CN107576718A - The measuring system and measuring method of impurity concentration in a kind of solid - Google Patents
The measuring system and measuring method of impurity concentration in a kind of solid Download PDFInfo
- Publication number
- CN107576718A CN107576718A CN201711020108.7A CN201711020108A CN107576718A CN 107576718 A CN107576718 A CN 107576718A CN 201711020108 A CN201711020108 A CN 201711020108A CN 107576718 A CN107576718 A CN 107576718A
- Authority
- CN
- China
- Prior art keywords
- magnetic
- solid
- measured
- spinning electron
- magnetic sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
The present invention relates to the measuring system and measuring method of impurity concentration in a kind of solid, measuring system includes：Spinning electron magnetic sensor, magnetic field source, controller and pressure magnetic converter, magnetic field source and solid to be measured are separately positioned on the relative both sides of spinning electron magnetic sensor；Pressure magnetic converter is arranged between solid and spinning electron magnetic sensor to be measured；Magnetic field source is adsorbed into pressure conversion caused by solid to be measured is magnetic signal to pressure magnetic converter, and by magnetic signals to spinning electron magnetic sensor；Magnetic signal is converted to electric signal and sent to controller by spinning electron magnetic sensor；Controller be worth according to corresponding to electric signal and the initial electrical signal of spinning electron magnetic sensor corresponding to value, and the corresponding relation of value and impurity concentration in solid corresponding to default electric signal determines the concentration value of impurity in solid to be measured.The present invention is simple to operate, it is easy to accomplish, and detection efficiency and accuracy of detection can be improved.
Description
Technical field
The present invention relates to a kind of measurement system of impurity concentration in the technical field of field quantum sensor, more particularly to solid
System and measuring method.
Background technology
NV in diamond–For colour center as the emission defects in solid, its concentration directly influences the essence of its quantum sensing
Degree.Existing Concentration Testing generally use fluorescence intensity PL (Photoluminescence) detection methods and optical detection magnetic are total to
Shake ODMR (Optical detection of magnetic resonance) detection method.
However, being detected using above-mentioned optical means, first, diamond shapes cause light to scatter, the scattering triggered
Angle can form fiber waveguide effect, and the foreign particle for being not desired to measurement can be touched when reflecting again, there is new NV colour center meetings
Repeatedly excited.Because scattering behavior therein and fiber waveguide behavior cause its measurement uneven.Secondly, in enriched sample
N, C content are higher, but the two size quality is different, so having stress, and then becomes polycrystalline from monocrystalline, causes refractive index
It can change, be more favorable for the generation of scattering, so as to also unnecessary impurity be caused to be mapped to.Finally, due to colour center
Between mutually block, cause to be excited completely, so cause NV colour centers effusion photon acquisition rate it is too low, to single
The tens thousand of detections repeated of reading needs of spin, accuracy of detection be not high.And because of optics in itself with diamond refractive index all
The efficiency of detection is limited, so the operation of this detection method is relatively complicated.
The content of the invention
The technical problems to be solved by the invention are in view of the shortcomings of the prior art, there is provided impurity concentration in a kind of solid
Measuring system and measuring method.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：The measuring system of impurity concentration in a kind of solid, bag
Include：Spinning electron magnetic sensor, magnetic field source, controller and pressure magnetic converter, wherein,
The magnetic field source and solid to be measured are separately positioned on the relative both sides of the spinning electron magnetic sensor,
The solid to be measured can not produce magnetic field in itself；
The pressure magnetic converter is arranged between the solid to be measured and the spinning electron magnetic sensor；
The magnetic field source is adsorbed pressure conversion caused by the solid to be measured by the pressure magnetic converter to be believed for magnetic
Number, and by the magnetic signals to the spinning electron magnetic sensor；
The magnetic signal is converted to electric signal and sent to controller by the spinning electron magnetic sensor；
The controller is worth according to corresponding to the electric signal and the initial electrical signal of the spinning electron magnetic sensor
Corresponding value, and the corresponding relation of value and impurity concentration in solid corresponding to default electric signal, are determined described to be measured solid
The concentration value of impurity in body.
