CN107781144B - Double-cavity single-vibrator piezoelectric pump - Google Patents
Double-cavity single-vibrator piezoelectric pump Download PDFInfo
- Publication number
- CN107781144B CN107781144B CN201711070598.1A CN201711070598A CN107781144B CN 107781144 B CN107781144 B CN 107781144B CN 201711070598 A CN201711070598 A CN 201711070598A CN 107781144 B CN107781144 B CN 107781144B
- Authority
- CN
- China
- Prior art keywords
- pump body
- cavity
- pump
- vibrator
- lower pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000000694 effects Effects 0.000 claims abstract description 4
- 238000007789 sealing Methods 0.000 claims description 20
- 230000000903 blocking effect Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 abstract description 35
- 238000005452 bending Methods 0.000 abstract description 3
- 230000000638 stimulation Effects 0.000 abstract description 2
- 239000003814 drug Substances 0.000 abstract 1
- 229940079593 drug Drugs 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 230000006872 improvement Effects 0.000 description 8
- 239000012528 membrane Substances 0.000 description 6
- 238000004026 adhesive bonding Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
- F04B53/1067—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its whole periphery and with an opening at its centre
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/22—Arrangements for enabling ready assembly or disassembly
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a double-cavity single-vibrator piezoelectric pump which comprises an upper pump body, a middle pump body, a lower pump body, a double-wafer piezoelectric vibrator and a valve; the upper pump body and the lower pump body are respectively provided with a pump cavity inlet, valve valves are arranged at the inlets, the lower pump body and the upper pump body are connected through a middle pump body, a bimorph piezoelectric vibrator is arranged between the middle pump body and the lower pump body, two symmetrical outlet cavities at the inner side are completely positioned in the lower pump body, and two symmetrical outlet cavities at the outer side are communicated through the outlet cavities of the middle pump body and the outlet cavities of the upper pump body; an alternating current signal is applied to the bimorph piezoelectric vibrator, the bimorph piezoelectric vibrator generates bending deformation under the stimulation of the electric signal, the volumes of the two pump cavities of the upper pump body and the lower pump body are alternately changed, and the pressure difference between the inside and the outside of the pump cavities is generated by utilizing the change of the volumes so as to realize the suction and the output of liquid. The invention has the advantages of large output liquid flow, good backflow resistance effect and the like, and has wide application prospect in the fields of micro robots, drug transportation and the like.
Description
Technical Field
The invention belongs to the field of fluid machinery, and particularly relates to a double-cavity single-vibrator piezoelectric pump.
Background
In modern technology, a pump plays an important role in technical application as a power source, but is difficult to play a role in miniature precise instruments due to the defects of low power, poor anti-interference capability, complex structure, large volume and the like. The miniature piezoelectric pump is popular because of the characteristics of small volume, high precision, low energy consumption, quick action response, no electromagnetic interference and the like, and has wide application prospect in the technical fields of miniature robots, precise equipment cooling devices and the like.
In the traditional microminiature piezoelectric pump, the structure generally comprises a pump body, a pump cavity and a piezoelectric vibrator, the piezoelectric vibrator is used as a driving element, an inlet runner and an outlet runner are arranged on the pump body, the inlet runner and the outlet runner are positioned in the same plane, and a one-way valve is arranged at the inlet and the outlet to prevent liquid from flowing back.
Although the traditional miniature piezoelectric pump can output liquid, the miniature piezoelectric pump has the defects of small driving force, low power, small output liquid flow, serious liquid backflow and the like, and limits the development of the miniature piezoelectric pump in the field of precision equipment.
SUMMARY OF THE PATENT FOR INVENTION
In order to solve the technical problems of small driving force, low output efficiency and the like of the traditional microminiature piezoelectric pump, the invention discloses a double-cavity single-vibrator piezoelectric pump.
