CN107612417A - Three degree of freedom spherical rotor ultrasonic motor stator matrix and its motivational techniques - Google Patents
Three degree of freedom spherical rotor ultrasonic motor stator matrix and its motivational techniques Download PDFInfo
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Abstract
Three degree of freedom spherical rotor ultrasonic motor stator matrix and its motivational techniques, are related to piezoelectric ultrasonic motor technical field.The present invention be in order to solve the problems, such as the rotary-type ultrasound electric machine of existing multiple degrees of freedom exist driving foot less, driving force is insufficient, it is complicated, be difficult to realize miniaturization.Four driving foots are uniformly embedded in the inner ring of becket, upper strata piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring are respectively positioned at the upper of becket, lower surface, upper strata piezoelectric ceramic ring is bisected into 12 upper strata piezoelectric ceramics subregions, gap is left between adjacent two panels piezoelectric ceramics subregion, silver coating is set at gap, lower floor's piezoelectric ceramic ring is bisected into 12 lower floor's piezoelectric ceramics subregions by virtual, polarised direction in the piezoelectric ceramic ring of upper strata is identical, polarised direction in lower floor's piezoelectric ceramic ring is identical, polarised direction between upper strata piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring is opposite.It is used to drive rotor around the Ellipse motion driven track that x, y and z axes rotate.
Description
Technical field
The present invention relates to three degree of freedom spherical rotor ultrasonic motor stator matrix.Belong to piezoelectric ultrasonic motor technical field.
Background technology
Piezoelectric ultrasonic motor is a kind of inverse piezoelectric effect using piezoelectric ceramics, is motivated in the elastomer in supersonic range
Vibration, form the particle movement with particular track in surface of elastomer specified point or specific region, so by stator, turn
The microscopic motion of particle is converted into the macroscopic motion of rotor by the friction coupling between son, has low speed high torque, without speed change
Mechanism, without electromagnetic interference, fast response time and the advantages that cut off self-lock.
But the existing rotary-type ultrasound electric machine of multiple degrees of freedom is in the presence of driving is sufficient less, driving force is insufficient, complicated, difficult
In realize minimize the problem of.
The content of the invention
The present invention be in order to solve the rotary-type ultrasound electric machine of existing multiple degrees of freedom exist driving foot less, driving force not
It is sufficient, complicated, be difficult to realize miniaturization the problem of.Three degree of freedom spherical rotor ultrasonic motor stator matrix is now provided and its swashed
Encourage method.
Three degree of freedom spherical rotor ultrasonic motor stator matrix, it includes becket 1, four driving foot 2, ear fixing end
3rd, upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5,
Four driving foots 2 are uniformly embedded in the inner ring of becket 1, and four ear fixing ends 3 are evenly spaced in the outer of becket 1
Ring,
Upper strata piezoelectric ceramic ring 4 is located at the upper surface of becket 1, and upper strata piezoelectric ceramic ring 4 is bisected into 12 upper stratas
Piezoelectric ceramics subregion, gap is left between adjacent two panels piezoelectric ceramics subregion, silver coating, 12 upper stratas are set at the gap
The equal through-thickness of piezoelectric ceramics subregion is polarized, and the polarised direction all same of 12 upper strata piezoelectric ceramics subregions；
Lower floor's piezoelectric ceramic ring 5 is located at the lower surface of becket 1, and lower floor's piezoelectric ceramic ring 5 is bisected into 12 by virtual
Piece lower floor piezoelectric ceramics subregion, 12 lower floor's piezoelectric ceramics subregions are integrated part structure, 12 lower floor's piezoelectric ceramics
Subregion is polarized along through-thickness, and the polarised direction all same of 12 lower floor's piezoelectric ceramics subregions；
Polarised direction between upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 is opposite.
The motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix, this method are based on described in claim 1
Three degree of freedom spherical rotor ultrasonic motor stator matrix realize, the motivational techniques can encourage three degree of freedom spherical rotor to surpass
Acoustic-electric machine stator matrix realizes three-degree-of-freedom motion, and three degree of freedom includes the ELLIPTIC REVOLUTION around x, y and z axes；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around y-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage axial bending mode of oscillation and nutation type mode of oscillation along the x-axis direction simultaneously, from
And axial bending mode of oscillation and along the x-axis direction nutation type mode of oscillation superposition so that driving foot 2 ends formed have driving
Rotor is around the Ellipse motion driven track that y-axis rotates；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around x-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage axial bending mode of oscillation and nutation type mode of oscillation along the y-axis direction simultaneously, from
And axial bending mode of oscillation and along the y-axis direction nutation type mode of oscillation superposition so that driving foot 2 ends formed have driving
Rotor is around the Ellipse motion driven track that x-axis rotates；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around z-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage along x and the nutation type mode of oscillation in y-axis direction simultaneously, so as to along x and y-axis direction
Beat mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that z-axis rotates；
The two-phase being applied to by exchanging on upper strata piezoelectric ceramic ring 4 and the respective partition of lower floor's piezoelectric ceramic ring 5 encourages electricity
The phase relation of pressure, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
The motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix, this method are based on described in claim 1
Three degree of freedom spherical rotor ultrasonic motor stator matrix realize, the motivational techniques can encourage three degree of freedom spherical rotor to surpass
Acoustic-electric machine stator matrix realizes three-degree-of-freedom motion, and three degree of freedom includes the ELLIPTIC REVOLUTION around x, y and z axes；
Three degree of freedom spherical rotor ultrasonic motor stator matrix is around x-axis or the motivational techniques of y-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 encourages six axial rank flexural vibrations, lower floor's piezoelectric ceramic ring 5 is encouraged the beat mode of oscillation along x or y-axis direction,
So that 2 ends of driving foot are formed with driving rotor around the Ellipse motion driven track that x-axis or y-axis rotate；
The motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix ELLIPTIC REVOLUTION about the z axis：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage along x and the nutation type mode of oscillation in y-axis direction simultaneously, so as to along x and y-axis direction
Beat mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that z-axis rotates；
The two-phase being applied to by exchanging on upper strata piezoelectric ceramic ring 4 and the respective partition of lower floor's piezoelectric ceramic ring 5 encourages electricity
The phase relation of pressure, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
Beneficial effects of the present invention are：
The application is respectively arranged upper strata piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring in the upper and lower surface of becket,
Upper strata piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring are divided into 12 subregions respectively, to upper strata piezoelectric ceramic ring and lower floor's piezoelectricity pottery
Subregion in ceramic ring applies two-phase driving voltage, three degree of freedom spherical rotor ultrasonic motor stator matrix is realized three
The free degree is moved, and three degree of freedom includes the ELLIPTIC REVOLUTION around x, y and z axes；By exchanging upper strata piezoelectric ceramic ring and laminated
The phase relation of driving voltage on electroceramics ring, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
Four driving foots are evenly arranged in the inner ring of becket, i.e., the space quadrature between two neighboring driving foot is
90°.It is such to arrange the Ellipse motion driven track for advantageously forming higher amplitudes, while symmetrical driving foot is advantageous to improve stator
The stability of matrix.
Four ear fixing ends are evenly arranged in the outer shroud of becket, i.e., the space phase between two neighboring ear fixing end
Potential difference is 90 °.Such fixation being disposed with beneficial to stator base, while symmetrical fixing end is also beneficial to improve stator base
Stability.
The stator base of the present invention has the advantages that structure type is simple, is easy to minimize and produces in batches.
