal pressure internally, and inner space is sufficiently large,
Ensure that interferometer 3 can be arranged in the device, specifically, the vacuum tank is barrel shaped structure, the barrel shaped structure it is interior
Portion space is more than the envelope size of the interferometer 3.
The vacuum tank is provided with optical window 8 towards the side of space optical remote sensor 1, and the interferometer 3 passes through
The optical window 8 carries out vacuum detecting to the ripple difference of the space optical remote sensor 1, it is ensured that interferometer 3 passes through this
Window carries out optical detection work.
The system also includes vavuum pump, and the vavuum pump is used to vacuumize the low pressure analogue means 2, the low pressure
Bleeding point is additionally provided with the side wall of analogue means, the bleeding point can connect with the vavuum pump, by vavuum pump by low pressure
Evacuating air inside analogue means 2, vacuum test environment is provided for space optical remote sensor 1.
The vacuum tank 4 has detachable end 7 and the vessel coordinated with the end cap 7, on the end cap 7
Provided with flange, the flange is used for the sealed connection with the bellows 6, and end cap 7 is opened is put into vessel by interferometer 3
In, the cable of interferometer 3 is drawn by flange after loading onto end cap 7, and cable is penetrated in bellows, then pacified by flange
Bellows 6 is filled, the opening of the other end of bellows 6 and low pressure analogue means 2 is tightly connected.
Removably between end cap 7 and vessel can use buckle or threaded connection, in the present embodiment, institute
State between end cap 7 and the end cap 7 and the vessel using being threadedly coupled, those of ordinary skill in the art it is to be appreciated that
This is not limited.
In order to improve the air-tightness of connection, sealing ring can be additionally provided between the end cap 7 and the vessel, this
Field those of ordinary skill is not it is to be appreciated that limit this.
Precision adjustment unit 5 can use multi-freedom parallel connection motion platform, realize distant to vacuum tank and space optics
The position adjustment of sensor 1.
Using vacuum Systems for optical inspection provided by the invention, the specific implementation process detected is mainly as follows：
Space optical remote sensor 1 is put into low pressure analogue means 2 first, and is reliably fixed to correct position, is ensured
Directional light can be incided in optical system during detection.
Interferometer 3 is fitted into vacuum tank, then focal plane that the vacuum tank is put to space optical remote sensor 1 is attached
Near position, it is accurate according to correspondence position relation between the focal plane of optical sensor and the focal plane of interferometer 3 to be made by precision adjustment
Alignment.
Vacuum tank 4 is tightly connected by bellows 6 and low pressure analogue means 2, can be ensured by sealed connection low
Sealing inside air pressure simulation device 2, outside atmosphere are connected by bellows 6 with vacuum tank, so that at interferometer 3
Under condition of normal pressure.
When being detected, due to the sealing of low pressure analogue means 2, the device is vacuumized by vavuum pump can be to interior
Portion provides hypobaric condition, space optical remote sensor is completely in close under the low air pressure condition of actual working environment,
And interferometer 3 is worked in vacuum tank under the conditions of atmospheric pressure environment, interferometer 3 by the optical window 8 on its vacuum tank,
Vacuum detecting is carried out to the ripple difference of space optical remote sensor.
Method proposed by the present invention is applied in the vacuum optical detection of certain space optical remote sensor, according to the method described above
After implementation, good testing result is obtained.
A kind of vacuum Systems for optical inspection provided by the invention, including it is space optical remote sensor, low pressure analogue means, dry
Interferometer, the vacuum tank for accommodating the interferometer, for adjusting the space optical remote sensor and the vacuum tank
Precision adjustment unit, the precision adjustment unit and the vacuum tank are contained in the low pressure analogue means, described
Low pressure analogue means is the closed vessel with an opening, the vacuum tank with the opening flexible is closed connects, the external world
Air is connected by the opening with the vacuum tank, and the low pressure analogue means provides for the space optical remote sensor
Hypobaric, the position of the space optical remote sensor and the vacuum tank is adjusted by the precision adjustment unit, with
So that being aligned between the focal plane of the focal plane of the space optical remote sensor and the interferometer according to predeterminated position relation, both solved
Space optical remote sensor needs the engineering demand of vacuum optical detection, and and can meets that interferometer can only be under the conditions of normal atmosphere
The application limitation of work, it is simple in construction, it is easy to detect the realization of work.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, the corresponding process in preceding method embodiment is may be referred to, will not be repeated here.
