CN107354437A - A kind of multi-layer composite coatings for improving saw blade cutting speed - Google Patents

A kind of multi-layer composite coatings for improving saw blade cutting speed Download PDF

Info

Publication number
CN107354437A
CN107354437A CN201710510107.4A CN201710510107A CN107354437A CN 107354437 A CN107354437 A CN 107354437A CN 201710510107 A CN201710510107 A CN 201710510107A CN 107354437 A CN107354437 A CN 107354437A
Authority
CN
China
Prior art keywords
layer
saw blade
individual layers
composite coatings
tin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710510107.4A
Other languages
Chinese (zh)
Other versions
CN107354437B (en
Inventor
卢敏
卢胜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JINYUN COUNTY PIONEER TOOL Co Ltd
Original Assignee
JINYUN COUNTY PIONEER TOOL Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JINYUN COUNTY PIONEER TOOL Co Ltd filed Critical JINYUN COUNTY PIONEER TOOL Co Ltd
Priority to CN201710510107.4A priority Critical patent/CN107354437B/en
Publication of CN107354437A publication Critical patent/CN107354437A/en
Application granted granted Critical
Publication of CN107354437B publication Critical patent/CN107354437B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0617AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering

Abstract

The invention belongs to cutting-tool engineering field, specifically disclose a kind of multi-layer composite coatings and preparation method for improving saw blade cutting speed, include bottom successively from inside to outside, cushion, enhancement layer, wearing layer, wherein bottom is Ti metal levels, cushion is TiN layer, enhancement layer is that multiple TiAlN individual layers are arranged alternately the composite bed to be formed with TiCoN individual layers, wearing layer is TiAlCoN layers, cushion includes the first TiN layer successively from inside to outside, second TiN layer, wherein the first TiN layer reclines Ti metal levels, second TiN layer reclines enhancement layer, Ti in wearing layer, Al, the atomic ratio of Co three is Ti:Al:Co=60:30:10.The hardness of the multi-layer composite coatings of the present invention is high, and coefficient of friction is low, and anti-wear performance is good, and resistance to elevated temperatures is good, can meet the larger cutting speed of saw blade, and the stress inside multi-layer composite coatings is small, the high adhesion strength height circular saw blade substrate between of intensity.

