CN107655859A - Cycle material imaging method and its device - Google Patents

Cycle material imaging method and its device Download PDF

Info

Publication number
CN107655859A
CN107655859A CN201710797868.2A CN201710797868A CN107655859A CN 107655859 A CN107655859 A CN 107655859A CN 201710797868 A CN201710797868 A CN 201710797868A CN 107655859 A CN107655859 A CN 107655859A
Authority
CN
China
Prior art keywords
detector
light
imaging
periodic material
spectroscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710797868.2A
Other languages
Chinese (zh)
Inventor
王宏兴
朱天飞
问峰
王玮
卜忍安
张景文
侯洵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xian Jiaotong University
Original Assignee
Xian Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Jiaotong University filed Critical Xian Jiaotong University
Priority to CN201710797868.2A priority Critical patent/CN107655859A/en
Publication of CN107655859A publication Critical patent/CN107655859A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4788Diffraction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The present invention discloses a kind of cycle material imaging device and method, and light source part includes meeting light source, convex lens, beam expander and aperture;Probe portion includes the first spectroscope, the second spectroscope and cycle material fixed station;Imaging moiety includes the first detector, the second detector and the 3rd detector;Meet and convex lens, beam expander, aperture, the first spectroscope and the second spectroscope have been sequentially arranged on the emitting light path of light source;Cycle material fixed station and the first detector are sequentially provided with first spectroscopical first emergent light light path;Cycle material is installed on cycle material fixed station;First spectroscopical second emergent light incides the second spectroscope, is divided into second spectroscopical first emergent light and second spectroscopical second emergent light by the second spectroscope;Second spectroscopical first emergent light light path is provided with the second detector, and second spectroscopical second emergent light light path is provided with the 3rd detector.The present invention effectively raises imaging resolution and contrast.