In order to achieve the above purpose, the invention adopts the following technical scheme: the main pump consists of an upper pump body (1), a middle pump body (2) and a lower pump body (3) which are overlapped,
a bimorph piezoelectric vibrator (4) is arranged between the lower part of the middle pump body (2) and the upper part of the lower pump body (3), an outer narrow inner wide streamline pump cavity is respectively arranged between the upper pump body (1) and the middle pump body (2) and between the middle pump body (2) and the lower pump body (3), an annular sealing groove structure is arranged between the upper pump body (2) and the middle pump body (3), sealing is carried out through a sealing ring (7), the bimorph piezoelectric vibrator (4) is sealed by gluing between the lower pump body (3) and the middle pump body (2),
the side surface of the outlet cavity of the upper pump body (1) is provided with a cliff-shaped flow blocking structure,
the upper pump body and the lower pump body are respectively provided with an annular groove (1-1) and an annular groove (3-1) which are in adhesive sealing with the valve (5), the inner side of the lower pump body (3) is provided with a funnel-shaped outlet cavity (3-3) with two symmetrical sides, one side of the outlet cavity of the lower pump body (3) is provided with a wire guide (3-5) structure,
the outer side of the lower pump body (3) is provided with symmetrical outlet cavities (3-6), the outlet cavities are connected with the middle pump body (2) and the cavity channels (1-3) of the upper pump body (1), the middle pump body (2) and the lower pump body (3) respectively and circumferentially array four threaded holes, and the upper pump body (1), the middle pump body (2) and the lower pump body (3) are overlapped to form a whole through fastening screws (6) and fastening nuts (8).
The device realizes the working process by the following steps of:
the first working process comprises the following steps: the liquid continuously enters the upper pump cavity and the lower pump cavity through the valve (5), the bimorph piezoelectric vibrator (4) generates bending deformation under the excitation of an alternating current signal, when the bimorph piezoelectric vibrator (4) bends and deforms towards the middle pump body (2), the volume of the upper pump cavity (1-2) is reduced, the pressure is increased, the liquid is pressed to the periphery of the outlet cavity (1-3) of the upper pump body due to the pressure increase of the upper pump cavity (1-2), and flows out through the outlet cavity (1-3) of the upper pump body, meanwhile, the volume of the pump cavity (3-2) of the lower pump body is increased, the internal pressure of the lower pump cavity (3-2) is reduced, and the liquid enters the lower pump cavity (3-2) through the valve (5).
The second working process is as follows: when the bimorph piezoelectric vibrator (4) bends towards the pump cavity of the lower pump body (3), the volume of the lower pump cavity (3-2) is reduced, the pressure of the lower pump cavity (3-2) is increased, liquid is pressed to the periphery of the lower pump body outlet cavity (3-3), the liquid flows out through the lower pump body outlet cavity (3-3), the volume of the pump cavity (1-2) of the upper pump body is increased, the internal pressure of the upper pump cavity (1-2) is reduced, and the liquid flows into the upper pump cavity (1-2) through the valve (5), so that the whole working process is completed, and the input and the outflow of the liquid are realized through the circulation work of the two working processes.
