CN107354432A - ZrCrCN梯度复合涂层刀具及其制备方法 - Google Patents
ZrCrCN梯度复合涂层刀具及其制备方法 Download PDFInfo
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Abstract
本发明属于机械制造切削刀具领域，特别是涉及一种ZrCrCN梯度复合涂层刀具及其制备方法，涂层刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层，该涂层为采用非平衡磁控溅射+中频磁控溅射的复合镀膜方法制备的ZrCrCN梯度涂层刀具。该ZrCrCN超硬碳氮化合物涂层由于在涂层中同时增加了Cr、Zr等两种金属，且涂层结构成分氮含量梯度渐变，可改善刀具的物理机械性能。该涂层具有极高的强度和硬度，较低的摩擦系数，良好耐磨性和抗月牙洼磨损的能力。切削过程中该刀具可有效防止刃口积屑和细微破损，保证工件加工表面质量，并为刀具基体提供良好的刃口安全性，同时提高刀具使用寿命60％以上。
Description
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种ZrCrCN梯度复合涂层刀具及其制备方法。
背景技术
涂层刀具能够将刀具基体材料与涂层的优良性能相结合，既保持了基体良好的韧性和强度，又具有涂层高硬度和良好减摩耐磨性，改善基体材料的性能，拓宽其应用范围和寿命。目前工业发达国家的涂层刀具使用量已占刀具总数的80％以上，数控机床上所用的刀具90％以上是涂层刀具。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(JinlongLi,ShihongZhang,MingxiLi.InfluenceoftheC2H2flowrateongradientTiCNfilmsdepositedbym ulti-arcionplating[J].AppliedSurfaceScience,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备方法”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备方法进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Cr靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400-500℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合多元复合涂层结构的优点提供一种ZrCrCN梯度复合涂层刀具及其制备方法。该刀具采用中频磁控溅射+非平衡磁控溅射的复合镀膜方法，直接采用ZrCrC复合靶提供碳源，且沉积温度控制在300℃以下，可在更为广泛的刀具或工具基体上制备。该涂层结构为涂层刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层。该梯度复合涂层刀具中的Zr元素对涂层起到固溶强化作用，提高了涂层的硬度、强度和抗磨损特性，Cr元素改善了涂层高速切削过程中的抗氧化性能，使涂层刀具具有更优异的化学稳定性和可靠性，可显著改善涂层刀具的摩擦磨损性能，提高刀具的切削寿命和加工效率。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
为了实现上述发明目的，本发明采用的技术方案为：
本发明ZrCrCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层。
本发明ZrCrCN梯度复合涂层刀具的制备方法，沉积方式为采用非平衡磁控溅射+中频磁控溅射的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrCrC复合靶，2个中频磁控溅射Cr靶，首先采用中频磁控溅射沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积ZrCrC过渡层和氮含量梯度渐变的ZrCrCN梯度复合涂层，其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各40min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至240℃，保温25～30min；
(2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压650V，占空比0.2，辉光放电清洗25min；降低偏压至450V，占空比0.3，开启离子源离子清洗25min，开启中频磁控溅射Cr靶电源，Cr靶电流40A，偏压350V，离子轰击2～3min；
(3)沉积Cr过渡层：Ar气压0.7～0.8Pa，偏压降至220V，Cr靶电流35A，沉积温度200℃，中频磁控溅射Cr过渡层5～6min；
(4)沉积ZrCrC过渡层：Ar气压0.5～0.6Pa，偏压调至200V，关闭中频磁控溅射Cr靶电源，开启非平衡磁控溅射ZrCrC靶电流40A，沉积ZrCrC过渡层层5～6min；
(5)沉积ZrCrCN梯度复合层：开启N2，N2气压为0.6Pa，Ar气压0.6～0.7Pa，偏压160V，ZrCrC靶电流45A，沉积温度200℃，沉积ZrCrCN复合层9～10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrCrCN复合层9～10min，直至N2气压升至1.3Pa，再沉积ZrCrCN复合层9～10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明的有益效果为：
通过上述工艺制备的ZrCrCN梯度复合涂层刀具，刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层。该梯度复合涂层刀具中的Zr元素对涂层起到固溶强化作用，提高了涂层的硬度、强度和抗磨损特性，Cr元素改善了涂层高速切削过程中的抗氧化性能，使涂层刀具具有更优异的化学稳定性和可靠性，且涂层结构成分氮含量梯度渐变，可改善传统碳氮化合物涂层刀具的物理机械性能。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
该ZrCrCN梯度复合涂层具有极高的强度和硬度，较低的摩擦系数，良好耐磨性和抗月牙洼磨损的能力。切削过程中该刀具可有效防止刃口积屑和细微破损，保证工件加工表面质量，并为刀具基体提供良好的刃口安全性，同时提高刀具使用寿命60％以上，该ZrCrCN梯度复合涂层刀具可广泛应用于钢、铁素体、马氏体不锈钢、铸铁、钛合金等绝大多数工件材料的精加工和半精加工。
附图说明
图1为本发明的ZrCrCN梯度复合涂层刀具的截面示意图；
图中：1为刀具基体、2为Cr过渡层、3为ZrCrC过渡层、4为ZrCrCN梯度复合涂层。
具体实施方式
下面结合具体实施例对本发明作更进一步的说明，以便本领域专业人员做进一步了解，但并不因此限制本发明。
实施例1
本发明ZrCrCN梯度复合涂层刀具及其制备方法，该刀具为普通的铣刀片，其基体材料为：硬质合金YG6A，涂层刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层。沉积方式为采用非平衡磁控溅射+中频磁控溅射的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrCrC复合靶，2个中频磁控溅射Cr靶。首先采用中频磁控溅射沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积ZrCrC过渡层和氮含量梯度渐变的ZrCrCN梯度复合涂层。其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各40min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至240℃，保温30min；
(2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压650V，占空比0.2，辉光放电清洗25min；降低偏压至450V，占空比0.3，开启离子源离子清洗25min，开启中频磁控溅射Cr靶电源，Cr靶电流40A，偏压350V，离子轰击3min；
(3)沉积Cr过渡层：Ar气压0.8Pa，偏压降至220V，Cr靶电流35A，沉积温度200℃，中频磁控溅射Cr过渡层6min；
(4)沉积ZrCrC过渡层：Ar气压0.6Pa，偏压调至200V，关闭中频磁控溅射Cr靶电源，开启非平衡磁控溅射ZrCrC靶电流40A，沉积ZrCrC过渡层层6min；
(5)沉积ZrCrCN梯度复合层：开启N2，N2气压为0.6Pa，Ar气压0.7Pa，偏压160V，ZrCrC靶电流45A，沉积温度200℃，沉积ZrCrCN复合层10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrCrCN复合层10min，直至N2气压升至1.3Pa，再沉积ZrCrCN复合层10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例2
本发明ZrCrCN梯度复合涂层刀具及其制备方法，该刀具为普通麻花钻，其刀具基体材料为：高速钢W18Cr4V，涂层刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层。沉积方式为采用非平衡磁控溅射+中频磁控溅射的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrCrC复合靶，2个中频磁控溅射Cr靶。首先采用中频磁控溅射沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积ZrCrC过渡层和氮含量梯度渐变的ZrCrCN梯度复合涂层。其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各40min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至240℃，保温25min；
(2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压650V，占空比0.2，辉光放电清洗25min；降低偏压至450V，占空比0.3，开启离子源离子清洗25min，开启中频磁控溅射Cr靶电源，Cr靶电流40A，偏压350V，离子轰击2min；
(3)沉积Cr过渡层：Ar气压0.7Pa，偏压降至220V，Cr靶电流35A，沉积温度200℃，中频磁控溅射Cr过渡层5min；
(4)沉积ZrCrC过渡层：Ar气压0.5Pa，偏压调至200V，关闭中频磁控溅射Cr靶电源，开启非平衡磁控溅射ZrCrC靶电流40A，沉积ZrCrC过渡层层5min；
(5)沉积ZrCrCN梯度复合层：开启N2，N2气压为0.6Pa，Ar气压0.6Pa，偏压160V，ZrCrC靶电流45A，沉积温度200℃，沉积ZrCrCN复合层9min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrCrCN复合层9min，直至N2气压升至1.3Pa，再沉积ZrCrCN复合层9min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
Claims (2)
1.一种ZrCrCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，其特征在于，涂层刀具表面为氮含量梯度渐变的ZrCrCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和ZrCrC过渡层。
2.ZrCrCN梯度复合涂层刀具的制备方法，其特征在于，沉积方式为采用非平衡磁控溅射+中频磁控溅射的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrCrC复合靶，2个中频磁控溅射Cr靶，首先采用中频磁控溅射沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积ZrCrC过渡层和氮含量梯度渐变的ZrCrCN梯度复合涂层，其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各40min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至240℃，保温25～30min；
(2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压650V，占空比0.2，辉光放电清洗25min；降低偏压至450V，占空比0.3，开启离子源离子清洗25min，开启中频磁控溅射Cr靶电源，Cr靶电流40A，偏压350V，离子轰击2～3min；
(3)沉积Cr过渡层：Ar气压0.7～0.8Pa，偏压降至220V，Cr靶电流35A，沉积温度200℃，中频磁控溅射Cr过渡层5～6min；
(4)沉积ZrCrC过渡层：Ar气压0.5～0.6Pa，偏压调至200V，关闭中频磁控溅射Cr靶电源，开启非平衡磁控溅射ZrCrC靶电流40A，沉积ZrCrC过渡层层5～6min；
(5)沉积ZrCrCN梯度复合层：开启N2，N2气压为0.6Pa，Ar气压0.6～0.7Pa，偏压160V，ZrCrC靶电流45A，沉积温度200℃，沉积ZrCrCN复合层9～10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrCrCN复合层9～10min，直至N2气压升至1.3Pa，再沉积ZrCrCN复合层9～10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
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| CN115261774A (zh) * | 2022-08-26 | 2022-11-01 | 集美大学 | 一种铝合金易拉罐盖高速冲裁模刃口梯度渐变超硬复合膜层及其制备方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103097579A (zh) * | 2010-09-21 | 2013-05-08 | 西铁城控股株式会社 | 白色硬质装饰构件 |
| CN105063554A (zh) * | 2015-07-31 | 2015-11-18 | 山东大学 | ZrSiCN纳米复合梯度涂层刀具及其制备工艺 |
-
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103097579A (zh) * | 2010-09-21 | 2013-05-08 | 西铁城控股株式会社 | 白色硬质装饰构件 |
| CN105063554A (zh) * | 2015-07-31 | 2015-11-18 | 山东大学 | ZrSiCN纳米复合梯度涂层刀具及其制备工艺 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114807850A (zh) * | 2022-04-30 | 2022-07-29 | 西安交通大学 | 一种应用于热锻模具表面的氮化物硬质薄膜及其制备方法 |
| CN115261774A (zh) * | 2022-08-26 | 2022-11-01 | 集美大学 | 一种铝合金易拉罐盖高速冲裁模刃口梯度渐变超硬复合膜层及其制备方法 |
| CN115261774B (zh) * | 2022-08-26 | 2023-08-29 | 集美大学 | 一种铝合金易拉罐盖高速冲裁模刃口梯度渐变超硬复合膜层及其制备方法 |
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