CN107612414B - A kind of friction nanometer power generator and its preparation method and application - Google Patents
A kind of friction nanometer power generator and its preparation method and application Download PDFInfo
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- CN107612414B CN107612414B CN201710906212.XA CN201710906212A CN107612414B CN 107612414 B CN107612414 B CN 107612414B CN 201710906212 A CN201710906212 A CN 201710906212A CN 107612414 B CN107612414 B CN 107612414B
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Abstract
The present invention relates to a kind of friction nanometer power generators and its preparation method and application, the friction nanometer power generator is and the film made of being stacked gradually as the first insulating polymer, the first flexible material, the second insulating polymer, the second flexible material and third insulating polymer using conductive flexible material as upper/lower electrode.Friction nanometer power generator of the invention in the attachment on small radius of curvature object and can reduce longitudinal upper or lateral upper space requirement, we get rid of the limitation of generator " heaviness " substrate, have many advantages, such as ultra-thin, lightweight vertical independent friction laminar friction nanometer power generator.In addition, the attachment on complex structure may be implemented in friction nanometer power generator of the invention, while having the function of collecting energy and sensing, and not will lead to the damage of device.This electric generator structure is simple, cost of manufacture is cheap and can meet the needs of current market with mass production.Belong to micro-nano energy source utilizing electricity generating techn field.
Description
Technical field
The invention belongs to micro-nano energy source utilizing electricity generating techn fields, and in particular to a kind of friction nanometer power generator and preparation method thereof
And application.
Background technique
Energy device (Zhang L, Zhang B, Chen of the friction nanometer power generator as a kind of novel collecting mechanical energy
J,et al.Lawn structured triboelectric nanogenerators for scavenging sweeping
Wind energy on rooftops [J] .Advanced Materials, 2016,28 (8): 1650-1656.), by more next
More concerns.It has been achieved with huge progress in output, transformation efficiency, application and configuration aspects.Its output can expire
Sufficient mobile phone charging (Zhu G, Chen J, Zhang T, et al.Radial-arrayed rotary electrification
for high performance triboelectric generator[J].Nature communications,2014,
5.), transformation efficiency has reached 85% (Xie Y, Wang S, Niu S, et al.Grating-Structured
Freestanding Triboelectric-Layer Nanogenerator for Harvesting Mechanical
Energy at 85%Total Conversion Efficiency [J] .Advanced Materials, 2014,26 (38):
6599-6607.)；Both can be used as energy device, can also be used as sensor, as pressure sensor (Chen S W, Cao X,
Wang N,et al.An Ultrathin Flexible Single-Electrode Triboelectric-
Nanogenerator for Mechanical Energy Harvesting and Instantaneous Force
Sensing [J] .Advanced Energy Materials, 2016.), ion detector (Lin Z H, Zhu G, ZhouY S,
et al.A self-powered triboelectric nanosensor for mercury ion detection[J]
.Angewandte Chemie International Edition, 2013,52 (19): 5065-5069.), angle probe
(Lin Z H,Zhu G,Zhou Y S,et al.A self-powered triboelectric nanosensor for
mercury ion detection[J].Angewandte Chemie International Edition,2013,52(19):
5065-5069.), ultraviolet light detector (Lin Z H, Cheng G, Yang Y, et al.Triboelectric
nanogenerator as an active UV photodetector[J].Advanced Functional Materials,
2014,24 (19): 2810-2816.) etc.；With contact separation formula (Zhu G, Pan C, Guo W, et
al.Triboelectric-generator-driven pulse electrodeposition for micropatterning
[J] .Nano letters, 2012,12 (9): 4960-4965.), sliding (Wang S, Lin L, Xie Y, et
al.Sliding-triboelectric nanogenerators based on in-plane charge-separation
Mechanism [J] .Nano letters, 2013,13 (5): 2226-2233.), single electrode formula (YangY, Zhang H, Chen
J,et al.Single-electrode-based sliding triboelectric nanogenerator for self-
Powered displacement vector sensor system [J] .Acs Nano, 2013,7 (8): 7342-7351.) and
Independent friction laminar (Zhu G, Chen J, Zhang T, et al.Radial-arrayed rotary electrification
for high performance triboelectric generator[J].Nature communications,2014,
5.).For structure, since single electrode formula friction nanometer power generator needs ground electrode, wearable device is limited it as
Using.However the generator of other three types needs sufficient space and " heaviness " substrate problem in the longitudinal direction or in transverse direction
(Chen S W,Cao X,Wang N,et al.An Ultrathin Flexible Single-Electrode
Triboelectric-Nanogenerator for Mechanical Energy Harvesting and
Instantaneous Force Sensing [J] .Advanced Energy Materials, 2016.), limit generator
Application in the supporting object of small space and complicated shape.