Description

Periodic material imaging method and apparatus
Technical Field
The invention belongs to the technical field of nonlinear optical self-imaging, and particularly relates to an imaging method and device.
Background
The diffractive self-imaging effect, also called Talbot (Talbot) effect, refers to the Nxz effect after a grating when a monochromatic plane light irradiates the grating with a period of a T The image of the grating appears at the distance (N is an integer), and the diffraction phenomenon is a light wave diffraction phenomenon with important practical application value. Diffraction of such periodic objects has been observed since the study and application of self-imaging effects has been uninterrupted. The Talbot effect has been widely used in the fields of optical information storage, optical precision measurement, atomic optics, bose-Einstein condensation and the like. Conventional self-imaging is a first-order optical imaging process that requires a high spatial coherence beam to pass through a device with periodic structures and be imaged directly onto a screen. Recently, the Talbot effect has been predicted theoretically and verified experimentally using the two-photon coincidence method. In addition, second-order self-imaging by using pseudo-thermal light is also successfully realized. This method requires that the periodic structure device be fixed at a certain position, which limits the improvement of the imaging quality. The image obtained by the method has low resolution, the contrast is generally lower than 50%, and the visibility is lower than 1/3.
Disclosure of Invention
The invention aims to provide a periodic material imaging method and a device thereof, which solve the problems of low imaging resolution, low contrast and the like of the conventional self-imaging method.
In order to achieve the purpose, the invention adopts the following technical scheme:
a periodic material imaging device including a light source section, a detection section, and an imaging section;
the light source part comprises a coincidence light source, a convex lens, a beam expander and a small hole;
the detection part comprises a first spectroscope, a second spectroscope and a periodic material fixing table;
the imaging part comprises a first detector, a second detector and a third detector;
a convex lens, a beam expander, a small hole, a first spectroscope and a second spectroscope are sequentially arranged on an emergent light path conforming to a light source; a periodic material fixing table and a first detector are sequentially arranged on a first emergent light path of the first spectroscope; the periodic material fixing table is provided with a periodic material; the second emergent light of the first spectroscope enters the second spectroscope, and is divided into first emergent light of the second spectroscope and second emergent light of the second spectroscope by the second spectroscope; and a second detector is arranged on a first emergent light path of the second beam splitter, and a third detector is arranged on a second emergent light path of the second beam splitter.
Furthermore, the light intensity of the three beams of light is the same as that of the first emergent light of the first beam splitter, the first emergent light of the second beam splitter and the second emergent light of the second beam splitter.
Further, a first detector D 1 A second detector D 2 And a third detector D 3 A third order correlation circuit connected for performing third order coincidence correlation imaging; the output end of the third-order correlation circuit is connected with the screen; the screen is used for displaying three-order images obtained by coincidence correlation imaging.
Further, the coincidence light source is any one of neutron, x-ray, visible light, ultraviolet light, infrared light or other incoherent light sources.
Further, the periodic material is a biological cell, a phononic crystal or a photonic crystal with a periodic structure.
Furthermore, N-1 spectroscopes including a first spectroscope and a second spectroscope are arranged on an emergent light path conforming to the light source; the N-1 spectroscopes are used for collecting N beams of light with the same emergent light intensity of the light source, and the emergent directions of the N beams of light are respectively provided with a detector.
A method of periodic material imaging comprising the steps of:
the method comprises the following steps: setting initial positions of a detector and a periodic material to be detected;
setting initial positions of the periodic material and the light source, and initial positions of the periodic material and the first detector, the second detector and the third detector according to the spatial period scale of the periodic material to be measured; marking the longitudinal distance between the periodic material to be measured and the light source as z 0 The longitudinal distances between the periodic material to be detected and the first detector, the second detector and the third detector are respectively z 1 、z 2 、z 3 Their corresponding transverse coordinates are each u 1 、u 2 、u 3 (ii) a If the period of the periodic material is a, the corresponding Taber length is z T =2a 2 Lambda,/lambda; λ is the wavelength of the light beam emitted by the light source;
step two: a detection process;
fixing the abscissa of the first detector at the end of the periodic material to be measured, and recording as u 1 Meanwhile, the second detector and the third detector scan and detect at the same speed along the abscissa in the same direction, and the abscissas of the second detector and the third detector meet the constraint relation u 2 =u 3 (ii) a Then the first detector is moved for a certain distance along the longitudinal direction and then fixed, and the second detector and the third detector are scanned and detected at the same speed along the same direction; repeating the above process until imaging of a Talbot cycle is completed;
