CN107561671B - Double-light-path double-telecentric lens - Google Patents
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- CN107561671B CN107561671B CN201710898740.5A CN201710898740A CN107561671B CN 107561671 B CN107561671 B CN 107561671B CN 201710898740 A CN201710898740 A CN 201710898740A CN 107561671 B CN107561671 B CN 107561671B
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Abstract
The invention discloses a double-light-path double-telecentric lens capable of imaging a plane vertical to an optical axis and a plane inclined to the optical axis, which has the capability of acquiring two-dimensional and three-dimensional information. The double-optical-path double-telecentric lens is positioned right above a sample, a line laser is arranged above the side of the sample, the double-optical-path double-telecentric lens comprises an objective front group, a beam splitting prism, a first diaphragm, a first objective rear group and a vertical image surface which are sequentially arranged from bottom to top, a second objective rear group is arranged at the positive side end of the beam splitting prism, a second diaphragm is arranged between the beam splitting prism and the second objective rear group, an inclined image surface is obliquely arranged at the positive side end of the second objective rear group, and a vertical object surface and an inclined object surface which coincides with the line laser scanning surface are arranged right below the objective front group. The invention is applied to the technical field of optical lenses.
Description
Technical Field
The invention relates to an optical lens, in particular to a double-optical-path double-telecentric lens.
Background
The telecentric lens eliminates the parallax error, can correct the change of object image magnification caused by the change of working distance, has wide application in the fields of visual detection and image measurement, and is mainly used for measuring the dimension of a two-dimensional plane.
The existing telecentric lens images a plane perpendicular to the optical axis, and the characteristic determines that the existing telecentric lens can only detect plane two-dimensional information. In visual detection and image measurement, two-dimensional and three-dimensional characteristic information of a target are physical quantities which need to be concerned, and in the existing detection mode, two-dimensional information detection and three-dimensional information detection need to be respectively measured by using different devices, so that the complexity of a detection system is increased and the detection speed is reduced by the detection mode.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the prior art and providing a double-light-path double-telecentric lens capable of imaging a plane vertical to an optical axis and a plane inclined to the optical axis, wherein the double-light-path double-telecentric lens has the capability of acquiring two-dimensional and three-dimensional information.
The technical scheme adopted by the invention is as follows: the double-optical-path double-telecentric lens is positioned right above a sample, a line laser is arranged above the side of the sample, the double-optical-path double-telecentric lens comprises an objective front group, a beam splitting prism, a first diaphragm, a first objective rear group and a vertical image surface which are sequentially arranged from bottom to top, a second objective rear group is arranged at the positive side end of the beam splitting prism, a second diaphragm is arranged between the beam splitting prism and the second objective rear group, an inclined image surface is obliquely arranged at the positive side end of the second objective rear group, and a vertical object surface and an inclined object surface which coincides with the line laser scanning surface are arranged right below the objective front group.
Further, the vertical object plane, the objective front group, the beam splitting prism, the first diaphragm, the first objective rear group and the vertical image plane form a first optical path, a pair of planes perpendicular to an optical axis form imaging, the inclined object plane, the objective front group, the beam splitting prism, the second diaphragm, the objective rear group and the inclined image plane form a second optical path, the second optical path forms imaging on planes obliquely intersecting with the optical axis, the first optical path and the second optical path share the objective front group, and the first optical path and the second optical path are separated after passing through the beam splitting prism.
Further, the front objective group sequentially comprises a first lens, a second lens, a third lens, a fourth lens, a fifth lens and a sixth lens along the light propagation direction, the rear objective group sequentially comprises a seventh lens, an eighth lens, a ninth lens and a tenth lens along the light propagation direction, the rear objective group sequentially comprises an eleventh lens, a twelfth lens, a thirteenth lens and a fourteenth lens along the light propagation direction, the first lens is a spherical positive lens I protruding towards the object plane, the second lens is a spherical positive lens II protruding towards the object plane, the third lens is a plano-concave spherical negative lens III, the fourth lens is a convex plano-spherical positive lens IV, the fifth lens is a spherical negative lens V towards the object plane, the sixth lens is a plano-concave spherical negative lens six, the seventh lens is a spherical lens, the eighth lens is a biconcave spherical negative lens, the ninth lens is a biconvex spherical positive lens, the tenth lens is a biconvex spherical positive lens, the eleventh spherical positive lens is a biconvex spherical positive lens, the third lens is a biconvex spherical negative lens, the thirteenth spherical positive lens is a biconvex spherical positive lens, and the thirteenth lens is a biconvex spherical positive lens.
