CN107765513A - A kind of ultraviolet LED exposure system for liquid crystal panel manufacture - Google Patents
A kind of ultraviolet LED exposure system for liquid crystal panel manufacture Download PDFInfo
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- CN107765513A CN107765513A CN201711266051.9A CN201711266051A CN107765513A CN 107765513 A CN107765513 A CN 107765513A CN 201711266051 A CN201711266051 A CN 201711266051A CN 107765513 A CN107765513 A CN 107765513A
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- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000011324 bead Substances 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052753 mercury Inorganic materials 0.000 abstract description 12
- 238000005286 illumination Methods 0.000 abstract description 6
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Abstract
The invention discloses a kind of ultraviolet LED exposure system for liquid crystal panel manufacture, including the first light combination mirror, first kind LED area light source and the second class LED area light source, first kind LED area light source includes first substrate, LED lamp bead and and collimation lens, other middle collimation lenses and middle LED lamp bead center line between the collimation lens of the collimation lens of leftmost column and rightmost side row overlap, the center line of any LED lamp bead of leftmost column is to left avertence, the center line lateral deviation to the right of any LED lamp bead of rightmost side row, the most center line lateral deviation forward of any LED lamp bead of front side row, the most center line lateral deviation backward of any LED lamp bead of rear side row.The ultraviolet LED exposure system, as light source, is manufactured suitable for liquid crystal panel using the ultraviolet LED of at least two wavelength, not only obtains the high intensity Uniform Illumination suitable with former mercury lamp exposure system, and can ensure that the spectral intensity of each position in target face is more uniform.
Description
Technical field
The present invention relates to a kind of ultraviolet LED exposure system, more particularly to a kind of ultraviolet LED for liquid crystal panel manufacture to expose
Photosystem.
Background technology
As one of equipment the most key in liquid crystal panel manufacturing process, conventional exposure machine uses single or multiple height more
Pressure mercury lamp is as exposure light source, and single lamp electrical power is up to more than 16KW, life-span 4000h, tens thousand of to the hundreds thousand of members of unit price, therefore,
Every machine electricity consumption and the use cost and its costliness for changing fluorescent tube consumptive material.Moreover, by《Minamata pact》Limitation, many country names
Arrange mercurous class product of embargoing.
UVLED is quickly grown in recent years, and as semiconductor light source, its life-span, ultraviolet produced up to more than 20000 hours
Efficiency is more than 10 times of high-pressure sodium lamp, and environment friendly and pollution-free, is the perfect light source for replacing mercury lamp.
Because in the market mercury lamp exposure machine storage is huge, so while New LED exposure machine is developed, to existing mercury lamp
Exposure machine, which enters line light source transformation, also turns into a big demand.It is however, simultaneous with original mercury lamp exposure light path and exposure technology to ensure
Some difficult points when being replaced also be present in capacitive, ultraviolet LED:(1) LED spectrum width is very narrow, it is difficult to the multiband with mercury lamp
Spectrum is consistent, and exposure technology is difficult to compatibility;(2) LED power is small, to realize the equivalent power density of mercury lamp exposure sources,
A large amount of LED composition area sources, on the premise of original mercury lamp illumination path is not changed, especially side in LED array must be used
The high angle scattered light that LED lamp bead at edge is sent is hardly entered in follow-up illuminator, causes power density to be absorbed in bottleneck, especially
It is the light intensity at target face edge than relatively low.
The content of the invention
The technical problems to be solved by the invention are:A kind of ultraviolet LED exposure system for liquid crystal panel manufacture is provided,
The ultraviolet LED exposure system, as light source, not only can be suitably used in liquid crystal panel manufacture, and be able to ensure that using ultraviolet LED
The light intensity of the reception of target face is more uniform.
