CN107452881A - Transparent conductive film electrode based on flexible glass and preparation method thereof - Google Patents
Transparent conductive film electrode based on flexible glass and preparation method thereof Download PDFInfo
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- CN107452881A CN107452881A CN201710589964.8A CN201710589964A CN107452881A CN 107452881 A CN107452881 A CN 107452881A CN 201710589964 A CN201710589964 A CN 201710589964A CN 107452881 A CN107452881 A CN 107452881A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/38—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal at least one coating being a coating of an organic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/31—Pre-treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Abstract
The invention discloses a kind of transparent conductive film electrode based on flexible glass and preparation method thereof, and the TCO/ metals based on flexible glass/TCO transparent conductive film electrodes are made with transparent conductive oxide TCO rotary target materials and metal flat target material magnetic sputtering by continuous volume to volume (R2R) method especially on the glass of flexible.The transparent conductive film electrode resistance low-transmittance high flexibility prepared using the design of the present invention is good.
Description
Technical field
The invention discloses a kind of film motor, particularly a kind of low-resistance high-transmittance rate based on flexible glass it is transparent
Conductive film electrode and preparation method thereof.
Background technology
Flexible electronic is exactly the emerging electricity being produced on electronic device on flexible Drawability plastics, glass or thin metal matrix plate
Sub- technology, with its unique flexibility, ductility and efficient, inexpensive manufacturing process, led in information, the energy, medical treatment, national defence etc.
Domain has wide application prospect, such as flexible electronic displays, thin-film solar cell panel, electronics surface mount.Flexible electrical
Son have it is soft, deformable, light, portable, can the characteristic such as large-area applications, and by widely applying new material and new technology to produce
A large amount of new opplications are born, including RFID, Flexible Displays, OLED are luminous, sensor, flexible photovoltaic, logical AND store, flexible electrical
Pond.In future, " electronics paster " is pasted on the back of the hand with regard to that can detect ultraviolet degree of illumination；Pacemaker no longer changes electricity
Pond；Battery can directly wind production simultaneously.In recent years, this new branch of science of flexible electronic has caused domestic and international scientific and technological circle
With the extensive concern of industrial quarters, the R＆D process that numerous companies put into this sciemtifec and technical sphere is attract, accelerates flexible electrical
The practical product exploitation of son and commercialization process.Development in science and technology " 13 " planning in, country by policy guide with
Nursery finance will promote the flexible research and industrialization with printed electronic of China energetically.China is electronic industry big country, but is not
Technology is made the country prosperous, and flexible electronic is the chance that China strives for electronic industry great-leap-forward development.Flexible electronic has broad mass market, market
Scale is expanded rapidly, can turn into national pillar industry.
Flexible electronic transparent conductive film is exactly that caused film is not only conductive with more the transparency, is flexible
Thin film solar, display screen, electrochromic device, thin film transistor (TFT), electric capacity and electric resistance touch screen, transparent heater etc. it is important
Material.Compared with rigid substrate transparent conductive film, it also with flexibility and may extend away in addition to the conductive and transparency
Property, it is the important materials for developing flexible electronic device.The transparent conductive oxide prepared on conventional rigid glass or plastics is thin
Membrane electrode is due to bill of materials one, and when usually resistance is low, film thickness causes light transmittance low, on the contrary, light transmittance is high, film is thin, resistance
Greatly, the transparent membrane prepared on plastics such as PET has numerous conditions to limit, and performance is nothing like nonbreakable glass matrix.With
The appearance of flexible glass, prepare based on flexible glass membrane electrode, it will have extensive market in flexible electronic industry,
And positive impetus is played in the development to flexible electronic.
The content of the invention
Goal of the invention：A kind of TCO/ metals/TCO transparent conductive films electrode based on flexible glass and its preparation side are provided
Method.Pass through continuous volume to volume (R2R) method TCO rotary target materials and metal flat especially on the glass of flexible
Target material magnetic sputtering makes the TCO/ metals based on flexible glass/TCO transparent conductive film electrodes.
Technical scheme：The present invention uses following technical scheme：A kind of transparent conductive film electrode based on flexible glass,
TCO/ metals/TCO plural layers are set on the glass of flexible, i.e., obtained according to TCO, metal and TCO stacking order
TCO/ metals/TCO plural layers.