Further, the first lens includes a first face and a second face, the second lens includes a third face and a fourth face, the third lens includes a fifth face and a sixth face, the fourth lens includes a seventh face and a eighth face, the fifth lens includes a ninth face and a tenth face, the sixth lens includes a tenth face and a tenth face, the seventh lens includes a tenth face and a tenth face, the eighth lens includes a tenth face and a tenth six face, the ninth lens includes a seventeenth face and a tenth eight face, the tenth lens includes a nineteenth face and a twentieth face, the eleventh lens includes a twenty-first face and a twenty-second face, the twelfth lens includes a twenty-third face and a twenty-fourth face, the thirteenth lens includes a twenty-fifth face and a twenty-sixth face, the fourteenth lens includes twenty-seventh and twenty-eighth sides, each of the first, third, seventh, ninth, tenth, fourth, seventeenth, tenth, nineteenth, twentieth, twenty-first, twenty-second, twenty-fifth, twenty-sixth and twenty-seventh sides being convex, each of the second, fourth, sixth, tenth, fifteenth, tenth, sixteenth, twenty-fourth and twenty-eighth sides being concave, each of the fifth, eighth and tenth sides being planar.
Further, the radius of curvature of the first face to the twenty-eighth face is 156.00 ±5%,2347.786 ±5%,108.092 ±5%,395.657 ±5%, infinity, 104.473 ±5%,73.604 ±5%, infinity, 25.742 ±5%,14.658 ±5%, infinity, 18.522 ±5%,17.596 ±5%, 35.168 ±5%, 8.187 ±5%,16.838 ±5%,26.858 ±5%, 9.875±5%,16.603 ±5%,109.154 ±5%,17.596 ±5%, 35.168 ±5%, 8.187 ±5%,16.838 ±5%,26.858 ±5%, 9.875±5%,16.603 ±5%,109.154 ±5%, and the units thereof are all millimeter.
Further, the central thicknesses of the first lens and the fourteenth lens are 24±5%,23±5%,5±5%,10±5%,3±5%,2±5%,1±5%,4.1±5%,2.6±5%,2±5%,1±5%,4.1±5% and 2.6±5% in millimeter.
Further, the distance between the front group of the objective lens and the beam splitting prism on the optical axis is 20.34 plus or minus 5 percent mm, the distance between the beam splitting prism and the first diaphragm and the distance between the beam splitting prism and the second diaphragm are 2 plus or minus 5 percent mm, the distance between the first diaphragm and the rear group of the objective lens and the distance between the second diaphragm and the rear group of the objective lens are 3 plus or minus 5 percent mm, the distance between the first lens and the second lens on the optical axis is 0.2 plus or minus 5 percent mm, the distance between the second lens and the third lens on the optical axis is 7.2 plus or minus 5 percent mm, the distance between the third lens and the fourth lens on the optical axis is 82.61 plus or minus 5 percent mm, the distance between the fourth lens and the fifth lens on the optical axis is 10.34 plus or minus 5 percent mm, the distance of the air interval from the fifth lens to the sixth lens on the optical axis is 23.52 plus or minus 5 percent mm, the distance of the air interval from the seventh lens to the eighth lens on the optical axis is 6.96 plus or minus 5 percent mm, the distance of the air interval from the eighth lens to the ninth lens on the optical axis is 1.14 plus or minus 5 percent mm, the distance of the air interval from the ninth lens to the tenth lens on the optical axis is 7.0 plus or minus 5 percent mm, the distance of the air interval from the eleventh lens to the twelfth lens on the optical axis is 6.96 plus or minus 5 percent mm, the distance of the air interval from the twelfth lens to the thirteenth lens on the optical axis is 1.14 plus or minus 5 percent mm, and the distance of the air interval from the thirteenth lens to the fourteenth lens on the optical axis is 7.0 plus or minus 5 percent mm.