The beneficial effects of the invention are as follows：By the way that magnetic field source and solid to be measured are separately positioned on into spinning electron magnetic
The relative both sides of sensor, and will using the pressure magnetic converter being arranged between solid and spinning electron magnetic sensor to be measured
Pressure conversion caused by iron absorption solid to be measured is magnetic signal, and magnetic signal is converted to telecommunications by spinning electron magnetic sensor
Number, further according to the corresponding relation of value and impurity concentration in solid to be measured corresponding to electric signal, it is possible to determine to be measured solid
The concentration value of impurity in body, it is simple to operate when being measured using the measuring system to the concentration value of impurity in solid to be measured,
It is easily achieved, and detection efficiency and accuracy of detection can be improved.In addition, the measuring system has hypersensitivity and is easy to miniaturization etc.
Advantage, size is small, has high spatial resolution, suitable for high accuracy, high efficient detection field.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement.
Further, the spinning electron magnetic sensor includes：Substrate, it is arranged at least one of the substrate surface
Spin electric device and electrode, the electrode are connected with the controller.
It is using the above-mentioned further beneficial effect of scheme：
Further, each spin electric device is giant magnetoresistance magnetic sensor or magnetic funnel node device.
Further, the pressure magnetic converter is the pressure magnetic transition material for being attached to the giant magnetoresistance surface.
Further, value includes resistance value, magnitude of voltage and current value corresponding to the electric signal.
Further, the magnetic field source is permanent magnet or electromagnet.
The another technical solution that the present invention solves above-mentioned technical problem is as follows：The measurement side of impurity concentration in a kind of solid
Method, methods described include：
By solid to be measured by pressing magnetic converter to be arranged on the side of spinning electron magnetic sensor, and magnetic field is occurred
Source is arranged on the opposite side relative with the side, and the solid to be measured can not produce magnetic field in itself；
The magnetic field source is adsorbed pressure conversion caused by the solid to be measured by the pressure magnetic converter to be believed for magnetic
Number, and by the magnetic signals to the spinning electron magnetic sensor；
Magnetic signal is converted to electric signal transmission to controller by the spinning electron magnetic sensor, and the magnetic signal is institute
State what pressure magnetic converter pressure conversion according to caused by the magnetic field source adsorbs the solid to be measured obtained；
The controller is worth according to corresponding to the electric signal and the initial electrical signal of the spinning electron magnetic sensor
Corresponding value, and the corresponding relation of value and impurity concentration in solid to be measured corresponding to default electric signal, it is determined that described treat
Measure the concentration value of impurity in solid.
The beneficial effects of the invention are as follows：By the way that magnetic field source and solid to be measured are separately positioned on into spinning electron magnetic
The relative both sides of sensor, and will using the pressure magnetic converter being arranged between solid and spinning electron magnetic sensor to be measured
Pressure conversion caused by iron absorption solid to be measured is magnetic signal, and magnetic signal is converted to telecommunications by spinning electron magnetic sensor
Number, further according to the corresponding relation of value and impurity concentration in solid to be measured corresponding to electric signal, it is possible to determine to be measured solid
The concentration value of impurity in body, this measuring method are simple to operate, it is easy to accomplish, and detection efficiency and accuracy of detection can be improved, fit
For high accuracy, high efficient detection field.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement.
Further, by the solid to be measured by pressing magnetic converter to be arranged on the one of spinning electron magnetic sensor
Before side, methods described also includes：
The controller obtains the initial electrical signal of the spinning electron magnetic sensor.
Further, value includes resistance value, magnitude of voltage and current value corresponding to the electric signal.
The advantages of aspect that the present invention adds, will be set forth in part in the description, and will partly become from the following description
Obtain substantially, or recognized by present invention practice.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to the embodiment of the present invention or prior art
The required accompanying drawing used is briefly described in description, it should be apparent that, drawings described below is only the present invention's
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other accompanying drawings.
Fig. 1 is the structural representation of the measuring system of impurity concentration in a kind of solid of one embodiment of the present of invention offer
Figure；
Fig. 2 is the cross-sectional view of the spinning electron magnetic sensor shown in Fig. 1；
Fig. 3 is the schematic flow of the measuring method of impurity concentration in a kind of solid of one embodiment of the present of invention offer
Figure；
Fig. 4 is the schematic stream of the measuring method of impurity concentration in a kind of solid of an alternative embodiment of the invention offer
Cheng Tu；
Fig. 5 is the schematic stream of the measuring method of impurity concentration in a kind of solid of an alternative embodiment of the invention offer
Cheng Tu.
