CN107703579A - Realize the super structure surface lens and implementation method of horizontal multiple-point focusing - Google Patents
Realize the super structure surface lens and implementation method of horizontal multiple-point focusing Download PDFInfo
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- CN107703579A CN107703579A CN201711012418.4A CN201711012418A CN107703579A CN 107703579 A CN107703579 A CN 107703579A CN 201711012418 A CN201711012418 A CN 201711012418A CN 107703579 A CN107703579 A CN 107703579A
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
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- G02B5/3083—Birefringent or phase retarding elements
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- G—PHYSICS
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- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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Abstract
The invention discloses a kind of super structure surface lens and implementation method for realizing horizontal multiple-point focusing.By the way that super structure surface lens are carried out into sub-wavelength square array column unit subregion；Each square shaped cells are further divided into smaller square pixel unit.Each sub-wavelength dimensions square shaped cells are nested with certain pixel and form and have the slit for determining length-width ratio.Two times of phase modulation values for having corresponded to the unit of the azimutal orientation of slit.Phase modulation values are made up of two parts superposition, and a portion phase value modulation value produces the spherical wave radially to change；The phase value modulation value that another part changes along azimuth direction, determined by Fourier transformation phase shift theorem.The slit in each sub-wavelength square shaped cells that azimutal orientation will be determined is fabricated to the super structure surface lens of the rectangular volume array of titanium dioxide of corresponding orientation.The multiple-point focusing in focal plane can be produced with circularly polarized light incidence.
Description
Technical field
The present invention relates to a kind of super structure surface lens, especially it is a kind of can realize horizontal multiple-point focusing super structure surface it is saturating
Mirror, also relate to a kind of implementation method that horizontal multiple-point focusing is realized based on the lens.
Background technology
Traditional optical lens are to adjust incident light phase by the change of thickness of glass so as to realize focusing.It is such
Lens volume is big and heavy.With the continuous development of integrated photonics device, it is apparent that Traditional optics include lens
Through the requirement that can not meet large-scale integrated and device miniaturization functional diversities.
Because phase-modulation be present to incident light in metal or dielectric nano-antenna, substrate surface using coating technique and
All kinds of nanotube antenna arrays that modern micro-processing technology can be processed as required for phase-modulation, so as to realize the phase to incident light
Position, polarizes the photoelectric device being modulated, such as polarization converter, beam splitter, dispersion element, no color differnece condenser lens.It is this kind of
Device is referred to as super structure surface element, and its thickness and size generally can be in micron dimensions.Thus volume is minimum, in light weight, easily
In integrated.
On the other hand, the vector light beam focusing of high-NA objective is theoretical and phase modulating method has enabled us to
Various focal beam spots are produced, such as ring-shaped light spot, chain shaped laser spot, spiral hot spot, needle-like hot spot, tunnel-type hot spot, spherical
Hot spot, two-dimensional array hot spot and cubical array hot spot.These hot spots swash in super-resolution fluorescence imaging, confocal microscope, ultraprecise
Light parallel fabrication, photoetching technique, the manufacture of super-resolution laser gain material, the manipulation of micro-nano-scale laser capture, optical storage of data etc.
Field has very extensive application.
There is presently no what is formed using nanotube antenna array can produce laterally multifocal super structure surface lens.
The content of the invention
The present invention proposes a kind of super structure surface lens and implementation method for realizing horizontal multiple-point focusing, the purpose is to：
There is provided that a kind of volume is minimum, in light weight, the micro photo electric element that is easily integrated, substitute traditional high-NA objective and phase
Modulation element combines, and meets the requirement of large-scale integrated and device miniaturization functional diversities.
