CN107382044A - A kind of method of thin transparent glass laser transmission welding - Google Patents

A kind of method of thin transparent glass laser transmission welding Download PDF

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Publication number
CN107382044A
CN107382044A CN201710451247.9A CN201710451247A CN107382044A CN 107382044 A CN107382044 A CN 107382044A CN 201710451247 A CN201710451247 A CN 201710451247A CN 107382044 A CN107382044 A CN 107382044A
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China
Prior art keywords
glass
wavelength laser
laser beam
lower floor
laser
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Inventor
黄舒
杨小乐
盛杰
宋稳红
周建忠
刘牧熙
赵璇
朱明�
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Jiangsu University
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Jiangsu University
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Publication of CN107382044A publication Critical patent/CN107382044A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00Re-forming shaped glass
    • C03B23/20Uniting glass pieces by fusing without substantial reshaping
    • C03B23/203Uniting glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/25Metals
    • C03C2217/257Refractory metals
    • C03C2217/258Ti, Zr, Hf
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/156Deposition methods from the vapour phase by sputtering by magnetron sputtering

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

The invention provides a kind of method of thin transparent glass laser transmission welding, comprise the following steps:By two blocks of upper strata glass to be welded and lower floor's glass cleaning processing;Upper strata glass after treatment and lower floor's glass are overlapped, and are positioned on pedestal;Transparent glass is positioned on the glass of upper strata, by applying uniform clamping force to transparent glass;Ultraviolet wavelength laser beam and IR wavelength laser beam pass through collimation focusing system;Ultraviolet wavelength laser beam focus is preheated in lap-joint;Preheating completion is aided with ultraviolet wavelength laser beam using IR wavelength laser beam and welded, and IR wavelength laser device is first closed after the completion of welding, continues with ultraviolet wavelength laser beam and carries out postwelding Slow cooling to the lap-joint welded.The present invention realizes weld preheating and the postheating of workpiece, can effectively reduce the residual stress of workpiece, limits processing cost and improves welding efficiency and welding quality.

