CN107654683A - Vacuum tank closure - Google Patents
Vacuum tank closure Download PDFInfo
- Publication number
- CN107654683A CN107654683A CN201710965398.6A CN201710965398A CN107654683A CN 107654683 A CN107654683 A CN 107654683A CN 201710965398 A CN201710965398 A CN 201710965398A CN 107654683 A CN107654683 A CN 107654683A
- Authority
- CN
- China
- Prior art keywords
- vacuum tank
- hermatic door
- guide rail
- roller
- kink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 8
- 238000005452 bending Methods 0.000 claims abstract description 7
- 238000010276 construction Methods 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
- F16K3/3165—Guiding of the slide with rollers or balls
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
Abstract
This application discloses a kind of vacuum tank closure, the vacuum tank notch periphery is provided with elastic seal ring, the cylinder that the closure includes hermatic door, the driving hermatic door moves up and down, respectively symmetrically installation settings has upper roller and bottom roller at the hermatic door both ends, the upper roller moves up and down and is installed on symmetrically arranged two upright guide rail respectively with bottom roller, two upright guide rails distinguish installation settings with bottom there is bending to be inclined to the upper kink of the vacuum tank and lower kink respectively in the middle part of the vacuum tank notch both sides, the upright guide rail.The advantage of the invention is that by the way that the bending of guide rail is realized into being only bonded for hermatic door and vacuum notch, good sealing effect, sealed using the movement of pneumatic door, only need a cylinder to can be achieved, it is simple in construction, while sealing effectiveness is preferable.
Description
Technical field
The application is related to a kind of vacuum tank closure.
Background technology
Sealing mechanism in the prior art for vacuum tank is complicated, and operating difficulties, sealing effectiveness is poor, is unsatisfactory for actual need
Ask.
The content of the invention
It is an object of the invention to provide a kind of vacuum tank closure, with overcome the deficiencies in the prior art.
To achieve the above object, the present invention provides following technical scheme.
The embodiment of the present application discloses a kind of vacuum tank closure, and the vacuum tank notch periphery is provided with elastic packing
Circle, the cylinder that the closure includes hermatic door, the driving hermatic door moves up and down, the hermatic door both ends are respectively symmetrically pacified
Installing is equipped with upper roller and bottom roller, and the upper roller moves up and down respectively with bottom roller to be installed on symmetrically arranged two and lead vertically
Rail, two upright guide rails distinguish installation settings to be had respectively in the middle part of the vacuum tank notch both sides, the upright guide rail with bottom
The upper kink of the vacuum tank and lower kink are inclined in bending,
When the hermatic door is moved to first position, the upper roller is moved to the upper kink, and the bottom roller moves
Move to the lower kink, the hermatic door door body and be held in the elastic seal ring；
When the hermatic door is moved to the second place, the hermatic door is away from the vacuum tank notch.
Preferably, in above-mentioned vacuum tank closure, the upright guide rail bottom sets positive stop.
Preferably, in above-mentioned vacuum tank closure, the hermatic door includes main part, extends the main part four
The adjutage of individual vertex, the adjutage is horizontal-extending, and the upper roller is respectively arranged in the adjutage end with bottom roller
Portion.
Preferably, in above-mentioned vacuum tank closure, described cylinder one end is fixedly installed in the main part center.
Compared with prior art, the advantage of the invention is that：By the way that the bending of guide rail is realized into hermatic door and vacuum notch
Only fitting, good sealing effect, sealed using the movement of pneumatic door, only need cylinder to can be achieved, it is simple in construction, together
When sealing effectiveness it is preferable.
Brief description of the drawings
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments described in application, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 show the front view that hermatic door in the specific embodiment of the invention moves up and down schematic diagram；
Fig. 2 show the side view that hermatic door in the specific embodiment of the invention moves up and down schematic diagram；
Fig. 3 is enlarged drawing in circle in Fig. 2.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, detailed retouch is carried out to the technical scheme in the embodiment of the present invention
State, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on the present invention
In embodiment, the every other implementation that those of ordinary skill in the art are obtained on the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
In the description of the invention, it is necessary to explanation, term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instruction such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Be easy to the description present invention and simplify description, rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" the 3rd " is only used for describing purpose, and it is not intended that instruction or hint relative importance.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can
To be mechanical connection or electrical connection；Can be joined directly together, can also be indirectly connected by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
With reference to shown in Fig. 1-3, vacuum tank closure, the periphery of vacuum tank notch 100 is provided with elastic seal ring 200, sealing
Lid includes hermatic door 300, drives the cylinder 400 that moves up and down of hermatic door 300, the both ends of hermatic door 300 respectively symmetrically installation settings
There are a upper roller 310 and bottom roller 320, upper roller 310 moves up and down that to be installed on symmetrically arranged two vertical with bottom roller 320 respectively
Guide rail 400, two upright guide rails 400 distinguish installation settings in the both sides of vacuum tank notch 100, the middle part of upright guide rail 400 and bottom point
There is not bend the upper kink 410 of deviation vacuum tank and lower kink 420.
