CN107356407B - Device for synchronously measuring power, spectrum and beam quality of high-power fiber laser - Google Patents
Device for synchronously measuring power, spectrum and beam quality of high-power fiber laser Download PDFInfo
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- CN107356407B CN107356407B CN201610305698.7A CN201610305698A CN107356407B CN 107356407 B CN107356407 B CN 107356407B CN 201610305698 A CN201610305698 A CN 201610305698A CN 107356407 B CN107356407 B CN 107356407B
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Abstract
The invention discloses a device for synchronously measuring power, spectrum and beam quality of a high-power optical fiber laser, wherein a collimator, a high-reflection mirror group, a first wedge plate glass, a first multi-groove pluggable attenuator, a convex lens and an optical fiber probe are sequentially arranged on a common optical axis, the components form a spectrum measuring light path, the collimator is arranged at the output end of the optical fiber laser to be measured, and the optical fiber probe is connected with an optical fiber spectrometer; the planoconcave mirror and the target surface of the power meter are sequentially arranged on a reflection light path of the high reflecting mirror group, and the target surface of the power meter is connected with the power meter; the second wedge plate glass is arranged on the reflection light path of the first wedge plate glass, and the second multi-slot pluggable attenuator and the light beam quality analyzer are sequentially arranged on the reflection light path of the second wedge plate glass; the above-mentioned components are arranged on an optical platform. The invention realizes the synchronous measurement of the power, the spectrum and the beam quality of the high-power fiber laser and improves the measurement efficiency; meanwhile, the influence of interference factors such as optical aberration and pump light on the measurement result is effectively reduced, and the measurement precision is improved.
Description
Technical Field
The invention relates to the field of high-power laser measurement, in particular to a device for synchronously measuring the power, spectrum and beam quality of a high-power optical fiber laser.
Background
Since the advent of laser, laser has been widely used in the fields of science and technology, military, medical treatment, industrial processing, and communications because of its characteristics of high brightness, high directivity, high monochromaticity, and high coherence. In recent years, with the progress and development of laser technology, the peak output power of lasers is continuously broken through, and high-power lasers are rapidly developed and rapidly applied to the fields of industry, military affairs and the like. In the manufacturing industry, it can be used as a high intensity light source for cutting, punching, welding, etc. The laser weapon can be used for vehicle-mounted and ship-mounted laser weapons in the military field, can also be used as a beacon light source of the laser weapons, and has wide application in the fields of photoelectric countermeasure, laser guidance, laser-induced nuclear fusion and the like. Among the various high power lasers, fiber lasers have been developed particularly rapidly with their advantages of good beam quality, small size, high conversion efficiency, good heat dissipation, etc., and have begun to be applied in industrial and military fields on a large scale.
Power, spectral bandwidth and beam quality factor are the core parameters of high power lasers. The power represents the brightness of the laser, the spectral bandwidth represents the monochromaticity and coherence of the laser, and the beam quality factor represents the collimation and directivity of the laser. These parameters need to be measured and analyzed before any high power laser leaves the factory.
The measurement of the power of the high-power laser generally adopts a thermal sensor, the material for manufacturing the thermal sensor has a certain laser damage threshold, when the optical density is greater than the laser damage threshold of the material of the thermal sensor, the thermal sensor is damaged, and the power measurement has larger error. The high-power laser has high energy, a collimated light spot can easily damage a heat sensor, and the measurement of the beam quality factor needs collimated light, so that the two are difficult to measure simultaneously by the existing measurement technology.
The high-power laser spectrum is generally measured by using a fiber optic spectrometer, and the fiber optic spectrometer adopts grating light splitting, and a photoelectric detector detects the light intensity of each spectral line waveband, and the borne light power is generally in the mw level. In the process of measuring the spectrum of the high-power laser, how to ensure that the relative proportion of the spectrum of each waveband is constant when the strong laser is attenuated to the power borne by the optical fiber spectrometer is a difficult problem in the existing spectrum measurement. The existing spectrum measurement modes are various, scattered light measurement and local light spot sampling measurement are two most common modes, and the two modes are to take part of light spots from laser for measurement, the mode can accurately measure laser spectrum data for the laser with uniform laser spectral lines on the light spots, and the existing method is difficult to realize accurate measurement for the lasers with different spectra at different positions on the light spots, such as an optical fiber laser.
The quality of the light beam of the high-power laser is generally measured by a light beam quality analyzer, and the light beam quality analyzer is subjected to the optical power of mW grade because of the adoption of a light intensity CCD detector. In the process of measuring the quality of the light beam of the high-power laser, how to ensure that the intensity of the light at different positions on the cross section of the laser transmission is relatively constant when the strong laser is attenuated to the power borne by the light beam quality analyzer is a difficult problem in the existing light beam quality measurement.
The high-power optical fiber laser adopts the double-clad optical fiber, and the cladding light stripper can not completely strip, so the output light comprises the laser in the fiber core, the cladding and a part of the residual pump light in the fiber core, and the two are not in the same wave band. When the laser is measured, in order to measure accurately, the consistency of a measuring beam and an original beam is required to be ensured regardless of the power, the spectrum and the beam quality, and the measurement of a high-power laser needs attenuation, aberration adjustment and the like.
Disclosure of Invention
The invention aims to provide a device for synchronously measuring the power, the spectrum and the beam quality of a high-power optical fiber laser, which is applicable to power of 10W-10 KW, can simultaneously measure the power, the spectrum and the beam quality and improves the measurement efficiency.
The technical solution for realizing the purpose of the invention is as follows: a device for synchronously measuring power, spectrum and beam quality of a high-power optical fiber laser comprises a collimator, a high-reflection mirror group, a planoconcave mirror, a power meter target surface, a power meter, first wedge plate glass, second wedge plate glass, a first multi-groove pluggable attenuator, a second multi-groove pluggable attenuator, a convex lens, an optical fiber probe, an optical fiber spectrometer and a beam quality analyzer, wherein the collimator, the high-reflection mirror group, the first wedge plate glass, the first multi-groove pluggable attenuator, the convex lens and the optical fiber probe are sequentially arranged on a common optical axis, the components form a spectrum measuring optical path, the collimator is arranged at the output end of the optical fiber laser to be measured, and the optical fiber probe is connected with the optical fiber spectrometer; the planoconcave mirror and the target surface of the power meter are sequentially arranged on a reflection light path of the high reflecting mirror group, and the target surface of the power meter is connected with the power meter; the second wedge plate glass is arranged on the reflection light path of the first wedge plate glass, and the second multi-slot pluggable attenuator and the light beam quality analyzer are sequentially arranged on the reflection light path of the second wedge plate glass; the above-mentioned components are arranged on an optical platform.
The method comprises the steps that high-power laser light is emitted by a fiber laser to be tested, the high-power laser light is collimated by a collimator and then enters a high-reflector set to be divided into first reflection light and first transmission light, the first reflection light is diverged by a planoconvex mirror, received by a target surface of a power meter, converted into a voltage signal and sent into the power meter, and the output power of the fiber laser to be tested is obtained; the first transmission light is transmitted into the first wedge plate glass and divided into second reflection light and second transmission light, the second transmission light enters the first multi-groove pluggable attenuator, is converged by the convex lens after being attenuated by the first multi-groove pluggable attenuator and is received by the optical fiber probe, the attenuated second transmission light is transmitted into the optical fiber spectrometer by the optical fiber probe, and the optical fiber spectrometer obtains spectral information of the fiber laser to be measured; and the second reflected light enters the second wedge plate glass and is divided into third reflected light and third transmitted light, the third reflected light enters the second multi-slot pluggable attenuator, the third reflected light enters the beam quality analyzer after being attenuated by the second multi-slot pluggable attenuator, and the beam quality of the fiber laser to be measured is obtained through analysis of the beam quality analyzer.
The high-reflection mirror group comprises at least one high-reflection mirror, when the number of the high-reflection mirrors is more than or equal to two, the high-reflection mirrors are sequentially arranged on a spectrum measurement light path, and the planoconcave mirror and the target surface of the power meter are arranged on a reflection light path of the high-reflection mirror close to the collimator.