Description

A kind of method of thin transparent glass laser transmission welding
Technical field
The present invention relates to laser transmission welding technical field, more particularly to a kind of side of thin transparent glass laser transmission welding Method.
Background technology
Glass material has the advantages that corrosion resistance, high temperature resistant, non-conductive, anti-oxidant, is widely used in electrician's electricity at present The fields such as son, MEMS (MEMS) and the Aero-Space higher to Structural strength calls.Existing a variety of methods can be with present Realize the connection between clear glass, including adhesive bonding, anode linkage, solid diffusivity, melting microwelding etc..Although adhesive Can connect different materials, but adhesive release gas, photobleaching cause premature aging, may cause peripheral devices by Pollution;The deficiency of anode linkage is the similar thermal expansion coefficient of the bonding material of needs two, otherwise in the cooling procedure of bonding It can cause to crush because of larger internal stress;Different solid-states are connected with respective advantage and disadvantage, are wanted as prepared by diffusion welding (DW) welding surface Ask high and weld interval is longer;There is the high-temperature phase-change of inherence during fusion weld, material internal forms heat affected area and made not Material welding with thermal coefficient of expansion easily ruptures.
Laser transmission welding is a kind of contactless welding manner, is had from filler, and thermal deformation is small, good appearance, essence The advantages that fineness is high, and speed is fast, suitable for the precision welding of a variety of occasions, particularly tiny area, therefore is widely used in The field such as Aero-Space, military affairs, automobile making, electric, semiconductor, Furniture manufacture, communication device.In traditional Laser Welding Connect in clear glass technique, using continuous or Long Pulse LASER, the defects of very big be present due to needing addition solder or coating, Such as Patent No. CN105003506A patent proposes a kind of transparent material low temperature laser micro welding structure and its welding method, This method set between the first connector and the second connector upon laser irradiation coagulable collosol and gel as weld layer, Can make after being irradiated using laser two connectors realize welding, but this method prepare collosol and gel cost of material it is higher and prepare Cycle is longer, while the decline that a large amount of micropores often cause welding quality in gel be present.Patent No. CN102909474A With CN103011571A patent application, it proposes a kind of method for carrying out laser welding to transparent material and one kind to aobvious respectively Show the method that device face glass is welded, both approaches are by combined light beam after ultra-short pulse laser and Long Pulse LASER synchronization Focused on by object lens on the interface of two blocks of transparent materials to be welded, focus center is produced freely using ultra-short pulse laser Electron absorption Long Pulse LASER, when the energy for the long pulse that free electron absorbs reaches melt material threshold value to be welded, in focus Fusing occurs for material near the heart and fusion connection realizes welding together, but this method has a disadvantage that:(1) can not treat Welding clear glass realizes weld preheating and postheating;(2) do not possess temperature and the control of weldquality feedback closed loop, be not easy reality Existing automated production requirement;(3) welding efficiency is relatively low, and cost is higher.Patent No. CN103182604A patent proposes A kind of laser compound welding method and system, the laser that this method includes transmitting first wave length are used to increase workpiece to be welded to the The absorptivity of two wavelength lasers, the synthesis of first and second wavelength laser is a branch of, while focus on workpiece and welded, this method The transparent materials such as glass are not particularly suited for for motor core material and metal material.Infrared frequency is relatively low to cause clear glass It is poor for infrared ray absorbing, do not reach pre-heat effect, and heat by lalonge lamp efficiency is too low and preheating area and temperature be not easily-controllable System.
The content of the invention
For Shortcomings in the prior art, the invention provides a kind of method of thin transparent glass laser transmission welding, Weld preheating and postheating are realized to reduce remnants to thin transparent glass to be welded irradiation using the ultraviolet wavelength laser beam Stress, using the IR wavelength laser Shu Jinhang laser weldings, the residual stress of workpiece can be effectively reduced, limits processing cost And improve welding efficiency and welding quality.
The present invention is to realize above-mentioned technical purpose by following technological means.
A kind of method of thin transparent glass laser transmission welding, comprises the following steps:
S01:By two blocks of upper strata glass to be welded and lower floor's glass cleaning processing, in lower floor, glass top surface titanizing is thin Film;
S02:The upper surface that titanium film is coated with upper strata glass after S01 step process and lower floor's glass is overlapped, And it is positioned on pedestal;Then transparent glass is positioned on the glass of upper strata, by applying uniform clamping force to transparent glass, And then upper strata glass and lower floor's glass are realized and clamped;
S03:Selection ultraviolet wavelength laser and IR wavelength laser device, wherein ultraviolet wavelength laser launch wavelength are 325~400nm ultraviolet wavelength laser beam, IR wavelength laser device launch wavelength are 900~1064nm IR wavelength laser Light beam, ultraviolet wavelength laser beam and IR wavelength laser beam pass through collimation focusing system, and focus on upper strata glass by plumb joint The faying surface of glass and lower floor's glass;