When hermatic door 300 seals, upper roller 310 is moved to kink 410, and bottom roller 320 is moved to lower kink
420, the door body of hermatic door 300 is held in elastic seal ring 200；
Upper bottom roller is moved to bending part at upper and lower two simultaneously, and hermatic door is close to the elastic seal ring of notch, real
Existing sealing effectiveness.
When hermatic door 300 needs to open, hermatic door 300 is away from vacuum tank notch 100.
By the way that the bending of guide rail is realized into being only bonded for hermatic door and vacuum notch, good sealing effect, using pneumatic door
Movement seal, only need a cylinder to can be achieved, it is simple in construction, while sealing effectiveness is preferable.
Further, the bottom of upright guide rail 400 sets positive stop.
Prevent from departing from.
Further, hermatic door 300 includes main part, extends the adjutage 330 of four vertex of main part, adjutage
330 is horizontal-extending, and upper roller 310 is respectively arranged in the end of adjutage 330 with bottom roller 320.The one end of cylinder 400 is fixedly installed in
Main part center.
It should be noted that herein, such as first and second or the like relational terms are used merely to a reality
Body or operation make a distinction with another entity or operation, and not necessarily require or imply and deposited between these entities or operation
In any this actual relation or order.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Nonexcludability includes, so that process, method, article or equipment including a series of elements not only will including those
Element, but also the other element including being not expressly set out, or it is this process, method, article or equipment also to include
Intrinsic key element.In the absence of more restrictions, the key element limited by sentence "including a ...", it is not excluded that
Other identical element also be present in process, method, article or equipment including the key element.
Described above is only the embodiment of the application, it is noted that for the ordinary skill people of the art
For member, on the premise of the application principle is not departed from, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the protection domain of the application.
Claims (4)
1. a kind of vacuum tank closure, it is characterised in that the vacuum tank notch periphery is provided with elastic seal ring, the sealing
Lid includes hermatic door, the cylinder for driving the hermatic door to move up and down, and the hermatic door both ends are on respectively symmetrically installation settings has
Roller and bottom roller, the upper roller move up and down and are installed on symmetrically arranged two upright guide rail respectively with bottom roller, and two is vertical
Guide rail distinguishes installation settings has bending deviation institute respectively in the middle part of the vacuum tank notch both sides, the upright guide rail with bottom
The upper kink of vacuum tank and lower kink are stated,
When the hermatic door is moved to first position, the upper roller is moved to the upper kink, and the bottom roller is moved to
The lower kink, the hermatic door door body are held in the elastic seal ring；
When the hermatic door is moved to the second place, the hermatic door is away from the vacuum tank notch.
2. vacuum tank closure according to claim 1, it is characterised in that the upright guide rail bottom sets limiting block
Block.
3. vacuum tank closure according to claim 1, it is characterised in that the hermatic door includes main part, extended
The adjutage of four vertex of main part, the adjutage is horizontal-extending, and the upper roller is respectively arranged in bottom roller
The adjutage end.
