CN107367524A - A kind of near field heat radiation experimental provision - Google Patents
A kind of near field heat radiation experimental provision Download PDFInfo
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- CN107367524A CN107367524A CN201710750538.8A CN201710750538A CN107367524A CN 107367524 A CN107367524 A CN 107367524A CN 201710750538 A CN201710750538 A CN 201710750538A CN 107367524 A CN107367524 A CN 107367524A
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- Prior art keywords
- loading device
- near field
- heat radiation
- heat
- experimental provision
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
Abstract
The invention discloses a kind of near field heat radiation experimental provision, it is related to radiation heat transfer technical field of measurement and test, the technical problem of solution is to realize the accurate measurement near field heat radiation heat exchange amount under micro-nano-scale, and transverse direction thermal radiation loss is small during measurement and mechanical structure is simple, and the device includes：Top offset loading device（1）, bottom offset loading device（2）, sealed chassis device（3）, vacuum (-tight) housing（4）In addition to measuring unit（5）, ranging optical fiber（6）, the measuring unit（5）It is placed in the top offset loading device（1）, bottom offset loading device（2）Between, the ranging optical fiber（6）Through the top offset loading device（1）Terminate in the measuring unit（5）On, the distance for detecting sample gap can be obtained by the analysis of spectrum.Transverse direction thermal radiation loss is small during present invention measurement, can use two ways regulation sample interval and the controllable scope of spacing is big, realize the accurate measurement near field heat radiation heat exchange amount under micro-nano-scale.
Description
Technical field
The present invention relates to radiation heat transfer technical field of measurement and test, and in particular to a kind of near field heat radiation experimental provision, bag
Include：Top offset loading device, bottom offset loading device, sealed chassis device, vacuum (-tight) housing, measuring unit, ranging optical fiber.
Background technology
All objects in nature, if temperature more than absolute temperature zero degree, all in the form of electromagnetic wave and particle
Moment, ceaselessly outside transfer of heat, this energy-delivering mode were referred to as radiating.Electronics and particle are constantly carried out in material
Thermal vibration causes material constantly to give off electromagnetic wave.Heat radiation is referred to as by thermogenetic electromagenetic wave radiation, wave-length coverage is
0.1μm-100μm.Near field heat radiation refers to the phenomenon that thermal exposure under micro-nano-scale strengthens, the phenomenon can not be made a mistake with this fence-
Boltzmann law explain, and and Planck blackbody radiation law have deviation.The concept for wherein radiating far and near field is respectively：Two
When object distance is much larger than radiation dominant wavelength, emittance, which exchanges, can use equation of radiative transfer（RTE）Or Planck blackbody distribution
Description, heat radiation are conceptualized as particle, photon；Distance between two articles is sufficiently small（Micro-nano-scale）, ripple attribute be present, can only
Described by Maxwell equation.Can a simple Rule of judgment of near-field thermal radiation be produced be：Distance between two articles is less than it
In wavelength X max corresponding to maximum black body radiation power at this temperature（Provided by Wien's displacement law）.In normal temperature 300K, black matrix
Greatest irradiation power corresponding wavelength is 10 μm of magnitudes.
Near field heat radiation has sizable potentiality in thermal management, and many scholars have done largely in this respect
Research, wherein theoretical research are combined using the methods of random Maxwell equation combination fluctuation dissipation law, dyadic Green's function
Go to explore wherein mechanism.However, theoretical calculation can only predict the near-field thermal radiation heat exchange of some simple solids, in general theory
Radiation heat-transfer model structure has the simple structure of parallel flat, ball and flat board and two concentric drums etc..For complex geometry
Near field heat radiation, there has been no perfect theoretical analysis method.