S04:Ultraviolet wavelength laser is only opened, by ultraviolet wavelength laser beam focus taking in upper strata glass and lower floor's glass The place of connecing is preheated;IR wavelength laser device is opened after the completion of preheating again, by collimation focusing system by ultraviolet wavelength laser beam Focus on the faying surface of upper strata glass and lower floor's glass after synchronous and beam through transparent glass with IR wavelength laser beam;Using red Outer wavelength laser beam is aided with ultraviolet wavelength laser beam and welded, and IR wavelength laser device is first closed after the completion of welding, continues profit Postwelding Slow cooling is carried out to the lap-joint welded with ultraviolet wavelength laser beam.
Further, the S01 steps are specially:Upper strata glass and lower floor's glass are carried out into ultrasonic wave with ethanol to clean, clearly 6~24h is dried except being positioned over after its surface impurity in drying box, one is plated in lower floor's glass top surface using magnetic control sputtering device Layer titanium film, to strengthen the absorptivity to laser beam.
Further, the titanium film thickness is 200nm~300nm.
Further, close to lap-joint's installation infrared temperature sensor of upper strata glass and lower floor's glass, the infrared temperature Sensor is connected with computer;During thin transparent glass laser transmission welding, the computer is according to the temperature of feedback Value is compared with the temperature value set, and when the temperature value of feedback is more than predetermined temperature value, computer export signal is to infrared Long wavelength laser exports energy to reduce it;When the temperature value of feedback is less than predetermined temperature value, then computer export is believed Number to IR wavelength laser device with improve its export energy.
Further, in addition to S05 steps:The identification of weld defect is carried out with sentencing by laser vision detecting line sensor It is fixed.
Further, the laser vision detecting line sensor is encapsulated in the shell of sensing unit;Below the shell Provided with transparent baffle, the shell is provided with splash guard close to a side lower part of laser welding head;The laser vision is online Detection sensor is connected to computer by sensor cable interface;The laser vision detecting line sensor will be gathered Image sends computer to, and the identification and judgement of weld defect are completed by computer, and the quality for carrying out face of weld is examined automatically Survey.
Further, the transparent glass is K9 glass;The upper strata glass and lower floor's glass are 1.5mm~3mm thick Thin transparent glass.
Further, the ultraviolet wavelength laser beam ratio in the S03 steps after collimation focusing system passes through collimation focusing Big 2~the 3mm of IR wavelength laser beam spot diameter after system.
The beneficial effects of the present invention are:
1. the method for thin transparent glass laser transmission welding of the present invention, not only real by using dual-wavelength laser beam The laser welding of the transparent breakable material such as glass is showed, has also achieved weld preheating and the postheating of workpiece, can effectively reduce The residual stress of workpiece, limit processing cost and improve welding efficiency and welding quality.
2. the method for thin transparent glass laser transmission welding of the present invention, by plating one in lower floor's glass top surface Titanium film thick layer 200nm~300nm strengthens the absorption to laser beam, and then passes through heat transfer and heat and melt upper strata glass The lower surface of glass, while it is environmentally friendly and non-aging to be compared to collosol and gel titanium film.
3. the method for thin transparent glass laser transmission welding of the present invention, by the way that laser vision on-line checking is sensed Device and infrared temperature sensor realize weldquality on-line checking and monitoring bath temperature, improve automaticity.
Brief description of the drawings
Fig. 1 is the schematic diagram of the device of thin transparent glass laser transmission welding of the present invention.
Fig. 2 is Fig. 1 of present invention partial enlarged drawing.
In figure:
1- IR wavelength laser devices;2- computers;3- sensor cable interfaces;4- laser vision detecting line sensors; 5- transparent baffles;6- splash guards;7- shells;8- plumb joints;9- collimation focusing systems;10- ultraviolet wavelength lasers;11- is pressed from both sides Clamp force;12- transparent glass;13- titanium films;14- infrared temperature sensors;15- molten baths;16- lower floors glass;17- upper stratas glass; 18- ultraviolet wavelength laser beams;19- IR wavelength laser beams.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment the present invention is further illustrated, but protection scope of the present invention is simultaneously Not limited to this.
A kind of method of thin transparent glass laser transmission welding, comprises the following steps:
S01:By two blocks of upper strata glass 17 to be welded and the cleaning treatment of lower floor's glass 16, plated in the upper surface of lower floor's glass 16 Titanium film 13;Specially:Upper strata glass 17 and lower floor's glass 16 are carried out into ultrasonic wave with ethanol to clean, remove its surface impurity it After be positioned in drying box and dry 6~24h, plate last layer titanium film 13 in the upper surface of lower floor's glass 16 using magnetic control sputtering device, To strengthen the absorptivity to laser beam.The thickness of titanium film 13 is 200nm~300nm.
S02:The upper surface of titanium film 13 will be coated with upper strata glass 17 after S01 step process and lower floor's glass 16 Overlap joint, and be positioned on pedestal;Then transparent glass 12 is positioned on upper strata glass 17, by applying to transparent glass 12 Even clamping force 11, and then upper strata glass 17 and lower floor's glass 16 are realized and clamped;
S03:Select ultraviolet wavelength laser 10 and IR wavelength laser device 1, the wherein transmitted wave of ultraviolet wavelength laser 10 A length of 325~400nm ultraviolet wavelength laser beam 18, the launch wavelength of IR wavelength laser device 1 are 900~1064nm infrared waves Long laser beam 19, ultraviolet wavelength laser beam 18 and IR wavelength laser beam 19 pass through plumb joint by collimation focusing system 9 8 focus on the faying surface of upper strata glass 17 and lower floor's glass 16;Ultraviolet wavelength laser beam 18 after collimation focusing system 9 compares Big 2~the 3mm of the spot diameter of IR wavelength laser beam 19 after collimation focusing system 9.
