CN107740812A - One-dimensional precise translation mechanism - Google Patents
One-dimensional precise translation mechanism Download PDFInfo
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- CN107740812A CN107740812A CN201710826107.5A CN201710826107A CN107740812A CN 107740812 A CN107740812 A CN 107740812A CN 201710826107 A CN201710826107 A CN 201710826107A CN 107740812 A CN107740812 A CN 107740812A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 74
- 238000013519 translation Methods 0.000 title claims abstract description 23
- 235000014676 Phragmites communis Nutrition 0.000 claims description 35
- 230000005540 biological transmission Effects 0.000 claims description 16
- 230000033001 locomotion Effects 0.000 abstract description 15
- 238000006073 displacement reaction Methods 0.000 abstract description 13
- 238000005259 measurement Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 5
- 238000005381 potential energy Methods 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract 1
- 238000004458 analytical method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
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- 230000000007 visual effect Effects 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0472—Active magnetic bearings for linear movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/20—Application independent of particular apparatuses related to type of movement
- F16C2300/28—Reciprocating movement
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of one-dimensional precise translation mechanism, this mechanism can realize precision drive and the function of accurate measurement;The implementation of the present invention is driven by two groups of parallel springs, and this two groups of parallel springs mutual sheathings, and constant potential energy is shown as in its stroke range and motion is continuous harmonious.At the movement locus and displacement detector of one side translatory plate on the same line, meet abbe's principle, so that the Abbe error of mechanism driving is zero, so as to realize precision drive of the translatory plate relative to fixed plate, on the other hand this parallel moving mechanism can ensure to move the orthogonal reference axis in direction upward, and kinematic error adds up to be zero, so one-dimensional precise translation mechanism kinematic has, precision is high, sensitivity is good, and without mechanical friction in motion process, gapless, the advantages that without lubricating.This one-dimensional precise translation mechanism can be widely applied for the technical fields such as accurate measurement, precision manufactureing and precision drive.
Description
Technical field
The invention belongs to the technical fields such as precision manufactureing, precision drive and accurate measurement, and in particular to a kind of one-dimensional precise translation
Mechanism.
Background technology
One-dimensional precise translation technology is one of key technology of modern precision and Ultra-precision Turning and e measurement technology, is widely used in
Precision and ultra-precision machining and accurate measurement equally accurate require higher technical field, have in precision drive and Modern Manufacturing Technology
Extremely important status and effect, with modern precision manufacture and e measurement technology fast development, such as coordinate measuring system,
The research and application of precise translation mechanism are all referred in each field such as minute manufacturing system, automobile making, Aero-Space.
It is a certain steady that traditional precise translation mechanism is retained in parallel moving mechanism usually through external world's application active force or frictional drive
Positioning is put, and the external world applies certain driving energy that the mechanism of active force needs, and frictional drive structure will cause parallel moving mechanism
Precision and transmission efficiency reduce, while common traditional parallel moving mechanism has that active force is unstable, dynamic characteristic is inconsistent, to Abbe
The shortcomings of error sensitive.And parallel springs are as friction free precision drive structure, there is gapless, without friction, sensitive
High characteristic is spent, constant potential energy is shown as in its stroke range and motion is continuous harmonious.
There is related scholar to carry out force analysis to one-dimensional parallel springs, establish mathematical modeling, derived parallel spring
Mechanism deforms the relation with displacement under external force, but researcher only accounts for level of the parallel moving mechanism relative to fixed mechanism
Motion, and have ignored and move the upward driving error of direction normal axis, and if the longitudinal sizes of parallel springs get over
Greatly, the driving error that system introduces can be bigger, largely have impact on the kinematic accuracy of parallel moving mechanism.
The content of the invention
The present invention provides a kind of one-dimensional precise translation mechanism, and this mechanism can realize the function such as precision drive and accurate guiding, this essence
Close parallel moving mechanism, without mechanical friction, gapless, without lubrication, high sensitivity, has stability well, energy in motion process
Enough it is widely used in the technical fields such as precision manufactureing, precision drive and accurate measurement.
