CN107453189B - Terahertz laser system - Google Patents
Terahertz laser system Download PDFInfo
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- CN107453189B CN107453189B CN201710904143.9A CN201710904143A CN107453189B CN 107453189 B CN107453189 B CN 107453189B CN 201710904143 A CN201710904143 A CN 201710904143A CN 107453189 B CN107453189 B CN 107453189B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S1/00—Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range
- H01S1/02—Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range solid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/1305—Feedback control systems
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
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Abstract
The invention discloses a terahertz laser system, belongs to the technical field of lasers, and aims to provide a terahertz laser system with higher output power, which can realize continuous operation and pulse operation. The terahertz laser system comprises a tunable seed light source, a CO2 laser amplifier and a terahertz laser, wherein the tunable seed light source provides seed laser matched with an absorption spectrum of working gas in the terahertz laser, and the seed laser is used as pump light of the terahertz laser after power amplification of the seed light through the CO2 laser amplifier. The frequency feedback system of the pump light carries out stability feedback control on the center frequency of the seed light, and the pump light after frequency stabilization is injected into the terahertz laser to generate terahertz laser oscillation output. The invention is suitable for terahertz lasers with high continuous and pulse output power.
Description
Technical Field
The invention belongs to the technical field of lasers, and relates to a terahertz laser.
Background
The gas terahertz laser is a more practical terahertz light source. After the output power reaches the watt level, the output power is stopped for more than ten years. The core problem to be solved is a high power pump light source. In the prior art, a terahertz laser mainly adopts a method of using CO 2 The laser generates an optical pump pulse terahertz laser. In order to improve the output power of the gas terahertz laser, the implementation mode mostly adopts CO increasing 2 The power of the laser, the gain length of the laser, the multiplexing folding cavity, the beam combination and the like. The method improves the output power of the terahertz laser and simultaneously brings about volume increase, conversion efficiency and stability reduction; especially in the case of CO increase 2 The power of the laser is limited by key optical elements (such as the highest power of the selective grating), and the terahertz laser with higher continuous power is not broken through. Obtaining pulse CO 2 The laser output method generally comprises the following steps: gain switching, intra-cavity Q-switching, extra-cavity modulation, etc. TEA CO 2 Lasers are typically gain-switched pulsed lasers, typically with output pulse widths greater than hundreds of nanoseconds, with low pulse peak power and repetition rates, and this approach does not produce the desired pulse duration without the cooperation of additional pulse shaping techniques. Thus, the existing pulse CO 2 When the laser technology is used for a pumping source, the requirements of peak power, repetition frequency, controllable pulse waveform, modulation characteristics and the like are difficult to meet while wavelength branching tuning output is realized.
Disclosure of Invention
The invention aims at: the terahertz laser system with higher output power can realize continuous operation and pulse operation.
The technical scheme adopted by the invention is as follows:
a terahertz laser system comprises a tunable seed light source and CO 2 The laser amplifier and the terahertz laser device are characterized in that a tunable seed light source provides seed laser matched with an absorption spectrum of working gas in the terahertz laser device, and the seed laser passes through CO 2 The laser amplifier is used as the pumping light of the terahertz laser after power amplification, the pumping light is injected into the terahertz laser, a gas medium in the terahertz laser is excited to generate particle number inversion, terahertz laser is generated, and the terahertz laser is oscillated and output through a resonant cavity of the terahertz laser.
Wherein, in the tunable seed light source, CO 2 The seed laser generated by the tunable seed light source is sequentially transmitted to the CO after passing through the frequency-selecting grating, the optical isolator, the total reflection mirror, the polarization reflector, the electro-optical switch and the concave total reflection mirror 2 A laser amplifier; also provided with a frequency sensor, a signal amplifier, a first feedback controller, CO 2 Part of the middle infrared laser output by the laser amplifier is incident to the frequency sensor, and an electric signal generated by the frequency sensor is input to the first feedback controller after passing through the signal amplifier, and the first feedback controller is electrically connected with the tunable seed light source.
Wherein the first feedback controller feedback controls the voltage, current and/or temperature of the tunable seed light source.
The terahertz laser comprises a gas terahertz laser cavity, working gas is filled in the gas terahertz laser cavity, and an input coupling mirror and an output coupling mirror are respectively arranged at two ends of the gas terahertz laser cavity.
