CN107703329B - Vacuum for high-resolution quartz flexible accelerometer keeps structure - Google Patents
Vacuum for high-resolution quartz flexible accelerometer keeps structure Download PDFInfo
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- CN107703329B CN107703329B CN201710905553.5A CN201710905553A CN107703329B CN 107703329 B CN107703329 B CN 107703329B CN 201710905553 A CN201710905553 A CN 201710905553A CN 107703329 B CN107703329 B CN 107703329B
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- conductive cover
- guiding loop
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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Abstract
The present invention relates to a kind of vacuum for high-resolution quartz flexible accelerometer to keep structure, including upper, lower magnetic guiding loop component, put component and connection ring, component is put by quartz pendulous reed, torquer coil and coil rack composition, on, lower magnetic guiding loop component is by magnetic guiding loop, cylindrical permanent magnet, magnetic conductive cover and magnetic conduction pedestal composition, the bottom of magnetic guiding loop is coaxially mounted on magnetic conductive cover, the central coaxial of the magnetic conductive cover produces one and raises upward and downward opening groove, cylindrical permanent magnet and magnetic conduction pedestal is from top to bottom sequentially coaxially arranged in the inside of the groove, the magnetic conduction pedestal forms closed cavity together with magnetic conductive cover laser seal welding；Magnetic conduction ring component is installed using coaxial mirror image in pairs, and together by connection ring laser seal welding, pendulum component is fixedly mounted with therebetween.The present invention keeps the vacuum degree inside accelerometer, keeps the stability of accelerometer resolution ratio at any time by improving magnetic guiding loop modular construction in existing quartz flexible accelerometer structure basis, increasing laser welded seal design.
Description
Technical field
The invention belongs to sensor technical field, especially a kind of vacuum for high-resolution quartz flexible accelerometer
Structure is kept, is a kind of accelerometer measures element suitable for high-resolution navigation system and gravity gradiometer system.
Background technique
Quartz flexible accelerometer is a kind of sensor of differential capacitance type closed-loop high-precision, Si Tan gloomy by the U.S. earliest
Company succeeds in developing in nineteen seventies, and specific structure has a detailed description in United States Patent (USP) (patent No. 4250757), it
Watch core structure it is as shown in Figure 1 and Figure 2, be current domestic inertial navigation measurement and structure that guidance system generally uses be most simple
High-precision accelerometer.Fig. 1 is common quartz flexible accelerometer three-dimensional explosive view, and Fig. 2 is that common quartz flexible accelerates
Degree counts two-dimentional axis cross-sectional view.It includes upper and lower magnetic conduction ring component 10, pendulum component 20 and connection ring 30.Magnetic guiding loop 11, cylinder are forever
Magnet 12, magnetic conduction cap 13 form magnetic conduction ring component 10.Quartz pendulous reed 21, torquer coil 22 and the composition pendulum component of coil rack 23
20.Magnetic conduction ring component 10 is installed using coaxial mirror image in pairs, cementing by connection ring 30 or spot welding 31 links together, and is led two
Pendulum component 20 is fixedly mounted between magnet ring component 10.
Quartz flexible accelerometer working principle are as follows: when product has along the acceleration effect of sensitive axis direction, due to not having
There is bonding force effect, quartz pendulous reed keeps original motion state, therefore relatively upper and lower torquer generates displacement, makes two sides plate
Capacitor forms capacitance difference.Differential capacitance sensor sensitivity generates an electric current proportional to capacitance difference to capacitance difference.Electric current warp
Load is on torquer coil after the processing such as servo circuit filtering, integral, amplification, and current-carrying torquer coil is by torquer magnetic
Effect generate an electromagnetic force F identical with input acceleration direction, so that flexible quartz pendulous reed is returned to equilbrium position (two sides
Capacitor is equal).The torque current in torquer coil reflects the size and Orientation of acceleration at this time, detects on torquer coil
Electric current can calculate input acceleration, realize the measurement of acceleration.
High-resolution navigation system, gravity gradiometer system requirements accelerometer have the high-resolution of high stability, this
Require to keep condition of high vacuum degree inside quartz flexible accelerometer for a long time, make quartz pendulous reed work around without sink-float particle or
Molecule, the Brownian movement for reducing particle or molecule hit bring disturbance torque or thermal noise to quartz pendulous reed.It reduces simultaneously
The mass change of particle erosion bring detection quality.
The quartz flexible accelerometer main limitation of the prior art exists: internal after accelerometer assembly to form a vacuum
Cavity, cavity edge have certain leak rate using cementing, while internal different materials have not equal outgassing rate, acceleration
Degree meter internal vacuum can deteriorate under long-term operating condition, can not keep for a long time.Table 1 is that high-resolution quartz flexible adds
The comparison of speedometer internal material outgassing rate.
The comparison of 1 quartz flexible accelerometer internal material outgassing rate of table
The maximum material of outgassing rate is powder metallurgy permanent magnet inside high-resolution quartz flexible accelerometer, there is seam
Gap and porosity, keep gas, when vacuum evacuation cannot exclude it is clean, can be discharged to successively in the prolonged course of work plus
Inside speedometer, accelerometer air pressure inside generates variation, and resolution ratio and stability is caused to reduce.
There are two types of the main methods that vacuum is kept at present: 1) using suitable getter, but have the use time of certain limit
Number；2) accelerometer internal cavity is controlled to a vacuum pump always, but if vacuum pump is connect with accelerometer in real work,
It can cause mechanical oscillation when work, reduce accelerometer precision.
Summary of the invention
In place of making up the deficiencies in the prior art, one kind is provided and is added for high-resolution quartz flexible
The vacuum of speedometer keeps structure.
The purpose of the present invention is what is realized by following technological means:
A kind of vacuum holding structure for high-resolution quartz flexible accelerometer, including upper and lower magnetic conduction ring component, pendulum
Component and connection ring, pendulum component are made of quartz pendulous reed, torquer coil and coil rack, it is characterised in that: upper and lower magnetic guiding loop
Component is made of magnetic guiding loop, cylindrical permanent magnet, magnetic conductive cover and magnetic conduction pedestal, and the bottom of magnetic guiding loop is coaxially mounted to magnetic conductive cover
On, the central coaxial of the magnetic conductive cover produces one and raises upward and downward opening groove, the inside of the groove from top to bottom according to
Secondary coaxial arrangement cylindrical permanent magnet and magnetic conduction pedestal, the magnetic conduction pedestal form closing together with magnetic conductive cover laser seal welding
Cavity；Magnetic conduction ring component is installed using coaxial mirror image in pairs, and together by connection ring laser seal welding, pendulum component is fixedly mounted with
Therebetween.
Moreover, the magnetic guiding loop is cyclic structure, central coaxial produces centre bore.
Moreover, being coaxially disposed magnetic conduction cap in the top of cylindrical permanent magnet, which is located at cylindrical permanent magnet and leads
Between the inner wall upper surface of magnetic lid groove.
The advantages and positive effects of the present invention are:
1, magnetic guiding loop of the invention, magnetic conductive cover and magnetic conduction pedestal replace the magnetic guiding loop of original structure and identical material, can expire
The demand of sufficient quartz flexible accelerometer working gas gap magnetic induction intensity.
2, the quartz flexible accelerometer designed by the present invention increases the design of sealing structure, upper and lower magnetic conduction ring component
Together by connection ring laser seal welding, the leak rate after sealing is less than 1.1 × 10-10Pa·m3/ s, pendulum component are packed in it
Between, guarantee that accelerometer extraneous gas will not enter；Magnetic conductive cover is close by permanent magnet together with magnetic conduction pedestal laser seal welding
It closes and, gas in itself gap will not be discharged to inside accelerometer by permanent magnet, and effectively inhibit permanent magnet goes out gas velocity
Rate keeps accelerometer internal vacuum to stablize, and keeps the stability of accelerometer resolution ratio at any time.
3, the quartz flexible accelerometer design of Sealing Structure designed by the present invention is simple, and process implementing is convenient, vacuum
Degree is high, the vacuum degree retention time is long, is suitable for the systems such as high-resolution navigation system, gravity gradiometer.
4, the present invention is that a kind of design science, the structurally reasonable vacuum for high-resolution quartz flexible accelerometer are protected
Structure is held, the present invention is by improving magnetic guiding loop modular construction in existing quartz flexible accelerometer structure basis, increasing and swash
Photocoagulation Seal Design solves the problem of that air pressure inside changes with the deflation of material after quartz flexible accelerometer vacuumizes,
The vacuum degree inside accelerometer is kept, the stability of accelerometer resolution ratio at any time is kept.
Detailed description of the invention
Fig. 1 is current quartz flexible accelerometer three-dimensional explosive view；
Fig. 2 is current quartz flexible accelerometer two dimension axis cross-sectional view；
Fig. 3 is the two-dimentional axis cross-sectional view for the Novel quartz flexure accelerometers that the embodiment of the present invention one proposes；
Fig. 4 is the two-dimentional axis cross-sectional view for the Novel quartz flexure accelerometers that the embodiment of the present invention two proposes.
In figure: 10. magnetic conduction ring components；20. putting component；30. connection ring；11. magnetic guiding loop；12. cylindrical permanent magnet；13.
Magnetic conduction cap；14. magnetic conductive cover；15. magnetic conduction pedestal；16. laser seal welding；21. quartz pendulous reed；22. torquer coil；23. line
Ring framework；31. cementing or spot welding；32. laser seal welding.
Specific embodiment
Describe the embodiment of the present invention in detail with reference to the accompanying drawing, in which the same or similar labels are throughly indicated phases
Same or similar element or element with the same or similar functions.It should be noted that the present embodiment be it is narrative, be not
Limited, this does not limit the scope of protection of the present invention.
A kind of vacuum holding structure for high-resolution quartz flexible accelerometer, including upper and lower magnetic conduction ring component 10,
Put component 20 and connection ring 30.Pendulum component is made of quartz pendulous reed 21, torquer coil 22 and coil rack 23.Upper and lower magnetic conduction
Ring component is cylinder-shaped cylinder, and magnetic conduction ring component is installed using coaxial mirror image in pairs, existed by connection ring laser seal welding 32
Together, the leak rate after sealing is less than 1.1 × 10-10Pa·m3/ s, pendulum component are fixedly mounted with therebetween.
The structure of upper and lower magnetic conduction ring component of the invention can be designed to two different forms, separately below to two kinds
Structure type is described:
Embodiment one: as shown in figure 3, upper and lower magnetic conduction ring component is by magnetic guiding loop 11, cylindrical permanent magnet 12, magnetic conduction cap
13, magnetic conductive cover 14 and magnetic conduction pedestal 15 form, on the basis of magnetic conduction pedestal, sequentially coaxially installation cylindrical permanent magnet, magnetic conduction cap,
Magnetic conductive cover, magnetic guiding loop constitute magnetic conduction ring component.Magnetic guiding loop is cyclic structure, and central coaxial produces centre bore.The bottom of magnetic guiding loop
Portion is coaxially mounted on magnetic conductive cover, and the central coaxial of the magnetic conductive cover produces one and raises upward and downward opening groove, magnetic conduction
The centre bore of ring and the groove of magnetic conductive cover are coaxially disposed.Magnetic conduction cap, cylinder is from top to bottom sequentially coaxially arranged in the inside of the groove
Shape permanent magnet and magnetic conduction pedestal, magnetic conduction cap are arranged in the top of cylindrical permanent magnet, and magnetic conduction cap be located at cylindrical permanent magnet and
Between the inner wall upper surface of magnetic conductive cover groove.The magnetic conduction pedestal and magnetic conductive cover laser seal welding 16 form closed chamber together
Body, magnetic conduction cap and cylindrical permanent magnet are fixed in closed area.
Embodiment two: as shown in figure 4, upper and lower magnetic conduction ring component is by magnetic guiding loop 11, cylindrical permanent magnet 12, magnetic conductive cover
14 and magnetic conduction pedestal 15 form, on the basis of magnetic conduction pedestal, sequentially coaxially installation cylindrical permanent magnet, magnetic conductive cover, magnetic guiding loop, structure
At magnetic conduction ring component.Magnetic guiding loop is cyclic structure, and central coaxial produces centre bore.The bottom of magnetic guiding loop is coaxially mounted to magnetic conduction
It covers, the central coaxial of the magnetic conductive cover produces one and raises upward and downward opening groove, the centre bore and magnetic conduction of magnetic guiding loop
The groove of lid is coaxially disposed, and cylindrical permanent magnet and magnetic conduction pedestal is from top to bottom sequentially coaxially arranged in the inside of the groove, this is led
Magnetic pedestal and magnetic conductive cover laser seal welding 16 form closed cavity together, and cylindrical permanent magnet is fixed on closed area
It is interior.Magnetic conduction cap (be equivalent to magnetic conductive cover and magnetic conduction cap is combined into one) is omitted in this structure, has accordingly increased magnetic conductive cover groove
The wall thickness of upper surface (wall thickness is close with former magnetic conduction cap thickness).
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understand and a variety of variations, modification, replacement are carried out to these embodiments without departing from the principles and spirit of the present invention and become
Type, such as permanent magnet of the present invention sealing, those skilled in the art according to the present invention can inspire, to design more
A sealing structure mode, therefore, the scope of the present invention is by appended claims and its equivalent limits.