In order to solve the above technical problems, the technical scheme is that:A kind of ultraviolet LED for liquid crystal panel manufacture exposes
Photosystem, including the first light combination mirror, first kind LED area light source and the second class LED area light source, first light combination mirror are arranged at mesh
The top in mark face and it is located at the top of the first light combination mirror, the first kind with target face angle at 45 °, the first kind LED area light source
The light and the angle of the upper surface of the first light combination mirror that LED area light source is sent is 45 ° and penetrates the first light combination mirror, second class
LED area light source is located at the one side of the first light combination mirror, under light and the first light combination mirror that the second class LED area light source is sent
The angle on surface is 45 ° and reflected by lower surface, the structure phase of the first kind LED area light source and the second class LED area light source
Same but wave band is different, and the first kind LED area light source includes first substrate, left and right directions LED lamp bead and and LED arranged in columns
Several one-to-one collimation lenses of pearl, the front and rear row spacing between each column LED lamp bead are equal;The LED lamp bead of leftmost column
Column pitch between the middle LED lamp bead of other row between the LED lamp bead of rightmost side row is equal and equal to row's spacing, each standard
Straight lens are according to row's spacing rectangular array, among other between the collimation lens of leftmost column and the collimation lens of rightmost side row
Collimation lens and middle LED lamp bead correspond and center line overlaps, and the LED lamp bead of leftmost column and the collimation of leftmost column are saturating
Mirror corresponds, and the center line of any LED lamp bead of leftmost column is located at the left side of corresponding collimation lens center line, the rightmost side
The center line of any LED lamp bead of row is located at the right side of corresponding collimation lens center line, most any LED lamp bead of front side row
Center line is located at the front side of corresponding collimation lens center line, and most the center line of any LED lamp bead of rear side row is positioned at corresponding
The rear side of collimation lens center line.
As a kind of preferable scheme, center line and the corresponding collimation lens of any LED lamp bead of the leftmost column
Spacing between center line is left for Δ, and the center line of any LED lamp bead of rightmost side row is located at corresponding collimation lens center line
Between spacing it is right for Δ, the center line of most any LED lamp bead of front side row is located between corresponding collimation lens center line
Before spacing is Δ, the spacing that the center line of most any LED lamp bead of rear side row is located between corresponding collimation lens center line is
After Δ, before a Δ left side=Δ right side=Δ=Δ after.
As a kind of preferable scheme, between the Δ left 1/1 to eight/10ths for column pitch.
As a kind of preferable scheme, the LED exposure system also includes second light combination mirror and a 3rd class LED
Area source, first kind LED area light source, the second class LED area light source are different with the light wave band sent of the 3rd class LED area light source,
Second light combination mirror is parallel with the first light combination mirror and is disposed below, and the target face is in the lower section of the second light combination mirror, institute
The side that the 3rd class LED area light source is located at the second light combination mirror is stated, the light and second that the 3rd class LED area light source is sent close beam
The angle of the lower surface of mirror is 45 ° and reflected by lower surface that the light that the first kind LED area light source is sent closes through first
It is radiated at behind the upper surface of Shu Jing and the second light combination mirror in target face;The light that the second class LED is sent is through the first light combination mirror
Lower surface reflection after again through the second light combination mirror upper surface after be radiated in target face, the light that the 3rd class LED is sent
Line is radiated in target face behind the lower surface of the second light combination mirror.
As a kind of preferable scheme, the structure of the 3rd class LED area light source and the structure phase of the second class LED area light source
Together.
As a kind of preferable scheme, the collimation lens includes the first square lens body and second party of LED lamp bead
Shape lens body, the center line of the first square lens body and the second square lens body overlap, and described first is square
For mirror body compared to the second square lens body closer to LED lamp bead, the exiting surface of first square-lens is arc surface, described
The exiting surface of second square-lens is quadratic surface, and the curvature of the exiting surface of the first square-lens is square more than described second
The curvature of the exiting surface of mirror.