or fixing the abscissa of the first detector at the end of the periodic material to be detected, and marking as u 1 Meanwhile, the second detector and the third detector scan and detect along the abscissa at equal speed in the reverse direction, and the abscissas of the second detector and the third detector meet the constraint relation u 2 =-u 3 (ii) a Then the first detector is moved for a certain distance along the longitudinal direction and then fixed, and the second detector and the third detector are scanned and detected along the reverse direction at the same speed; repeating the above process until imaging of a Talbot cycle is completed;
step three: third order coincidence-correlation imaging
And performing third-order coincidence correlation imaging on signals recorded by the first detector, the second detector and the third detector.
Further, said one segment is in particular z T 10 to z T /100。
Further, signals recorded by the first detector, the second detector and the third detector are subjected to third-order coincidence correlation imaging according to the following correlation functions:
wherein, the first and the second end of the pipe are connected with each other,is a function of the light source fluctuations,<I>=<I(u j )&gt and (j =1,2, 3) are the intensity distributions of the respective measuring beams of the three detectors.
A method of periodic material imaging, comprising:
n-order correlation function imaging is carried out on the N light beams detected by the N detectors:
wherein the content of the first and second substances,is a detector u i Finally obtaining the maximum visibility of the N-order intensity association
Compared with the prior art, the invention has the following beneficial effects:
the invention divides incoherent light into three parts by using two beam splitters, one beam is coupled with the other two beams after passing through a two-dimensional crystal, and three-order coupling is carried out on a screen to form an image, the formed image has 2 times of imaging resolution compared with a one-order method, the resolution of probe light with the wavelength of lambda is improved to lambda/2, the imaging contrast is improved from 33 percent to 71 percent by improving the coherence order, and the imaging magnification/reduction times can be flexibly adjusted by changing the longitudinal distance of a detector.
Drawings
FIG. 1 is a schematic diagram of a periodic material imaging apparatus of the present invention;
FIG. 2 is a schematic of a periodic material imaging process of the present invention; wherein the detection methods of fig. 2 (a) and 2 (b) are different.
Fig. 3 and 4 show images (simulation results) obtained by a self-imaging method according to the present invention on a screen by using different detection methods according to embodiments 1 and 2.
Detailed Description
Referring to fig. 1, a periodic material imaging device of the present invention includes: the device comprises a coincidence light source Laser, a reflector M1, a reflector M2, a convex Lens, a beam expander GG, a small hole Pinhole, a first spectroscope BS1, a second spectroscope BS2 and a first detector D 1 A second detector D 2 Third detector D 3 Screen c.c. and periodic material Stage.
The reflector M1 is arranged on an emergent light path of the light source Laser, the reflector M2 is arranged on a light emitting path of the reflector M1, and a convex Lens, a beam expander GG, a small hole Pinhole, a first spectroscope BS1 and a second spectroscope BS2 are sequentially arranged on a light emitting path of the reflector M2. A periodic material fixing table Stage and a first detector D are sequentially arranged on a first emergent light path of the first spectroscope BS1 1 (ii) a The periodic material fixing Stage is provided with a periodic material, and the periodic material is a biological cell (a =5-150 μm), a phononic crystal (a =2 cm) or a photonic crystal (a =0.5 μm) with a periodic structure. The second outgoing light from the first beam splitter BS1 enters the second beam splitter BS2, and is split by the second beam splitter BS2 into the first outgoing light from the second beam splitter BS2 and the second outgoing light from the second beam splitter BS2. The first emergent light of the first beam splitter BS1, the first emergent light of the second beam splitter BS2 and the second emergent light of the second beam splitter BS2 have the same light intensity. First outgoing light beam of the second beam splitter BS2A second detector D is arranged on the road 2 A third detector D is arranged on a second emergent light path of the second spectroscope BS2 3 (ii) a First detector D 1 A second detector D 2 And a third detector D 3 And the output end of the third-order correlation circuit is connected with a screen C.C. for displaying the image obtained after the third-order coincidence correlation imaging.
Incoherent light emitted by a light source Laser is split into three beams of light with the same light intensity by two beam splitters (a first beam splitter BS1 and a second beam splitter BS 2); one beam is coupled with the other two beams after passing through the two-dimensional crystal, and three-order coupling is carried out on a screen C.C. to form an image, the imaging resolution of the formed image is improved by 2 times compared with that of a first-order method, the resolution of probe light with the wavelength of lambda is improved to lambda/2, the imaging contrast is improved to 71 percent from 33 percent by improving the coherence order, and the imaging magnification/reduction times can be flexibly adjusted by changing the longitudinal distance of the detector.
The coincidence light source Laser is any one of incoherent light such as visible light, infrared light, ultraviolet light and the like.
The invention discloses a periodic material imaging method, which comprises the following steps:
