CN107437878A - A kind of Three Degree Of Freedom linear electromagnetic actuator - Google Patents
A kind of Three Degree Of Freedom linear electromagnetic actuator Download PDFInfo
- Publication number
- CN107437878A CN107437878A CN201710636968.7A CN201710636968A CN107437878A CN 107437878 A CN107437878 A CN 107437878A CN 201710636968 A CN201710636968 A CN 201710636968A CN 107437878 A CN107437878 A CN 107437878A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/14—Stator cores with salient poles
- H02K1/141—Stator cores with salient poles consisting of C-shaped cores
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/17—Stator cores with permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention belongs to actuator field, and specifically disclose a kind of Three Degree Of Freedom linear electromagnetic actuator, it includes four structure identical actuator stator units, an actuator mover and three displacement transducers, four actuator stator units are symmetrically distributed in the side up and down of actuator mover, each actuator stator unit includes rectangular stator iron core, rectangle permanent magnet, two C-shaped stator cores and two groups of excitation coils, rectangular stator iron core is bonded in the S poles of permanent magnet, and two C-shaped stator cores are symmetrically distributed in the both sides of permanent magnet；Actuator mover includes cross mover iron core, and four ends of mover iron core are inserted in the trench structure of four actuator stator units；Three displacement transducers are arranged on actuator stator unit, for determining the displacement of actuator mover.The present invention can effectively solve the problems, such as actuator electromagnetic force output nonlinear, have the output characteristics of linearisation and the ability of multiple degrees of freedom driving.
Description
Technical field
The invention belongs to electromagnetic actuator field, more particularly, to a kind of Three Degree Of Freedom linear electromagnetic actuator.
Background technology
Boring cutter is a kind of cutter of the elongated hole in workpieces processing, is typically being processed in slim-lined construction, elongated boring cutter
During violent vibration can be usually produced because of the Low rigidity of its own, it is thick with surface so as to influence the machining accuracy of workpiece
Rugosity.It is general to carry out vibration damping by the way of passive type in order to avoid boring cutter produces vibration, but passive type oscillation damping method institute energy
The effectiveness in vibration suppression of acquirement is relatively limited.
In order to preferably suppress elongated boring cutter caused vibration in process, it is necessary to vibrated using active control
Method lifting cutter or workpiece dynamic characteristic, such as set suitable for boring cutter actuator.But it is applicable on the market at present
More rare in the actuator product of boring cutter vibration control, electromagnetic bearing is as a kind of actuator production for being used to control boring cutter to vibrate
Product, although may be mounted on boring cutter, the output of its electromagnetic force is ability that is non-linear, and not possessing control twisting vibration.
It is therefore proposed that a kind of linearisation electromagnetic actuator with two translational degree of freedom and a torsional freedom must with urgent
The property wanted.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of Three Degree Of Freedom linear electromagnetic start
Device, wherein with reference to the application scenario of actuator, respective design is applied to the actuator of boring cutter vibration control, and to its crucial group
The part such as structure of actuator stator unit, actuator mover and its specific set-up mode are studied and designed, and can be had accordingly
Effect solves the problems, such as actuator product electromagnetic force output nonlinear, has output characteristics and multiple degrees of freedom driving of linearisation etc.
Advantage.
To achieve the above object, the present invention proposes a kind of Three Degree Of Freedom linear electromagnetic actuator, and it includes four structures
Identical actuator stator unit, an actuator mover and three displacement transducers, wherein：
Four actuator stator units are symmetrically distributed in the side up and down of the actuator mover, each work
Dynamic device stator unit includes rectangular stator iron core, rectangle permanent magnet, two C-shaped stator cores and two groups of excitation coils, described
Rectangular stator iron core is bonded in the S poles of permanent magnet, and described two C-shaped stator cores are symmetrically distributed in up and down the two of the permanent magnet
Side, and upper and lower surface of the one end of two C-shaped stator cores respectively with the rectangular stator iron core contacts, and two C-shapeds are determined
A trench structure, two groups of excitation coils are formed between the end face of the other end of sub- iron core and the N poles surface of the permanent magnet
Correspond to and be wrapped on described two C-shaped stator cores respectively；
The actuator mover is cross-shaped symmetrical formula structure, and it includes cross mover iron core, the cross mover iron
Be provided with manhole in the middle part of core, and its corresponding four actuator are inserted in four ends respectively up and down
In the trench structure of stator unit, with this end by the cross mover iron core and a corresponding actuator
Stator unit forms a magnetic structure unit of electromagnetic actuator；Three displacement transducers correspond to be arranged on distribution respectively
The actuator mover up and down right side three actuator stator units on.