After employing above-mentioned technical proposal, effect of the invention is:1st, due to ultraviolet LED exposure system, including the first conjunction
Shu Jing, first kind LED area light source and the second class LED area light source, first light combination mirror are arranged at the top of target face and and mesh
Mark face angle at 45 °, the first kind LED area light source are located at the top of the first light combination mirror, the light that first kind LED area light source is sent
The angle of the upper surface of line and the first light combination mirror is 45 ° and penetrates the first light combination mirror, and the second class LED area light source is located at first
The one side of light combination mirror, the light and the angle of the lower surface of the first light combination mirror that the second class LED area light source is sent be 45 ° and
Reflected by lower surface, so, connected using multiband spectrum of the LED area light source of two kinds of different-wavebands as far as possible with mercury lamp
Closely, it is compatible that exposure technology can be achieved, realize ultraviolet LED light source apply with the manufacture of liquid crystal panel;2nd, first kind LED faces light
Source is identical with the structure of the second class LED area light source, and the center line of LED lamp bead and collimation lens in edge misplaces, this
Sample, the light that the LED lamp bead at edge is sent is by being integrally inclined to target face, the LED lamp bead center at such edge after collimation lens
Light at line is radiated at target face edge, and the middle part of such target face and the intensity of illumination at edge are more or less the same, overall uniform
Degree is more preferable.
And between the center line and corresponding collimation lens center line due to any LED lamp bead of the leftmost column
It is Δ to be located at the spacing between corresponding collimation lens center line away from the center line for a Δ left side, any LED lamp bead of rightmost side row
The right side, the center line of most any LED lamp bead of front side row are located at before the spacing between corresponding collimation lens center line is Δ, finally
It is a Δ left side=Δ right side after Δ that the center line of any LED lamp bead of side row, which is located at the spacing between corresponding collimation lens center line,
Before=Δ=Δ after, so, the LED lamp bead deployment scenarios at the edge of whole LED area light source are consistent, and the illumination at target face edge is strong
Degree is evenly.
Again because the LED exposure system also includes second light combination mirror and a 3rd class LED area light source, the first kind
LED area light source, the second class LED area light source are different with the light wave band sent of the 3rd class LED area light source, second light combination mirror
Parallel with the first light combination mirror and be disposed below, the target face is in the lower section of the second light combination mirror, the 3rd class LED faces light
Source is located at the side of the second light combination mirror, the light and the folder of the lower surface of the second light combination mirror that the 3rd class LED area light source is sent
Angle is 45 ° and reflected by lower surface that the light that the first kind LED area light source is sent closes beam through the first light combination mirror and second
It is radiated at behind the upper surface of mirror in target face;The light that the second class LED is sent is after the lower surface reflection of the first light combination mirror
It is radiated at again behind the upper surface of the second light combination mirror in target face, the light that the 3rd class LED area light source is sent is by the
It is radiated at behind the lower surface of two light combination mirrors in target face, therefore, the wave band of LED area light source can be increased by two light combination mirrors, made
The light of three kinds of wave bands is radiated in target face after closing beam, realizes LED light spectrum and the uniformity of mercury lamp spectrum, meets that light source is transformed
The compatibility of front and rear exposure technology, while existing multi-wavelength LED mixing Splicing model is compared, the program can break through etendue
Limitation, the higher power density of output, and realize more preferable spatial uniformity.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of the embodiment of the present invention 1;
Fig. 2 is the close-up schematic view of the first kind LED area light source of the embodiment of the present invention 1;
Fig. 3 is the structural representation of the embodiment of the present invention 1;
In accompanying drawing:1st, first kind LED area light source;11st, first substrate;12nd, the LED lamp bead of rightmost side row;13rd, middle LED
Lamp bead;14th, the first square lens body;15th, the second square lens body;2nd, the second class LED area light source;3rd, the first light combination mirror;
4th, target face;5th, the 3rd class LED area light source;6th, the second light combination mirror.
Embodiment
Below by specific embodiment, the present invention is described in further detail.