the method comprises the following steps: and setting initial positions of the detector and the periodic material to be detected.
Setting the periodic material and the light source, the periodic material and the first detector D according to the space period scale of the periodic material to be measured 1 A second detector D 2 A third detector D 3 The initial position of (a). Marking the longitudinal distance between the periodic material to be measured and the light source as z 0 Marking the periodic material to be tested and the first detector D 1 A second detector D 2 Third detector D 3 Respectively is z 1 ,z 2 ,z 3 Their corresponding transverse coordinates are each u 1 ,u 2 ,u 3 (ii) a If the period of the periodic material is a, the corresponding Talbot length is z T =2a 2 Lambda,/lambda; the longitudinal scan range is determined to optimize the magnification of the image. λ is the wavelength of the light beam emitted by the light source.
Step two: and (3) detection process:
the detection mode is selected according to different imaging requirements (mainly the transverse resolution and contrast of the image). For the detection mode shown in FIG. 2 (a), the first detector D is used 1 The abscissa of (2) is fixed at one end (tail end) of the object to be measured and is marked as u 1 While the second detector D 2 And a third detector D 3 Scanning and detecting along the abscissa in the same direction at constant speed, and the abscissas of the isokinetic scanning and detecting satisfy a constraint relation u 2 =u 3 (ii) a The detector D is then moved in the longitudinal direction 1 A distance (from z, depending on the imaging accuracy requirements) T 10 to z T Chosen between/100) post-fixation, second detector D 2 And a third detector D 3 Scanning and detecting along the same direction and constant speed. Repeating the above process until imaging of a Talbot cycle is completed; for the detection mode shown in FIG. 2 (b), except for the second detector D 2 And a third detector D 3 Scanning along the abscissa in the reverse direction at constant speed (when their abscissas satisfy the constraint relation u) 2 =-u 3 ) Otherwise, the operation is the same as in the scheme of FIG. 2 (a).
Step three: three-order coincidence-linked imaging
Respectively couple the first detectors D 1 A second detector D 2 Third detector D 3 And injecting the recorded signals into a third-order correlation circuit to perform third-order coincidence correlation imaging.
And performing coincidence treatment on signals of the light beam irradiated on the periodic material and signals of the two light beams not passing through the periodic material according to the following correlation functions:
wherein, the first and the second end of the pipe are connected with each other,is a function of the light source fluctuations,<I>=<I(u j )&and g, (j =1,2, 3) is the intensity distribution of the light beam measured by each of the three detectors, u is the detection plane position of the corresponding detector, and x is the corresponding source plane position. In the formula, the first term is background; first, theThe fourth term of the third term is the product of second-order intensity fluctuation correlation of each detector and the other two detectors respectively and is an imaging term; the remaining term is the superposition of the signals on the three detectors, which improves the phase resolution.
According to different requirements on imaging quality, an imaging system consisting of three detectors can be expanded to an imaging system consisting of N (N > 3) detectors, and N-order correlation function imaging is carried out on N light beams detected by the N detectors:
wherein, the first and the second end of the pipe are connected with each other,is the intensity of the ith detector, and finally the maximum visibility of the intensity correlation of the N orders can be obtained
In FIG. 2, u is shown in FIG. 2 (a) 2 =u 3 =-u 1 A schematic diagram of scanning mode under the condition; FIG. 2 (b) shows u 2 =u 3 =u 1 A schematic diagram of scanning mode under the condition;
fig. 3 and 4 show the results of the simulation by the method, and it can be seen that the lateral and longitudinal resolution of the obtained image is high, wherein the lateral resolution is higher, and at the same time, the imaging magnification can be changed.
The invention provides a periodic material imaging method and a device thereof, which mainly comprise device design and parameter adjustment, all the following examples are implemented on the premise of the technical scheme of the invention, but the protection scope of the invention is not limited by the following examples.
Example 1:
the first step is as follows: turning on a 628nm pseudo-thermal light source (light source Laser);
the second step: setting upD 2 ,D 3 Position z of 2 =40cm,z 3 =40cm, setting the position z of the imaging grating 0 =2.5cm;
The third step: selection of D 1 ,D 2 Scanning is performed, wherein D 1 Scanning along the longitudinal direction, wherein the scanning range is 1-13cm 2 Scanning is carried out along the transverse direction, and the scanning range is-0.6-0.6 mm.
By scanning in the above-described manner, the results shown in fig. 3 can be obtained.
Example 2:
the first step is as follows: turning on a 325nm pseudo-thermal light source (light source Laser);
the second step: set up D 2 ,D 3 Position z of 2 =50cm,z 3 =50cm, setting the position z of the imaging grating 0 =4cm;
The third step: selecting D 1 Performing a scan wherein D 1 Scanning along the transverse direction and the longitudinal direction simultaneously, wherein the transverse scanning range is 1-20cm, and the longitudinal scanning range is-0.65-0.65 mm.
By scanning in the above-described manner, the results shown in fig. 4 can be obtained on the c.c.
The above description is only an exemplary embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the disclosure of the present invention are included in the protection scope of the claims.

Claims (10)

1. The periodic material imaging device is characterized by comprising a light source part, a detection part and an imaging part;
the light source part comprises a coincidence light source, a convex lens, a beam expander and a small hole;
the detection part comprises a first spectroscope, a second spectroscope and a periodic material fixing table;
the imaging part comprises a first detector, a second detector and a third detector;
a convex lens, a beam expander, a small hole, a first spectroscope and a second spectroscope are sequentially arranged on an emergent light path conforming to a light source; a periodic material fixing table and a first detector are sequentially arranged on a first emergent light path of the first spectroscope; the periodic material fixing table is provided with a periodic material; the second emergent light of the first spectroscope enters the second spectroscope, and is divided into first emergent light of the second spectroscope and second emergent light of the second spectroscope by the second spectroscope; and a second detector is arranged on a first emergent light path of the second spectroscope, and a third detector is arranged on a second emergent light path of the second spectroscope.
2. The periodic material imaging device according to claim 1, wherein the first outgoing light of the first beam splitter, the first outgoing light of the second beam splitter, and the second outgoing light of the second beam splitter have the same intensity.
3. Periodic material imaging device according to claim 1, characterized in that the first detector D 1 A second detector D 2 And a third detector D 3 A third order correlation circuit connected for performing third order coincidence correlation imaging; the output end of the third-order correlation circuit is connected with a screen; the screen is used for displaying three-order images obtained by coincidence correlation imaging.
4. The periodic material imaging device of claim 1, wherein the coincidence light source is any one of a neutron, x-ray, visible light, ultraviolet light, infrared light, or other incoherent light source.
5. The periodic material imaging device of claim 1, wherein the periodic material is a biological cell, a phononic crystal, or a photonic crystal having a periodic structure.
6. The periodic material imaging device according to claim 1, wherein N-1 beam splitters including a first beam splitter and a second beam splitter are provided on an outgoing light path conforming to a light source; the N-1 spectroscopes are used for collecting N beams of light with the same emergent light intensity of the light source, and the emergent directions of the N beams of light are respectively provided with a detector.
7. Periodic material imaging method, characterized in that the periodic material imaging apparatus according to any one of claims 1 to 5 comprises the steps of:
the method comprises the following steps: setting initial positions of a detector and a periodic material to be detected;
setting initial positions of the periodic material and the light source, and the periodic material and initial positions of the first detector, the second detector and the third detector according to the spatial periodic scale of the periodic material to be measured; marking the longitudinal distance between the periodic material to be measured and the light source as z 0 The longitudinal distances between the marked periodic material to be detected and the first detector, the second detector and the third detector are respectively z 1 、z 2 、z 3 Their corresponding transverse coordinates are each u 1 、u 2 、u 3 (ii) a If the period of the periodic material is a, the corresponding Talbot length is z T =2a 2 Lambda,/lambda; λ is the wavelength of the light beam emitted by the light source;
step two: a detection process;
fixing the abscissa of the first detector at the end of the periodic material to be measured, and recording as u 1 Meanwhile, the second detector and the third detector scan and detect at the same speed along the abscissa in the same direction, and the abscissas of the second detector and the third detector meet the constraint relation u 2 =u 3 (ii) a Then the first detector is moved for a certain distance along the longitudinal direction and then fixed, and the second detector and the third detector are scanned and detected at the same speed along the same direction; repeating the above process until imaging of a Talbot cycle is completed;
or fixing the abscissa of the first detector at the end of the periodic material to be measured, and recording as u 1 Meanwhile, the second detector and the third detector scan and detect along the abscissa at equal speed in the reverse direction, and the abscissas of the second detector and the third detector meet the constraint relation u 2 =-u 3 (ii) a Then the first detector is moved for a certain distance along the longitudinal direction and then fixed, and the second detector and the third detector are scanned and detected along the reverse direction at the same speed; repeating the above process until imaging of a Talbot cycle is completed;
step three: third order coincidence-correlation imaging
And performing third-order coincidence correlation imaging on signals recorded by the first detector, the second detector and the third detector.
8. Method for periodic material imaging according to claim 7, characterized in that the section is in particular z T 10 to z T /100。
9. The periodic material imaging method of claim 7, wherein signals recorded by the first detector, the second detector and the third detector are subjected to third-order coincidence correlation imaging according to the following correlation function:
wherein the content of the first and second substances,is a function of the fluctuation of the light source,<I>=<I(u j )&gt (j =1,2, 3) is the intensity distribution of the light beam measured by each of the three detectors.
10. Periodic material imaging method, characterized in that the periodic material imaging apparatus according to claim 6 comprises: n-order correlation function imaging is carried out on the N light beams detected by the N detectors:
wherein the content of the first and second substances,is a detector u i Finally obtaining the maximum visibility of the N-order intensity association
CN201710797868.2A 2017-09-06 2017-09-06 Cycle material imaging method and its device Pending CN107655859A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710797868.2A CN107655859A (en) 2017-09-06 2017-09-06 Cycle material imaging method and its device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710797868.2A CN107655859A (en) 2017-09-06 2017-09-06 Cycle material imaging method and its device

Publications (1)

Publication Number Publication Date
CN107655859A true CN107655859A (en) 2018-02-02

Family

ID=61129197

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710797868.2A Pending CN107655859A (en) 2017-09-06 2017-09-06 Cycle material imaging method and its device

Country Status (1)