In terms of experiment measures near field heat radiation, it is limited to technical merit in early days and is not studied widely, until 90 year
Generation just starts with micro-processing technology and produces miniature needle-applicator to carry out going deep into experimental study near field heat radiation, so far,
Scanning probe technique is still method important in micro-nano-scale radiant heat transfer measurement experiment.The experiment measurement of near field heat radiation is logical
Often needing to carry out under vacuum condition again, experimental group needs to be provided simultaneously with the transmitter of heat radiation and receiver, and in an experiment
Need transmitter and absorber being placed into spacing as micron or the relative position of nanometer, this is the emphasis in experiment measurement
And difficulties.Hot radiation measurement device near field mainly has three types at present：
The first kind is to carry out the near field heat between microballoon and flat board or microballoon and microballoon as transmitter using the scanning probe of repacking
Actinometry, distance can reach nanoscale, but in engineering practice, the near field heat radiation between flat board has more researching value and practicality
Property.
Second class uses conventional mechanical means combination mems device, is such as adjusted using stepper motor, differential screw
The distance between transmitter and receiver, the near field heat radiation between general Study flat board and flat board are saved, spacing typically arrives in sub-micron
Between millimeter, when shortcoming is with differential screw command displacement, its resolution ratio up to 1 microns are difficult to reach Nano grade and machine
Tool is complicated.
3rd class is the device processed using micro-nano Mechatronic Systems, such as free standing structure film structure, microactrator structure, wherein
Microactrator structure controls the spacing of two slight flats using the principle of thermal expansion, shows so as to study corresponding near field heat radiation
As shortcoming is that structure is complicated with manufacturing process, it is necessary to carry out the deformation analysis such as mechanics in advance.
The content of the invention
In view of the shortcomings of the prior art, present invention solves the technical problem that being to realize that accurate measurement is near under micro-nano-scale
Heat radiation heat exchange amount, transverse direction thermal radiation loss is small during measurement and mechanical structure is simple.
In order to solve the above technical problems, technical scheme provided by the invention is a kind of near field heat radiation experimental provision,
A kind of near field heat radiation experimental provision, including：It is top offset loading device, bottom offset loading device, sealed chassis device, true
Sky cover, measuring unit and ranging optical fiber, sliding screw connect the top offset loading device, bottom offset loading from top to bottom successively
Device, sealed chassis device, ball jacket, which is sleeved on the sliding screw to load the bottom offset, puts into row relative movement
Spacing, the vacuum (-tight) housing covers the top offset loading device, bottom offset loading device is placed in the sealed chassis, described
Measuring unit is placed between the top offset loading device, bottom offset loading device, and the ranging optical fiber is through described upper
Loading device is moved to terminate in the measuring unit；
The top offset loading device includes upper bracket, upper load plate, compression spring, T stage and screw rod, and the screw rod is located at institute
State upper bracket center and be thread through the upper bracket from top to down and withstand the upper load plate and can be moved up and down by screw thread, institute
Load plate, compression spring, T stage is stated successively to connect, sliding screw through ball jacket 17 to the T stage relative limit simultaneously
It is fixed under the upper bracket；
The bottom offset loading device includes piezoelectric actuator, angle demodulator, substrate, orientation steel ball pressure sensor and lower branch
Frame, the piezoelectric actuator, angle demodulator, substrate, orientation steel ball pressure sensor, lower carriage are sequentially connected, the slip
Screw rod carries out relative limit to the substrate through ball jacket and passes through the substrate, lower carriage and be fixed on chassis panel
On；
The sealed chassis device 3 includes chassis panel, level meter adjusting rod, chassis base plate, hydraulic cylinder, pressure dynamics source, close
Device and conductor jointer and vacuum extraction tracheae are sealed, the chassis panel, level meter adjusting rod, chassis base plate are sequentially connected, institute
State pressure dynamics source to be placed on the chassis base plate, head on the hydraulic cylinder thereon, the hydraulic cylinder passes through the chassis panel
Connect with the lower carriage bottom surface, the sealer both passes through the chassis face with conductor jointer and the vacuum extraction tracheae
On plate.
The measuring unit includes heater and expands plate, heat conductive pad, heat conductive pad, upper sample holder, lower sample with copper heat
Clamper, heat-flow meter and thermoelectric device, temperature sensor and copper heightening platform, the heater and copper heat expand plate, heat conductive pad, on
Sample holder is affixed successively, and lower sample holder, heat conductive pad, heat-flow meter and the thermoelectric device, the copper heightening platform are successively
It is affixed, the temperature sensor is arranged on copper heightening platform both sides and symmetrical.