Reference implication is in figure：1 is magnetic field source, and 2 be controller, and 3 be solid to be measured, and 4 be pressure magnetic conversion
Device, 5 be spinning electron magnetic sensor, and 51 be substrate, and 52 be spin electric device, and 53 be electrode.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is the part of the embodiment of the present invention, rather than whole embodiments.Based on this hair
Embodiment in bright, the every other reality that those of ordinary skill in the art are obtained on the premise of creative work is not made
Example is applied, should all belong to the scope of protection of the invention.
The measuring system of impurity concentration includes in a kind of solid as shown in Figure 1：Spinning electron magnetic sensor 5, magnetic field
Occurring source 1, controller 2 and pressure magnetic converter 4.Wherein,
Magnetic field source 1 and solid to be measured 3 are separately positioned on the relative both sides of spinning electron magnetic sensor 5.Press magnetic
Converter 4 is arranged between solid 3 and spinning electron magnetic sensor 5 to be measured.Pressure magnetic converter 4 inhales magnetic field source 1
Pressure conversion caused by attached solid to be measured 3 is magnetic signal, and by magnetic signals to spinning electron magnetic sensor 5.
Magnetic signal is converted to electric signal and sent to controller 2 by spinning electron magnetic sensor 5.Controller 2 is according to telecommunications
It is worth corresponding to value corresponding to number and the initial electrical signal of spinning electron magnetic sensor 2, and is worth corresponding to default electric signal
With the corresponding relation of impurity concentration in solid, the concentration value of impurity in solid 3 to be measured is determined.
Specifically, in this embodiment, it is outer by sensing because spinning electron magnetic sensor itself is sensitive to magnetic signal
Boundary's magnetic signal, which changes its resistance value, can also change.The R-H relation curves changed according to the change of resistance and magnetic signal can be with
Calculate magnetic signal change size., can be by magnetic field source and to be measured in the concentration of impurity in measuring solid to be measured
Amount solid is separately positioned on the relative both sides of spinning electron magnetic sensor, and in solid to be measured and spinning electron magnetic transducing
Pressure magnetic converter is set between device, is magnetic signal iron is adsorbed into pressure conversion caused by solid to be measured.Spinning electron magnetic
Property sensor is converted to the change of the magnetic signal sensed the change of electric signal, and the electric signal after change is sent to control
Device, so as to controller be worth according to corresponding to the electric signal and the initial electrical signal of spinning electron magnetic sensor corresponding to value, with
And it is worth the corresponding relation with impurity concentration in solid corresponding to default electric signal, determine the concentration of impurity in solid to be measured
Value.
Based on the measuring system of the solid impurities concentration in above-described embodiment, by by magnetic field source and to be measured
Solid is separately positioned on the relative both sides of spinning electron magnetic sensor, and utilizes and be arranged on solid to be measured and spinning electron magnetic
It is magnetic signal that iron is adsorbed pressure conversion caused by solid to be measured by the pressure magnetic converter between property sensor, spinning electron magnetic
Magnetic signal is converted to electric signal by sensor, the corresponding pass further according to value corresponding to electric signal with impurity concentration in solid to be measured
System, it is possible to determine the concentration value of impurity in solid to be measured, using the measuring system in solid to be measured impurity it is dense
It is simple to operate when angle value measures, it is easy to accomplish, and detection efficiency and accuracy of detection can be improved.In addition, the measuring system has
Hypersensitivity and the advantages that be easy to miniaturization, size is small, has high spatial resolution, suitable for high accuracy, efficient
Rate detection field.
Specifically, in this embodiment, magnetic field source can be permanent magnet or electromagnet.Corresponding to electric signal
Value includes resistance value, magnitude of voltage and current value.
Alternatively, in one embodiment of the invention, as shown in Fig. 2 spinning electron magnetic sensor includes：Substrate,
At least one spin electric device and electrode of substrate surface are arranged on, electrode is connected with controller.
Specifically, in this embodiment, each spin electric device can be giant magnetoresistance magnetic sensor or magnetic tunnel
Junction device.Wherein, the thickness of giant magneto-resistance sensor is that hundred nanometer scales or hundred micron dimensions, the embodiment of the present invention are not done to this
Any restriction.
