CN107727696A - Inductance cantilever beam wireless and passive humidity sensor - Google Patents
Inductance cantilever beam wireless and passive humidity sensor Download PDFInfo
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- CN107727696A CN107727696A CN201710886337.0A CN201710886337A CN107727696A CN 107727696 A CN107727696 A CN 107727696A CN 201710886337 A CN201710886337 A CN 201710886337A CN 107727696 A CN107727696 A CN 107727696A
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- cantilever beam
- inductance
- inductance cantilever
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
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Abstract
The present invention is a kind of inductance cantilever beam wireless and passive humidity sensor, wherein, insulating medium layer (2) is arranged on the substrate (1) upper surface；The induction structure (3) and the anchor plot structure (4) are disposed side by side on the insulating medium layer (2) upper surface；One end of the inductance cantilever beam structure (5) forms a fixed connection with the anchor plot structure (4), and the other end of the inductance cantilever beam structure (5) is vacantly in the top of induction structure (3)；The inductance cantilever beam (5) and the induction structure (3) form LC resonant tanks；The humidity-sensitive film (6) is covered in above the inductance cantilever beam (5).The present invention has small volume, low in energy consumption and the advantages of can be mass, change the resonant frequency of LC resonant tanks using the deformation of inductance cantilever beam, returning for sensor is stagnant smaller, repeated more preferable, without lead and battery powered, moisture measurement can be carried out in adverse circumstances such as hot environment, closed environment or rotating environments.
Description
Technical field
The present invention relates to a kind of inductance cantilever beam wireless and passive humidity sensor technology, belong to microelectronics technology.
Background technology
Because the production and life of humidity parameter and people are closely related, therefore people have begun to for wet very early
The measurement of degree.Every physically or chemically process for having moisture effect may serve to make humidity sensor.Make a general survey of humidity sensor
The development course of device, humidity sensor generally pass from traditional discrete humidity sensor towards intelligentized integrated form humidity
Sensor direction is developed, and develops from wired humidity sensor towards wireless humidity sensor direction.
The problems such as traditional humidity sensor has the advantages of respective, but its volume is big, uniformity is poor still constrains
Its application in portable set and miniature electronic product.And semiconductor Integrated Humidity Sensor then has small volume, response
The advantage that the traditional discrete humidity sensors such as fast and power consumption is low do not possess.Due to the progress of semiconductor processing technology, many tradition
The hygrometric principle of discrete hygrometer can be transplanted on semiconductor Integrated Humidity Sensor.Common semiconductor integrates wet
Degree sensor has humistor formula, humicap formula etc..With the appearance of MEMS (MEMS) technology, develop again
Height is deeply than structure, polycrystalline silicon micro-bridge etc. MEMS humidity sensors.
It is wired when carrying out moisture measurement to some adverse circumstances (such as hot environment, closed environment or rotating environment)
Humidity sensor will no longer be applicable.Moisture measurement in adverse circumstances mostly uses wireless working method.Wireless humidity passes
Sensor is divided into active and passive two kinds again.The humidity sensor of wireless active typically carries out data biography using RF transmit-receive circuit
Defeated, its transmission circuit is powered by battery.The humidity sensor of wireless and passive is typically passed using inductance near-field coupling principle
Transmission of data, sensor construction do not need battery powered simply, the application in particularly suitable adverse circumstances.
The content of the invention
Technical problem is directed to above-mentioned prior art, and it is an object of the invention to provide a kind of inductance cantilever beam wireless and passive is wet
Sensor is spent, wireless and passive mode can be used to carry out the measurement of ambient humidity.
The inductance cantilever beam wireless and passive humidity sensor of the technical scheme present invention includes substrate, insulating medium layer, inductance
Structure, anchor plot structure, inductance cantilever beam structure and humidity-sensitive film；The insulating medium layer is arranged on the substrate top surface；Institute
State induction structure and the anchor plot structure is disposed side by side on the insulating medium layer upper surface；The one of the inductance cantilever beam structure
End forms a fixed connection with the anchor plot structure, and the other end of the inductance cantilever beam structure is vacantly in the top of induction structure；
The inductance cantilever beam and the induction structure form LC resonant tanks；The humidity-sensitive film is covered on the inductance cantilever beam
Side.