Brief description of the drawings
Fig. 1 is the structural representation of the three degree of freedom spherical rotor ultrasonic motor stator matrix described in embodiment one
Figure；
Fig. 2 is the dimensional structure diagram for the integral piece being made up of in Fig. 1 becket, driving foot and ear fixing end；
Fig. 3 is the polarised direction schematic diagram of Fig. 1 piezoelectric ceramic rings at the middle and upper levels；
Fig. 4 is the polarised direction schematic diagram of Tu1Zhong lower floors piezoelectric ceramic ring；
Fig. 5 is upper strata piezoelectric ceramic ring and lower floor piezoelectric ceramic ring encourages wiring schematic diagram, in Fig. 5（1）For upper strata piezoelectricity
The wiring diagram of ceramic ring and a phase reverse voltage；In Fig. 5（2）For the wiring of lower floor's piezoelectric ceramic ring and another phase reverse voltage
Figure；
Fig. 6 is that two-phase voltage encourages wiring schematic diagram with upper strata piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring；
Fig. 7 is that two-phase voltage encourages wiring schematic diagram with upper strata piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring.
Embodiment
Embodiment one：Present embodiment is illustrated referring to figs. 1 to Fig. 4, three described in present embodiment are freely
Spherical spinner ultrasonic motor stator matrix is spent, it includes becket 1, four driving foot 2, ear fixing end 3, upper strata piezoelectric ceramics
Ring 4 and lower floor's piezoelectric ceramic ring 5,
Four driving foots 2 are uniformly embedded in the inner ring of becket 1, and four ear fixing ends 3 are evenly spaced in the outer of becket 1
Ring,
Upper strata piezoelectric ceramic ring 4 is located at the upper surface of becket 1, and upper strata piezoelectric ceramic ring 4 is bisected into 12 upper stratas
Piezoelectric ceramics subregion, gap is left between adjacent two panels piezoelectric ceramics subregion, silver coating, 12 upper stratas are set at the gap
The equal through-thickness of piezoelectric ceramics subregion is polarized, and the polarised direction all same of 12 upper strata piezoelectric ceramics subregions；
Lower floor's piezoelectric ceramic ring 5 is located at the lower surface of becket 1, and lower floor's piezoelectric ceramic ring 5 is bisected into 12 by virtual
Piece lower floor piezoelectric ceramics subregion, 12 lower floor's piezoelectric ceramics subregions are integrated part structure, 12 lower floor's piezoelectric ceramics
Subregion is polarized along through-thickness, and the polarised direction all same of 12 lower floor's piezoelectric ceramics subregions；
Polarised direction between upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 is opposite.
In present embodiment, Fig. 3 and Fig. 4 are respectively the polarization of Fig. 1 piezoelectric ceramic ring and lower floor's piezoelectric ceramic ring at the middle and upper levels
Direction schematic diagram, the upper surface of upper strata piezoelectric ceramic ring and the lower surface of lower floor's piezoelectric ceramic ring 5 are positive pole, and upper strata piezoelectricity is made pottery
The lower surface of ceramic ring and the upper surface of lower floor's piezoelectric ceramic ring 5 are negative pole.I.e.：The polarised direction of upper strata piezoelectric ceramic ring 4 is
From top to bottom；The polarised direction of lower floor's piezoelectric ceramic ring 5 is from bottom to up.
Four driving foot 2 uniformly be embedded in becket 1 inner ring, i.e., it is two neighboring driving foot between space quadratures be
90°.It is such to arrange the Ellipse motion driven track for advantageously forming higher amplitudes, while symmetrical driving foot is advantageous to improve stator
The stability of matrix.
Four ear fixing ends 3 are evenly spaced in the outer shroud of becket 1, i.e., the space between two neighboring ear fixing end
Phase difference is 90 °.Such fixation being disposed with beneficial to stator base, while symmetrical fixing end is also beneficial to improve stator base
The stability of body.
Embodiment two：Present embodiment is to the three degree of freedom spherical rotor ultrasound described in embodiment one
Motor stator matrix is described further, and in present embodiment, every upper strata piezoelectric ceramics subregion is made pottery with corresponding lower floor's piezoelectricity
The space phase of porcelain subregion differs 15 °.
