CN107394002A - Hydrogenate the method and its device of solar cell - Google Patents
Hydrogenate the method and its device of solar cell Download PDFInfo
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- CN107394002A CN107394002A CN201610326059.9A CN201610326059A CN107394002A CN 107394002 A CN107394002 A CN 107394002A CN 201610326059 A CN201610326059 A CN 201610326059A CN 107394002 A CN107394002 A CN 107394002A
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- solar cell
- light beam
- hydrogenation
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- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000005984 hydrogenation reaction Methods 0.000 claims abstract description 30
- 239000007921 spray Substances 0.000 claims description 11
- 238000005245 sintering Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 11
- 230000009466 transformation Effects 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 9
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 230000007547 defect Effects 0.000 description 7
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- XGCTUKUCGUNZDN-UHFFFAOYSA-N [B].O=O Chemical compound [B].O=O XGCTUKUCGUNZDN-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 150000001793 charged compounds Chemical class 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 108091081062 Repeated sequence (DNA) Proteins 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention provides a kind of method and its device for hydrogenating solar cell, and this device includes cavity, mobile device and light beam generator.Thus the power of light beam caused by light beam generator is between 20W/cm2To 200W/cm2Between, its wide cut is between 1mm between 156mm.This light beam reaches the effect of hydrogenation solar cell between 50mm/sec to the sweep speed between 200mm/sec, to scan solar cell.In addition, the device of hydrogenation solar cell also includes heater, to heat the solar cell.The device of above-mentioned hydrogenation solar cell can carry out hydrogenation processing procedure to solar cell, to improve the photo attenuation degree of solar cell, and then improve solar cell in follow-up in use, the degree that photoelectric transformation efficiency declines.
Description
Technical field
The present invention is the method and its device on hydrogenating solar cell.
Background technology
Solar cell is a kind of eco-friendly power source, can directly convert the solar into electric energy.Existing solar energy
Battery can be divided into silicon-based semiconductor solar cell, DSSC according to the difference of material of main part
And organic material solar cell etc., wherein, using the photoelectric transformation efficiency of silicon-based semiconductor solar cell as
Most preferably, and with the advantage of low cost.
However, the silicon substrate in silicon-based semiconductor solar cell, often with have higher lattice defect density with
Impurity.These impurity are (such as：Oxygen) may further with the doping that is doped into processing procedure in silicon substrate (such as：Boron)
Combine to form positively charged compound (such as：Boron oxygen compound).During solar cell power generation, these
Lattice defect or positively charged compound can catch caused electronics after illumination, i.e., so-called photo attenuation shows
As.The photoelectric transformation efficiency of solar cell will be greatly reduced in this phenomenon, and increases with usage time, and this is existing
Trend as having aggravation.Therefore, it is necessary to which a kind of method for improveing solar cell, above-mentioned to improve
Problem.
The content of the invention
Above-mentioned in order to solve the problems, such as, the present invention provides a kind of method and device for hydrogenating solar cell.
It is an aspect of the present invention to provide a kind of method for hydrogenating solar cell, includes offer solar cell
And solar cell is scanned with light beam.Wherein, the power of this light beam is between 20W/cm2To 200W/cm2
Between, and have wide cut between 1mm between 156mm.In addition, the inswept solar cell of this light beam
Sweep speed is between 50mm/sec between 200mm/sec.
According to certain embodiments of the present invention, the wavelength of light beam between 450nm between 1100nm.
According to certain embodiments of the present invention, the method for solar cell is hydrogenated also comprising heating solar electricity
Pond is to a temperature between room temperature between 400 DEG C.
It is an aspect of the present invention to provide a kind of device for hydrogenating solar cell.This device includes cavity, moved
Dynamic device and light beam generator.Wherein, mobile device is through cavity and to carry solar cell, and light
Beam generator is then arranged at the top of cavity, and positioned at the top of the mobile device.
According to certain embodiments of the present invention, the device for hydrogenating solar cell is by mobile device, is connected
Tie to Fast Sintering stove and detection device.
According to certain embodiments of the present invention, the device for hydrogenating solar cell also includes heater, position
In the lower section of mobile device.
According to certain embodiments of the present invention, the device for hydrogenating solar cell also includes gas spray pipe, position
By light beam generator, and the solar cell below its opening alignment light beam generator.