Further, the included angle between the inclined object plane and the optical axis is 25-45 degrees, and the included angle between the inclined image plane and the optical axis is 82.9-86.68 degrees.
Further, the refractive index and abbe number of each lens material of the front group of the objective lens are as follows from the first lens to the sixth lens: 1.77/49.6+ -5%, 1.85/23.8+ -5%, 1.74/49.2+ -5%, 1.62/56.7+ -5%, 1.50/81.6+ -5%; the objective lens rear group comprises the following lens materials from a seventh lens to a tenth lens in sequence: 1.74/52.6+ -5%, 1.74/27.8+ -5%, 1.62/57.0+ -5%, 1.56/60.8+ -5%; the materials of the second lens of the rear group of the objective lens are sequentially from the eleventh lens to the fourteenth lens: 1.74/52.6+ -5%, 1.74/27.8+ -5%, 1.62/57.0+ -5%, 1.56/60.8+ -5%; the refractive index and Abbe number of the light splitting prism material are 1.65/33.8+/-5%.
Further, the working distance of the double-light-path double-telecentric lens is 100mm, the diameter of an entrance pupil is 150mm, and the working wave band is 450-750nm.
The beneficial effects of the invention are as follows: because the double-light-path double-telecentric lens is positioned right above the sample, and the line laser is arranged above the side of the sample, the double-light-path double-telecentric lens comprises an objective front group, a beam splitting prism, a diaphragm I, an objective rear group I and a vertical image surface which are sequentially arranged from bottom to top, the front side end of the beam splitting prism is provided with an objective rear group II, the diaphragm II is arranged between the beam splitting prism and the objective rear group II, the front side end of the objective rear group II is obliquely provided with an inclined image surface, and the vertical object surface and the inclined object surface which coincides with the line laser scanning surface are arranged right below the objective front group, so the double-light-path double-telecentric lens can respectively image the vertical optical axis plane and the plane which is oblique to the optical axis, and has the characteristics of high resolution, low distortion and low telecentricity.
The invention adopts a double-light-path design to image the vertical plane and the inclined plane respectively, and can realize measurement of two-dimensional and three-dimensional information by matching with line laser, thereby reducing the complexity of a visual detection and image measurement system and improving the measurement speed.
Drawings
FIG. 1 is a schematic diagram of three-dimensional profile measurement with a dual-optical-path dual telecentric lens assembly line laser;
FIG. 2 is a schematic diagram of the internal structure of a dual-optical-path dual telecentric lens;
FIG. 3 is a schematic view of the structure of the objective lens front group;
FIG. 4 is a schematic view of a rear objective lens assembly;
FIG. 5 is a schematic diagram of a second structure of the objective lens;
FIG. 6 is an optical speckle pattern for optical path one;
FIG. 7 is an optical speckle pattern for optical path two;
FIG. 8 is a graph of modulation transfer function MTF for optical path one;
FIG. 9 is a graph of modulation transfer function MTF for optical path two;
FIG. 10 is an astigmatism and field curvature diagram for optical path one;
FIG. 11 is an astigmatism and field curvature diagram for optical path two;
FIG. 12 is a distortion diagram of optical path one;
fig. 13 is a distortion chart of the second optical path.
