CN107748181A - A kind of graphene-based gas sensor - Google Patents
A kind of graphene-based gas sensor Download PDFInfo
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- CN107748181A CN107748181A CN201710948142.4A CN201710948142A CN107748181A CN 107748181 A CN107748181 A CN 107748181A CN 201710948142 A CN201710948142 A CN 201710948142A CN 107748181 A CN107748181 A CN 107748181A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
Abstract
The invention provides a kind of novel gas sensor based on graphene, form one layer of composite graphite alkene layer, the side of the composite graphite alkene layer contact metal layer is formed with granules of stannic oxide layer, the composite graphite alkene layer not contact metal layer side formed gold nano grain, graphene is modified simultaneously by granules of stannic oxide and gold nano grain, and adjust its electric property, it is set to meet the requirement of gas sensor, further improve the sensitivity of sensor, other sandwich construction can more make full use of contact gas to be detected, so that the stability of sensor is greatly improved.
Description
Technical field
The present invention relates to a kind of sensor, and in particular to a kind of graphene-based gas sensor.
Background technology
Gas sensor is that a kind of be converted into the information such as the composition of gas, concentration can be by personnel, instrument and meter, calculating
The device for the information that machine etc. utilizes！Gas sensor is generally categorized as one kind of chemical sensor, although this classification is not necessarily
Science." gas sensor " includes：Semiconductor gas sensor, electrochemical gas sensor, catalytic combustion method gas sensor,
Thermal conductivity gas sensor, infrared gas sensor, solid-state electrolyte gas sensor etc..
Graphene is a kind of cellular flat film formed by carbon atom, is a kind of standard of an only atomic layer level thickness
Two-dimensional material, monoatomic layer graphite is done so being called.Its thickness is about 0.335 μm, is deposited according to the difference of preparation method
It is the basic knot of all carbon crystals in addition to diamond in different fluctuatings, generally about 1 μm or so of the height in vertical direction
Structure unit.Graphene most potential application at present is the substitute as silicon, ultra micro transistor npn npn is manufactured, for producing future
Supercomputer.Substitute silicon with graphene, the speed of service of computer processor will be fast hundreds times.In addition, graphene is several
It is fully transparent, only absorbs 2.3% light.On the other hand, it is very fine and close, even minimum gas molecule can not yet
Penetrate.These features cause it to be highly suitable as the raw material of transparent electron product.
Application of the graphene on gas sensor at present has been widely studied, but potentiality therein are not complete
Excavate, therefore the gas sensor based on graphene, especially also have very with the gas sensor that other materials are combined
Big development space, there is the gas of various structures or structure that number of values must find and find and combination of materials to pass in the field
Sensor.
The content of the invention
The present invention provide a kind of new structure based on graphene complex gas sensor, it can speed up carrier
Collect, make full use of contact gas to be detected so that the sensitivity of sensor is greatly improved.Skill of the present invention
Art scheme is：A kind of graphene-based gas sensor, it is characterised in that include：
Silicon substrate；
Layer of silicon dioxide insulating barrier is formed on the silicon substrate；
A metal level is formed on the silicon dioxide insulating layer, the metal level includes metal column array and positioned at described
The contact electrode on metal column array both sides；
One layer of composite graphite alkene layer is formed in the metal level, the side of the composite graphite alkene layer contact metal layer is formed
There is a granules of stannic oxide layer, the side of the composite graphite alkene layer not contact metal layer forms gold nano grain；
The graphene composite bed all covers the metal column array and at least partly covers the contact electrode on both sides.
Further, the composite graphite alkene layer preparation method is to be formed on copper-based bottom after graphene layer by the way that shape is deposited
Into granules of stannic oxide layer, then granules of stannic oxide layer is transferred on the metal level down, then gold is formed on graphene layer
Nano particle.
Further, the gold nano grain is to be initially formed gold nano grain solution and then be formed at graphene by spin coating
On layer.
Further, the gold nano grain is directly to be formed by being deposited on the graphene layer.
Further, the particle size range of the gold nano grain is 5-50 nanometers.
Further, also by ion etching mode in the granules of stannic oxide layer table after the granules of stannic oxide layer is formed
Face forms cavernous structure.
Further, the metal column array is identical with the thickness of the contact electrode and material is identical, by identical conditions
Once formed by mask etching after lower evaporated metal layer.
Further, the distance between described metal column scope is 50-100 microns.
The beneficial effects of the present invention are：The invention provides a kind of novel gas sensor based on graphene, shape
Into one layer of composite graphite alkene layer, the side of the composite graphite alkene layer contact metal layer is described multiple formed with granules of stannic oxide layer
The side for closing graphene layer not contact metal layer forms gold nano grain, by granules of stannic oxide and gold nano grain simultaneously to stone
Black alkene is modified, and adjusts its electric property, it is met the requirement of gas sensor, further improves the spirit of sensor
Sensitivity, sandwich construction, which can more make full use of, in addition contacts gas to be detected so that the stability of sensor has obtained very big carry
Rise.
Brief description of the drawings
Fig. 1 is the structural representation of the graphene-based gas sensor of the present invention.
Embodiment
For the ease of understanding the present invention, the present invention is described more fully below with reference to relevant drawings.In accompanying drawing
Give the preferred embodiment of the present invention.But the present invention can realize in many different forms, however it is not limited to herein
Described embodiment.On the contrary, the purpose for providing these embodiments is to make the understanding to the disclosure more saturating
It is thorough comprehensive.
The present invention is described in further detail below in conjunction with the accompanying drawings and the specific embodiments.
Referring to Fig. 1, the present invention provide a kind of new structure based on graphene-based gas sensor, it can.
The technical solution adopted in the present invention is：A kind of graphene-based gas sensor, it is characterised in that include：
Silicon substrate；
Layer of silicon dioxide insulating barrier is formed on the silicon substrate；
A metal level is formed on the silicon dioxide insulating layer, the metal level includes metal column array and positioned at described
The contact electrode on metal column array both sides；
One layer of composite graphite alkene layer is formed in the metal level, the side of the composite graphite alkene layer contact metal layer is formed
There is a granules of stannic oxide layer, the side of the composite graphite alkene layer not contact metal layer forms gold nano grain；
The graphene composite bed all covers the metal column array and at least partly covers the contact electrode on both sides.
Further, the composite graphite alkene layer preparation method is to be formed on copper-based bottom after graphene layer by the way that shape is deposited
Into granules of stannic oxide layer, then granules of stannic oxide layer is transferred on the metal level down, then gold is formed on graphene layer
Nano particle.
Further, the gold nano grain is to be initially formed gold nano grain solution and then be formed at graphene by spin coating
On layer.
Further, the gold nano grain is directly to be formed by being deposited on the graphene layer.
Further, the particle size range of the gold nano grain is 5-50 nanometers.
Further, also by ion etching mode in the granules of stannic oxide layer table after the granules of stannic oxide layer is formed
Face forms cavernous structure.
Further, the metal column array is identical with the thickness of the contact electrode and material is identical, by identical conditions
Once formed by mask etching after lower evaporated metal layer.
Further, the distance between described metal column scope is 50-100 microns.
The invention provides a kind of novel gas sensor based on graphene, forms one layer of composite graphite alkene layer, institute
The side of composite graphite alkene layer contact metal layer is stated formed with granules of stannic oxide layer, the composite graphite alkene layer not contact metal layer
Side form gold nano grain, graphene is modified simultaneously by granules of stannic oxide and gold nano grain, and adjust it
Electric property, makes it meet the requirement of gas sensor, further improves the sensitivity of sensor, and sandwich construction more can in addition
Make full use of contact gas to be detected so that the stability of sensor is greatly improved.
Position relationship is used for being given for example only property explanation described in accompanying drawing, it is impossible to is interpreted as the limitation to this patent, shows
So, the above embodiment of the present invention is only intended to clearly illustrate example of the present invention, and is not the reality to the present invention
Apply the restriction of mode.For those of ordinary skill in the field, can also make on the basis of the above description other
Various forms of changes or variation.There is no necessity and possibility to exhaust all the enbodiments.All spirit in the present invention
With all any modification, equivalent and improvement made within principle etc., it should be included in the protection domain of the claims in the present invention
Within.
Claims (8)
1. a kind of graphene-based gas sensor, it is characterised in that include：
Silicon substrate；
Layer of silicon dioxide insulating barrier is formed on the silicon substrate；
A metal level is formed on the silicon dioxide insulating layer, the metal level includes metal column array and positioned at the metal
The contact electrode on post array both sides；
One layer of composite graphite alkene layer is formed in the metal level, the side of the composite graphite alkene layer contact metal layer forms aerobic
Change tin particles layer, the composite graphite alkene layer not contact metal layer side formed gold nano grain；
The graphene composite bed all covers the metal column array and at least partly covers the contact electrode on both sides.
2. graphene-based gas sensor as claimed in claim 1, it is characterised in that the composite graphite alkene layer preparation method
It is to be formed after graphene layer to form granules of stannic oxide layer by evaporation on copper-based bottom, then shifts granules of stannic oxide layer down
Onto the metal level, then gold nano grain is formed on graphene layer.
3. graphene-based gas sensor as claimed in claim 2, it is characterised in that the gold nano grain is to be initially formed gold
Then nanoparticles solution is formed on graphene layer by spin coating.
4. graphene-based gas sensor as claimed in claim 2, it is characterised in that the gold nano grain is directly to pass through
Evaporation is formed on the graphene layer.
5. the graphene-based gas sensor as described in claim 3 or 4, it is characterised in that the particle diameter of the gold nano grain
Scope is 5-50 nanometers.
6. graphene-based gas sensor as claimed in claim 2, the granules of stannic oxide layer are also carved after being formed by ion
Erosion mode forms cavernous structure in the granules of stannic oxide layer surface.
7. graphene-based gas sensor as claimed in claim 1, it is characterised in that the metal column array and the contact
The thickness of electrode is identical and material is identical, by once being formed by mask etching after evaporated metal layer under identical conditions.
8. graphene-based gas sensor as claimed in claim 7, it is characterised in that the distance between described metal column scope
It is 50-100 microns.
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| CN201710948142.4A CN107748181A (en) | 2017-10-12 | 2017-10-12 | A kind of graphene-based gas sensor |
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| CN201710948142.4A CN107748181A (en) | 2017-10-12 | 2017-10-12 | A kind of graphene-based gas sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108892125A (en) * | 2018-07-10 | 2018-11-27 | 浙江大学 | A kind of gas molecule detection membrane |
| CN111320176A (en) * | 2020-04-26 | 2020-06-23 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | Gas detection device based on silicon carbide graphene material and preparation method |
| CN113533300A (en) * | 2021-07-22 | 2021-10-22 | 岭南师范学院 | Graphene plasmon gas sensor and manufacturing method thereof |
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| CN103641061A (en) * | 2013-12-03 | 2014-03-19 | 电子科技大学 | Micro-nano gas sensor with gas-sensitive reconstruction effect and preparation method of micro-nano gas sensor |
| CN104849324A (en) * | 2015-05-25 | 2015-08-19 | 吉林大学 | Resistance-type gas sensor based on graphene/multi-walled carbon nano-tube/zinc oxide composite material, and manufacturing method of resistance-type gas sensor |
| CN105891271A (en) * | 2016-03-31 | 2016-08-24 | 吉林大学 | Resistance-type gas sensor based on graphene, stannic oxide and zinc oxide composite, preparation method and application thereof |
| CN106546633A (en) * | 2016-12-07 | 2017-03-29 | 成都聚智工业设计有限公司 | Enhanced gas sensor of a kind of nickel oxide nanoparticle and preparation method thereof |
| CN106970119A (en) * | 2017-04-26 | 2017-07-21 | 成都聚立汇信科技有限公司 | A kind of graphene gas sensor |
| CN107643327A (en) * | 2017-09-12 | 2018-01-30 | 山东大学 | A kind of Au/SnO of graphene modified2Ammonia gas sensor of structure and preparation method thereof |
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Patent Citations (7)
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| CN102590309A (en) * | 2012-02-03 | 2012-07-18 | 游学秋 | Manufacture and application method for graphene transistor and biosensor of graphene transistor |
| CN103641061A (en) * | 2013-12-03 | 2014-03-19 | 电子科技大学 | Micro-nano gas sensor with gas-sensitive reconstruction effect and preparation method of micro-nano gas sensor |
| CN104849324A (en) * | 2015-05-25 | 2015-08-19 | 吉林大学 | Resistance-type gas sensor based on graphene/multi-walled carbon nano-tube/zinc oxide composite material, and manufacturing method of resistance-type gas sensor |
| CN105891271A (en) * | 2016-03-31 | 2016-08-24 | 吉林大学 | Resistance-type gas sensor based on graphene, stannic oxide and zinc oxide composite, preparation method and application thereof |
| CN106546633A (en) * | 2016-12-07 | 2017-03-29 | 成都聚智工业设计有限公司 | Enhanced gas sensor of a kind of nickel oxide nanoparticle and preparation method thereof |
| CN106970119A (en) * | 2017-04-26 | 2017-07-21 | 成都聚立汇信科技有限公司 | A kind of graphene gas sensor |
| CN107643327A (en) * | 2017-09-12 | 2018-01-30 | 山东大学 | A kind of Au/SnO of graphene modified2Ammonia gas sensor of structure and preparation method thereof |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108892125A (en) * | 2018-07-10 | 2018-11-27 | 浙江大学 | A kind of gas molecule detection membrane |
| CN108892125B (en) * | 2018-07-10 | 2020-06-30 | 浙江大学 | Gas molecule detection membrane |
| CN111320176A (en) * | 2020-04-26 | 2020-06-23 | 哈尔滨科友半导体产业装备与技术研究院有限公司 | Gas detection device based on silicon carbide graphene material and preparation method |
| CN113533300A (en) * | 2021-07-22 | 2021-10-22 | 岭南师范学院 | Graphene plasmon gas sensor and manufacturing method thereof |
| CN113533300B (en) * | 2021-07-22 | 2022-06-21 | 岭南师范学院 | Graphene plasmon gas sensor and manufacturing method thereof |
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