Embodiment 1
As depicted in figs. 1 and 2, a kind of ultraviolet LED exposure system for liquid crystal panel manufacture, including the first light combination mirror 3,
The class LED area light source 2 of first kind LED area light source 1 and second, first light combination mirror 3 are arranged at the top of target face 4 and and target
4 angle at 45 ° of face, the first kind LED area light source 1 are located at the top of the first light combination mirror 3, what first kind LED area light source 1 was sent
The angle of the upper surface of light and the first light combination mirror 3 is 45 ° and penetrates the first light combination mirror 3, the second class LED area light source 2
The light and the folder of the lower surface of the first light combination mirror 3 sent in the one side of the first light combination mirror 3, the second class LED area light source 2
Angle is 45 ° and to be reflected by lower surface, and the first kind LED area light source 1 is identical with the structure of the second class LED area light source 2 but ripple
Duan Butong, light combination mirror are a kind of currently used optical mirror slips,
By two sides plated film so as to which the light for realizing to different-waveband is reflected and is projected, wherein, in the present embodiment,
The wave band of a kind of LED area light source 1 is 365nm, and the wave band of the second class LED area light source 2 is 396nm, then, the first light combination mirror 3
Upper surface can transmit the wave band less than or equal to 365nm, and the surface of emission can reflect greater than the wave band equal to 395 so.This reality
The light combination mirror of Geng Xu Electro-optical Technology, INC. (US) 62 Martin Road, Concord, Massachusetts 017 of Shenzhen production can be selected by applying example.
The first kind LED area light source 1 includes first substrate 11, left and right directions LED lamp bead and and LED lamp bead arranged in columns
Several one-to-one collimation lenses, the front and rear row spacing between each column LED lamp bead are equal;The LED lamp bead of leftmost column and
Column pitch between the middle LED lamp bead 13 of other row between the LED lamp bead 12 of rightmost side row is equal and equal to spacing is arranged, respectively
Collimation lens is according to row's spacing rectangular array, in other between the collimation lens of leftmost column and the collimation lens of rightmost side row
Between collimation lens and middle LED lamp bead 13 correspond and center line overlaps, the LED lamp bead of leftmost column and the standard of leftmost column
Straight lens correspond, and the center line of any LED lamp bead of leftmost column is located at the left side of corresponding collimation lens center line, most
The center line of any LED lamp bead of right-hand column is located at any LED on the right side of corresponding collimation lens center line, most front side row
The center line of pearl is located at the front side of corresponding collimation lens center line, the most center line of any LED lamp bead of rear side row positioned at pair
The rear side for the collimation lens center line answered.
In the present embodiment, the center line of any LED lamp bead of the leftmost column and corresponding collimation lens center line it
Between spacing it is left for Δ, between the center line of any LED lamp bead of rightmost side row is located between corresponding collimation lens center line
It is Δ to be located at the spacing between corresponding collimation lens center line away from the center line for the Δ right side, most any LED lamp bead of front side row
Before, after most spacing of the center line of any LED lamp bead of rear side row between corresponding collimation lens center line is Δ, Δ is left
Before=Δ the right side=Δ=Δ after.Between the Δ left 1/1 to eight/10ths for column pitch.
The collimation lens includes the first square 14 and second square lens body 15 of lens body of LED lamp bead, described
The center line of first square 14 and second square lens body 15 of lens body is overlapped, and the first square lens body 14 is compared
Second square lens body 15 is closer to LED lamp bead, and the exiting surface of first square-lens is arc surface, and described second is square
The exiting surface of lens is quadratic surface, and the curvature of the exiting surface of the first square-lens is more than the light extraction of second square-lens
The curvature in face.
As shown in Fig. 2 by taking the LED lamp bead 12 of rightmost side row as an example, the LED lamp bead 12 of rightmost side row is relative to corresponding standard
Straight lens deviation right side, now the light route in Fig. 2 is it is known that when the LED lamp bead 12 of rightmost side row is relative to corresponding
During collimation lens deviation right side, the light that the intensity of its center line is higher can pass through collimation lens and be inclined to left side, so, make mesh
The intensity of illumination at the edge of mark face 4 and the intensity of illumination at other positions are more uniform.Similarly, the LED lamp bead deviation left side of the leftmost side,
The light of approximate centerline is then to right avertence, and the LED lamp bead deviation front side of most front side, the light of approximate centerline is then to retrodeviating, most
The LED lamp bead deviation rear side of rear side, the light of approximate centerline are then inclined forward.
