CN107354437A - A kind of multi-layer composite coatings for improving saw blade cutting speed - Google Patents
A kind of multi-layer composite coatings for improving saw blade cutting speed Download PDFInfo
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- CN107354437A CN107354437A CN201710510107.4A CN201710510107A CN107354437A CN 107354437 A CN107354437 A CN 107354437A CN 201710510107 A CN201710510107 A CN 201710510107A CN 107354437 A CN107354437 A CN 107354437A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0617—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
Abstract
The invention belongs to cutting-tool engineering field, specifically disclose a kind of multi-layer composite coatings and preparation method for improving saw blade cutting speed, include bottom successively from inside to outside, cushion, enhancement layer, wearing layer, wherein bottom is Ti metal levels, cushion is TiN layer, enhancement layer is that multiple TiAlN individual layers are arranged alternately the composite bed to be formed with TiCoN individual layers, wearing layer is TiAlCoN layers, cushion includes the first TiN layer successively from inside to outside, second TiN layer, wherein the first TiN layer reclines Ti metal levels, second TiN layer reclines enhancement layer, Ti in wearing layer, Al, the atomic ratio of Co three is Ti:Al:Co=60:30:10.The hardness of the multi-layer composite coatings of the present invention is high, and coefficient of friction is low, and anti-wear performance is good, and resistance to elevated temperatures is good, can meet the larger cutting speed of saw blade, and the stress inside multi-layer composite coatings is small, the high adhesion strength height circular saw blade substrate between of intensity.
Description
Technical field
The invention belongs to cutting-tool engineering field, and in particular to a kind of multi-layer composite coatings for improving saw blade cutting speed.
Background technology
Saw blade be for stone material, timber, metal, plastic or other material blank processing cutting tool, saw blade it is wear-resisting
Performance, hardness and high temperature resistant, decay resistance have important to the surface smoothness, precision and processing efficiency of cutting part
Influence.The saw blade of the elements such as a kind of carbon containing volume of high-speed steel circular saw blade, tungsten, molybdenum, vanadium, have higher heat hard after heat treatment
Property, anti-wear performance and heat-resisting ability, when cutting temperature is up to 600 DEG C, cutting speed is up to hardness during 60 more than m/min still without bright
It is aobvious to decline.But as vapour rubs the requirement of manufacture, heavy industry machinery and the manufacturing industry such as precision instrument to the intensity of metal material, toughness etc.
More and more higher, the difficulty of machining is also increasing, the wear-resisting of cutting tool, hardness, heat resistance is proposed higher
It is required that.
In the prior art to improve the hardness of cutter, anti-wear performance, to ensure suitable cutting speed and workpiece surface
Finish, machining accuracy are cut, hard coat such as TiN layer, AlTiN layers, Al can be set in tool surface2O3Layer etc., have compared with
High hardness and anti-wear performance.Current this hard coat develops to composite coating, nano-composite coating direction.Chinese patent
CN200910193492X, patent name TiN/(TiN+CrN)/Ti(CN)Nano-composite coating and preparation method thereof, disclose by
Transition zone TiN film,(TiN+CrN)The composite laminated coating of nano-composite coating and CrAlN nano-composite coatings composition, has
High rigidity and high-temperature behavior.But the coefficient of friction of the composite laminated coating is high, anti-wear performance is general, and high-temperature behavior can not
Meet more stringent high temperature requirement.
The content of the invention
It can not meet wear-resisting, high temperature resistant of the Machining Technology for Cutting to cutting tool for the coating on existing cutting tool
The problem of requirement more and more higher of performance, it is an object of the invention to provide a kind of MULTILAYER COMPOSITE for improving saw blade cutting speed
Coating, compared with existing hard coat, the coefficient of friction of the multi-layer composite coatings is low, and wearability is good, it is allowed to which saw blade has
Larger cutting speed, and hardness is good, high temperature resistant, and the adhesion strength of MULTILAYER COMPOSITE layer and saw blade is big, multi-layer composite coatings
Internal stress is small, and the intensity of multi-layer composite coatings is big.The present invention also aims to provide to prepare MULTILAYER COMPOSITE painting simultaneously
The method of layer.