It should be noted that in this embodiment, substrate can be understood as silicon chip, then spin electric device is spinning electron
Sensing unit.Or substrate is not it can be appreciated that the device of immobilising device, the embodiment of the present invention do any restriction to this.
Alternatively, in another embodiment of the present invention, pressure magnetic converter is that the pressure magnetic for being attached to giant magnetoresistance surface turns
Conversion materials.For example, in this embodiment, pressure magnetic transition material can be the ferrite material using magnetostrictive effect as application principle
Material, permalloy, silicon steel sheet, amorphous alloy etc., the embodiment of the present invention does not do any restriction to this.
Below using magnetic field source as electromagnet, using solid to be measured to contain NV–The diamond of colour center, with electric signal pair
For the value answered exemplified by resistance value, technical scheme to be described in detail, it is necessary to which explanation is, this is only to illustrate
Illustrate, any restriction is not formed to the embodiment of the present invention.
Electromagnet and diamond are separately positioned on the relative both sides of spinning electron magnetic sensor.Pressure magnetic converter is arranged on
Between diamond and spinning electron magnetic sensor.Magnetic converter is pressed to believe pressure conversion caused by magnet adsorption diamond for magnetic
Number, and by magnetic signals to spinning electron magnetic sensor.
Resistance value based on magnetic signal spinning electron magnetic sensor changes, and by the resistance value after change send to
Controller.Controller determines resistance difference according to initial resistivity value and resistance value, and resistance difference and corresponding relation are carried out
Match somebody with somebody, to determine NV in diamond–The concentration value of colour center.
Specifically, in this embodiment, before the concentration of impurity in measuring diamond, controller can obtain spin electricity
The initial resistivity value of sub- magnetic sensor, in the concentration of impurity in measuring diamond, electromagnet and diamond are set respectively
In the relative both sides of spinning electron magnetic sensor, and pressure magnetic conversion is set between diamond and spinning electron magnetic sensor
Device, to be magnetic signal by pressure conversion caused by iron absorption diamond.Spinning electron magnetic sensor believes the magnetic sensed
Number change be converted to the change of resistance value, and the resistance value after change is sent to controller, controller is then according to the resistance
Value and the initial resistivity value obtained, determine resistance difference, then by the resistance difference and default resistance value and NV in diamond–
The corresponding relation of color center concentration is matched, so that it is determined that going out NV in diamond to be measured–The concentration value of colour center.
It should be understood that it is current value or magnitude of voltage to be also based on value corresponding to electric signal, and magnitude of voltage with it is miscellaneous in solid
The corresponding relation of matter concentration, the concentration value of impurity in solid to be measured is determined, it is specific to determine in method and above-described embodiment
Describe it is similar, it is succinct for description, will not be repeated here.
Above in association with Fig. 1 and Fig. 2, the measurement system of solid impurities concentration according to embodiments of the present invention is described in detail
System, with reference to Fig. 3 to Fig. 5, the measuring method of solid impurities concentration according to embodiments of the present invention is described in detail.
As shown in figure 3, in a kind of solid impurity concentration measuring method 100, including：
110th, solid to be measured is arranged on the side of spinning electron magnetic sensor by pressing magnetic converter, and by magnetic field
Occurring source is arranged on the opposite side relative with side.Wherein, solid to be measured can not produce magnetic field in itself.
120th, magnetic field source is adsorbed into pressure conversion caused by solid to be measured is magnetic signal to pressure magnetic converter, and by magnetic
Signal is transmitted to spinning electron magnetic sensor.
130th, magnetic signal is converted to electric signal transmission to controller by spinning electron magnetic sensor.Wherein, magnetic signal is
Pressure magnetic converter pressure conversion according to caused by magnetic field source adsorbs solid to be measured obtains.
140th, controller be worth according to corresponding to electric signal and the initial electrical signal of spinning electron magnetic sensor corresponding to value,
And the corresponding relation of value and impurity concentration in solid to be measured corresponding to default electric signal, determine impurity in solid to be measured
Concentration value.