Technical solution of the present invention is as follows：
A kind of super structure surface lens for realizing horizontal multiple-point focusing, are made by following step：
(1) material of nanotube antenna array is selected according to wavelength, and sub-wavelength dimensions square shaped cells are determined according to wavelength
Size dimension；
(2) material surface of nanotube antenna array is divided into MxM sub-wavelength dimensions square shaped cells, M is odd number；
(3) a slit is embedded at each square shaped cells center, the slit is equal with the widthwise edge of square shaped cells
OK；
(4) established using laterally longitudinal direction (the M+1)/2 square shaped cells center on the row of (M+1)/2 as the origin of coordinates straight
Angular coordinate system, using plane where square shaped cells as X/Y plane, the x-axis of the coordinate system is equal with the widthwise edge of square shaped cells
OK, using the axle of vertical square shaped cells as z-axis；
(5) a series of concentric circles are built centered on origin, XY coordinate planes are divided into a series of concentric annular regions；
(6) again with x-axis forward direction for azimuth start line, radial ray is made by concentric annular regions etc. from coordinate origin
It is divided into P subregion, P is even number, and each subregion is further divided into the equal son of Q central angle from coordinate origin as ray again
Region, Q is equal with wanting caused focus number, and i-th of subregion of each subregion corresponds to i-th of focus；
(7) slit for being nested with each square shaped cells rotates different angles, the slit rotation of each square shaped cells
The angle ψ turned0=ψ1+ψ2, wherein, ψ1To focus on the half that spherical wave produces the phase modulation values required for focal length is f, this
The size of value is determined by the annular region radius size where square shaped cells central point；ψ2To make caused focus in super structure table
The half of phase modulation values in the lens focal plane of face required for generation lateral displacement, the lateral displacement refer to focus in nanometer
The projection of the material surface of aerial array relative to coordinate origin displacement；
(8) the final angle of the angle-determining slit rotated is needed according to each slit calculated, then processes each pros
Slit in shape unit.
Further：For slit of the center in subregion in the square shaped cells of i-th of subregion, required rotation
Angle：
In above formula, λ is lambda1-wavelength, and f is focal length corresponding to focal plane, and R is the ring where square shaped cells central point
The radius in shape region, x, y are the center abscissa and ordinate in a coordinate system of the square shaped cells where the slit, and NA is
The numerical aperture of lens, Δ xi、ΔyiFor focus corresponding to i-th of subregion nanotube antenna array material surface
The abscissa and ordinate of projection in a coordinate system.
Further：NxN pixel is divided into step (2), then by each square shaped cells, N is odd number, described narrow
Seam is made up of some pixels.
Further：Using the integral multiple of the length of side of square shaped cells as radius when building concentric circles.
Further：The slit is processed using plated film and micro-processing method.
Further：The multifocal position can arbitrarily be set.
The method for realizing horizontal multiple-point focusing based on above-mentioned super structure surface lens：With described in circularly polarized light vertical incidence
Super structure surface element, horizontal Q focus is produced at super structure surface lens back focal plane.
Further：The production method of the circularly polarized light is that laser beam is passed through into the linear polarizer of respective wavelength and four
/ mono- wave plate is converted into circularly polarized light.
Relative to prior art, the present invention has advantages below：First：Whole multi-focus lens is a planar member
Part, size, thickness and volume are all very small, can be highly susceptible to integrating in hundreds of micron dimensions；Second：Whole multifocal
Phase-modulation is completed with focusing function by nanotube antenna array is unified, and phase modulation component is made without extra, and without profit
Horizontal multiple-point focusing can be achieved with spatial light modulator and Fourier transformation imaging system.
Brief description of the drawings
Fig. 1 be the square shaped cells arrays of the super structure surface lens of the present invention, concentric annular regions, subregion, subregion and
The slit rotation schematic diagram that single square shaped cells are nested with；
Fig. 2 realizes particular phases modulation profile for the super structure surface lens of the present invention by the slit array of different rotary angle
Schematic diagram；
Fig. 3 is the super structure lens schematic diagram of circle for the 60x60 square arrays column unit composition that the present invention designs；
Fig. 4 is by the incident horizontal super structure surface lens of multifocal of circularly polarized light, so as in 10 focuses caused by focal plane
Schematic diagram.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with attached in the present invention
Figure, the technical scheme in the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is the present invention
Part of the embodiment, rather than whole embodiments.
The lens radius to be designed, lens substrate material, focal length and focus quantity are determined first.Lens in the present embodiment
Radius is 100 microns, and base material is 0.17 mm of thickness quartz material, and focal length is 90 microns, and focus quantity 10 is used to swash
A length of 633 nanometers of light wave.Lens follow the steps below design, make and verify.
Step 1：As shown in Figure 1, the material of suitable nanotube antenna array is selected according to wavelength, usual material can be
Noble metal such as gold and silver or dielectric substance, the present embodiment selection selection titanium dioxide；Sub-wavelength is determined according to wavelength
The size dimension of dimension square unit, size are generally less than lambda1-wavelength, and the length of side is 400 nanometers in the present embodiment.
Step 2：The material surface of nanotube antenna array is divided into MxM sub-wavelength dimensions square shaped cells, M is strange
Number, it is sufficiently large, preferably 300 to 1000；Each square shaped cells are divided into NxN pixel again, N is odd number.The present embodiment
In, M=401, N=25.