Description

A kind of multi-layer composite coatings for improving saw blade cutting speed
Technical field
The invention belongs to cutting-tool engineering field, and in particular to a kind of multi-layer composite coatings for improving saw blade cutting speed.
Background technology
Saw blade be for stone material, timber, metal, plastic or other material blank processing cutting tool, saw blade it is wear-resisting Performance, hardness and high temperature resistant, decay resistance have important to the surface smoothness, precision and processing efficiency of cutting part Influence.The saw blade of the elements such as a kind of carbon containing volume of high-speed steel circular saw blade, tungsten, molybdenum, vanadium, have higher heat hard after heat treatment Property, anti-wear performance and heat-resisting ability, when cutting temperature is up to 600 DEG C, cutting speed is up to hardness during 60 more than m/min still without bright It is aobvious to decline.But as vapour rubs the requirement of manufacture, heavy industry machinery and the manufacturing industry such as precision instrument to the intensity of metal material, toughness etc. More and more higher, the difficulty of machining is also increasing, the wear-resisting of cutting tool, hardness, heat resistance is proposed higher It is required that.
In the prior art to improve the hardness of cutter, anti-wear performance, to ensure suitable cutting speed and workpiece surface Finish, machining accuracy are cut, hard coat such as TiN layer, AlTiN layers, Al can be set in tool surface2O3Layer etc., have compared with High hardness and anti-wear performance.Current this hard coat develops to composite coating, nano-composite coating direction.Chinese patent CN200910193492X, patent name TiN/(TiN+CrN)/Ti(CN)Nano-composite coating and preparation method thereof, disclose by Transition zone TiN film,(TiN+CrN)The composite laminated coating of nano-composite coating and CrAlN nano-composite coatings composition, has High rigidity and high-temperature behavior.But the coefficient of friction of the composite laminated coating is high, anti-wear performance is general, and high-temperature behavior can not Meet more stringent high temperature requirement.
The content of the invention
It can not meet wear-resisting, high temperature resistant of the Machining Technology for Cutting to cutting tool for the coating on existing cutting tool The problem of requirement more and more higher of performance, it is an object of the invention to provide a kind of MULTILAYER COMPOSITE for improving saw blade cutting speed Coating, compared with existing hard coat, the coefficient of friction of the multi-layer composite coatings is low, and wearability is good, it is allowed to which saw blade has Larger cutting speed, and hardness is good, high temperature resistant, and the adhesion strength of MULTILAYER COMPOSITE layer and saw blade is big, multi-layer composite coatings Internal stress is small, and the intensity of multi-layer composite coatings is big.The present invention also aims to provide to prepare MULTILAYER COMPOSITE painting simultaneously The method of layer.
The present invention provides following technical scheme:
A kind of multi-layer composite coatings for improving saw blade cutting speed, the multi-layer composite coatings include bottom successively from inside to outside Layer, cushion, enhancement layer, wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN are mono- Layer is arranged alternately the composite bed to be formed with TiCoN individual layers, and wearing layer is TiAlCoN layers.
In the multi-layer composite coatings of the present invention, bottom is Ti metal levels, and cushion is TiN layer, and enhancement layer is TiAlN individual layers With the composite bed of TiCoN individual layers, heat-resistant layer is TiAlCoN layers, and TiAlN individual layers are arranged alternately with TiCoN individual layers in enhancement layer.Ti Metal level reduces the internal stress between multi-layer composite coatings and circular saw blade substrate, improves the toughness of multi-layer composite coatings and strong Degree, cushion, enhancement layer make stress inside multi-layer composite coatings smoothly transition and decay from inside to outside, and strengthen more Adhesion strength inside layer composite coating.TiAlN individual layers are arranged alternately with TiCoN individual layers in enhancement layer, on the one hand make cushion Stress wave transmission between heat-resistant layer, weaken influence of the ambient pressure to multi-layer composite coatings, it is on the other hand adjacent TiAlN individual layers form two ternary phases respectively with TiCoN individual layers, have different elastic performances, have disperseed multilayer well and answered Close the pressure of coat inside.It can regard that Al is added to TiCoN or Co is added to TiAlN in heat-resistant layer TiAlCoN as, so as to expand The composition section of TiCoN or TiAlN spinodal decomposition is opened up, promotes the generation of spinodal decomposition.Under the high temperature conditions, quaternary phase simultaneously TiAlCoN occurs spinodal decomposition and separates out ternary phase TiCoN or TiAlN, and ternary phase TiCoN or TiAlN occur spinodal decomposition and separated out Binary cubic phase TiN and AlN, CoN, the aging hardening effect triggered in decomposable process cause the mechanical property of multi-layer composite coatings It can greatly improve, and setting gradually for Ti metal levels, TiN layer, TiCoN/TiAlN, TiAlCoN layer makes later layer decompose generation The influence of residual stress greatly weaken so that multi-layer composite coatings have preferable high temperature resistant, durability performance and relatively low Coefficient of friction, improve the cutting speed of saw blade.