Wherein in CO 2 A reflecting mirror, a total reflecting mirror focusing mirror and a CO (carbon monoxide) are arranged between the laser amplifier and the terahertz laser 2 The middle infrared laser output by the laser amplifier is incident to the reflector, part of the middle infrared laser is transmitted by the reflector and then is incident to the frequency sensor, and the other part of the middle infrared laser is reflected by the reflector and then sequentially passes through the total reflector focusing mirror,The input coupling mirror is input to the gas terahertz laser cavity.
Wherein the reflectivity of the mirror is greater than 95%.
The device comprises an output coupling mirror, a gas terahertz laser cavity, a beam splitter, a power sensor and a second feedback controller, wherein the beam splitter is arranged on one side of the output coupling mirror, which is far away from the gas terahertz laser cavity, the gas terahertz laser cavity is connected with a cavity length driver, the cavity length driver is connected with the output coupling mirror, and the output coupling mirror is controlled to move along the direction far away from or close to the gas terahertz laser cavity; terahertz laser output by the gas terahertz laser cavity is incident to the beam splitter after passing through the output coupling mirror, part of the terahertz laser is transmitted to the power sensor after being reflected by the beam splitter, an electric signal generated by the power sensor is input to the second feedback controller, and the second feedback controller is electrically connected with the cavity length driver.
Wherein, the cavity length driver is a stepping motor or a piezoelectric ceramic driver.
Wherein, the gas terahertz laser cavity is filled with working gas, and the working gas comprises CH 3 OH、NH 3 Or HCOOH.
Wherein the tunable seed light source is a mid-infrared quantum cascade laser with the working wavelength of 9-12 mu m or a selective tuning CO 2 A laser.
Wherein CO 2 The amplification form of the laser amplifier (8) adopts single-pass amplification, multi-pass amplification or oscillation amplification
In summary, due to the adoption of the technical scheme, the beneficial effects of the invention are as follows:
according to the invention, the implementation mode of quantum cascade laser seed source and CO2 laser amplifier is adopted, so that grating branching and cavity length adjusting devices of a traditional CO2 laser pumping source are avoided, pumping laser power is not limited by a damage threshold of the grating, and therefore, pumping light power can be improved by improving the amplification factor of the amplifier. The stability of the terahertz laser is not influenced by the cavity length change caused by mechanical vibration, thermal deformation and the like, and the output stability of the terahertz laser is greatly improved by adding two sets of feedback controllers. Quantum cascade lasers as seed light can be operated at continuous, pulsed, and high repetition ratesTherefore, terahertz laser can be continuously output with pulse and high repetition frequency, and the modulation characteristic is good. In a tunable seed light source, CO 2 The combination of the polarization reflector, the electro-optical switch and the concave total reflection mirror is sequentially arranged between the laser amplifiers, so that the purpose of controlling the seed light pulse is achieved, and meanwhile, the combination of the optical isolator protects the seed light and prevents the amplified pulse light from being reflected to the seed light source and damaging the seed light source.
Drawings
FIG. 1 is a block diagram of an exemplary terahertz laser system;
FIG. 2 is a schematic diagram of a construction of one particular terahertz laser system that may be used in FIG. 1;
the marks in the figure: 1-tunable seed light source, 2-frequency-selective grating, 3-optical isolator, 4-total reflecting mirror, 5-polarized reflector, 6-electro-optical switch, 7-concave total reflecting mirror and 8-CO 2 Laser amplifier, 9-mirror, 10-frequency sensor, 11-signal amplifier, 12-first feedback controller, 13-total reflection mirror focusing mirror, 14-input coupling mirror, 15-gas terahertz laser cavity, 16-output coupling mirror, 17-cavity long driver, 18-power sensor, 19-second feedback controller, 20-beam splitter, 21-voltage, 22-current, 23-temperature.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
A terahertz laser system can be operated continuously or in a pulse mode; if the seed light source 1 and CO can be tuned 2 When the laser amplifiers 8 are continuously operated, the terahertz laser system continuously outputs; if the seed light source 1 or CO can be tuned 2 When the laser amplifier 8 is pulsed, the terahertz laser system is pulsed. The system comprises a tunable seed light source 1, CO 2 A laser amplifier 8, a terahertz laser. The tunable seed light source 1 is mainly used for providing working gas matched with terahertz laserSmall signal seed lasers of the absorption spectrum. The CO 2 The laser amplifier 8 is mainly used for amplifying the power of seed laser generated by the tunable seed light source 1 due to CO 2 The laser amplifier 8 does not need to be provided with a branch grating, thus CO 2 The laser amplifier 8 can amplify the power of the seed laser to the required power according to the requirement, and the maximum sustainable power of the branch grating does not need to be considered, so that the power amplification of the seed laser is not received. Seed laser beam CO 2 The laser amplifier 8 amplifies the laser light to form a mid-infrared laser light, and the mid-infrared laser light is injected into the terahertz laser as pump light of the terahertz laser. After the pump light is injected into the terahertz laser, a gas medium in the terahertz laser is excited by the pump light to generate particle number inversion, terahertz laser is generated, and the terahertz laser is oscillated and output through the terahertz resonant cavity.