Country Link
CN (1) CN107655859A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109724534A (en) * 2019-02-01 2019-05-07 吉林大学 A kind of Research on threshold selection and device for iteration relevance imaging

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1603791A (en) * 2003-09-19 2005-04-06 中国科学院上海光学精密机械研究所 Nondestructive testing method and device for grating surface quality
CN1858575A (en) * 2006-04-21 2006-11-08 中国科学院上海光学精密机械研究所 Detection method and device for high-density grating polarization-dependent self-imaging
WO2017040826A1 (en) * 2015-09-01 2017-03-09 Massachusetts Institute Of Technology Apparatus, systems, and methods for talbot spectrometers
JP2017083411A (en) * 2015-10-30 2017-05-18 キヤノン株式会社 X-ray Talbot interferometer and Talbot interferometer system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1603791A (en) * 2003-09-19 2005-04-06 中国科学院上海光学精密机械研究所 Nondestructive testing method and device for grating surface quality
CN1858575A (en) * 2006-04-21 2006-11-08 中国科学院上海光学精密机械研究所 Detection method and device for high-density grating polarization-dependent self-imaging
WO2017040826A1 (en) * 2015-09-01 2017-03-09 Massachusetts Institute Of Technology Apparatus, systems, and methods for talbot spectrometers
JP2017083411A (en) * 2015-10-30 2017-05-18 キヤノン株式会社 X-ray Talbot interferometer and Talbot interferometer system

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
FENG WEN等: "Third-Order Self-Imaging with Thermal Light", 《JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN》 *
FENG WEN等: "Two-dimensional Talbot self imaging via Electromagnetically induced lattice", 《SCIENTIFIC REPORTS》 *
FENG WEN等: "visibility anf resolution enhancement of fourth-order ghost interference with thermal light", 《CHIN.PHYS.LETT.》 *
XIAOLI WANG等: "Controllable visibility and resolution of Nth order Talbot imaging with pseudo-thermal light", 《OPTICS EXPRESS》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109724534A (en) * 2019-02-01 2019-05-07 吉林大学 A kind of Research on threshold selection and device for iteration relevance imaging
CN109724534B (en) * 2019-02-01 2020-05-05 吉林大学 Threshold selection method and device for iterative correlation imaging

Similar Documents

Publication Publication Date Title
Bérujon et al. Two-dimensional x-ray beam phase sensing
US9134259B2 (en) X-ray source grating stepping imaging system and image method
Putkunz et al. Phase-diverse coherent diffractive imaging: High sensitivity with low dose
CN105784334A (en) Fiber laser beam quality measurement method base on photoelectric detector and CCD camera
Sawhney et al. At-wavelength metrology of x-ray optics at diamond light source
DE112015006624T5 (en) Far infrared spectroscopy device
CN101629913A (en) High throughput across-wafer-variation mapping
Kegelmeyer et al. Automated optics inspection analysis for NIF
CN103292728B (en) A kind of High-precision long-range surface shape detection system and detection method
CN106154761A (en) A kind of veiling glare measurement apparatus and measuring method
Dai et al. Define and measure the dimensional accuracy of two-photon laser lithography based on its instrument transfer function
Song et al. Second-order Talbot self-imaging with pseudothermal light
CN107655859A (en) Cycle material imaging method and its device
Yuan et al. Development of in situ, at-wavelength metrology for soft X-ray nano-focusing
Patiño et al. A Gaussian filtering method to reduce directionality on high-density point clouds digitized by a conoscopic holography sensor
CN106023107A (en) Detector image correction method for X-ray grating phase contrast imaging device
Kim et al. High resolution and uniform image reconstruction in a large field-of-view for EUV actinic mask review
Centers et al. New operational mode of the pencil beam interferometry based LTP
Senba et al. Development of a long trace profiler at SPring-8 using a newly developed slope sensor
Sun et al. Measurement of grain size of polycrystalline materials with confocal energy dispersive micro-X-ray diffraction technology based on polycapillary X-ray optics
Sohn et al. Köhler illumination for high-resolution optical metrology
Bouillet et al. Optical diffraction interpretation: an alternative to interferometers
Wang et al. At-wavelength metrology of X-ray optics at Diamond Light Source
Sudmuang et al. Beam size measurement at Siam Photon Source storage ring
Idir et al. Special Issue “EUV and X-ray Wavefront Sensing”

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20180202

RJ01 Rejection of invention patent application after publication