As a modification of the present invention, the cushion includes the first TiN layer, the second TiN layer successively from inside to outside, its In the first TiN layer recline Ti metal levels, the second TiN layer reclines enhancement layer, the second TiN layer, TiAlN individual layers and TiCoN individual layers Middle Ti mass fraction is identical and less than the mass fraction of Ti in the first TiN layer, and the first TiN layer is thicker than the second TiN layer by 100~ 200 nm.Ensure the stress smooth transfer inside multi-layer composite coatings and gradually weaken, strengthen the intensity of multi-layer composite coatings.
As a modification of the present invention, the atomic ratio of Ti, Al, Co three are Ti in the wearing layer:Al:Co=60: 30:10.Higher Al concentration contributes to coating surface during machining to generate very thin amorphous state Al2O3, form hard inertia and protect Cuticula, improve the ability that multi-layer composite coatings adapt to high-speed cutting processing.Co, which is added in TiAlN, promotes spinodal decomposition section Extension, improve the resistance to elevated temperatures and wearability of heat-resistant layer.
As a modification of the present invention, the thickness of the multi-layer composite coatings is 4~6 μm, and the thickness of wherein bottom is 80~180 nm, the thickness of enhancement layer is 1.5~2.4 μm, and the thickness of wearing layer is 1.42~2.42 μm, and remainder is cushion Thickness, TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and the total thickness of adjacent TiAlN individual layers and TiCoN individual layers Spend for 100~150 nm.Multi-layer composite coatings form stronger wear-resisting, resistance to elevated temperatures under relatively thin thickness condition, and The reinforcement unit of 10~24 adjacent TiAlN individual layers and TiCoN individual layers composition is formed in multi-layer composite coatings.
A kind of preparation method for the multi-layer composite coatings for improving saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in the nonionic surfactant solution that mass concentration is 5%~10% and soaked It is placed in acetone and is cleaned by ultrasonic again after cleaning, 280~360 DEG C of calcinings is placed in after aeration-drying and naturally cool to room within 1~3 hour Temperature;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 × 10- 1Pa, then it is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, into body of heater being passed through argon gas makes pressure rise to 2Pa, opens Ti targets are opened, 2~3A of electric current, bias -75~-95V, the depositing Ti metal level 8~14 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target currents Press to deposit the first TiN layer 5~7 minutes in Ti layer on surface of metal under -75~-95V, then passing to nitrogen makes pressure rise to 4Pa, The second TiN layer, sedimentation time 3.2~4.6 minutes, so as to be prepared into cushion are deposited in the first TiN layer;
(4)It is prepared by enhancement layer:TiAl alloy target, TiCo alloys targets are separately turned on, electrical current is 4~6A, bias -90~- 120V, depositing Ti AlN individual layers when circular saw blade substrate turns to TiAl alloy target, circular saw blade substrate deposit when turning to TiCo alloys targets TiCoN individual layers, so that TiAlN individual layers form enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 14~18 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current is 7~9A, -124~-136V is biased, in annular saw chip base Depositing Ti AlCoN layers on body, sedimentation time are 14~16 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry It is dry.
One kind as the inventive method is improved, and the material of the circular saw blade substrate is high-speed steel.
One kind as the inventive method is improved, and ionic surfactant is polyoxyethylate amide, polyoxyethylene nonyl phenyl second One kind in alkene ether or anhydrous sorbitol.
One kind as the inventive method is improved, and crystallite dimension is 2~4 nm in heat-resistant layer.
The cementitiousness of the multi-layer composite coatings prepared through the above method is strong, and high temperature resistant, corrosion-resistant, wear-resisting poor performance are good, High-speed cutting, the requirement of applied at elevated temperature can be met.Non-ionic surfactant is used in the cleaning process of circular saw blade substrate Agent soaking and washing, and calcine and deoil, the infringement for avoiding circular saw blade substrate from being subject in pretreatment process.The heat-resistant layer ultimately formed In crystallite dimension be 2~4 nm, the nano-scale of heat-resistant layer further enhances the wearability of multi-layer composite coatings, heat-resisting resistance to Oxidation susceptibility, coefficient of friction is small, and hardness is high.
Beneficial effects of the present invention are as follows:
For the multi-layer composite coatings of the raising saw blade cutting speed of the present invention compared with existing hard coat, hardness is higher, rubs Wiping coefficient is low, and anti-wear performance is good, and resistance to elevated temperatures is good, can meet larger cutting speed, and inside multi-layer composite coatings Stress is small, and intensity is high, and the adhesion strength between multi-layer composite coatings and circular saw blade substrate is high.