Detailed Description
As shown in fig. 1 to 13, in this embodiment, the double-optical-path double-telecentric lens 1 is located directly above the sample 2, a line laser 3 is disposed above the side of the sample 2, the double-optical-path double-telecentric lens 1 includes an objective front group 4, a beam splitting prism 5, a first aperture 6, a first objective rear group 7, and a vertical image plane 8 that are sequentially disposed from bottom to top, a second objective rear group 9 is disposed at the front side end of the beam splitting prism 5, a second aperture 10 is disposed between the beam splitting prism 5 and the second objective rear group 9, an inclined image plane 11 is disposed at the front side end of the second objective rear group 9 in an inclined manner, a vertical object plane 12 and an inclined object plane 13 that coincides with the scanning plane of the line laser 3 are disposed directly below the objective front group 4, the scanning line of the contour of the sample 2 is located in the inclined object plane 13, and the three-dimensional contour of the object can be reconstructed through measuring and corresponding calculation of the contour line, which is not in the scope of the present invention; the vertical object plane 12, the objective lens front group 4, the beam splitting prism 5, the diaphragm I6, the objective lens rear group 7 and the vertical image plane 8 form a first optical path, the first optical path is in a shape of a Chinese character 'yi', the formed optical path is imaged on the vertical object plane 12 which is vertical to the optical axis, and the vertical image plane 8 is vertical to the optical axis; the oblique object plane 13, the objective lens front group 4, the beam splitting prism 5, the diaphragm II 10, the objective lens rear group II 9 and the oblique image plane 11 form a light path II, the light path II is L-shaped, the light path II images the oblique object plane 13 obliquely intersecting with the optical axis, the oblique image plane 11 obliquely intersects with the optical axis, the included angle between the oblique object plane 13 and the optical axis is 45 degrees, and the included angle between the oblique image plane 11 and the optical axis is 86.68 degrees; the first optical path and the second optical path share the objective lens front group 4 and are separated after passing through the beam splitting prism 5, the first optical path and the second optical path do not work simultaneously, when the first optical path images the pair of vertical object planes 12, the second optical path does not work, and when the second optical path images the pair of inclined object planes 13, the first optical path does not work.
In this embodiment, the objective lens front group 4 includes, in order along the light propagation direction, a first lens 41, a second lens 42, a third lens 43, a fourth lens 44, a fifth lens 45, and a sixth lens 46, the objective lens rear group 7 includes, in order along the light propagation direction, a seventh lens 71, an eighth lens 72, a ninth lens 73, and a tenth lens 74, the objective lens rear group 9 includes, in order along the light propagation direction, an eleventh lens 91, a twelfth lens 92, a thirteenth lens 93, and a fourteenth lens 94, the first lens 41 is a spherical positive lens first convex to the object plane, the second lens 42 is a spherical positive lens second convex to the object plane, the third lens 43 is a plano-concave spherical negative lens third, the fourth lens 44 is a convex plano-spherical positive lens fourth, the fifth lens 45 is a spherical negative lens fifth convex to the object plane, the sixth lens 46 is a plano-concave spherical negative lens six, the seventh lens 71 is a spherical surface, the eighth lens 72 is a biconvex spherical negative lens 92, the ninth lens 73 is a biconvex spherical positive lens 94 is a biconvex spherical positive lens, the thirteenth lens 92 is a biconvex spherical positive lens 73 is a biconvex spherical positive lens.
In the present embodiment, the first lens 41 includes a first face and a second face, the second lens 42 includes a third face and a fourth face, the third lens 43 includes a fifth face and a sixth face, the fourth lens 44 includes a seventh face and a eighth face, the fifth lens 45 includes a ninth face and a tenth face, the sixth lens 46 includes a tenth face and a tenth face, the seventh lens 71 includes a tenth face and a tenth face, the eighth lens 72 includes a fifth face and a tenth face, the ninth lens 73 includes a seventeenth face and a tenth eighth face, the tenth lens 74 includes a nineteenth face and a twentieth face, the eleventh lens 91 includes a twenty-first face and a second face, the twelfth lens 92 includes a twenty-third face and a twenty-fourth face, the thirteenth lens 93 includes a twenty-fifth face and a twenty-sixth face, the fourteenth lens 94 includes twenty-seventh and twenty-eighth sides, each of which is convex, and each of the first, third, seventh, ninth, tenth, seventeenth, tenth, nineteenth, twentieth, twenty-second, twenty-fifth, twenty-sixth and twenty-seventh sides is concave, and each of the fifth, eighth and twenty-eighth sides is planar.
