CN107725592A - 一种环形狭缝节流的气浮转台 - Google Patents
一种环形狭缝节流的气浮转台 Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
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- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0625—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via supply slits
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C41/00—Other accessories, e.g. devices integrated in the bearing not relating to the bearing function as such
- F16C41/004—Electro-dynamic machines, e.g. motors, generators, actuators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
- H02K11/22—Optical devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
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Abstract
本发明公开了一种环形狭缝节流的气浮转台,所述的气浮转台中的转轴由止推节流器和径向节流器支承,气体从进气管接头进入,沿气道给径向节流器和止推节流器供气,用于支承转轴。电机转子和圆光栅与转轴同轴装配,电机定子固定在壳体中,电机定子通电后产生电磁场,驱动电机转子和转轴旋转,圆光栅反馈角度信号,实现转轴的精确定位。本发明利用零件表面加工的台阶,通过装配形成环形狭缝,狭缝宽度与气膜厚度接近,因此气隙内部气体流动的速度变化较小,产生气锤振动的概率较小。内部气道布置简单,加工时狭缝不易堵塞,降低了加工难度。在不增加尺寸、不更改材料的情况下,可增大供气压力,进一步提高了气浮转台的刚度和精度。
Description
技术领域
本发明属于精密加工技术领域,具体涉及一种环形狭缝节流的气浮转台的总体结构。采用本发明可有效提高气浮转台的精度指标,显著提高气浮转台的稳定性,满足精密测量装置和加工设备的要求。
背景技术
气浮转台属于高精度的回转定位装置,由转轴、节流器、伺服电机、圆光栅等组成。气浮转台包括支承部件和驱动部件,支承部件由转轴和节流器组成,实现非接触支承;驱动部件由伺服电机和圆光栅组成,实现精密回转定位。如果气浮转台精度不够高或不稳定,将影响测量和加工结果。
发明内容
为了解决现有气浮转台精度和稳定性不足的问题,本发明提供一种环形狭缝节流的气浮转台。本发明利用过盈装配零件的台阶形成环形狭缝节流,狭缝宽度与气膜厚度接近,因此气隙内部气体流动的速度变化较小,能有效提高精度与稳定性,解决了常规气浮转台精度与稳定性不足的问题。
本发明的环形狭缝节流的气浮转台,其特点是,所述气浮转台包括转轴、止推节流器、垫环、径向节流器、壳体、进气管接头、电机定子、电机转子和圆光栅。转轴由止推节流器和径向节流器支承,气体从进气管接头进入,沿气道给径向节流器和止推节流器供气,用于支承转轴。电机转子和圆光栅与转轴同轴装配,电机定子固定在壳体中,电机定子通电后产生电磁场,驱动电机转子和转轴旋转,圆光栅反馈角度信号,实现转轴的精确定位。本发明利用过盈装配零件的台阶形成环形狭缝节流,狭缝宽度与气膜厚度接近,因此气隙内部气体流动的速度变化较小,产生气锤振动的概率较小。内部气道布置简单,研磨时狭缝不易堵塞,降低了加工难度。在不增加尺寸、不更改材料的情况下,可增大供气压力,进一步提高了气浮转台的刚度和精度。
所述的止推节流器由止推节流环和止推节流座装配而成,止推节流环上加工有环形台阶,与止推节流座装配形成环形狭缝。狭缝宽度为10μm~30μm,深度为3mm~5mm。
所述的径向节流器由上径向节流环、下径向节流环与径向节流座装配而成,上径向节流环、下径向节流环上加工有环形台阶,与径向节流座装配形成环形狭缝。狭缝宽度为10μm~30μm,深度为3mm~5mm。
所述的环形狭缝的宽度由台阶高度来保证,狭缝的深度由台阶宽度来保证。
所述的环形狭缝由气道连通供气。
所述的止推节流器和径向节流器,组成它们的零件采用过盈装配(或粘接或螺钉联接)而成。
本发明的环形狭缝节流的气浮转台有益效果是:采用装配零件的台阶形成的环形狭缝降低了气隙内部气体流动速度,提高了气浮转台的精度和稳定性,从而解决气浮转台精度与稳定性不足的问题。
附图说明
图1为本发明的环形狭缝节流的气浮转台结构示意图;
图2为图1中的环形狭缝节流示意图。
具体实施方式
下面结合附图和实施例对本发明进行详细的描述。
图1为本发明的环形狭缝节流的气浮转台的结构示意图。图2为图1中的环形狭缝的结构示意图。
从图1、2中可以看出,本发明的环形狭缝节流气浮转台,包括转轴1、止推节流器2、垫环3、径向节流器4、壳体5、进气管接头6、电机定子7、电机转子8和圆光栅9。其连接关系是,所述的转轴1轴向方向由止推节流器2、垫环3和径向节流器4支承,径向方向由径向节流器4支承。气体从进气管接头6进入壳体5和径向节流器4之间的腔体,然后沿气道给径向节流器4和止推节流器2供气,用于支承转轴1。电机转子8和圆光栅9与转轴1同轴装配,电机定子7固定在壳体5中,电机转子8和电机定子7间的气隙均匀。电机定子7通电后产生电磁场,驱动电机转子8和转轴1旋转,圆光栅9反馈角度信号,实现转轴1的精确定位。
止推节流器2由止推节流环10和止推节流座11装配而成,止推节流环上加工有环形台阶,形成环形狭缝节流。狭缝宽度为10μm~30μm,深度为3mm~5mm。
径向节流器4由上径向节流环12、下径向节流环14与径向节流座13装配而成,上径向节流环12、下径向节流环14上加工有环形台阶,形成环形狭缝节流。狭缝宽度为10μm~30μm,深度为3mm~5mm。
环形狭缝的宽度由零件表面加工的台阶高度来保证,狭缝的深度由台阶宽度来保证。
环形狭缝与供气管道连接。
止推节流器2和径向节流器4,组成它们的零件采用过盈装配(或粘接或螺钉联接)而成。
本发明的环形狭缝节流的气浮转台工作状态是这样的:压缩空气沿着气道向止推环形狭缝和径向环形狭缝供气,将转轴及其上的电机转子、圆光栅支承起来;电机驱动转轴旋转,圆光栅反馈角度信号,实现转轴的精确定位。采用环形狭缝节流,气隙内部气体流动的速度变化较小,能进一步提高支承稳定性,满足高精度的要求。
Claims (4)
1.一种环形狭缝节流的气浮转台,包括转轴(1)、止推节流器(2)、垫环(3)、径向节流器(4)、壳体(5)、进气管接头(6)、电机定子(7)、电机转子(8)和圆光栅(9);所述的转轴(1)轴向方向由止推节流器(2)、垫环(3)和径向节流器(4)支承,径向方向由径向节流器(4)支承;气体从进气管接头(6)进入壳体(5)和径向节流器(4)之间的腔体,然后沿气道给径向节流器(4)和止推节流器(2)供气,用于支承转轴(1);电机转子(8)和圆光栅(9)与转轴(1)同轴装配,电机定子(7)固定在壳体(5),电机转子(8)和电机定子(7)间的气隙均匀;电机定子(7)通电后产生电磁场,驱动电机转子(8)和转轴(1)旋转,圆光栅(9)反馈角度信号,实现转轴(1)的精确定位。
2.根据权利要求1所述的环形狭缝节流的气浮转台,其特征在于:所述的止推节流器(2)由止推节流环和止推节流座过盈装配而成,止推节流环上设置有环形台阶,形成环形狭缝节流,狭缝宽度为10μm~30μm,深度为3mm~5mm。
3.根据权利要求1所述的环形狭缝节流的气浮转台,其特征在于:所述的径向节流器(4)由上径向节流环、下径向节流环与径向节流座过盈装配而成,上径向节流环、下径向节流环上设置有环形台阶,形成环形狭缝节流,狭缝宽度为10μm~30μm,深度为3mm~5mm。
4.根据权利要求1所述的环形狭缝节流的气浮转台,其特征在于:所述的环形狭缝与供气管道连接。
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CN110067811A (zh) * | 2019-05-30 | 2019-07-30 | 中国工程物理研究院机械制造工艺研究所 | 一种气浮转台 |
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CN111438540A (zh) * | 2020-04-29 | 2020-07-24 | 苏州智润精工科技有限公司 | 一种狭缝节流气浮转台 |
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