Embodiment 2
New structure is added on the basis of embodiment 1 in the present embodiment, the LED exposure system also includes one
Second light combination mirror 6 and a 3rd class LED area light source 5, the wave band of the 3rd class LED area light source 5 is 435nm, and the second light combination mirror 6 is saturating
Less than 395nm light, reflect greater than 435nm light.First kind LED area light source 1, the second class LED area light source 2 and the 3rd class LED faces
The light wave band that sends of light source 5 is different, and second light combination mirror 6 is parallel with the first light combination mirror 3 and is disposed below, the mesh
Mark face 4 is in the lower section of the second light combination mirror 6, and the 3rd class LED area light source 5 is located at the side of the second light combination mirror 6, and the described 3rd
The light that class LED area light source 5 is sent and the angle of the lower surface of the second light combination mirror 6 be 45 ° and reflected by lower surface, described
The light that a kind of LED area light source 1 is sent is radiated at target face 4 behind the upper surface of the first light combination mirror 3 and the second light combination mirror 6
On;The light that the second class LED is sent runs through the upper table of the second light combination mirror 6 again after the lower surface reflection of the first light combination mirror 3
It is radiated at behind face in target face 4, the light that the 3rd class LED is sent is radiated at mesh behind the lower surface of the second light combination mirror 6
On mark face 4.
The structure of the 3rd class LED area light source 5 is identical with the structure of the second class LED area light source 2.
The ultraviolet LED exposure system of the present invention closes beam mode using dual wavelength or multi-wavelength, realizes LED light spectrum and mercury lamp light
The uniformity of spectrum, meet the compatibility of exposure technology before and after light source transformation, while compared to existing multi-wavelength LED mixing splicing mould
Formula, the program can break through the limitation of etendue, the higher power density of output, and realize more preferable spatial uniformity;Separately
Outside by offseting LED lamp bead so that light source center is offset with collimation lens center, so as to cause collimated light beam angle to be sent out
Raw skew, the LED lamp bead for being arranged in edge, energy light distribution maximize, the energy utilization effect of lifting integral LED area source
Rate, improve uniformity.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as the limit to the scope of the invention
It is fixed, the various modifications made on the basis of design spirit of the present invention is not departed to technical solution of the present invention and transformation, it all should fall
In the protection domain for entering claims of the present invention determination.
Claims (6)
- A kind of 1. ultraviolet LED exposure system for liquid crystal panel manufacture, it is characterised in that:Including the first light combination mirror, the first kind LED area light source and the second class LED area light source, first light combination mirror be arranged at the top of target face and with target face folder at 45 ° Angle, the first kind LED area light source are located at the top of the first light combination mirror, and the light and first that first kind LED area light source is sent close The angle of Shu Jing upper surface is 45 ° and penetrates the first light combination mirror, and the second class LED area light source is located at the one of the first light combination mirror Side, the light and the angle of the lower surface of the first light combination mirror that the second class LED area light source is sent are 45 ° and pass through lower surface Reflection, the first kind LED area light source is identical with the structure of the second class LED area light source but wave band is different, the first kind LED faces Light source include first substrate, left and right directions LED lamp bead arranged in columns and with several one-to-one collimation lenses of LED lamp bead, Front and rear row spacing between each column LED lamp bead is equal;The LED lamp bead of leftmost column and the rightmost side row LED lamp bead between its Column pitch between the middle LED lamp bead that he arranges is equal and equal to row's spacing, and each collimation lens is according to spacing rectangular array is arranged, most A pair of other middle collimation lenses and middle LED lamp bead 1 between the collimation lens of the collimation lens of left-hand line and rightmost side row Should and center line overlap, the collimation lens of the LED lamp bead of leftmost column and leftmost column corresponds, leftmost column it is any The center line of LED lamp bead is located at the left side of corresponding collimation lens center line, the center line position of any LED lamp bead of rightmost side row In the right side of corresponding collimation lens center line, the center line of most any LED lamp bead of front side row is located at corresponding collimation lens The front side of center line, the center line of most any LED lamp bead of rear side row are located at the rear side of corresponding collimation lens center line.