In this embodiment, the radii of curvature of the first face to the twenty-eighth face are 156.00 ±5%,2347.786 ±5%,108.092 ±5%,395.657 ±5%, infinity, 104.473 ±5%,73.604 ±5%, infinity, 25.742 ±5%,14.658 ±5%, infinity, 18.522 ±5%,17.596 ±5%, 35.168 ±5%, 8.187 ±5%,16.838 ±5%,26.858 ±5%, 9.875±5%,16.603 ±5%,109.154 ±5%,17.596 ±5%, 35.168 ±5%, 8.187 ±5%,16.838 ±5%,26.858 ±5%, 9.875±5%,16.603 ±5%,109.154 ±5% and are all millimeter, wherein the first face radius of curvature is 156.00 ±5%, i.e. the first face radius of curvature is within a range of 156-156×5% to 156+156×5%, i.e. the first face radius of curvature is 155.22-156.78mm. Other radius of curvature algorithms are consistent with the first face radius of curvature algorithm.
In this embodiment, the center thicknesses of the first lens 41 to the fourteenth lens 94 are 24±5%,23±5%,5±5%,10±5%,3±5%,2±5%,1±5%,4.1±5%,2.6±5%,2±5%,1±5%,4.1±5%, and 2.6±5% in mm.
In this embodiment, the distance between the front lens group 4 and the splitting prism 5 on the optical axis is 20.34±5% mm, the distance between the splitting prism 5 and the first aperture 6 and the second aperture 10 on the optical axis is 2±5% mm, the distance between the first aperture 6 and the rear lens group 7 and the distance between the second aperture 10 and the rear lens group 9 are 3±5% mm, the distance between the first lens 41 and the second lens 42 on the optical axis is 0.2±5% mm, the distance between the second lens 42 and the third lens 43 on the optical axis is 7.2±5% mm, the distance between the third lens 43 and the fourth lens 44 on the optical axis is 82.61±5% mm, the distance between the fourth lens 44 and the fifth lens 45 on the optical axis is 10.34±5% mm, the distance between the fifth lens 45 and the sixth lens 46 on the optical axis is 23.52±5% mm, the distance between the fourth lens 45 and the eighth lens is 96±5% mm, the distance between the fourth lens 42 on the optical axis is 1.94+5% mm, the distance between the fourth lens 43 and the eighth lens is 96+5% mm, the distance between the fourth lens is 96.96+5% mm, the distance between the fourth lens is 96+5% mm, the distance between the fourth lens is 96.72+5% mm, and the distance between the fourth lens is 96+5% mm, and the distance between the fourth lens is 96+5+5% mm and the fourth lens is 0.72+5 mm.
In the present embodiment, the refractive index and abbe number of each lens material of the objective lens front group 4 from the first lens 41 to the sixth lens 46 are: (1.77/49.6) ±5%, (1.85/23.8) ±5%, (1.74/49.2) ±5%, (1.62/56.7) ±5%, (1.50/81.6) ±5%; the objective lens rear group 7 includes, in order from the seventh lens 71 to the tenth lens 74: (1.74/52.6) ±5%, (1.74/27.8) ±5%, (1.62/57) ±5%, (1.56/60.8) ±5%; the lens materials of the objective lens rear group two 9 are, in order from the eleventh lens 91 to the fourteenth lens 94: (1.74/52.6) ±5%, (1.74/27.8) ±5%, (1.62/57) ±5%, (1.56/60.8) ±5%; the refractive index and Abbe number of the material of the beam-splitting prism 5 are (1.65/33.8) +/-5%.
In this embodiment, the working distance of the dual-optical-path dual-telecentric lens 1 is 100mm, the entrance pupil diameter is 150mm, and the working band is 450-750nm.
Optical speckle patterns, as shown in fig. 6 and 7, where DBJ represents the object field of view, IMA represents the image field of view in millimeters, AIRY RADIUS represents AIRY RADIUS, RMS RADIUS represents the root mean square RADIUS of the speckle, and microns. From fig. 6 and fig. 7, it can be seen that the radius of the airy disk of the first optical path is 3.1um, the central field of view of the root mean square radius of the diffuse spots is 0.91um, and the edge field of view is 2.94um, and the radius of the airy disk of the second optical path is 3.1um, the central field of view of the root mean square radius of the diffuse spots is 0.91um, and the edge field of view is 2.78um, which are smaller than the radius of the airy disk, and the energy concentration and aberration correction of the on-axis and off-axis points are very good, thus achieving the ideal resolution.