The specific light path of the system is as follows: comprises a tunable seed light source 1, a frequency-selecting grating 2, an optical isolator 3, a total reflecting mirror 4, a polarized reflector 5, an electro-optical switch 6, a concave total reflecting mirror 7 and CO 2 A laser amplifier 8, a reflecting mirror 9, a frequency sensor 10, a signal amplifier 11, a first feedback controller 12, a total reflecting mirror focusing mirror 13, an input coupling mirror 14, a gas terahertz laser cavity 15, an output coupling mirror 16, a cavity length driver 17, a power sensor 18, a second feedback controller 19 and a beam splitter 20. The tunable seed light source 1 is a mid-infrared quantum cascade laser with the working wavelength of 9-12 mu m or a selective tuning CO 2 A laser. Seed laser generated by the tunable seed light source 1 sequentially passes through the frequency-selecting grating 2, the optical isolator 3, the total reflection mirror 4, the polarization reflector 5, the electro-optical switch 6 and the concave total reflection mirror 7 and then enters into CO 2 A laser amplifier 8. The CO 2 The laser amplifier 8 may employ cross-flow CO 2 Laser, radio frequency slat CO 2 Laser, transverse excitation of atmospheric pressure CO 2 Laser (TEA) or fast axial flow CO 2 Laser, the CO 2 The amplification form of the laser amplifier 8 adopts single-pass amplification, multi-pass amplification or oscillation amplification. The reflectivity of the reflecting mirror 9 is more than 95%, and only a small part of the power of the amplified mid-infrared pump laser light is transmitted. CO 2 The laser amplifier 8 outputs mid-infrared laser, mid-redThe external laser is incident to the reflecting mirror 9, part of the middle infrared laser is detected and received by the frequency sensor 10 after passing through the reflecting mirror 9, the frequency sensor 10 can generate a corresponding electric signal according to the frequency of the middle infrared laser, the electric signal is amplified by the signal amplifier 11 and then is transmitted to the first feedback controller 12, the first feedback controller 12 performs feedback control on the tunable seed light source 1 through the voltage 21, the current 22 and/or the temperature 23 of the tunable seed light source 1, so that the output power of the tunable seed light source 1 is adjusted, the frequency stabilization adjustment of the pump light is realized, and the first feedback controller 12 can control the CO 2 The cavity length of the laser amplifier 8. An optimized choice of the frequency sensor 10 is a low-pressure cavity, in which terahertz working gas is filled, and the frequency drift of the pump light is monitored in real time through the photoacoustic effect. It will be appreciated that the manner of frequency monitoring based on the photoacoustic effect is not a necessary approach to the present invention. The other part of the middle infrared laser is reflected by the reflecting mirror 9 and then enters the total reflecting mirror focusing mirror 13, and is reflected by the total reflecting mirror focusing mirror 13 and then enters the gas terahertz laser cavity 15 through the input coupling mirror 14, a gas medium in the terahertz laser is excited by pumping light, the population inversion is generated, terahertz laser is generated, and the terahertz laser is oscillated and output through the terahertz resonant cavity. The terahertz laser is incident to the beam splitter 20 after passing through the output coupling mirror 16, a part of the terahertz laser is incident to the power sensor 18 after being reflected by the beam splitter 20, the power sensor 18 detects the power of the terahertz laser and generates a corresponding electric signal, the electric signal is input to the second feedback controller 19, and the second feedback controller 19 outputs a control signal to the cavity length driver 17 according to the power of the terahertz laser; the cavity length driver 17 is connected to the gas terahertz laser cavity 15, and the cavity length driver 17 is connected with the output coupling mirror 16 and controls the output coupling mirror 16 to move in a direction away from or close to the gas terahertz laser cavity 15; the cavity length driver 17 controls the output coupling mirror 16 to move along the direction far away from or close to the gas terahertz laser cavity 15 according to the control signal, so that the distance between the output coupling mirror 16 and the gas terahertz laser cavity 15 is adjusted, and the terahertz power is stabilized and adjusted. The terahertz laser cavity 15 is filled with working gasThe body comprises CH 3 OH、NH 3 Or HCOOH; the cavity length driver 17 is a stepper motor or a piezo-ceramic driver. The other part of the terahertz laser is projected by the beam splitter 20 and then output.