Further, the heater expands plate with copper heat and carries out gold-plated or processing of aluminizing with the copper heightening platform surface.
Further, described heater expands plate side with copper heat and is equipped with thermometer hole, and thermocouple should be embedded into thermometer hole
Bosom.
Further, the upper sample holder, lower sample holder can need according to experiment and be put down with high-precision optical
Plate substitutes.
In present embodiment, tabular sample is clamped by the upper sample holder, lower sample holder and
Sample size will be cut according to the upper sample holder, lower sample holder size, need carry out table before sample measurement
Face is handled so as to reach suitable roughness and flatness；
The upper sample holder, lower sample holder can also be replaced using high precision optical plate, it is preferable that described
The irregularity degree of high precision optical plate surface curvature is less than 50nm, then sprays or etches on high precision optical plate again and treats
The material of test.
The ranging optical fiber is used to measure the spacing between tested parallel sample, and measuring principle is optical interference measure, leads to
The distance in gap can be obtained by crossing the analysis of spectrum, and distance-finding method is not limited to use ranging optical fiber, can also use electric capacity or tunnel electricity
Stream method etc..
Following beneficial effect can use to obtain using technical scheme：
1st, carry out gold-plated or aluminium plated surface by the associated components in measuring unit to handle, subtract its surface emissivity absorptivity
Low, the influence of environment when reducing experiment measurement, transverse direction thermal radiation loss is small when realizing measurement, so as to tend to one-dimensional heat transfer.
2nd, by the design of displacement-loading system, the spacing between two samples can be regulated and controled using two ways, so that
Regulatable scope is obtained to greatly increase.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the structural representation of measuring unit.
Embodiment
The embodiment of the present invention is further described below in conjunction with the accompanying drawings, but is not the limit to the present invention
It is fixed.
Fig. 1, Fig. 2 show the structure of the present invention, a kind of near field heat radiation experimental provision, including top offset loading dress
1, bottom offset loading device 2, sealed chassis device 3, vacuum (-tight) housing 4, measuring unit 5 and ranging optical fiber 6 are put, sliding screw 7 is successively
The top offset loading device 1, bottom offset loading device 2, sealed chassis device 3 are connected from top to bottom, and ball jacket 8 is sleeved on
The bottom offset loading device 2 relatively move on the sliding screw 7 spacing, the vacuum (-tight) housing 4 covers described upper
Shifting loading device 1, bottom offset loading device 2 are placed in the sealed chassis 3, and the measuring unit 5 is placed in described upper
Move between loading device 1, bottom offset loading device 2, the ranging optical fiber 6 terminates in described through the top offset loading device 1
In measuring unit 5；
The top offset loading device 1 includes upper bracket 11, upper load plate 12, compression spring 13, T stage 14 and screw rod 15, institute
State screw rod 15 and be thread through the upper bracket 11 from top to down positioned at the center of the upper bracket 11 and withstand the upper load plate 12 simultaneously
It can be moved up and down by screw thread, the upper load plate 12, compression spring 13, T stage 14 connect successively, and sliding screw 16 passes through rolling
17 pairs of the bead sleeve cylinder relative limit of T stage 14 is simultaneously fixed under the upper bracket 11；
The bottom offset loading device 2 includes piezoelectric actuator 21, angle demodulator 22, substrate 23, orientation steel ball pressure sensing
Device 24 and lower carriage 25, the piezoelectric actuator 21, angle demodulator 22, substrate 23, orientation steel ball pressure sensor 24, lower branch
Frame 25 is sequentially connected, and the sliding screw 7 carries out relative limit to the substrate 23 through ball jacket 8 and passes through the substrate
23rd, lower carriage 25 and it is fixed on chassis panel 31；
The sealed chassis device 3 includes chassis panel 31, level meter adjusting rod 32, chassis base plate 33, hydraulic cylinder 34, pressure and moved
Power source 35, sealer and conductor jointer 36 and vacuum extraction tracheae 37, the chassis panel 31, level meter adjusting rod 32, bottom
Plate 33 of trying to get to the heart of a matter is sequentially connected, and the pressure dynamics source 35 is placed on the chassis base plate 33, heads on the hydraulic cylinder 34, institute thereon
Hydraulic cylinder 34 is stated through the chassis panel 31 with the bottom surface of lower carriage 25 to connect, the sealer and conductor jointer 36 and
The vacuum extraction tracheae 37 is both passed through on the chassis panel 31.