Further, transparent conductive oxide TCO includes ITO, AZO, GZO, GIO, IGZO, IZO, STO, FTO, ZTO.
Further, metal includes：Ag,Cu,Au,Al,Mg,W,Mo,Zn,Ni,In,Pt,Pd,Sn,Cr,Ta,Ti.
Further, transparent conductive oxide TCO thickness 40-100nm；The thickness 4-20nm of metal.
A kind of preparation method of the transparent conductive film electrode based on flexible glass, it is characterised in that comprise the following steps：
Flexible glass is heated to 200 DEG C of removing surface moistures by step 1. in vacuum chamber；Then pass to 450/5SCCM flows
Ar/O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
Step 2. arrives 3kW, Ar/O in radio-frequency power 1.82Flow 300SCCM, operating pressure 2mTorr；Flexible glass is wound
Speed 1m/min deposits the film of respective thickness with transparent conductive oxide rotary target material in flexible glass；
Step 3. arrives 1.0kW, Ar flow 300SCCM, operating pressure 2mTorr in dc power 0.2；Flexible glass is wound
Speed 1m/mi, with metal flat target on flexible glass transparent conductive oxide film deposited metal film；
Step 4. repeat step (2), deposited in metal film surfaces thin with the transparent conductive oxide of step 2 same thickness
Film, form TCO/ metals/TCO structural membranes；
Step 5. carries out performance measurement and structural characterization.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four visit
Pin resistance measuring instrument etc. measures to TCO/ metals/TCO sheet resistance, light transmittance, structure and flexibility etc.；
Step 6. is coated with PCBM polymer with blade coating method on the superiors TCO；
Step 7. is coated with P3HT polymer with blade coating method on PCBM polymer；
Step 8. is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode；
Step 9. is measured the battery performance of preparation with solar simulator.
Further, in step 2, in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；It is soft
Property glass winding speed 1m/min transparent conductive oxide rotary target material deposit thickness 40nm in flexible glass film；Together
When, in step 3, in dc power 0.2kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Mi, 4nm Cu metallic films are deposited on flexible glass transparent conductive oxide film with Cu planar targets.
Further, in step 2, in radio-frequency power 2.5kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；It is soft
Property glass winding speed 1m/min with AZO transparent conductive oxide rotary target materials in flexible glass deposit thickness 60nm it is thin
Film；Meanwhile in step 3, in dc power 0.6kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/mi is spent, 12nm Ag metallic films are deposited on flexible glass transparent conductive oxide film with Ag planar targets.
Further, in step 2, in radio-frequency power 3kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；It is flexible
Glass winding speed 1m/min GZO transparent conductive oxide rotary target materials deposit thickness 100nm in flexible glass film；
Meanwhile in step 3, in dc power 0.3kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/mi, 6nm Au metallic films are deposited on flexible glass transparent conductive oxide film with Au metal flats target.
Further, in step 2, in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；It is soft
Property glass winding speed 1m/min with IZO transparent conductive oxide rotary target materials in flexible glass deposit thickness 45nm it is thin
Film；Meanwhile in step 3, in dc power 1.0kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/mi is spent, 20nm Ag metallic films are deposited on flexible glass transparent conductive oxide film with Ag metal flats target.
Beneficial effect：The present invention is compared with prior art：The transparent conductive film electrode prepared using the design of the present invention
Resistance low-transmittance high flexibility is good.TCO/ metals/TCO can not only produce low resistance, and light transmittance is more than 88%；Moreover,
TCO/ metals/TCO membrane electrode can be effectively increased the efficiency of solar cell.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
1, flexible glass in figure, 2, TCO, 3, metal, 4, TCO, 5, PCBM, 6, P3HT
Embodiment
A kind of TCO/ metals based on flexible glass/TCO transparent conductive film electrodes and preparation method thereof step is as follows:
Flexible glass is heated to 200 DEG C of removing surface moistures by step 1. in vacuum chamber；Then pass to 450/5SCCM flows
Ar/O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
Step 2. is in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
Degree 1m/min deposits the film of respective thickness with transparent conductive oxide rotary target material in flexible glass；
Step 3. arrives 0.4kW, Ar flow 300SCCM, operating pressure 2mTorr in dc power 0.1；Flexible glass is wound
Speed 1m/mi, with metal flat target on flexible glass transparent conductive oxide film deposited metal film；
Step 4. repeat step (2), deposited in metal film surfaces thin with the transparent conductive oxide of step 2 same thickness
Film, form TCO/ metals/TCO structural membranes；
Step 5. carries out performance measurement and structural characterization.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four visit
Pin resistance measuring instrument etc. measures to TCO/ metals/TCO sheet resistance, light transmittance, structure and flexibility etc.；
Step 6. is coated with PCBM polymer with blade coating method on the superiors TCO
Step 7. is coated with P3HT polymer with blade coating method on PCBM polymer
Step 8. is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode
Step 9. is measured the battery performance of preparation with solar simulator.
Embodiment 1
(1) flexible glass is heated to 200 DEG C of removing surface moistures in vacuum chamber；Then pass to 400/4SCCM flows Ar/
O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
(2) in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/min transparent conductive oxide rotary target material deposit thickness 40nm in flexible glass film；
(3) in dc power 0.2kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Mi, 4nm Cu metallic films are deposited on flexible glass transparent conductive oxide film with Cu planar targets；
Step 4. repeat step (2), deposited in metal film surfaces thin with the transparent conductive oxide of step 2 same thickness
Film, form TCO/ metals/TCO structural membranes；
(5) performance measurement and structural characterization are carried out.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four probes
Resistance measuring instrument etc. measures to ITO/Cu/ITO sheet resistance, light transmittance, structure and flexibility etc.；
(6) PCBM polymer is coated with the superiors TCO with blade coating method
(7) P3HT polymer is coated with PCBM polymer with blade coating method
(8) it is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode
(9) battery performance of preparation is measured with solar simulator.
Embodiment 2
(1) flexible glass is heated to 200 DEG C of removing surface moistures in vacuum chamber；Then pass to 450/5SCCM flows Ar/
O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
(2) in radio-frequency power 2.5kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/min AZO transparent conductive oxide rotary target materials deposit thickness 60nm in flexible glass film；
(3) in dc power 0.6kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Mi, 12nm Ag metallic films are deposited on flexible glass transparent conductive oxide film with Ag planar targets；
Step 4. repeat step (2), deposited in metal film surfaces thin with the transparent conductive oxide of step 2 same thickness
Film, form AZO/Ag/AZO structural membranes；
(5) performance measurement and structural characterization are carried out.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four probes
Resistance measuring instrument etc. measures to AZO/Ag/AZO sheet resistance, light transmittance, structure and flexibility etc.；
(6) PCBM polymer is coated with the superiors TCO with blade coating method
(7) P3HT polymer is coated with PCBM polymer with blade coating method
(8) it is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode
(9) battery performance of preparation is measured with solar simulator.
Embodiment 3
(1) flexible glass is heated to 200 DEG C of removing surface moistures in vacuum chamber；Then pass to 450/5SCCM flows Ar/
O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
(2) in radio-frequency power 3kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Min GZO transparent conductive oxide rotary target materials deposit thickness 100nm in flexible glass film；
(3) in dc power 0.3kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Mi, 6nm Au metallic films are deposited on flexible glass transparent conductive oxide film with Au metal flats target；
Step 4. repeat step (2), deposited in metal film surfaces thin with the transparent conductive oxide of step 2 same thickness
Film, form GZO/Au/GZO structural membranes；
(5) performance measurement and structural characterization are carried out.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four probes
Resistance measuring instrument etc. measures to GZO/Au/GZO sheet resistance, light transmittance, structure and flexibility etc.；
(6) PCBM polymer is coated with the superiors TCO with blade coating method
(7) P3HT polymer is coated with PCBM polymer with blade coating method
(8) it is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode
(9) battery performance of preparation is measured with solar simulator.
Embodiment 4
(1) flexible glass is heated to 200 DEG C of removing surface moistures in vacuum chamber；Then pass to 450/5SCCM flows Ar/
O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
(2) in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/min IZO transparent conductive oxide rotary target materials deposit thickness 45nm in flexible glass film；
(3) in dc power 1.0kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Mi, 20nm Ag metallic films are deposited on flexible glass transparent conductive oxide film with Ag metal flats target；
Step 4. repeat step (2), deposited in metal film surfaces thin with the transparent conductive oxide of step 2 same thickness
Film, form IZO/Ag/IZO structural membranes；
(5) performance measurement and structural characterization are carried out.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four probes
Resistance measuring instrument etc. measures to IZO/Ag/IZO sheet resistance, light transmittance, structure and flexibility etc.；
(6) PCBM polymer is coated with the superiors TCO with blade coating method
(7) P3HT polymer is coated with PCBM polymer with blade coating method
(8) it is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode
(9) battery performance of preparation is measured with solar simulator.