Embodiment three：Present embodiment is to the three degree of freedom spherical rotor ultrasound described in embodiment one
Motor stator matrix is described further, in present embodiment, straight line formed by ear fixing end 3 to the center of circle and adjacent driven foot
Angle between straight line formed by 2 to the center of circle is 45 °.
Embodiment four：The excitation of three degree of freedom spherical rotor ultrasonic motor stator matrix described in present embodiment
Method, this method are realized based on the three degree of freedom spherical rotor ultrasonic motor stator matrix described in claim 1, its feature
It is, this method is realized based on the three degree of freedom spherical rotor ultrasonic motor stator matrix described in claim 1, the excitation
Method can encourage three degree of freedom spherical rotor ultrasonic motor stator matrix to realize three-degree-of-freedom motion, three degree of freedom include around
X, the ELLIPTIC REVOLUTION of y and z-axis；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around y-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage axial bending mode of oscillation and nutation type mode of oscillation along the x-axis direction simultaneously, from
And axial bending mode of oscillation and along the x-axis direction nutation type mode of oscillation superposition so that driving foot 2 ends formed have driving
Rotor is around the Ellipse motion driven track that y-axis rotates；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around x-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage axial bending mode of oscillation and nutation type mode of oscillation along the y-axis direction simultaneously, from
And axial bending mode of oscillation and along the y-axis direction nutation type mode of oscillation superposition so that driving foot 2 ends formed have driving
Rotor is around the Ellipse motion driven track that x-axis rotates；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around z-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage along x and the nutation type mode of oscillation in y-axis direction simultaneously, so as to along x and y-axis direction
Beat mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that z-axis rotates；
The two-phase being applied to by exchanging on upper strata piezoelectric ceramic ring 4 and the respective partition of lower floor's piezoelectric ceramic ring 5 encourages electricity
The phase relation of pressure, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
Embodiment five：Reference picture 6 and Fig. 7 bodies illustrate present embodiment, and present embodiment is to specific embodiment party
Three degree of freedom spherical rotor ultrasonic motor stator matrix described in formula four is described further, in present embodiment, on 12
It is a to be laminated electroceramics partitioned representationi(i=1,2 ..., 12)；12 lower floor's piezoelectric ceramics partitioned representations are bm(m=1,2 ...,
12)；
In order that upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage axial bending mode of oscillation, a phase width simultaneously
It is worth the positive pole U of the reverse voltage for 60VA+Connect upper strata piezoelectric ceramics subregion a simultaneouslyi(i=3,5,9,11) made pottery with lower floor's piezoelectricity
Porcelain subregion bm(m=4,10), a phase amplitude are the negative pole U of 60V reverse voltageA-Connect upper strata piezoelectric ceramics subregion a simultaneouslyj
And lower floor piezoelectric ceramics subregion b (j=4,10)n(n=3,5,9,11)；
In order that upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage nutation type vibration along the x-axis direction simultaneously, separately
One phase amplitude is the positive pole U of 60V reverse voltageB+Connect upper strata piezoelectric ceramics subregion a simultaneouslyiAnd lower floor's piezoelectricity (i=6,7,8)
Ceramic subregion bm(m=6,7,8), another phase amplitude are the negative pole U of 60V reverse voltageB-Upper strata piezoelectric ceramics point is connected simultaneously
Area ajAnd lower floor piezoelectric ceramics subregion b (j=12,1,2)n(n=12,1,2)；
Nutation type mode of oscillation superposition so as to axial bending mode of oscillation and along the x-axis direction so that driving 2 end shapes of foot
Into with driving rotor around the Ellipse motion driven track that y-axis rotates；
By two-phase backward voltage UA+、UA-、UB+And UB-With upper strata piezoelectric ceramics subregion and piezoelectric ceramics piecewise connection side of lower floor
Formula is rotated by 90 °, beat mode of oscillation superposition so as to axial bending mode of oscillation and along the y-axis direction so that driving 2 end shapes of foot
Into with driving rotor around the Ellipse motion driven track that x-axis rotates.
