CN107703649B

CN107703649B - Transfer equipment for simultaneously detecting multiple material sheets to be detected and detection system thereof

Info

Publication number: CN107703649B
Application number: CN201611012634.4A
Authority: CN
Inventors: 邹嘉骏; 王人杰; 古振男
Original assignee: Utechzone Co Ltd
Current assignee: Utechzone Co Ltd
Priority date: 2016-08-08
Filing date: 2016-11-17
Publication date: 2020-08-04
Anticipated expiration: 2036-11-17
Also published as: TWI593968B; CN107703649A; TW201805629A

Abstract

A transfer device for simultaneously detecting a plurality of material sheets to be detected comprises a feeding independent-conversion transfer arm, an alignment camera and an image analysis module. The feeding independent changing transfer arm is used for carrying out a transfer procedure to move a plurality of material sheets to be tested to a first test position at a transfer position. When the feeding independent conversion transfer arm carries out the transfer program, the alignment camera image is collected on the plurality of tablets to be tested on the feeding independent conversion transfer arm so as to obtain at least one alignment image. The image analysis module provides an alignment control signal to the feeding independent transformation transfer arm according to the alignment image so as to adjust the alignment of the plurality of tablets to be tested. When the transfer program is carried out, the feeding independent conversion transfer arm adjusts the alignment of the plurality of material sheets according to the alignment control signal.

Description

Transfer equipment for simultaneously detecting multiple material sheets to be detected and detection system thereof

Technical Field

The present invention relates to a detecting system, and more particularly, to a detecting system for calibrating a configuration angle of a material sheet.

Background

Automatic Optical Inspection (AOI), generally refers to a technique for detecting an object to be detected by photographing the surface of the object to be detected using machine vision. The automatic optical inspection has the advantages of improving various defects (such as unreliability of human eye detection and detection efficiency) caused by the conventional detection by using an optical instrument by manpower, and can be applied to the fields of national defense, civil life, medical treatment, environmental protection, electric power and the like besides defect detection.

In order to distinguish NG sheets, good products and bad products, a backlight plate of a panel must be lighted during a detection process, so that a camera is used for shooting the panel to confirm whether the panel has flaws and positions corresponding to the flaws so as to confirm whether the panel meets the standards.

Disclosure of Invention

The present invention provides a transfer apparatus for simultaneously inspecting a plurality of material sheets to be inspected and an inspection system thereof, which can increase the inspection efficiency and expand the inspection function in accordance with the item to be inspected.

In order to solve the above problems, the present invention provides a transfer apparatus for simultaneously detecting a plurality of material sheets to be tested, including a feeding independent-changing transfer arm, an alignment camera, and an image analysis module. The feeding independent changing transfer arm is used for carrying out a transfer procedure to move a plurality of material sheets to be tested to a first test position at a transfer position. When the feeding independent conversion transfer arm carries out the transfer program, the alignment camera image is collected on the plurality of tablets to be tested on the feeding independent conversion transfer arm so as to obtain at least one alignment image. The image analysis module provides an alignment control signal to the feeding independent transformation transfer arm according to the alignment image so as to adjust the alignment of the plurality of tablets to be tested. When the transfer program is carried out, the feeding independent conversion transfer arm adjusts the alignment of the plurality of material sheets according to the alignment control signal.

Furthermore, the feeding independent-change transfer arm comprises a support, a track arranged on the support and a long-axis machine arm arranged on the track, wherein the long-axis machine arm is driven by a driving device to reciprocate on the track, the long-axis machine arm is provided with a plurality of grabbing devices, and each grabbing device respectively comprises a rotating unit arranged on the long-axis machine arm, a grabbing part arranged on the rotating unit and used for grabbing the material piece to be measured, and a driving unit for controlling the rotating unit to rotate so as to adjust the configuration angle of the material piece to be measured.

Furthermore, the image analysis module transmits the alignment control signal to the driving unit according to the alignment image so as to respectively adjust the configuration angle of the material sheet to be tested on the rotating unit.

Furthermore, the grabbing part is a vacuum adsorption device for adsorbing the material sheet to be measured.

Further, a plurality of the grasping means are arranged in a single row.

Another objective of the present invention is to provide a single-sided inspection system for simultaneously inspecting a plurality of material sheets to be inspected, which comprises a feeding material segmented conveying device, a feeding material independent-changing transfer arm, an alignment camera, an inspection camera device, and an image analysis module. The feeding sectional conveying device is used for conveying and positioning a plurality of material sheets to be tested at a transfer position. The feeding independent changing transfer arm is used for carrying out a transfer procedure to move a plurality of material sheets to be tested to a first test position at the transfer position. When the feeding independent conversion transfer arm carries out the transfer procedure, the alignment camera collects images on the plurality of tablets to be tested on the feeding independent conversion transfer arm so as to obtain an alignment image. When the plurality of material sheets to be tested are located at the first testing position, the detection photographing device acquires images of the plurality of material sheets to be tested so as to obtain a detection image. The image analysis module provides an alignment control signal to the feeding independent transformation transfer arm according to the alignment image so as to adjust the alignment of the plurality of material sheets to be tested. The image analysis module performs an image detection procedure on the plurality of material sheets to be detected according to the detection image. During the transferring process, the feeding independent-changing transferring arm adjusts the alignment of the plurality of material sheets according to the alignment control signal.

Furthermore, the single-sided detection system further comprises a second testing position and a relay transfer arm for performing the inter-platform transfer process. The relay transfer arm moves the plurality of material sheets to be tested from the first testing position to a second testing position.

Further, an Electrical Test (ET) device, a One Time Programmable (OTP) recording device, or a flash frequency detection device is disposed at the second Test position.

Furthermore, a plurality of panel detection devices are arranged at the first test position or the second test position and are electrically connected to the material piece to be tested so as to detect the material piece to be tested, and each panel detection device comprises a decoration platform for arranging the material piece to be tested and a pin connector arranged at one side of the decoration platform so as to align with the electrical connection of the pins of the panel.

Furthermore, a vacuum adsorption device is arranged on the decoration platform and used for flatly adsorbing and attaching the material sheet to be tested to the surface of the vacuum adsorption device.

Furthermore, the feeding independent-change transfer arm comprises a support, a rail arranged on the support, and a long-axis arm arranged on the rail, wherein the long-axis arm is driven by a driving device to reciprocate on the rail, the long-axis arm is provided with a plurality of grabbing devices, and each grabbing device comprises a rotating unit arranged on the long-axis arm, a grabbing part arranged on the rotating unit and used for grabbing the material piece to be measured, and a driving unit for controlling the rotating unit to rotate so as to adjust the configuration angle of the material piece to be measured.

Further, a plurality of the gripping devices are arranged on the long shaft arm in a single row.

Furthermore, the alignment camera is disposed between the transfer position and the first testing position, and the image analysis module transmits the alignment control signal to the driving unit according to the alignment image to adjust the configuration angles of the material sheets to be tested on the rotating unit.

Another objective of the present invention is to provide a double-sided inspection system for simultaneously inspecting a plurality of material sheets to be inspected, which comprises a feeding material segmented conveying device, one or more feeding material independent-changing transfer arms, at least two alignment cameras, at least two inspection cameras, and an image analysis module. The feeding sectional conveying device is used for conveying and positioning a plurality of material sheets to be tested at a transfer position. The feeding independent changing transfer arm is used for carrying out a transfer procedure, and a plurality of tablets to be tested are respectively moved to a first test position or a first detection position on two sides from the transfer position. The alignment cameras are respectively arranged between the first testing position and the transferring position and between the first detecting position and the transferring position. When the feeding independent conversion transfer arm carries out the transfer program, the alignment camera image is collected on the plurality of tablets to be tested on the feeding independent conversion transfer arm so as to obtain an alignment image. The detection photographing device is respectively arranged on the first test position or the first detection position. When the plurality of material sheets to be detected are located at the first test position or the first detection position, the detection photographing device acquires images of the plurality of material sheets to be detected so as to obtain a detection image. The image analysis module provides an alignment control signal to the feeding independent transformation transfer arm according to the alignment image so as to adjust the alignment of the plurality of tablets to be tested. The image analysis module performs an image detection procedure on the plurality of material sheets to be detected according to the detection image. During the transferring process, the feeding independent-changing transferring arm adjusts the alignment of the plurality of material sheets according to the alignment control signal.

Furthermore, the double-sided inspection system further comprises a second testing position, a second inspection position, and two relay transfer arms for performing inter-platform transfer procedures, wherein one relay transfer arm moves the plurality of test patches from the first testing position to the second testing position, and the other relay transfer arm moves the plurality of test patches from the first inspection position to the second inspection position.

Further, an Electrical Test (ET) device, a One Time Programmable (OTP) recording device, or a flash frequency detection device is disposed at the second Test position and/or the second detection position.

Furthermore, a plurality of panel detection devices are arranged at the first test position, the second test position, the first detection position or the second detection position and are used for being electrically connected to the material piece to be detected so as to detect the material piece to be detected, and each panel detection device comprises a decoration platform used for arranging the material piece to be detected and a pin connector arranged on one side of the decoration platform and used for aligning the electrical connection of the panel pins.

Furthermore, the alignment camera is disposed between the transferring position and the first testing position and between the transferring position and the first testing position, and the image analysis module transmits the alignment control signal to the driving unit according to the alignment image to adjust the configuration angle of the material sheet to be tested on the rotating unit.

Compared with the prior art, the invention has the following advantages and effects:

1. the detection efficiency of the invention is superior to that of the existing optical detection equipment, and the detection efficiency of the material sheet to be detected can be increased by simultaneously detecting a plurality of material sheets to be detected.

2. The invention can be matched with the flaw types to be detected for expansion, and has better flexibility in the configuration of the machine.

Drawings

FIG. 1 is a schematic view of an appearance of the single-sided inspection system of the present invention.

FIG. 2 is a block diagram of the single-sided detection system of the present invention.

FIG. 3 is a top view of the single-sided inspection system of the present invention.

Fig. 4 is an external view of the transfer apparatus of the present invention.

Fig. 5-1 to 5-5 are schematic views illustrating the operation of the single-sided detection system of the present invention.

FIG. 6 is a top view of another preferred embodiment of the present invention.