When the number of the high reflecting mirrors in the high reflecting mirror group is more than or equal to two, the high reflecting mirror group further comprises a second light receiver, and the second light receiver is arranged on a reflecting light path of the high reflecting mirror without the planoconcave mirror and the power meter target surface and is used for receiving the reflecting light of the high reflecting mirror.
The high reflecting mirror in the high reflecting mirror group has high reflectivity and a high laser damage resistance threshold value, and the reflectivity of a laser wave band is consistent with that of a pump light wave band.
The wedge-shaped plate glass light source further comprises a first light receiver, wherein the first light receiver is arranged on the transmission light path of the second wedge-shaped plate glass and receives the transmission light of the second wedge-shaped plate glass.
The angle α of the wedge plate glass is related to the critical distance d from the wedge plate glass to the next optical element as follows, d ═ l/tan (2 α)
Wherein l is the distance of the reflected light spots of the front and back surfaces of the wedge plate glass on the plane of the front surface of the next element.
The multislot pluggable attenuator comprises a base and a plurality of neutral density filters with different transmittances, wherein the common optical axes of the neutral density filters with different transmittances are sequentially arranged on the base, two adjacent neutral density filters are not parallel, and light reflected by the surfaces of the two adjacent neutral density filters is not interfered.
Antireflection films are plated on two surfaces of the plano-concave mirror, the plano-concave mirror has high transmissivity and a high laser damage resistance threshold, and the transmissivity of the plano-concave mirror to a laser wave band is consistent with that of a pump light wave band.
Compared with the prior art, the invention has the remarkable advantages that:
(1) and meanwhile, the power, the spectrum and the beam quality are measured, so that the measurement efficiency is improved.
(2) The spectrum measurement of the fiber laser with inconsistent spectra at different positions on the same light spot is realized.
(3) And the power measurement of the high-power collimated laser beam is realized through the plano-concave mirror.
(4) Through the high-reflector group, the wedge plate glass and the multi-groove pluggable attenuator, the attenuation of large-range optical power is realized, interference factors such as interference effect and the like are effectively avoided, meanwhile, the interference factors in light beam quality measurement are effectively avoided, and the measurement efficiency and the measurement precision are improved.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the device for synchronously measuring the power, the spectrum and the beam quality of the high-power fiber laser.
FIG. 2 is a schematic diagram of the reflected light from the front and back surfaces of wedge plate glass of the device for synchronously measuring the power, spectrum and beam quality of the high-power fiber laser.
FIG. 3 is a top view of the multi-slot pluggable attenuator of the apparatus for synchronously measuring power, spectrum and beam quality of the high power fiber laser according to the present invention.
Fig. 4 is a schematic structural diagram of embodiment 1 of the device for synchronously measuring power, spectrum and beam quality of the high-power fiber laser.
Detailed Description
The present invention is described in further detail below with reference to the attached drawing figures.
With reference to fig. 1 to 3, a device for synchronously measuring power, spectrum and beam quality of a high-power fiber laser comprises a collimator 1, a high-reflection mirror group 2, a planoconvex mirror 3, a power meter target surface 4, a power meter 5, first wedge plate glass 6-1, second wedge plate glass 6-2, a first multi-groove pluggable attenuator 7-1, a second multi-groove pluggable attenuator 7-2, a convex lens 8, an optical fiber probe 9, an optical fiber spectrometer 10 and a beam quality analyzer 12. The coaxial axis is sequentially provided with a collimator 1, a high reflecting mirror group 2, a first wedge plate glass 6-1, a first multi-groove pluggable attenuator 7-1, a convex lens 8 and an optical fiber probe 9, and the components form a spectrum measuring light path. The collimator 1 is arranged at the output end of the fiber laser to be measured, and the fiber probe 9 is connected with the fiber spectrometer 10. The planoconcave mirror 3 and the power meter target surface 4 are sequentially arranged on a reflection light path of the high reflecting mirror group 2, and the power meter target surface 4 is connected with the power meter 5. The second wedge plate glass 6-2 is arranged on the reflection light path of the first wedge plate glass 6-1, and the second multi-slot pluggable attenuator 7-2 and the light beam quality analyzer 12 are sequentially arranged on the reflection light path of the second wedge plate glass 6-2. The above-mentioned components are arranged on an optical platform.