To solve the problems, such as that prior art is present, the technical scheme is that:A kind of one-dimensional precise translation mechanism, its feature exist
In:Fixed plate and translatory plate including U-typed, the transverse slat upside of the fixed plate of described U-typed are provided with permanent magnet, permanent magnet
On be provided with electromagnetic mechanism, translatory plate is arranged on electromagnetic mechanism, is symmetrical arranged in the fixed plate of the both sides of described permanent magnet
There are right reading head and back reading head, be respectively perpendicular on the outside of two stringer boards of fixed plate of described U-typed and be provided with left-external side and put down
Hung down with transmission change-over panel the other end of row reed and right external side parallel reed, left-external side parallel spring and right external side parallel reed
It is straight to set, it is vertically installed with left inside side parallel spring and Right Inboard parallel spring, left inside side on two sides of described translatory plate
The other end of parallel spring and Right Inboard parallel spring is vertically arranged with transmission change-over panel, and the outside of described translatory plate is set
There is measuring staff, grating scale is provided with the bottom surface of translatory plate.
The longitudinal plate inside top of the fixed plate of described U-typed is respectively arranged with left fixed plate limit element and right fixed plate limit
Bit unit, left translatory plate limit element is provided with symmetrical left inside side parallel spring with left fixed plate limit element;With the right side
Right translatory plate limit element is provided with the symmetrical Right Inboard parallel spring of fixed plate limit element.
Described external side parallel reed, external side parallel reed is parallel to each other and size structure is identical;Inside parallel reed and interior
Side parallel spring is parallel to each other and size structure is identical.
It is the fixed plate of described U-typed, left-external side parallel spring, transmission change-over panel and right external side parallel reed, translatory plate, left inside
It is connected by screw respectively between side parallel spring and Right Inboard parallel spring.
Described translatory plate is connected with measuring staff by measuring staff mounting seat, and measuring staff mounting seat is arranged on translatory plate.
The bottom of described translatory plate is connected by electromagnetic mechanism mounting bracket with electromagnetic mechanism.
Compared with prior art, advantages of the present invention is as follows:
The present invention's is driven by two groups of parallel springs, and this two groups of parallel springs mutual sheathings, this mechanism have
Zero stiffness characteristic, constant potential energy and continuous harmony are shown as in its stroke range, while in this mechanism, translatory plate
Movement locus and fixed plate are in same plane, comply fully with the requirement of abbe's principle so that the Abbe error of mechanism driving is
Zero, precision drive of the translatory plate relative to fixed plate can be realized;
This mechanism of the invention can realize the functions such as precision drive and accurate measurement, and this precise translation mechanism is inorganic in motion process
Tool friction, gapless, without lubrication, autokinesis is high, with stability, this precise translation mechanism can answer extensively well
For technical fields such as precision manufactureing, precision drive and accurate measurements.
Brief description of the drawings
Fig. 1 is the construction profile right side view of the present invention;
Fig. 2 is the construction profile left side view of the present invention;
Fig. 3 be with translatory plate immediately below visual angle, to the upward view of translatory plate bottom;
Fig. 4 is the motion model sketch of mechanism of the present invention;
Fig. 5 is the inside parallel reed mechanism kinematic process analysis procedure analysis figure of the present invention;
Fig. 6 is the external side parallel reed mechanism kinematic process analysis procedure analysis figure of the present invention.