As an improvement of the technical scheme, annular grooves (1-1) and annular grooves (3-1) are respectively arranged at the inlets of the upper pump body (1) and the lower pump body (3);
as an improvement of the technical scheme, the pump cavities of the upper pump body (1), the middle pump body (2) and the lower pump body (3) are respectively streamline pump cavities with narrow outside and wide inside;
as an improvement of the technical scheme, the inner outlet cavity of the lower pump body (3) is a funnel-shaped outlet cavity (3-3);
as an improvement of the technical scheme, the side surface of the outlet cavity of the upper pump body (1) is provided with a cliff-shaped flow blocking structure;
as an improvement of the technical scheme, an annular sealing groove structure is arranged among the upper pump body (1), the middle pump body (2) and the lower pump body (3), and the upper pump body, the middle pump body and the lower pump body are sealed through a sealing ring;
as an improvement of the technical scheme, a wire guide (3-3) is arranged beside an outlet cavity at the inner side of the lower pump body (3);
as an improvement of the technical scheme, the upper pump body (1), the middle pump body (2) and the lower pump body (3) are provided with four screw hole structures in a circumferential array;
as the improvement of the technical scheme, the valve (5) is composed of an upper clamping ring, a diaphragm and a lower clamping ring, the top ends of two adjacent diaphragms are matched through superposition, the bottom ends of the diaphragms are matched through contact, a single diaphragm is concave and convex, 8 diaphragms are mutually superposed and assembled to form a hollow-like cone, a round safety small hole is formed in the top of the cone after assembly, and the effect of fixing the whole valve (5) is achieved by fixing the protruding clamped edges at the bottom ends of the diaphragms through the cooperation of the upper clamping ring and the lower clamping ring.
The invention has the beneficial effects that:
1. the valve limits the inlet and outlet of liquid, so that the liquid can only flow into the pump cavity in one direction and cannot flow out through the valve;
2. the up-and-down vibration of the bimorph piezoelectric vibrator is utilized, so that the efficiency is improved;
3. the pressure generated by the vibration of the bimorph piezoelectric vibrator is increased, so that the output pressure of liquid can be increased;
4. the side surfaces of the upper pump cavity and the lower pump cavity adopt streamline curved surfaces, so that the resistance of liquid entering the water outlet cavity is reduced;
5. the water outlet cavity adopts a cliff-shaped flow blocking body, so that the backflow of liquid is reduced;
6. the use of the sealing ring prevents the liquid from flowing out to the outside through the gap;
7. the use of a set screw and set nut secures the entire pump.
Drawings
Fig. 1 is a cross-sectional view of the present device.
Fig. 2 is an exploded view of the present device.
Fig. 3 is a schematic view of the upper pump body.
Fig. 4 is a schematic diagram of the structure of the middle pump body.
Fig. 5 is a schematic view of the lower pump body.
Fig. 6 is a schematic diagram of a valve structure.
Detailed Description
In order that those skilled in the art may better understand the technical solutions of the present invention, the following detailed description of the present invention with reference to the accompanying drawings is provided for exemplary and explanatory purposes only and should not be construed as limiting the scope of the present invention.
As shown in the figure, the specific structure of the invention is as follows: a double-cavity single-vibrator piezoelectric pump consists of an upper pump body (1), a middle pump body (2), a lower pump body (3), a double-wafer piezoelectric vibrator (4), a valve (5), a fastening screw (6), a sealing ring (7) and a fastening nut (8).
The main pump consists of an upper pump body (1), a middle pump body (2) and a lower pump body (3) which are overlapped, an annular groove (1-1) at the horizontal side of an inlet cavity of the upper pump body (1) is sealed with a valve (5) through gluing, liquid is prevented from flowing out from gaps, the valve (5) consists of an upper clamping ring, a membrane and a lower clamping ring, the top ends of two adjacent membranes are matched through overlapping, the bottom ends of the membranes are matched through contact, the whole of each membrane forms a concave-convex state, 8 membranes are mutually overlapped and assembled to form a hollow-like cone, the assembled cone-shaped top forms a circular small hole, the protruding clamped edge at the bottom end of each membrane is fixed through the matching of the upper clamping ring and the lower clamping ring, the effect of fixing the whole valve (5) is achieved, the annular pump cavity (1-2) with the outer narrow inner width at the horizontal side of the structure of the upper pump body (1) is matched with the inner cavity (2-1) at the horizontal side of the middle pump body in an overlapping mode, the side of the outlet cavity is provided with a streamline-shaped structure, and backflow of liquid can be prevented; the outer side faces of the two outlet cavities (1-3) of the horizontal side face of the upper pump body (1) structure are in coincident fit with the outer side faces of the outlet cavity (2-2) of the horizontal side face of the middle pump body (2) structure, liquid can flow out of the outlet cavity, sealing is conducted between the annular sealing grooves (1-4) of the horizontal side face of the upper pump body (1) structure and the annular sealing grooves (2-3) of the horizontal side face of the middle pump body (2) structure through sealing rings (7), internal leakage of liquid is prevented, and the four threaded holes (1-5) of the horizontal side face of the upper pump body (1) structure are connected with the four threaded holes (2-4) of the horizontal side face of the middle pump body (2) through fastening screws (6) and fastening nuts (8), so that the connection firmness and good sealing performance of the upper pump body and the middle pump body (2) are guaranteed.