Step 3：Again embedded one of each square shaped cells center by certain array of pixels into and have certain length-width ratio
Slit, the slit is parallel with the widthwise edge of square shaped cells, and width is less than a quarter or 1/5th of wavelength, this reality
Apply slit width in example and be set to 80 nanometers, length is 400 nanometers.Accompanying drawing 2 is the square shaped cells for having certain slit orientations
Array partial enlarged drawing.
Step 4：Right angle is established using laterally the 201st square shaped cells center in longitudinal direction on the 201st row as the origin of coordinates to sit
Mark system, using plane where square shaped cells as X/Y plane, the x-axis of the coordinate system is parallel with the widthwise edge of square shaped cells,
Using the axle of vertical square shaped cells as z-axis.
Step 5：A series of concentric circles are built centered on origin, by radius of the integral multiple of the length of side of square shaped cells,
XY coordinate planes are divided into a series of concentric annular regions, i.e., the radius of concentric circles be 400 nanometers, 800 nanometers, 1200 receive
Rice, 1600 nanometers etc., it is two neighboring with one heart radius of circle differ 400 nanometers.
Step 6：Radial ray is made by annular concentric area from coordinate origin for azimuth start line with x-axis forward direction again
Domain is divided into P subregion, and P is even number, and such as 60,90 or 120 etc., P=60 in the present embodiment, each subregion is again from coordinate origin
The equal subregion of Q central angle is further divided into as ray, Q is equal with wanting caused focus number, i-th of each subregion
Subregion corresponds to i-th of focus, Q=10 in the present embodiment.
Step 7：According to multifocal requirement is produced, by MATLAB programmings, each square shaped cells are nested with
Slit rotates different angle ψs0.The angle ψ of the slit rotation of each square shaped cells0It is made up of two parts：ψ0=ψ1+ψ2, its
Middle ψ1To focus on the half that spherical wave produces the phase modulation values required for focal length is f, the size of this value is by square shaped cells
Annular region radius size where central point determines；Wherein ψ2To make caused focus be produced in super structure surface lens focal plane
The half of phase modulation values required for raw lateral displacement, the lateral displacement refer to material table of the focus in nanotube antenna array
The projection in face is determined, specifically relative to the displacement of coordinate origin by Fourier transformation phase shift theorem：
For slit of the center in subregion in the square shaped cells of i-th of subregion, the angle of required rotation：
In above formula, λ is lambda1-wavelength, and f is focal length corresponding to focal plane, and R is the ring where square shaped cells central point
The radius in shape region, x, y are the center abscissa and ordinate in a coordinate system of the square shaped cells where the slit, and NA is
The numerical aperture of lens, Δ xi、ΔyiFor focus corresponding to i-th of subregion nanotube antenna array material surface
The abscissa and ordinate of projection in a coordinate system.The multifocal position can arbitrarily be set.
The super structure surface lens top view that the square shaped cells array that accompanying drawing 3 is 60x60 forms.
Step 8：The final angle of the angle-determining slit rotated is needed according to each slit for calculating, with the length of slit and
Wide length and width as cuboid, designed titanium dioxide dielectric substance is made using coating technique and micro-processing technology
The rectangular super structure surface lens of volume array.The cuboid of titanium dioxide dielectric substance is highly 600 nanometers.
Step 9：Laser beam is converted into circularly polarized light by the linear polarizer and quarter-wave plate of respective wavelength, vertically
Incident aligned super structure surface lens.
Step 10：As shown in Figure 4, laterally 10 focuses are produced at super structure surface lens back focal plane.With another thing
Mirror, tube lens, charge-coupled imaging device and computer carry out the observation and checking of focus with software.
Although above with general explanation and specific embodiment, the present invention is described in detail, at this
On the basis of invention, it can be made some modifications or improvements, this will be apparent to those skilled in the art.Therefore,
These modifications or improvements without departing from theon the basis of the spirit of the present invention, belong to the scope of protection of present invention.