The modulation transfer function MTF as shown in fig. 8 and 9, where the abscissa is resolution, the unit is line pair/mm, the ordinate is contrast, the range is 0-1, and ts represents the meridian and sagittal components of the MTF at different fields of view. The average MTF of each field of view in FIGS. 8 and 9 has a contrast ratio greater than 0.3 at 200 line pairs/mm of resolution, and the overall MTF curve is compact, and it can be seen that the lens has very high resolution.
As shown in fig. 10 and 11, the field curvature and astigmatism are shown in terms of field of view on the ordinate and millimeters on the abscissa.
As shown in the distortion diagrams in fig. 12 and 13, the ordinate is the field of view, the abscissa is the distortion value, and as seen in fig. 12 and 13, the distortion value in the full field of view of the optical path one of the lens is less than 0.03%, the distortion in the full field of view of the optical path two is less than 0.05%, and the lens has very low distortion.
In summary, the dual-optical-path dual-telecentric lens designed by the invention can respectively image a plane vertical to the optical axis and a plane inclined to the optical axis, and has the characteristics of high resolution, low distortion and low telecentricity.
The invention is applied to the technical field of optical lenses.
While the embodiments of this invention have been described in terms of practical aspects, they are not to be construed as limiting the meaning of this invention, and modifications to the embodiments and combinations with other aspects thereof will be apparent to those skilled in the art from this description.
Claims (6)
1. The utility model provides a two telecentric camera lenses of double light path which characterized in that: the double-optical-path double-telecentric lens (1) is positioned right above a sample (2), a line laser (3) is arranged above the side of the sample (2), the double-optical-path double-telecentric lens (1) comprises an objective front group (4), a beam splitting prism (5), a first diaphragm (6), a first objective rear group (7) and a vertical image plane (8) which are sequentially arranged from bottom to top, a second objective rear group (9) is arranged at the positive side end of the beam splitting prism (5), a second diaphragm (10) is arranged between the beam splitting prism (5) and the second objective rear group (9), an inclined image plane (11) is obliquely arranged at the positive side end of the second objective rear group (9), and a vertical object plane (12) and an inclined object plane (13) which coincides with the scanning plane of the line laser (3) are arranged right below the objective front group (4); the optical system comprises a vertical object plane (12), an objective front group (4), a beam splitting prism (5), a diaphragm I (6), an objective rear group (7) and a vertical image plane (8), wherein a first optical path is formed by the optical path, a pair of planes perpendicular to an optical axis form an image, a second optical path is formed by the inclined object plane (13), the objective front group (4), the beam splitting prism (5), the diaphragm II (10), the objective rear group II (9) and the inclined image plane (11), a second optical path is formed by the optical path pair, the planes obliquely intersecting with the optical axis form an image, the first optical path and the second optical path share the objective front group (4), and the optical paths are separated after passing through the beam splitting prism (5); the objective lens front group (4) sequentially comprises a first lens (41), a second lens (42), a third lens (43), a fourth lens (44), a fifth lens (45) and a sixth lens (46) along the light propagation direction, the objective lens rear group I (7) sequentially comprises a seventh lens (71), an eighth lens (72), a ninth lens (73) and a tenth lens (74) along the light propagation direction, the objective lens rear group II (9) sequentially comprises an eleventh lens (91), a twelfth lens (92), a thirteenth lens (93) and a fourteenth lens (94) along the light propagation direction, the first lens (41) is a spherical positive lens I protruding towards the object plane, the second lens (42) is a spherical positive lens II protruding towards the object plane, the third lens (43) is a spherical negative lens III, the fourth lens (44) is a convex positive lens IV, the fifth lens (73) is a spherical negative lens V, the sixth lens (46) is a spherical negative lens V, the seventh lens (73) is a spherical positive lens V, the eighth lens (72) is a spherical positive lens V, the eighth