The present invention provides following technical scheme:
A kind of multi-layer composite coatings for improving saw blade cutting speed, the multi-layer composite coatings include bottom successively from inside to outside
Layer, cushion, enhancement layer, wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN are mono-
Layer is arranged alternately the composite bed to be formed with TiCoN individual layers, and wearing layer is TiAlCoN layers.
In the multi-layer composite coatings of the present invention, bottom is Ti metal levels, and cushion is TiN layer, and enhancement layer is TiAlN individual layers
With the composite bed of TiCoN individual layers, heat-resistant layer is TiAlCoN layers, and TiAlN individual layers are arranged alternately with TiCoN individual layers in enhancement layer.Ti
Metal level reduces the internal stress between multi-layer composite coatings and circular saw blade substrate, improves the toughness of multi-layer composite coatings and strong
Degree, cushion, enhancement layer make stress inside multi-layer composite coatings smoothly transition and decay from inside to outside, and strengthen more
Adhesion strength inside layer composite coating.TiAlN individual layers are arranged alternately with TiCoN individual layers in enhancement layer, on the one hand make cushion
Stress wave transmission between heat-resistant layer, weaken influence of the ambient pressure to multi-layer composite coatings, it is on the other hand adjacent
TiAlN individual layers form two ternary phases respectively with TiCoN individual layers, have different elastic performances, have disperseed multilayer well and answered
Close the pressure of coat inside.It can regard that Al is added to TiCoN or Co is added to TiAlN in heat-resistant layer TiAlCoN as, so as to expand
The composition section of TiCoN or TiAlN spinodal decomposition is opened up, promotes the generation of spinodal decomposition.Under the high temperature conditions, quaternary phase simultaneously
TiAlCoN occurs spinodal decomposition and separates out ternary phase TiCoN or TiAlN, and ternary phase TiCoN or TiAlN occur spinodal decomposition and separated out
Binary cubic phase TiN and AlN, CoN, the aging hardening effect triggered in decomposable process cause the mechanical property of multi-layer composite coatings
It can greatly improve, and setting gradually for Ti metal levels, TiN layer, TiCoN/TiAlN, TiAlCoN layer makes later layer decompose generation
The influence of residual stress greatly weaken so that multi-layer composite coatings have preferable high temperature resistant, durability performance and relatively low
Coefficient of friction, improve the cutting speed of saw blade.
As a modification of the present invention, the cushion includes the first TiN layer, the second TiN layer successively from inside to outside, its
In the first TiN layer recline Ti metal levels, the second TiN layer reclines enhancement layer, the second TiN layer, TiAlN individual layers and TiCoN individual layers
Middle Ti mass fraction is identical and less than the mass fraction of Ti in the first TiN layer, and the first TiN layer is thicker than the second TiN layer by 100~
200 nm.Ensure the stress smooth transfer inside multi-layer composite coatings and gradually weaken, strengthen the intensity of multi-layer composite coatings.
As a modification of the present invention, the atomic ratio of Ti, Al, Co three are Ti in the wearing layer:Al:Co=60:
30:10.Higher Al concentration contributes to coating surface during machining to generate very thin amorphous state Al2O3, form hard inertia and protect
Cuticula, improve the ability that multi-layer composite coatings adapt to high-speed cutting processing.Co, which is added in TiAlN, promotes spinodal decomposition section
Extension, improve the resistance to elevated temperatures and wearability of heat-resistant layer.