- A kind of 2. ultraviolet LED exposure system for liquid crystal panel manufacture as claimed in claim 1, it is characterised in that:It is described Spacing between the center line of any LED lamp bead of leftmost column and corresponding collimation lens center line is left for Δ, rightmost side row Any LED lamp bead the spacing that is located between corresponding collimation lens center line of center line it is right for Δ, most front side row is any It is most any LED lamp bead of rear side row before Δ that the center line of LED lamp bead, which is located at the spacing between corresponding collimation lens center line, Center line be located at after the spacing between corresponding collimation lens center line is Δ, before a Δ left side=Δ right side=Δ=Δ after.
- A kind of 3. ultraviolet LED exposure system for liquid crystal panel manufacture as claimed in claim 2, it is characterised in that:It is described Between Δ left 1/1 to eight/10ths for column pitch.
- A kind of 4. ultraviolet LED exposure system for liquid crystal panel manufacture as claimed in claim 3, it is characterised in that:It is described LED exposure system also includes second light combination mirror and a 3rd class LED area light source, first kind LED area light source, the second class LED area light source is different with the light wave band sent of the 3rd class LED area light source, and second light combination mirror is parallel with the first light combination mirror And be disposed below, the target face is in the lower section of the second light combination mirror, and the 3rd class LED area light source is located at the second light combination mirror Side, the light and the angle of the lower surface of the second light combination mirror that the 3rd class LED area light source is sent is 45 ° and passes through following table Face is reflected, and the light that the first kind LED area light source is sent irradiates behind the upper surface of the first light combination mirror and the second light combination mirror In target face;The light that the second class LED is sent runs through the second light combination mirror again after the lower surface reflection of the first light combination mirror Upper surface after be radiated in target face, the light that the 3rd class LED is sent irradiates behind the lower surface of the second light combination mirror In target face.
- A kind of 5. ultraviolet LED exposure system for liquid crystal panel manufacture as claimed in claim 4, it is characterised in that:It is described The structure of 3rd class LED area light source is identical with the structure of the second class LED area light source.
- 6. a kind of ultraviolet LED exposure system for liquid crystal panel manufacture as described in any one of claim 1 to 5, its feature It is:The collimation lens includes the first square lens body and the second square lens body of LED lamp bead, and described first is square The center line of lens body and the second square lens body overlaps, and the first square lens body compares the second square-lens sheet Body is closer to LED lamp bead, and the exiting surface of first square-lens is arc surface, and the exiting surface of second square-lens is two Secondary curved surface, and the curvature of the exiting surface of the first square-lens is more than the curvature of the exiting surface of second square-lens.
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108826026A (en) * | 2018-08-01 | 2018-11-16 | 苏州汇影光学技术有限公司 | A kind of stackable ultraviolet LED light source mould group of modularization |
CN108826232A (en) * | 2018-08-02 | 2018-11-16 | 苏州汇影光学技术有限公司 | A kind of stackable ultraviolet source mould group of modularization |
CN109613802A (en) * | 2018-12-24 | 2019-04-12 | 无锡影速半导体科技有限公司 | A kind of exposure device that multiband exposes respectively and method |
CN109814342A (en) * | 2019-02-18 | 2019-05-28 | 珠海迈时光电科技有限公司 | A kind of ultraviolet multi-wavelength exposure light source and exposure sources |
CN113410373A (en) * | 2021-06-02 | 2021-09-17 | 麦科勒(滁州)新材料科技有限公司 | Light-gathering type ultraviolet LED lamp bead |
CN115318590A (en) * | 2022-10-11 | 2022-11-11 | 歌尔股份有限公司 | Curing method of ultraviolet curing adhesive and ultraviolet irradiation device |
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CN109613802B (en) * | 2018-12-24 | 2021-07-30 | 无锡影速半导体科技有限公司 | Multi-band exposure device and method |
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