CN107583902A - Wiper mechanism and cleaning machine for the swinging drive mechanism of cleaning machine - Google Patents
Wiper mechanism and cleaning machine for the swinging drive mechanism of cleaning machine Download PDFInfo
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- CN107583902A CN107583902A CN201710743851.9A CN201710743851A CN107583902A CN 107583902 A CN107583902 A CN 107583902A CN 201710743851 A CN201710743851 A CN 201710743851A CN 107583902 A CN107583902 A CN 107583902A
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- drive mechanism
- swinging drive
- cleaning machine
- chamber
- nozzle
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Abstract
The invention provides a kind of wiper mechanism of the swinging drive mechanism for cleaning machine, including the nozzle on the chamber of swinging drive mechanism, the water inlet end being connected with nozzle, the discharge outlet located at swinging drive mechanism lower end, the nozzle is oppositely arranged with swinging drive mechanism, and the water inlet end is outside chamber.Present invention also offers a kind of cleaning machine, include the wiper mechanism of the described swinging drive mechanism for cleaning machine.Compared with prior art, by setting wiper mechanism in swinging drive mechanism, cam disc is cleaned by nozzle, the crystal so as to timely will be attached on cam disc cleans out, and prevents the erosion to parts such as cam discs, increases the service life；Using automatic cleaning, so as to save cleaning cost；And crystallization can be avoided to be attached to again on substrate, there is provided the yield of product.
Description
Technical field
The present invention relates to the cleaning machine of a kind of display panel technology, particularly a kind of swinging drive mechanism for cleaning machine
Structure and cleaning machine.
Background technology
In LTPS (Low Temperature Poly-silicon, low temperature polycrystalline silicon) procedure for producing, (laser moves back ELA
Fire)/CVD (chemical vapor deposition)/PVD (physical vapour deposition (PVD)) processing procedure before can to substrate carry out film forming before cleaning, so
Just need increase film forming before cleaning equipment, because cleaning equipment mechanism film forming and crystallization pretreatment unit (HF unit) use be present
In the swinging drive mechanism (Pipe OSC Driver) of driving nozzle pipe, this mechanism causes drive division because of genuine design defect
Part is frequently present of crystal corrosion phenomenon, causes part to be easily damaged, and crystal floats can influence product yield into equipment；But also need
Often the part of swinging drive mechanism is changed, so as to improve use cost.
The content of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of wiper mechanism of swinging drive mechanism for cleaning machine
And cleaning machine, realize swinging drive mechanism can automated cleaning, save cleaning cost, the elongate member life-span.
The invention provides a kind of wiper mechanism of the swinging drive mechanism for cleaning machine, including located at waving driving machine
Nozzle on the chamber of structure, the water inlet end being connected with nozzle, the discharge outlet located at swinging drive mechanism lower end, the nozzle is with shaking
Pendulum drive mechanism is oppositely arranged, and the water inlet end is outside chamber.
Further, the lower surface of the chamber is inclined-plane.
Further, the discharge outlet is positioned close at the minimum point on inclined-plane.
Further, the inclined-plane is provided with the water fender that is vertically arranged, and water fender is located at the minimum of discharge outlet and inclined-plane
Between point.
Further, the nozzle is located at the cam disc position corresponding section with swinging drive mechanism.
Further, the water inlet end is with externally threaded nipple.
Further, the row being connected with discharge outlet is provided with the outer surface of the lower surface of the chamber at discharge outlet
Water end (W.E.).
Further, the discharge ends are with externally threaded nipple.
Present invention also offers a kind of cleaning machine, including the chamber located at substrate carrying mechanism side, set in the chamber
There is a swinging drive mechanism, the side wall of the rocking arm of the swinging drive mechanism from chamber towards substrate carrying mechanism is stretched out, and is also wrapped
Include the wiper mechanism of the described swinging drive mechanism for cleaning machine.
Further, the inclined-plane be from side of the chamber away from substrate carrying mechanism towards substrate carrying mechanism side height
Successively decrease successively.