A kind of vacuum Systems for optical inspection provided by the present invention is described in detail above, for the one of this area
As technical staff, according to the embodiment of the present invention thought, there will be changes, comprehensive in specific embodiments and applications
Upper described, this specification content should not be construed as limiting the invention.
Claims (10)
1. a kind of vacuum Systems for optical inspection, it is characterised in that including space optical remote sensor, low pressure analogue means, interference
Instrument, the vacuum tank for accommodating the interferometer, the essence for adjusting the space optical remote sensor and the vacuum tank
Close adjusting apparatus, the precision adjustment unit and the vacuum tank are contained in the low pressure analogue means, described low
Air pressure simulation device is the closed vessel with an opening, and flexible encapsulated connects between the vacuum tank and the opening, outside
Boundary's air is connected by the opening with the vacuum tank, and the low pressure analogue means is that the space optical remote sensor carries
For hypobaric, the position of the space optical remote sensor and the vacuum tank is adjusted by the precision adjustment unit,
To be aligned according to predeterminated position relation between the focal plane of the focal plane of the space optical remote sensor and the interferometer.
2. vacuum Systems for optical inspection according to claim 1, it is characterised in that also including vavuum pump, the vavuum pump
Vacuumized for the low pressure analogue means.
3. vacuum Systems for optical inspection according to claim 1, it is characterised in that it is described opening and the vacuum tank it
Between be provided with bellows, respectively with the opening and vacuum tank is closed connects, the vacuum tank passes through the bellows
The bellows, the opening connect with ambient atmosphere.
4. vacuum Systems for optical inspection according to claim 1, it is characterised in that the vacuum tank is towards the space
Optical sensor side is provided with optical window, light of the interferometer by the optical window to the space optical remote sensor
System ripple difference carries out vacuum detecting.
5. vacuum Systems for optical inspection according to claim 1, it is characterised in that the low pressure analogue means is cube
The closed container of body structure.
6. vacuum Systems for optical inspection according to claim 1, it is characterised in that the vacuum tank is barrel shaped structure,
The inner space of the barrel shaped structure is more than the envelope size of the interferometer.
7. vacuum Systems for optical inspection according to claim 2, it is characterised in that the side wall of the low pressure analogue means
On be additionally provided with bleeding point, the bleeding point can connect with the vavuum pump.
8. vacuum Systems for optical inspection according to claim 3, it is characterised in that the vacuum tank is provided with flange,
Connected between the flange and the bellows by the way that sealing ring is closed.
9. vacuum Systems for optical inspection according to claim 8, it is characterised in that the end cap and the vessel it
Between using threaded connection.
10. vacuum Systems for optical inspection according to claim 9, it is characterised in that the end cap and the vessel
Between be additionally provided with sealing ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711252416.2A CN107782537A (en) | 2017-12-01 | 2017-12-01 | A kind of vacuum Systems for optical inspection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711252416.2A CN107782537A (en) | 2017-12-01 | 2017-12-01 | A kind of vacuum Systems for optical inspection |
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| CN107782537A true CN107782537A (en) | 2018-03-09 |
Family
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| CN201711252416.2A Pending CN107782537A (en) | 2017-12-01 | 2017-12-01 | A kind of vacuum Systems for optical inspection |
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Cited By (4)
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| CN111426448A (en) * | 2020-03-27 | 2020-07-17 | 中国科学院西安光学精密机械研究所 | Optical assembly performance test platform |
| CN114076575A (en) * | 2021-11-12 | 2022-02-22 | 中国科学院长春光学精密机械与物理研究所 | Vacuum interferometer device and optical detection method thereof |
| US20220204192A1 (en) * | 2020-12-28 | 2022-06-30 | Raytheon Company | Space seeker motion test method |
| CN116865847A (en) * | 2023-09-01 | 2023-10-10 | 中北大学 | Optical communication environment simulation test system |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111426448A (en) * | 2020-03-27 | 2020-07-17 | 中国科学院西安光学精密机械研究所 | Optical assembly performance test platform |
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| CN116865847A (en) * | 2023-09-01 | 2023-10-10 | 中北大学 | Optical communication environment simulation test system |
| CN116865847B (en) * | 2023-09-01 | 2023-11-21 | 中北大学 | Optical communication environment simulation test system |
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