As shown in Fig. 2 the measuring unit 5 include heater and copper heat expand plate 51, heat conductive pad 52, heat conductive pad 53, on
Sample holder 54, lower sample holder 55, heat-flow meter and thermoelectric device 56, temperature sensor 57 and copper heightening platform 58, it is described
Heater is expanded plate 51, heat conductive pad 52, upper sample holder 54 with copper heat and is affixed successively, the lower sample holder 55, heat conduction
Pad 53, heat-flow meter and thermoelectric device 56, the copper heightening platform 58 are affixed successively, and the temperature sensor 57 is arranged on the copper and increased
Both sides of plateau 58 and symmetrical.
Further, the heater expands plate 51 with copper heat and carries out gold-plated or place of aluminizing with the surface of copper heightening platform 58
Reason.
Further, described heater expands the side of plate 51 with copper heat and is equipped with thermometer hole, and thermocouple should be embedded into thermometric
Hole bosom.
Further, the upper sample holder 54, lower sample holder 55 can need according to experiment and use optical flat
Substitute.
In present embodiment, tabular sample is pressed from both sides by the upper sample holder 54, lower sample holder 55
Hold and sample size will be cut according to the upper sample holder 54, the size of lower sample holder 55, needed before sample measurement
It is surface-treated so as to reach suitable roughness and flatness；
The upper sample holder 54, lower sample holder 55 can also be replaced using high precision optical plate, it is preferable that
The irregularity degree of the high precision optical plate surface curvature is less than 50nm, then sprays or carves on high precision optical plate again
Lose material to be tested.
The ranging optical fiber 6, for measuring the spacing between tested parallel sample, measuring principle is optical interference measure,
The distance in gap can be obtained by the analysis of spectrum, distance-finding method is not limited to use ranging optical fiber, can also use electric capacity or tunnel
Current method etc..
In present embodiment, the regulative mode of the spacing of two parallel plate samples can have two kinds of implementations by this device：
In present embodiment, the regulative mode of the spacing of two parallel plate samples can have two kinds of implementations：
The first is first to regulate the position of top offset loading device 1 and fixed, is then loaded by the bottom offset
Device 2 carries out coarse positioning shifting, and after reaching suitable height, the regulation angle demodulator 22 makes two samples parallel, then adjusts again
The piezoelectric actuator 21 carries out fine displacement, and this mode is taken " below mix " method can be used for measurement sub-micron to millimeter
Near field to the far field heat radiation heat exchange amount of level spacing；
The second way is to carry out regulation and control two as sept using the special adiabatic equidistant micro-nano granules processed
Sample interval, two sample rooms are uniformly distributed micro-nano granules, then by controlling top offset loading device 1 to add sample
Carry, wherein mainly applying load by the compression spring 13, the pressure of application can be by the orientation steel ball pressure sensor 24
Monitoring, this mode can be used for 100 nanometers of near field heat radiation heat exchange amounts to micron order spacing of measurement.