Embodiment six：The excitation of three degree of freedom spherical rotor ultrasonic motor stator matrix described in present embodiment
Method, this method are realized based on the three degree of freedom spherical rotor ultrasonic motor stator matrix described in claim 1, the excitation
Method can encourage three degree of freedom spherical rotor ultrasonic motor stator matrix to realize three-degree-of-freedom motion, three degree of freedom include around
X, the ELLIPTIC REVOLUTION of y and z-axis；
Three degree of freedom spherical rotor ultrasonic motor stator matrix is around X-axis or the motivational techniques of Y-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 encourages six axial rank flexural vibrations, lower floor's piezoelectric ceramic ring 5 is encouraged the beat mode of oscillation along x or y-axis direction,
So that 2 ends of driving foot are formed with driving rotor around the Ellipse motion driven track that x-axis or y-axis rotate；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around z-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring 4 and lower floor's piezoelectric ceramic ring 5, makes upper strata piezoelectricity pottery
Ceramic ring 4 and lower floor's piezoelectric ceramic ring 5 encourage along x and the nutation type mode of oscillation in y-axis direction simultaneously, so as to along x and y-axis direction
Beat mode of oscillation is superimposed so that 2 ends of driving foot, which are formed, has driving rotor around the Ellipse motion driven track that z-axis rotates；
The two-phase being applied to by exchanging on upper strata piezoelectric ceramic ring 4 and the respective partition of lower floor's piezoelectric ceramic ring 5 encourages electricity
The phase relation of pressure, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
Embodiment seven：Reference picture 5 illustrates present embodiment, and present embodiment is to embodiment six
The motivational techniques of described three degree of freedom spherical rotor ultrasonic motor stator matrix are described further, in present embodiment, ten
Two upper strata piezoelectric ceramics partitioned representations are ai(i=1,2 ..., 12)；12 lower floor's piezoelectric ceramics partitioned representations are bm(m=
1,2,…,12)；
One phase amplitude is the positive pole U of 60V reverse voltageA+Connect upper strata piezoelectric ceramics subregion a simultaneouslyi(i=2,4,6,8,
10,12), a phase amplitude is the negative pole U of 60V reverse voltageA-Connect upper strata piezoelectric ceramics subregion a simultaneouslyj(j=1,3,5,7,
9) six axial rank flexural vibrations, are encouraged by upper strata piezoelectric ceramic ring 4；
Positive pole U by another phase amplitude for 60V reverse voltageB+Connect lower floor piezoelectric ceramics subregion b simultaneouslym(m=5,
6,7,8,9), another phase amplitude is the negative pole U of 60V reverse voltageB-Connect lower floor piezoelectric ceramics subregion b simultaneouslyn(n=11,
12,1,2,3), b4And b10Subregion is grounded, and beat mode of oscillation along the x-axis direction is encouraged by lower floor's piezoelectric ceramic ring 5.
Claims (7)
1. three degree of freedom spherical rotor ultrasonic motor stator matrix, it is characterised in that it includes becket (1), four driving foots
(2), ear fixing end (3), upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5),
Four driving foots (2) are uniformly embedded in the inner ring of becket (1), and four ear fixing ends (3) are evenly spaced in becket (1)
Outer shroud,
Upper strata piezoelectric ceramic ring (4) is located at the upper surface of becket (1), and upper strata piezoelectric ceramic ring (4) is bisected on 12
Electroceramics subregion is laminated, leaves gap between adjacent two panels piezoelectric ceramics subregion, silver coating is set at the gap, on 12
The lamination equal through-thickness of electroceramics subregion is polarized, and the polarised direction all same of 12 upper strata piezoelectric ceramics subregions；
Lower floor's piezoelectric ceramic ring (5) is located at the lower surface of becket (1), and lower floor's piezoelectric ceramic ring (5) is bisected into ten by virtual
Two lower floor's piezoelectric ceramics subregions, 12 lower floor's piezoelectric ceramics subregions are integrated part structure, 12 lower floor's piezoelectricity potteries
Porcelain subregion is polarized along through-thickness, and the polarised direction all same of 12 lower floor's piezoelectric ceramics subregions；
Polarised direction between upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) is opposite.
