CN107664920A - Electromagnetism track-type facilities - Google Patents
Electromagnetism track-type facilities Download PDFInfo
- Publication number
- CN107664920A CN107664920A CN201610608421.1A CN201610608421A CN107664920A CN 107664920 A CN107664920 A CN 107664920A CN 201610608421 A CN201610608421 A CN 201610608421A CN 107664920 A CN107664920 A CN 107664920A
- Authority
- CN
- China
- Prior art keywords
- electromagnetism
- type facilities
- guide rail
- air gap
- slide block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Linear Motors (AREA)
Abstract
The invention discloses a kind of electromagnetism track-type facilities, including：Rail unit, on pedestal；Slide unit, including electromagnetism guide rail slide block and vector magnetic resistance group of motors, wherein, the electromagnetism guide rail slide block envelope is arranged on the rail unit, and air gap be present between the rail unit；Vector magnetic resistance group of motors insertion is installed in electromagnetism guide rail slide block stroke directions both ends and corresponding with the air gap.The present invention is floated using magnetic, can be significantly improved because magnetic floats air gap compared with air supporting air gap, is no longer influenced by the limitation of face type processing, can infinitely it increase using stroke in theory, because electromagnetism is adjustable, it is possible to achieve certain acceleration compensation function, be suitable for high acceleration application scenario.
Description
Technical field
The present invention relates to lithographic equipment field, more particularly to a kind of electromagnetism track-type facilities.
Background technology
In the application of large-scale guide rail, mechanical guide rail can not be met due to the bearing capacity with stroke size contradiction
Height accelerates, the demand of high speed.And air-float guide rail is widely applied in Precision Machining and field of lithography, but as TFT is (thin
Film transistor) etc. large scale lithography process demand, the air floatation heights of large-scale air-float guide rail are generally more than ten microns, such as Fig. 1 institutes
Show, it is the installation air supporting first 1 on multiple free degree directions of sports platform, and by output high-pressure gas, it is more than ten to produce thickness
The air film 2 of micron, ensure friction free high-precision motion, the air supporting rigidity in all directions is to position, but opposite type processing
It is it is required that high.For big stroke guide rail, due to machining accuracy and the limitation of material, more than ten microns of air-film thickness, it is desirable to low
The material of deflection, such as high rigidity, the ceramics of high face type, but for the air-float guide rail of larger lengths size, can not process,
And marble insufficient rigidity, deformation are big, the guide rail demand of high acceleration can not be met.
The content of the invention
The present invention provides a kind of electromagnetism track-type facilities, it is possible to achieve big stroke motion, and do not limited by face type machining accuracy
System.
In order to solve the above technical problems, the present invention provides a kind of electromagnetism track-type facilities, including：
Rail unit, on pedestal；
Slide unit, including electromagnetism guide rail slide block and vector magnetic resistance group of motors, wherein, the electromagnetism guide rail slide block envelope peace
On the rail unit, and air gap be present between the rail unit；The vector magnetic resistance group of motors insertion is arranged on
Electromagnetism guide rail slide block stroke directions both ends and corresponding with the air gap.
Preferably, the rail unit is made of soft magnetic materials.
Preferably, the section of the rail unit is regular polygon.
Preferably, the vector magnetic resistance group of motors includes the 2 groups of magnetic set along slide unit stroke directions end positions
Group of motors is hindered, every group of reluctance motor group includes at least three circumferentially equally distributed reluctance motor.
Preferably, the reluctance motor includes：Yoke and coil, wherein, the section of the yoke is E fonts, and magnetic
The width of main pole among yoke is 1.5~2 times of the secondary magnetic pole of its both sides, pole of the coil winding in the main pole
On.
Preferably, the yoke is made of silicon steel.
Preferably, the electromagnetism track-type facilities also include displacement transducer, the quantity of institute's displacement sensors with it is described
The quantity of reluctance motor is identical, embedded in the electromagnetism guide rail slide block of the contraposition measuring surface of reluctance motor, and with air gap pair
Should.
Preferably, institute's displacement sensors use capacitance type sensor or eddy current sensor.
Preferably, the electromagnetism guide rail slide block is made of stainless steel or ceramic material.