The present invention compared with prior art, by setting wiper mechanism in swinging drive mechanism, by nozzle to cam
Disk is cleaned, and the crystal so as to timely will be attached on cam disc cleans out, and is prevented to parts such as cam discs
Corrode, increase the service life；Using automatic cleaning, so as to save cleaning cost；And crystallization can be avoided to be attached to again
On substrate, there is provided the yield of product.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is sectional views of the Fig. 1 along A-A directions；
Fig. 3 is the signal of cleaning process of the present invention.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
As depicted in figs. 1 and 2, the wiper mechanism of a kind of swinging drive mechanism for cleaning machine of the invention, including set
In the nozzle 2 on the chamber 1 of swinging drive mechanism, the water inlet end 3 being tightly connected with nozzle 2, located at swinging drive mechanism lower end
Discharge outlet 4, the nozzle 2 is oppositely arranged with swinging drive mechanism, and the water inlet end 3 is outside chamber 1；Specifically, intake
End 3 is connected with the DI of factory service, its access for high purity water (DI) cleaning agent, correspondingly, waste liquid caused by cleaning and impurity
The sour row pipeline that factory service can be drained into by pipeline through discharge outlet 4 is collected；It is located at draining on the outer surface of the lower surface of chamber 1
The discharge ends 6 being tightly connected with discharge outlet 4 are provided with mouth 4；The discharge ends 6 are with externally threaded nipple, water inlet end 3
For with externally threaded nipple.By said mechanism, swinging drive mechanism can be cleaned automatically, can not only be kept away
Exempt from erosion of the crystallization to the part of swinging drive mechanism, reduce use cost；And without manually being cleaned, also save clear
Clean cost.
The setting quantity of nozzle 2 can be configured according to being actually needed in the present invention, so as to ensure the effect of cleaning, this hair
It is bright to be not especially limited herein.
As shown in figure 1, the lower surface of chamber 1 is inclined-plane, discharge outlet 4 is positioned close at the minimum point on inclined-plane, so as to
It is enough that waste liquid caused by cleaning and impurity are guided, improve drainage effect.
As shown in figure 1, being provided with the water fender 5 being vertically arranged on inclined-plane, water fender 5 is located at discharge outlet 4 and inclined-plane most
Between low spot, prevent water from pouring in down a chimney in base-plate cleaning room and water is accumulated at the minimum point on inclined-plane.
In the present invention, nozzle 2 is preferably disposed at the cam disc position corresponding section with swinging drive mechanism, so as to improve
To the cleaning performance of cam disc.
As a kind of exemplary embodiment of the present invention, as depicted in figs. 1 and 2, chamber 1 is a rectangular box-shaped structure,
Chamber 1 is the chamber of sealing, and chamber 1 includes 6 faces, and the motor output shaft for supplying swinging drive mechanism including one stretches into chamber
Front end face 11 in 1, respectively four faces (upper surface 12, lower surface 13, left side 14, right side 15) adjacent with front end face 11
And the rear end face (not shown) relative with the first face 11, wherein, nozzle 2 and water inlet end 3 are respectively arranged on upper surface 12
Inner surface and outer surface on, nozzle 2 is mutually threadedly coupled with water inlet end 3 by the hole on upper surface 12；Under
End face 13 is inclined-plane, and discharge outlet 4 and discharge ends 6 are respectively arranged on the inner surface and outer surface of lower surface 13, draining
End 6 is threadedly coupled with discharge outlet 4；But the invention is not restricted to this, discharge ends 6 and water inlet end 3 can be by the sides that heat or weld
Formula is connected.
As depicted in figs. 1 and 2, cleaning machine of the invention includes the chamber 1 located at the side of substrate carrying mechanism 8, the chamber
It is provided with swinging drive mechanism in room 1, the side wall of the rocking arm 91 of the swinging drive mechanism from chamber 1 towards substrate carrying mechanism
Stretch out, the cleaning machine also includes the wiper mechanism of the swinging drive mechanism for cleaning machine, and the wiper mechanism includes being located at
Nozzle 2 on the chamber 1 of swinging drive mechanism, the water inlet end 3 being tightly connected with nozzle 2, located at swinging drive mechanism lower end
Discharge outlet 4, the nozzle 2 are oppositely arranged with swinging drive mechanism, and the water inlet end 3 is outside chamber 1；Specifically, water inlet end 3
Be connected with the DI of factory service, its access for high purity water (DI), correspondingly, waste liquid caused by cleaning and impurity can be through discharge outlet
The 4 sour row pipelines that factory service is drained into by pipeline are collected；It is provided with the outer surface of the lower surface of chamber 1 at discharge outlet 4
The discharge ends 6 being tightly connected with discharge outlet 4；The discharge ends 6 are that water inlet end 3 is with outer with externally threaded nipple
The nipple of screw thread.By said mechanism, swinging drive mechanism can be cleaned automatically, crystallization pair can not only be avoided
The erosion of the part of swinging drive mechanism, reduce use cost；And without manually being cleaned, also save cleaning cost.