According to certain embodiments of the present invention, light beam caused by light beam generator, its power between
20W/cm2To 200W/cm2Between.
According to certain embodiments of the present invention, light beam caused by light beam generator, its wide cut is between 1mm
To between 156mm.
According to certain embodiments of the present invention, the rate travel of mobile device between 50mm/sec extremely
Between 200mm/sec.
Brief description of the drawings
It is appended for above and other purpose, feature, advantage and the embodiment of the present invention can be become apparent
The detailed description of accompanying drawing is as follows：
Fig. 1 is illustrated according to some embodiments of the present invention, a kind of profile of solar cell；
Fig. 2 is illustrated according to some embodiments of the present invention, is regarded on a kind of device for hydrogenating solar cell
Figure；
Fig. 3 is illustrated according to some embodiments of the present invention, a kind of side view for the device for hydrogenating solar cell
Figure；
Fig. 4 is illustrated according to some embodiments of the present invention, a kind of side view for the device for hydrogenating solar cell
Figure；And
Fig. 5 is illustrated according to some embodiments of the present invention, a kind of side view for the device for hydrogenating solar cell
Figure.
Embodiment
Following disclosure provides many different embodiments or example, to realize that the difference of the present invention is special
Sign.The composition and layout of particular instance are described below, to simplify the present invention.Certainly these are only examples, and
It is not used to limit.For example, in narration, when fisrt feature is formed at second feature above and over,
Embodiment can be included thereupon, and wherein first and second feature is formed directly to contact；And it can also include real
Example is applied, wherein extra feature can be formed between first and second feature, therefore first and second feature can
It is not directly contacted with.In addition, the present invention can in each example repeat element numbering and/or word.The mesh repeated
Be to simplify and clearly, but do not determine wherein between the various embodiments and/or configuration discussed
Relativeness.In addition, " one " alleged by the present invention, except special instruction (such as：" single ") outside,
The quantity of restriction technologies feature or structure is not used to, but censures a kind of technical characteristic or structure.
In addition, relative terms spatially, for example, " under .. ", " following ", " under ", " on
Side ", " on " and its class, it can be used to describe element as depicted or feature pair for ease of narration herein
In other elements or the relativeness of feature.Except diagram described in addition to, relative use spatially
Meaning of one's words purport in around the device for using or operating it is different towards.Otherwise it is exactly that equipment can be directed to (rotation
Turn 90 degrees or in other towards), and relative descriptors number spatially as used herein can same quilt accordingly
Understand.In addition, " by ... it is made " its declaration of will " including ... " or " by ... formed ".
Silicon substrate is commonly applied among solar cell, but silicon substrate has the defects of high concentration or miscellaneous in itself
Matter.Or when doped p-type impurity (such as：Boron) in silicon substrate when, oxygen in boron ion and silicon substrate from
Son can combine, and form the boron oxygen compound (BO of positively charged+).In the photoelectric conversion process of solar cell,
The boron oxygen compound of this little defects, impurity or positively charged can bottle up mobile electronics so that photoelectric transformation efficiency
Decline, this phenomenon is referred to as photo attenuation (light-introduced degradation, LID).
The present invention provides a kind of method for hydrogenating solar cell and a kind of device for hydrogenating solar cell, with
Improve the photo attenuation degree of solar cell, and then improve its effective utilization.The method is with beam excitation
Hydrogen ion in solar cell to higher energy band, enable hydrogen ion spread be moved to drawbacks described above,
The boron oxygen compound of impurity or positively charged, to neutralize electrically or be passivated defect so that electronics is in light transfer process
In do not bottled up by the compound or defect of this little positively charged, therefore photoelectric transformation efficiency can be lifted and reduced photic
Attenuation degree.
Fig. 1 is illustrated according to some embodiments of the present invention, a kind of profile of solar cell.Such as Fig. 1
Shown, in the present embodiment, solar cell 10 can be but be not limited to P-type silicon substrate solar cell,
It includes doped p-type impurity (such as：Boron, gallium or indium) P-type silicon substrate 12, n type semiconductor layer 14,
Anti-reflecting layer 16, insulating barrier 18 and conductive layer 20.In certain embodiments, solar cell 10 also wraps
Hydrogeneous ion source layer, it can be by various doping way (such as：Ionic-implantation, plasma doping method),
Among adulterating hydrogen ion to the insulating barrier 18 being located in P-type silicon substrate 12, to form hydrogen ion source layer.