As a modification of the present invention, the thickness of the multi-layer composite coatings is 4~6 μm, and the thickness of wherein bottom is
80~180 nm, the thickness of enhancement layer is 1.5~2.4 μm, and the thickness of wearing layer is 1.42~2.42 μm, and remainder is cushion
Thickness, TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and the total thickness of adjacent TiAlN individual layers and TiCoN individual layers
Spend for 100~150 nm.Multi-layer composite coatings form stronger wear-resisting, resistance to elevated temperatures under relatively thin thickness condition, and
The reinforcement unit of 10~24 adjacent TiAlN individual layers and TiCoN individual layers composition is formed in multi-layer composite coatings.
A kind of preparation method for the multi-layer composite coatings for improving saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in the nonionic surfactant solution that mass concentration is 5%~10% and soaked
It is placed in acetone and is cleaned by ultrasonic again after cleaning, 280~360 DEG C of calcinings is placed in after aeration-drying and naturally cool to room within 1~3 hour
Temperature;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 × 10- 1Pa, then it is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, into body of heater being passed through argon gas makes pressure rise to 2Pa, opens
Ti targets are opened, 2~3A of electric current, bias -75~-95V, the depositing Ti metal level 8~14 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target currents
Press to deposit the first TiN layer 5~7 minutes in Ti layer on surface of metal under -75~-95V, then passing to nitrogen makes pressure rise to 4Pa,
The second TiN layer, sedimentation time 3.2~4.6 minutes, so as to be prepared into cushion are deposited in the first TiN layer;
(4)It is prepared by enhancement layer:TiAl alloy target, TiCo alloys targets are separately turned on, electrical current is 4~6A, bias -90~-
120V, depositing Ti AlN individual layers when circular saw blade substrate turns to TiAl alloy target, circular saw blade substrate deposit when turning to TiCo alloys targets
TiCoN individual layers, so that TiAlN individual layers form enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 14~18 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current is 7~9A, -124~-136V is biased, in annular saw chip base
Depositing Ti AlCoN layers on body, sedimentation time are 14~16 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry
It is dry.
One kind as the inventive method is improved, and the material of the circular saw blade substrate is high-speed steel.
One kind as the inventive method is improved, and ionic surfactant is polyoxyethylate amide, polyoxyethylene nonyl phenyl second
One kind in alkene ether or anhydrous sorbitol.
One kind as the inventive method is improved, and crystallite dimension is 2~4 nm in heat-resistant layer.
The cementitiousness of the multi-layer composite coatings prepared through the above method is strong, and high temperature resistant, corrosion-resistant, wear-resisting poor performance are good,
High-speed cutting, the requirement of applied at elevated temperature can be met.Non-ionic surfactant is used in the cleaning process of circular saw blade substrate
Agent soaking and washing, and calcine and deoil, the infringement for avoiding circular saw blade substrate from being subject in pretreatment process.The heat-resistant layer ultimately formed
In crystallite dimension be 2~4 nm, the nano-scale of heat-resistant layer further enhances the wearability of multi-layer composite coatings, heat-resisting resistance to
Oxidation susceptibility, coefficient of friction is small, and hardness is high.
Beneficial effects of the present invention are as follows:
For the multi-layer composite coatings of the raising saw blade cutting speed of the present invention compared with existing hard coat, hardness is higher, rubs
Wiping coefficient is low, and anti-wear performance is good, and resistance to elevated temperatures is good, can meet larger cutting speed, and inside multi-layer composite coatings
Stress is small, and intensity is high, and the adhesion strength between multi-layer composite coatings and circular saw blade substrate is high.
Embodiment
Just the embodiment of the present invention is described further below.
Unless otherwise instructed, the raw material employed in the present invention is commercially available or commonly used in the art, such as
Without special instruction, the method in following embodiments is the conventional method of this area.