Embodiment
Just the embodiment of the present invention is described further below.
Unless otherwise instructed, the raw material employed in the present invention is commercially available or commonly used in the art, such as Without special instruction, the method in following embodiments is the conventional method of this area.
Embodiment 1
It is a kind of improve saw blade cutting speed multi-layer composite coatings, from inside to outside successively include bottom, cushion, enhancement layer, Wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN individual layers replace with TiCoN individual layers The composite bed formed is set, wearing layer is TiAlCoN layers, and cushion includes the first TiN layer, the second TiN layer successively from inside to outside, Wherein the first TiN layer reclines Ti metal levels, and the second TiN layer reclines enhancement layer, and the second TiN layer, TiAlN individual layers and TiCoN are mono- Ti mass fraction is identical and thicker than the second TiN layer by 100 less than the mass fraction of Ti in the first TiN layer, the first TiN layer in layer Nm, the atomic ratio of Ti, Al, Co three are preferably Ti in wearing layer:Al:Co=60:30:10.The thickness of multi-layer composite coatings is 4 μm, the wherein thickness of bottom is 80 nm, and the thickness of enhancement layer is 1.5 μm, and the thickness of wearing layer is 1.42 μm, cushion Thickness is 1 μm, and TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and adjacent TiAlN individual layers and TiCoN individual layers Gross thickness be 100 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in 30 DEG C of nonionic surfactant solution after soaking and washing 1 hour again It is placed in acetone and is cleaned by ultrasonic, then aeration-drying, then be placed in calcine 3 hours at 280 DEG C and naturally cool to room temperature, wherein round The material of saw bit matrix is high-speed steel, and nonionic surface active agent is preferably polyoxyethylate amide, mass concentration 5%;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa, then take out true It is empty to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into body of heater makes pressure rise to 2Pa, opens Ti targets, electric current 2A, bias -75V, the depositing Ti metal level 8 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2A, biases in Ti target currents To deposit the first TiN layer 5 minutes in Ti layer on surface of metal under -75V, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN The second TiN layer, sedimentation time 3.2 minutes, so as to be prepared into cushion are deposited on layer;
(4)It is prepared by enhancement layer:It is separately turned on TiAl alloy target, TiCo alloys targets, electrical current 4A, bias -90V, saw blade Depositing Ti AlN individual layers when matrix turns to TiAl alloy target, depositing Ti CoN individual layers when circular saw blade substrate turns to TiCo alloys targets, from And TiAlN individual layers is formed enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 14 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current 7A, bias -124V, are deposited on circular saw blade substrate TiAlCoN layers, sedimentation time are 14 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry It is dry.
The crystallite dimension of heat-resistant layer is 2~4 nm in multi-layer composite coatings prepared by the above method, coefficient of friction 0.57 ± 0.03, it is allowed to maximum operation (service) temperature be 1180 DEG C, vickers hardness hv value be 3640, it is allowed to maximum cutting speed be 132 M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
Embodiment 2
It is a kind of improve saw blade cutting speed multi-layer composite coatings, from inside to outside successively include bottom, cushion, enhancement layer, Wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN individual layers replace with TiCoN individual layers The composite bed formed is set, wearing layer is TiAlCoN layers, and cushion includes the first TiN layer, the second TiN layer successively from inside to outside, Wherein the first TiN layer reclines Ti metal levels, and the second TiN layer reclines enhancement layer, and the second TiN layer, TiAlN individual layers and TiCoN are mono- Ti mass fraction is identical and less than the mass fraction of Ti in the first TiN layer in layer, and the first TiN layer is thicker than the second TiN layer by 100~ 200 nm, the atomic ratio of Ti, Al, Co three are preferably Ti in wearing layer:Al:Co=60:30:10.The thickness of multi-layer composite coatings Spend for 5 μm, wherein the thickness of bottom is 130 nm, and the thickness of enhancement layer is 1.95 μm, and the thickness of wearing layer is 1.92 μm, is delayed The thickness for rushing layer is 1 μm, and TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and adjacent TiAlN individual layers and TiCoN The gross thickness of individual layer is 125 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:After circular saw blade substrate is placed in 25 DEG C of nonionic surfactant solution into soaking and washing 1.5 hours It is placed in acetone and is cleaned by ultrasonic again, then aeration-drying, then is placed in calcine 2 hours at 320 DEG C and naturally cools to room temperature, wherein The material of circular saw blade substrate is high-speed steel, and nonionic surface active agent is preferably NPE, and mass concentration is 7%;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 4 × 10-1Pa, then take out true It is empty to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into body of heater makes pressure rise to 2Pa, opens Ti targets, electric current 2.5A, bias -80V, the depositing Ti metal level 11 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 2.5A, biases in Ti target currents To deposit the first TiN layer 6 minutes in Ti layer on surface of metal under -80V, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN The second TiN layer, sedimentation time 3.9 minutes, so as to be prepared into cushion are deposited on layer;