It is worth noting that, solar cell 10 can be the solar cell of each mode comprising various structures, and
It is not limited to that shown in Figure 1.
Then, Fig. 2 and Fig. 3 is refer to, it is illustrated according to some embodiments of the present invention, Yi Zhongshi respectively
Apply the top view and side view of the device 200 of the hydrogenation solar cell of mode.As shown in Fig. 2 hydrogenation is too
It is positive can the device 200 of battery be to set, but be not limited to Fast Sintering stove (fast firing furnace,
FFF) between 110 and efficiency detecting system (CTS) 130.In addition, through mobile device 120, will can just burn
Solar cell 10 after the completion of knot, continues and carries out hydrogenation processing procedure, then is moved to efficiency detecting system 130,
To carry out efficiency test.In certain embodiments, mobile device 120 can be that conveyer belt etc. is industrially conventional
Mobile carrier, but be not limited.
Then, Fig. 3 is refer to, in certain embodiments, the device 200 for hydrogenating solar cell includes chamber
Body 210, light beam generator 220, wire 230 and light beam manipulation device 240.Light beam manipulation device 240
The power of light beam 260, wavelength and wide cut caused by light beam generator 220 are can control through wire 230.
It is worth noting that, wide cut referred to herein, refers to light beam 260 in the width of parallel movement apparatus 120.
In addition, mobile device 120 has a fixed rate, light beam 260 caused by light beam generator 220 can be made
Relative to the solar cell 10 in mobile device 120, there is one scan speed.Relevant above-mentioned light
Power, wavelength, wide cut and the sweep speed of beam 260 will be in rear detailed descriptions.In other embodiments, hydrogenate too
The device of positive energy battery does not have cavity 210, only a light beam generator, and may be disposed at other solar energy
Among the process apparatus of battery, limited without the spatial obstacle by cavity.
Fig. 4 is refer to, it is illustrated according to some embodiments of the present invention, and the hydrogenation of another embodiment is too
The side view of the device 300 of positive energy battery.As shown in figure 4, the device 300 of hydrogenation solar cell includes
Cavity 210, light beam generator 220, wire 230, light beam manipulation device 240, gas spray pipe 320, gas
Body flow control valve 350, gas conduit 330 and hydrogen cylinder 340.Dress different from hydrogenating solar cell
200 are put, the device 300 for hydrogenating solar cell also includes hydrogen feeding mechanism, in hydrogenation solar cell
During, there is provided the hydrogen of the high surface levels of solar cell 10, to reach passivation solar cell silicon
The function of substrate.In more detail, high concentration hydrogen 360 can be sprayed to by solar energy by gas spray pipe 320
The surface of battery 10, make hydrogen 360 under light beam irradiation, spread and supplement the hydrogen of inside solar energy battery from
The concentration of son, and with defect or positively charged compound with reference to and reach the effect of passivation.In the present embodiment,
Hydrogen is to pass through gas conduit 330, gas flow control valve 350 and gas spray pipe 320, in a manner of oblique angle
Spray to the upper surface of the solar cell 10 positioned at the lower section of light beam generator 220.In other embodiments,
Any position that gas spray pipe may be disposed in the device 300 of hydrogenation solar cell, and with arbitrary angle
Spray to the solar cell 10 below light beam generator.In other embodiments, solar-electricity is hydrogenated
The cavity 210 of the device 300 in pond can be air hermetic, and gas spray pipe is importing high concentration hydrogen in cavity
It is interior.In other embodiments, gas spray pipe can be plasma-based jet pipe to form hydrogen ion plasma source, and hydrogenate too
The device of positive energy battery may also be linked to solar cell comprising pulse generator or be disposed below,
In a manner of plasma-based is adulterated, among hydrogen ion doped to solar cell 10.