The utility model discloses a pump body, including well pump body (2) structure level side's export chamber (2-2) and export chamber (3-6) of lower pump body (3) structure side are assembled with one heart, guarantee that liquid can be smooth follow the export chamber and flow out, seal through sealing washer (7) between annular seal groove (2-3) of well pump body (2) structure and lower pump body (3) structure level side's annular seal groove (3-7), prevent the internal leakage of liquid, connect fixedly through fastening screw (6) between screw hole (2-4) of well pump body (2) structure level side and screw hole (3-8) of lower pump body (3) structure level side, guarantee the fastness of well pump body (2) and lower pump body (3) connection and its good leakproofness.
The annular groove (3-1) at the horizontal side of the inlet cavity of the lower pump body (3) is connected with the valve (5) through gluing, so that liquid is prevented from flowing out of a gap, and the lower pump body (3) is provided with a pump cavity (3-2) structure with a narrow outer part and a wide inner part; the lower pump body (3) horizontal side annular groove (3-4) glues with the side around bimorph piezoelectric vibrator (4), and the lower part of bimorph piezoelectric vibrator (4) is glued with well pump body (2), prevents the internal leakage of liquid, the wire is connected with bimorph piezoelectric vibrator (4) through wire hole (3-5) of lower pump body (3) inner chamber wall, two export chamber (3-6) structures of lower pump body (3) horizontal side and the export chamber of well pump body (2) horizontal side are assembled with one heart to make liquid can be smooth follow the export chamber and flow out, seal through the sealing washer between annular seal groove (3-7) structure of lower pump body (3) horizontal side and the annular seal groove (2-3) of well pump body (2) horizontal side, connect fixedly through fastening screw (6) between screw (3-8) of lower pump body (3) horizontal side and the screw (2-4) of well pump body (2) side, guaranteed the fastness and the leakproofness of whole pump.
The device realizes the working process by the following steps of:
the first working process comprises the following steps: the liquid continuously enters the upper pump cavity and the lower pump cavity through the valve (5), the bimorph piezoelectric vibrator (4) generates bending deformation under the stimulation of a certain alternating current signal, when the bimorph piezoelectric vibrator (4) bends and deforms towards the middle pump body (2), the volume of the upper pump cavity (1-2) is reduced, the pressure is increased, the liquid is pressed to the periphery of the outlet cavity (1-3) of the upper pump body due to the pressure increase of the upper pump cavity (1-2), and flows out through the outlet cavity (1-3) of the upper pump body, meanwhile, the volume of the pump cavity (3-2) of the lower pump body is increased, the internal pressure of the lower pump cavity (3-2) is reduced, and the liquid enters the lower pump cavity (3-2) through the valve (5).
The second working process is as follows: when the bimorph piezoelectric vibrator (4) bends and deforms towards the lower pump cavity (3-2), the volume of the lower pump cavity (3-2) is reduced, at the moment, liquid is pressed around the funnel-shaped outlet cavity (3-3) of the lower pump body due to the pressure increase of the lower pump cavity (3-2), the liquid flows out through the outlet cavity (3-3) of the lower pump body, meanwhile, the volume of the pump cavity (1-2) of the upper pump body is increased, the internal pressure of the upper pump cavity (1-2) is reduced, the liquid flows into the upper pump cavity (1-2) through the valve (5), so that the whole working process is completed, and the liquid is sucked and discharged through the circulation work of the two working processes.