Embodiment 5
(1) flexible glass is heated to 200 DEG C of removing surface moistures in vacuum chamber；Then pass to 450/5SCCM flows Ar/
O2Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
(2) in radio-frequency power 10kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Min transparent conductive oxide rotary target material deposit thickness 250nm in flexible glass film；
(3) repeat steps (2), in the transparent conductive oxide film of ITO surfaces deposition same thickness, it is thin to form ITO
Film；
(4) performance measurement and structural characterization are carried out.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four probes
Resistance measuring instrument etc. measures to ITO sheet resistance, light transmittance, structure and flexibility etc.；
(5) PCBM polymer is coated with the superiors TCO with blade coating method
(6) P3HT polymer is coated with PCBM polymer with blade coating method
(7) it is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode
(8) battery performance of preparation is measured with solar simulator.
The flexible and transparent glass TCO/ metals of table 1/TCO Structural Performance Analysis results
The flexible and transparent glass TCO/ metals of table 2/TCO thin film electrode organic photovoltaic battery
From table 1, it can be seen that TCO/ metals/TCO can not only produce low resistance, and light transmittance is more than 88%；Table 2
Comparative analysis find that TCO/ metals/TCO membrane electrode can be effectively increased the efficiency of solar cell.
Above-described embodiment is merely to illustrate the present invention, and according to above-described embodiment, the present invention may be better understood, and does not have to
In limitation the scope of the present invention.In addition, this area scientific research technical staff read the present invention after, with equivalent substitution or variable etc. pair
The present invention carries out various modifications, also belongs to claims of the present invention limited range.
Claims (9)
1. a kind of transparent conductive film electrode based on flexible glass, it is characterised in that set on the glass of flexible
TCO/ metals/TCO plural layers, i.e., obtain TCO/ metals/TCO plural layers according to TCO, metal and TCO stacking order.
2. the transparent conductive film electrode according to claim 1 based on flexible glass, it is characterised in that electrically conducting transparent oxygen
Compound TCO includes ITO, AZO, GZO, GIO, IGZO, IZO, STO, FTO, ZTO.
3. the transparent conductive film electrode according to claim 1 based on flexible glass, it is characterised in that metal includes：
Ag,Cu,Au,Al,Mg,W,Mo,Zn,Ni,In,Pt,Pd,Sn,Cr,Ta,Ti。
4. the transparent conductive film electrode according to claim 1 based on flexible glass, it is characterised in that electrically conducting transparent oxygen
Compound TCO thickness 40-100nm；The thickness 4-20nm of metal.
5. a kind of preparation method of the transparent conductive film electrode based on flexible glass as claimed in claim 1, its feature exist
In comprising the following steps：
Flexible glass is heated to 200 DEG C of removing surface moistures by step 1. in vacuum chamber；Then pass to 450/5SCCM flows Ar/O2
Surface plasma pretreatment cleaning is carried out under 600W DC voltages；
Step 2. arrives 3kW, Ar/O in radio-frequency power 1.82Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed
1m/min deposits the film of respective thickness with transparent conductive oxide rotary target material in flexible glass；
Step 3. arrives 1.0kW, Ar flow 300SCCM, operating pressure 2mTorr in dc power 0.2；Flexible glass winding speed
1m/mi, with metal flat target on flexible glass transparent conductive oxide film deposited metal film；
Step 4. repeat step (2), the transparent conductive oxide film with step 2 same thickness is deposited in metal film surfaces,
Form TCO/ metals/TCO structural membranes；
Step 5. carries out performance measurement and structural characterization.With UV-Vis spectrometers, XRD diffractometers, flexural measurement instrument, four probes electricity
The sheet resistance to TCO/ metals/TCO such as measuring instrument is hindered, light transmittance, structure and flexibility etc. measure；
Step 6. is coated with PCBM polymer with blade coating method on the superiors TCO；
Step 7. is coated with P3HT polymer with blade coating method on PCBM polymer；
Step 8. is prepared into organic photovoltaic battery (OPV) with silk-screen printing silver electrode；
Step 9. is measured the battery performance of preparation with solar simulator.