Resistive pressure sensor by by this non-electrical physical quantity of power be converted into resistance change (Liao X, Liao Q,
Yan X,et al.Flexible and highly sensitive strain sensors fabricated by pencil
drawn for wearable monitor[J].Advanced Functional Materials,2015,25(16):2395-
2401.).However this sensor is very sensitive to mechanically deform, limits its application on the small object of radius of curvature.Though
So there is technology to overcome to the sensitive pressure sensor of mechanically deform (Lee S, Reuveny A, Reeder J, et al.A at present
transparent bending-insensitive pressure sensor[J].Nature nanotechnology,
2016.), but manufacturing cost is high, and preparation process is complicated.Output (Luo is just had since friction nanometer power generator needs contact
J,Tang W,Fan F R,et al.Transparent and Flexible Self-Charging Power Film and
Its Application in a Sliding Unlock System in Touchpad Technology[J].ACS
Nano, 2016,10 (8): 8078-8086.), it can't be influenced by mechanically deform.For this purpose, our use productions are at low cost
Honest and clean friction nanometer power generator is as pressure sensor.
Summary of the invention
To solve the above problems, the present invention proposes a kind of friction nanometer power generator and its preparation method and application, the present invention
Friction nanometer power generator in the attachment on small radius of curvature object and longitudinal upper or lateral upper space requirement can be reduced,
We get rid of the limitation of generator " heaviness " substrate, are to have the vertical stand alone type friction nanometer a little such as ultra-thin, lightweight
Generator.In addition, the attachment on complex structure may be implemented in friction nanometer power generator of the invention, while can collect
Energy and sensing, and not will lead to the damage of device.This electric generator structure is simple, cost of manufacture is cheap and can be a large amount of
Production, meets the needs of current market.
The present invention is achieved by the following technical solutions:
A kind of friction nanometer power generator, the friction nanometer power generator be using conductive flexible material as upper/lower electrode, and
Successively by the first insulating polymer, the first flexible material, the second insulating polymer, the second flexible material and third insulating polymer
Film made of stacking；The material of first insulating polymer polymerize with second insulating polymer and third insulation
The material of object is different；
The friction nanometer power generator with a thickness of 60-90 μm, mass area ratio 3-6mg.cm-2。
Further, first insulating polymer be petrochemical industry base polyester, polydimethylsiloxane or dimethyl silicone polymer,
It can be taken off from substrate polymer or glass after solidification；
First flexible material and the second flexible material are identical or different；The flexible material is silver nanowires, carbon is received
Mitron or the silica gel of graphene doping；
The material of second insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin；
The material of the third insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin.
The nano generator is using silver nanowires as upper/lower electrode, and by ethyl cellulose, silver nanowires, poly dimethyl silicon
Film made of oxygen alkane, silver nanowires and polyurethane stack gradually；With a thickness of 60-90 μm, mass area ratio 3-6mg.cm-2。
Further, the friction nanometer power generator can be attached to different shape well, in the supporting object of angle, and
The damage of device is not will lead to.