FIG. 7 is a top view of the double-sided detection system of the present invention.

FIGS. 8-1 to 8-6 are schematic views illustrating the operation of the double-sided detection system of the present invention.

FIG. 9 is a top view of another preferred embodiment of the present invention.

Description of reference numerals:

100 unilateral detection system

110 pan feeding segmentation conveyor

111 transfer position

120 pan feeding is alone changed and is carried arm

121 bracket

122 track

123 long shaft machine arm

124 grabbing device

125 rotating unit

126 grasping portion

127 drive unit

130 alignment camera

140A detection station

141A panel detection device

142A furnishing platform

143A pin connector

144A detection photographic device

140B detection station

141B panel detection device

142B furnishing platform

143B pin connector

150 relay conversion transfer arm

151 rack

152 track

153 long shaft machine arm

154 gripping part

160 discharging transfer device

161 support

162 track

163 long shaft machine arm

164 gripping part

170 discharging device

180 image analysis module

A1 detection Path

S1 first test position

S2 second test position

200 two-sided detection system

210 feeding sectional conveying device

211 transfer position

220A first feeding independent transformation transfer arm

220B second feeding independent transformation transfer arm

230A alignment camera

230B contraposition camera

240A detecting station

240B detecting station

240C detecting station

240D detecting station

250A relay conversion transfer arm

250B relay conversion transfer arm

260A first discharge transfer device

260B second discharge transfer device

270 discharging device

B1 first detection Path

B2 second detection Path

R1 first detection position

R2 second detection position

Detailed Description

The detailed description and technical contents of the present invention will be described below with reference to the accompanying drawings. Furthermore, the drawings of the present invention are not necessarily drawn to scale for illustrative purposes, and are not intended to limit the scope of the present invention.

Please refer to fig. 1, fig. 2, and fig. 3, which are schematic exterior views and top views of a single-sided inspection system according to the present invention, as shown in the drawings:

the present embodiment provides a single-sided inspection system 100, wherein the single-sided inspection system 100 includes a material feeding stage conveying device 110, a material feeding independent-switching transfer arm 120, an alignment camera 130,

inspection stations

140A and 140B, a relay-switching transfer arm 150, a material discharging transfer device 160, and a material discharging device 170.

The feeding segment conveying device 110 is used for conveying and positioning a plurality of material sheets P to be tested at a transfer position 111. Specifically, the feeding segment conveyor 110 is used for carrying the sheets P to be tested and moving a plurality of the sheets P to the transferring position 111, respectively, wherein the transferring position 111 is parallel to the direction of the detection path a 1. In a preferred embodiment, the feeding segment conveying device 110 is a conveyor belt device, which conveys the material sheets P to be tested after the material sheets P are automatically loaded, and automatically feeds the material sheets by the feeding independent shifting transfer arm 120.

The feeding-only transfer arm 120 is used for performing a transfer process to move the plurality of test pieces P from the transfer position 111 to the first testing position S1 of the inspection station 140A.

The feeding independent-changing transfer arm 120, the alignment camera 130 and the image analysis module 180 are configured as a transfer apparatus for simultaneously detecting a plurality of material sheets to be tested, and please refer to fig. 2 and 3 for detailed structure and operation principle thereof. The feeding independent transfer arm 120 includes a support 121, a rail 122 disposed on the support 121, and a long axis arm 123 disposed on the rail 122. The support 121 may be a single-sided support or a double-sided support, the single-sided support fixes a single side of the long axis arm 123 on the rail 122, and the long axis arm 123 is driven by a driving device to reciprocate in a direction defined by the rail 122. In this embodiment, a double-sided bracket is selected, the brackets 121 are respectively fixed to two sides of the long-axis arm 123, so that two sides of the long-axis arm 123 are respectively fixed to the rails 122 of the brackets 121 at two sides, and the long-axis arm 123 is driven by a driving device (not shown) to reciprocate in the direction defined by the rails 122. In a preferred embodiment, the support 121 is further provided with a vertical rail and a driving device corresponding to the vertical direction, which controls the long axis arm 123 to reciprocate up and down, so that the long axis arm 123 moves down to grasp the material sheet P to be measured.

The long shaft arm 123 has a plurality of gripping devices 124 thereon. The grabbing device 124 includes a rotating unit 125 disposed on the long-axis arm 123, a grabbing portion 126 disposed on the rotating unit 125 for grabbing the material sheet P to be measured, and a driving unit 127 for controlling the rotating unit 125 to rotate to adjust the configuration angle of the material sheet P to be measured, where the configuration angle refers to the rotation angle of the material sheet P to be measured in the horizontal direction. In one preferred embodiment, the plurality of gripping devices 124 are arranged in a single row, so as to simultaneously grip a plurality of material sheets P to be tested on the feeding and transferring area 111. In the preferred embodiment, the gripping portion 126 is a vacuum suction device for sucking the material sheet P to be tested, and the vacuum suction device may be, for example, a contact vacuum chuck or a non-contact vacuum chuck (fixed by an outer holder). In addition to the vacuum suction device, the gripping part may be a clamping device, a Positioning Platform (Positioning Platform), a Magnetic suction device (Magnetic suction device), etc., and the present invention is not limited to the above-mentioned embodiments.