2. three degree of freedom spherical rotor ultrasonic motor stator matrix according to claim 1, it is characterised in that every upper lamination
Electroceramics subregion differs 15 ° with the space phase of corresponding lower floor's piezoelectric ceramics subregion.
3. three degree of freedom spherical rotor ultrasonic motor stator matrix according to claim 1, it is characterised in that ear fixing end
(3) it is 45 ° to the angle between straight line formed by straight line formed by the center of circle and adjacent driven foot (2) to the center of circle.
4. the motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix, this method is based on described in claim 1
What three degree of freedom spherical rotor ultrasonic motor stator matrix was realized, it is characterised in that the motivational techniques can encourage Three Degree Of Freedom
Spherical spinner ultrasonic motor stator matrix realizes three-degree-of-freedom motion, and three degree of freedom includes the ELLIPTIC REVOLUTION around x, y and z axes；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around y-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5), makes upper strata piezoelectricity pottery
Ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) at the same encourage axial bending mode of oscillation and along the x-axis direction nutation type vibration mould
State, nutation type mode of oscillation superposition so as to axial bending mode of oscillation and along the x-axis direction so that driving foot (2) end is formed
With driving rotor around the Ellipse motion driven track that y-axis rotates；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around x-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5), makes upper strata piezoelectricity pottery
Ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) at the same encourage axial bending mode of oscillation and along the y-axis direction nutation type vibration mould
State, nutation type mode of oscillation superposition so as to axial bending mode of oscillation and along the y-axis direction so that driving foot (2) end is formed
With driving rotor around the Ellipse motion driven track that x-axis rotates；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around z-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5), makes upper strata piezoelectricity pottery
Ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) while excitation is along x and the nutation type mode of oscillation in y-axis direction, so as to along x and y-axis side
To beat mode of oscillation be superimposed so that driving foot (2) end is formed with the Ellipse motion driven rail that is rotated around z-axis of driving rotor
Mark；
The two-phase being applied to by exchanging on upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) respective partition encourages electricity
The phase relation of pressure, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
5. the motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix according to claim 4, its feature exist
In 12 upper strata piezoelectric ceramics partitioned representations are ai(i=1,2 ..., 12)；12 lower floor's piezoelectric ceramics partitioned representations are bm
(m=1,2 ..., 12)；
In order that upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) while axial bending mode of oscillation is encouraged, a phase width
It is worth the positive pole U of the reverse voltage for 60VA+Connect upper strata piezoelectric ceramics subregion a simultaneouslyi(i=3,5,9,11) made pottery with lower floor's piezoelectricity
Porcelain subregion bm(m=4,10), a phase amplitude are the negative pole U of 60V reverse voltageA-Connect upper strata piezoelectric ceramics subregion a simultaneouslyj(j
=4,10) and lower floor piezoelectric ceramics subregion bn(n=3,5,9,11)；
In order that upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) while the along the x-axis direction vibration of excitation nutation type, separately
One phase amplitude is the positive pole U of 60V reverse voltageB+Connect upper strata piezoelectric ceramics subregion a simultaneouslyiAnd lower floor's piezoelectricity (i=6,7,8)
Ceramic subregion bm(m=6,7,8), another phase amplitude are the negative pole U of 60V reverse voltageB-Upper strata piezoelectric ceramics point is connected simultaneously
Area ajAnd lower floor piezoelectric ceramics subregion b (j=12,1,2)n(n=12,1,2)；
Nutation type mode of oscillation superposition so as to axial bending mode of oscillation and along the x-axis direction so that driving foot (2) end is formed
With driving rotor around the Ellipse motion driven track that y-axis rotates；
By two-phase backward voltage UA+、UA-、UB+And UB-Revolved with upper strata piezoelectric ceramics subregion and lower floor's piezoelectric ceramics piecewise connection mode
Turn 90 °, beat mode of oscillation superposition so as to axial bending mode of oscillation and along the y-axis direction so that driving foot (2) end is formed
With driving rotor around the Ellipse motion driven track that x-axis rotates.
