CN107452898B - A kind of laser lift-off device and method - Google Patents
A kind of laser lift-off device and method Download PDFInfo
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- CN107452898B CN107452898B CN201610379077.3A CN201610379077A CN107452898B CN 107452898 B CN107452898 B CN 107452898B CN 201610379077 A CN201610379077 A CN 201610379077A CN 107452898 B CN107452898 B CN 107452898B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Abstract
The invention discloses a kind of laser lift-off device and method, and wherein laser lift-off device includes: the job transfer band for driving display screen to be stripped to move over, and the display screen to be stripped includes glass substrate and flexible display screen；Exposure mask radical occlusion device with transparent area and shading region, wherein transparent area is used to transmit a part of the laser beam and it is made to irradiate the display screen to be stripped driven in the job transfer band, laser lift-off is carried out to treat Peeled display screen, to obtain the flexible display screen and glass substrate being separated from each other；And shading region is used to block the rest part of the laser beam, to prevent job transfer described in laser irradiation from taking the region other than display screen to be stripped.This laser lift-off device and method of the present invention can be compatible with large-size screen monitors and smaller screen.
Description
Technical field
The present invention relates to the laser lift-off technique field in flexible display panels processing procedure, a kind of specific compatible large-size screen monitors of energy
Laser lift-off device and method (first cut and shell afterwards) to (first shell and cut afterwards) and smaller screen.
Background technique
With the development of information-intensive society, demand of the people to display equipment is growing.Flexible display panels are frivolous with its,
The characteristics of bent or even curling, good mechanical property, increasingly has been favored by people.Currently, flexible display panels are in life
Using more and more extensive.Flexible display panels include that flexible liquid crystal (LCD) panel and flexible Organic Light Emitting Diode are aobvious
Show (OLED) panel.Since flexible OLED panel has been provided simultaneously with OLED itself self-luminous, energy conservation and environmental protection, frivolous, flexible, durable
Property (impact resistance not cracky) the advantages that, so being considered as that can bring revolutionary variation for mobile device.
Flexible OLED panel brings very big challenge to its design and production due to the characteristic of its bending.In flexibility
In oled panel preparation method, it is divided into two kinds of R2R (roll-to-roll) and S2S (piece is to piece) according to base type, wherein R2R is due to producing
Line scrap build is larger and time to volume is unknown, and S2S is mainstream production method at present.
Laser lift-off technique is the mainstream technology in the preparation process of current S2S flexible display panels.Specifically, S2S is soft
Property display panel preparation method is the deposited polymer membrane on carrier glass substrate, then by the way of laser lift-off, from
Flexible screen is stripped down on substrate.
Above-mentioned display screen preparation can be realized by two ways: first is that the big panel of monolith again cuts flexible screen after first removing
At smaller screen (referred to as first shell cuts afterwards), the advantages of which is that yield is high, and substrate is reusable, the disadvantage is that yield is low, separate unit is set
Standby volume at high cost is big, and front and back processing procedure is at high cost；Second is that first big panel is first cut into after smaller screen again to the removing (letter of each smaller screen
Title is first cut to be shelled afterwards), the advantages of which is yield height, and single device is at low cost, and Technological adaptability is high, the disadvantage is that low yield, glass
The not reproducible use after being cut of glass substrate.
Summary of the invention
The purpose of the present invention is to propose to a kind of energy compatible large-size screen monitors (first shell and cut afterwards) and smaller screen (first to cut and shell afterwards) laser lift-off dress
It sets and method.
In order to achieve the above object, the present invention adopts the following technical scheme:
This laser lift-off device provided by the present invention, including for providing the light-source system of laser beam, further includes:
Job transfer band for driving display screen to be stripped to move over, the display screen to be stripped include glass base
Plate and flexible display screen；
Exposure mask radical occlusion device with transparent area and shading region, wherein transparent area is used to transmit a part of the laser beam
And make its irradiation on the display screen to be stripped that the job transfer band drives, laser lift-off is carried out to treat Peeled display screen,
To obtain the flexible display screen and glass substrate that are separated from each other；And shading region is used to block the rest part of the laser beam,
To prevent job transfer described in laser irradiation from taking the region other than display screen to be stripped.
This laser lift-off device of the present invention further includes following preferred embodiment based on the above technical solution:
The light-source system includes the laser for emitting laser beam and the laser for laser transmitting of blocking/let pass
The shutter of beam.