A kind of preparation method of friction nanometer power generator, the preparation method include the preparation of ethyl cellulose solution, gather
The preparation of dimethyl siloxane solution and the preparation of generator；
The preparation of the generator by the preparation step of top electrode and lower electrode and the coating of generator insulating layer and
The forming step of generator is obtained using silver nanowires as upper/lower electrode, and by ethyl cellulose, silver nanowires, polydimethylsiloxanes
Film made of alkane, silver nanowires and polyurethane stack gradually, i.e., the described friction nanometer power generator；It can be by institute according to practical application
It states friction nanometer power generator and is cut into corresponding specification；
The top electrode and the preparation step of lower electrode include:
(1) preparation of ethyl cellulose film: by the ethyl cellulose solution, it is spin-coated on poly- pair as support substrate
It on ethylene terephthalate thin slice, places at room temperature, standing time t1；In polyethylene terephthalate base
Ethyl cellulose film is obtained on bottom；
(2) first etchings: the ethyl cellulose film, etch period t are etched with nitrogen and oxygen2, to reduce second
The hydrophobicity of base cellulose surface；
(3) preparation of electrode under: obtaining on ethyl cellulose film in step (2), one layer of silver nanowires of spin coating, as
The ethyl cellulose film, is then put into baking oven and dries by lower electrode, drying temperature T3, drying time t3, at poly- pair
Ethyl cellulose/silver nanowires film is obtained in ethylene terephthalate substrate；
(4) it is thin that the dimethyl silicone polymer preparation of insulating coating: is spin-coated on the ethyl cellulose/silver nanowires
It on film, is put into vacuum oven, drying temperature T4, drying time t4, on PET substrate
To ethyl cellulose/silver nanowires/polydimethylsiloxanefilm film；
(5) second etchings: it is thin that the ethyl cellulose/silver nanowires/dimethyl silicone polymer is etched with nitrogen and oxygen
Film, etch period t5, obtain hydrophilic ethyl cellulose/silver nanowires/polydimethylsiloxanefilm film；
(6) preparation of top electrode: the ethyl cellulose/silver nanowires/poly- diformazan is obtained through over etching in step (5)
On radical siloxane film, then one layer of silver nanowires of spin coating, as top electrode, then by the ethyl cellulose/silver nanowires/poly-
Dimethyl siloxane film, which is put into baking oven, dries, drying temperature T6, drying time t6, in polyethylene terephthalate
Ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires film is obtained on ester group bottom；At this point, top electrode and lower electricity
The preparation of pole is completed.
Further, the coating of the generator insulating layer and the forming step of generator include:
A. the one strata ammonia of spin coating on the ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires film
Ester (PU) obtains ethyl cellulose/silver nanoparticle after placing 4-5h at room temperature on PET substrate
Line/dimethyl silicone polymer/silver nanowires/polyurethane film；
It b. is C with concentrationbThe obtained ethyl cellulose/silver nanowires/poly dimethyl of sulfuric acid solution etching a step
Siloxanes/silver nanowires/polyurethane film, sulfuric acid solution etch period are tb, rinsed well after etching, done with deionized water
It is dry, until water evaporating completely, completes the coating of the generator insulating layer；
C. ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires/thin polyurethane b walked
Film is taken off from the PET substrate to get to the friction nanometer power generator.
Further, the sulfuric acid concentration CbFor 3-5mol/L；Sulfuric acid solution etch period t described in step bbFor 10-
20s。
Further, the preparation of the ethyl cellulose solution is with volume for V0-1Methylene chloride and volume be V0-2's
Dehydrated alcohol is solvent, and dissolution quality is m0Ethyl cellulose, stirring is until described and cellulose sufficiently dissolves, when stirring
Between be t0, obtain the flaxen ethyl cellulose solution.
Further, the time t of the stirring0For 4-6h.