Description of reference numerals is as follows:1st, fixed plate;2a, right reading head;2b, back reading head;3rd, permanent magnet;4th, electromagnetic mechanism;5、
Translatory plate;6a, left fixed plate limit element;6b, left translatory plate limit element;6c, right translatory plate limit element;6d, right fixation
Plate limit element;7th, measuring staff;8a, left-external side parallel spring;8b, right external side parallel reed;9th, it is driven change-over panel;10a, left inside side
Parallel spring;10b, Right Inboard parallel spring;11st, bar mounting seat is contacted;12nd, screw;13rd, grating scale;14th, electromagnetic mechanism is installed
Frame.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with drawings and Examples, to this hair
It is bright to be further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
The present embodiment provides a kind of one-dimensional precise translation mechanism (referring to Fig. 1-Fig. 3), includes the fixed plate 1 and translatory plate of U-typed
5, the transverse slat upside of the fixed plate 1 of described U-typed is provided with permanent magnet 3, and electromagnetic mechanism 4 is provided with permanent magnet 3, described
The bottom of translatory plate 5 is connected by electromagnetic mechanism mounting bracket 14 with electromagnetic mechanism 4, by adjusting the power on signal of electromagnetic mechanism 4
Size, the amount of force of electromagnetic mechanism 4 and permanent magnet 3 and the adjustment in direction can be realized, on the one hand can realize parallel spring
The gravitational equilibrium effect of mechanism;On the other hand positioning and locking of the translatory plate 5 relative to fixed plate 1 can be achieved;
Measuring staff 7 is provided with the outer surface of described translatory plate 5, measuring staff 7 is connected by measuring staff mounting seat 11 with translatory plate 5,
Measuring staff mounting seat 11 is arranged on translatory plate 5, the motion of measurand or displacement can be passed into translatory plate 5 by measuring staff 7,
So that translatory plate 5 produces the precision drive and guiding relative to fixed plate 1;
Referring to Fig. 1:Right reading head 2a and back reading head 2b are symmetrically arranged with the fixed plate 1 of the both sides of described permanent magnet 3, is put down
Grating scale 13 is provided with the bottom surface of dynamic plate 5 and forms displacement detector, whereby displacement detector measurement translatory plate 5 relative to
The shift value of fixed plate 1, using the right reading head 2a and back reading head 2b of two identical indexs, synchronous detection can be realized, can be had
Effect reduces measurement error, improves the measurement accuracy of parallel moving mechanism so that the transmission process of parallel moving mechanism more controllable precise.
Be respectively perpendicular on the outer surface of 1 two stringer boards of fixed plate of described U-typed be provided with left-external side parallel spring 8a and
Hung down with transmission change-over panel 9 right external side parallel reed 8b, left-external side parallel spring 8a and right external side parallel reed 8b other end
It is straight to set, left inside side parallel spring 10a and Right Inboard parallel spring 10b is vertically installed with two sides of described translatory plate 5,
Left inside side parallel spring 10a and Right Inboard parallel spring 10b other end is vertically arranged with transmission change-over panel 9, and the present invention borrows
The parallel springs of this two groups of mutual sheathings, it can realize that translatory plate 5 is driven and be oriented to work(relative to the one-dimensional precise of fixed plate 1
Energy;
Left-external side parallel spring 8a and right external side parallel reed 8b and left inside side parallel spring 10a and Right Inboard parallel spring 10b
Structure and size and application method it is identical, and two groups of parallel springs mutual sheathings, show as perseverance in its stroke range
Fixed potential energy and motion is continuous harmonious;Movement locus at and displacement detector of translatory plate 5 on the same line, then simultaneously
This parallel moving mechanism meets abbe's principle, and the Abbe arm of mechanism is zero, thus Abbe error is zero, while it is orthogonal to move direction
Reference axis it is upward, deviation accumulation zero, so the kinematic accuracy of one-dimensional precise translation mechanism and accuracy are high, realize translatory plate
It is driven relative to the one-dimensional precise of fixed plate.
The longitudinal plate inside top of the fixed plate 1 of described U-typed is respectively arranged with left fixed plate limit element 6a and right fixation
Plate limit element 6d, the symmetrical left inside side parallel spring with left fixed plate limit element 6a and right fixed plate limit element 6d
Left translatory plate limit element 6b and right translatory plate limit element 6c are respectively arranged with 10a and Right Inboard parallel spring 10b, when flat
Dynamic plate 5 relative to fixed plate 1 stroke or excessive active force when, limit element produces position-limiting action, while control computer will
The signal of limit element feedback is received, passes through the stroke and amount of force of control system regulating system;
Described left-external side parallel spring 8a, right external side parallel reed 8b, left inside side parallel spring 10a and Right Inboard parallel spring
10b is parallel to each other.
The fixed plate 1 of described U-typed, left-external side parallel spring 8a, transmission change-over panel 9 and right external side parallel reed, translatory plate
5th, connected respectively by screw 12 between left inside side parallel spring 10a and Right Inboard parallel spring 10b.