The alignment camera 130 is disposed between the first testing position S1 and the transferring position 111, and when the feeding-material independent-conversion transferring arm 120 performs the transferring process, the alignment camera 130 collects images of the plurality of the test material sheets P on the feeding-material independent-conversion transferring arm 120 to obtain an alignment image. The alignment camera 130 transmits the alignment image of the material sheet P to be measured to the image analysis module (not shown), and the image analysis module transmits an alignment control signal to the driving unit 127 according to the alignment image, so as to adjust the arrangement angle of the material sheet P to be measured on the rotating unit 125, respectively. In a preferred embodiment, a plurality of alignment cameras 130 are provided to define a plurality of sensing areas, the number of alignment cameras 130 is the same as the number of rotation units 125 on the long-axis arm 123, and the left and right alignment cameras 130 correspond to the left and right rotation units 125 on the long-axis arm 123 in sequence. The alignment camera 130 captures images of the material sheet P to be measured, and the image analysis module transmits a control signal to the long-axis arm 123 according to the images obtained by the alignment camera 130, so that the corresponding driving units 127 individually adjust the arrangement angles of the material sheet P to be measured on the rotating units 125. In another preferred embodiment, a single alignment camera may be provided to obtain the angle of rotation of each rotation unit 125 by dividing the acquired image.

The alignment camera 130 may be a CCD camera, a CMOS camera, or other similar image detection devices, and is not limited in the present invention, the image analysis module may determine a rotation angle of the material P to be detected through image analysis, and calculate a direction or an angle to be rotated according to a difference between a preset value, thereby correcting the arrangement angle of the material P to be detected, when the alignment camera 130 detects an image of the material P to be detected, the alignment image of the material P to be detected is fed back to the image analysis module, the image analysis module may be implemented in a manner of P L C, a processor, or the like, and calculates correction information that the material P to be detected should be rotated according to the alignment image through P L C or the processor, and generates an alignment control signal according to the correction information to be transmitted to the driving unit 118, so that the driving unit 118 adjusts the material P to be detected to an appropriate direction, angle, and position, thereby disposing the material P to be detected on the detection platform 140A.

Referring back to fig. 1, 2 and 3, the

inspection stations

140A and 140B are disposed on the inspection path a1, and the

inspection stations

140A and 140B respectively correspond to a first test position S1 and a second test position S2. The first test position S1 and the second test position S2 are provided with a plurality of

panel detection devices

141A and 141B for electrically connecting to the material sheet P to be tested to detect the material sheet P to be tested, and the

panel detection devices

141A and 141B include a

placement platform

142A and 142B for placing the material sheet P to be tested, and a

pin connector

143A and 143B disposed at one side of the

placement platform

142A and 142B to align with the pin electrical connection of the material sheet to be tested. After the long-axis robot 120 adjusts each of the pieces P to be tested to a proper angle, the pieces P to be tested are disposed on the

placement platforms

142A and 142B at correct angles and positions, and are inserted and electrically connected through the

pin connectors

143A and 143B.

In the present embodiment, the first inspection station 140A (left side in the figure) is a graphic inspection station, the graphic inspection station includes a plurality of inspection cameras 144A and one or more graphic processing devices (not shown) connected to the material sheet P to be inspected through the pin connectors 143A, the inspection cameras 144A are used for capturing an inspection image of the material sheet P to be inspected, and the captured inspection image is transmitted to the image analysis module to perform an image inspection process on the material sheets P to be inspected. The image detection program is, for example, a binarization process, a sharpening process, an osu process, an iteration process, a moment constancy process, or other similar image processing programs, and the various defects on the material sheet P to be detected are obtained from the image after the image is divided through the above processes, which is not limited in the present invention.

The detecting Camera Device 144A may be an Area-scan Camera (e.g., a Camera Device using a Charge-coupled Device (CCD) or a complementary metal-Oxide-Semiconductor (CMOS)). In another preferred embodiment, the detection camera Device 144A can be a line scan camera, such as a camera Device using a Charge-coupled Device (CCD) or a Complementary Metal-Oxide-Semiconductor (CMOS). In one preferred embodiment, the inspection station 140A includes a vacuum adsorption device (not shown) disposed on the placement platform 142A for horizontally adsorbing and attaching the material sheet P to be inspected to the surface of the vacuum adsorption device.

The second testing station 140B (the second testing position S2) may be provided with an Electronic Test (ET) device, a One Time Programmable (OTP) recording device, or a flash frequency detecting device. The other sheet inspection stations are connected to the sheet P to be inspected through the pin connectors 143B to perform various inspection and correction on the sheet P to be inspected.

The transfer arm 150 is used to move the plurality of test pads P from the first testing position S1 to a second testing position S2 at a time. The relay transfer arm 150 has a long axis arm 153 disposed on the support 151, reciprocates along a rail 152 on the support 151, and uses a plurality of grasping portions 154 on the long axis arm 153 to grasp the material sheet P to be tested, so as to keep a plurality of material sheets P to be tested on the placement platform 142A at appropriate intervals and move laterally to another testing station 140B. In another preferred embodiment, the transfer arm 150 may also be a long vacuum adsorption device for adsorbing the material sheet P to be tested on the surface of the vacuum adsorption device and keeping a proper distance therebetween.