Further, the methylene chloride volume V0-1For 30-50ml.
Further, the dehydrated alcohol volume V0-2For 15-25ml.
Further, the quality m of the ethyl cellulose0For 5-9g.
Further, the preparation of the dimethyl silicone polymer solution is by dimethyl silicone polymer and curing agent (band second
The prepolymer of alkenyl chain) and mass ratio be 1-10:1-3 ratio mix, stirring be sufficiently mixed to the two, mixing time is
T0', white clear liquid is obtained, i.e., the described dimethyl silicone polymer solution.
Further, the mixing time T0' it is 5-10min.
Further, standing time t described in step (1)1For 4-5h.
Further, etch period t described in step (2)2For 30-60s.
Further, drying temperature T described in step (3)3It is 50-60 DEG C, the drying time t3For 10-15min.
Further, drying temperature T described in step (4)4It is 100-150 DEG C；The drying time t4For 1-3h.
Further, etch period t described in step (5)5For 200-300s.
Further, drying temperature T described in step (6)6It is 50-60 DEG C；The drying time t6For 10-15min.
A kind of application of friction nanometer power generator, the application are in energy device or sensor.
The present invention has following advantageous effects:
(1) friction nanometer power generator of the invention have light weight, thickness is thin, structure is simple, cost of manufacture is cheap and can
The advantages that with mass production.
(2) preparation method of friction nanometer power generator of the invention is simple, and material requested is cheap to be easy to get.
(3) friction nanometer power generator of the invention is the vertical independent laminar friction nanometer power generator that rubs.
(4) friction nanometer power generator of the invention has good shape adaptability, is attached in the substrate of arbitrary shape, real
Existing collection of energy and sensing.
(5) friction nanometer power generator of the invention can be used as high sensitive electronic skin, realize pressure sensing, and sensitivity is
85.63μA.MPa-1。
(6) friction nanometer power generator of the invention can reduce the space requirement in longitudinal upper or transverse direction, get rid of hair
The limitation of motor " heaviness " substrate.
(7) friction nanometer power generator of the invention is bipolar electrode, and the field and occasion of application are more extensive.
Detailed description of the invention
Fig. 1 is the dimensional drawing of making devices in embodiment.
Fig. 2 is the output current capability figure of friction nanometer power generator in embodiment.
Fig. 3 is the output voltage performance map of friction nanometer power generator in embodiment.
Fig. 4 is performance map of the friction nanometer power generator as pressure sensor in embodiment.
Fig. 5 is that the electric current that friction nanometer power generator detects Strand as pressure sensor in embodiment exports figure.
Fig. 6 is that friction nanometer power generator is attached to the wedge angle figure on square object in embodiment.
Description of symbols: 1- ethyl cellulose, 2- silver nanowires, 3- dimethyl silicone polymer 4- silver nanowires, 5- are poly-
Urethane.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is explained in further detail.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, and
It is not used in the restriction present invention.
On the contrary, the present invention covers any substitution done on the essence and scope of the present invention being defined by the claims, repairs
Change, equivalent method and scheme.Further, in order to make the public have a better understanding the present invention, below to of the invention thin
It is detailed to describe some specific detail sections in section description.Part without these details for a person skilled in the art
The present invention can also be understood completely in description.