The principles and embodiments of the present invention have been described in detail herein, and the above examples are presented only to aid in the understanding of the method of the present invention and its core ideas. The foregoing is merely illustrative of the preferred embodiments of this invention, and it is noted that there is objectively no limit to the specific structure disclosed herein, since numerous modifications, adaptations and variations can be made by those skilled in the art without departing from the principles of the invention, and the above-described features can be combined in any suitable manner; such modifications, variations and combinations, or direct application of the concepts and aspects of the invention in other applications without modification, are contemplated as falling within the scope of the invention.
Claims (4)
1. A double-cavity single-vibrator piezoelectric pump is characterized in that: the main pump comprises an upper pump body (1), a middle pump body (2) and a lower pump body (3) which are overlapped, wherein a cliff-shaped flow blocking structure is arranged on the side surface of an outlet cavity of the upper pump body (1); a bimorph piezoelectric vibrator (4) is placed between the lower part of the middle pump body (2) and the upper part of the lower pump body (3), a pump cavity is respectively arranged between the upper pump body (1) and the middle pump body (2) and between the middle pump body (2) and the lower pump body (3), sealing is carried out between the upper pump body (2) and the middle pump body (3) through a sealing ring (7), the bimorph piezoelectric vibrator (4) is glued and sealed between the lower pump body (2) and the middle pump body (2), an annular opening groove (1-1) structure and an annular groove (3-1) structure are respectively arranged at the inlet of the upper pump body (1) and the inlet of the lower pump body (3), a valve (5) is used as a one-way valve, two symmetrical funnel-shaped outlet cavities (3-3) are arranged on the inner side of the lower pump body (3), a wire guide hole (3-5) is formed on one side of the outlet cavity of the lower pump body (3), symmetrical outlet cavities (3-6) are formed on the outer side of the lower pump body (3), the outlet cavities are connected with the upper pump body (1) and the upper pump body (2) through a ring groove (3-1), four screw nuts (8) are fastened on the upper pump body (1) and the lower pump body (1) respectively The middle pump body (2) and the lower pump body (3) are overlapped to form a whole.
2. A dual-cavity single-vibrator piezoelectric pump according to claim 1, wherein: the pump cavities of the upper pump body (1) and the lower pump body (3) are respectively a streamline pump cavity (1-2) with a narrow outside and a wide inside and a streamline pump cavity (3-2).
3. A dual-cavity single-vibrator piezoelectric pump according to claim 1, wherein: an annular sealing groove structure is arranged among the upper pump body (1), the middle pump body (2) and the lower pump body (3), and sealing is carried out through a sealing ring (7).