In present embodiment, the temperature sensor 57, the thermal flow meter will carry out school in advance with thermoelectric device 56
Standard, the temperature that the heater expands plate 51 with copper heat are monitored by platinum resistance temperature sensor, and it feeds back signal to a temperature
Controller, by feedback control, the temperature change of the heat conductive pad 52 can be controlled within 1 DEG C, from the heater and copper
The hot-fluid that heat expands plate 51 to the thermal flow meter and thermoelectric device 56 can be by based on the heat flow on thermoelectric device
Meter obtains with thermoelectric device 56, and the upper and lower surface temperature difference of its output voltage and heat flow transducer sensing plate is linear,
Suitable heat transfer calculations are obtained, the susceptibility of heat flow transducer needs to calibrate in far-field region in advance；Sample interval is adjusted
Afterwards, connect data connection and cover the good vacuum (-tight) housing 4, by the vacuum extraction tracheae 37 to inside the vacuum (-tight) housing 4
Confined space vacuumizes, and treats that the internal vacuum of vacuum (-tight) housing 4 reaches below 10-3Pa, the institute that selection is arranged up and down as needed
State heater and the temperature difference is adjusted with thermoelectric device 56 with copper heat expansion plate 51 and the thermal flow meter；Reach suitable vacuum
And after stable state, according to the thermal flow meter that the lining of measuring unit 5 is put and the heat flow data q in thermoelectric device 56
The electric thermo-couple temperature T1 of the upper side of plate 51 insertion, the temperature T2 combinations institute that the temperature sensor 57 measures are expanded with copper heat
Plate 51, which is expanded, with the known materials physical property such as copper heat clamps thing with the upper sample holder 54, the lower sample holder 55
Thermal conductivity and thickness, the temperature Th, Tc of sample upper and lower surface and coefficient of heat transfer h=q/ of near field heat radiation can be calculated
(Th-Tc)。
Technical scheme can use two ways regulation sample interval and the controllable scope of spacing is big, realize
Heat radiation heat exchange amount in accurate measurement near field under micro-nano-scale.
Technical scheme is described in detail above in association with accompanying drawing, but the present invention be not limited to it is described
Embodiment.For a person skilled in the art, without departing from the principles and spirit of the present invention, to these realities
The mode of applying carries out various change, modification, replacement and modification and still fallen within the scope of the present invention.
Claims (10)
1. a kind of near field heat radiation experimental provision, including：Top offset loading device（1）, bottom offset loading device（2）, it is close
Seal base apparatus（3）And vacuum (-tight) housing（4）, sliding screw（7）Connect the top offset loading device from top to bottom successively（1）, under
Displacement loading device（2）, sealed chassis device（3）, ball jacket（8）It is sleeved on the sliding screw（7）On to the bottom
Move loading device（2）Carry out relatively moving spacing, the vacuum (-tight) housing（4）Cover the top offset loading device（1）, bottom offset adds
Carry and put（2）It is placed in the sealed chassis（3）On, it is characterised in that：Also include measuring unit（5）, ranging optical fiber（6）, institute
State measuring unit（5）It is placed in the top offset loading device（1）, bottom offset loading device（2）Between, the ranging optical fiber
（6）Through the top offset loading device（1）Terminate in the measuring unit（5）On, detection sample can be obtained by the analysis of spectrum
The distance in product gap.
2. heat radiation experimental provision near field according to claim 1, it is characterised in that：The top offset loading device
（1）Including upper bracket（11）, upper load plate（12）, compression spring（13）, T stage（14）And screw rod（15）, the screw rod（15）
Positioned at the upper bracket（11）Center is thread through the upper bracket from top to down（11）Withstand the upper load plate（12）And can
Moved up and down by screw thread, the upper load plate（12）, compression spring（13）, T stage（14）Connect successively, sliding screw（16）
Through ball jacket（17）To the T stage（14）Relative limit is simultaneously fixed on the upper bracket（11）Under.
3. heat radiation experimental provision near field according to claim 1, it is characterised in that：The bottom offset loading device
（2）Including piezoelectric actuator（21）, angle demodulator（22）, substrate（23）, orientation steel ball pressure sensor（24）And lower carriage
（25）, the piezoelectric actuator（21）, angle demodulator（22）, substrate（23）, orientation steel ball pressure sensor（24）, lower carriage
（25）It is sequentially connected, the sliding screw（7）Through the ball jacket（8）To the substrate（23）Carry out relative limit and wear
Cross the substrate（23）, lower carriage（25）And it is fixed on chassis panel（31）On.