S04:Ultraviolet wavelength laser 10 is only opened, ultraviolet wavelength laser beam 18 is focused on into upper strata glass 17 and lower floor's glass The lap-joint of glass 16 is preheated;IR wavelength laser device 1 is opened after the completion of preheating again, will be ultraviolet by collimation focusing system 9 After wavelength laser beam 18 and the synchronous simultaneously beam of IR wavelength laser beam 19 upper strata glass 17 and lower floor are focused on through transparent glass 12 The faying surface of glass 16;It is aided with ultraviolet wavelength laser beam 18 using IR wavelength laser beam 19 to be welded, after the completion of welding first IR wavelength laser device 1 is closed, ultraviolet wavelength laser beam 18 is continued with and postwelding Slow cooling is carried out to the lap-joint welded. The present invention carries out the absorptivity for preheating while increasing to IR wavelength laser beam using ultraviolet wavelength laser beam.
S05:The identification and judgement of weld defect are carried out by laser vision detecting line sensor 4.The laser vision Detecting line sensor 4 is encapsulated in the shell 7 of sensing unit;The lower section of shell 7 is provided with transparent baffle 5, and the shell 7 leans on One side lower part of nearly laser welding head 8 is provided with splash guard 6;The laser vision detecting line sensor 4 passes through sensor Cable interface 3 is connected to computer 2;The laser vision detecting line sensor 4 sends acquired image to computer 2, the identification and judgement of weld defect are completed by computer 2, carries out the quality automatic detection of face of weld.
Specific embodiment:Two kinds of energy of selection pass through the laser of clear glass to be welded, and a kind of is 325~400nm of wavelength Ultraviolet wavelength laser beam 18, another kind are 900~1064nm of wavelength IR wavelength laser light beams 19.
The material of upper strata glass 17 and lower floor's glass 16 is high-boron-silicon glass, and size is 20mm × 50mm, thickness 2000 ± 20 μm, the faying surface area of upper strata glass 17 and lower floor's glass 16 is 20mm × 20mm.By upper strata glass 17 and lower floor's glass 16 carry out ultrasonic wave with ethanol cleans 10min, removes its surface impurity, is positioned over afterwards in drying box and dries 12h.Dry and complete Last layer titanium film 13 is plated in the upper surface of lower floor's glass 16 using magnetic control sputtering device afterwards, the thickness of titanium film is 200~300nm;
Upper strata glass 17 after processing overlaps with being coated with the upper surface of titanium film 13 on lower floor's glass 16, and is positioned over pedestal On;Then transparent glass 12 is positioned on upper strata glass 17, by applying uniform clamping force 11 to transparent glass 12, and then Upper strata glass 17 and lower floor's glass 16 are realized and clamped, 0.3~0.5MPa of clamping force, wherein transparent glass 12 are K9 glass.Lean on Lap-joint's installation infrared temperature sensor 14 of nearly upper strata glass 17 and lower floor's glass 16, the infrared temperature sensor 14 and meter Calculation machine 2 connects;During thin transparent glass laser transmission welding, temperature value and setting of the computer 2 according to feedback Temperature value compare, when the temperature value of feedback is more than predetermined temperature value, computer 2 outputs signal to IR wavelength laser Device 1 exports energy to reduce it;When the temperature value of feedback is less than predetermined temperature value, then computer 2 outputs signal to red Outer long wavelength laser 1 exports energy to improve it.
Ultraviolet wavelength laser 10 is opened, ultraviolet wavelength laser beam 18 is focused on into two blocks of thin transparent glass to be welded overlaps Place is preheated to reduce the temperature difference between welding region and peripheral region, and then reduces caused thermal stress in welding process, Pre-heating scan speed is arranged to 5mm/s, laser power 5W, spot diameter 4mm.IR wavelength laser device 1 is opened after the completion of preheating, Transparent glass will be passed through after the synchronous simultaneously beam of ultraviolet wavelength laser beam 18 and IR wavelength laser beam 19 by collimation focusing system 9 12nd, upper strata glass 17 focuses on the faying surface of two blocks of thin transparent glass to be welded.Laser beam is through upper strata glass 17 by conduct The titanium film 13 of absorbed layer is absorbed, and laser energy is directly acted in titanium film, and then is heated and melted by heat transfer Change upper strata glass 17.When the laser energy of absorption is more than or equal to high-boron-silicon glass melting threshold, (high-boron-silicon glass faying surface two Side) high-boron-silicon glass occurs to melt and merge in focus center near zone.With the movement of plumb joint 8, the high borosilicate of fusing Glass cools, solidified, link together realization welding, and clear glass to be welded is welded using IR wavelength laser beam 19 Connect, speed of welding is up to 2mm/s, laser power 50W, spot diameter 2mm.IR wavelength laser device 1 is closed after the completion of welding, after It is continuous using ultraviolet wavelength laser beam 18 to having welded thin transparent glass progress postheating, Ultra-Violet Laser beam scan velocity 5mm/s, Laser power 5W, spot diameter 4mm, to discharge caused stress in welding process, suppress underbead crack and produce, reduce welding and lack Fall into.
Finally, the identification and judgement of weld defect are carried out by laser vision detecting line sensor 4.The laser vision Detecting line sensor 4 is encapsulated in the shell 7 of sensing unit;The lower section of shell 7 is provided with transparent baffle 5, and the shell 7 leans on One side lower part of nearly laser welding head 8 is provided with splash guard 6;The laser vision detecting line sensor 4 passes through sensor Cable interface 3 is connected to computer 2;The laser vision detecting line sensor 4 sends acquired image to computer 2, the identification and judgement of weld defect are completed by computer 2, carries out the quality automatic detection of face of weld.
The embodiment is preferred embodiment of the invention, but the present invention is not limited to above-mentioned embodiment, not Away from the present invention substantive content in the case of, those skilled in the art can make it is any it is conspicuously improved, replace Or modification belongs to protection scope of the present invention.