4. A dual-cavity single-vibrator piezoelectric pump according to claim 1, wherein: the valve (5) is composed of an upper clamping ring, a diaphragm and a lower clamping ring, the top ends of two adjacent diaphragms are matched through superposition, the bottom ends of the two adjacent diaphragms are matched through side contact, a single diaphragm is concave-convex, 8 diaphragms are mutually superposed and assembled to form a hollow-like cone, the assembled cone-shaped top forms a circular safety small hole, and the protruding clamped edge at the bottom end of the diaphragm is fixed through the cooperation of the upper clamping ring and the lower clamping ring, so that the effect of fixing the whole valve (5) is achieved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711070598.1A CN107781144B (en) | 2017-11-03 | 2017-11-03 | Double-cavity single-vibrator piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711070598.1A CN107781144B (en) | 2017-11-03 | 2017-11-03 | Double-cavity single-vibrator piezoelectric pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107781144A CN107781144A (en) | 2018-03-09 |
| CN107781144B true CN107781144B (en) | 2023-09-08 |
Family
ID=61432627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711070598.1A Active CN107781144B (en) | 2017-11-03 | 2017-11-03 | Double-cavity single-vibrator piezoelectric pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107781144B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7047937B2 (en) | 2018-11-27 | 2022-04-05 | 株式会社村田製作所 | pump |
| CN114060255B (en) * | 2021-11-18 | 2023-06-23 | 福州大学 | Magnetorheological fluid micropump driven by gradient magnetic field |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2818843Y (en) * | 2005-09-28 | 2006-09-20 | 吴丽萍 | Single-vibrator and double-cavity piezo-electric pump without valve |
| CN201267541Y (en) * | 2008-10-21 | 2009-07-08 | 王涛 | Valve for valve stent |
| CA2938434A1 (en) * | 2015-08-07 | 2017-02-07 | Jet Fluid Systems Inc. | Double diaphragm pumps with an electromagnetic drive |
| CN107035526A (en) * | 2015-12-28 | 2017-08-11 | 通用电气公司 | Utilize the actuating system of MEMS technology |
-
2017
- 2017-11-03 CN CN201711070598.1A patent/CN107781144B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2818843Y (en) * | 2005-09-28 | 2006-09-20 | 吴丽萍 | Single-vibrator and double-cavity piezo-electric pump without valve |
| CN201267541Y (en) * | 2008-10-21 | 2009-07-08 | 王涛 | Valve for valve stent |
| CA2938434A1 (en) * | 2015-08-07 | 2017-02-07 | Jet Fluid Systems Inc. | Double diaphragm pumps with an electromagnetic drive |
| CN107035526A (en) * | 2015-12-28 | 2017-08-11 | 通用电气公司 | Utilize the actuating system of MEMS technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107781144A (en) | 2018-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107781144B (en) | Double-cavity single-vibrator piezoelectric pump | |
| CN109798239B (en) | Valveless piezoelectric pump for various choked bodies in cavity | |
| CN111980885B (en) | Stacked double-cavity parallel piezoelectric pump with partition plate at outlet | |
| CN208252319U (en) | A kind of single valve piezoelectric pump with double chambers | |
| CN216477770U (en) | Piezoelectric pump with double pump cavities integrated valve sheet body | |
| CN216518546U (en) | Novel piezoelectric pump with semi-closed arc valve block | |
| CN107120267A (en) | A kind of electromagnetic pump for improving discharge stability | |
| CN209976748U (en) | S-shaped runner valveless piezoelectric pump | |
| CN204755273U (en) | Curved complex excitation active type water -jet propulsion system is indulged to paster sandwich | |
| CN209976747U (en) | Dome composite construction valveless piezoelectric pump | |
| CN109162902B (en) | Floating type I-shaped valve piezoelectric pump | |
| CN207212661U (en) | A kind of electromagnetic pump for improving discharge stability | |
| CN210473650U (en) | Multiple mixing pump | |
| CN109973365B (en) | Multi-cavity bidirectional piezoelectric pump excited by piezoelectric transducer and pumping method thereof | |
| CN207406467U (en) | A kind of Electromagnetic water pump | |
| CN207989279U (en) | A kind of Miniature liquid pump | |
| CN112240281B (en) | Composite piezoelectric pump with built-in sickle-shaped cavity | |
| CN207454224U (en) | A kind of two-chamber simple oscialltor piezoelectric pump | |
| CN219034961U (en) | Adjustable negative pressure pump air source assembly | |
| CN112196773A (en) | Annular cavity secondary vibration valveless piezoelectric pump | |
| CN220354011U (en) | Miniature diaphragm water pump with anti-adhesion structure | |
| CN204357676U (en) | membrane pump assembly | |
| CN219344930U (en) | Gas flow pump based on piezoelectric system | |
| CN112177919B (en) | Semi-flexible telescopic integrated valve piezoelectric pump | |
| CN216131057U (en) | Laminated multi-cavity parallel piezoelectric pump based on piezoelectric ceramics |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |