CN107741667A - A kind of LCD space light modulator - Google Patents

A kind of LCD space light modulator Download PDF

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Publication number
CN107741667A
CN107741667A CN201711064463.4A CN201711064463A CN107741667A CN 107741667 A CN107741667 A CN 107741667A CN 201711064463 A CN201711064463 A CN 201711064463A CN 107741667 A CN107741667 A CN 107741667A
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layer
liquid crystal
light
light modulator
lcd space
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CN107741667B (en
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蒋向东
高升旭
王继岷
明洋舟
董湘
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553—Reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/139—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent
    • G02F1/1396—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent the liquid crystal being selectively controlled between a twisted state and a non-twisted state, e.g. TN-LC cell
    • G02F1/1397—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent the liquid crystal being selectively controlled between a twisted state and a non-twisted state, e.g. TN-LC cell the twist being substantially higher than 90°, e.g. STN-, SBE-, OMI-LC cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/12—Function characteristic spatial light modulator

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention provides a kind of LCD space light modulator, belongs to liquid crystal device technical field.The present invention includes the first transparency electrode and second transparency electrode being oppositely arranged in parallel, first orientation layer, STN type Super Twisted Nematic Liquid Crystal layers and second orientation layer, high resistant separation layer, isolation grid, reflecting layer and photosensitive layer.The present invention replaces traditional TN types liquid crystal using STN types Super Twisted Nematic Liquid Crystal, good contrast can be kept while visual perspective is widened, and have the advantage of small power consumption concurrently；In addition, the light blocking film and dielectric mirror being stacked in the new composite structure substitution traditional devices that the present invention is formed using reflecting layer and isolation grid, with improving the luminous sensitivity of optical-address liquid crystal spatial light modulator, improve its imaging effect so that the resolution ratio for reading light is higher and reduce the advantage of its driving voltage.

Description

A kind of LCD space light modulator
Technical field
The invention belongs to liquid crystal device technical field, and in particular to a kind of LCD space light modulator.
Background technology
Spatial light modulator (Spatial Light Modulator, SLM) refers to that under active control it can pass through Liquid crystal molecule modulates some parameter of light field, such as by index modulation phase, by the rotation modulation polarization state of plane of polarization or It is to realize the incoherent conversion to coherent light, so as to by certain information write-in light wave, reach the purpose of Light Modulation.
Spatial light modulator is different generally according to the playback mode for reading light, can be divided into reflective and transmission-type；And press (OA-SLM) and electrical addressing (EA-SLM) are addressed according to the different light that can be divided into of mode of input control signal again.When light addresses, own The addressing of pixel is completed simultaneously, is a kind of Parallel addressing schemes, and feature is that speed is fast.Spatial light modulator is real-time optical information Processing, the Primary Component in the contemporary optics such as adaptive optics and optical oomputing field.Largely, the property of spatial light modulator It can determine and the practical value and development prospect of application field.
At present, it is mostly more membranous systems using the liquid crystal light valve of the spatial light modulator of light addressing, with reference to Chinese patent CN98114542 discloses a kind of liquid crystal light valve, and its structure includes successively from top to bottom：Upper glassy layer, upper conductance layer, liquid crystal layer, Dielectric mirror, photoresist layer, photosensitive layer, lower conductance layer, lower ply of glass.Wherein：Photoresist layer typically uses cadmium telluride (CdTe) and vanadium oxygen phthalocyanine (VOPc) formed composite multi-layer absorbing film, CdTe polycrystalline materials resistivity be 108Ω .cm, can only There is stronger absorption to blue, green glow, the composite layered structure that magnesium fluoride and zinc sulphide are formed is as dielectric mirror, using partly leading Body silicon (Si) is used as photosensitive layer.This liquid crystal light valve may be used as the optical interconnection of real-time change, parallel optical logic, Edge enhancing, image plus-minus etc. in terms of optical digital computing, optical matrix operations and image procossing.But this liquid crystal light valve Spatial resolution it is high not enough, visual angle is also limited, and is only applicable in general image procossing, and manufacturing process is complex, Environmental pollution is subject to, quality is unstable, poor repeatability.
Prior art is because carrier is primarily generated at surface region, therefore this part carrier can be on photoconductive layer surface A conducting charge layer is formed, after part, which reads light, to be mapped to through dielectric mirror and absorbed layer people on photoconductive layer, in light The charge layer that conductance layer surface is formed will smoothly write latent charge image caused by light, cause the resolution ratio and contrast of output image Reduce.At present, liquid crystal light valve liquid crystal cell mostly uses traditional TN vertical electric field patterns, and liquid crystal is rotation erect type, and optics is special Property, usual upward angle of visibility about 10 ° very small with the change at visual angle, about 40 ° of downwards angle of visibility, left and right visual angle is about 30 °, and visible angle is narrow. Vertical panel arrangement is changed into from horizontal panel arrangement by liquid crystal molecule using voltage, liquid crystal causes because of the relation of the anglec of rotation The light of light relatively has directionality, causes under different angle, and the light visually seen can be offset, i.e., so-called gray-scale inversion；Together When, in rotary course, the liquid crystal close to glass side is not straight by alignment film (PI) influence station, causes non-uniform phenomenon.Especially It for the higher liquid crystal light valve of shading requirement is realized using twisted nematic mode to be, this light valve is using two-sided planar electricity Pole, 90 ° of twist angle arrangement architectures, using addition chiral agent nematic phase material, along the orthogonal attaching polaroid of frictional direction, but Above-mentioned liquid crystal light valve has as a drawback that：
(1) narrow viewing angles；During with the linearly polarized light of different angle incidence same intensity, due to the change of effective refractive index, into For elliptically polarized light, after second polarizer, the different output intensity of incidence angle is no longer equal, forms viewing angle problem, its Visual angle is less than 40 °.
(2) response speeds are slower；Twisted nematic mode liquid crystal light valve falls mode after rise using nature and worked, due to not having it The effect of his external force, its response speed is more than 40ms.
(3) contrasts are low；What twisted nematic liquid crystals light valve utilized is the optically-active characteristic of liquid crystal, and contrast is relatively low, especially It is that dark-state is not dark enough.
The content of the invention
The technical problems to be solved by the invention are：It is wide to provide a kind of fast response time, contrast height and visual angle LCD space light modulator.
The present invention provides following technical scheme to solve above-mentioned technical problem：
A kind of LCD space light modulator, including：The first transparency carrier and the second transparency carrier being oppositely arranged in parallel, the One transparency carrier and the second transparency carrier opposite sides have the first transparent conductance layer and the second transparent conductance layer and then formation respectively First transparency electrode and second transparency electrode, it is characterised in that from first transparency electrode to being wrapped successively between second transparency electrode Include first orientation layer, STN type Super Twisted Nematic Liquid Crystals layer, second orientation layer, high resistant separation layer, isolation grid, reflecting layer and Photosensitive layer；The reflecting layer includes the pixel cell being distributed in array and is attached thereto between each pixel cell photosensitive Area, light absorbing material is provided with the pixel cell and forms light blocking area；It is to be distributed in light blocking area by one-to-one corresponding to isolate grid The metallic reflection unit of part surface forms metallic reflection array；High resistant separation layer be completely covered by isolation grid and reflecting layer it On.
It is further that the material of photosensitive area is Ag in the present invention.
It is further that the material of separation net grid is Al in the present invention.
It is further that the material in light blocking area is insulating materials in the present invention.
It is further the 10 of high resistant separation layer in the present invention15~1016Ω。
It is further that the relative dielectric constant of high resistant separation layer is 3.9 in the present invention.
Preferably, the material of high resistant separation layer is SiO in the present invention2。
Compared to prior art, the beneficial effects of the invention are as follows：
The present invention replaces traditional TN types liquid crystal using STN types Super Twisted Nematic Liquid Crystal, can be in narrower voltage range It is interior so that liquid crystal director occur saltus step, and based on STN type super twisted formula effects enable to incident light rotation 180 °~270 °, Therefore good contrast can be kept while visual perspective is widened；In addition, the present invention uses new shading layer and isolation The light blocking film and dielectric mirror being stacked in the combining structure substitution traditional devices of grid, have and improve light addressing liquid crystal sky Between optical modulator luminous sensitivity, improve its imaging effect so that read light resolution ratio it is higher and reduce its driving electricity The advantage of pressure.
Brief description of the drawings
Fig. 1 is the structural representation of LCD space light modulator of the present invention；
Fig. 2 is that the liquid crystal molecule of traditional TN types liquid crystal molecule and STN types liquid crystal molecule of the present invention under applied voltage reverses View, wherein, 1 is TN type liquid crystal molecules, and 2 be STN type liquid crystal molecules；
Fig. 3 is the overlooking the structure diagram of separation net grid and shading layer in LCD space light modulator of the present invention；
In figure：1 is top glass substrate, and 2 be ITO conductance layers, and 3 be first orientation layer, and 4 be liquid crystal cell, and 401 be liquid crystal point Son, 5 be second orientation layer, and 6 be separation layer, and 7 be isolation grid, and 8 be light blocking area, and 9 be metal Ag films, and 10 be photosensitive layer, and 11 are Lower glass substrate.
Embodiment
The principle and characteristic of the present invention are described in detail with Figure of description in conjunction with specific embodiments by the present invention below：
Embodiment：
The present embodiment provides a kind of preparation method of LCD space light modulator, comprises the following steps：
Step A：Prepare photosensitive layer 10；
The present embodiment selects two panels glass substrate respectively as top glass substrate 1 and lower glass substrate 11, top glass substrate 1 There is transparent conductance layer 2 to form first transparency electrode and second transparency electrode respectively with the one side of lower glass substrate 11 deposition completely；So Afterwards using PECVD 3~8 microns thick of 11 single sided deposition of lower glass substrate trace doped amorphous silicon membrane as photosensitive layer 10, the material of photosensitive layer 10 is not limited to hydrogenation non crystal silicon film in the present embodiment, photosensitive it can be seen from general knowledge known in this field The material of layer 10 can be any suitable material；
Step B：Prepare reflecting layer；
Electron-beam vapor deposition method is being used to deposit a layer thickness as 1~2 micron made from step A on photosensitive layer 10 first Metal Ag films 9, technological parameter is specific as follows：Background vacuum：9×10-4Pa~2 × 10-3Pa；Evaporation current：150A；Sputtering Time：0.5 hour；Operating air pressure：5×10-3Pa；Depositional mode：Thermal evaporation；Underlayer temperature：75℃；Target：Fine silver；
Then latticed region is formed in the metal Ag films 9 etching using photoetching process and then exposes the photosensitive material in lower section Material, so as to form the pixel cell (i.e. photosensitive area) being distributed in array, it is of the invention in pixel cell be that size is micron level Visualization unit；The voltage of each pixel cell can independent control, each pixel cell regular distribution forms pel array；It is described Filling light absorbing material forms light blocking area 8 in pixel cell (photosensitive area), and preferably light absorbing material of the invention is black negativity Glue, it can hereafter be described in detail；In the light blocking area 8 of array distribution and each light blocking area 8 of connection and as photosensitive in the present invention The metal Ag films 9 in area together constitute the reflecting layer of device；
Step C：Prepare isolation grid 7：
Portion of upper surface in each light blocking area 8 made from step B deposits layer of metal Al films, several metals Al respectively Film is also distributed in array and then forms isolation grating 7 independently of each other；The present invention is not limited to the shape of single metal Al films, Can be circle, triangle, quadrangle, pentagon, hexagon or any suitable shape；The present invention is in the reflecting layer of device On the metallic reflection film that array is distributed is set, have the function that to block and read light, reduce reading light to metallic reflector The influence of following structure so that device can be operated under the reading optical condition of higher intensity, further widened answering for device Use scope；
Step D：Prepare separation layer 6：
One layer of SiO is deposited isolating light blocking layer surface made from grid 7 and step B made from step C2Film forms isolation Layer 6；The preferred high resistant separation layer of separation layer 6 of the present invention, to prevent that the free diffusion of metal ion reduces liquid crystal in metallic reflector The resistivity of layer；
Step E：Prepare liquid crystal cell；
Take top glass substrate 1 to be coated with the one side of ITO conductance layers 2 at it and prepare first orientation layer 3, in the surface system of separation layer 6 Standby second orientation layer 5, the mode present invention for preparing oriented layer is not limited, and generally use tiltedly steams silica membrane or coating The mode of polyimides carries out oriented layer preparation, wherein：It is different by adjusting when tiltedly steaming silica membrane preparation oriented layer Evaporation angle can obtain the different oblique steaming oriented layer of pre-tilt angle；Coating polyimide prepare oriented layer when, using spin coating alignment agent, It is prepared by baking and friction process；
Then STN types liquid crystal material is irrigated between first orientation layer 3 and second orientation layer 5 and forms liquid crystal layer 4, perfusion liquid During brilliant material, prepared using sprinkling introns, the technique such as UV glue jackets, ultra-violet curing, envelope avoids dust from entering when filling liquid crystal cell； First orientation layer 3, second orientation layer 5 and liquid crystal layer 4 therebetween form STN type Super Twisted Nematic Liquid Crystal boxes；Extremely This completes the preparation of LCD space light modulator as shown in Figure 1.
The operation principle of device will be as shown in figure 1, the photosignal referred to as write-in light that will control pixel, will be adjusted by space The photosignal that device processed projects is referred to as to read light, and one two-dimensional illumination intensity distribution (such as piece image) of generally use is as write-in Light, the present embodiment, as write-in light, are imaged on photosensitive layer 10 from device bottom side using pending incoherent image, read light Beam is incident from above, and makes its polarization direction consistent with liquid crystal molecule director through the polarizer.Light is read by mutually close to the ITO of side After conductance layer 2 and liquid crystal cell 4, reflected through isolating grid 7, again pass through liquid crystal cell 4, after polarization beam splitting plate, pass through one The individual printing opacity direction of principal axis analyzer vertical with polarizer polarization direction, turns into output beam.For writing the dark space in light image, Expose to that the illumination of photosensitive layer 10 is seldom, the impedance of light-sensitive material is very big, and applied voltage is mainly assigned on photosensitive layer.And liquid crystal The voltage distributed on layer is less, is not enough to produce effective electrooptic effect, remains in that aligned twisted structure.Light is so read to exist Smaller output is remained in that in the pixel of corresponding dark space without modulated effect, output beam substantially.Conversely, for write-in light The big pixel region of illumination on image, it is many to expose to the illumination of photosensitive layer 10, and photosensitive layer 10 is produced photoproduction by internal after illumination Electron hole pair, due to the generation of a large amount of carriers, the light resistance rate of light-sensitive material declines, and the impedance of light-sensitive material is smaller, outside Making alive largely falls in liquid crystal layer respective pixel area, due to mixing field-effect so that reaches maximum defeated in area's output light Go out.For other illumination illumination regions in write-in light image, the output intensity of respective pixel is also just between maximum in output beam Between value and minimum value.Liquid crystal molecule 401 by electric field acted on rotate control read light by whether.When varying strength, For the write-in light irradiation of different frequency when on photosensitive layer 10, the resistance in 10 each region of photosensitive layer is different, the modulation electricity thus generated Different, the liquid crystal molecule angle of rotation in modulated electric fields difference then region is different, and the light intensity spatial distribution of such output beam is just Spatial distribution according to write-in light image is modulated.
The present invention significantly improving and be a little compared with prior art：
(1), LCD space light modulator of the present invention uses STN type Super Twisted Nematic Liquid Crystals, can widen voltage-regulation Dynamic range, so as to widen display tonal gradation, and have the advantage that small power consumption, contrast are high and visual perspective is wide concurrently.Below It is described in detail with reference to the concrete structure of device of the present invention：
As shown in Fig. 2 tradition is generally using the LCD space light modulator of TN type torsional mode nematic liquid crystals in pressurization shape Can be by incident light maximum rotation to 90 ° under state, and the STN type STN Super TN phases liquid crystal that the present invention uses is based on the super torsions of STN Incident light can be rotated 180 °~270 ° by rotatable effect, and visual perspective has been widened by this characteristic；
On the other hand, when preparing area and selecting bigger LCD space light modulator (i.e. big display screen), with TN types Device contrast is poor made from liquid crystal, and can still keep higher contrast with STN types liquid crystal, because with The electro-optical characteristic curves of the device of STN type liquid crystal are more precipitous, sharp keen electro-optical characteristic curves in very narrow voltage range just It can cause liquid crystal director that saltus step occurs.In addition, belong to passive matrix type device with the device of STN type liquid crystal, so work( Consume small, power saving.Therefore, by the improvement of STN type liquid crystal, there is the advantage that the capacity of display is big, contrast is high and saves.
(2), LCD space light modulator of the present invention substitutes tradition in structure design from array distribution isolation grid 7 Dieletric reflection mirror layer is as metallic reflection region, while optimization shading layer, compared with prior art, has and improve light addressing liquid The luminous sensitivity of brilliant spatial light modulator, improve its imaging effect so that read light resolution ratio it is higher and reduce its driving The advantage of voltage；It is low to prepare simplicity, production cost for device of the present invention simultaneously.Lower mask body colligator part structure is detailed to this progress Explanation：
As shown in figure 3, selected in the present invention by rational structure design and material, the sense formed using metal Ag films 9 The light blocking area 8 that light area and the light absorbing material being filled in the pixel cell in array distribution are formed forms reflection layer structure, Because metal Ag films 9 are low-resistivity film, because it also has high reflectivity, write-in light can be strengthened and reflex to photosensitive layer 10 In, while also reduce device reading light and enter device, and metal Ag films 9 are divided to form the small plane of reflection, can form two Tie up modulation distribution of charges, and then spatial light modulator electricity match it is also more satisfactory, be advantageous to improve spatial light adjust The properties of device processed.The material in the present embodiment light blocking area 8 is preferably photosensitive resin black-matrix material (Resin-BM), Resin-BM materials are a kind of green light screening materials, and its optical density (OD) is higher than 3.5, has excellent shading performance, And with good uniformity, good tack, high-res, antiradar reflectivity (<4%, λ=550nm) and it is excellent resistance to The property of medicine and heat resistance.The presence in light blocking area 8 to insulate between each pixel cell, effectively prevent pixel cell and pixel cell Between optical crosstalk cause structure definition and contrast to decline and cause to read the unsharp problem of light.Therefore, the present invention proposes Reflection layer structure the problem of can solve the problem that existing light absorption layer material poor adhesion and not high enough contrast.Interval of the present invention Off-network grid 7 are made up of the metallic reflection unit for being distributed in the portion of upper surface in each light blocking area 8, and the material of metallic reflection unit is preferred For Al；Isolation grid 7 can effectively strengthen the reflection for reading light, stop that reading light enters device, and then device modulation is obtained The reading light bigger to intensity.
Further, following relation is met according to liquid crystal material theory analysis, the response time of liquid crystal material：
Wherein γ1The coefficient of viscosity of liquid crystal material is referred to, d refers to the gap of liquid crystal cell, and V refers to driving voltage, Δ ε refers to the dielectric coefficient of liquid crystal material.The coefficient of viscosity, dielectric coefficient are all directly related to liquid crystal material self character , from formula, increase liquid crystal cells box driving voltage is beneficial to improve response speed.New structure proposed by the present invention is adopted With resistivity relatively low argent and metallic aluminium, compared to traditional sucrose speculum, device of the present invention is on argent and metallic aluminium Caused pressure drop very little, i.e., more effective voltages are used for the driving of liquid crystal cell, therefore are advantageous to improve the response speed of device.
It can be seen from general knowledge known in this field, liquid crystal layer meets liquid crystal dynamics equation：
By above formula the response time of liquid crystal layer can be derived dependent on box thickness z, distortion elastic constant K22, rotate it is viscous Coefficient gamma, applied field intensity E and rubbing angle(angle between liquid crystal initial arrangement direction and electrode direction).It is in addition, narrow Electrode width, the electrode structure of wide electrode gap can give higher transmitance, it is required it is noted that the problem of be electrode width Narrower, the driving voltage required for electrode gap is wider is bigger.Under electrode width same case, the bigger contrast of electrode gap regards Angle is higher, and electrode gap is identical, and electrode width is narrower, and contrast visual angle is higher.But electrode width on the whole, electrode gap become Change is not too big to contrast angle effects.Small rubbing angle can not only reach higher transmitance, and needed for liquid crystal cell Driving voltage is also smaller, but threshold voltage is larger, and this is also the factor for influenceing liquid crystal cell response speed.Rubbing angle increases, and rings Speed is answered to accelerate.
Through experimental test, the present invention LCD space light modulator shown in Fig. 1 detect under illumination condition reading light with The change for writing light change and occurring, the experiment test response device rise time is 3.6ms, and response fall time is 2.3ms.Ring The test of the display measuring systems of time utilization model DMS 505 is answered to get, test condition is specific as follows：
Environmental condition：Relative humidity 60%, air pressure are a standard atmospheric pressure；Source driving signal selection frequency is 100Hz Square wave driving signal source, receiving angle θ=15 ° of optical signal, the test scope of threshold voltage is 0~5.0V, stepping accuracy For 0.2V.Since the stand-by period be add the time that drive signal test to, response of this time more than light valve to liquid crystal light valve Time
When liquid crystal light valve is 3 ", projection screen is 200 ", projection screen brightness 80cd/mz, liquid crystal light valve writes people's light threshold It is worth sensitivity PminFor 20 μm/cm2.Average response time can reach 3.0ms, and maximum-contrast can reach 1500: 1, contrast The region for more than 1000 is spent in the horizontal and vertical directions more than 15 °, and the region that contrast is more than 100 is horizontal and vertical Side is upwardly close to 60 °.
Embodiments of the invention are set forth above in association with accompanying drawing, but the invention is not limited in above-mentioned specific Embodiment, above-mentioned embodiment is only schematical, rather than restricted, and one of ordinary skill in the art exists Under the enlightenment of the present invention, in the case of present inventive concept and scope of the claimed protection is not departed from, many shapes can be also made Formula, these are belonged within the protection of the present invention.

Claims (7)

1. a kind of LCD space light modulator, including：The first transparency carrier and the second transparency carrier being oppositely arranged in parallel, first Transparency carrier and the second transparency carrier opposite sides have the first transparent conductance layer and the second transparent conductance layer and then form the respectively One transparency electrode and second transparency electrode, it is characterised in that：
From first transparency electrode between second transparency electrode successively include first orientation layer, STN type Super Twisted Nematic Liquid Crystals Layer, second orientation layer, high resistant separation layer, isolation grid, reflecting layer and photosensitive layer；Reflecting layer includes the pixel in array distribution Unit and the photosensitive area being attached thereto between each pixel cell, light absorbing material is provided with the pixel cell and forms resistance Light area；It is that the metallic reflection unit that light blocking area part surface is distributed in by one-to-one corresponding forms metallic reflection array to isolate grid； High resistant separation layer is completely covered by isolation grid and reflecting layer.
2. a kind of LCD space light modulator according to claim 1, it is characterised in that the material of the photosensitive area is Ag。
A kind of 3. LCD space light modulator according to claim 1, it is characterised in that it is described isolation grid material be Al。
4. a kind of LCD space light modulator according to claim 1, it is characterised in that the material in the light blocking area is exhausted Edge material.
A kind of 5. wide viewing angle LCD space light modulator according to claim 1, it is characterised in that the high resistant separation layer 1015~1016Ω。
A kind of 6. wide viewing angle LCD space light modulator according to claim 1, it is characterised in that the high resistant separation layer Relative dielectric constant be 3.9.
7. a kind of LCD space light modulator according to claim 5 or 6, it is characterised in that the high resistant separation layer Material is silica.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109270739A (en) * 2018-11-08 2019-01-25 河北工业大学 A kind of phase delay chip
CN113156679A (en) * 2020-01-07 2021-07-23 财团法人交大思源基金会 Spatial light modulator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5999246A (en) * 1997-04-22 1999-12-07 Fuji Photo Film Co., Ltd. Image recording apparatus with improved spatial light modulator
CN102638690A (en) * 2011-02-15 2012-08-15 薛虎玲 Wide-view-angle intelligent 3D (Three-Dimensional) display and wide-view-angle intelligent 3D display method
CN202677032U (en) * 2012-07-11 2013-01-16 京东方科技集团股份有限公司 Liquid crystal panel and liquid crystal display
CN106990598A (en) * 2017-05-24 2017-07-28 电子科技大学 A kind of LCD space light modulator

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5999246A (en) * 1997-04-22 1999-12-07 Fuji Photo Film Co., Ltd. Image recording apparatus with improved spatial light modulator
CN102638690A (en) * 2011-02-15 2012-08-15 薛虎玲 Wide-view-angle intelligent 3D (Three-Dimensional) display and wide-view-angle intelligent 3D display method
CN202677032U (en) * 2012-07-11 2013-01-16 京东方科技集团股份有限公司 Liquid crystal panel and liquid crystal display
CN106990598A (en) * 2017-05-24 2017-07-28 电子科技大学 A kind of LCD space light modulator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
石兵: "氢化非晶硅液晶空间光调制器的制备与性能研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109270739A (en) * 2018-11-08 2019-01-25 河北工业大学 A kind of phase delay chip
KR20200053415A (en) * 2018-11-08 2020-05-18 헤베이 유니버시티 오브 테크놀로지 Phase-retarding plate
KR102394603B1 (en) * 2018-11-08 2022-05-04 헤베이 유니버시티 오브 테크놀로지 Phase-retarding plate
CN113156679A (en) * 2020-01-07 2021-07-23 财团法人交大思源基金会 Spatial light modulator

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