4. heat radiation experimental provision near field according to claim 1, it is characterised in that：The sealed chassis device
（3）Including chassis panel（31）, level meter adjusting rod（32）, chassis base plate（33）, hydraulic cylinder（34）, pressure dynamics source（35）、
Sealer and conductor jointer（36）With vacuum extraction tracheae（37）, the chassis panel（31）, level meter adjusting rod（32）, bottom
Try to get to the heart of a matter plate（33）It is sequentially connected, the pressure dynamics source（35）It is placed in the chassis base plate（33）On, the hydraulic pressure is headed on thereon
Cylinder（34）, the hydraulic cylinder（34）Through the chassis panel（31）With the lower carriage（25）Bottom surface connects, the sealer
With conductor jointer（36）With the vacuum extraction tracheae（37）Both pass through the chassis panel（31）On.
5. heat radiation experimental provision near field according to claim 1, it is characterised in that：The measuring unit（5）Bag
Include heater and expand plate with copper heat（51）, heat conductive pad（52）, heat conductive pad（53）, upper sample holder（54）, lower sample holder
（55）, heat-flow meter and thermoelectric device（56）, temperature sensor（57）With copper heightening platform（58）, the heater and copper heat expand plate
（51）, heat conductive pad（52）, upper sample holder（54）It is affixed successively, the lower sample holder（55）, heat conductive pad（53）, hot-fluid
Meter and thermoelectric device（56）, the copper heightening platform（58）It is affixed successively, the temperature sensor（57）The copper is arranged on to increase
Platform（58）Both sides and symmetrical.
6. heat radiation experimental provision near field according to claim 5, it is characterised in that：The heater is opened up with copper heat
Panel（51）With the copper heightening platform（58）Surface carries out gold-plated or processing of aluminizing.
7. heat radiation experimental provision near field according to claim 6, it is characterised in that：Described heater and copper heat
Expand plate（51）Side is equipped with thermometer hole.
8. the near field heat radiation experimental provision according to claim 5 to 7 any one, it is characterised in that：It is described
Upper sample holder（54）, lower sample holder（55）It can be substituted with high precision optical plate.
9. heat radiation experimental provision near field according to claim 8, it is characterised in that：The high precision optical plate
The irregularity degree of surface curvature is less than 50nm.
10. heat radiation experimental provision near field according to claim 9, it is characterised in that：The high-precision optical is put down
Material to be tested is sprayed or etched on plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710750538.8A CN107367524A (en) | 2017-08-28 | 2017-08-28 | A kind of near field heat radiation experimental provision |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710750538.8A CN107367524A (en) | 2017-08-28 | 2017-08-28 | A kind of near field heat radiation experimental provision |
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| CN107367524A true CN107367524A (en) | 2017-11-21 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110907071A (en) * | 2019-10-28 | 2020-03-24 | 华南师范大学 | Nano-level near-field thermal radiation high-precision measuring device and measuring method |
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|---|---|---|---|---|
| US20100031990A1 (en) * | 2008-08-01 | 2010-02-11 | University Of Kentucky Research Foundation | Cascaded Photovoltaic and Thermophotovoltaic Energy Conversion Apparatus with Near-Field Radiation Transfer Enhancement at Nanoscale Gaps |
| TW201614188A (en) * | 2014-08-29 | 2016-04-16 | Asml Netherlands Bv | Method for controlling a distance between two objects, inspection apparatus and method |
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2017
- 2017-08-28 CN CN201710750538.8A patent/CN107367524A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100031990A1 (en) * | 2008-08-01 | 2010-02-11 | University Of Kentucky Research Foundation | Cascaded Photovoltaic and Thermophotovoltaic Energy Conversion Apparatus with Near-Field Radiation Transfer Enhancement at Nanoscale Gaps |
| TW201614188A (en) * | 2014-08-29 | 2016-04-16 | Asml Netherlands Bv | Method for controlling a distance between two objects, inspection apparatus and method |
Non-Patent Citations (1)
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| 冯冲等: "近场热辐射实验测量方法的进展", 《材料导报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110907071A (en) * | 2019-10-28 | 2020-03-24 | 华南师范大学 | Nano-level near-field thermal radiation high-precision measuring device and measuring method |
| CN110907071B (en) * | 2019-10-28 | 2021-02-19 | 华南师范大学 | Nano-level near-field thermal radiation high-precision measuring device and measuring method |
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Application publication date: 20171121 |