As it is further preferred that the actuator mover also include be decussate texture mover skeleton and mover pressure
Plate, the cross mover iron core is located between the mover skeleton and mover pressing plate, and is consolidated between three by fastener
Fixed connection.
As it is further preferred that the actuator stator unit also includes stator casing, each actuator stator
Rectangular stator iron core, rectangle permanent magnet, two C-shaped stator cores and two groups of excitation coils in unit are installed in corresponding institute
State within shell.
As it is further preferred that four ends of the mover skeleton are equipped with prominent rectangular block architecture to be used as institute
The detection object of displacement sensors.
As it is further preferred that institute's displacement sensors are arranged on the shell of actuator stator unit by fixture.
As it is further preferred that gap between the mover iron core and the magnetic pole surfaces of corresponding C-shaped stator core
Sum keeps constant in actuator mover motion process.
As it is further preferred that the thickness of the rectangular stator iron core, C-shaped stator core and mover iron core is homogeneous
Together, and rectangular stator iron core, C-shaped stator core and mover iron core flush.
In general, by the contemplated above technical scheme of the present invention compared with prior art, mainly possess following
Technological merit：
1. the Three Degree Of Freedom linear electromagnetic actuator of the present invention have two translations in horizontal direction and vertical direction from
By degree and the torsional freedom around the rotation of actuator axis, applied in boring cutter, possess and suppress elongated boring cutter in level
Direction and the radial vibration of vertical direction, and the ability for the twisting vibration reversed from horizontal direction to vertical direction.
2. the pole orientation of the permanent magnet in the magnetic structure unit of the Three Degree Of Freedom linear electromagnetic actuator of the present invention is hung down
Directly in magnetic direction caused by excitation coil, and permanent magnet generates biasing in upper and lower C-shaped stator core and magnetic pole gap
Magnetic field, the direction of the bias magnetic field at the magnetic pole gap with coil caused by excitation field direction it is identical, in another magnetic
At clearance between poles with coil caused by excitation field it is in opposite direction, with this constitute permanent magnetic radial biasing linearisation magnetic structure,
Ensure that electromagnetic force and the exciting current of output are linear so that actuator has the electromagnetic force output characteristics of linearisation,
Consequently facilitating the control of vibration.
Brief description of the drawings
Fig. 1 is a kind of contour structures front view of Three Degree Of Freedom linear electromagnetic actuator of the present invention；
Fig. 2 is the assembling structure schematic diagram of actuator mover in the present invention；
Fig. 3 is the structural representation of single electromagnetic actuator driver element；
Fig. 4 is the exciting current direction and electromagnetic force direction schematic diagram when electromagnetic actuator is vertically moving；
Fig. 5 is the exciting current direction and electromagnetic force direction schematic diagram when electromagnetic actuator moves in the horizontal direction；
Fig. 6 is the exciting current direction and electromagnetic force direction schematic diagram when electromagnetic actuator makees twist motion.
In figure：1- actuator stator units, 2- displacement transducers, 3- clamp of sensor, 4- actuator movers, 5- mover bones
Frame, 6- mover iron cores, 7- mover pressing plates, 8-C shape stator cores, 9- stator casings, 10- excitation coils, 11- permanent magnets, 12- squares
Shape stator core, 13- excitation coils, 14-C shape stator cores.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
As Figure 1-3, a kind of Three Degree Of Freedom linear electromagnetic actuator provided in an embodiment of the present invention, it includes four knots
1, actuator mover 4 of structure identical actuator stator unit and three displacement transducers 2, wherein four actuator stator lists
The side up and down that member 1 is symmetrically distributed in actuator mover 4, each actuator stator unit 1 include rectangular stator iron core 12,
11, two C-shaped stator cores 8,14 of rectangle permanent magnet and two groups of excitation coils 10,13, rectangular stator iron core 12 is bonded in permanent magnetism
The outside (surface of S poles) of iron 11, two C-shaped stator cores 8,14 are symmetrically distributed in the both sides up and down of permanent magnet 11, and two
Upper and lower surface of the one end of individual C-shaped stator core 8,14 respectively with rectangular stator iron core 12 contacts (namely two C-shaped stator cores
8th, the magnetic pole surfaces of 14 respective one end are in contact with the magnetic pole surfaces of rectangular stator iron core), so as to ensure magnetic circuit in stator core
It is unimpeded, and between the inner surface of the end face of the other end of two C-shaped stator cores 8,14 and permanent magnet 11 (surface of N poles)
A trench structure is formed, two groups of excitation coils 10,13 correspond to be wrapped on two C-shaped stator cores 8,14 respectively；Actuator is moved
Son 4 is cross-shaped symmetrical formula structure, and it includes cross-shaped symmetrical formula structure mover iron core 6 (i.e. with four ends), the mover
The middle part of iron core 6 is provided with the manhole for installing elongated boring cutter, and its four ends are inserted respectively up and down
In the trench structure of four corresponding actuator stator units 1；Three displacement transducers 2 are corresponded to be arranged on respectively and are distributed in
Actuator mover 4 up and down right side three actuator stator units on, for determining the displacement of actuator mover 4.
Further, each actuator stator unit 1 also includes a stator casing 9, in each actuator stator unit 1
Rectangular stator iron core 12,11, two C-shaped stator cores 8,14 of rectangle permanent magnet and two groups of excitation coils 10,13 are installed in pair
Within the shell 9 answered, and by bonding agent and shell fixation with into being integral.And displacement transducer 2 is then installed by fixture 3
On the shell 9 of corresponding actuator stator unit 1.
More specifically, actuator mover 4 also include be cross-shaped symmetrical formula structure mover skeleton 5 and mover pressing plate
7, mover iron core 6 is located between mover skeleton 5 and mover pressing plate 7, and by fastener, for example screw fixes company between three
Connect, be again provided with turning on the manhole on mover iron core 6 in addition on mover skeleton 5 and mover pressing plate 7 onesize
Manhole, to ensure the smooth installation of boring cutter.Preferably, four ends of mover skeleton 5 are equipped with prominent rectangular block
Structure is using the detection object as displacement transducer, namely as shown in Fig. 2 four ends of mover skeleton 5 are equipped with to evagination
The rectangular block architecture gone out, the lateral surface of the rectangular block architecture are relative with corresponding displacement transducer (as shown in figure 1, mover skeleton
The rectangular block architecture in right-hand end up and down it is relative with three displacement transducers on upper and lower right side respectively), so that passing through
The displacement of displacement transducer test rectangular block architecture is so as to realizing the displacement detecting of actuator mover.
Specifically, as shown in figure 1, actuator mover being displaced through for (i.e. x directions) is determined installed in right side in the horizontal direction
Displacement transducer on subshell is directly measured, and actuator mover is displaced through installed in upper vertical direction (i.e. y directions)
Displacement transducer on the stator casing of side is directly measured, and the corner that actuator is moved in θ directions (is rotated to y directions from x directions
Angle, namely the angle around the rotation of actuator axis) can by the right side of mover skeleton with downside rectangular block in the horizontal direction (i.e.
X directions) displacement be calculated indirectly, be specially；First by right side stator casing and downside stator casing
Displacement transducer is measured on the right side of mover skeleton and the displacement of downside rectangular block in the x-direction, afterwards with downside rectangular block and right side square
The difference of the displacement of shape block divided by the vertical range of downside rectangular block center and actuator mover center, can be approximate
To the radian value of the corner in θ directions.
When actuator mover is in equilbrium position, (i.e. one end of mover iron core 6 is located at the magnetic pole of C-shaped stator core 8 and 14
Middle) when, the upper and lower surfaces of mover core ends or left and right surface and two C-shaped stator cores in corresponding stator unit
Up and down or left and right magnetic pole surfaces gap (d1, d2) is equal, i.e. magnetic of two surfaces of mover core ends to corresponding two C-shaped iron cores
Gap between the surface of pole is equal, and in actuator mover motion process, mover iron core 6 and corresponding C-shaped stator core 8,
Gap sum (d1+d2) between 14 magnetic pole surfaces does not change.