Claims (3)
1. a kind of vacuum for high-resolution quartz flexible accelerometer keeps structure, including upper and lower magnetic conduction ring component, pendulum portion
Part and connection ring, pendulum component are made of quartz pendulous reed, torquer coil and coil rack, it is characterised in that: upper and lower magnetic conduction ring portion
Part is made of magnetic guiding loop, cylindrical permanent magnet, magnetic conductive cover and magnetic conduction pedestal, and the bottom of magnetic guiding loop is coaxially mounted to magnetic conductive cover
On, the central coaxial of the magnetic conductive cover produces one and raises upward and downward opening groove, the inside of the groove from top to bottom according to
Secondary coaxial arrangement cylindrical permanent magnet and magnetic conduction pedestal, the magnetic conduction pedestal form closing together with magnetic conductive cover laser seal welding
Cavity；Magnetic conduction ring component is installed using coaxial mirror image in pairs, and together by connection ring laser seal welding, pendulum component is fixedly mounted with
Between upper and lower magnetic conduction ring component.
2. a kind of vacuum for high-resolution quartz flexible accelerometer according to claim 1 keeps structure, special
Sign is: the magnetic guiding loop is cyclic structure, and central coaxial produces centre bore.
3. a kind of vacuum for high-resolution quartz flexible accelerometer according to claim 1 keeps structure, special
Sign is: being coaxially disposed magnetic conduction cap in the top of cylindrical permanent magnet, which is located at cylindrical permanent magnet and magnetic conductive cover is recessed
Between the inner wall upper surface of slot.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710905553.5A CN107703329B (en) | 2017-09-29 | 2017-09-29 | Vacuum for high-resolution quartz flexible accelerometer keeps structure |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710905553.5A CN107703329B (en) | 2017-09-29 | 2017-09-29 | Vacuum for high-resolution quartz flexible accelerometer keeps structure |
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| CN107703329A CN107703329A (en) | 2018-02-16 |
| CN107703329B true CN107703329B (en) | 2019-11-26 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109085383A (en) * | 2018-09-19 | 2018-12-25 | 中国船舶重工集团公司第七0七研究所 | A kind of novel pendulum-type accelerometer |
| CN109085384B (en) * | 2018-10-29 | 2020-12-15 | 中国船舶重工集团公司第七0七研究所 | High-stability quartz flexible accelerometer adopting novel pendulum component structure |
| CN109358208A (en) * | 2018-11-14 | 2019-02-19 | 陕西华燕航空仪表有限公司 | A kind of exoskeletal torquer microminiature quartz accelerometer |
| CN109490577A (en) * | 2018-12-21 | 2019-03-19 | 中国船舶重工集团公司第七0七研究所 | A kind of flexible static support accelerometer |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4250757A (en) * | 1979-11-05 | 1981-02-17 | Sundstrand Data Control, Inc. | Movable element with position sensing means for transducers |
| US5111694A (en) * | 1990-08-17 | 1992-05-12 | Sundstrand Corporation | Accelerometer with rebalance coil stress isolation |
| CN102043068A (en) * | 2010-11-05 | 2011-05-04 | 中国船舶重工集团公司第七○七研究所 | High-resolution accelerometer with on-line adjustable scale factors |
| CN102998481A (en) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | Novel electromagnetic accelerometer structure |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| EP2722676A1 (en) * | 2012-10-19 | 2014-04-23 | Honeywell International Inc. | Acceleration sensor with stress reduction components |
| CN106226555A (en) * | 2016-07-13 | 2016-12-14 | 高碑店市开拓精密仪器制造有限责任公司 | high temperature resistant quartz flexible accelerometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117959A (en) * | 1984-07-05 | 1986-01-25 | Japan Aviation Electronics Ind Ltd | Accelerometer |
-
2017
- 2017-09-29 CN CN201710905553.5A patent/CN107703329B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4250757A (en) * | 1979-11-05 | 1981-02-17 | Sundstrand Data Control, Inc. | Movable element with position sensing means for transducers |
| US5111694A (en) * | 1990-08-17 | 1992-05-12 | Sundstrand Corporation | Accelerometer with rebalance coil stress isolation |
| CN102043068A (en) * | 2010-11-05 | 2011-05-04 | 中国船舶重工集团公司第七○七研究所 | High-resolution accelerometer with on-line adjustable scale factors |
| EP2722676A1 (en) * | 2012-10-19 | 2014-04-23 | Honeywell International Inc. | Acceleration sensor with stress reduction components |
| CN102998481A (en) * | 2012-12-11 | 2013-03-27 | 中国船舶重工集团公司第七0七研究所 | Novel electromagnetic accelerometer structure |
| CN203455365U (en) * | 2013-09-09 | 2014-02-26 | 湖北三江航天红峰控制有限公司 | Impact-resistant quartz flexible accelerometer |
| CN106226555A (en) * | 2016-07-13 | 2016-12-14 | 高碑店市开拓精密仪器制造有限责任公司 | high temperature resistant quartz flexible accelerometer |
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