CN107591354A - A kind of print pallet for being applicable to more size prints - Google Patents
A kind of print pallet for being applicable to more size prints Download PDFInfo
- Publication number
- CN107591354A CN107591354A CN201610527381.8A CN201610527381A CN107591354A CN 107591354 A CN107591354 A CN 107591354A CN 201610527381 A CN201610527381 A CN 201610527381A CN 107591354 A CN107591354 A CN 107591354A
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- Prior art keywords
- standing groove
- pallet
- center
- tray body
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Abstract
The invention discloses a kind of print pallet for being applicable to more size prints, including tray body, the surface of the tray body offers multiple print standing grooves of sizes, one print standing groove is used for the print for carrying one piece of corresponding size, and the relative positions of adjacent two print standing grooves is mutually from, circumscribed or intersecting setting；It can be used in a variety of various sizes of prints of operation, versatile, thus operation process greatly simplifies.
Description
Technical field
The present invention relates to semiconductor and machining equipment technical field, more particularly to one kind to be applicable to more size samples
The print pallet of piece.
Background technology
In machining and semiconductor prepare industry, some processes are for example plasma-deposited, plasma etching, splash
Penetrate, material evaporation, mechanical punching, grinding etc. are required for the print for treating operation being positioned on print pallet, utilize print pallet
To carry out subsequent job.
In the prior art, as shown in Figure 1, 2, this print pallet includes tray body 1, is opened on the surface of tray body 1
If a kind of print standing groove of specification, such as the first print standing groove 2 or the second print standing groove 3.Sample is placed during operation
In in print standing groove, certain fixation is played to print using print standing groove.However, a kind of print of specification is put
Put groove and be typically only applicable to a kind of placement of the print of corresponding specification, and frequency is just needed when needing the various sizes of print of operation
Numerous pallet (load plate) for changing the print standing groove with different specification size, because the size difference of operation print is big, species
More, the pallet (load plate) that equipment needs to be equipped with multiple different fluting sizes simultaneously can meet operation needs.And in pallet
Before and after replacing, for semicon industry (such as plasma etching), it is also necessary to take a certain time and carry out a series of technique
Link is verified, can just use pallet, causes operation process complicated, pallet storing space-consuming is big.
The content of the invention
It is an object of the invention to propose a kind of print pallet for being applicable to more size prints, it is a variety of to can be used in operation
Various sizes of print, it is versatile, thus operation process greatly simplifies.
To use following technical scheme up to this purpose, the present invention：
A kind of print pallet for being applicable to more size prints, including tray body, the surface of the tray body open up
There are multiple print standing grooves of sizes, a print standing groove is used for the print for carrying one piece of corresponding size, adjacent
Two print standing grooves relative position for mutually from, circumscribed or intersecting setting.
Preferably, the bottom of multiple print standing grooves of sizes is smooth, and depth is consistent.
Preferably, the print standing groove of same size is centrally located at using the center of the tray body as the center of circle
Circumference on.
Preferably, the various sizes of print standing groove is centrally located at using the center of the tray body as the center of circle
On circumference.
Preferably, the center decile of the print standing groove of same size is using the center of the tray body as the center of circle
Circumference.
Beneficial effects of the present invention are：
The print pallet for being applicable to more size prints of the present invention, by being set in the tray body of a print pallet
Put a variety of various sizes of multiple print standing grooves, the relative positions of multiple print standing grooves can be mutually from, it is circumscribed or intersecting
Set, therefore, the print of a piece of corresponding size can be placed in a print standing groove, realized by print standing groove most basic
Sidepiece it is spacing, further, since the specification corresponding to a kind of print pallet of equipment is fixed, in the fixed dimension
On print pallet by phase from, it is circumscribed or it is intersecting a variety of different size print standing grooves can be set, it is a variety of to can be used for operation
Various sizes of print, greatly expand its application, it is versatile, thus operation process greatly simplifies.
Brief description of the drawings
Fig. 1 is the structural representation one of print pallet of the prior art.
Fig. 2 is the structural representation two of print pallet of the prior art.
Fig. 3 is a kind of structural representation of embodiment of the print pallet of the present invention.
Fig. 4 is the structural representation of another embodiment of the print pallet in Fig. 3.
Fig. 5 is cross-sectional view of the print pallet at A-A in Fig. 3.
Fig. 6 is the structural representation of another embodiment of the print pallet of the present invention.
Fig. 7 is the structural representation of another embodiment of the print pallet in Fig. 6.
Fig. 8 is the structural representation of the another embodiment of the print pallet of the present invention.
Fig. 9 is the structural representation of another embodiment of the print pallet in Fig. 8.