lens (73) is a spherical positive lens V-spherical lens, the eighth lens (72) is a spherical positive lens V-spherical lens, the twelfth lens (92) is a biconcave spherical negative lens, the thirteenth lens (93) is a biconvex spherical positive lens, and the fourteenth lens (94) is a spherical positive lens protruding toward an object plane; the first lens (41) includes a first face and a second face, the second lens (42) includes a third face and a fourth face, the third lens (43) includes a fifth face and a sixth face, the fourth lens (44) includes a seventh face and a eighth face, the fifth lens (45) includes a ninth face and a tenth face, the sixth lens (46) includes a tenth face and a tenth face, the seventh lens (71) includes a third face and a tenth face, the eighth lens (72) includes a tenth face and a tenth face, the ninth lens (73) includes a seventeenth face and a tenth face, the tenth lens (74) includes a nineteenth face and a twentieth face, the eleventh lens (91) includes a twenty-first face and a twenty-second face, the twelfth lens (92) includes a twenty-third face and a twenty-fourth face, the thirteenth lens (93) comprises a twenty-fifth surface and a twenty-sixth surface, the fourteenth lens (94) comprises a twenty-seventh surface and a twenty-eighth surface, the first surface, the third surface, the seventh surface, the ninth surface, the tenth surface, the seventeenth surface, the tenth surface, the nineteenth surface, the first surface, the second surface, the twenty-fifth surface, the twenty-sixth surface, and the twenty-seventh surface are convex, the second face, the fourth face, the sixth face, the tenth fifth face, the tenth six face, the twentieth face, the twenty third face, the twenty-fourth surface and the twenty-eighth surface are concave surfaces, and the fifth surface, the eighth surface and the tenth surface are plane surfaces; the radius of curvature of the first face to the twenty-eighth face is 156.00 + -5%, 2347.786 + -5%, 108.092 + -5%, 395.657 + -5%, infinity, 104.473 + -5%, 73.604 + -5%, infinity, 25.742 + -5%, 14.658 + -5%, infinity, 18.522 + -5%, 17.596 + -5%, 35.168 + -5%, 8.187 + -5%, 16.838 + -5%, 26.858 + -5%, 9.875+ -5%, 16.603 + -5%, 109.154 + -5%, 17.596 + -5%, 35.168 + -5%, 8.187 + -5%, 16.838 + -5%, 26.858 + -5%, 9.875+ -5%, 16.603 + -5%, 109.154 + -5%, and the units thereof are millimeter in order.
2. The dual optical path dual telecentric lens according to claim 1, wherein: the center thickness of the first lens (41) to the fourteenth lens (94) is 24+ -5%, 23+ -5%, 5+ -5%, 10+ -5%, 3+ -5%, 2+ -5%, 1+ -5%, 4.1+ -5%, 2.6+ -5%, and the units thereof are millimeter in order.
3. The dual optical path dual telecentric lens according to claim 1, wherein: the distance between the front group (4) of the objective lens and the beam splitting prism (5) on the optical axis is 20.34 plus or minus 5 percent mm, the distance between the beam splitting prism (5) and the first diaphragm (6) and the second diaphragm (10) are 2 plus or minus 5 percent mm, the distance between the first diaphragm (6) and the rear group (7) of the objective lens and the distance between the second diaphragm (10) and the rear group (9) of the objective lens are 3 plus or minus 5 percent mm, the distance between the air between the first lens (41) and the second lens (42) on the optical axis is 0.2 plus or minus 5 percent mm, the distance between the air between the second lens (42) and the third lens (43) on the optical axis is 7.2 plus or minus 5 percent mm, the distance of the air space of the third lens (43) to the fourth lens (44) on the optical axis is 82.61 plus or minus 5%mm, the distance of the air space of the fourth lens (44) to the fifth lens (45) on the optical axis is 10.34 plus or minus 5%mm, the distance of the air space of the fifth lens (45) to the sixth lens (46) on the optical axis is 23.52 plus or minus 5%mm, the distance of the air space of the seventh lens (71) to the eighth lens (72) on the optical axis is 6.96 plus or minus 5%mm, the distance of the air space of the eighth lens (72) to the ninth lens (73) on the optical axis is 1.14 plus or minus 5%mm, the distance of the air space of the ninth lens (73) to the tenth lens (74) on the optical axis is 7.0 plus or minus 5%mm, the distance of the air space from the eleventh lens (91) to the twelfth lens (92) on the optical axis is 6.96+/-5% mm, the distance of the air space from the twelfth lens (92) to the thirteenth lens (93) on the optical axis is 1.14+/-5% mm, and the distance of the air space from the thirteenth lens (93) to the fourteenth lens (94) on the optical axis is 7.0+/-5% mm.