Compared with prior art, electromagnetism track-type facilities of the invention, including：Rail unit, on pedestal；Sliding block list
Member, including electromagnetism guide rail slide block and vector magnetic resistance group of motors, wherein, the electromagnetism guide rail slide block envelope is arranged on the guide rail list
In member, and air gap be present between the rail unit；The vector magnetic resistance group of motors insertion is arranged on electromagnetism guide rail slide block row
Cheng Fangxiang both ends and corresponding with the air gap.The present invention is floated using magnetic, can be significantly improved because magnetic floats air gap compared with air supporting air gap,
The limitation of face type processing is no longer influenced by, can infinitely be increased using stroke in theory, because electromagnetism is adjustable, it is possible to achieve certain
Acceleration compensation function, it is suitable for high acceleration application scenario.
Brief description of the drawings
Fig. 1 is the structural representation of air-float guide rail in the prior art；
Fig. 2 is the cross-sectional view of electromagnetism track-type facilities in the embodiment of the invention；
Fig. 3 is the structural representation of reluctance motor in the embodiment of the invention；
Fig. 4 is the fundamental diagram of reluctance motor in the embodiment of the invention；
Fig. 5 is the control principle drawing of electromagnetism track-type facilities in the embodiment of the invention；
Fig. 6 is the dimensional structure diagram of electromagnetism track-type facilities in the embodiment of the invention.
In Fig. 1：1- air supportings head, 2- air films；
Fig. 2 is into Fig. 6：100- rail units, 200- electromagnetism guide rail slide block, 300- reluctance motors, 301- yokes, 302- lines
Circle, 400- displacement transducers, 500- air gaps.
Embodiment
In order to facilitate the understanding of the purposes, features and advantages of the present invention, below in conjunction with the accompanying drawings to the present invention
Embodiment be described in detail.It should be noted that accompanying drawing of the present invention uses using simplified form and non-essence
Accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
As shown in Figure 2 and Figure 6, the present invention provides a kind of electromagnetism track-type facilities, including：Rail unit 100, slide unit and
Displacement transducer 400.
Emphasis reference picture 2, the rail unit 100 is not moving part, on stabilizing base such as Dali Shitai County.Preferably
, it is made up of the good soft magnetic materials of magnetic conductivity, and section is regular polygon structure, have it is simple in construction, yield strength is high,
The features such as easily processing.Rail unit 100 in the present embodiment is regular hexagon.
The electromagnetism slide unit includes electromagnetism guide rail slide block 200 and vector magnetic resistance group of motors, wherein, the electromagnetism guide rail
Sliding block 200 can be made up of stainless steel or ceramic material, envelope be arranged on the rail unit 100 on, and with the guide rail list
Air gap 500 be present between member 100, the air gap 500 includes magnetic gap and measuring surface air gap.
The vector magnetic resistance group of motors is two groups, and every group includes at least three reluctance motor 300, and the reluctance motor 300
It is distributed uniformly and circumferentially, insertion is arranged on the stroke directions both ends of electromagnetism guide rail slide block 200；Also, the reluctance motor 300
It is corresponding with the magnetic gap.
Fig. 3 and Fig. 4 are refer to, the reluctance motor 300 includes yoke 301 and coil 302, wherein the yoke 301
Section is " E fonts ", is typically made of the good silicon steel of magnetic property, than two secondary magnetic poles of 301 middle main pole of yoke are wide by 1.5~
2 times, making yoke 301, magnetic circuit is uniform everywhere, prevents saturation section.The coil 302, which is concentrated, is wound on the middle main of yoke 301
On magnetic pole.The reluctance motor 300 of the present invention has high pushing force density and thrust power dissipation ratio, is suitably applied in large-scale electromagnetism and leads
The high capacities such as rail, the workplace of HI high impact, do not limited by the processing of face type, can infinitely be increased using stroke in theory.
As shown in figure 4, when coil 302 passes to control electric current, main pole-air gap as shown by the arrows in Figure 4 can be produced
The magnetic loop of 500- rail units 100, and then the huge magnetic attraction for shortening air gap 500 is produced, make the one direction of reluctance motor 300
Motion.It should be noted that the stroke air gap scope of the reluctance motor 300 is 0.1mm~1mm, led with the electromagnetism of the present invention
The working gas gap thickness of rail device is identical.
The quantity of institute's displacement sensors 400 is identical with the quantity of the reluctance motor 300, and insertion is arranged on reluctance motor
In the electromagnetism guide rail slide block 200 of 300 contraposition measuring surface, and it is corresponding with measuring surface air gap.Preferably, institute's displacement sensors
400 be the sensor of capacitance type sensor or electric vortex type, has high-resolution, non-contacting feature.
Fig. 2 to Fig. 6 is refer to, below by taking every group of 3 reluctance motors 300 as an example, describes the present invention in detail.
As shown in Fig. 23 reluctance motors 300 are in 120 ° of distributions, its magnetic field each formed with rail unit 100
Air gap also mutually in 120 ° of distributions, in the presence of control electric current, can drive electromagnetism guide rail slide block 200 to provide and push away greatly along X, Z-direction
Power drives.And reluctance motor 300 structures shape itself its there is the holding torque in Ry directions, i.e. rigidity, ensure magnetic field everywhere
Air gap remains at guide clearance i.e. 0.1~1mm.In order to measure the levitation position of electromagnetism guide rail slide block 200, institute's rheme in real time
Displacement sensor 400 equally with three be one group, be separately mounted in the contraposition measuring surface of reluctance motor 300, measuring surface air gap with
Magnetic gap is parallel.As shown in fig. 6, in the stroke directions end positions of conductive magnetism guide rail slide block 200, respectively there is one group of vector magnetic resistance electricity
Unit and displacement transducer group (being made up of 3 displacement transducers 400 corresponding with the vector magnetic resistance group of motors), the vector magnetic resistance
Group of motors and displacement transducer group coordinate control, there is provided the confining force in Rx, Rz direction of electromagnetism guide rail slide block 200.Therefore, this hair
Bright middle electromagnetism guide rail slide block 200 has the high thrust motion control function of 5 frees degree, can be with the presence of control electric current
Preferably real-time guide rail rigidity is embodied, also more common air-float guide rail improves an order of magnitude to air gap 500.
Further, it is one group for reluctance motor 300 3,120 ° of arrangements each other, carries out the mode of vector controlled, energy
Enough minimize the quantity of reluctance motor 300 and the quantity of displacement transducer 400, reduce control passage number, at utmost improve
Cost performance.
By taking three reluctance motors 300 in Fig. 2 as an example, to show that it is referred to as first, second, third magnetic resistance electricity by difference
Machine M1, M2, M3, the first reluctance motor M1 place of air gap 500 are used as master control air gap, and second, third reluctance motor M2, M3's goes out
Power is made a concerted effort as the first reluctance motor M1 counteragent actuator, and its making a concerted effort in z-direction is：
FZ=F1Z-F2Z-F3Z
Wherein,
Wherein, i1、i2、i3、Xg1、Xg2、Xg3Respectively each reluctance motor 300 (i.e. first, second, third reluctance motor M1,
M2, M3) electric current and size of gaps, k be constant.
Feedback linearization modeling is carried out to the equation of motion of the vector magnetic resistance group of motors of vector distribution, can be obtained such as Fig. 5 institutes
The single air gap control system block diagram shown.
In Fig. 5, i1、i2、i3Respectively each reluctance motor (i.e. first, second, third reluctance motor M1, M2, M3) 300
Electric current, x0, x be respectively the setting value and actual value size for needing controlled air gap, k is constant.
To sum up, the present invention has bigger air gap thickness using magnetic buoying device, has more preferable adaptability to processing and installation precision
The characteristics of.Therefore, electromagnetism track-type facilities can not only provide a stable large scale magnetic and float working gas gap, adapt to bigger stroke
Without friction extensible guide demand, additionally it is possible to monitoring rail unit 100 and motion module is all directions air gap of reluctance motor 300 in real time
500, realize the high-precision control in sports platform Rx, Ry directions.Stable basic buoyancy can be provided under conditions of source of the gas is not needed
Air gap 500；For different counterweights, buoyancy can be changed in wider scope by adjusting inside magnetic path structure, reach adjustment
The purpose of air gap 500；It can be significantly improved because magnetic floats air gap compared with air supporting air gap, be no longer influenced by the limitation of face type processing, it is theoretical
On can infinitely increase using stroke, because electromagnetism is adjustable, it is possible to achieve certain acceleration compensation function, be suitable for high acceleration
Spend application scenario.
Obviously, those skilled in the art can carry out the spirit of various changes and modification without departing from the present invention to invention
And scope.So, if these modifications and variations of the present invention belong to the claims in the present invention and its equivalent technologies scope it
Interior, then the present invention is also intended to including these changes and modification.
Claims (9)
- A kind of 1. electromagnetism track-type facilities, it is characterised in that including：Rail unit, on pedestal；Slide unit, including electromagnetism guide rail slide block and vector magnetic resistance group of motors, wherein, the electromagnetism guide rail slide block envelope is arranged on On the rail unit, and air gap be present between the rail unit；The vector magnetic resistance group of motors insertion is arranged on electromagnetism Guide rail slide block stroke directions both ends and corresponding with the air gap.
- 2. electromagnetism track-type facilities as claimed in claim 1, it is characterised in that the rail unit is made of soft magnetic materials.
- 3. electromagnetism track-type facilities as claimed in claim 1, it is characterised in that the section of the rail unit is regular polygon.
- 4. electromagnetism track-type facilities as claimed in claim 1, it is characterised in that the vector magnetic resistance group of motors is included along sliding block list 2 groups of reluctance motor groups that first stroke directions end positions are set, every group of reluctance motor group are circumferentially uniformly distributed including at least three Reluctance motor.
- 5. electromagnetism track-type facilities as claimed in claim 4, it is characterised in that the reluctance motor includes：Yoke and coil, its In, the section of the yoke is E fonts, and the width of the main pole among yoke is 1.5~2 times of the secondary magnetic pole of its both sides, The coil winding is on the pole of the main pole.
- 6. electromagnetism track-type facilities as claimed in claim 5, it is characterised in that the yoke is made of silicon steel.
- 7. electromagnetism track-type facilities as claimed in claim 4, it is characterised in that the electromagnetism track-type facilities also include displacement sensing Device, the quantity of institute's displacement sensors is identical with the quantity of the reluctance motor, and the embedded contraposition installed in reluctance motor measures In the electromagnetism guide rail slide block in face, and it is corresponding with air gap.
- 8. electromagnetism track-type facilities as claimed in claim 7, it is characterised in that institute's displacement sensors use capacitance type sensor Or eddy current sensor.
- 9. electromagnetism track-type facilities as claimed in claim 1, it is characterised in that the electromagnetism guide rail slide block using stainless steel or Ceramic material is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610608421.1A CN107664920B (en) | 2016-07-29 | 2016-07-29 | Electromagnetism track-type facilities |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610608421.1A CN107664920B (en) | 2016-07-29 | 2016-07-29 | Electromagnetism track-type facilities |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107664920A true CN107664920A (en) | 2018-02-06 |
| CN107664920B CN107664920B (en) | 2019-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610608421.1A Active CN107664920B (en) | 2016-07-29 | 2016-07-29 | Electromagnetism track-type facilities |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11154698A (en) * | 1997-11-21 | 1999-06-08 | Nikon Corp | Table supporting apparatus |
| US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
| US20050211920A1 (en) * | 2004-03-25 | 2005-09-29 | Canon Kabushiki Kaisha | Positioning device and method of initializing a positioning device |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| JP4687911B2 (en) * | 1994-06-27 | 2011-05-25 | 株式会社ニコン | Positioning device and positioning method |
-
2016
- 2016-07-29 CN CN201610608421.1A patent/CN107664920B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4687911B2 (en) * | 1994-06-27 | 2011-05-25 | 株式会社ニコン | Positioning device and positioning method |
| JPH11154698A (en) * | 1997-11-21 | 1999-06-08 | Nikon Corp | Table supporting apparatus |
| US6134981A (en) * | 1999-12-03 | 2000-10-24 | Nikon Research Corporation Of America | Precision scanning apparatus and method with fixed and movable guide members |
| US20050211920A1 (en) * | 2004-03-25 | 2005-09-29 | Canon Kabushiki Kaisha | Positioning device and method of initializing a positioning device |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
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|---|---|
| CN107664920B (en) | 2019-04-12 |
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