Swinging drive mechanism is for driving pipeline the circumferentially rotating along pipeline provided with nozzle, waving driving in the present invention
Mechanism includes a motor 92, the cam disc 93 with the output axis connection of motor 92, with shaking for the eccentric axis connection on cam disc 93
Arm 91.
The setting quantity of nozzle 2 can be configured according to being actually needed in the present invention, so as to ensure the effect of cleaning, this hair
It is bright to be not especially limited herein.
As shown in figure 1, the lower surface of chamber 1 is inclined-plane, discharge outlet 4 is positioned close at the minimum point on inclined-plane, specifically,
The inclined-plane is to successively decrease successively from side of the chamber 1 away from substrate carrying mechanism towards substrate carrying mechanism side height.So as to
It is enough that waste liquid caused by cleaning and impurity are guided, improve drainage effect.
As shown in figure 1, being provided with the water fender 5 being vertically arranged on inclined-plane, water fender 5 is located at discharge outlet 4 and inclined-plane most
Between low spot, prevent water from pouring in down a chimney in base-plate cleaning room and water is accumulated at the minimum point on inclined-plane.
In the present invention, nozzle 2 be preferably disposed at the position corresponding section of the cam disc of swinging drive mechanism 93, so as to improve
To the cleaning performance of cam disc 93.
As a kind of exemplary embodiment of the present invention, as depicted in figs. 1 and 2, chamber 1 is a rectangular box-shaped structure,
Chamber 1 is the chamber of sealing, and chamber 1 includes 6 faces, and the output shaft of motor 92 for supplying swinging drive mechanism including one stretches into chamber
Front end face 11 in room 1, respectively four faces (upper surface 12, lower surface 13, left side 14, the right side adjacent with front end face 11
15) and the rear end face (not shown) relative with the first face 11, wherein, nozzle 2 and water inlet end 3 are respectively arranged on upper surface
On 12 inner surface and outer surface, nozzle 2 is mutually threadedly coupled with water inlet end 3 by the hole on upper surface 12；
Lower surface 13 is inclined-plane, and discharge outlet 4 and discharge ends 6 are respectively arranged on the inner surface and outer surface of lower surface 13, row
Water end (W.E.) 6 is threadedly coupled with discharge outlet 4；Right side 15 is relative with substrate carrying mechanism；But the invention is not restricted to this, discharge ends 6 with
And water inlet end 3 can be connected by way of heating or welding；The groove stretched out for rocking arm 91 is provided with right side 15
151, vertical direction of the groove 151 along right side 15 is set, and cut-off hairbrush 94 is respectively equipped with the cell wall of groove 151.
As shown in figure 3, when being cleaned to swinging drive mechanism, cleaning agent that nozzle 2 sprays to cam disc 93 and
The grade part of rocking arm 91 is rinsed, and also the inner chamber of chamber 1 is rinsed, and the waste liquid and crystallization after flushing are carried away to lower end
On face 13, by the guiding of incline direction, waste liquid is discharged with crystallizing through discharge outlet 4 from discharge ends 6, is completed to swinging drive mechanism
Cleaning.
Preferably, water inlet end 3 is 1/4 Inches Thread joint to one kind as the present invention；Discharge ends are that 3/8 Inches Thread connects
Head.
Although the present invention has shown and described with reference to specific embodiment, it should be appreciated by those skilled in the art that：
In the case where not departing from the spirit and scope of the present invention limited by claim and its equivalent, can carry out herein form and
Various change in details.
Claims (10)
1. a kind of wiper mechanism of swinging drive mechanism for cleaning machine, including on the chamber (1) of swinging drive mechanism
Nozzle (2), be connected with nozzle (2) water inlet end (3), the discharge outlet (4) located at swinging drive mechanism lower end, the nozzle
(2) it is oppositely arranged with swinging drive mechanism, the water inlet end (3) is located at chamber (1) outside.
2. the wiper mechanism of the swinging drive mechanism according to claim 1 for cleaning machine, it is characterised in that：The chamber
The lower surface of room (1) is inclined-plane.
3. the wiper mechanism of the swinging drive mechanism according to claim 2 for cleaning machine, it is characterised in that：The row
The mouth of a river (4) is positioned close at the minimum point on inclined-plane.
4. the wiper mechanism of the swinging drive mechanism according to claim 3 for cleaning machine, it is characterised in that：It is described oblique
Face is provided with the water fender (5) being vertically arranged, and water fender (5) is located at discharge outlet (4) between the minimum point on inclined-plane.