In figure：1- tray bodies；2- the first print standing grooves；3- the second print standing grooves.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
Embodiment one
As shown in Figure 3, Figure 4, in the present embodiment, a kind of print pallet for being applicable to more size prints, including pallet
Body 1, the surface of the tray body 1 offer multiple print standing grooves of sizes, and a print standing groove is used
In the print for carrying one piece of corresponding size, the relative positions of adjacent two print standing grooves for mutually from.
Preferably, as shown in figure 5, the bottom of multiple print standing grooves of sizes is smooth, and depth is consistent.
In actual processing, in the print standing groove of sizes, the print standing groove of same size
Placement form can specifically be adjusted according to the size and the size of itself of actual pallet body, can be regular array,
Can also irregularly arrange, and in the present embodiment, as shown in figure 3, the center of the print standing groove of same size
On the circumference using the center of the tray body 1 as the center of circle, and the center decile of the print standing groove of same size
Circumference using the center of the tray body 1 as the center of circle.
Further, the center of the various sizes of print standing groove can be located at the center of the tray body 1
On circumference for the different radii in the center of circle, it is preferred that as shown in figure 4, in the present embodiment, the various sizes of print is placed
Groove is centrally located at using the center of the tray body 1 as on the circumference in the center of circle.So arrangement can cause same size
The placement location distribution of print standing groove can also make it that the stress of whole tray body is each than more uniform after sample is put into
Aspect is all more balanced, is advantageous to follow-up working process, is also beneficial to protect tray body.
Further, the print of other sizes can be provided between the two neighboring print standing groove of same size
It standing groove, can also be not provided with, specifically to be determined according to the size of print standing groove and the size of tray body of reality.
In the present embodiment, in order to place more print standing grooves in the tray body of fixed specification, adjacent the two of same size
The print standing groove of at least one other size is provided between the individual print standing groove, in this manner it is achieved that one is big
One closely-spaced setting, so as to more efficiently utilize print pallet, reach and make full use of, avoid wasting space.
In the present embodiment, as shown in Figure 3, Figure 4, the surface of the tray body 1 offers the sample of two kinds of sizes
Piece standing groove.Specifically, the print standing groove of two kinds of sizes refers to the first print standing groove 2 and the second print standing groove 3, and
The center of one print standing groove 2 and the center of the second print standing groove 3 are using the center of tray body 1 as the same of the center of circle
On circumference；First print standing groove 2 and the second print standing groove 3 are arranged at intervals；First print standing groove 2 and the first print are placed
Between groove 2, between the first print standing groove 2 and the second print standing groove 3 and the second print standing groove 3 is put with the second print
Put between groove 3 is mutually from setting.
Embodiment two
As shown in Figure 6, Figure 7, in the present embodiment, it is with the difference of embodiment one：Described in adjacent two
Print standing groove is circumscribed setting.
Embodiment three
As shown in Figure 8, Figure 9, in the present embodiment, it is with the difference of embodiment one：Described in adjacent two
Print standing groove is set to be intersecting.
In the present invention, two kinds refer to two different dimensions, and a variety of to refer to multiple different dimensions, it is only used
In the species number of the size of the print standing groove on explanation print pallet, it is not used to limit its number.
In the present invention, the material of tray body 1 can be carborundum, metal, plastics, ceramics, aluminum oxide or aluminium nitride.
In the present invention, size (size refers to internal diameter, inner side length and width or the length of side), the depth of print standing groove are all bases
The size of actual print, thickness do not limit herein come what is determined.
In the present invention, the shape of print standing groove can be circular, square, oval or polygon, and it is according to reality
Depending on the shape of print, when print is put into print standing groove, the bottom surface of print is real with the bottom surface of corresponding print standing groove
Whole contacts, the sidepiece of print be gap setting with the sidepiece of print standing groove, thus this mode is in technique making
When be more prone to ensure technique, hence it is evident that have hanging structure type better than bottom.
In the present invention, either mutually from, circumscribed or intersecting setting when, the depth of all print standing grooves is kept
Unanimously, it so can not only reduce the multiple verification of the depth in process to each print standing groove and repeatedly process work
Sequence, it is easily worked, and is easily guaranteed that crudy, when sample is put into, also more preferably ensures the location of sample for being put into
Highly, it is easy to following process to handle, it is easier to ensure the uniformity of Product processing.
The print pallet of the present invention, it on print pallet by carrying out various sizes of fluting, so as to meet different chis
The job requirements of very little print.In the case of the fixed-area of set tray body 1, in tray body when being recessed at intersecting
Have portion coincidence, can so reach different size prints can work capacity, production capacity can also be increased；Operation difference chi
During very little print, also avoid the need for preparing multiple print pallets, save material, reduce space-consuming；In semiconductor prepares industry,
The a series of process certification link that is carried out of print pallet is changed when avoiding equipment availability difference size print, during saving
Between, it can also ensure technology stability.