Embodiment 1
A kind of preparation method of friction nanometer power generator, the preparation method includes the following contents:
(1) preparation of solution:
The ethyl cellulose of 5g is dissolved in the mixed solution of 30ml methylene chloride and 15ml dehydrated alcohol, stirring 5h is straight
It is sufficiently dissolved to the cellulose dimly, obtains the flaxen ethyl cellulose solution；
It with mass ratio is the ratio of 3:1 by dimethyl silicone polymer (PDMS) and curing agent (prepolymer with vinyl sidechain)
Example mixing, stirring 5min are sufficiently mixed up to the two, obtain the white clear liquid of bubble-free, i.e., the described dimethyl silicone polymer
Solution；
(2) preparation of ethyl cellulose film: by the ethyl cellulose solution, it is spin-coated on poly- pair as support substrate
It on ethylene terephthalate (PET) thin slice, places at room temperature, standing time 5h obtains transparent ethyl cellulose
Plain film；
(3) first etchings: being the nitrogen of 50sccm with flow and oxygen etches the ethyl cellulose film, when etching
Between be 30s, to reduce the hydrophobicity on ethyl cellulose surface；
(4) preparation of electrode under: obtaining on ethyl cellulose film in step (3), one layer of silver nanowires of spin coating, as
The film, is then put into baking oven and dries by lower electrode, and drying temperature is 60 DEG C, drying time 10min, obtains ethyl fibre
Tie up element/silver nanowires film；
(5) it is thin that the dimethyl silicone polymer preparation of insulating coating: is spin-coated on the ethyl cellulose/silver nanowires
On film, be put into vacuum oven, drying temperature be 120 DEG C, drying time 1.5h, obtain ethyl cellulose/silver nanowires/
Polydimethylsiloxanefilm film；
(6) second etchings: being the nitrogen of 50sccm with flow and oxygen etch the ethyl cellulose/silver nanowires/
Polydimethylsiloxanefilm film, etch period 200s obtain hydrophilic ethyl cellulose/silver nanowires/polydimethylsiloxanes
Alkane film；
(7) preparation of top electrode: the ethyl cellulose/silver nanowires/poly- two obtained in step (6) through over etching
On methylsiloxane film, then one layer of silver nanowires of spin coating, as top electrode, then by the ethyl cellulose/silver nanowires/
Polydimethylsiloxanefilm film is put into baking oven and dries, and drying temperature is 60 DEG C, and drying time 10min obtains ethyl cellulose
Element/silver nanowires/dimethyl silicone polymer/silver nanowires film；At this point, the preparation of top electrode and lower electrode is completed.
(8) coating of generator insulating layer and the formation of generator:
Firstly, one layer of spin coating on the ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires film
Polyurethane (PU), at room temperature place 5h after, obtain ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires/
Polyurethane film；
Then, the sulfuric acid solution etching ethyl cellulose/silver nanowires obtained above for being 3mol/L with concentration/gather
Dimethyl siloxane/silver nanowires/polyurethane film, sulfuric acid solution etch period are 20s, are rinsed after etching with deionized water dry
Only, dry, until water evaporating completely, completes the coating of the generator insulating layer, obtain ethyl cellulose/silver nanowires/poly-
Dimethyl siloxane/silver nanowires/polyurethane film；
Finally, by the ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires/polyurethane film from institute
It states and is taken off on PET substrate to get the friction nanometer power generator is arrived, as shown in Figure 1.
The friction nanometer power generator obtained by the preparation method of the present embodiment, as shown in Figure 1, it is with a thickness of 78 μm,
Mass area ratio is 4.294mg.cm-2.It makes a service test below to the resulting friction nanometer power generator:
By the friction nanometer power generator under the pressure for applying 3Hz frequency, respectively with oscillograph and electrometer to described
Friction nanometer power generator measures, and as shown in Figures 2 and 3, the voltage and short circuit current measured is respectively 18V, 0.25 μ A.
The friction nanometer power generator application is formed in the sensor and is based on friction nanometer power generator adaptability pressure
Sensor measures the sensitivity of the pressure sensor, and as shown in Figure 4, the high sensitivity of pressure sensor is up to 85.63 μ
A.MPa-1；Electric current of the friction nanometer power generator as pressure sensor detection Strand in the present embodiment as shown in Fig. 5
Output figure, as seen from the figure, friction nanometer power generator of the invention can be realized the detection of Strand.
Fig. 6 is that the friction nanometer power generator of the present embodiment is attached to the wedge angle figure on square object, as seen from the figure, friction
Nanometer generating function is attached to different shape well, in the supporting object of angle, not will lead to the damage of device.