Example 1
A terahertz laser system comprises a tunable seed light source 1 and CO 2 The laser amplifier 8 and the terahertz laser, the tunable seed light source 1 provides seed laser matched with the absorption spectrum of working gas in the terahertz laser, and the seed laser passes through CO 2 The laser amplifier 8 is used as pump light of the terahertz laser after power amplification, the pump light is injected into the terahertz laser, a gas medium in the terahertz laser is excited, population inversion is generated, terahertz laser is generated, and the terahertz laser is oscillated and output through a resonant cavity of the terahertz laser.
Example 2
On the basis of the first embodiment, the seed light source 1 and the CO are tunable 2 A frequency-selecting grating 2, an optical isolator 3, a total reflection mirror 4, a polarization reflector 5, an electro-optical switch 6 and a concave total reflection mirror 7 are sequentially arranged between the laser amplifiers 8, and seed laser generated by the tunable seed light source 1 is sequentially incident to CO after passing through the frequency-selecting grating 2, the optical isolator 3, the total reflection mirror 4, the polarization reflector 5, the electro-optical switch 6 and the concave total reflection mirror 7 2 A laser amplifier 8; is also provided with a frequency sensor 10, a signal amplifier 11, a first feedback controller 12, a CO 2 Part of the mid-infrared laser output by the laser amplifier 8 is incident to the frequency sensor 10, and an electric signal generated by the frequency sensor 10 is input to the first feedback controller 12 after passing through the signal amplifier 11, and the first feedback controller 12 is electrically connected with the tunable seed light source 1.
Example 3
On the basis of the second embodiment, the first feedback controller 12 performs feedback control on the voltage 21, the current 22 and/or the temperature 23 of the tunable seed light source 1.
Example 4
On the basis of the above embodiment, the terahertz laser includes the gas terahertz laser cavity 15, the working gas is filled in the gas terahertz laser cavity 15, and the input coupling mirror 14 and the output coupling mirror 16 are respectively disposed at two ends of the gas terahertz laser cavity 15.
Example 5
On the basis of the fourth embodiment, in CO 2 A reflecting mirror 9, a total reflecting mirror focusing mirror 13 and a CO are arranged between the laser amplifier 8 and the terahertz laser 2 The middle infrared laser output by the laser amplifier 8 is incident to the reflector 9, part of the middle infrared laser is transmitted by the reflector 9 and then is incident to the frequency sensor 10, and the other part of the middle infrared laser is reflected by the reflector 9 and then is input to the gas terahertz laser cavity 15 through the total reflection mirror focusing mirror 13 and the input coupling mirror 14 in sequence.
Example 6
On the basis of embodiment five, the reflectivity of the mirror 9 is greater than 95%.
Example 7
On the basis of the fourth embodiment, the fifth embodiment or the sixth embodiment, the device further comprises a beam splitter 20, a power sensor 18 and a second feedback controller 19, wherein the beam splitter 20 is arranged on one side of the output coupling mirror 16 far away from the gas terahertz laser cavity 15, the gas terahertz laser cavity 15 is connected with a cavity length driver 17, the cavity length driver 17 is connected with the output coupling mirror 16, and the output coupling mirror 16 is controlled to move along the direction far away from or near the gas terahertz laser cavity 15; the terahertz laser output by the gas terahertz laser cavity 15 is incident to the beam splitter 20 after passing through the output coupling mirror 16, part of the terahertz laser is reflected by the beam splitter 20 and then is transmitted to the power sensor 18, an electric signal generated by the power sensor 18 is input to the second feedback controller 19, and the second feedback controller 19 is electrically connected with the cavity length driver 17.
Example 8
On the basis of the seventh embodiment, the cavity length driver 17 is a stepping motor or a piezoelectric ceramic driver.
Example 9
On the basis of the above embodiment, the gas terahertz laser cavity 15 is filled with a working gas, and the working gas includes CH 3 OH、NH 3 Or HCOOH.
Example 10
On the basis of the embodiment, the tunable seed light source 1 has an operating wavelength of 9-12μm mid-infrared quantum cascade laser, or selective tuning CO 2 A laser.