Further, the thickness all same of 12, two C-shaped stator cores 8,14 of rectangular stator iron core and mover iron core 6,
So that electromagnetic field transmits between mover and stator core, reduces leakage field, lifting magnetic field utilization ratio, and in assembling and use
During mover iron core and stator core (including rectangular stator iron core 12, C-shaped stator core 8,14) front and rear surfaces difference it is neat
It is flat, in addition, actuator stator core is fabricated with mover iron core using soft magnetic materials, and it is stator casing, mover skeleton, dynamic
Sub- pressing plate and fixture are fabricated using aluminum alloy materials.
Fig. 3 is the structural representation of single electromagnetic actuator driver element, and it is the rear view of electromagnetic actuator, to scheme
It is further illustrated in 3 exemplified by electromagnetic actuator driver element, the right part of mover iron core 6 is inserted corresponding actuator and determined
In the middle part trench structure of subelement 1, when actuator mover 4 is in equilbrium position, the upper and lower surface of the end of mover iron core 6 with
The gap d of magnetic pole surfaces up and down 1 of two C-shaped iron cores 8,14 in stator unit 1, d2 is equal；In the motion process of actuator mover 4
In, the upper and lower sides magnetic pole gap sum d1+d2 of mover iron core 6 and stator core 8,14 does not change.
The operation principle of Three Degree Of Freedom linear electromagnetic actuator described with reference to Fig. 3, Fig. 4, Fig. 5, Fig. 6, wherein Fig. 3,
Fig. 4, Fig. 5, Fig. 6 are the rear view of electromagnetic actuator.
Three Degree Of Freedom linear electromagnetic actuator disclosed by the invention is made up of four equivalent electromagnetic actuator driver elements,
Each electromagnetic actuator driver element includes one end of an actuator stator unit 1 and actuator mover 4, in stator unit
Excitation coil produces excitation field, and the pole orientation of permanent magnet is vertical with magnetic direction caused by excitation coil, and permanent magnet is dynamic
Son at the magnetic pole gap of stator with producing bias magnetic field, and excitation field is added with bias magnetic field at a magnetic pole gap, another
Subtract each other at one magnetic pole gap, electromagnetic force caused by the larger gap location of magnetic field intensity is larger, and then actuator mover is to the magnetic
The lateral movement of clearance between poles one.As shown in figure 3, excitation coil 10,13 produces an excitation magnetic in each electromagnetic actuator driver element
Field (black arrow), permanent magnet 11 produce one partially at two magnetic pole gaps d1, d2 of mover iron core 6 and stator core 8,14
Magnetic field (white arrow) is put, the d2 at the magnetic pole gap of lower end is added excitation field with bias magnetic field, at the magnetic pole gap d1 of upper end
Subtract each other, electromagnetic force caused by the larger lower end magnetic pole gap d2 of magnetic field intensity is larger, then in electromagnetic actuator driver element
The end of mover iron core 6 to-y, when the direction for changing exciting current, make the direction of excitation field reverse, then the end of mover iron core 6
The direction of motion also can be reverse.
By reasonably selecting the sense of current of excitation coil in each electromagnetic actuator driver element, electromagnetism can be controlled
The mover of actuator moves in tri- directions along x, y, θ：Excitation coil 10,13 in the electromagnetic actuator driver element of the left and right sides
The sense of current and the pole orientation of permanent magnet 11 with when direction is consistent shown in Fig. 4, the left and right ends of actuator mover 4 are by one
The electromagnetic force in individual edge-y directions, therefore actuator mover will move to-y directions；When upper and lower both sides electromagnetic actuator driver element
In the sense of current of excitation coil 10,13 and the pole orientation of permanent magnet 11 with when direction is consistent shown in Fig. 5, actuator mover 4
Upper and lower ends by the electromagnetic force in an edge-x directions, therefore actuator mover will move to-x directions；When four electromagnetism
The sense of current of excitation coil 10,13 in actuator driver element is consistent with direction shown in Fig. 6 with the pole orientation of permanent magnet 11
When, four ends of actuator mover 4 are acted on by the electromagnetic torque along θ directions, therefore actuator mover will be along θ directions
Rotate.