6. the preparation method of the transparent conductive film electrode according to claim 5 based on flexible glass, it is characterised in that
In step 2, in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Min transparent conductive oxide rotary target material deposit thickness 40nm in flexible glass film；Meanwhile in step 3, straight
Flow power 0.2kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/mi, is existed with Cu planar targets
4nmCu metallic films are deposited on flexible glass transparent conductive oxide film.
7. the preparation method of the transparent conductive film electrode according to claim 5 based on flexible glass, it is characterised in that
In step 2, in radio-frequency power 2.5kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Min AZO transparent conductive oxide rotary target materials deposit thickness 60nm in flexible glass film；Meanwhile in step 3,
In dc power 0.6kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/mi, with Ag flat targets
Material deposits 12nmAg metallic films on flexible glass transparent conductive oxide film.
8. the preparation method of the transparent conductive film electrode according to claim 5 based on flexible glass, it is characterised in that
In step 2, in radio-frequency power 3kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Min GZO transparent conductive oxide rotary target materials deposit thickness 100nm in flexible glass film；Meanwhile in step 3,
In dc power 0.3kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/mi, is put down with Au metals
Face target deposits 6nmAu metallic films on flexible glass transparent conductive oxide film.
9. the preparation method of the transparent conductive film electrode according to claim 5 based on flexible glass, it is characterised in that
In step 2, in radio-frequency power 1.8kW, Ar/O2Flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/
Min IZO transparent conductive oxide rotary target materials deposit thickness 45nm in flexible glass film；Meanwhile in step 3,
In dc power 1.0kW, Ar flow 300SCCM, operating pressure 2mTorr；Flexible glass winding speed 1m/mi, is put down with Ag metals
Face target deposits 20nmAg metallic films on flexible glass transparent conductive oxide film.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109659439A (en) * | 2018-11-26 | 2019-04-19 | 武汉华星光电半导体显示技术有限公司 | A kind of organic electroluminescence device and preparation method thereof |
| CN109778129A (en) * | 2019-01-08 | 2019-05-21 | 中国科学院宁波材料技术与工程研究所 | A kind of transparent conductive film based on super thin metal |
| CN110993799A (en) * | 2019-12-25 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Tunable infrared transparent conductive film with photovoltaic function and preparation method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014067233A1 (en) * | 2012-10-30 | 2014-05-08 | 中国科学院长春光学精密机械与物理研究所 | Preparation method for high-conductivity organic transparent conductive film |
| CN104651791A (en) * | 2015-02-18 | 2015-05-27 | 南京汇金锦元光电材料有限公司 | Energy-saving flexible transparent conducting film and preparation method thereof |
| CN105845752A (en) * | 2016-04-04 | 2016-08-10 | 广州新视界光电科技有限公司 | Transparent conductive film applied to flexible photoelectric device and preparation method thereof |
-
2017
- 2017-07-19 CN CN201710589964.8A patent/CN107452881A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014067233A1 (en) * | 2012-10-30 | 2014-05-08 | 中国科学院长春光学精密机械与物理研究所 | Preparation method for high-conductivity organic transparent conductive film |
| CN104651791A (en) * | 2015-02-18 | 2015-05-27 | 南京汇金锦元光电材料有限公司 | Energy-saving flexible transparent conducting film and preparation method thereof |
| CN105845752A (en) * | 2016-04-04 | 2016-08-10 | 广州新视界光电科技有限公司 | Transparent conductive film applied to flexible photoelectric device and preparation method thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109659439A (en) * | 2018-11-26 | 2019-04-19 | 武汉华星光电半导体显示技术有限公司 | A kind of organic electroluminescence device and preparation method thereof |
| US10790468B2 (en) | 2018-11-26 | 2020-09-29 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Organic electroluminescent device and method for preparing the same |
| CN109778129A (en) * | 2019-01-08 | 2019-05-21 | 中国科学院宁波材料技术与工程研究所 | A kind of transparent conductive film based on super thin metal |
| CN110993799A (en) * | 2019-12-25 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Tunable infrared transparent conductive film with photovoltaic function and preparation method thereof |
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Application publication date: 20171208 |