Fig. 5 is refer to, it is illustrated according to some embodiments of the present invention, and the hydrogenation of another embodiment is too
The side view of the device 400 of positive energy battery.As shown in figure 5, the device 400 of hydrogenation solar cell includes
Cavity 210, light beam generator 220, wire 230, light beam manipulation device 240, gas spray pipe 320, gas
Body flow control valve 350, gas conduit 330, hydrogen cylinder 340, heater 420, wire 430 and temperature
Spend controller 440.Device 300 different from hydrogenating solar cell, hydrogenate the device 400 of solar cell
Heating system is also included, during solar cell is hydrogenated, solar cell 10 is heated,
The effect of solar cell is hydrogenated with further lifting.In the present embodiment, heater 420 is disposed on
The lower section of mobile device 120, and temperature controller 440 is linked to through wire 430, heated with accurate control
Temperature.In other embodiments, the cavity for hydrogenating the device of solar cell can be air hermetic, and heat
Device may be disposed at arbitrary position in the device of hydrogenation solar cell so that hydrogenate the dress of solar cell
Reach default temperature with putting interior uniform throughout.
Above-mentioned light beam 260 can be, but be not limited to laser or visible ray.In certain embodiments, it is above-mentioned
The power of light beam 260 is between 0.01W/cm2To 10000W/cm2Between, such as：0.05W/cm2、
0.1W/cm2、0.5W/cm2、1W/cm2、5W/cm2、10W/cm2、20W/cm2、30W/cm2、
40W/cm2、50W/cm2、60W/cm2、70W/cm2、80W/cm2、90W/cm2、100W/cm2、
125W/cm2、150W/cm2、175W/cm2、200W/cm2、300W/cm2、400W/cm2、500W/cm2、
750W/cm2、1000W/cm2、2000W/cm2、3000W/cm2、4000W/cm2、5000W/cm2、
6000W/cm2、7000W/cm2、8000W/cm2、9000W/cm2.In the preferred embodiment, its work(
Rate is between 20W/cm2To 200W/cm2Between.
In certain embodiments, the wavelength of above-mentioned light beam 260 between 100nm between 2000nm, such as：
200nm、300nm、400nm、500nm、600nm、700nm、800nm、900nm、1000nm、
1100nm、1200nm、1300nm、1400nm、1500nm、1600nm、1700nm、1800nm、
1900nm.In the preferred embodiment, its wavelength between 450nm between 1100nm.
In certain embodiments, the wide cut of above-mentioned light beam 260 between 0.1mm between 300mm, such as：
0.2mm、0.5mm、0.1mm、0.5mm、1mm、2mm、5mm、10mm、20mm、30mm、
50mm、75mm、100mm、125mm、150mm、200mm、250mm.In preferred embodiment
In, its wide cut is between 1mm between 156mm.
In certain embodiments, the sweep speed of above-mentioned light beam 260 is between 10mm/sec to 500mm/sec
Between, such as：25mm/sec、50mm/sec、75mm/sec、100mm/sec、125mm/sec、
150mm/sec、175mm/sec、200mm/sec、250mm/sec、300mm/sec、350mm/sec、
400mm/sec、450mm/sec.In the preferred embodiment, its sweep speed between 50mm/sec extremely
Between 200mm/sec.It is worth noting that, by suitably adjusting the wide cut of light beam 260 with sweep speed (i.e.
The rate travel of mobile device), illumination beam 260 can be accurately controlled in the time on solar cell 10,
To obtain optimal hydrogenation effect.For example, solar cell 10 receives the time of the scanning of light beam 260
Can be between 0.005 second to 3 seconds.
In certain embodiments, the heating-up temperature of above-mentioned heater 420 between room temperature between 800 DEG C,
Such as：50℃、100℃、150℃、200℃、250℃、300℃、350℃、400℃、450℃、
500℃、550℃.In the preferred embodiment, its heating-up temperature between room temperature between 400 DEG C.
In a specific embodiment, solar cell 10 is entered via the device 200 of hydrogenation solar cell
Row hydrogenation processing procedure, after measuring the hydrogenated processing procedure of solar cell, the improvement degree of its photo attenuation (LID).
In this specific embodiment, the power of light beam 260 is 0.1W/cm2, wavelength is between 400nm to 700nm
Between, wide cut between 1mm between 156mm, and sweep speed is between 100mm/sec to 150mm/sec
Between.
Then, by the solar cell (experimental group) after hydrogenated processing and the solar-electricity of unhydrogenation processing
Pond (control group), while exposure and reach 60KWh/m through accumulative light energy2Afterwards, measured solar-electricity
The photoelectric transformation efficiency in pond is as shown in the following Table I.