This generator is not only simple in structure and can produce in enormous quantities, not only can be used as energy device but also can be used for passing
Sensor has important application in portable energy source and pressure sensor systems.
Embodiment 2
Nano generator of the present embodiment and preparation method thereof is substantially the same manner as Example 1, only unlike:
When in step (1) prepared by ethyl cellulose solution, ethyl cellulose quality is 9g；Methylene chloride volume is 50ml；
The volume of dehydrated alcohol is 25ml；Mixing time is 6h；
When preparing dimethyl silicone polymer solution, dimethyl silicone polymer (PDMS) and curing agent are (with vinyl sidechain
Prepolymer) mass ratio be 1:1；
Standing time described in step (2) is 5h；
Etch period described in step (3) is 60s；
Drying temperature described in step (4) is 60 DEG C, and the drying time is 15min；
Drying temperature described in step (5) is 120 DEG C；The drying time is 3h；
Etch period described in step (6) is 300s；
Drying temperature described in step (7) is 60 DEG C；The drying time is 15min.
The friction nanometer power generator obtained by the preparation method of the present embodiment with a thickness of 60 μm, mass area ratio
For 3mg.cm-2。
Embodiment 3
Generator of the present embodiment and preparation method thereof is substantially the same manner as Example 1, only unlike:
The friction nanometer power generator obtained by the preparation method of the present embodiment with a thickness of 78 μm, mass area ratio
For 5mg.cm-2。
Embodiment 4
Generator of the present embodiment and preparation method thereof is substantially the same manner as Example 1, only unlike:
When preparing dimethyl silicone polymer solution, dimethyl silicone polymer (PDMS) and curing agent are (with vinyl sidechain
Prepolymer) mass ratio be 10:3；
Standing time described in step (2) is 4h；
Etch period described in step (3) is 30s；
Drying temperature described in step (4) is 50 DEG C, and the drying time is 15min；
Drying temperature described in step (5) is 150 DEG C；The drying time is 1h；
Etch period described in step (6) is 200s；
Drying temperature described in step (7) is 50 DEG C；The drying time is 15min.
The friction nanometer power generator obtained by the preparation method of the present embodiment with a thickness of 90 μm, mass area ratio
For 6mg.cm-2。
Claims (10)
1. a kind of friction nanometer power generator, which is characterized in that the friction nanometer power generator is with conductive flexible material be on
Lower electrode, and insulated by the first insulating polymer, the first flexible material, the second insulating polymer, the second flexible material and third
Film made of polymer stacks gradually；The material of first insulating polymer and second insulating polymer and described the
The material of three insulating polymers is different；
The friction nanometer power generator with a thickness of 60-90 μm；
The upper/lower electrode obtains in the following way:
(1) preparation of ethyl cellulose film: the ethyl cellulose solution is spin-coated on as the poly- to benzene two of support substrate
It on formic acid glycol ester thin slice, places at room temperature, standing time t1；On PET substrate
Obtain ethyl cellulose film；
(2) first etchings: the ethyl cellulose film, etch period t are etched with nitrogen and oxygen2, to reduce ethyl cellulose
The hydrophobicity on plain surface；
(3) preparation of electrode under: on the ethyl cellulose film obtained in step (2), one layer of silver nanowires of spin coating, as under
Then the ethyl cellulose film is put into baking oven and dries by electrode, drying temperature T3, drying time t3, poly- to benzene
Ethyl cellulose/silver nanowires film is obtained in naphthalate substrate；
(4) preparation of insulating coating: dimethyl silicone polymer is spin-coated on the ethyl cellulose/silver nanowires film, is put
Enter in vacuum oven, drying temperature T4, drying time t4, ethyl is obtained on PET substrate
Cellulose/silver nano line/polydimethylsiloxanefilm film；
(5) second etchings: the ethyl cellulose/silver nanowires/polydimethylsiloxanefilm film is etched with nitrogen and oxygen, is carved
The erosion time is t5, obtain hydrophilic ethyl cellulose/silver nanowires/polydimethylsiloxanefilm film；
(6) preparation of top electrode: the ethyl cellulose/silver nanowires/poly dimethyl silicon is obtained through over etching in step (5)
On oxygen alkane film, then one layer of silver nanowires of spin coating, as top electrode, then by the ethyl cellulose/silver nanowires/poly- diformazan
Radical siloxane film, which is put into baking oven, dries, drying temperature T6, drying time t6, in polyethylene terephthalate base
Ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires film is obtained on bottom；At this point, top electrode and lower electrode
Preparation is completed.