Claims (8)
- A kind of 1. super structure surface lens for realizing horizontal multiple-point focusing, it is characterised in that：Made by following step：(1) material of nanotube antenna array is selected according to wavelength, and the side of sub-wavelength dimensions square shaped cells is determined according to wavelength Long size；(2) material surface of nanotube antenna array is divided into MxM sub-wavelength dimensions square shaped cells, M is odd number；(3) a slit is embedded at each square shaped cells center, the slit is parallel with the widthwise edge of square shaped cells；(4) right angle is established as the origin of coordinates using laterally longitudinal direction (the M+1)/2 square shaped cells center on the row of (M+1)/2 to sit Mark system, using plane where square shaped cells as X/Y plane, the x-axis of the coordinate system is parallel with the widthwise edge of square shaped cells, Using the axle of vertical square shaped cells as z-axis；(5) a series of concentric circles are built centered on origin, XY coordinate planes are divided into a series of concentric annular regions；(6) again with x-axis forward direction for azimuth start line, make radial ray from coordinate origin and be divided into concentric annular regions P subregion, P are even number, and each subregion is further divided into the equal sub-district of Q central angle from coordinate origin as ray again Domain, Q is equal with wanting caused focus number, and i-th of subregion of each subregion corresponds to i-th of focus；(7) slit for being nested with each square shaped cells rotates different angles, the slit rotation of each square shaped cells Angle ψ0=ψ1+ψ2, wherein, ψ1To focus on the half that spherical wave produces the phase modulation values required for focal length is f, this value Size is determined by the annular region radius size where square shaped cells central point；ψ2To make caused focus saturating on super structure surface The half of phase modulation values in mirror focal plane required for generation lateral displacement, the lateral displacement refer to focus in nano-antenna The projection of the material surface of array relative to coordinate origin displacement；(8) the final angle of the angle-determining slit rotated is needed according to each slit calculated, it is single then processes each square Slit in member.
- 2. the super structure surface lens of horizontal multiple-point focusing are realized as claimed in claim 1, it is characterised in that：Exist for center Slit in subregion in the square shaped cells of i-th of subregion, the angle of required rotation：<mrow> <msub> <mi>&psi;</mi> <mrow> <mn>0</mn> <mi>i</mi> </mrow> </msub> <mo>=</mo> <mfrac> <mi>&pi;</mi> <mi>&lambda;</mi> </mfrac> <mrow> <mo>(</mo> <msqrt> <mrow> <msup> <mi>f</mi> <mn>2</mn> </msup> <mo>+</mo> <msup> <mi>x</mi> <mn>2</mn> </msup> <mo>+</mo> <msup> <mi>y</mi> <mn>2</mn> </msup> </mrow> </msqrt> <mo>-</mo> <mi>f</mi> <mo>)</mo> </mrow> <mo>+</mo> <mfrac> <mrow> <mi>&pi;</mi> <mi>N</mi> <mi>A</mi> </mrow> <mrow> <mi>&lambda;</mi> <mi>R</mi> </mrow> </mfrac> <mrow> <mo>(</mo> <msub> <mi>x&Delta;x</mi> <mi>i</mi> </msub> <mo>+</mo> <msub> <mi>y&Delta;y</mi> <mi>i</mi> </msub> <mo>)</mo> </mrow> <mo>;</mo> </mrow>In above formula, λ is lambda1-wavelength, and f is focal length corresponding to focal plane, and R is the annulus where square shaped cells central point The radius in domain, x, y are the center abscissa and ordinate in a coordinate system of the square shaped cells where the slit, and NA is lens Numerical aperture, Δ xi、ΔyiFor the focus corresponding to i-th of subregion the material surface of nanotube antenna array projection Abscissa and ordinate in a coordinate system.
- 3. the super structure surface lens of horizontal multiple-point focusing are realized as claimed in claim 1, it is characterised in that：In step (2) In, then each square shaped cells are divided into NxN pixel, N is odd number, and the slit is made up of some pixels.
- 4. the super structure surface lens of horizontal multiple-point focusing are realized as claimed in claim 1, it is characterised in that：Build concentric circles When using the integral multiple of the length of side of square shaped cells as radius.
- 5. the super structure surface lens of horizontal multiple-point focusing are realized as claimed in claim 1, it is characterised in that：Using plated film and Micro-processing method processes the slit.
- 6. the super structure surface lens of horizontal multiple-point focusing are realized as claimed in claim 1, it is characterised in that：The multifocal Position can arbitrarily set.
- 7. the method for realizing horizontal multiple-point focusing based on the super structure surface lens as described in claim 1 to 6 is any, its feature It is：With the super structure surface element described in circularly polarized light vertical incidence, produced at super structure surface lens back focal plane horizontal Q Focus.
- 8. the method for horizontal multiple-point focusing is realized as claimed in claim 7, it is characterised in that：The generation of the circularly polarized light Method is that laser beam is converted into circularly polarized light by the linear polarizer and quarter-wave plate of respective wavelength.
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| CN108549126A (en) * | 2018-04-28 | 2018-09-18 | 西安柯莱特信息科技有限公司 | A kind of nano thin-film and preparation method thereof of enhancing asymmetric transmission |
| CN108897087A (en) * | 2018-06-13 | 2018-11-27 | 电子科技大学中山学院 | Nano structure capable of improving asymmetric transmission and preparation method thereof |
| CN109390701A (en) * | 2018-11-28 | 2019-02-26 | 中国矿业大学 | A kind of X-band high-gain broadband lens antenna based on the super surface texture of phase gradient multilayer |
| CN109976065A (en) * | 2019-04-29 | 2019-07-05 | 泉州师范学院 | The method that radiation field based on rotating-field antenna generates rotatable optics Jiao Chang |
| CN110109202A (en) * | 2019-04-29 | 2019-08-09 | 南京理工大学 | Super surface lens |
| CN110412761A (en) * | 2018-05-08 | 2019-11-05 | 武汉大学 | A kind of multi gear static state zoom lens based on super surfacing |
| CN111641011A (en) * | 2020-06-05 | 2020-09-08 | 深圳大学 | Metal waveguide array and regulating device using same |
| CN112162393A (en) * | 2020-10-12 | 2021-01-01 | 南开大学 | High-directivity transverse unidirectional scattering implementation method based on silicon cuboid |
| CN112379469A (en) * | 2020-11-09 | 2021-02-19 | 湖南大学 | Optical lens with super-structured surface and imaging device |
| CN113126290A (en) * | 2021-04-27 | 2021-07-16 | 西北大学 | Phase modulation method for generating controllable multi-focus array |
| CN114265133A (en) * | 2021-12-28 | 2022-04-01 | 西南科技大学 | Focusing plane super lens and parameter determination method and using method thereof |
| CN114764156A (en) * | 2021-01-11 | 2022-07-19 | 中国科学院长春光学精密机械与物理研究所 | Infrared all-dielectric orthogonal cylindrical surface super lens |
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| CN108549126A (en) * | 2018-04-28 | 2018-09-18 | 西安柯莱特信息科技有限公司 | A kind of nano thin-film and preparation method thereof of enhancing asymmetric transmission |
| CN108549126B (en) * | 2018-04-28 | 2021-04-06 | 厦门呈昱实业有限公司 | Nano-film for enhancing asymmetric transmission and preparation method thereof |
| CN110412761A (en) * | 2018-05-08 | 2019-11-05 | 武汉大学 | A kind of multi gear static state zoom lens based on super surfacing |
| CN108897087A (en) * | 2018-06-13 | 2018-11-27 | 电子科技大学中山学院 | Nano structure capable of improving asymmetric transmission and preparation method thereof |
| CN109390701A (en) * | 2018-11-28 | 2019-02-26 | 中国矿业大学 | A kind of X-band high-gain broadband lens antenna based on the super surface texture of phase gradient multilayer |
| CN109976065B (en) * | 2019-04-29 | 2022-06-07 | 泉州师范学院 | Method for generating rotatable optical focal field based on radiation field of rotating field antenna |
| CN109976065A (en) * | 2019-04-29 | 2019-07-05 | 泉州师范学院 | The method that radiation field based on rotating-field antenna generates rotatable optics Jiao Chang |
| CN110109202A (en) * | 2019-04-29 | 2019-08-09 | 南京理工大学 | Super surface lens |
| CN111641011A (en) * | 2020-06-05 | 2020-09-08 | 深圳大学 | Metal waveguide array and regulating device using same |
| CN111641011B (en) * | 2020-06-05 | 2022-02-08 | 深圳大学 | Metal waveguide array and regulating device using same |
| CN112162393A (en) * | 2020-10-12 | 2021-01-01 | 南开大学 | High-directivity transverse unidirectional scattering implementation method based on silicon cuboid |
| CN112162393B (en) * | 2020-10-12 | 2023-04-18 | 南开大学 | High-directivity transverse unidirectional scattering implementation method based on silicon cuboid |
| CN112379469A (en) * | 2020-11-09 | 2021-02-19 | 湖南大学 | Optical lens with super-structured surface and imaging device |
| CN114764156A (en) * | 2021-01-11 | 2022-07-19 | 中国科学院长春光学精密机械与物理研究所 | Infrared all-dielectric orthogonal cylindrical surface super lens |
| CN114764156B (en) * | 2021-01-11 | 2024-04-02 | 中国科学院长春光学精密机械与物理研究所 | Infrared all-dielectric orthogonal cylindrical superlens |
| CN113126290B (en) * | 2021-04-27 | 2023-03-21 | 西北大学 | Phase modulation method for generating controllable multi-focus array |
| CN113126290A (en) * | 2021-04-27 | 2021-07-16 | 西北大学 | Phase modulation method for generating controllable multi-focus array |
| CN114265133A (en) * | 2021-12-28 | 2022-04-01 | 西南科技大学 | Focusing plane super lens and parameter determination method and using method thereof |
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