The discharging transfer device 160 transfers the pieces P to be tested at the second testing position S2 to the discharging device 170 in batches, and the discharging device 170 sends out the tested pieces P to be tested to the next process. The discharge transfer device 160 may be a long axis arm 163 disposed on the support 161, and the long axis arm 163 reciprocates along the rail 162 on the support 161, and the sheets P to be tested are grasped by the grasping portions 164 of the long axis arm 163, so that the sheets P to be tested at the second testing position S2 are moved to the discharge device 170. In another preferred embodiment, the discharging and transferring device 160 may also be a long vacuum adsorption device, so that the material sheet P to be tested is adsorbed on the surface of the vacuum adsorption device and keeps a proper distance. The discharging device 170 is used to carry the inspected material pieces P and send a plurality of the inspected material pieces P to another machine, for example, to a sorting machine for sorting the defect states of the inspected material pieces P, or to another reprocessing machine for reprocessing the semi-finished material pieces P, which is not limited in the present invention. In a preferred embodiment, the discharging device 170 is a conveyor belt for continuously conveying the material sheet P to be tested so as to discharge the material sheet P to be tested along the discharging direction.

The operation of the single-sided detection system of the present invention is described below with reference to the accompanying drawings. It should be noted that, for convenience of illustration, the present invention is described in terms of a disposable operation with reference to the accompanying drawings, and those skilled in the art will understand that in practice, some operations may be performed simultaneously according to a schedule, and the operation drawings are not intended to limit the scope of the present invention. It must be explained first. Referring to fig. 5-1 to 5-5, schematic views of a single-sided optical inspection system according to the present invention are shown:

at the beginning, the feeding segment conveying device 110 moves the material sheets P to be tested to the transferring position 111, and the feeding alone changes the transferring arm 120 to grab a plurality of material sheets P to be tested on the feeding transferring area 111 at a time and move toward the first testing position S1. (as shown in FIG. 5-1)

Then, the feeding independent transferring arm 120 moves the material sheet P to be measured to the upper side of the alignment camera 130 to adjust the angle and direction of the material sheet P to be measured. The alignment camera 130 transmits the alignment image of the dut P to the image analysis module. The image analysis module analyzes the image of the material sheet P to be measured to determine the position of the material sheet P to be measured on the grabbing device 124, and generates a corresponding control signal, which is transmitted to the driving unit 127 to adjust the configuration angle of the material sheet P to be measured, so as to correctly align the material sheet P to be measured. (as shown in FIGS. 5-2)

After the material pieces P to be tested are correctly aligned, the feeding independent-changing transfer arm 120 sets the material pieces P to be tested on the plurality of placement platforms 142A of the inspection station 140A, and due to the previous angle calibration work, when the material pieces P to be tested are set on the placement platforms 142A, the pin connectors 143A on the placement platforms 142A can be precisely aligned with the connection terminals of the material pieces P to be tested, so as to electrically connect and perform various types of inspection on the material pieces P to be tested. (as shown in FIGS. 5-3)

When the inspection of the first inspection station 140A (left inspection station) is completed, the relay transfer arm 150 moves the dut pad P from the first testing position S1 to the second testing position S2 of the second inspection station 140B (right inspection station), and re-pins the pin connectors 143B of the second inspection station 140B for another defect inspection. (as shown in FIGS. 5-4)

When the detection is completed, the discharging transfer device 160 moves the material sheet P to be detected to the discharging device 170, and the discharging device 170 sends out the material sheet P to be detected for subsequent classification or reprocessing. (as shown in FIGS. 5-5)

Referring to fig. 6, a top view of another preferred embodiment of the present invention is shown, as shown:

the single-sided inspection system 100 of the present invention can be expanded or extended by adding inspection stations, so as to increase the number of inspection stations, thereby increasing the number of defects to be inspected. The number of the relay transferring and transferring arms 150 between the inspection stations and the inspection stations may be one or more, for example, one relay transferring and transferring arm 150 is responsible for transferring the material sheets P to be inspected on a plurality of inspection stations at the same time, or one relay transferring and transferring arm 150 is provided between two inspection stations, thereby avoiding the waiting time for transferring, which is not limited in the present invention.

In another preferred embodiment of the present invention, a double-sided detection system 200 is provided to increase the efficiency of detection by two-wire detection. FIG. 7 is a top view of the double-sided inspection system of the present invention.

The present embodiment provides a dual-sided inspection system 200, which is different from the single-sided inspection system 100 in that the dual-line scheduling is used to increase the inspection efficiency. In this embodiment, except for the two-line scheduling, the structural definitions of the other corresponding terms are the same, and a detailed structure of each device will not be described herein.

The double-sided inspection system 200 includes a feeding stage conveying device 210, a first feeding independent-switching transfer arm 220A, a second feeding independent-switching transfer arm 220B, a plurality of

alignment cameras

230A and 230B, four

inspection stations

240A, 240B, 240C and 240D, two relay-switching

transfer arms

250A and 250B, a first discharging transfer device 260A, a second discharging transfer device 260B, and a discharging device 270.