2. a kind of friction nanometer power generator according to claim 1, which is characterized in that first insulating polymer is stone
Change base polyester, polydimethylsiloxane or dimethyl silicone polymer；
First flexible material and the second flexible material are identical or different；The flexible material is silver nanowires, carbon nanotube
Or the silica gel of graphene doping；
The material of second insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin；
The material of the third insulating polymer is dimethyl silicone polymer, polyurethane, polytetrafluoroethylene (PTFE) or silk-fibroin.
3. a kind of friction nanometer power generator according to claim 2, which is characterized in that the friction nanometer power generator is with silver
Nano wire is upper/lower electrode, and successively by ethyl cellulose, silver nanowires, dimethyl silicone polymer, silver nanowires and polyurethane
Film made of stacking；The friction nanometer power generator with a thickness of 60-90 μm.
4. a kind of preparation method of friction nanometer power generator, which is characterized in that the preparation method includes ethyl cellulose solution
Preparation, the preparation of dimethyl silicone polymer solution and the preparation of generator；
Coating and power generation of the preparation of the generator by the preparation step and generator insulating layer of top electrode and lower electrode
The forming step of machine is obtained using silver nanowires as upper/lower electrode, and by ethyl cellulose, silver nanowires, dimethyl silicone polymer,
Film made of silver nanowires and polyurethane stack gradually, i.e., the described friction nanometer power generator；
The top electrode and the preparation step of lower electrode include:
(1) preparation of ethyl cellulose film: the ethyl cellulose solution is spin-coated on as the poly- to benzene two of support substrate
It on formic acid glycol ester thin slice, places at room temperature, standing time t1；On PET substrate
Obtain ethyl cellulose film；
(2) first etchings: the ethyl cellulose film, etch period t are etched with nitrogen and oxygen2, to reduce ethyl cellulose
The hydrophobicity on plain surface；
(3) preparation of electrode under: on the ethyl cellulose film obtained in step (2), one layer of silver nanowires of spin coating, as under
Then the ethyl cellulose film is put into baking oven and dries by electrode, drying temperature T3, drying time t3, poly- to benzene
Ethyl cellulose/silver nanowires film is obtained in naphthalate substrate；
(4) preparation of insulating coating: dimethyl silicone polymer is spin-coated on the ethyl cellulose/silver nanowires film, is put
Enter in vacuum oven, drying temperature T4, drying time t4, ethyl is obtained on PET substrate
Cellulose/silver nano line/polydimethylsiloxanefilm film；
(5) second etchings: the ethyl cellulose/silver nanowires/polydimethylsiloxanefilm film is etched with nitrogen and oxygen, is carved
The erosion time is t5, obtain hydrophilic ethyl cellulose/silver nanowires/polydimethylsiloxanefilm film；
(6) preparation of top electrode: the ethyl cellulose/silver nanowires/poly dimethyl silicon is obtained through over etching in step (5)
On oxygen alkane film, then one layer of silver nanowires of spin coating, as top electrode, then by the ethyl cellulose/silver nanowires/poly- diformazan
Radical siloxane film, which is put into baking oven, dries, drying temperature T6, drying time t6, in polyethylene terephthalate base
Ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires film is obtained on bottom；At this point, top electrode and lower electrode
Preparation is completed.