The laser device to be tested emits high-power laser, the high-power laser is collimated by the collimator 1 and then enters the high-reflection mirror group 2 to be divided into first reflection light and first transmission light, the first reflection light is dispersed by the planoconvex mirror 3, is received by the target surface 4 of the power meter, is converted into a voltage signal and is sent to the power meter 5, and the output power of the laser device to be tested is obtained. The first transmission light enters the first wedge plate glass 6-1 and is divided into second reflection light and second transmission light, the second transmission light enters the first multi-groove pluggable attenuator 7-1, is attenuated by the first multi-groove pluggable attenuator 7-1, then is converged by the convex lens 8 and is received by the optical fiber probe 9, the attenuated second transmission light is sent to the optical fiber spectrometer 10 by the optical fiber probe 9, and the optical fiber spectrometer 10 obtains spectral information of the to-be-measured optical fiber laser. The second reflected light enters the second wedge plate glass 6-2 and is divided into third reflected light and third transmitted light, the third reflected light enters the second multi-slot pluggable attenuator 7-2, the third reflected light is attenuated by the second multi-slot pluggable attenuator 7-2 and then enters the beam quality analyzer 12, and the beam quality of the fiber laser to be measured is obtained through analysis of the beam quality analyzer 12.
The high-reflection mirror group 2 comprises at least one high-reflection mirror, when the number of the high-reflection mirrors is more than or equal to two, the high-reflection mirrors are sequentially arranged on a spectrum measurement light path, and the planoconcave mirror 3 and the power meter target surface 4 are arranged on a reflection light path of the high-reflection mirror close to the collimator 1. The laser power of the target surface 4 of the power meter is converted into a voltage signal through a heat sensor on the target surface, and the voltage signal is analyzed and processed by the power meter 5 to be converted into actual power and displayed.
When the number of the high-reflection mirrors in the high-reflection mirror group 2 is more than or equal to two, the high-reflection mirror group further comprises a second light receiver 11-2, and the second light receiver 11-2 is arranged on a reflection light path of the high-reflection mirror without the planoconcave mirror 3 and the power meter target surface 4, receives the reflection light of the high-reflection mirror, and prevents the transmission light from damaging experimenters. The second light receiver 11-2 may be a black plate.
The high reflecting mirror in the high reflecting mirror group 2 has high reflectivity and high laser damage resistance threshold, and the reflectivity of the laser wave band is consistent with that of the pump light wave band.
The device further comprises a first light receiver 11-1, wherein the first light receiver 11-1 is arranged on a transmission light path of the second wedge plate glass 6-2 and receives transmission light of the second wedge plate glass 6-2, and the transmission light is prevented from damaging experimenters. The first light receiver 11 may be a black plate.
The wedge angle α is related to the critical distance d from the wedge to the next optical element as follows:
l＝d/tan(2α)
wherein l is the distance of the reflected light spots of the front and back surfaces of the wedge plate glass on the plane of the front surface of the next element.
With reference to fig. 3, the multi-slot pluggable attenuator includes a base 7-3 and a plurality of neutral density filters (for example, 5 filters are a first neutral density filter 7-3, a second neutral density filter 7-4, a third neutral density filter 7-5, a fourth neutral density filter 7-6, a fifth neutral density filter 7-7, and a sixth neutral density filter 7-8), the neutral density filters with different transmittances are sequentially disposed on the base along a common optical axis, two adjacent neutral density filters are not parallel, an included angle is β, and lights reflected by surfaces of the two adjacent neutral density filters do not interfere with each other.
Antireflection films are plated on two surfaces of the plano-concave mirror 3, the plano-concave mirror 3 has high transmissivity and a high laser damage resistance threshold, and the transmissivity of a laser wave band is consistent with that of a pump light wave band.
Example 1
Fig. 4 depicts an optical path diagram of an apparatus for synchronously measuring power, spectrum and beam quality of a high power fiber laser, wherein a laser beam output by the high power fiber laser from a QBH output end is collimated by a collimator 1 and then emitted as parallel light, the emitted laser is divided into a first reflected light and a first transmitted light after being irradiated on a high reflecting mirror 2, the first reflected light is irradiated on a flat concave mirror 3 and is changed into diffused light, the diffused light is irradiated on a power meter target surface 4, and the power meter target surface 4 converts a measured thermal signal into a voltage signal and transmits the voltage signal to a power meter 5 to obtain output power. The first transmitted light strikes the first wedge plate 6-1 and is divided into second reflected light and second transmitted light. The second transmission light is attenuated by the first multi-groove pluggable attenuator 7-1 and then enters the convex lens 8, is focused by the convex lens 8 and then is sent to the optical fiber probe 9, and the optical fiber probe 9 is connected with the optical fiber spectrometer through the multimode optical fiber, so that the laser beam spectrum is tested and analyzed. The second reflected light is irradiated onto the second wedge plate 6-2 and is divided into third reflected light and third transmitted light, the third transmitted light is irradiated into the light receiver 11, the third reflected light is irradiated into the second multi-slot pluggable attenuator 7-2, and the third reflected light enters the light beam quality analyzer 12 after being attenuated by the second multi-slot pluggable attenuator, so that the light beam quality of the laser beam is tested and analyzed.
The reflectivity of the high reflecting mirror 2 is 99.9 percent, and the reflection band is 900nm to 1100 nm; the first wedge plate 6-1 and the second wedge plate 6-2 are both made of uncoated quartz glass, the reflectivity of the front surface and the reflectivity of the rear surface are both about 4%, the first multi-slot pluggable attenuator 7-1 and the second multi-slot pluggable attenuator 7-2 both adopt a 5-slot structure, and the transmissivity of the neutral density optical filter is 10%; the convex lens 8 adopts uncoated BK7 glass; the power meter 5, the fiber spectrometer 10 and the beam quality analyzer 12 are all commercially available products.
The light intensity at the light beam quality analyzer of the system can be attenuated to be A times of the original light intensity, wherein A is determined by the following formula
A＝(1-99.9％)×4％×4％×(10％)m
Wherein m is the number of neutral density filters adopted in the multi-slot pluggable attenuator, and the value is between 0 and 5. The system can attenuate the laser to 1.6 multiplied by 10 of the original laser beam according to the formula-6To 1.6X 10-11In addition, the beam quality analyzer has an automatic attenuation function and can bear the power of 1uw to 100mw, so that the laser power of the system can bear 10W to 10 KW.
Claims (6)
1. A device for synchronously measuring power, spectrum and beam quality of a high-power optical fiber laser is characterized in that: comprises a collimator (1), a high reflecting mirror group (2), a planoconcave mirror (3), a target surface (4) of a power meter, a power meter (5), a first wedge plate glass (6-1), a second wedge plate glass (6-2), a first multi-groove pluggable attenuator (7-1), a second multi-groove pluggable attenuator (7-2), a convex lens (8), an optical fiber probe (9), an optical fiber spectrometer (10) and a light beam quality analyzer (12), wherein the collimator (1), the high reflecting mirror group (2), the first wedge plate glass (6-1), the first multi-groove pluggable attenuator (7-1), the convex lens (8) and the optical fiber probe (9) are sequentially arranged on a common optical axis, the components form a spectrum measuring light path, the collimator (1) is arranged at the output end of the fiber laser to be measured, and the fiber probe (9) is connected with the fiber spectrometer (10); the planoconcave mirror (3) and the power meter target surface (4) are sequentially arranged on a reflection light path of the high reflecting mirror group (2), and the power meter target surface (4) is connected with the power meter (5); the second wedge plate glass (6-2) is arranged on the reflection light path of the first wedge plate glass (6-1), and the second multi-slot pluggable attenuator (7-2) and the light beam quality analyzer (12) are sequentially arranged on the reflection light path of the second wedge plate glass (6-2); the above-mentioned component is set up on the optical platform;