The display screen to be stripped is continuous stepped movement in the movement that the job transfer takes.
The laser lift-off device further include: even light shaping system, the laser beam for letting pass to the shutter carry out even light
And shaping, so that the section of laser beam is shaped to the uniform beam of predetermined shape；The exposure mask radical occlusion device is arranged in even finishing
The optical path downstream of shape system.
The predetermined shape is square or rectangle.
The laser lift-off device further include:
For providing upper piece conveyer belt of display screen to be stripped；
The display screen to be stripped on upper piece conveyer belt is picked and placed to the upper piece machinery taken to the job transfer
Arm.
The laser lift-off device further include:
It separately picks and places for the job transfer to be taken the glass substrate separated and flexible display screen under following
Bottom sheet mechanical arm on piece transmission belt；
The first predetermined position is delivered to, by the bottom sheet for picking and placing the bottom sheet mechanical arm to glass substrate thereon
Mechanical arm picks and places to flexible display screen thereon the bottom sheet conveyer belt for being delivered to the second predetermined position.
First predetermined position is that substrate stores equipment, and second predetermined position is that display screen stores equipment.
Upper piece mechanical arm and bottom sheet mechanical arm are made of spider robot.
The laser lift-off device further include: be set between the even light shaping system and exposure mask radical occlusion device, so that shaping
The reflecting mirror of exposure mask radical occlusion device described in laser beam directive afterwards.
The job transfer band is mounted on conveyer belt bogey, and the conveyer belt bogey is mounted on damping
On the plant bottom case of structure.
The exposure mask radical occlusion device has several figures formed by different transparent areas and different shading regions, and mask blocks dress
Setting has and several stations correspondingly of several figures on the chromium plating mask.
This laser-stripping method provided by the present invention, it is identical with conventional laser stripping means to be, also using sharp
Beam irradiation display screen to be stripped, and the laser beam and display screen to be stripped relatively move, thus by display screen to be stripped
Glass substrate and flexible display screen be separated from each other.The key improvements of this method are: make the display screen to be stripped relative to
Laser beam is mobile, and has the exposure mask radical occlusion device of transparent area and shading region, institute in the setting of the optical path upstream of display screen to be stripped
After a part of laser beam is stated through the transparent area of the exposure mask radical occlusion device, then irradiate on to the Peeled display screen；
During job transfer band drives display screen to be stripped mobile, by the glass substrate and flexible display screen on display screen to be stripped
It is separated from each other.
This laser-stripping method of the present invention further includes following preferred embodiment based on the above technical solution:
This method is carried out using above-mentioned laser lift-off device, specifically includes the following steps:
A, laser is opened, laser emits laser beam, and shutter is closed and shelters from the laser beam of laser transmitting；
B, exposure mask radical occlusion device is moved to corresponding station；
C, upper piece mechanical arm grabs display screen to be stripped from upper piece conveyer belt, and it is predetermined to be placed into job transfer band
Position, the predetermined position are corresponding with exposure mask radical occlusion device location interval；
D, the job transfer band predetermined position is placed in display screen to be stripped and laser is carried out to Peeled display screen
When removing, the laser beam of shutter opening and the transmitting of clearance laser, the laser beam being cleared is whole after even light shaping system
Formation is truncated into square or rectangular uniform beam, and a part of the laser beam after being shaped is through exposure mask radical occlusion device
Transparent area and irradiate and carry out laser lift-off on display screen to be stripped, the glass substrate and flexible display screen being separated from each other；
After the completion of laser lift-off, shutter is closed and shelters from again the laser beam of laser transmitting；
E, job transfer is taken the glass substrate separated and flexible display screen and separately picked and placed under by bottom sheet mechanical arm
On piece transmission belt, bottom sheet conveyer belt by the bottom sheet mechanical arm pick and place to thereon glass substrate and flexible display screen convey respectively
It is stored in equipment and display screen storage equipment to substrate.
The step a and step b are in no particular order.
The invention has the advantages that
1, because the present invention is before laser beam directive display screen to be stripped, being provided in the optical path of laser beam has thoroughly
The exposure mask radical occlusion device in light area and shading region, and display screen to be stripped is placed on job transfer band to drive it relative to covering
The laser beam that film radical occlusion device transmits is mobile, and exposure mask radical occlusion device only transmits the effective laser for capableing of directive Peeled display screen
Light, and the invalid or even harmful laser beam fallen outside directive Peeled display screen is shielded and (blocks), it can so be compatible with simultaneously big
Screen removing and smaller screen remove two kinds of removing modes, user-friendly.