6. the motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix, this method is based on described in claim 1
What three degree of freedom spherical rotor ultrasonic motor stator matrix was realized, it is characterised in that the motivational techniques can encourage Three Degree Of Freedom
Spherical spinner ultrasonic motor stator matrix realizes three-degree-of-freedom motion, and three degree of freedom includes the ELLIPTIC REVOLUTION around x, y and z axes；
Three degree of freedom spherical rotor ultrasonic motor stator matrix is around x-axis or the motivational techniques of y-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5), makes upper strata piezoelectricity pottery
Six rank flexural vibrations of ceramic ring (4) excitation axial direction, make lower floor's piezoelectric ceramic ring (5) excitation vibrate mould along x or the beat in y-axis direction
State so that driving foot (2) end is formed with driving rotor around the Ellipse motion driven track that x-axis or y-axis rotate；
Motivational techniques of the three degree of freedom spherical rotor ultrasonic motor stator matrix around z-axis ELLIPTIC REVOLUTION：
Driving voltage is applied to the respective partition of upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5), makes upper strata piezoelectricity pottery
Ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) while excitation is along x and the nutation type mode of oscillation in y-axis direction, so as to along x and y-axis side
To beat mode of oscillation be superimposed so that driving foot (2) end is formed with the Ellipse motion driven rail that is rotated around z-axis of driving rotor
Mark；
The two-phase being applied to by exchanging on upper strata piezoelectric ceramic ring (4) and lower floor's piezoelectric ceramic ring (5) respective partition encourages electricity
The phase relation of pressure, realize that driving rotor rotates around the negative sense of x-axis, y-axis or z-axis.
7. the motivational techniques of three degree of freedom spherical rotor ultrasonic motor stator matrix according to claim 6, its feature exist
In 12 upper strata piezoelectric ceramics partitioned representations are ai(i=1,2 ..., 12)；12 lower floor's piezoelectric ceramics partitioned representations are bm
(m=1,2 ..., 12)；
One phase amplitude is the positive pole U of 60V reverse voltageA+Connect upper strata piezoelectric ceramics subregion a simultaneouslyi(i=2,4,6,8,10,
12), a phase amplitude is the negative pole U of 60V reverse voltageA-Connect upper strata piezoelectric ceramics subregion a simultaneouslyj(j=1,3,5,7,9),
Six axial rank flexural vibrations are encouraged by upper strata piezoelectric ceramic ring (4)；
Positive pole U by another phase amplitude for 60V reverse voltageB+Connect lower floor piezoelectric ceramics subregion b simultaneouslym(m=5,6,7,8,
9), another phase amplitude is the negative pole U of 60V reverse voltageB-Connect lower floor piezoelectric ceramics subregion b simultaneouslyn(n=11,12,1,2,
3), b4And b10Subregion is grounded, and beat mode of oscillation along the x-axis direction is encouraged by lower floor's piezoelectric ceramic ring (5).
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| CN113224972A (en) * | 2021-04-28 | 2021-08-06 | 南京航空航天大学 | Single-stator three-degree-of-freedom spherical ultrasonic motor and excitation method thereof |
| CN113852292A (en) * | 2021-08-09 | 2021-12-28 | 大连理工大学 | Piezoelectric ceramic-substrate integrated driver |
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| CN113852292A (en) * | 2021-08-09 | 2021-12-28 | 大连理工大学 | Piezoelectric ceramic-substrate integrated driver |
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