Referring to Fig. 4:Inside parallel reed mechanism is by translatory plate 5, left inside side parallel spring 10a and Right Inboard parallel spring 10b
Can be respectively that A, B, C, D parallelogram represents with summit and transmission change-over panel 9 forms.External side parallel reed mechanism be by
Transmission change-over panel 9, left-external side parallel spring 8a, right external side parallel reed 8b and fixed plate 1 form, can be respectively with summit E, F,
G, H parallelogram represents.The structure and performance of every group of parallel spring are identical, and the length of parallel spring is L.Along X
The applied external force F of axial direction is applied on translatory plate 5 by measuring staff 7.
Referring in Fig. 5, when only inside parallel reed mechanism works, translatory plate 5 will produce certain displacement Δ X1 along the direction of F power
=Lsin α, while drive left inside side parallel spring 10a and Right Inboard parallel spring 10b to produce certain flexural deformation, dotted line table
Show the original position for not producing translatory plate 5 before flexural deformation, solid line represents to produce the physical location of translatory plate 5 after flexural deformation.
Left inside side parallel spring 10a and Right Inboard parallel spring 10b deflection is designated as α relative to the corner of starting zero-bit, after deformation
Position can be represented with A1, B1, C1, D1.As can be seen from Figure, translatory plate 5 also has micro-displacement generation in the Y-axis direction simultaneously, along Y
Axle forward direction micro-displacement amount is designated as Δ h1.Δ h1=L (1-cos α) can be obtained by its geometrical relationship in figure.This value is inside parallel spring
Along the error amount of Y-axis during piece mechanism independently moving, and the length value L for working as parallel spring is bigger, parallel springs
Corner value α is bigger, then the kinematic error amount Δ h1 of Y-direction is bigger, brighter in the precision influence of Y-axis on precision drive mechanism
It is aobvious.
Referring in Fig. 6, in order to reduce and eliminate the error amount of inside parallel reed mechanism Y-axis, the motion of parallel moving mechanism is improved
Or guiding accuracy, another group of parallel springs are set with outside.When inside parallel reed mechanism kinematic, its motion passes through
Transmission change-over panel 9 is delivered in external side parallel reed mechanism so that transmission change-over panel 9 is Δ X2 along displacement caused by X axis
=Lsin β.Being driven change-over panel 9 will drive external side parallel reed mechanism to produce motion, left-external side parallel spring 8a, right external side parallel
Reed 8b will produce flexural deformation along X axis.Dotted line represents not producing the original position of flexural deformation driving front change-over panel 9, real
Line represents the physical location of transmission change-over panel 9 after generation flexural deformation, and bending deformation quantity is designated as relative to the corner of starting zero-bit
β, the position after deformation can represent that instantaneous inside parallel reed mechanism will revert again to original put down herein with E1, F1, G1, H1
Weighing apparatus position, can be represented with A2, B2, C2, D2.By Tu Ke get, transmission change-over panel 9 produces displacement in the negative direction of Y-axis, along Y-axis
The displacement of negative direction is designated as Δ h2, if the physical dimension and flexural deformation degree phase of inside parallel reed and external side parallel reed
Together, then its geometrical relationship has Δ h2=-L (1-cos β)=- L (1-cos α).
The procedure of kinematic analysis of the parallel springs of two groups of suits can obtain in complex chart 5 and Fig. 6, one-dimensional precise of the present invention
Parallel moving mechanism is respectively in displacement caused by X axis and Y-axis during one action:
Δ X=Δ X1+ Δs X2=L (sin α+sin β)=2Lsin α=2Lsin β;
Δ Y=Δ h1+ Δs h2=L (1-cos α)-L (1-cos β)=0
It can thus be concluded that one-dimensional precise translation mechanism is set with by two groups of parallel springs, one-dimensional coordinate axis though can be realized
Upward precision drive, and, deviation accumulation zero upward in orthogonal to that reference axis, so the one-dimensional precise translation of the present invention
MECHANISM PRECISION is high, and error is small, dynamic property is excellent.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.