The technical principle of the present invention is described above in association with specific embodiment.These descriptions are intended merely to explain the present invention's
Principle, and limiting the scope of the invention can not be construed in any way.Based on explanation herein, the technology of this area
Personnel would not require any inventive effort the other embodiments that can associate the present invention, and these modes are fallen within
Within protection scope of the present invention.
Claims (5)
1. a kind of print pallet for being applicable to more size prints, including tray body (1), it is characterised in that the pallet sheet
The surface of body (1) offers multiple print standing grooves of sizes, and a print standing groove is used to carry one piece accordingly
The print of size, the relative positions of adjacent two print standing grooves is mutually from, circumscribed or intersecting setting.
2. print pallet according to claim 1, it is characterised in that the bottom of multiple print standing grooves of sizes
Portion is smooth, and depth is consistent.
3. print pallet according to claim 1, it is characterised in that the center of the print standing groove of same size
On the circumference using the center of the tray body (1) as the center of circle.
4. print pallet according to claim 1, it is characterised in that the centre bit of the various sizes of print standing groove
In on the circumference using the center of the tray body (1) as the center of circle.
5. the print pallet according to claim 3 or 4, it is characterised in that in the print standing groove of same size
Circumference of the heart decile using the center of the tray body (1) as the center of circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610527381.8A CN107591354A (en) | 2016-07-06 | 2016-07-06 | A kind of print pallet for being applicable to more size prints |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610527381.8A CN107591354A (en) | 2016-07-06 | 2016-07-06 | A kind of print pallet for being applicable to more size prints |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107591354A true CN107591354A (en) | 2018-01-16 |
Family
ID=61045080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610527381.8A Pending CN107591354A (en) | 2016-07-06 | 2016-07-06 | A kind of print pallet for being applicable to more size prints |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107591354A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923655A (en) * | 2018-09-19 | 2020-03-27 | 苏州能讯高能半导体有限公司 | Carry thing device and coating equipment |
| WO2021121024A1 (en) * | 2019-12-16 | 2021-06-24 | 北京北方华创微电子装备有限公司 | Tray used for thin-film deposition device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102130035A (en) * | 2009-12-30 | 2011-07-20 | 塔工程有限公司 | Integrated chip tray |
| CN102242353A (en) * | 2010-05-14 | 2011-11-16 | 佛山市奇明光电有限公司 | Metal-organic chemical vapor deposition machine |
| CN102939648A (en) * | 2010-06-01 | 2013-02-20 | 松下电器产业株式会社 | Plasma processing device and plasma processing method |
| CN103165502A (en) * | 2011-12-14 | 2013-06-19 | 无锡华瑛微电子技术有限公司 | Wafer tray and wafer box |
| CN204315544U (en) * | 2015-01-16 | 2015-05-06 | 安徽三安光电有限公司 | A kind of many wafer size load plate |
| CN104743201A (en) * | 2013-12-30 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tray structure compatible with wafers of various dimensions |
| CN204644466U (en) * | 2015-02-06 | 2015-09-16 | 中微半导体设备(上海)有限公司 | Chip tray |
| CN205188476U (en) * | 2015-12-03 | 2016-04-27 | 中国科学院苏州纳米技术与纳米仿生研究所 | Sample holder dish that promotes material growth productivity and improve homogeneity |
-
2016
- 2016-07-06 CN CN201610527381.8A patent/CN107591354A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102130035A (en) * | 2009-12-30 | 2011-07-20 | 塔工程有限公司 | Integrated chip tray |
| CN102242353A (en) * | 2010-05-14 | 2011-11-16 | 佛山市奇明光电有限公司 | Metal-organic chemical vapor deposition machine |
| CN102939648A (en) * | 2010-06-01 | 2013-02-20 | 松下电器产业株式会社 | Plasma processing device and plasma processing method |
| CN103165502A (en) * | 2011-12-14 | 2013-06-19 | 无锡华瑛微电子技术有限公司 | Wafer tray and wafer box |
| CN104743201A (en) * | 2013-12-30 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tray structure compatible with wafers of various dimensions |
| CN204315544U (en) * | 2015-01-16 | 2015-05-06 | 安徽三安光电有限公司 | A kind of many wafer size load plate |
| CN204644466U (en) * | 2015-02-06 | 2015-09-16 | 中微半导体设备(上海)有限公司 | Chip tray |
| CN205188476U (en) * | 2015-12-03 | 2016-04-27 | 中国科学院苏州纳米技术与纳米仿生研究所 | Sample holder dish that promotes material growth productivity and improve homogeneity |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110923655A (en) * | 2018-09-19 | 2020-03-27 | 苏州能讯高能半导体有限公司 | Carry thing device and coating equipment |
| WO2021121024A1 (en) * | 2019-12-16 | 2021-06-24 | 北京北方华创微电子装备有限公司 | Tray used for thin-film deposition device |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180116 |
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| RJ01 | Rejection of invention patent application after publication |