Wherein,
The humidity-sensitive film uses macromolecule polymer material (e.g., polyacrylamide, polyimides), and volume is swollen after moisture absorption
It is swollen.
The inductance cantilever beam structure is planar spiral structures.
The induction structure is planar spiral structures.
The inductance cantilever beam structure and the induction structure are that face is placed up and down.
The operation principle of inductance cantilever beam wireless and passive humidity sensor of the present invention is：
Feel moor reason：When ambient humidity changes, humidity-sensitive film can produce Volume Changes.The Volume Changes meeting of humidity-sensitive film
Inductance cantilever beam is set to deflect.After inductance cantilever beam deflects, the LC resonance that is made up of inductance cantilever beam and induction structure
The resonant frequency in loop will change.
Read-out principle：Based on the near-field coupling principle between planar inductor, using the sense coil of connection electric impedance analyzer,
It can wirelessly, passively read the resonant frequency value for the LC resonant tanks that inductance cantilever beam and induction structure are formed.
Compared with prior art, technical scheme has the advantages that beneficial effect：
(1) the LC resonant tanks of wireless and passive of the invention are integrated morphology on piece, have small volume, low in energy consumption and can criticize
The advantages of amount production；
(2) present invention changes the resonant frequency of LC resonant tanks using the deformation of inductance cantilever beam, and returning for sensor is stagnant
It is smaller, repeated more preferable；
(3) present invention, can be in adverse circumstances such as hot environment, closed environment or rotating environments without lead and battery powered
Carry out moisture measurement；
Brief description of the drawings
Fig. 1 is the profile of the present invention.
Fig. 2 is the graphics of the present invention.
Wherein have：Substrate 1, insulating medium layer 2, induction structure 3, anchor plot structure 4, inductance cantilever beam structure 5, humidity-sensitive film
6。
Embodiment
Further explanation is done to the present invention below in conjunction with the accompanying drawings.
The present invention inductance cantilever beam wireless and passive humidity sensor include substrate 1, insulating medium layer 2, induction structure 3,
Anchor plot structure 4, inductance cantilever beam structure 5 and humidity-sensitive film 6；The insulating medium layer 2 is arranged on the upper surface of substrate 1；Institute
State induction structure 3 and the anchor plot structure 4 is disposed side by side on the upper surface of insulating medium layer 2；The inductance cantilever beam structure 5
One end formed a fixed connection with the anchor plot structure 4, the other end of the inductance cantilever beam structure 5 is vacantly in induction structure 3
Top；The inductance cantilever beam 5 and the induction structure 3 form LC resonant tanks；The humidity-sensitive film 6 is covered in the electricity
Feel the top of cantilever beam 5.The humidity-sensitive film 6 is using macromolecule polymer material (e.g., polyacrylamide, polyimides), moisture absorption
Volumetric expansion afterwards.The inductance cantilever beam structure 5 is planar spiral structures.The induction structure 3 is planar spiral structures.It is described
Inductance cantilever beam structure 5 and the induction structure 3 are that face is placed up and down.
The preparation technology of the inductance cantilever beam wireless and passive humidity sensor of the present invention is as follows：
a：One layer of insulating medium layer is deposited in substrate surface；
b：In insulating medium layer surface deposition layer of metal layer and etch, form induction structure；
c：In one layer of dielectric layer of insulating medium layer surface deposition and etch；Form anchor plot structure；
d：Coating sacrifice layer simultaneously etches；
e：Deposit layer of metal layer simultaneously etches, and forms inductance cantilever beam structure；
f：One layer of humidity sensitive thin film of deposit simultaneously etches；
g：Corrode sacrifice layer, discharge structure；
The course of work of inductance cantilever beam wireless and passive humidity sensor of the present invention is：
When ambient humidity raises, humidity-sensitive film 6 can produce volumetric expansion.The volumetric expansion of humidity-sensitive film 6 can make inductance
Cantilever beam 5 deflects down.After inductance cantilever beam 5 deflects down, the electricity between inductance cantilever beam 5 and induction structure 3
Hold increase, therefore the resonant frequency for the LC resonant tanks being made up of inductance cantilever beam 5 and induction structure 3 will reduce；Work as environmental wet
When degree reduces, humidity-sensitive film 6 can produce volume contraction.The volume contraction of humidity-sensitive film 6 can be such that inductance cantilever beam 5 occurs upwards partially
Turn.After inductance cantilever beam 5 upward deflects, the electric capacity between inductance cantilever beam 5 and induction structure 3 reduces, therefore by inductance
The resonant frequency for the LC resonant tanks that cantilever beam 5 and induction structure 3 are formed will increase；
Application method：Before measurement, sensor of the invention is demarcated using the sense coil of connection electric impedance analyzer,
The relation established between its resonant frequency and varying environment humidity.During measurement, read using the sense coil of connection electric impedance analyzer
Go out the resonant frequency of inventive sensor, contrasted with calibration value, you can obtain environmental wet angle value to be measured.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (6)
- A kind of 1. inductance cantilever beam wireless and passive humidity sensor, it is characterised in that：The humidity sensor include substrate (1), absolutely Edge dielectric layer (2), induction structure (3), anchor plot structure (4), inductance cantilever beam structure (5) and humidity-sensitive film (6)；The insulation is situated between Matter layer (2) is arranged on the substrate (1) upper surface；The induction structure (3) and the anchor plot structure (4) are disposed side by side on described Insulating medium layer (2) upper surface；One end of the inductance cantilever beam structure (5) forms a fixed connection with the anchor plot structure (4), The other end of the inductance cantilever beam structure (5) is vacantly in the top of induction structure (3)；The inductance cantilever beam (5) and described Induction structure (3) forms LC resonant tanks；The humidity-sensitive film (6) is covered in above the inductance cantilever beam (5).
- 2. inductance cantilever beam wireless and passive humidity sensor according to claim 1, it is characterised in that：The humidity-sensitive film (6) macromolecule polymer material, volumetric expansion after moisture absorption are used.
- 3. inductance cantilever beam wireless and passive humidity sensor according to claim 2, it is characterised in that：The polyphosphazene polymer Compound material is polyacrylamide or polyimides.
- 4. inductance cantilever beam wireless and passive humidity sensor according to claim 1, it is characterised in that：The inductance cantilever Girder construction (5) is planar spiral structures.
- 5. inductance cantilever beam wireless and passive humidity sensor according to claim 1, it is characterised in that：The induction structure (3) it is planar spiral structures.
- 6. the inductance cantilever beam wireless and passive humidity sensor according to claim 1,4 or 5, it is characterised in that：The electricity Sense cantilever beam structure (5) and the induction structure (3) are that face is placed up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710886337.0A CN107727696A (en) | 2017-09-27 | 2017-09-27 | Inductance cantilever beam wireless and passive humidity sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710886337.0A CN107727696A (en) | 2017-09-27 | 2017-09-27 | Inductance cantilever beam wireless and passive humidity sensor |
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| CN107727696A true CN107727696A (en) | 2018-02-23 |
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| CN201710886337.0A Pending CN107727696A (en) | 2017-09-27 | 2017-09-27 | Inductance cantilever beam wireless and passive humidity sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077346A (en) * | 2019-12-30 | 2020-04-28 | 武汉市陆刻科技有限公司 | Micro-cantilever-beam-based soil humidity monitoring method, device, equipment and medium |
| CN112034019A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Passive wireless humidity sensor based on cantilever beam structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077346A (en) * | 2019-12-30 | 2020-04-28 | 武汉市陆刻科技有限公司 | Micro-cantilever-beam-based soil humidity monitoring method, device, equipment and medium |
| CN112034019A (en) * | 2020-09-08 | 2020-12-04 | 东南大学 | Passive wireless humidity sensor based on cantilever beam structure |
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Application publication date: 20180223 |
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