Example 11
On the basis of the embodiment, the CO 2 The amplification form of the laser amplifier 8 adopts single-pass amplification, multi-pass amplification or oscillation amplification.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the invention.
Claims (8)
1. A terahertz laser system, characterized in that: comprises a tunable seed light source (1) and CO 2 The laser amplifier (8) and the terahertz laser are arranged, the tunable seed light source (1) provides seed laser matched with the absorption spectrum of working gas in the terahertz laser, and the seed laser passes through CO 2 The laser amplifier (8) is used as pumping light of the terahertz laser after power amplification, the pumping light is injected into the terahertz laser, a gas medium in the terahertz laser is excited to generate particle number inversion, terahertz laser is generated, and the terahertz laser is oscillated and output through a resonant cavity of the terahertz laser;
a frequency-selecting grating (2), an optical isolator (3), a total reflecting mirror (4), a polarization reflector (5), an electro-optical switch (6) and a concave total reflecting mirror (7) are sequentially arranged between the tunable seed light source (1) and the CO2 laser amplifier (8), and seed laser generated by the tunable seed light source (1) is sequentially incident to the CO2 laser amplifier (8) after passing through the frequency-selecting grating (2), the optical isolator (3), the total reflecting mirror (4), the polarization reflector (5), the electro-optical switch (6) and the concave total reflecting mirror (7); the device is also provided with a frequency sensor (10), a signal amplifier (11) and a first feedback controller (12), wherein part of middle infrared laser output by the CO2 laser amplifier (8) is incident to the frequency sensor (10), an electric signal generated by the frequency sensor (10) is input to the first feedback controller (12) after passing through the signal amplifier (11), and the first feedback controller (12) is electrically connected with the tunable seed light source (1);
the amplification form of the CO2 laser amplifier (8) adopts single-pass amplification, multi-pass amplification or oscillation amplification.
2. A terahertz laser system according to claim 1, wherein: the first feedback controller (12) feedback-controls the voltage (21), the current (22) and/or the temperature (23) of the tunable seed light source (1).
3. A terahertz laser system according to claim 1 or 2, characterized in that: the terahertz laser comprises a gas terahertz laser cavity (15), working gas is filled in the gas terahertz laser cavity (15), and an input coupling mirror (14) and an output coupling mirror (16) are respectively arranged at two ends of the gas terahertz laser cavity (15).
4. A terahertz laser system as set forth in claim 3 wherein: a reflecting mirror (9) and a total reflecting mirror focusing mirror (13) are arranged between a CO2 laser amplifier (8) and a terahertz laser, middle infrared laser output by the CO2 laser amplifier (8) is incident to the reflecting mirror (9), part of the middle infrared laser is transmitted by the reflecting mirror (9) and then is incident to a frequency sensor (10), and the other part of the middle infrared laser is reflected by the reflecting mirror (9) and then is sequentially input to a gas terahertz laser cavity (15) through the total reflecting mirror focusing mirror (13) and an input coupling mirror (14).
5. A terahertz laser system as set forth in claim 3 wherein: the device further comprises a beam splitter (20), a power sensor (18) and a second feedback controller (19), wherein the beam splitter (20) is arranged on one side of the output coupling mirror (16) far away from the gas terahertz laser cavity (15), the gas terahertz laser cavity (15) is connected with a cavity length driver (17), the cavity length driver (17) is connected with the output coupling mirror (16), and the output coupling mirror (16) is controlled to move along the direction far away from or close to the gas terahertz laser cavity (15); terahertz laser output by the gas terahertz laser cavity (15) is incident to the beam splitter (20) after passing through the output coupling mirror (16), part of the terahertz laser is reflected by the beam splitter (20) and then is transmitted to the power sensor (18), an electric signal generated by the power sensor (18) is input to the second feedback controller (19), and the second feedback controller (19) is electrically connected with the cavity length driver (17).
6. A terahertz laser system as set forth in claim 5, wherein: the cavity length driver (17) is a stepping motor or a piezoelectric ceramic driver.
7. A terahertz laser system according to claim 1, wherein: the gas terahertz laser cavity (15) is filled with working gas, and the working gas comprises CH3OH, NH3 or HCOOH.
8. A terahertz laser system according to claim 1, wherein: the tunable seed light source (1) is a mid-infrared quantum cascade laser with the working wavelength of 9-12 mu m or a selective tuning CO2 laser.
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CN110994336A (en) * | 2019-12-16 | 2020-04-10 | 长春理工大学 | High-efficiency tunable terahertz laser based on angle tuning |
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