Claims (8)

  1. A kind of 1. method of thin transparent glass laser transmission welding, it is characterised in that comprise the following steps:
    S01:By two blocks of upper strata glass (17) to be welded and lower floor's glass (16) cleaning treatment, in lower floor's glass (16) upper surface Plate titanium film (13);
    S02:The upper table of titanium film (13) will be coated with upper strata glass (17) after S01 step process and lower floor's glass (16) Face overlaps, and is positioned on pedestal;Then transparent glass (12) is positioned on upper strata glass (17), by transparent glass (12) apply uniform clamping force (11), and then upper strata glass (17) and lower floor's glass (16) are realized and clamped;
    S03:Ultraviolet wavelength laser (10) and IR wavelength laser device (1) are selected, wherein ultraviolet wavelength laser (10) is launched Wavelength is 325~400nm ultraviolet wavelength laser beam (18), and IR wavelength laser device (1) launch wavelength is 900~1064nm's IR wavelength laser light beam (19), ultraviolet wavelength laser beam (18) and IR wavelength laser beam (19) pass through collimation focusing system (9) faying surface of upper strata glass (17) and lower floor's glass (16), and by plumb joint (8) is focused on;
    S04:Ultraviolet wavelength laser (10) is only opened, ultraviolet wavelength laser beam (18) is focused on into upper strata glass (17) and lower floor The lap-joint of glass (16) is preheated;IR wavelength laser device (1) is opened after the completion of preheating again, passes through collimation focusing system (9) will be focused on after the synchronous simultaneously beam of ultraviolet wavelength laser beam (18) and IR wavelength laser beam (19) through transparent glass (12) The faying surface of layer glass (17) and lower floor's glass (16);It is aided with ultraviolet wavelength laser beam (18) using IR wavelength laser beam (19) Welded, IR wavelength laser device (1) is first closed after the completion of welding, continue with ultraviolet wavelength laser beam (18) to having welded Lap-joint carry out postwelding Slow cooling.
  2. 2. the method for thin transparent glass laser transmission welding according to claim 1, it is characterised in that the S01 steps Specially:Upper strata glass (17) and lower floor's glass (16) are carried out into ultrasonic wave with ethanol to clean, its surface impurity is removed and puts afterwards It is placed in drying box and dries 6~24h, last layer titanium film (13) is plated in lower floor's glass (16) upper surface using magnetic control sputtering device, To strengthen the absorptivity to laser beam.
  3. 3. the method for thin transparent glass laser transmission welding according to claim 1, it is characterised in that the titanium film (13) thickness is 200nm~300nm.
  4. 4. the method for thin transparent glass laser transmission welding according to claim 1, it is characterised in that close to upper strata glass (17) with lap-joint's installation infrared temperature sensor (14) of lower floor's glass (16), the infrared temperature sensor (14) is with calculating Machine (2) connects;During thin transparent glass laser transmission welding, the computer (2) is according to the temperature value of feedback with setting Fixed temperature value compares, and when the temperature value of feedback is more than predetermined temperature value, computer (2) outputs signal to infrared wavelength Laser (1) exports energy to reduce it;When the temperature value of feedback is less than predetermined temperature value, then computer (2) exports Signal exports energy to IR wavelength laser device (1) to improve it.
  5. 5. the method for thin transparent glass laser transmission welding according to claim 1, it is characterised in that also walked including S05 Suddenly:The identification and judgement of weld defect are carried out by laser vision detecting line sensor (4).
  6. 6. the method for thin transparent glass laser transmission welding according to claim 5, it is characterised in that the laser vision Detecting line sensor (4) is encapsulated in the shell (7) of sensing unit;Transparent baffle (5), institute are provided with below the shell (7) The side lower part that shell (7) is stated close to laser welding head (8) is provided with splash guard (6);The laser vision on-line checking passes Sensor (4) is connected to computer (2) by sensor cable interface (3);The laser vision detecting line sensor (4) is by institute The image of collection sends computer (2) to, and the identification and judgement of weld defect are completed by computer (2), carries out face of weld Quality automatic detection.
  7. 7. the method for thin transparent glass laser transmission welding according to claim 1, it is characterised in that the transparent glass (12) it is K9 glass;The upper strata glass (17) and lower floor's glass (16) are the thick thin transparent glass of 1.5mm~3mm.
  8. 8. the method for thin transparent glass laser transmission welding according to claim 1, it is characterised in that the S03 steps The middle ultraviolet wavelength laser beam (18) after collimation focusing system (9) is than the infrared wavelength after collimation focusing system (9) Laser beam (19) big 2~3mm of spot diameter.
CN201710451247.9A 2017-06-15 2017-06-15 A kind of method of thin transparent glass laser transmission welding Pending CN107382044A (en)

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Cited By (9)

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CN108581188A (en) * 2018-06-21 2018-09-28 华中科技大学 A kind of recombination laser welds the method and device of transparent fragile material
CN108609841A (en) * 2018-04-10 2018-10-02 华中科技大学 A kind of welding method suitable for glass
CN109702343A (en) * 2019-01-22 2019-05-03 华南师范大学 The controllable laser compound welding device and method of the transparency of a kind of pair of glass
CN110642524A (en) * 2019-10-31 2020-01-03 山东大学 Method for preparing microstructure on glass surface by titanium dioxide nanoparticle assisted infrared nanosecond laser
CN110723900A (en) * 2019-09-16 2020-01-24 深圳市裕展精密科技有限公司 Glass composite part, preparation method of glass composite part and laser welding equipment
CN110788486A (en) * 2019-11-07 2020-02-14 武汉华工激光工程有限责任公司 Systematic precision machining method for brittle transparent material special-shaped 3D structure
CN111702330A (en) * 2020-05-15 2020-09-25 华南师范大学 Welding system and welding method for copper-plated glass
CN114289872A (en) * 2022-03-07 2022-04-08 西安中科华芯测控有限公司 Method for assembling ultrafast laser mirror for miniature laser gyroscope
US20230069855A1 (en) * 2021-09-03 2023-03-09 Neuralink Corp Glass welding through non-flat surface

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CN108581188A (en) * 2018-06-21 2018-09-28 华中科技大学 A kind of recombination laser welds the method and device of transparent fragile material
CN109702343A (en) * 2019-01-22 2019-05-03 华南师范大学 The controllable laser compound welding device and method of the transparency of a kind of pair of glass
CN109702343B (en) * 2019-01-22 2023-10-20 华南师范大学 Glass transparency controllable laser composite welding device and method
CN110723900A (en) * 2019-09-16 2020-01-24 深圳市裕展精密科技有限公司 Glass composite part, preparation method of glass composite part and laser welding equipment
CN110642524B (en) * 2019-10-31 2020-06-30 山东大学 Method for preparing microstructure on glass surface by titanium dioxide nanoparticle assisted infrared nanosecond laser
WO2021082261A1 (en) * 2019-10-31 2021-05-06 山东大学 Method for preparing micro structure on glass surface with titanium dioxide nanoparticles assisted by infrared nanosecond laser
CN110642524A (en) * 2019-10-31 2020-01-03 山东大学 Method for preparing microstructure on glass surface by titanium dioxide nanoparticle assisted infrared nanosecond laser
US11952307B2 (en) 2019-10-31 2024-04-09 Shandong University Method for preparing microstructure on surface of glass by titanium oxide nanoparticle-assisted infrared nanosecond laser
CN110788486A (en) * 2019-11-07 2020-02-14 武汉华工激光工程有限责任公司 Systematic precision machining method for brittle transparent material special-shaped 3D structure
CN110788486B (en) * 2019-11-07 2022-04-15 武汉华工激光工程有限责任公司 Systematic precision machining method for brittle transparent material special-shaped 3D structure
CN111702330A (en) * 2020-05-15 2020-09-25 华南师范大学 Welding system and welding method for copper-plated glass
US20230069855A1 (en) * 2021-09-03 2023-03-09 Neuralink Corp Glass welding through non-flat surface
CN114289872A (en) * 2022-03-07 2022-04-08 西安中科华芯测控有限公司 Method for assembling ultrafast laser mirror for miniature laser gyroscope
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