(4)It is prepared by enhancement layer:It is separately turned on TiAl alloy target, TiCo alloys targets, electrical current 5A, bias -105V, saw blade Depositing Ti AlN individual layers when matrix turns to TiAl alloy target, depositing Ti CoN individual layers when circular saw blade substrate turns to TiCo alloys targets, from And TiAlN individual layers is formed enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 16 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current 8A, bias -130V, are deposited on circular saw blade substrate TiAlCoN layers, sedimentation time are 15 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry It is dry.
The crystallite dimension of heat-resistant layer is 2~4 nm in multi-layer composite coatings prepared by the above method, coefficient of friction 0.57 ± 0.03, it is allowed to maximum operation (service) temperature be 1180 DEG C, vickers hardness hv value be 3640, it is allowed to maximum cutting speed be 132 M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
Embodiment 3
It is a kind of improve saw blade cutting speed multi-layer composite coatings, from inside to outside successively include bottom, cushion, enhancement layer, Wearing layer, wherein bottom are Ti metal levels, and cushion is TiN layer, and enhancement layer is that some TiAlN individual layers replace with TiCoN individual layers The composite bed formed is set, wearing layer is TiAlCoN layers, and cushion includes the first TiN layer, the second TiN layer successively from inside to outside, Wherein the first TiN layer reclines Ti metal levels, and the second TiN layer reclines enhancement layer, and the second TiN layer, TiAlN individual layers and TiCoN are mono- Ti mass fraction is identical and thicker than the second TiN layer by 200 less than the mass fraction of Ti in the first TiN layer, the first TiN layer in layer Nm, the atomic ratio of Ti, Al, Co three are preferably Ti in wearing layer:Al:Co=60:30:10.The thickness of multi-layer composite coatings is 6 μm, the wherein nm of thickness 80~180 of bottom, the thickness of enhancement layer is 2.4 μm, and the thickness of wearing layer is 2.42 μm, and remainder is The thickness of cushion, TiAlN individual layers are identical with the thickness of TiCoN individual layers in enhancement layer, and adjacent TiAlN individual layers and TiCoN are mono- The gross thickness of layer is 150 nm.
The preparation method of the multi-layer composite coatings of above-mentioned raising saw blade cutting speed, comprises the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in 20 DEG C of nonionic surfactant solution after soaking and washing 2 hours again It is placed in acetone and is cleaned by ultrasonic, then aeration-drying, then be placed in calcine 1 hour at 360 DEG C and naturally cool to room temperature, wherein round The material of saw bit matrix is high-speed steel, and nonionic surface active agent is preferably anhydrous sorbitol, mass concentration 10%;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 5 × 10-1Pa, then take out true It is empty to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, argon gas is passed through into body of heater makes pressure rise to 2Pa, opens Ti targets, electric current 3A, bias -95V, the depositing Ti metal level 14 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is electric current 3A, biases in Ti target currents To deposit the first TiN layer 7 minutes in Ti layer on surface of metal under -95V, then passing to nitrogen makes pressure rise to 4Pa, in the first TiN The second TiN layer is deposited on layer, 3.2~4.6 minutes during deposition, so as to be prepared into cushion;
(4)It is prepared by enhancement layer:It is separately turned on TiAl alloy target, TiCo alloys targets, electrical current 6A, bias -120V, saw blade Depositing Ti AlN individual layers when matrix turns to TiAl alloy target, depositing Ti CoN individual layers when circular saw blade substrate turns to TiCo alloys targets, from And TiAlN individual layers is formed enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 18 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current 9A, bias -136V, are deposited on circular saw blade substrate TiAlCoN layers, sedimentation time are 16 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry It is dry.
The crystallite dimension of heat-resistant layer is 2~4 nm in multi-layer composite coatings prepared by the above method, coefficient of friction 0.57 ± 0.03, it is allowed to maximum operation (service) temperature be 1180 DEG C, vickers hardness hv value be 3640, it is allowed to maximum cutting speed be 132 M/min, the adhesion strength between multi-layer composite coatings and circular saw blade substrate are 95 ± 2N.
The hardness of the multi-layer composite coatings of the present invention is high, and coefficient of friction is low, and anti-wear performance is good, high temperature resistant is good, can meet circle The larger cutting speed of saw blade, and the stress of coat inside is small, the high adhesion strength between circular saw blade substrate of intensity is high.