Based on the measuring method of the solid impurities concentration in above-described embodiment, by by magnetic field source and to be measured
Solid is separately positioned on the relative both sides of spinning electron magnetic sensor, and utilizes and be arranged on solid to be measured and spinning electron magnetic
It is magnetic signal that iron is adsorbed pressure conversion caused by solid to be measured by the pressure magnetic converter between property sensor, spinning electron magnetic
Magnetic signal is converted to electric signal by sensor, the corresponding pass further according to value corresponding to electric signal with impurity concentration in solid to be measured
System, it is possible to determine the concentration value of impurity in solid to be measured, this measuring method is simple to operate, it is easy to accomplish, and can carry
High detection efficiency and accuracy of detection, suitable for high accuracy, high efficient detection field.
Alternatively, in one embodiment of the invention, as shown in figure 4, before step 110, method 100 also includes：
150th, controller obtains the initial electrical signal of spin electro-magnetic sensor.
That is, before the concentration of impurity in measuring solid to be measured, controller can obtain spin electro-magnetic
The initial electrical signal of sensor, when the measurement of concetration of impurity in solid to be measured, controller can is according to electric signal pair
Value corresponding to the value and initial electrical signal answered, and pair of value and impurity concentration in solid to be measured corresponding to default electric signal
It should be related to, determine the concentration value of impurity in solid to be measured.
Specifically, in this embodiment, value corresponding to electric signal can be one in resistance value, magnitude of voltage and current value
Kind.
For example, in another embodiment of the present invention, so that value is resistance value corresponding to electric signal as an example, as shown in Figure 5
A kind of measuring method 200 of solid impurities concentration, including：
210th, solid to be measured is arranged on the side of spinning electron magnetic sensor by pressing magnetic converter, and by magnetic field
Occurring source is arranged on the opposite side relative with side.Wherein, solid to be measured can not produce magnetic field in itself.
220th, magnetic field source is adsorbed into pressure conversion caused by solid to be measured is magnetic signal to pressure magnetic converter, and by magnetic
Signal is transmitted to spinning electron magnetic sensor.
230th, magnetic signal is converted to electric signal transmission to controller by spinning electron magnetic sensor.Wherein, magnetic signal is
Pressure magnetic converter pressure conversion according to caused by magnetic field source adsorbs solid to be measured obtains.Value corresponding to electric signal is electricity
Pressure value.
241st, controller determines resistance difference according to initial resistivity value and resistance value.
242nd, controller is matched resistance difference with default resistance value with the corresponding relation of impurity concentration in solid.
243rd, controller determines the concentration value of impurity in solid to be measured according to matching result.
Specifically, in this embodiment, the structure of spinning electron magnetic sensor can be with as shown in Fig. 2 magnetic field source
Can be permanent magnet or electromagnet, pressure magnetic converter is the pressure magnetic transition material for being attached to giant magnetoresistance surface.
It should be noted that in this embodiment, solid to be measured can be containing NV–The diamond of colour center, but this hair
Bright embodiment does not do any restriction to this.
It should be understood that in various embodiments of the present invention, the size of the sequence number of above-mentioned each process is not meant to execution sequence
Successively, the execution sequence of each process should be determined with its function and internal logic, the implementation process without tackling the embodiment of the present invention
Form any restriction.
In addition, the terms "and/or", only a kind of incidence relation for describing affiliated partner, represents there may be
Three kinds of relations, for example, A and/or B, can be represented：Individualism A, while A and B be present, these three situations of individualism B.Separately
Outside, character "/" herein, it is a kind of relation of "or" to typically represent forward-backward correlation object.
Those of ordinary skill in the art are it is to be appreciated that the list of each example described with reference to the embodiments described herein
Member and algorithm steps, it can be realized with electronic hardware, computer software or the combination of the two, in order to clearly demonstrate hardware
With the interchangeability of software, the composition and step of each example are generally described according to function in the above description.This
A little functions are performed with hardware or software mode actually, application-specific and design constraint depending on technical scheme.Specially
Industry technical staff can realize described function using distinct methods to each specific application, but this realization is not
It is considered as beyond the scope of this invention.
It is apparent to those skilled in the art that for convenience of description and succinctly, foregoing description is
The specific work process of system, device and unit, may be referred to the corresponding process in preceding method embodiment, will not be repeated here.