the method comprises the steps that a to-be-measured fiber laser emits high-power laser, the high-power laser is collimated by a collimator (1) and then enters a high-reflection mirror group (2) to be divided into first reflection light and first transmission light, the first reflection light is dispersed by a planoconvex mirror (3), is received by a power meter target surface (4), is converted into a voltage signal and is sent to a power meter (5), and the output power of the to-be-measured fiber laser is obtained; the first transmission light is transmitted into the first wedge plate glass (6-1) and divided into second reflection light and second transmission light, the second transmission light enters the first multi-groove pluggable attenuator (7-1), is attenuated by the first multi-groove pluggable attenuator (7-1), then is converged by the convex lens (8), and is received by the optical fiber probe (9), the attenuated second transmission light is transmitted into the optical fiber spectrometer (10) by the optical fiber probe (9), and the optical fiber spectrometer (10) obtains the spectrum information of the fiber laser to be measured; the second reflected light enters the second wedge plate glass (6-2) and is divided into third reflected light and third transmitted light, the third reflected light enters the second multi-slot pluggable attenuator (7-2), the third reflected light enters the beam quality analyzer (12) after being attenuated by the second multi-slot pluggable attenuator (7-2), and the beam quality of the fiber laser to be measured is obtained through analysis of the beam quality analyzer (12);
the high reflecting mirror in the high reflecting mirror group (2) has high reflectivity and a high laser damage resistance threshold value, and the reflectivity of a laser wave band is consistent with that of a pump light wave band;
the multislot pluggable attenuator comprises a base and a plurality of neutral density filters with different transmittances, wherein the common optical axes of the neutral density filters with different transmittances are sequentially arranged on the base, two adjacent neutral density filters are not parallel, and light reflected by the surfaces of the two adjacent neutral density filters is not interfered.
2. The apparatus for synchronously measuring power, spectrum and beam quality of a high power fiber laser as claimed in claim 1, wherein: the high-reflection mirror group (2) comprises at least one high-reflection mirror, when the number of the high-reflection mirrors is more than or equal to two, the high-reflection mirrors are sequentially arranged on a spectrum measurement light path, and the planoconcave mirror (3) and the target surface (4) of the power meter are arranged on a reflection light path of the high-reflection mirror close to the collimator (1).
3. The apparatus for synchronously measuring power, spectrum and beam quality of a high power fiber laser as claimed in claim 2, wherein: when the number of the high reflecting mirrors in the high reflecting mirror group (2) is more than or equal to two, the high reflecting mirror group further comprises a second light receiver (11-2), and the second light receiver (11-2) is arranged on a reflecting light path of the high reflecting mirrors without the planoconcave mirror (3) and the power meter target surface (4) and receives the reflecting light of the high reflecting mirrors.
4. The apparatus for synchronously measuring power, spectrum and beam quality of a high power fiber laser as claimed in claim 1, wherein: the wedge plate glass light source further comprises a first light receiver (11-1), wherein the first light receiver (11-1) is arranged on a transmission light path of the second wedge plate glass (6-2) and receives transmission light of the second wedge plate glass (6-2).
5. The device for synchronously measuring the power, the spectrum and the beam quality of the high-power optical fiber laser as claimed in claim 1, is characterized in that the relation between the angle α of the wedge plate glass and the critical distance d from the wedge plate glass to the next optical element is as follows:
wherein l is the distance of the reflected light spots of the front and back surfaces of the wedge plate glass on the plane of the front surface of the next element.
6. The apparatus for synchronously measuring power, spectrum and beam quality of a high power fiber laser as claimed in claim 1, wherein: antireflection films are plated on two surfaces of the plano-concave mirror (3), the plano-concave mirror (3) has high transmissivity and a high laser damage resistance threshold, and the transmissivity of the plano-concave mirror to a laser wave band is consistent with that of a pump light wave band.
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