Embodiment 1
It is a kind of improve saw blade cutting speed multi-layer composite coatings, from inside to outside successively include bottom, cushion, enhancement layer,
Wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN individual layers replace with TiCoN individual layers
The composite bed formed is set, wearing layer is TiAlCoN layers, and cushion includes the first TiN layer, the second TiN layer successively from inside to outside,
Wherein the first TiN layer reclines Ti metal levels, and the second TiN layer reclines enhancement layer, and the second TiN layer, TiAlN individual layers and TiCoN are mono-
Ti mass fraction is identical and thicker than the second TiN layer by 100 less than the mass fraction of Ti in the first TiN layer, the first TiN layer in layer
Nm, the atomic ratio of Ti, Al, Co three are preferably Ti in wearing layer:Al:Co=60:30:10.The thickness of multi-layer composite coatings is
4 μm, the wherein thickness of bottom is 80 nm, and the thickness of enhancement layer is 1.5 μm, and the thickness of wearing layer is 1.42 μm, cushion
Thickness is 1 μm, and TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and adjacent TiAlN individual layers and TiCoN individual layers
Gross thickness be 100 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in 30 DEG C of nonionic surfactant solution after soaking and washing 1 hour again
It is placed in acetone and is cleaned by ultrasonic, then aeration-drying, then be placed in calcine 3 hours at 280 DEG C and naturally cool to room temperature, wherein round
The material of saw bit matrix is high-speed steel, and nonionic surface active agent is preferably polyoxyethylate amide, mass concentration 5%;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa, then take out true
It is empty to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into body of heater makes pressure rise to 2Pa, opens Ti targets, electric current
2A, bias -75V, the depositing Ti metal level 8 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2A, biases in Ti target currents
To deposit the first TiN layer 5 minutes in Ti layer on surface of metal under -75V, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN
The second TiN layer, sedimentation time 3.2 minutes, so as to be prepared into cushion are deposited on layer;
(4)It is prepared by enhancement layer:It is separately turned on TiAl alloy target, TiCo alloys targets, electrical current 4A, bias -90V, saw blade
Depositing Ti AlN individual layers when matrix turns to TiAl alloy target, depositing Ti CoN individual layers when circular saw blade substrate turns to TiCo alloys targets, from
And TiAlN individual layers is formed enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 14 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current 7A, bias -124V, are deposited on circular saw blade substrate
TiAlCoN layers, sedimentation time are 14 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry
It is dry.
The crystallite dimension of heat-resistant layer is 2~4 nm in multi-layer composite coatings prepared by the above method, coefficient of friction 0.57
± 0.03, it is allowed to maximum operation (service) temperature be 1180 DEG C, vickers hardness hv value be 3640, it is allowed to maximum cutting speed be 132
M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
Embodiment 2
It is a kind of improve saw blade cutting speed multi-layer composite coatings, from inside to outside successively include bottom, cushion, enhancement layer,
Wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN individual layers replace with TiCoN individual layers
The composite bed formed is set, wearing layer is TiAlCoN layers, and cushion includes the first TiN layer, the second TiN layer successively from inside to outside,
Wherein the first TiN layer reclines Ti metal levels, and the second TiN layer reclines enhancement layer, and the second TiN layer, TiAlN individual layers and TiCoN are mono-
Ti mass fraction is identical and less than the mass fraction of Ti in the first TiN layer in layer, and the first TiN layer is thicker than the second TiN layer by 100~
200 nm, the atomic ratio of Ti, Al, Co three are preferably Ti in wearing layer:Al:Co=60:30:10.The thickness of multi-layer composite coatings
Spend for 5 μm, wherein the thickness of bottom is 130 nm, and the thickness of enhancement layer is 1.95 μm, and the thickness of wearing layer is 1.92 μm, is delayed
The thickness for rushing layer is 1 μm, and TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and adjacent TiAlN individual layers and TiCoN
The gross thickness of individual layer is 125 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:After circular saw blade substrate is placed in 25 DEG C of nonionic surfactant solution into soaking and washing 1.5 hours
It is placed in acetone and is cleaned by ultrasonic again, then aeration-drying, then is placed in calcine 2 hours at 320 DEG C and naturally cools to room temperature, wherein
The material of circular saw blade substrate is high-speed steel, and nonionic surface active agent is preferably NPE, and mass concentration is
7%;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 4 × 10-1Pa, then take out true
It is empty to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into body of heater makes pressure rise to 2Pa, opens Ti targets, electric current
2.5A, bias -80V, the depositing Ti metal level 11 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2.5A, biases in Ti target currents
To deposit the first TiN layer 6 minutes in Ti layer on surface of metal under -80V, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN
The second TiN layer, sedimentation time 3.9 minutes, so as to be prepared into cushion are deposited on layer;
(4)It is prepared by enhancement layer:It is separately turned on TiAl alloy target, TiCo alloys targets, electrical current 5A, bias -105V, saw blade
Depositing Ti AlN individual layers when matrix turns to TiAl alloy target, depositing Ti CoN individual layers when circular saw blade substrate turns to TiCo alloys targets, from
And TiAlN individual layers is formed enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 16 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current 8A, bias -130V, are deposited on circular saw blade substrate
TiAlCoN layers, sedimentation time are 15 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry
It is dry.
The crystallite dimension of heat-resistant layer is 2~4 nm in multi-layer composite coatings prepared by the above method, coefficient of friction 0.57
± 0.03, it is allowed to maximum operation (service) temperature be 1180 DEG C, vickers hardness hv value be 3640, it is allowed to maximum cutting speed be 132
M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
Embodiment 3
It is a kind of improve saw blade cutting speed multi-layer composite coatings, from inside to outside successively include bottom, cushion, enhancement layer,
Wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN individual layers replace with TiCoN individual layers
The composite bed formed is set, wearing layer is TiAlCoN layers, and cushion includes the first TiN layer, the second TiN layer successively from inside to outside,
Wherein the first TiN layer reclines Ti metal levels, and the second TiN layer reclines enhancement layer, and the second TiN layer, TiAlN individual layers and TiCoN are mono-
Ti mass fraction is identical and thicker than the second TiN layer by 200 less than the mass fraction of Ti in the first TiN layer, the first TiN layer in layer
Nm, the atomic ratio of Ti, Al, Co three are preferably Ti in wearing layer:Al:Co=60:30:10.The thickness of multi-layer composite coatings is
6 μm, the wherein nm of thickness 80~180 of bottom, the thickness of enhancement layer is 2.4 μm, and the thickness of wearing layer is 2.42 μm, and remainder is
The thickness of cushion, TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and adjacent TiAlN individual layers and TiCoN are mono-
The gross thickness of layer is 150 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in 20 DEG C of nonionic surfactant solution after soaking and washing 2 hours again
It is placed in acetone and is cleaned by ultrasonic, then aeration-drying, then be placed in calcine 1 hour at 360 DEG C and naturally cool to room temperature, wherein round
The material of saw bit matrix is high-speed steel, and nonionic surface active agent is preferably anhydrous sorbitol, mass concentration 10%;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 5 × 10-1Pa, then take out true
It is empty to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into body of heater makes pressure rise to 2Pa, opens Ti targets, electric current
3A, bias -95V, the depositing Ti metal level 14 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 3A, biases in Ti target currents
To deposit the first TiN layer 7 minutes in Ti layer on surface of metal under -95V, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN
The second TiN layer is deposited on layer, 3.2~4.6 minutes during deposition, so as to be prepared into cushion;
(4)It is prepared by enhancement layer:It is separately turned on TiAl alloy target, TiCo alloys targets, electrical current 6A, bias -120V, saw blade
Depositing Ti AlN individual layers when matrix turns to TiAl alloy target, depositing Ti CoN individual layers when circular saw blade substrate turns to TiCo alloys targets, from
And TiAlN individual layers is formed enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 18 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current 9A, bias -136V, are deposited on circular saw blade substrate
TiAlCoN layers, sedimentation time are 16 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry
It is dry.
The crystallite dimension of heat-resistant layer is 2~4 nm in multi-layer composite coatings prepared by the above method, coefficient of friction 0.57
± 0.03, it is allowed to maximum operation (service) temperature be 1180 DEG C, vickers hardness hv value be 3640, it is allowed to maximum cutting speed be 132
M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
The hardness of the multi-layer composite coatings of the present invention is high, and coefficient of friction is low, and anti-wear performance is good, high temperature resistant is good, can meet circle
The larger cutting speed of saw blade, and the stress of coat inside is small, the high adhesion strength between circular saw blade substrate of intensity is high.
Claims (8)
1. it is a kind of improve saw blade cutting speed multi-layer composite coatings, it is characterised in that the multi-layer composite coatings from it is inner to
Include bottom, cushion, enhancement layer, wearing layer successively outside, wherein bottom is Ti metal levels, and cushion is TiN layer, and enhancement layer is
Some TiAlN individual layers are arranged alternately the composite bed to be formed with TiCoN individual layers, and wearing layer is TiAlCoN layers.
2. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, it is characterised in that the buffering
Layer includes the first TiN layer, the second TiN layer, the Ti metal levels wherein the first TiN layer reclines successively from inside to outside, and the second TiN layer reclines
Enhancement layer, Ti mass fraction is identical and less than Ti in the first TiN layer in the second TiN layer, TiAlN individual layers and TiCoN individual layers
Mass fraction, the first TiN layer 100~200 nm thicker than the second TiN layer.
3. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, it is characterised in that described wear-resisting
The atomic ratio of Ti, Al, Co three are Ti in layer:Al:Co=60:30:10.
4. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, it is characterised in that the multilayer
The thickness of composite coating is 4~6 μm, and wherein the thickness of bottom is 80~180 nm, and the thickness of enhancement layer is 1.5~2.4 μm,
The thickness of wearing layer is 1.42~2.42 μm, the remaining thickness for cushion, TiAlN individual layers and TiCoN individual layers in enhancement layer
Thickness is identical, and the gross thickness of adjacent TiAlN individual layers and TiCoN individual layers is 100~150 nm.
5. a kind of preparation method of the multi-layer composite coatings of raising saw blade cutting speed as described in Claims 1-4 is any,
Comprise the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in the nonionic surfactant solution that mass concentration is 5%~10% and soaked
It is placed in acetone and is cleaned by ultrasonic again after cleaning, 280~360 DEG C of calcinings is placed in after aeration-drying and naturally cool to room within 1~3 hour
Temperature;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 × 10- 1Pa, then it is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, into body of heater being passed through argon gas makes pressure rise to 2Pa, opens
Ti targets are opened, 2~3A of electric current, bias -75~-95V, the depositing Ti metal level 8~14 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target currents
Press to deposit the first TiN layer 5~7 minutes in Ti layer on surface of metal under -75~-95V, then passing to nitrogen makes pressure rise to 4Pa,
The second TiN layer, sedimentation time 3.2~4.6 minutes, so as to be prepared into cushion are deposited in the first TiN layer;
(4)It is prepared by enhancement layer:TiAl alloy target, TiCo alloys targets are separately turned on, electrical current is 4~6A, bias -90~-
120V, depositing Ti AlN individual layers when circular saw blade substrate turns to TiAl alloy target, circular saw blade substrate deposit when turning to TiCo alloys targets
TiCoN individual layers, so that TiAlN individual layers form enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 14~18 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current is 7~9A, -124~-136V is biased, in annular saw chip base
Depositing Ti AlCoN layers on body, sedimentation time are 14~16 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry
It is dry.
6. the preparation method of the multi-layer composite coatings according to claim 5 for improving saw blade cutting speed, its feature exist
In the material of the circular saw blade substrate is high-speed steel.
7. the preparation method of the multi-layer composite coatings according to claim 5 for improving saw blade cutting speed, its feature exist
In nonionic surface active agent is one kind in polyoxyethylate amide, NPE or anhydrous sorbitol.
8. the preparation method of the multi-layer composite coatings according to claim 5 for improving saw blade cutting speed, its feature exist
In crystallite dimension is 2~4 nm in wearing layer.
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