Claims (8)

1. it is a kind of improve saw blade cutting speed multi-layer composite coatings, it is characterised in that the multi-layer composite coatings from it is inner to Include bottom, cushion, enhancement layer, wearing layer successively outside, wherein bottom is Ti metal levels, and cushion is TiN layer, and enhancement layer is Some TiAlN individual layers are arranged alternately the composite bed to be formed with TiCoN individual layers, and wearing layer is TiAlCoN layers.
2. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, it is characterised in that the buffering Layer includes the first TiN layer, the second TiN layer, the Ti metal levels wherein the first TiN layer reclines successively from inside to outside, and the second TiN layer reclines Enhancement layer, Ti mass fraction is identical and less than Ti in the first TiN layer in the second TiN layer, TiAlN individual layers and TiCoN individual layers Mass fraction, the first TiN layer 100~200 nm thicker than the second TiN layer.
3. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, it is characterised in that described wear-resisting The atomic ratio of Ti, Al, Co three are Ti in layer:Al:Co=60:30:10.
4. the multi-layer composite coatings according to claim 1 for improving saw blade cutting speed, it is characterised in that the multilayer The thickness of composite coating is 4~6 μm, and wherein the thickness of bottom is 80~180 nm, and the thickness of enhancement layer is 1.5~2.4 μm, The thickness of wearing layer is 1.42~2.42 μm, the remaining thickness for cushion, TiAlN individual layers and TiCoN individual layers in enhancement layer Thickness is identical, and the gross thickness of adjacent TiAlN individual layers and TiCoN individual layers is 100~150 nm.
5. a kind of preparation method of the multi-layer composite coatings of raising saw blade cutting speed as described in Claims 1-4 is any, Comprise the following steps:
(1)Clean oil removing:Circular saw blade substrate is placed in the nonionic surfactant solution that mass concentration is 5%~10% and soaked It is placed in acetone and is cleaned by ultrasonic again after cleaning, 280~360 DEG C of calcinings is placed in after aeration-drying and naturally cool to room within 1~3 hour Temperature;
(2)It is prepared by bottom:Circular saw blade substrate after cooling is placed in vacuum drying oven, is first evacuated to 3 × 10-1Pa~5 × 10- 1Pa, then it is evacuated to 1.2 × 10-2Pa, for heating furnace body to 500 DEG C, into body of heater being passed through argon gas makes pressure rise to 2Pa, opens Ti targets are opened, 2~3A of electric current, bias -75~-95V, the depositing Ti metal level 8~14 minutes on circular saw blade substrate surface;
(3)It is prepared by cushion:Nitrogen is passed through into vacuum drying oven makes pressure rise to 3.2Pa, is 2~3A of electric current, partially in Ti target currents Press to deposit the first TiN layer 5~7 minutes in Ti layer on surface of metal under -75~-95V, then passing to nitrogen makes pressure rise to 4Pa, The second TiN layer, sedimentation time 3.2~4.6 minutes, so as to be prepared into cushion are deposited in the first TiN layer;
(4)It is prepared by enhancement layer:TiAl alloy target, TiCo alloys targets are separately turned on, electrical current is 4~6A, bias -90~- 120V, depositing Ti AlN individual layers when circular saw blade substrate turns to TiAl alloy target, circular saw blade substrate deposit when turning to TiCo alloys targets TiCoN individual layers, so that TiAlN individual layers form enhancement layer with TiCoN individual layers alternating deposit, sedimentation time is 14~18 minutes;
(5)It is prepared by wearing layer:TiAlCo alloys targets are opened, electrical current is 7~9A, -124~-136V is biased, in annular saw chip base Depositing Ti AlCoN layers on body, sedimentation time are 14~16 minutes;
(6)By step(5)Saw blade after processing is placed in soaking and washing in above-mentioned nonionic surfactant solution and divulged information dry It is dry.
6. the preparation method of the multi-layer composite coatings according to claim 5 for improving saw blade cutting speed, its feature exist In the material of the circular saw blade substrate is high-speed steel.
7. the preparation method of the multi-layer composite coatings according to claim 5 for improving saw blade cutting speed, its feature exist In nonionic surface active agent is one kind in polyoxyethylate amide, NPE or anhydrous sorbitol.
8. the preparation method of the multi-layer composite coatings according to claim 5 for improving saw blade cutting speed, its feature exist In crystallite dimension is 2~4 nm in wearing layer.
CN201710510107.4A 2017-06-28 2017-06-28 A kind of multi-layer composite coatings improving saw blade cutting speed Active CN107354437B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710510107.4A CN107354437B (en) 2017-06-28 2017-06-28 A kind of multi-layer composite coatings improving saw blade cutting speed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710510107.4A CN107354437B (en) 2017-06-28 2017-06-28 A kind of multi-layer composite coatings improving saw blade cutting speed