Table one：The photoelectric transformation efficiency of control group and experimental group.
From table one, the solar cell (control group) of unhydrogenation processing is by exposure and through accumulative illumination
Energy reaches 60KWh/m2Afterwards, its photoelectric transformation efficiency is down to 19.96% by 20.58% before testing, and represents
Its photo attenuation (LID) amount is 3.0%.And the solar cell (experimental group) of hydrogenated processing, after test
Photoelectric transformation efficiency is down to 20.25% by 20.50% before testing, represent its photo attenuation (LID) amount as
1.2%.It follows that the method for hydrogenation solar cell provided by the present invention, can effectively improve solar energy
Photo attenuation (LID) degree of battery.
From the embodiments of the present invention, the present invention has following advantages.The hydrogenation solar-electricity of the present invention
The device in pond can carry out hydrogenation processing procedure to solar cell, to improve the photo attenuation degree of solar cell.
More specifically, solar cell is hydrogenated by the device of the hydrogenation solar cell of the present invention, can caused too
Positive energy battery reaches 60KWh/m by exposure and through accumulative light energy2Afterwards, its photo attenuation (LID) degree
Less than 2%.Accordingly, the present invention can be used simple processing procedure, improve solar cell in follow-up in use,
The degree that photoelectric transformation efficiency declines.
Although the present invention is disclosed above with embodiment, so it is not limited to the present invention, any to be familiar with
This those skilled in the art, without departing from the spirit and scope of the present invention, when that can be used for a variety of modifications and variations, therefore
Protection scope of the present invention is worked as to be defined depending on the scope of which is defined in the appended claims.
Claims (10)
- A kind of 1. method for hydrogenating solar cell, it is characterised in that include：One solar cell is provided；AndWith the inswept solar cell of a light beam, the wherein light beam has a power between 20W/cm2Extremely 200W/cm2Between；One wide cut is between 1mm between 156mm；And one scan speed between 50mm/sec is between 200mm/sec.
- 2. the method for hydrogenation solar cell according to claim 1, it is characterised in that the light beam With a wavelength between 450nm between 1100nm.
- 3. the method for hydrogenation solar cell according to claim 1, it is characterised in that also include Heat the solar cell to a temperature between room temperature between 400 DEG C.
- 4. a kind of device for hydrogenating solar cell, it is characterised in that include：One cavity；One mobile device, through the cavity, and to carry a solar cell；AndOne light beam generator, the top of the cavity is arranged at, and positioned at the top of the mobile device.
- 5. the device of hydrogenation solar cell according to claim 4, it is characterised in that the hydrogenation The device of solar cell is by the mobile device, is linked to a Fast Sintering stove and a detection device.
- 6. the device of hydrogenation solar cell according to claim 4, it is characterised in that also include One heater, under the mobile device.
- 7. the device of hydrogenation solar cell according to claim 4, it is characterised in that also include One gas spray pipe is located at by the light beam generator, and its opening is directed at the solar energy below the light beam generator Battery.
- 8. the device of hydrogenation solar cell according to claim 4, it is characterised in that the light beam Light beam caused by generator, there is a power between 20W/cm2To 200W/cm2Between.
- 9. the device of hydrogenation solar cell according to claim 4, it is characterised in that the light beam Light beam caused by generator, have a wide cut between 1mm between 156mm.
- 10. the device of hydrogenation solar cell according to claim 4, it is characterised in that the movement Device has a rate travel between 50mm/sec between 200mm/sec.
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| CN201610326059.9A CN107394002A (en) | 2016-05-16 | 2016-05-16 | Hydrogenate the method and its device of solar cell |
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| CN201610326059.9A CN107394002A (en) | 2016-05-16 | 2016-05-16 | Hydrogenate the method and its device of solar cell |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104701419A (en) * | 2012-05-21 | 2015-06-10 | 新南创新私人有限公司 | Advanced hydrogenation of silicon solar cells |
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2016
- 2016-05-16 CN CN201610326059.9A patent/CN107394002A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104701419A (en) * | 2012-05-21 | 2015-06-10 | 新南创新私人有限公司 | Advanced hydrogenation of silicon solar cells |
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Application publication date: 20171124 |