2, for the present invention before laser beam directive display screen to be stripped, being provided in the optical path of laser beam has transparent area
With the exposure mask radical occlusion device of shading region, and display screen to be stripped is placed on job transfer band to drive it to hide relative to exposure mask
The laser beam that blocking means transmit is mobile, and exposure mask radical occlusion device only transmits the effective laser light for capableing of directive Peeled display screen
Line, and the invalid or even harmful laser beam fallen outside directive Peeled display screen is shielded and (blocks), in this way, only appropriate adjustment is needed to cover
The position of transparent area and size on film radical occlusion device can remove the display screen to be stripped of various sizes, namely carry out
It is not limited by screen size to be stripped when laser lift-off, is flexibly applied to various cut lengths panel production producing lines.
3, the present invention blocks the laser beam after shaping using mask, and display screen to be stripped especially smaller screen is made to exist
Screen edge and screen exterior domain are not irradiated with a laser when removing.
4, the present invention is controlled using shutter folding whether laser beam irradiates substrate, guarantees there was only display to be stripped
Shield region by laser irradiation, other driving circuits and edge pressing device are not influenced.
5, the present invention uses conveyer belt transmission mode+manipulator, effectively improves removing yield.
Detailed description of the invention
The invention will be described further in the following with reference to the drawings and specific embodiments:
Fig. 1 is the structural schematic diagram of this laser lift-off device of the embodiment of the present invention；
Fig. 2 is the structural schematic diagram of mask radical occlusion device in this laser lift-off device of the embodiment of the present invention；
Fig. 3 is demonstration graph when this laser lift-off device of the embodiment of the present invention carries out large-size screen monitors overburden operation；
Fig. 4 is demonstration graph when this laser lift-off device of the embodiment of the present invention carries out smaller screen overburden operation；
Wherein: A- display screen to be stripped, A1- flexible display screen, B- laser beam, 1- laser, 2- shutter, the even light shaping of 3-
System, 4- reflecting mirror, 5- exposure mask radical occlusion device, 5a- light transmission, the shading region 5b-, 6- job transfer band, upper conveyer belt of 7-, on 8-
Piece mechanical arm, 9- bottom sheet mechanical arm, 10- bottom sheet conveyer belt, 11- conveyer belt bogey, 12- plant bottom case.
Specific embodiment
Fig. 1 shows a specific embodiment of this laser lift-off device of the present invention, which includes along optical path direction
Laser 1, shutter 2, even light shaping system 3, reflecting mirror 4, exposure mask radical occlusion device 5 and the job transfer band 6 being sequentially arranged.
Wherein, the B for emitting laser beams of laser 1, i.e. offer light source.Shutter 2 can be opened and closed quickly, for blocking/letting pass
The laser beam that the laser 1 emits.In practical application, laser can also be substituted using the light-source system of other forms,
And this light-source system can carry shutter, without shutter 2 is additionally arranged.When shutter 2 is in the open state, laser 1
The laser beam of transmitting is projected outward by shutter.When shutter 2 in the closure state, laser 1 emit laser beam it is fast
Door blocks and not all right outside injection.The laser beam that even light shaping system 3 is used to let pass to the shutter carries out even light and shaping, and
Make laser beam be shaped to section to be square or rectangular uniform beam, a length of L, the width W in section, light beam after shaping
Energy uniformity is less than 2%, and wherein L is generally not less than 1300mm, when the rectangular long L, width W ratio are very big,
Rectangular cross-sectional also can be considered strip threadiness section.Reflecting mirror 4 passes for changing through the laser beam of even 3 shaping of light shaping system
Direction is broadcast, its directive exposure mask radical occlusion device 5 is made.The effect of the reflecting mirror 4 for purely change paths direction, if
It does not need to be changed optical path direction, then can not have to that the reflecting mirror 4 is arranged.As shown in Fig. 2, exposure mask radical occlusion device 5 has
Transparent area 5a and shading region 5b, wherein transparent area 5a is used to transmit a part of laser beam after shaping and passes its irradiation in operation
It send band 6 to drive on the display screen A to be stripped of operation, laser lift-off is carried out to treat Peeled display screen A, to be separated from each other
Flexible display screen A1 and glass substrate.It is well known that display screen A to be stripped is made of glass substrate and flexible display screen A1.