In several embodiments provided herein, it should be understood that disclosed systems, devices and methods, can be with
Realize by another way.For example, device embodiment described above is only schematical, for example, the division of unit,
Only a kind of division of logic function, can there is an other dividing mode when actually realizing, such as multiple units or component can be with
With reference to or be desirably integrated into another system, or some features can be ignored, or not perform.It is in addition, shown or discussed
Mutual coupling or direct-coupling or communication connection can be the INDIRECT COUPLINGs or logical by some interfaces, device or unit
Letter connection or electricity, the connection of mechanical or other forms.
The unit illustrated as separating component can be or may not be physically separate, be shown as unit
Part can be or may not be physical location, you can with positioned at a place, or can also be distributed to multiple networks
On unit.Some or all of unit therein can be selected to realize the mesh of scheme of the embodiment of the present invention according to the actual needs
's.
In addition, each functional unit in each embodiment of the present invention can be integrated in a processing unit, can also
It is that unit is individually physically present or two or more units are integrated in a unit.It is above-mentioned integrated
Unit can both be realized in the form of hardware, can also be realized in the form of SFU software functional unit.
More than, it is only embodiment of the invention, but protection scope of the present invention is not limited thereto, and it is any to be familiar with
Those skilled in the art the invention discloses technical scope in, various equivalent modifications or substitutions can be readily occurred in,
These modifications or substitutions should be all included within the scope of the present invention.Therefore, protection scope of the present invention should be wanted with right
The protection domain asked is defined.
Claims (9)
- A kind of 1. measuring system of impurity concentration in solid, it is characterised in that including：Spinning electron magnetic sensor, magnetic field hair Source of students, controller and pressure magnetic converter, wherein,The magnetic field source and the solid to be measured are separately positioned on the relative both sides of the spinning electron magnetic sensor, The solid to be measured can not produce magnetic field in itself；The pressure magnetic converter is arranged between the solid to be measured and the spinning electron magnetic sensor；Pressure conversion caused by the magnetic field source absorption solid to be measured is magnetic signal by the pressure magnetic converter, and By the magnetic signals to the spinning electron magnetic sensor；The magnetic signal is converted to electric signal and sent to controller by the spinning electron magnetic sensor；The controller is worth corresponding with the initial electrical signal of the spinning electron magnetic sensor according to corresponding to the electric signal Value, and default electric signal corresponding to value with solid in impurity concentration corresponding relation, determine in the solid to be measured The concentration value of impurity.
- 2. measuring system according to claim 1, it is characterised in that the spinning electron magnetic sensor includes：Substrate, At least one spin electric device and electrode of the substrate surface are arranged on, the electrode is connected with the controller.
- 3. measuring system according to claim 2, it is characterised in that each spin electric device is giant magnetoresistance magnetic Sensor or magnetic funnel node device.
- 4. measuring system according to claim 3, it is characterised in that the pressure magnetic converter is to be attached to the giant magnetoresistance The pressure magnetic transition material on surface.
- 5. according to the measuring system any one of claim 1-4, it is characterised in that value corresponding to the electric signal includes Resistance value, magnitude of voltage and current value.
- 6. according to the measuring system any one of claim 1-4, it is characterised in that the magnetic field source is permanent magnetism Magnet or electromagnet.
- A kind of 7. measuring method of impurity concentration in solid, it is characterised in that including：By solid to be measured by pressing magnetic converter to be arranged on the side of spinning electron magnetic sensor, and magnetic field source is set Put in the opposite side relative with the side, wherein, the solid to be measured can not produce magnetic field in itself；Pressure conversion caused by the magnetic field source absorption solid to be measured is magnetic signal by the pressure magnetic converter, and By the magnetic signals to the spinning electron magnetic sensor；Magnetic signal is converted to electric signal transmission to controller by the spinning electron magnetic sensor, and the magnetic signal is the pressure Magnetic converter pressure conversion according to caused by the magnetic field source adsorbs the solid to be measured obtains；The controller is worth corresponding with the initial electrical signal of the spinning electron magnetic sensor according to corresponding to the electric signal Value, and default electric signal corresponding to value with solid to be measured in impurity concentration corresponding relation, determine described to be measured The concentration value of impurity in solid.
- 8. measuring method according to claim 7, it is characterised in that by the solid to be measured by pressing magnetic converter It is arranged on before the side of spinning electron magnetic sensor, methods described also includes：The controller obtains the initial electrical signal of the spinning electron magnetic sensor.
- 9. the measuring method according to claim 7 or 8, it is characterised in that value corresponding to the electric signal include resistance value, Magnitude of voltage and current value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711020108.7A CN107576718A (en) | 2017-10-26 | 2017-10-26 | The measuring system and measuring method of impurity concentration in a kind of solid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711020108.7A CN107576718A (en) | 2017-10-26 | 2017-10-26 | The measuring system and measuring method of impurity concentration in a kind of solid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107576718A true CN107576718A (en) | 2018-01-12 |
Family
ID=61040587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711020108.7A Pending CN107576718A (en) | 2017-10-26 | 2017-10-26 | The measuring system and measuring method of impurity concentration in a kind of solid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107576718A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1062425A (en) * | 1990-12-11 | 1992-07-01 | 国际商业机器公司 | (CPP) magnetoresistive sensor based on spin valve effect |
| US5159513A (en) * | 1991-02-08 | 1992-10-27 | International Business Machines Corporation | Magnetoresistive sensor based on the spin valve effect |
| CN2752769Y (en) * | 2004-11-29 | 2006-01-18 | 关新春 | Magnetic current varying liquid sedimentation layered tester |
-
2017
- 2017-10-26 CN CN201711020108.7A patent/CN107576718A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1062425A (en) * | 1990-12-11 | 1992-07-01 | 国际商业机器公司 | (CPP) magnetoresistive sensor based on spin valve effect |
| US5159513A (en) * | 1991-02-08 | 1992-10-27 | International Business Machines Corporation | Magnetoresistive sensor based on the spin valve effect |
| CN2752769Y (en) * | 2004-11-29 | 2006-01-18 | 关新春 | Magnetic current varying liquid sedimentation layered tester |
Non-Patent Citations (1)
| Title |
|---|
| 徐军民等: "微机电***磁流体压力微传感器 ", 《机电工程》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104656045B (en) | Magnetic field sensing module, measuring method and manufacturing method of magnetic field sensing module | |
| CN103995240B (en) | A kind of magneto-resistor Z axis gradient sensor chip | |
| CN103901363B (en) | A kind of single-chip z axis magnetic resistance sensor | |
| CN104820125B (en) | Using Z axis magneto-resistor gradiometer and the integrated current sensors of lead frame electric current | |
| CN103226865B (en) | A kind of magnetic head based on magneto-resistor technology for detection magnetic pattern thereon Surface field | |
| US10551447B2 (en) | Magnetic field sensing apparatus | |
| Lima et al. | Scanning magnetic tunnel junction microscope for high-resolution imaging of remanent magnetization fields | |
| CN209264810U (en) | A kind of current sensor | |
| CN108919147B (en) | Three-axis magnetic field sensor | |
| KR101593665B1 (en) | Spin torque-type magnetic sensor | |
| CN103412269A (en) | Single-chip push-pull bridge type magnetic field sensor | |
| CN103645449A (en) | Single chip reference bridge type magnetic sensor for high-intensity magnetic field | |
| CN208172220U (en) | Magnet field probe, weak magnetic signal detection device | |
| CN103885004A (en) | Magnetic sensing device, and magnetic sensing method and manufacturing technology thereof | |
| US20130121879A1 (en) | Magnetic-Field Measurement Device | |
| DE102020103808A1 (en) | MAGNETIC FIELD DETECTION DEVICE AND METHOD FOR DETECTING A MAGNETIC FIELD | |
| CN105466324A (en) | Displacement sensor and displacement sensing measurement system | |
| CN108291947A (en) | Magnetic field sensor and the detector for magnetic field for having it | |
| CN106097723A (en) | Vehicle based on bias magnetic field is delayed unloading the method for work of reality line detector | |
| CN208689155U (en) | Triaxial magnetic field sensor | |
| CN205538822U (en) | Nondestructive test device based on tunnel magnetism resistance transducer | |
| CN107576718A (en) | The measuring system and measuring method of impurity concentration in a kind of solid | |
| CN110345972A (en) | A kind of sensor and electronic equipment | |
| CN103544764B (en) | A kind of sensor for identifying magnetic medium | |
| CN203490758U (en) | Sensor used for identifying magnetic medium |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180112 |
|
| RJ01 | Rejection of invention patent application after publication |