Because the design of each electromagnetic actuator driver element employs the magnetic structure of permanent magnetic radial biasing, Er Qieqi
Upper and lower sides magnetic pole gap or left and right sides magnetic pole gap sum are a fixed value, and when mover is located at equilbrium position, upper and lower sides magnetic
Clearance between poles or left and right sides magnetic pole gap are equal in magnitude.Then, each electromagnetism can be obtained by being calculated by Analysis of Magnetic Circuit and electromagnetic force
The output electromagnetic force (F) of actuator driver element is with exciting current (I) and mover displacement (y) just like offline sexual intercourse：
F=kiI+kdy
Wherein, kiWith kdIt is electromagnetism force coefficient.
I.e. the output electromagnetic force of the actuator with structure of the present invention and exciting current are linear, namely the present invention
Actuator has the output characteristics of linearisation, therefore can apply it in the active control of boring cutter vibration, is swashed by controlling
The control of output electromagnetic force size can be achieved in the size and Orientation for encouraging electric current, and then realizes effective suppression of boring cutter vibration.And
Vibration for specifically how to suppress boring cutter, it is prior art, and the present invention mainly protects the structure of the actuator.Briefly
Exactly measure the vibration of actuator mover in real time by displacement transducer, and vibration information is transferred to controller, in controller
Control algolithm control output valve is calculated according to the vibration information of sensor feedback, and the control output valve is passed into power
Amplifier, by the size of current of each coil in power amplifier control electromagnetic actuator, so as to realize to actuator mover position
The control put, and then the suppression of vibration is realized, realize the active control of boring cutter caused vibration in process.Due to this hair
Bright actuator has the output characteristics of linearisation, therefore when using it for the vibration control of boring cutter so that the control in controller
Algorithm processed is easier to design, and is easier to obtain preferable control effect, if output characteristics is not linear, it is necessary in algorithm
In advanced row linearization process, be then controlled algorithm again and write, add the complexity and difficulty of control algolithm, it is not easy to
Obtain comparatively ideal vibration control effect.
Three Degree Of Freedom linear electromagnetic actuator provided by the invention, not only can be with drive ram mover in x, y, θ tri-
The motion in direction, and possess the electromagnetic force output characteristics of linearisation, can effectively it overcome existing for the vibration control of elongated boring cutter
It is insufficient existing for the actuator of system, there is the output characteristics of linearisation and the ability of multiple degrees of freedom driving.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (7)
1. a kind of Three Degree Of Freedom linear electromagnetic actuator, it is characterised in that including four structure identical actuator stator units
(1), an actuator mover (4) and three displacement transducers (2), wherein：
Four actuator stator units (1) are symmetrically distributed in the side up and down of the actuator mover (4), each described
Actuator stator unit (1) includes rectangular stator iron core (12), rectangle permanent magnet (11), two C-shaped stator cores (8,14)
With two groups of excitation coils (10,13), the rectangular stator iron core (12) is bonded in the S poles of permanent magnet (11), and described two C-shapeds are determined
Sub- iron core (8,14) is symmetrically distributed in the both sides up and down of the permanent magnet (11), and the one of two C-shaped stator cores (8,14)
The upper and lower surface respectively with the rectangular stator iron core (12) is held to contact, and the other end of two C-shaped stator cores (8,14)
A trench structure is formed between end face and the N poles surface of the permanent magnet (11), two groups of excitation coils (10,13) are right respectively
It should be wrapped on described two C-shaped stator cores (8,14)；
The actuator mover (4) is cross-shaped symmetrical formula structure, and it includes cross mover iron core (6), the cross mover
Be provided with manhole in the middle part of iron core (6), and its corresponding described four are inserted in four ends respectively up and down
In the trench structure of actuator stator unit (1), with this by the cross mover iron core (6) an end with it is corresponding
An actuator stator unit composition electromagnetic actuator a magnetic structure unit；Three displacement transducers (2) point
Dui Ying be arranged on be distributed in the actuator mover (4) up and down right side three actuator stator units on.
2. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 1, it is characterised in that the actuator mover (4) is also
Mover skeleton (5) and mover pressing plate (7) including being decussate texture, the cross mover iron core (6) is located at described dynamic
Between sub- skeleton (5) and mover pressing plate (7), and it is fixedly connected between three by fastener.
3. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 2, it is characterised in that the actuator stator unit
(1) stator casing (9) is also included, rectangular stator iron core (12), rectangle permanent magnet in each actuator stator unit (1)
(11), two C-shaped stator cores (8,14) and two groups of excitation coils (10,13) are installed within the corresponding shell (9).
4. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 3, it is characterised in that the four of the mover skeleton (5)
Individual end is equipped with prominent rectangular block architecture using the detection object as institute's displacement sensors.
5. the Three Degree Of Freedom linear electromagnetic actuator as described in claim 3 or 4, it is characterised in that institute's displacement sensors (2)
It is arranged on by fixture (3) on the shell (9) of actuator stator unit (1).
6. the Three Degree Of Freedom linear electromagnetic actuator as described in claim any one of 1-5, it is characterised in that the mover iron core
(6) the gap sum between the magnetic pole surfaces of corresponding C-shaped stator core (8,14) is protected in actuator mover motion process
Hold constant.
7. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 6, it is characterised in that the rectangular stator iron core
(12), the thickness all same of C-shaped stator core (8,14) and mover iron core (6), and rectangular stator iron core (12), C-shaped are fixed
Sub- iron core (8,14) and the flush of mover iron core (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710636968.7A CN107437878B (en) | 2017-07-31 | 2017-07-31 | A kind of Three Degree Of Freedom linear electromagnetic actuator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710636968.7A CN107437878B (en) | 2017-07-31 | 2017-07-31 | A kind of Three Degree Of Freedom linear electromagnetic actuator |
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| CN107437878A true CN107437878A (en) | 2017-12-05 |
| CN107437878B CN107437878B (en) | 2019-05-21 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1838330A (en) * | 2006-04-21 | 2006-09-27 | 清华大学 | Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner |
| CN101075098A (en) * | 2007-04-27 | 2007-11-21 | 清华大学 | Ultrathin triple-freedom inching work table |
| JP2013225158A (en) * | 2013-07-22 | 2013-10-31 | Nec Corp | Mirror tilt actuator |
| CN203275876U (en) * | 2013-04-27 | 2013-11-06 | 清华大学 | Micromotion working platform of silicon wafer platform of a photoetching machine |
| CN105978200A (en) * | 2016-07-19 | 2016-09-28 | 上海航天控制技术研究所 | Multi-frequency composite vibration simulator and method for realizing multi-frequency composite vibration |
| WO2017046026A1 (en) * | 2015-09-15 | 2017-03-23 | Behr-Hella Thermocontrol Gmbh | Operating unit for a vehicle |
| CN106953551A (en) * | 2017-05-05 | 2017-07-14 | 哈尔滨工业大学 | Magnetcisuspension suspension gravity compensator |
-
2017
- 2017-07-31 CN CN201710636968.7A patent/CN107437878B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1838330A (en) * | 2006-04-21 | 2006-09-27 | 清华大学 | Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner |
| CN101075098A (en) * | 2007-04-27 | 2007-11-21 | 清华大学 | Ultrathin triple-freedom inching work table |
| CN203275876U (en) * | 2013-04-27 | 2013-11-06 | 清华大学 | Micromotion working platform of silicon wafer platform of a photoetching machine |
| JP2013225158A (en) * | 2013-07-22 | 2013-10-31 | Nec Corp | Mirror tilt actuator |
| WO2017046026A1 (en) * | 2015-09-15 | 2017-03-23 | Behr-Hella Thermocontrol Gmbh | Operating unit for a vehicle |
| CN105978200A (en) * | 2016-07-19 | 2016-09-28 | 上海航天控制技术研究所 | Multi-frequency composite vibration simulator and method for realizing multi-frequency composite vibration |
| CN106953551A (en) * | 2017-05-05 | 2017-07-14 | 哈尔滨工业大学 | Magnetcisuspension suspension gravity compensator |
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| Publication number | Publication date |
|---|---|
| CN107437878B (en) | 2019-05-21 |
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