Publications (2)

Publication Number Publication Date
CN107354437A true CN107354437A (en) 2017-11-17
CN107354437B CN107354437B (en) 2019-07-09

Family

ID=60272657

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710510107.4A Active CN107354437B (en) 2017-06-28 2017-06-28 A kind of multi-layer composite coatings improving saw blade cutting speed

Country Status (1)

Country Link
CN (1) CN107354437B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019147022A1 (en) * 2018-01-23 2019-08-01 엘지전자 주식회사 Ti alloy nano composite coating-film and manufacturing method therefor
CN110387527A (en) * 2019-07-29 2019-10-29 缙云县先锋工具有限公司 A kind of high rigidity self-lubricating composite coating and preparation method thereof for saw blade
CN114107873A (en) * 2021-12-07 2022-03-01 上海工程技术大学 Gradient metal ceramic composite coating and preparation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1304457A (en) * 1999-05-06 2001-07-18 桑德维克公司 PVD coated cutting tool and method of its production
CN101678466A (en) * 2007-05-30 2010-03-24 住友电工硬质合金株式会社 Surface-coated cutting tool
CN102166849A (en) * 2010-12-20 2011-08-31 武汉新铬涂层设备有限公司 Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method
CN202037930U (en) * 2011-04-06 2011-11-16 武汉大学苏州研究院 Cutter with nanometer multi-layer superhard composite coating
CN102922052A (en) * 2012-09-28 2013-02-13 武汉大学 AlTiN-AlCrN super hard nano multilayer composite coating hob and preparation method thereof
CN103537719A (en) * 2013-09-30 2014-01-29 株洲钻石切削刀具股份有限公司 Multilayer coating cutting tool