5. a kind of preparation method of friction nanometer power generator according to claim 4, which is characterized in that the generator is exhausted
The coating of edge layer and the forming step of generator include:
A. ethyl cellulose/silver nanowires/polydimethylsiloxanes obtained in the top electrode and the preparation step of lower electrode
One strata urethane of spin coating on alkane/silver nanowires film, after placing 4-5h at room temperature, in PET substrate
On obtain ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires/polyurethane film；
It b. is C with concentrationbThe obtained ethyl cellulose/silver nanowires/polydimethylsiloxanes of sulfuric acid solution etching a step
Alkane/silver nanowires/polyurethane film, sulfuric acid solution etch period are tb, it is rinsed well with deionized water after etching, it is dry, directly
To water evaporating completely, the coating of the generator insulating layer is completed；
C. ethyl cellulose/silver nanowires/dimethyl silicone polymer/silver nanowires/polyurethane film b walked from
It is taken off on the PET substrate to get the friction nanometer power generator is arrived.
6. a kind of preparation method of friction nanometer power generator according to claim 5, which is characterized in that the sulfuric acid concentration
CbFor 3-5mol/L, sulfuric acid solution etch period tbFor 10-20s.
7. a kind of preparation method of friction nanometer power generator according to claim 4, which is characterized in that the ethyl cellulose
The preparation of plain solution is with volume for V0-1Methylene chloride and volume be V0-2Dehydrated alcohol be solvent, dissolution quality be m0's
Ethyl cellulose, stirring are sufficiently dissolved up to the ethyl cellulose, mixing time t0, it is fine to obtain the flaxen ethyl
Tie up plain solution.
8. a kind of preparation method of friction nanometer power generator according to claim 7, which is characterized in that the stirring when
Between t0For 4-6h；
The methylene chloride volume V0-1For 30-50ml；
The dehydrated alcohol volume V0-2For 15-25ml；
The quality m of the ethyl cellulose0For 5-9g.
9. a kind of preparation method of friction nanometer power generator according to claim 4, which is characterized in that the poly dimethyl
The preparation of siloxane solution is to mix dimethyl silicone polymer and curing agent for the ratio of 1-10:1-3 with mass ratio, and stirring is extremely
The two is sufficiently mixed, and mixing time 5-10min obtains white clear liquid, i.e., the described dimethyl silicone polymer solution；It is described
Curing agent is the prepolymer with vinyl sidechain.
10. a kind of preparation method of friction nanometer power generator according to claim 4, which is characterized in that institute in step (1)
State standing time t1For 4-5h；
Etch period t described in step (2)2For 30-60s；
Drying temperature T described in step (3)3It is 50-60 DEG C, the drying time t3For 10-15min；
Drying temperature T described in step (4)4It is 100-150 DEG C；The drying time t4For 1-3h；
Etch period t described in step (5)5For 200-300s；
Drying temperature T described in step (6)6It is 50-60 DEG C；The drying time t6For 10-15min.
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| CN202749418U (en) * | 2012-07-27 | 2013-02-20 | 纳米新能源（唐山）有限责任公司 | Nanometer generator |
| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| CN106382997A (en) * | 2016-09-18 | 2017-02-08 | 北京科技大学 | Electronic skin of friction electrostatic induction type |
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| CN202749418U (en) * | 2012-07-27 | 2013-02-20 | 纳米新能源（唐山）有限责任公司 | Nanometer generator |
| CN103411710A (en) * | 2013-08-12 | 2013-11-27 | 国家纳米科学中心 | Pressure sensor, electronic skin and touch screen equipment |
| CN106382997A (en) * | 2016-09-18 | 2017-02-08 | 北京科技大学 | Electronic skin of friction electrostatic induction type |
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