And shading region 5b is used to block the rest part of laser beam after shaping, to prevent the area other than laser irradiation display screen A to be stripped
Domain.Job transfer band 6 is for driving display screen A to be stripped to make continuous stepped movement (obviously, job transfer band itself on it
Also make continuous stepped movement).
For convenience to the feeding of the display screen A to be stripped, the present embodiment is also provided with for providing display to be stripped
Upper piece conveyer belt 7 of screen A picks and places the display screen A to be stripped on upper piece conveyer belt 7 to the job transfer band 6
On upper piece mechanical arm 8.As it can be seen that upper piece conveyer belt 7 and upper piece mechanical arm 8 constitute the automatic charging of display screen A to be stripped
System.
In job transfer band 6 deviation occurs for display screen A to be stripped in order to prevent, and the present embodiment is set on job transfer band 6
It is equipped with the pressing device for fixing display screen A to be stripped.When upper piece mechanical arm 8 puts display screen A to be stripped to job transfer
When 6 predetermined position of band, there are two the length both ends that the pressing device is distributed in display screen A to be stripped on job transfer band 6.
In addition, being carried out down for convenience on job transfer band 6 by the flexible display screen A1 and glass substrate that separate
Material, the present embodiment are also provided with bottom sheet mechanical arm 9 and bottom sheet conveyer belt 10, wherein bottom sheet mechanical arm 9 is for passing the operation
The glass substrate separated on band 6 and flexible display screen A1 is sent separately to pick and place to bottom sheet transmission belt 10, and bottom sheet conveyer belt
10 glass substrates for being used to pick and place the bottom sheet mechanical arm 10 to thereon and flexible display screen A1 are delivered to substrate storage respectively
In equipment and display screen storage equipment.As it can be seen that the bottom sheet mechanical arm 9 and bottom sheet conveyer belt 10 constitute by separation of glasses substrate and
The automatic blanking system of flexible display screen A1.
Specifically in the present embodiment, upper piece mechanical arm 8 and bottom sheet mechanical arm 9 are made of spider robot.Institute
It states job transfer band 6 to be mounted on a conveyer belt bogey 11, the conveyer belt bogey 11 is mounted on damping knot
It is to be stripped when preventing upper piece mechanical arm 8 to be placed on display screen A to be stripped on job transfer band 6 on the plant bottom case 12 of structure
Display screen A beats on job transfer band 6, and then influences laser lift-off quality.
In the present embodiment, the wavelength of laser beam used in the laser 1 is 308nm or 355nm, and pulse energy is
500mJ-1000mJ, pulse frequency 200-300Hz, energy density 200-300mJ/m2。
Exposure mask radical occlusion device 5 includes one piece of chromium plating mask, and the transparent area 5a and shading region 5b are formed in the chromium plating
On mask, there are different several figures, each figure is by different transparent area 5a and different shadings on chromium plating mask
Area 5b is formed, as shown in Fig. 2, having four be sequentially arranged from left to right on the chromium plating mask of the exposure mask radical occlusion device 5 not
Same figure, being followed successively by tool from left to right, there are four the second figures of larger transparent area there are five the first figure of small transparent area, tool
The 4th figure of shape, tool there are three the third figure of bigger transparent area and with a maximum transmission area.Mask radical occlusion device 5 has
Have with several stations correspondingly of several figures on the chromium plating mask, when carrying out laser lift-off to different products,
Mask radical occlusion device 5 is moved to corresponding station.
The transparent area of the figure a length of L1, width W1, share M transparent area, and a length of L2 in shading region, width W1 share N
A lightproof area, the equal chromium plating in remaining region of chromium plating mask are light-blocking.The width of transparent area swashs after being greater than shaping on chromium plating mask
The width of beam cross section, i.e. W1 > W；The sum of transmission region and light blocking region total length are less than or equal to lasing aperture after shaping
Length, i.e. M × L1+N × L2≤L.
It is assumed that a length of L3 of the display screen A to be stripped, width W3, the edge display screen A to be stripped and its both ends cover
The spacing of part is S, then the relationship between the display screen A to be stripped corresponding mask light transmission section length is L3 < L1 < L3+2S,
Laser beam is completely covered display screen length to be stripped and will not be irradiated on other devices.The upper piece mechanical arm to be stripped will be shown
When display screen is placed into job transfer band 6, display screen side length L3 middle line to be stripped is overlapped with mask graph transparent area side length L1 middle line.
Job transfer band 6 is moved using continuous stepped, step distance D, then step distance swashs after being less than or equal to shaping
The width of light beam, i.e. D≤W, stepping time T1 are less than or equal to laser pulse interval time T2, i.e. T1≤T2.
Referring to shown in Fig. 3 and Fig. 4, the method that laser lift-off is carried out using this laser lift-off device of the present embodiment, including
Following steps:
A, laser 1 is opened, laser 1 emits laser beam, and shutter 2 is closed and shelters from the laser beam of the transmitting of laser 1,
To prevent laser beam to be radiated at non-peel-away region.
B, exposure mask radical occlusion device 5 is moved to corresponding station.
Above-mentioned steps b can be carried out before step a, can also be carried out after step a, can also be carried out simultaneously with step a.
C, upper piece mechanical arm 8 grabs display screen A to be stripped from upper piece conveyer belt 7, and is placed into job transfer band 6
Predetermined position, the predetermined position and 5 location interval of exposure mask radical occlusion device and corresponding.
D, 6 predetermined position of job transfer band is placed in display screen A to be stripped and Peeled display screen A is swashed
When photospallation, shutter 2 is opened and the laser beam of the transmitting of clearance laser 1 (can treat Peeled display by driving circuit or device
Platen edge position is incuded to control the shutter opening), the laser beam being cleared is shaped after even light shaping system 3
At square or rectangular uniform beam is truncated into, a part of the laser beam after being shaped is through exposure mask radical occlusion device 5
Transparent area 5a and irradiate and carry out laser lift-off on display screen A to be stripped, the glass substrate and Flexible Displays being separated from each other
Shield A1.The rest part of laser beam after being shaped then is sheltered from by shading region 5b, with prevent fraction of laser light irradiation described to
Region other than Peeled display screen A, such as Fig. 2, Fig. 3 and Fig. 4.It (obviously, is placed to the operation in display screen A to be stripped to pass
Before sending 6 predetermined position of band, shutter 2 is in closed state always, to shelter from the laser beam of the transmitting of laser 1, prevents from swashing
Light emission is to the region other than display screen to be stripped).
After the completion of laser lift-off, shutter 2 is closed and shelters from again the laser beam of the transmitting of laser 1.
E, bottom sheet mechanical arm 9 separately picks and places the glass substrate separated on job transfer band 6 and flexible display screen A1
To bottom sheet transmission belt 10, bottom sheet conveyer belt 10 picks and places the bottom sheet mechanical arm 10 to glass substrate and Flexible Displays thereon
Screen A1 is delivered to respectively in substrate storage equipment and display screen storage equipment.
It is not difficult to find out that this laser-stripping method of the present embodiment exists compared to the key improvements of conventional laser stripping means
In: this method makes display screen A to be stripped make continuous stepped movement relative to laser beam, and in the optical path of display screen A to be stripped
Upstream (i.e. laser beam reach display screen A to be stripped before position) setting blocks with the exposure mask of transparent area 5a and shading region 5b
Device 5, a part of the laser beam is through the transparent area 5a of the exposure mask radical occlusion device 5 and then irradiation to the removing
On display screen A, thus by display screen A to be stripped glass substrate and flexible display screen A1 be separated from each other.
This key improvements enables the method to be compatible with two kinds of large-size screen monitors (first shell and cut afterwards) and smaller screen (first cut and shell afterwards) simultaneously
Removing mode, it is user-friendly, such as Fig. 3 and Fig. 4.When user will carry out large-size screen monitors removing (first shell and cut afterwards), can be selected has
(quantity of the general transparent area only has one to large scale transparent area, as having on 5 chromium plating mask of exposure mask radical occlusion device in Fig. 2
4th figure in one maximum transmission area) exposure mask radical occlusion device station.When user will carry out smaller screen removing (first cut and shell afterwards),
It is optional that with small size transparent area, (generally the quantity of the transparent area is multiple, as exposure mask radical occlusion device 5 plates chrome mask in Fig. 2
In version have there are three transparent area third figure) exposure mask radical occlusion device station.