4. The dual optical path dual telecentric lens according to claim 1, wherein: the included angle between the inclined object plane (13) and the optical axis is 25-45 degrees, and the included angle between the inclined image plane (11) and the optical axis is 82.9-86.68 degrees.
5. The dual optical path dual telecentric lens according to claim 1, wherein: the refractive index and Abbe number of each lens material of the objective lens front group (4) are (1.77/49.6). + -. 5%, (1.85/23.8). + -. 5%, (1.74/49.2). + -. 5%, (1.62/56.7). + -. 5%, (1.50/81.6). + -. 5% in this order from the first lens (41) to the sixth lens (46); the lens materials of the first lens group (7) of the objective lens are (1.74/52.6) +/-5 percent, (1.74/27.8) +/-5 percent, (1.62/57) +/-5 percent and (1.56/60.8) +/-5 percent) in sequence from the seventh lens (71) to the tenth lens (74); the lens materials of the objective lens rear group II (9) are sequentially from the eleventh lens (91) to the fourteenth lens (94): (1.74/52.6) ±5%, (1.74/27.8) ±5%, (1.62/57) ±5%, (1.56/60.8) ±5%; the refractive index and Abbe number of the material of the beam-splitting prism (5) are (1.65/33.8) +/-5%.
6. The dual optical path dual telecentric lens according to claim 1, wherein: the working distance of the double-light-path double-telecentric lens (1) is 100mm, the diameter of an entrance pupil is 150mm, and the working wave band is 450-750nm.
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| CN109613689A (en) * | 2018-12-24 | 2019-04-12 | 珠海博明软件有限公司 | A kind of telecentricity source of parallel light |
| TWI824606B (en) * | 2021-12-29 | 2023-12-01 | 新加坡商Ｗｅｏ Ｉｐ有限公司 | Lens, structured light projection device and 3d measurement device |
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| JP2003005068A (en) * | 2001-06-19 | 2003-01-08 | Mitsutoyo Corp | Bitelecentric objective lens |
| CN104076490A (en) * | 2014-06-28 | 2014-10-01 | 青岛歌尔声学科技有限公司 | Wide-angle distortion-removing dual-band confocal optical lens |
| CN105242501A (en) * | 2015-11-10 | 2016-01-13 | 中国科学院光电技术研究所 | High-accuracy focusing and leveling measuring system |
| WO2016116956A1 (en) * | 2015-01-20 | 2016-07-28 | 3I - Impresa Ingegneria Italia S.R.L. | Image-acquiring equipment equipped with telecentric optical objective with primary cylindrical lens |
| CN106483642A (en) * | 2016-12-14 | 2017-03-08 | 舜宇光学(中山)有限公司 | A kind of doubly telecentric camera lens based on machine vision |
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| JP2003005068A (en) * | 2001-06-19 | 2003-01-08 | Mitsutoyo Corp | Bitelecentric objective lens |
| CN104076490A (en) * | 2014-06-28 | 2014-10-01 | 青岛歌尔声学科技有限公司 | Wide-angle distortion-removing dual-band confocal optical lens |
| WO2016116956A1 (en) * | 2015-01-20 | 2016-07-28 | 3I - Impresa Ingegneria Italia S.R.L. | Image-acquiring equipment equipped with telecentric optical objective with primary cylindrical lens |
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