5. the wiper mechanism of the swinging drive mechanism according to claim 4 for cleaning machine, it is characterised in that：The spray
Mouth (2) is located at the cam disc position corresponding section with swinging drive mechanism.
6. the wiper mechanism of the swinging drive mechanism according to claim 1 for cleaning machine, it is characterised in that：It is described enter
Water end (W.E.) (3) is with externally threaded nipple.
7. the wiper mechanism of the swinging drive mechanism according to claim 1 for cleaning machine, it is characterised in that：The chamber
The discharge ends (6) being connected with discharge outlet (4) are provided with the outer surface of the lower surface of room (1) positioned at discharge outlet (4) place.
8. it is used for the wiper mechanism of the swinging drive mechanism of cleaning machine according to claim 7, it is characterised in that：The draining
It is with externally threaded nipple to hold (6).
9. a kind of cleaning machine, including the chamber (1) located at substrate carrying mechanism side, interior be provided with of the chamber (1) waves driving
Mechanism (9), the side wall of the rocking arm (91) of the swinging drive mechanism (9) from chamber (1) towards substrate carrying mechanism are stretched out, its
It is characterised by：Also include the wiper mechanism of the swinging drive mechanism for cleaning machine as described in claim 1-8 any one.
10. cleaning machine according to claim 9, it is characterised in that：The inclined-plane is away from basal plate conveyer from chamber (1)
Successively decrease successively towards substrate carrying mechanism side height the side of structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710743851.9A CN107583902A (en) | 2017-08-25 | 2017-08-25 | Wiper mechanism and cleaning machine for the swinging drive mechanism of cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710743851.9A CN107583902A (en) | 2017-08-25 | 2017-08-25 | Wiper mechanism and cleaning machine for the swinging drive mechanism of cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107583902A true CN107583902A (en) | 2018-01-16 |
Family
ID=61043086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710743851.9A Pending CN107583902A (en) | 2017-08-25 | 2017-08-25 | Wiper mechanism and cleaning machine for the swinging drive mechanism of cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107583902A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7775222B2 (en) * | 2007-10-11 | 2010-08-17 | Semes Co., Ltd. | Single substrate cleaning apparatus and method for cleaning backside of substrate |
| CN203076249U (en) * | 2013-02-17 | 2013-07-24 | 滕州市智星电力电子工程有限公司 | Electrified insulating cleaning device of ultra-high-voltage transmission line |
| CN203648887U (en) * | 2013-11-14 | 2014-06-18 | 河南海能电力科技有限公司 | Enhanced round disc sweeping brush |
| CN205110217U (en) * | 2015-10-27 | 2016-03-30 | 天津东江食品有限公司 | Water -saving earthworm belt cleaning device |
| CN205308908U (en) * | 2015-12-06 | 2016-06-15 | 天津市惠德可科技有限公司 | Experimental facilities belt cleaning device |
| CN205797854U (en) * | 2016-05-18 | 2016-12-14 | 吉安市满坤科技有限公司 | A kind of novel PCB printing ink cleaning machine |
| CN106985025A (en) * | 2017-05-14 | 2017-07-28 | 合肥鼎鑫模具有限公司 | Mold polishing cleaning equipment |
-
2017
- 2017-08-25 CN CN201710743851.9A patent/CN107583902A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7775222B2 (en) * | 2007-10-11 | 2010-08-17 | Semes Co., Ltd. | Single substrate cleaning apparatus and method for cleaning backside of substrate |
| CN203076249U (en) * | 2013-02-17 | 2013-07-24 | 滕州市智星电力电子工程有限公司 | Electrified insulating cleaning device of ultra-high-voltage transmission line |
| CN203648887U (en) * | 2013-11-14 | 2014-06-18 | 河南海能电力科技有限公司 | Enhanced round disc sweeping brush |
| CN205110217U (en) * | 2015-10-27 | 2016-03-30 | 天津东江食品有限公司 | Water -saving earthworm belt cleaning device |
| CN205308908U (en) * | 2015-12-06 | 2016-06-15 | 天津市惠德可科技有限公司 | Experimental facilities belt cleaning device |
| CN205797854U (en) * | 2016-05-18 | 2016-12-14 | 吉安市满坤科技有限公司 | A kind of novel PCB printing ink cleaning machine |
| CN106985025A (en) * | 2017-05-14 | 2017-07-28 | 合肥鼎鑫模具有限公司 | Mold polishing cleaning equipment |
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Application publication date: 20180116 |
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| WD01 | Invention patent application deemed withdrawn after publication |