Certainly, the above embodiments merely illustrate the technical concept and features of the present invention, and its object is to make people much of that
The solution contents of the present invention are simultaneously implemented accordingly, and it is not intended to limit the scope of the present invention.All major techniques according to the present invention
The equivalent transformation or modification that the Spirit Essence of scheme is done, should be covered by the protection scope of the present invention.
Claims (13)
1. a kind of laser lift-off device, including for providing the light-source system of laser beam, it is characterised in that the laser lift-off device
Further include:
Job transfer band for driving display screen to be stripped to move over, the display screen to be stripped include glass substrate and
Flexible display screen；
Exposure mask radical occlusion device with transparent area and shading region, wherein transparent area is used to transmit a part of the laser beam and makes
It is irradiated on the display screen to be stripped that the job transfer band drives, and carries out laser lift-off to treat Peeled display screen, thus
Obtain the flexible display screen and glass substrate being separated from each other；And shading region is used to block the rest part of the laser beam, with resistance
Only job transfer described in laser irradiation takes the region other than display screen to be stripped；
Wherein the exposure mask radical occlusion device is relative to the laser beam kept stationary；
The exposure mask radical occlusion device includes a chromium plating mask, is had on the chromium plating mask by different transparent areas and different screenings
The different several figures of the size that light area is formed, the exposure mask radical occlusion device have with several figures on chromium plating mask one by one
Corresponding several stations.
2. laser lift-off device according to claim 1, it is characterised in that: the light-source system includes transmitting laser beam
The shutter of laser and the laser beam for laser transmitting of blocking/let pass.
3. laser lift-off device according to claim 1, it is characterised in that: the display screen to be stripped is passed in the operation
Send the movement taken for continuous stepped movement.
4. laser lift-off device according to claim 2, it is characterised in that the laser lift-off device further include: even light shaping
System, the laser beam for letting pass to the shutter carry out even light and shaping, laser beam are made to be shaped to section predetermined shape
Uniform beam；The exposure mask radical occlusion device is arranged in the optical path downstream of even light shaping system.
5. laser lift-off device according to claim 4, it is characterised in that: the predetermined shape is square or rectangular
Shape.
6. laser lift-off device according to claim 4, it is characterised in that the laser lift-off device further include:
For providing upper piece conveyer belt of display screen to be stripped；
The display screen to be stripped on upper piece conveyer belt is picked and placed to the upper piece mechanical arm taken to the job transfer.
7. laser lift-off device according to claim 6, it is characterised in that the laser lift-off device further include:
It separately picks and places for the job transfer to be taken the glass substrate separated and flexible display screen to following bottom sheet biography
The dynamic bottom sheet mechanical arm taken；
The the first predetermined position, bottom sheet is mechanical is delivered to for picking and placing the bottom sheet mechanical arm to glass substrate thereon
Arm picks and places to flexible display screen thereon the bottom sheet conveyer belt for being delivered to the second predetermined position.
8. laser lift-off device according to claim 7, it is characterised in that: first predetermined position is that substrate storage is set
Standby, second predetermined position is that display screen stores equipment.
9. laser lift-off device according to claim 7, it is characterised in that: upper piece mechanical arm and bottom sheet mechanical arm are equal
It is made of spider robot.
10. laser lift-off device according to claim 4, it is characterised in that the laser lift-off device further include: be set to institute
State between even light shaping system and exposure mask radical occlusion device, so that exposure mask radical occlusion device described in laser beam directive after shaping reflection
Mirror.
11. laser lift-off device according to claim 1, it is characterised in that: the job transfer band is mounted on conveyer belt
On bogey, the conveyer belt bogey is mounted on the plant bottom case with shock-damping structure.
12. a kind of laser-stripping method irradiates display screen to be stripped, and the laser beam and display screen to be stripped using laser beam
Relative movement, thus by display screen to be stripped glass substrate and flexible display screen be separated from each other, it is characterised in that: make described
Display screen to be stripped is mobile relative to laser beam, and the optical path upstream of display screen to be stripped is provided with exposure mask radical occlusion device, institute
Stating exposure mask radical occlusion device includes a chromium plating mask, is had on the chromium plating mask by different transparent areas and different shading region shapes
At the different several figures of size, the exposure mask radical occlusion device has one-to-one with several figures on chromium plating mask
Several stations, wherein the exposure mask radical occlusion device, relative to the laser beam kept stationary, a part of the laser beam penetrates
After the transparent area of the exposure mask radical occlusion device, then irradiate on to the Peeled display screen.