4. vacuum tank closure according to claim 3, it is characterised in that described cylinder one end is fixedly installed in the master
Body central.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710965398.6A CN107654683A (en) | 2017-10-17 | 2017-10-17 | Vacuum tank closure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710965398.6A CN107654683A (en) | 2017-10-17 | 2017-10-17 | Vacuum tank closure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107654683A true CN107654683A (en) | 2018-02-02 |
Family
ID=61118410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710965398.6A Pending CN107654683A (en) | 2017-10-17 | 2017-10-17 | Vacuum tank closure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107654683A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108571265A (en) * | 2018-06-15 | 2018-09-25 | 江苏港星方能超声洗净科技有限公司 | Vacuum chamber seals pneumatic door |
| CN111664262A (en) * | 2019-03-06 | 2020-09-15 | 宝钢工程技术集团有限公司 | Sealing valve for LF furnace dust collecting hood |
| CN111681981A (en) * | 2020-06-17 | 2020-09-18 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and sealing door mechanism thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201301647Y (en) * | 2008-11-27 | 2009-09-02 | 东风汽车有限公司 | Automatic lifting sealing door device |
| CN201479477U (en) * | 2009-07-03 | 2010-05-19 | 铜陵三佳科技股份有限公司 | Vertical automatic lifting seal door mechanism for PCB vacuum hot press |
| CN201711330U (en) * | 2010-06-04 | 2011-01-19 | 山东威高集团医用高分子制品股份有限公司 | Lifting sealing door of medical rapid cleaning machine |
| CN202165597U (en) * | 2011-04-15 | 2012-03-14 | 武汉韩泰智能科技有限公司 | Four-connecting-rod mechanism sealing door |
| CN202307825U (en) * | 2011-09-23 | 2012-07-04 | 北京七星华创电子股份有限公司 | Reaction chamber cover plate and reaction chamber with same |
| CN103292596A (en) * | 2013-05-30 | 2013-09-11 | 苏州博涛机电设备有限公司 | Airtight-door mechanism for atmosphere replacement room |
| CN203383676U (en) * | 2013-06-26 | 2014-01-08 | 深圳市和科达超声设备有限公司 | Spray washing machine and sealing door thereof |
| CN204902552U (en) * | 2015-06-24 | 2015-12-23 | 苏州市溪腾工业装备有限公司 | Oven sealing door |
| CN206522064U (en) * | 2017-02-17 | 2017-09-26 | 赣南师范大学 | Seal door structure |
| CN207246460U (en) * | 2017-10-17 | 2018-04-17 | 江苏港星方能超声洗净科技有限公司 | Vacuum tank sealing cover |
-
2017
- 2017-10-17 CN CN201710965398.6A patent/CN107654683A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201301647Y (en) * | 2008-11-27 | 2009-09-02 | 东风汽车有限公司 | Automatic lifting sealing door device |
| CN201479477U (en) * | 2009-07-03 | 2010-05-19 | 铜陵三佳科技股份有限公司 | Vertical automatic lifting seal door mechanism for PCB vacuum hot press |
| CN201711330U (en) * | 2010-06-04 | 2011-01-19 | 山东威高集团医用高分子制品股份有限公司 | Lifting sealing door of medical rapid cleaning machine |
| CN202165597U (en) * | 2011-04-15 | 2012-03-14 | 武汉韩泰智能科技有限公司 | Four-connecting-rod mechanism sealing door |
| CN202307825U (en) * | 2011-09-23 | 2012-07-04 | 北京七星华创电子股份有限公司 | Reaction chamber cover plate and reaction chamber with same |
| CN103292596A (en) * | 2013-05-30 | 2013-09-11 | 苏州博涛机电设备有限公司 | Airtight-door mechanism for atmosphere replacement room |
| CN203383676U (en) * | 2013-06-26 | 2014-01-08 | 深圳市和科达超声设备有限公司 | Spray washing machine and sealing door thereof |
| CN204902552U (en) * | 2015-06-24 | 2015-12-23 | 苏州市溪腾工业装备有限公司 | Oven sealing door |
| CN206522064U (en) * | 2017-02-17 | 2017-09-26 | 赣南师范大学 | Seal door structure |
| CN207246460U (en) * | 2017-10-17 | 2018-04-17 | 江苏港星方能超声洗净科技有限公司 | Vacuum tank sealing cover |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108571265A (en) * | 2018-06-15 | 2018-09-25 | 江苏港星方能超声洗净科技有限公司 | Vacuum chamber seals pneumatic door |
| CN108571265B (en) * | 2018-06-15 | 2024-02-20 | 江苏港星方能超声洗净科技有限公司 | Vacuum chamber sealing pneumatic door |
| CN111664262A (en) * | 2019-03-06 | 2020-09-15 | 宝钢工程技术集团有限公司 | Sealing valve for LF furnace dust collecting hood |
| CN111681981A (en) * | 2020-06-17 | 2020-09-18 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and sealing door mechanism thereof |
| CN111681981B (en) * | 2020-06-17 | 2023-10-13 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and sealing door mechanism thereof |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |