CN107737744A - A kind of slicing single crystal silicon production cleaning device - Google Patents
A kind of slicing single crystal silicon production cleaning device Download PDFInfo
- Publication number
- CN107737744A CN107737744A CN201710897669.9A CN201710897669A CN107737744A CN 107737744 A CN107737744 A CN 107737744A CN 201710897669 A CN201710897669 A CN 201710897669A CN 107737744 A CN107737744 A CN 107737744A
- Authority
- CN
- China
- Prior art keywords
- casing
- welded
- single crystal
- disk
- crystal silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 34
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000126 substance Substances 0.000 claims abstract description 10
- 239000003814 drug Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 239000007767 bonding agent Substances 0.000 abstract description 3
- 235000013312 flour Nutrition 0.000 abstract description 3
- 239000005416 organic matter Substances 0.000 abstract description 3
- 239000000377 silicon dioxide Substances 0.000 abstract description 3
- 238000010276 construction Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000010720 hydraulic oil Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of slicing single crystal silicon production cleaning device, including base, the top outer wall corner of the base is welded with the support frame of L-shaped structure, the bottom of support frame as described above is connected with sucker, the top outer wall of the base has been screwed casing, and the top of casing is hatch frame, capping is socketed with the top of the casing, the top exterior walls of the capping are welded with installs case, the bottom interior wall of the installs case is connected with battery, the bottom interior wall of the capping has been screwed the second hydraulic jack, the bottom of second hydraulic jack is welded with connecting plate, and the bottom of connecting plate has been screwed motor.The present invention is simple in construction, and whole design allows some bonding agents, organic matter and the silica flour of the surface attachment of monocrystalline silicon piece to be quickly cleaned so that physics and chemical cleaning method are carried out simultaneously, accelerate the speed of cleaning, improve operating efficiency.
Description
Technical field
The present invention relates to cleaning technique field, more particularly to a kind of slicing single crystal silicon production cleaning device.
Background technology
Monocrystalline silicon piece is a kind of crystal with basic complete lattice structure, and different directions has different property,
It is a kind of good semiconducting material, is widely used in manufacture semiconductor devices, solar cell etc., monocrystalline silicon is that a kind of comparison is active
Nonmetalloid, be crystalline material important component, the forward position in new material development.Its main application is used as half
Conductor material and utilization solar energy power generating, heat supply etc..Because solar energy has many advantages such as cleaning, environmental protection, convenient, closely
Over 30 years, solar utilization technique researching and developing, commercially produce, tremendous development all obtained in terms of market development, into
For the world is quick, one of new industry of stable development.And monocrystalline silicon piece is then to be processed by the way that slicer is orderly from silicon rod
Out, the surface of monocrystalline silicon piece can be attached with bonding agent, organic matter and silica flour after cutting, if such material not removed, shadow
The performance of monocrystalline silicon piece is rung, existing cleaning device is complicated, and physics and chemistry side are taken for different materials
The mode of method substep cleaning, causes the speed of cleaning slow, influences operating efficiency.
The content of the invention
The invention aims to solve shortcoming present in prior art, and a kind of slicing single crystal silicon proposed produces
Use cleaning device.
To achieve these goals, present invention employs following technical scheme:
A kind of slicing single crystal silicon production cleaning device, including base, the top outer wall corner of the base are welded with L-shaped knot
The support frame of structure, the bottom of support frame as described above are connected with sucker, and the top outer wall of the base has been screwed casing, and
The top of casing is hatch frame, and capping is socketed with the top of the casing, and the top exterior walls of the capping are welded with installs case,
The bottom interior wall of the installs case is connected with battery, and the bottom interior wall of the capping has been screwed the second hydraulic oil
Cylinder, the bottom of second hydraulic jack is welded with connecting plate, and the bottom of connecting plate has been screwed motor, the electricity
The output shaft of machine is welded with horizontally disposed disk, and the bottom outer wall of the disk is welded with equally distributed banister brush, described
The side inwall of casing is welded with baffle plate, and the opposite side inwall of the casing has been screwed the first hydraulic jack, described
First hydraulic jack is welded with the stripper plate being vertically arranged close to one end of baffle plate, and the bottom interior wall of the casing is consolidated by screw
Surely there is auxiliary-motor, and the output shaft of auxiliary-motor is connected with secondary disk by connecting plate, the top exterior walls of the secondary disk are bonded with
The banister brush equidistantly distributed.
Preferably, the motor is connected with switch by wire, and switch is connected by wire with battery.
Preferably, the disk is identical with the diameter of secondary disk, and disk and secondary disk are located at same vertical plane, disk and
Secondary disk is respectively positioned between baffle plate and stripper plate.
Preferably, first hydraulic jack and the second hydraulic jack are connected with first switch, and by wire respectively
One switch is connected with controller, the model DATA-7311 of controller by wire.
Preferably, the inside of the casing is filled with chemical cleaning medicament, and the liquid level of chemical cleaning medicament is located at baffle plate
The lower section on top.
Preferably, the junction of the capping and casing is provided with sealing ring.
Beneficial effects of the present invention are:The present invention is simple in construction, is fixed on the ground base by sucker, will be to be cleaned
Slicing single crystal silicon be placed horizontally in the top of secondary disk, pass through the effect of the first hydraulic jack so that stripper plate leans on towards baffle plate
Closely, slicing single crystal silicon is slightly fixed with this, then capping is enclosed on casing so that slicing single crystal silicon is located at disk and secondary disk
Between, start motor and auxiliary-motor so that two banister brush chemical cleaning medicament that is rotatably assorted simultaneously is entered to slicing single crystal silicon
Row Rapid Cleaning, whole design allow monocrystalline silicon piece surface attachment the quick quilt of some bonding agents, organic matter and silica flour
Clean out so that physics and chemical cleaning method are carried out simultaneously, accelerate the speed of cleaning, improve operating efficiency.
Brief description of the drawings
Fig. 1 is a kind of structural representation of slicing single crystal silicon production cleaning device proposed by the present invention;
Fig. 2 is a kind of partial structural diagram of slicing single crystal silicon production cleaning device proposed by the present invention.
In figure:1 sucker, 2 support frames, 3 bases, 4 casings, 5 first hydraulic jacks, 6 stripper plates, 7 cappings, 8 motors, 9
Two hydraulic jacks, 10 batteries, 11 installs cases, 12 disks, 13 fur bars, 14 baffle plates.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.
Reference picture 1-2, a kind of slicing single crystal silicon production cleaning device, including base 3, the top outer wall corner of base 3
The support frame 2 of L-shaped structure is welded with, the bottom of support frame 2 is connected with sucker 1, and the top outer wall of base 3 is screwed
There is casing 4, and the top of casing 4 is hatch frame, the top of casing 4 is socketed with capping 7, covers 7 top exterior walls and is welded with
Installs case 11, the bottom interior wall of installs case 11 are connected with battery 10, and the bottom interior wall for covering 7 has been screwed the second liquid
Compressing cylinder 9, the bottom of the second hydraulic jack 9 is welded with connecting plate, and the bottom of connecting plate has been screwed motor 8, electricity
The output shaft of machine 8 is welded with horizontally disposed disk 12, and the bottom outer wall of disk 12 is welded with equally distributed banister brush 13, case
The side inwall of body 4 is welded with baffle plate 14, and the opposite side inwall of casing 4 has been screwed the first hydraulic jack 5, the first liquid
Compressing cylinder 5 is welded with the stripper plate 6 being vertically arranged close to one end of baffle plate 14, and the bottom interior wall of casing 4 has been screwed
Auxiliary-motor, and the output shaft of auxiliary-motor is connected with secondary disk by connecting plate, the top exterior walls of secondary disk are bonded with equidistant point
The banister brush 13 of cloth.
In the present invention, motor 8 is connected with switch by wire, and switchs and connected by wire and battery 10, disk 12
It is identical with the diameter of secondary disk, and disk 12 and secondary disk are located at same vertical plane, disk 12 and secondary disk are respectively positioned on baffle plate 14
Between stripper plate 6, the first hydraulic jack 5 and the second hydraulic jack 9 are connected with first switch by wire respectively, and first opens
To close and controller, the model DATA-7311 of controller are connected with by wire, the inside of casing 4 is filled with chemical cleaning medicament,
And the liquid level of chemical cleaning medicament is located at the lower section on the top of baffle plate 14, the junction of capping 7 and casing 4 is provided with sealing ring.
Operation principle:Base 3 is fixed on the ground by sucker 1, slicing single crystal silicon to be cleaned is placed horizontally in pair
The top of disk, pass through the effect of the first hydraulic jack 5 so that stripper plate 6 is close towards baffle plate 14, with this by slicing single crystal silicon
It is slight fixed, then capping 7 is enclosed on casing 4 so that slicing single crystal silicon starts motor 8 between disk 12 and secondary disk
And auxiliary-motor so that two banister brush 13 are rotatably assorted chemical cleaning medicament to slicing single crystal silicon progress Rapid Cleaning simultaneously.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, technique according to the invention scheme and its
Inventive concept is subject to equivalent substitution or change, should all be included within the scope of the present invention.
Claims (6)
1. a kind of slicing single crystal silicon production cleaning device, including base(3), it is characterised in that the base(3)Top outside
Wall corner is welded with the support frame of L-shaped structure(2), support frame as described above(2)Bottom be connected with sucker(1), the base(3)
Top outer wall be screwed casing(4), and casing(4)Top be hatch frame, the casing(4)Top set
It is connected to capping(7), the capping(7)Top exterior walls be welded with installs case(11), the installs case(11)Bottom interior wall card
It is connected to battery(10), the capping(7)Bottom interior wall be screwed the second hydraulic jack(9), second liquid
Compressing cylinder(9)Bottom be welded with connecting plate, and the bottom of connecting plate has been screwed motor(8), the motor(8)'s
Output shaft is welded with horizontally disposed disk(12), the disk(12)Bottom outer wall be welded with equally distributed banister brush
(13), the casing(4)Side inwall be welded with baffle plate(14), the casing(4)Opposite side inwall be screwed
There is the first hydraulic jack(5), first hydraulic jack(5)Close to baffle plate(14)One end be welded with the stripper plate being vertically arranged
(6), the casing(4)Bottom interior wall be screwed auxiliary-motor, and the output shaft of auxiliary-motor is connected by connecting plate
There is secondary disk, the top exterior walls of the secondary disk are bonded with the banister brush equidistantly distributed(13).
A kind of 2. slicing single crystal silicon production cleaning device according to claim 1, it is characterised in that the motor(8)
Switch is connected with by wire, and switch passes through wire and battery(10)Connection.
A kind of 3. slicing single crystal silicon production cleaning device according to claim 1, it is characterised in that the disk(12)
It is identical with the diameter of secondary disk, and disk(12)It is located at same vertical plane, disk with secondary disk(12)Gear is respectively positioned on secondary disk
Plate(14)And stripper plate(6)Between.
A kind of 4. slicing single crystal silicon production cleaning device according to claim 1, it is characterised in that first hydraulic pressure
Oil cylinder(5)With the second hydraulic jack(9)First switch is connected with by wire respectively, and first switch is connected with control by wire
Device processed, the model DATA-7311 of controller.
A kind of 5. slicing single crystal silicon production cleaning device according to claim 1, it is characterised in that the casing(4)
Inside be filled with chemical cleaning medicament, and the liquid level of chemical cleaning medicament is located at baffle plate(14)The lower section on top.
A kind of 6. slicing single crystal silicon production cleaning device according to claim 1, it is characterised in that the capping(7)
And casing(4)Junction be provided with sealing ring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710897669.9A CN107737744A (en) | 2017-09-28 | 2017-09-28 | A kind of slicing single crystal silicon production cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710897669.9A CN107737744A (en) | 2017-09-28 | 2017-09-28 | A kind of slicing single crystal silicon production cleaning device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN107737744A true CN107737744A (en) | 2018-02-27 |
Family
ID=61235459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710897669.9A Pending CN107737744A (en) | 2017-09-28 | 2017-09-28 | A kind of slicing single crystal silicon production cleaning device |
Country Status (1)
Country | Link |
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CN (1) | CN107737744A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108580371A (en) * | 2018-05-30 | 2018-09-28 | 苏州阜丰实业有限公司 | A kind of two-sided cleaning device of plate casting |
Citations (8)
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JP2004356336A (en) * | 2003-05-28 | 2004-12-16 | Sumitomo Mitsubishi Silicon Corp | Double-sided polishing method of semiconductor wafer |
CN101049677A (en) * | 2007-05-09 | 2007-10-10 | 浙江工业大学 | Control system of accurate doublefaced polisher |
CN204486348U (en) * | 2015-01-21 | 2015-07-22 | 东旭集团有限公司 | A kind of synchronous disk brush device for double-sided glass cleaning |
CN205144480U (en) * | 2015-11-20 | 2016-04-13 | 长安大学 | Quick tray cleaning machine |
CN205630262U (en) * | 2016-03-30 | 2016-10-12 | 王文龙 | Two -sided ornaments polishing dimension protection plates brush machine |
CN205683321U (en) * | 2016-04-18 | 2016-11-16 | 象山沛公堂中药科技有限公司 | A kind of medical apparatus and instruments cleaning sterilizing device |
CN107042415A (en) * | 2017-03-28 | 2017-08-15 | 山东蒙沃变速器有限公司 | A kind of double-faced processing combined machine tool |
CN207563318U (en) * | 2017-09-28 | 2018-07-03 | 阜宁浔朋新材料科技有限公司 | A kind of slicing single crystal silicon production cleaning device |
-
2017
- 2017-09-28 CN CN201710897669.9A patent/CN107737744A/en active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004356336A (en) * | 2003-05-28 | 2004-12-16 | Sumitomo Mitsubishi Silicon Corp | Double-sided polishing method of semiconductor wafer |
CN101049677A (en) * | 2007-05-09 | 2007-10-10 | 浙江工业大学 | Control system of accurate doublefaced polisher |
CN204486348U (en) * | 2015-01-21 | 2015-07-22 | 东旭集团有限公司 | A kind of synchronous disk brush device for double-sided glass cleaning |
CN205144480U (en) * | 2015-11-20 | 2016-04-13 | 长安大学 | Quick tray cleaning machine |
CN205630262U (en) * | 2016-03-30 | 2016-10-12 | 王文龙 | Two -sided ornaments polishing dimension protection plates brush machine |
CN205683321U (en) * | 2016-04-18 | 2016-11-16 | 象山沛公堂中药科技有限公司 | A kind of medical apparatus and instruments cleaning sterilizing device |
CN107042415A (en) * | 2017-03-28 | 2017-08-15 | 山东蒙沃变速器有限公司 | A kind of double-faced processing combined machine tool |
CN207563318U (en) * | 2017-09-28 | 2018-07-03 | 阜宁浔朋新材料科技有限公司 | A kind of slicing single crystal silicon production cleaning device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108580371A (en) * | 2018-05-30 | 2018-09-28 | 苏州阜丰实业有限公司 | A kind of two-sided cleaning device of plate casting |
CN108580371B (en) * | 2018-05-30 | 2023-11-24 | 苏州麦奇诺精密压铸有限公司 | Double-sided cleaning device for flat castings |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180227 |
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WD01 | Invention patent application deemed withdrawn after publication |