13. laser-stripping method according to claim 12, it is characterised in that this method is appointed using in claim 1-11
Laser lift-off device described in one claim carries out, comprising the following steps:
A, laser is opened, laser emits laser beam, and shutter is closed and shelters from the laser beam of laser transmitting；
B, exposure mask radical occlusion device is moved to corresponding station；
C, upper piece mechanical arm grabs display screen to be stripped from upper piece conveyer belt, and is placed into job transfer band pre-determined bit
It sets, the predetermined position is corresponding with exposure mask radical occlusion device location interval；
D, the job transfer band predetermined position is placed in display screen to be stripped and laser lift-off is carried out to Peeled display screen
When, the laser beam of shutter opening and the transmitting of clearance laser, the laser beam being cleared is shaped to after even light shaping system
Section is square or rectangular uniform beam, a part of the laser beam after being shaped penetrate the light transmission of exposure mask radical occlusion device
Area and irradiate and carry out laser lift-off on display screen to be stripped, the glass substrate and flexible display screen being separated from each other；
After the completion of laser lift-off, shutter is closed and shelters from again the laser beam of laser transmitting；
E, job transfer is taken the glass substrate separated and flexible display screen and separately picked and placed to bottom sheet biography by bottom sheet mechanical arm
It is dynamic to take, bottom sheet conveyer belt by the bottom sheet mechanical arm pick and place to thereon glass substrate and flexible display screen be delivered to base respectively
Plate stores in equipment and display screen storage equipment.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610379077.3A CN107452898B (en) | 2016-05-31 | 2016-05-31 | A kind of laser lift-off device and method |
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| CN201610379077.3A CN107452898B (en) | 2016-05-31 | 2016-05-31 | A kind of laser lift-off device and method |
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| CN107452898A CN107452898A (en) | 2017-12-08 |
| CN107452898B true CN107452898B (en) | 2019-08-23 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2019200611A1 (en) * | 2018-04-20 | 2019-10-24 | 深圳市柔宇科技有限公司 | Display panel laser lift-off method and laser lift-off apparatus |
| CN108538784B (en) * | 2018-06-19 | 2023-12-01 | 南通中铁华宇电气有限公司 | Laser stripping device for patterned epitaxial structure |
| CN108890123B (en) * | 2018-06-25 | 2020-06-26 | 武汉华星光电半导体显示技术有限公司 | Equipment system integrating laser stripping and laser cutting and operation method thereof |
| CN109238652B (en) * | 2018-07-25 | 2020-06-30 | 武汉华星光电半导体显示技术有限公司 | Light screen |
| CN112935558A (en) * | 2021-03-04 | 2021-06-11 | 苏州博金希光电科技有限公司 | Automatic assembly line display screen stripping technology and application thereof |
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| CN102986001A (en) * | 2010-07-20 | 2013-03-20 | 优志旺电机株式会社 | Laser peeling method and laser pealing apparatus |
| CN103887157A (en) * | 2014-03-12 | 2014-06-25 | 京东方科技集团股份有限公司 | Optical mask plate and laser lift-off device |
| CN204257593U (en) * | 2014-11-26 | 2015-04-08 | 昆山工研院新型平板显示技术中心有限公司 | Laser lift-off equipment |
| CN104916574A (en) * | 2015-04-22 | 2015-09-16 | 四川虹视显示技术有限公司 | Flexible OLED demoulding device |
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| US8137417B2 (en) * | 2006-09-29 | 2012-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Peeling apparatus and manufacturing apparatus of semiconductor device |
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| CN102986001A (en) * | 2010-07-20 | 2013-03-20 | 优志旺电机株式会社 | Laser peeling method and laser pealing apparatus |
| CN103887157A (en) * | 2014-03-12 | 2014-06-25 | 京东方科技集团股份有限公司 | Optical mask plate and laser lift-off device |
| CN204257593U (en) * | 2014-11-26 | 2015-04-08 | 昆山工研院新型平板显示技术中心有限公司 | Laser lift-off equipment |
| CN104916574A (en) * | 2015-04-22 | 2015-09-16 | 四川虹视显示技术有限公司 | Flexible OLED demoulding device |
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