Claims (6)
- A kind of 1. one-dimensional precise translation mechanism, it is characterised in that:Fixed plate including U-typed(1)And translatory plate(5), it is described The fixed plate of U-typed(1)Transverse slat on the upside of be provided with permanent magnet(3), permanent magnet(3)On be provided with electromagnetic mechanism(4), translatory plate (5)It is arranged at electromagnetic mechanism(4)On, described permanent magnet(3)Both sides fixed plate(1)On be symmetrically arranged with right reading head (2a)With back reading head(2b), the fixed plate of described U-typed(1)It is respectively perpendicular on the outside of two stringer boards and is provided with left-external side and puts down Row reed(8a)With right external side parallel reed(8b), left-external side parallel spring(8a)With right external side parallel reed(8b)The other end Face and transmission change-over panel(9)It is vertically arranged, described translatory plate(5)Two sides on be vertically installed with left inside side parallel spring (10a)With Right Inboard parallel spring(10b), left inside side parallel spring(10a)With Right Inboard parallel spring(10b)Other end With being driven change-over panel(9)It is vertically arranged, described translatory plate(5)Outside be provided with measuring staff(7), translatory plate(5)Bottom surface on It is provided with grating scale(13).
- 2. one-dimensional precise translation mechanism according to claim 1, it is characterised in that:The fixed plate of described U-typed(1)'s Longitudinal plate inside top is respectively arranged with left fixed plate limit element(6a)With right fixed plate limit element(6d), with left fixed plate Limit element(6a)Symmetrical left inside side parallel spring(10a)On be provided with left translatory plate limit element(6b);With right fixation Plate limit element(6d)Symmetrical Right Inboard parallel spring(10b)On be provided with right translatory plate limit element(6c).
- 3. one-dimensional precise translation mechanism according to claim 1 or 2, it is characterised in that:Described external side parallel reed (8a), external side parallel reed(8b)It is parallel to each other and size structure is identical;Inside parallel reed(10a)With inside parallel reed (10b)It is parallel to each other and size structure is identical.
- 4. one-dimensional precise translation mechanism according to claim 3, it is characterised in that:The fixed plate of described U-typed(1)、 Left-external side parallel spring(8a), transmission change-over panel(9)With right external side parallel reed(8b), translatory plate(5), left inside side parallel spring (10a)With Right Inboard parallel spring(10b)Between pass through screw respectively(12)Connection.
- 5. one-dimensional precise translation mechanism according to claim 4, it is characterised in that:Described translatory plate(5)With measuring staff(7) Pass through measuring staff mounting seat(11)Connection, measuring staff mounting seat(11)It is arranged at translatory plate(5)On.
- 6. one-dimensional precise translation mechanism according to claim 5, it is characterised in that:Described translatory plate(5)Bottom lead to Cross electromagnetic mechanism mounting bracket(14)With electromagnetic mechanism(4)Connection.
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CN102538678A (en) * | 2012-01-17 | 2012-07-04 | 北京工业大学 | Measurement device of scanning probe |
DE102013001009A1 (en) * | 2013-01-18 | 2014-07-24 | Technische Universität Ilmenau | Guiding device i.e. planar active magnet guide unit, for planar magnetic guiding of bodies for large translatory motions with e.g. linear direct drive for microlithography, has armature unit positioned between upper and lower stator-parts |
CN104464486A (en) * | 2014-09-17 | 2015-03-25 | 杭州电子科技大学 | Device for drawing motion curves of cam under different offsets |
CN207212944U (en) * | 2017-09-14 | 2018-04-10 | 西安工业大学 | A kind of precise guide mechanism |
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2017
- 2017-09-14 CN CN201710826107.5A patent/CN107740812B/en active Active
Patent Citations (7)
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CN101238297A (en) * | 2005-07-27 | 2008-08-06 | 古德尔集团股份公司 | Linear guide |
CN1921026A (en) * | 2005-09-08 | 2007-02-28 | 北京慧摩森电子***技术有限公司 | Micromotion platform with X-Y-theta three degree of freedom |
CN102155902A (en) * | 2011-03-09 | 2011-08-17 | 西安工业大学 | One-dimensional scanning measurement head mechanism with constant measurement force |
CN102538678A (en) * | 2012-01-17 | 2012-07-04 | 北京工业大学 | Measurement device of scanning probe |
DE102013001009A1 (en) * | 2013-01-18 | 2014-07-24 | Technische Universität Ilmenau | Guiding device i.e. planar active magnet guide unit, for planar magnetic guiding of bodies for large translatory motions with e.g. linear direct drive for microlithography, has armature unit positioned between upper and lower stator-parts |
CN104464486A (en) * | 2014-09-17 | 2015-03-25 | 杭州电子科技大学 | Device for drawing motion curves of cam under different offsets |
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