The feeding segment conveying device 210 is used for conveying and positioning a plurality of tablets P to be tested at a transfer position 211. In this embodiment, a first inspection path B1 and a second inspection path B2 are provided on both sides of the transfer position 211, respectively, with the transfer position 211 as the center, so as to divide the web P into two lines for inspection.

The first feeding independent-switching transfer arm 220A and the second feeding independent-switching transfer arm 220B are respectively disposed at two sides of the feeding segmented conveying device 210 for performing a transfer process, and the first feeding independent-switching transfer arm 220A and the second feeding independent-switching transfer arm 220B move a plurality of test material sheets from the transfer position 211 to a first test position S1 or a first detection position R1 at two sides, respectively. The detailed structure of the first feeding independent-switching transfer arm 220A and the second feeding independent-switching transfer arm 220B is the same as the feeding independent-switching transfer arm 110 of the first embodiment, and the detailed structure thereof will not be described again.

The

alignment cameras

230A and 230B are respectively disposed between the first testing position S1 and the transferring position 211 and between the first detecting position R1 and the transferring position 211. When the first feeding independent-switching transfer arm 220A and the second feeding independent-switching transfer arm 220B perform the transfer process, the

alignment cameras

230A and 230B respectively capture images of the multiple test pieces P on the first feeding independent-switching transfer arm 220A and the second feeding independent-switching transfer arm 220B to obtain alignment images. In a preferred embodiment, the

alignment cameras

230A and 230B are connected to the image analysis module, and provide an alignment control signal to the first feeding independent-switching transfer arm 220A and the second feeding independent-switching transfer arm 220B according to the alignment image, so as to adjust the alignment of the sheets P.

The

inspection stations

240A, 240B, 240C, and 240D are respectively disposed on the first inspection path B1 and the second inspection path B2, the

inspection stations

240A and 240B respectively correspond to the first testing location S1 and the second testing location S2, and the

inspection stations

240C and 240D respectively correspond to the first inspection location R1 and the second inspection location R2. In a preferred embodiment, the

inspection stations

240A, 240B, 240C, and 240D of the first inspection path B1 and the second inspection path B2 may be symmetrically arranged to control the inspection schedule, so as to avoid the conflict between the schedules when the first feeding arm 220A (the first discharging transfer device 260A) and the second feeding arm 220B (the second discharging transfer device 260B) are independently changed.

The relay transferring and transferring arm 250A moves the plurality of test patches P from the first testing position S1 to a second testing position S2, and the relay transferring and transferring arm 250B moves the plurality of test patches P from the first inspection position R1 to a second inspection position R2.

Relay transfer arms

250A and 250B are respectively disposed at one side of the first inspection path B1 and the second inspection path B2, and are used to transfer a plurality of the test patches P on the inspection station 240A (240C) to another inspection station 240B (240D) at a time.

The first discharging transfer device 260A is disposed between the second testing position S2 and the discharging device 270, the second discharging transfer device 260B is disposed between the second testing position R2 and the discharging device 270, the first discharging transfer device 260A and the second discharging transfer device 260B transfer the to-be-tested material sheet P on the second testing position S2 and the second testing position R2 onto the discharging device 270 at one time, and the discharging device 270 is used to send out the tested to-be-tested material sheet P.

The operation of the double-sided inspection system 200 according to the present invention will be described with reference to the accompanying drawings. It should be noted that, for convenience of illustration, the present invention is described in terms of a disposable operation with reference to the accompanying drawings, and those skilled in the art will understand that in practice, some operations may be performed simultaneously according to a schedule, and the operation drawings are not intended to limit the scope of the present invention. It must be explained first. Referring to fig. 8-1 to 8-5, schematic views of the double-sided inspection system according to the present invention are shown:

at the beginning, the feeding segment conveyor 210 moves the test piece P1 to the transfer position 211, the first feeding segment alone changes the transfer arm 220A to grasp a plurality of test pieces P1 at a time at the transfer position 211, and the first testing position S1 (corresponding to the upper side in the drawing) moves in the direction. (as shown in FIG. 8-1)

Then, the first feeding independent-change transfer arm 220A moves the test piece P1 above the alignment camera 230A to adjust the angle and direction of the test piece P1. The alignment camera 230A transmits the alignment image of the dut P1 to the image processing module, so as to generate a corresponding alignment control signal according to the alignment image, and transmit the alignment control signal to the driving unit to adjust the disposition angle of the dut P1. At the same time, the second feeding-only transfer arm 220B picks up another batch of the plurality of tablets P2 at a time from the transfer position 211, and moves in the direction of the first inspection position R1 (corresponding to the lower side in the drawing). (as shown in FIG. 8-2)

When the angle adjustment is completed, the first feeding alone changes the transferring arm 220A to place the plurality of to-be-tested pads P1 on the plurality of placement platforms at the first testing position S1 of the testing platform 240A, and due to the previous angle calibration work, when the to-be-tested pads P1 are placed on the placement platforms, the pin connectors on the placement platforms can be precisely aligned with the connection terminals of the to-be-tested pads P1, so as to electrically test and perform various types of testing on the to-be-tested pads P1. Meanwhile, the second feeding independent-change transfer arm 220B moves the second batch of tablets P2 to a position above the alignment camera 230B on the second inspection path B2 to adjust the angle and direction of the tablets P2. (as shown in FIGS. 8-3)

When the inspection of the first inspection station 240A (left inspection station) of the first inspection path B1 (corresponding to the upper side of the figure) is completed, the relay transferring arm 250A moves the dut P1 from the first inspection position S1 to the second inspection position S2 of the second inspection station 240B (right inspection station), and re-pins the pin connectors of the second inspection station 240B to perform another defect inspection. Meanwhile, the second feeding independent-change transfer arm 220B sets the second batch of the sheets P2 to be tested on a plurality of placement platforms (the first inspection position R1) of the first inspection station 240C of the second inspection path B2 (corresponding to the lower side of the drawing). (as shown in FIGS. 8-4)

When the inspection of the first inspection path B1 is completed, the first discharging transfer device 260A moves the web P1 to be inspected from the second inspection position S2 to the discharging device 270, and the discharging device 270 discharges the web P1 for subsequent sorting or rework. At the same time, the relay transferring arm 250B on the second inspection path B2 moves the dut P1 from the first inspection position R1 of the first inspection station 240C to the second inspection position R2 of the second inspection station 240D (right-side inspection station). (as shown in FIGS. 8-5)

Finally, after the material sheet P1 to be tested is fed out from one side of the discharging device 270, the second discharging and transferring device 260B moves a second batch of material sheets P2 from the second inspection position R2 to the discharging device 270, so as to feed out the material sheets P2. (as shown in FIGS. 8-6)

The execution sequence of the second detection path B2 is slightly slower than the execution sequence of the first detection path B1, so that the first feeding independent changing and transferring arm 220A and the second feeding independent changing and transferring arm 220B can be staggered by the time sequence, thereby controlling the detection efficiency according to the feeding speed of the feeding segment conveying device 210.

Referring to fig. 9, a top view of another preferred embodiment of the present invention is shown, as shown:

the double-sided optical inspection system 200 of the present invention can be expanded or extended by adding the inspection stations of the first inspection path B1 and the second inspection path B2, so that the types of defects to be inspected can be increased as the number of stations is increased. The number of the transferring

arms

250A and 250B between the inspection stations may be one or more, for example, one transferring arm is responsible for transferring the material pieces to be inspected on a plurality of inspection stations at the same time, or two transferring

arms

250A and 250B are provided between two inspection stations, so as to avoid waiting for transferring time, which is not limited in the present invention.

In summary, the inspection efficiency of the present invention is superior to that of the conventional optical inspection apparatus, and the inspection efficiency of the material sheets to be inspected can be increased by inspecting the batch of material sheets to be inspected at the same time. The invention can be matched with the flaw types to be detected for expansion, and has better flexibility in the configuration of the machine.

The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.

Claims

1. A transfer equipment for simultaneously detecting a plurality of material sheets to be detected is characterized by comprising:

a material-feeding independent-changing transfer arm for carrying out a transfer procedure to move a plurality of material sheets to be tested to a first test position at a transfer position;

an alignment camera, when the feeding solely changes the transferring arm to carry out the transferring process, the alignment camera image is collected on the feeding solely changes the plurality of tablets to be measured on the transferring arm to obtain at least one alignment image; and

an image analysis module, according to the contraposition image, providing a contraposition control signal to the feeding independent transformation transfer arm so as to adjust the contraposition of the plurality of tablets to be measured;

when the transfer program is carried out, the feeding independent conversion transfer arm adjusts the alignment of the plurality of material sheets according to the alignment control signal.

2. The transfer apparatus of claim 1 wherein said incoming material independent transfer arm includes a frame, a rail mounted on said frame, and a long axis arm mounted on said rail;

the long shaft machine arm is driven by the driving device to reciprocate on the track, a plurality of grabbing devices are arranged on the long shaft machine arm, each grabbing device comprises a rotating unit arranged on the long shaft machine arm, a grabbing part arranged on the rotating unit and used for grabbing the material piece to be measured, and a driving unit for controlling the rotating unit to rotate so as to adjust the configuration angle of the material piece to be measured.

3. The transfer apparatus as claimed in claim 2, wherein the image analysis module transmits the alignment control signal to the driving unit according to the alignment image to adjust the arrangement angles of the material sheets on the rotating unit.

4. The transfer apparatus according to claim 3, wherein the gripping portion is a vacuum suction device for sucking the material sheet to be measured.

5. The transfer facility according to claim 3, wherein a plurality of said gripping devices are arranged in a single row.

6. A single-sided inspection system for simultaneously inspecting a plurality of test material sheets, comprising:

the feeding segmented conveying device is used for conveying and positioning a plurality of material sheets to be tested at a transfer position;

a material-feeding independent-changing transfer arm for carrying out a transfer procedure to move a plurality of material sheets to be tested to a first test position at the transfer position;

an alignment camera, when the feeding solely changes the transferring arm to carry out the transferring process, the alignment camera image is collected on the feeding solely changes the plurality of tablets to be measured on the transferring arm to obtain an alignment image;

the detection photographic device acquires images of the plurality of material sheets to be tested when the plurality of material sheets to be tested are at the first test position so as to obtain a detection image;

an image analysis module, according to the contraposition image, providing a contraposition control signal to the feeding independent transformation transfer arm so as to adjust the contraposition of the plurality of tablets to be measured; the image analysis module is used for carrying out an image detection program on the plurality of tablets to be detected according to the detection image;

during the transferring process, the feeding independent-changing transferring arm adjusts the alignment of the plurality of material sheets according to the alignment control signal.

7. The system of claim 6, further comprising a second testing position, and a relay transfer arm for performing an inter-platform transfer process, wherein the relay transfer arm moves the plurality of test pads from the first testing position to a second testing position.

8. The single-sided test system of claim 7, wherein the second test position is configured with an electrical test device, a one-time programmable recording device, or a strobe detection device.

9. The single-sided inspection system of claim 7, wherein the first or second testing position is configured with a plurality of panel inspection devices for electrically connecting to the web to be inspected for inspecting the web; the panel detection device comprises a decoration platform used for arranging the material piece to be detected and a pin connector arranged on one side of the decoration platform and electrically connected with the pin of the panel in an aligning mode.

10. The single-sided detection system of claim 9, wherein a vacuum adsorption device is disposed on the placement platform for flatly adsorbing and attaching the material sheet to be tested to a surface of the vacuum adsorption device.

11. The single-sided inspection system of claim 6 wherein the feed-only transfer arm includes a frame, a rail disposed on the frame, and a long-axis arm disposed on the rail; wherein the long shaft arm is driven by a driving device to move back and forth on the track, and the long shaft arm is provided with a plurality of grabbing devices; each grabbing device comprises a rotating unit arranged on the long shaft machine arm, a grabbing part arranged on the rotating unit and used for grabbing the material piece to be measured, and a driving unit for controlling the rotating unit to rotate so as to adjust the configuration angle of the material piece to be measured.

12. The single-sided detection system of claim 11, wherein the plurality of grasping devices are arranged in a single row on the long-axis arm.

13. The single-sided inspection system of claim 11, wherein the grasping portion is a vacuum suction device for sucking the material sheet to be inspected.

14. The system of claim 11, wherein the alignment camera is disposed between the transfer position and the first testing position, and the image analysis module transmits the alignment control signal to the driving unit according to the alignment image to adjust the arrangement angles of the material sheets on the rotating unit, respectively.

15. A two-sided inspection system for simultaneously inspecting a plurality of webs, comprising:

a plurality of feeding independent conversion transfer arms are used for carrying out a transfer procedure to respectively move a plurality of tablets to be tested from the transfer positions to a first test position or a first detection position on two sides;

at least two alignment cameras respectively arranged between the first test position and the transfer position and between the first detection position and the transfer position, wherein when the feeding material alone changes the transfer arm to carry out the transfer program, the images of the alignment cameras are collected on the plurality of tablets to be tested on the feeding material alone changes the transfer arm to obtain an alignment image;

the at least two detection photographic devices are respectively arranged at the first test position or the first detection position, and when the plurality of material sheets to be detected are positioned at the first test position or the first detection position, the detection photographic devices acquire images of the plurality of material sheets to be detected so as to obtain a detection image;

16. The system of claim 15, further comprising a second testing position, and two relay transfer arms for performing the inter-platform transfer process, wherein one of the relay transfer arms moves the plurality of test patches from the first testing position to a second testing position, and the other relay transfer arm moves the plurality of test patches from the first testing position to a second testing position.

17. The double-sided inspection system of claim 16, wherein an electrical testing device, a one-time programmable recording device, or a strobe detection device is disposed at the second testing position and/or the second inspection position.

18. The dual-sided inspection system of claim 16, wherein the first inspection position, the second inspection position, the first inspection position, or the second inspection position is configured with a plurality of panel inspection devices for electrically connecting to the wafer to be inspected to inspect the wafer, the panel inspection device includes a placement platform for placing the wafer to be inspected, and a pin connector disposed at one side of the placement platform for electrically connecting with the pin of the panel.

19. The dual-sided inspection system of claim 18, wherein a vacuum chuck is disposed on the placement platform for holding the test material sheet to be inspected flat and attached to a surface of the vacuum chuck.

20. The double-sided inspection system of claim 15, wherein the feeding-material independent-change transfer arm comprises a support, a rail disposed on the support, and a long-axis arm disposed on the rail, the long-axis arm being driven by a driving device to move back and forth on the rail, the long-axis arm having a plurality of grippers, wherein each gripper comprises a rotation unit disposed on the long-axis arm, a gripper disposed on the rotation unit for gripping the material sheet to be inspected, and a driving unit for controlling the rotation unit to rotate to adjust the disposition angle of the material sheet to be inspected.

21. The dual-sided inspection system of claim 20, wherein the plurality of grasping devices are arranged in a single row on the long axis robot arm.

22. The double-sided inspection system of claim 20, wherein the grasping portion is a vacuum suction device for sucking the material sheet to be inspected.

23. The dual-sided inspection system of claim 20, wherein the alignment camera is disposed between the transfer position and the first inspection position and between the transfer position and the first inspection position, and the image analysis module transmits the alignment control signal to the driving unit according to the alignment image to adjust the disposition angle of the material sheet on the rotation unit.