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1304457A (en) * 1999-05-06 2001-07-18 桑德维克公司 PVD coated cutting tool and method of its production
CN101678466A (en) * 2007-05-30 2010-03-24 住友电工硬质合金株式会社 Surface-coated cutting tool
CN102166849A (en) * 2010-12-20 2011-08-31 武汉新铬涂层设备有限公司 Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method
CN202037930U (en) * 2011-04-06 2011-11-16 武汉大学苏州研究院 Cutter with nanometer multi-layer superhard composite coating
CN102922052A (en) * 2012-09-28 2013-02-13 武汉大学 AlTiN-AlCrN super hard nano multilayer composite coating hob and preparation method thereof
CN103537719A (en) * 2013-09-30 2014-01-29 株洲钻石切削刀具股份有限公司 Multilayer coating cutting tool

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019147022A1 (en) * 2018-01-23 2019-08-01 엘지전자 주식회사 Ti alloy nano composite coating-film and manufacturing method therefor
CN110387527A (en) * 2019-07-29 2019-10-29 缙云县先锋工具有限公司 A kind of high rigidity self-lubricating composite coating and preparation method thereof for saw blade
CN114107873A (en) * 2021-12-07 2022-03-01 上海工程技术大学 Gradient metal ceramic composite coating and preparation method thereof

Also Published As

Publication number Publication date
CN107354437B (en) 2019-07-09

Similar Documents

Publication Publication Date Title
CN107354438B (en) A kind of composite Nano coating on saw blade surface
CN107201499B (en) A kind of titanium alloy cutting component gradient TiAlXN coated cutting tool and preparation method thereof
JP3621943B2 (en) High wear resistance and high hardness coating
US20210040597A1 (en) High-temperature-resistant hard composite coating, preparation method thereof, and coated cutter
WO2017156996A1 (en) Composite functional cutter coating for cutting titanium alloy and preparation method therefor
CN105112858A (en) Nano composite cutting tool coating of multilayer structure
KR20130137604A (en) Cutting tool comprising multilayer coating
CN104480478B (en) A kind of nitriding PVD composite coatings and preparation method thereof
CN108251797B (en) TiAlN/CrN multilayer coating for titanium alloy cutting tool and preparation method thereof
CN107523790A (en) A kind of AlCrSiCuN nano laminated coatings and preparation method thereof
CN108118301B (en) AlCrSiN coating with intermediate layer with gradient change of Si content and preparation method
CN107354437A (en) A kind of multi-layer composite coatings for improving saw blade cutting speed
JP2005344148A (en) Wear-resistant film, and surface-coated cutting tool using the same
CN107354429B (en) A kind of composite coating that physical vaporous deposition is prepared on saw blade
CN113416926A (en) Nano multilayer structure transition metal nitride coating and preparation method and application thereof
JP5625000B2 (en) COATING SYSTEM AND COATING METHOD FOR PRODUCING COATING SYSTEM
CN109097731A (en) A kind of AlCrN/AlCrYN multi-component multi-layer coating and its preparation method and application
CN107338411B (en) More first gradient composite coating cutters of AlNbCN and preparation method thereof
CN110343993A (en) A kind of carbide surface processing method and application
JP2023544788A (en) Hard carbon coating with improved adhesive strength by HiPIMS and its method
CN114196912A (en) Periodic multilayer nano-structure nitride hard coating band saw blade and preparation method and application thereof
CN204820499U (en) A compound stereoplasm membrane of multilayer for tool and mould
CN116162899A (en) Titanium alloy cutting coating cutter and preparation method thereof
CN110387527B (en) High-hardness self-lubricating composite coating for circular saw blade and preparation method thereof
CN110735111B (en) High-hardness composite coating capable of realizing dry cutting of circular saw blade and preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant