CN107328729B - Method and system for measuring components of stripping liquid medicine - Google Patents
Method and system for measuring components of stripping liquid medicine Download PDFInfo
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- CN107328729B CN107328729B CN201710751021.0A CN201710751021A CN107328729B CN 107328729 B CN107328729 B CN 107328729B CN 201710751021 A CN201710751021 A CN 201710751021A CN 107328729 B CN107328729 B CN 107328729B
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- 239000007788 liquid Substances 0.000 title claims abstract description 52
- 239000003814 drug Substances 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 233
- 238000004448 titration Methods 0.000 claims abstract description 83
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 68
- 150000001412 amines Chemical class 0.000 claims abstract description 44
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000002798 spectrophotometry method Methods 0.000 claims abstract description 8
- 239000000203 mixture Substances 0.000 claims description 9
- 238000000691 measurement method Methods 0.000 claims description 2
- 238000005070 sampling Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000012883 sequential measurement Methods 0.000 description 2
- CNPURSDMOWDNOQ-UHFFFAOYSA-N 4-methoxy-7h-pyrrolo[2,3-d]pyrimidin-2-amine Chemical compound COC1=NC(N)=NC2=C1C=CN2 CNPURSDMOWDNOQ-UHFFFAOYSA-N 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
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- Chemical & Material Sciences (AREA)
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Abstract
The invention provides a method and a system for measuring components of a stripping liquid medicine, wherein the measuring method comprises the following steps: executing an ultraviolet spectrophotometry UV measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period, and feeding back measuring data; executing a titration measurement mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measurement period, and feeding back measurement data; the UV measurement mode is executed at least once and then the titration measurement mode is executed, or the UV measurement mode and the titration measurement mode are executed simultaneously. According to the characteristic of high UV measurement speed, measurement data can be fed back after the measurement is finished, and meanwhile, the next measurement is immediately carried out after sampling again, so that the output period of PR concentration data can be greatly shortened, the consumption of liquid medicine can be reduced, and the PR concentration is maintained at a certain level; the titration measuring time is long, so that the titration can be measured independently, and the concentration of all the components in the liquid medicine can be monitored.
Description
Technical Field
The invention relates to the technical field of screen display, in particular to a method and a system for measuring components of a stripping liquid medicine.
Background
In the TFT manufacturing process, a stripping (Stripper) process is used to strip a photoresist, i.e., a process of removing a Photoresist (PR) defining a pattern (pattern) with a Stripper solution. After the glass to be subjected to the photoresist stripping process is subjected to the Stripper process, the photoresist is dissolved in the Stripper solution. The PR concentration in the solution and its active ingredient Amine (effective ingredient for stripping photoresist) are critical parameters affecting the photoresist removing ability, usually the main equipment is equipped with an accessory equipment-photoresist analyzer to measure and monitor PR, H in the solution2O, Amine and the like.
The Force Drain mode is used to control the PR concentration of the Striper solution, i.e. the PR concentration in the solution is maintained at a certain level by continuously discharging and replenishing the solution during Run cargo. And the amount of liquid drainage and liquid supplement is automatically adjusted according to the concentration of PR. When the PR concentration is high, the liquid discharge amount is increased, and when the PR concentration is low, the liquid discharge amount is decreased to reduce the consumption of the liquid medicine. Therefore, the PR concentration in the liquid medicine needs to be measured in real time, and the PR concentration in the liquid medicine can be fed back timely and accurately.
The period for measuring Amine and other components is long, generally the measuring time is about 20 minutes, and the analyzer can measure the liquid medicine components of two tanks (Tank) and then output Data together, so the time for measuring one stroke of Data is about 40 minutes, because the measuring time is long, when the Run goods are continuously carried out, the speed of the Run sheet of the STR equipment is used, the Run exceeds 60 sheets of glass in the period, a large amount of photoresistance is dissolved in the liquid medicine, the amount of Force Drain is kept at a low level, the PR concentration is rapidly increased when the pen Data is output, and the PR concentration cannot be effectively controlled. When the concentration is too high, a mode of completely discharging the liquid medicine and supplementing the new liquid is generally adopted, so that great waste of the liquid medicine is caused, and the over-shipped product has the risk of reducing the yield during the period that the PR concentration is high.
Disclosure of Invention
The technical problem to be solved by the present invention is to provide a method and a system for measuring the components of a stripping solution, which can shorten the measurement period and feed back the photoresist concentration in real time.
In order to solve the above technical problems, the present invention provides a method for measuring a composition of a stripping solution, comprising:
executing an ultraviolet spectrophotometry UV measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period, and feeding back measuring data;
executing a titration measurement mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measurement period, and feeding back measurement data;
the titration measurement mode is executed after the UV measurement mode is executed at least once, or the UV measurement mode and the titration measurement mode are executed simultaneously.
And when the titration measurement mode is executed, measuring the concentration of the amine and the concentration of the carbon dioxide-amine in the stripping liquid medicine in the second measurement period and feeding back measurement data.
Wherein the titration measurement mode is performed after the UV measurement mode is performed a plurality of times, and a total time taken to perform the UV measurement mode does not exceed the second measurement period.
When the UV measurement mode and the titration measurement mode are executed simultaneously, stripping liquid medicine for measurement flows back to the host computer after the UV measurement mode is executed each time.
The first measurement period is the time for measuring the photoresist concentration and the water concentration in the stripping liquid medicine of the two tanks, and the second measurement period is the time for measuring the amine and the carbon dioxide-amine in the stripping liquid medicine of the two tanks.
Wherein the first measurement period is 4 minutes, and the second measurement period is 40 minutes.
The present invention also provides a system for measuring a composition of a stripping solution, comprising:
the ultraviolet spectrophotometry UV measuring unit is used for executing a UV measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period and feeding back measuring data;
the titration measuring unit is used for executing a titration measuring mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measuring period and feeding back measuring data;
after the UV measurement unit executes the UV measurement mode at least once, the titration measurement unit executes the titration measurement mode again, or the UV measurement mode and the titration measurement mode are executed simultaneously.
And the titration measuring unit is further used for measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine and feeding back measurement data in the second measurement period when the titration measuring mode is executed.
Wherein the titration measurement mode is performed after the UV measurement mode is performed a plurality of times, and a total time taken to perform the UV measurement mode does not exceed the second measurement period.
When the UV measurement mode and the titration measurement mode are executed simultaneously, stripping liquid medicine for measurement flows back to the host computer after the UV measurement mode is executed each time.
The embodiment of the invention has the beneficial effects that: according to the characteristic of high UV measurement speed, measurement data can be fed back after the measurement is finished, and meanwhile, sampling is performed again to immediately perform next measurement, so that the output period of PR concentration data can be greatly shortened, and PR concentration can be measured in time to reduce liquid medicine consumption, maintain the PR concentration at a certain level and improve the PR concentrationThe stability of the manufacturing process; amine and CO2The Amine titration measurement time is long, so that the Amine titration measurement time can be independently measured, and the concentration of all components in the liquid medicine can be monitored.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a flow chart illustrating a method for measuring a composition of a stripping solution according to an embodiment of the present invention.
FIG. 2 is a schematic block diagram of a system for measuring a composition of a stripping solution according to another embodiment of the present invention.
FIG. 3 is another schematic block diagram of a system for measuring a composition of a stripping solution according to another embodiment of the present invention.
Detailed Description
The following description of the embodiments refers to the accompanying drawings, which are included to illustrate specific embodiments in which the invention may be practiced.
Referring to fig. 1, a method for measuring a composition of a stripping solution according to an embodiment of the present invention includes:
executing an ultraviolet spectrophotometry measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period, and feeding back measuring data;
executing a titration measurement mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measurement period, and feeding back measurement data;
the UV measurement mode is executed at least once and then the titration measurement mode is executed, or the UV measurement mode and the titration measurement mode are executed simultaneously
In the striper process, the photoresist PR and water H in the chemical solution are stripped2O, Amine, carbon dioxide-Amine CO2Concentration of-Amine and other components is evaluated for the photoresist removing capabilityThe critical parameter. This embodiment measures PR, H2An ultraviolet spectrophotometry (UV) measurement mode is adopted, the measurement period is short, and the measurement result is accurate; and Amine and CO2The concentration of Amine is measured by titration, which has the advantage of accurate measurement but longer measurement time.
To avoid measuring Amine and CO in the waiting titration measuring mode as in the prior art2The embodiment measures the photoresist concentration and the water concentration in the stripping liquid in the first measurement period when the UV measurement mode is executed, and obtains measurement data, namely real-time feedback, so that the host can directly obtain the measurement data (PR concentration, H concentration) according to the UV measurement mode2O concentration) is adjusted in real time to the stripping solution concentration. As an example, the first measurement period is 4 minutes. It is understood that the first measurement period is a time for measuring the photoresist concentration and the water concentration in the stripping solution of two Tank.
In this embodiment, after the UV measurement mode is executed in the first measurement period to obtain and feed back the measurement data of the photoresist concentration and the water concentration in the stripping solution, the UV measurement mode is continuously executed for a plurality of times to measure the photoresist concentration and the water concentration in the stripping solution and feed back the measurement data, for example, the UV measurement mode may be executed for 5 times within a time period of 20 minutes to obtain the measurement data of the photoresist concentration and the water concentration in 5 stripping solutions. The measurement data fed back each time can be used for the host to adjust the concentration of the stripping liquid medicine in real time.
Based on the feature that the titration measurement mode takes a long time, the UV measurement mode of the present embodiment is performed before the titration measurement mode or simultaneously with the titration measurement mode. Because the measurement data can be fed back in real time when the UV measurement mode is executed, the measurement data does not need to be fed back together after the titration measurement mode obtains the measurement data, and the negative influence caused by the duration of the titration measurement mode can be effectively eliminated. As an example, the second measurement period is 40 minutes. It is understood that the second measurement period is a time for measuring amine and carbon dioxide-amine in the stripping solution of two Tank.
Considering that the titration measurement mode has higher accuracy of the measurement data, the amine concentration and the carbon dioxide-amine concentration in the stripping solution can be measured when the titration measurement mode is executed, so that the titration measurement mode obtains the measurement data in the second measurement period, including the photoresist concentration, the water concentration, the amine concentration and the carbon dioxide-amine concentration, and monitors all the components.
The UV measurement mode is performed at least once and then the titration measurement mode is performed, which is equivalent to a single line sequential measurement. The UV measurement mode and the titration measurement mode may be performed in different numbers, respectively, more times than the titration measurement mode, for example, the UV measurement mode is performed x1 times, the titration measurement mode is performed x2 times, and the PR and H measurements are performed x1 times2After the O concentration, x2 times of Amine and CO are measured2And (4) Amine concentration, so that the PR measurement period can be shortened under the condition of not modifying a hardware structure, and the PR concentration can be fed back in real time. Of course, in order not to unduly delay the performance of the titration measurement, the total time spent by the UV measurement mode should not exceed the second measurement period of the titration measurement mode. For example, 10 PR cycles can be generated by performing 10 UV measurement modes (taking 4 minutes × 10=40 minutes) and then performing 1 titration (taking 40 minutes) within 80 minutes&H2Measurement data of O +1 Amine and CO2-Amine's measurement data; if the amine concentration and the carbon dioxide-amine concentration in the stripping solution are also measured during the titration measurement mode, 11 PR shots can be produced in the 80 minutes&H2Measurement data of O +1 Amine and CO2Amine measurement data. By using the existing measurement mode, only 2 PR and H can be produced in 80 minutes2O、Amine、CO2Amine data. Since the PR concentration control adjusts the amount of Force Drain by the PR concentration, the PR measurement period can be greatly shortened. It is understood that 5 PR cycles can be produced if 5 UV measurement modes (taking 4 minutes × 5=20 minutes) are performed within 60 minutes and 1 titration cycle (taking 40 minutes) is performed again&H2Measurement data of O +1 Amine and CO2-Amine's measurement data; if the stripping agent is also used in the titration measurement modeThe concentration of amine and carbon dioxide-amine in the solution was measured to yield 6 PR shots in the aforementioned 60 minutes&H2Measurement data of O +1 Amine and CO2Amine measurement data. By adopting the existing measuring mode, only 1 PR and H can be produced in 60 minutes2O、Amine、CO2Amine data.
The UV measurement mode and the titration measurement mode are performed simultaneously, which is equivalent to a two-line parallel measurement, and thus, the conventional measurement system structure needs to be adjusted (as will be described in detail in the following second embodiment of the present invention). The two measurement modes are executed simultaneously, have no time sequence, are completely independent from each other and do not interfere with each other. PR, H obtained under UV measurement mode2The O concentration is fed back to the host computer immediately, then the next measurement is carried out, and the stripping liquid medicine for measurement can directly flow back to the host computer table, so that the waste of the liquid medicine is avoided. The titration measurement can be carried out independently, and the measurement data is fed back after the titration measurement is finished. Thus, in 80 minutes, compared with the existing measurement method which can only obtain 2 pieces of measurement data, the two-line parallel measurement of the embodiment can obtain 20 pieces of PR&H2Measurement data of O +2 Amine and CO2-Amine's measurement data; meanwhile, the measured data obtained by the two-line parallel measurement in the same time is more than the single-line sequential measurement in the embodiment, so that the adjustment of the concentration of the liquid medicine is more accurate.
Referring to fig. 2 and 3, a second embodiment of the present invention provides a system for measuring a composition of a stripping solution, which includes:
the ultraviolet spectrophotometry UV measuring unit is used for executing a UV measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period and feeding back measuring data;
the titration measuring unit is used for executing a titration measuring mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measuring period and feeding back measuring data;
after the UV measurement unit executes the UV measurement mode at least once, the titration measurement unit executes the titration measurement mode again, or the UV measurement mode and the titration measurement mode are executed simultaneously.
Specifically, fig. 2 is a schematic block diagram of the measurement system of the present embodiment when measuring in a single-line sequence in the UV measurement mode and the titration measurement mode. Compared with the prior art, the embodiment feeds back the measurement data to the host in real time when the UV measurement unit executes the UV measurement mode, and does not need to wait for the titration measurement unit to execute the titration measurement mode to obtain the measurement data and then feed back the measurement data together, so that the negative influence caused by the duration of the titration measurement mode can be effectively eliminated.
Accordingly, fig. 3 is a schematic block diagram of the measurement system of the present embodiment when the UV measurement mode and the titration measurement mode are performed in a two-line parallel measurement mode. Compared with the prior art, the line connection is improved, the UV measurement unit and the titration measurement unit directly measure the sampling of the stripping liquid medicine, the two measurement modes are executed simultaneously, the time sequence is not required, and the measurement modes are completely independent from each other and do not interfere with each other. PR, H obtained under UV measurement mode2The O concentration is fed back to the host computer immediately, then the next measurement is carried out, and the stripping liquid medicine for measurement can directly flow back to the host computer table, so that the waste of the liquid medicine is avoided. The titration measurement can be carried out independently, and the measurement data is fed back after the titration measurement is finished.
Further, the titration measuring unit is further configured to measure the amine concentration and the carbon dioxide-amine concentration in the stripping solution and feed back measurement data during the second measurement period when the titration measuring mode is executed. Thus, the titration measurement mode obtains measurement data including the photoresist concentration, the water concentration, the amine concentration and the carbon dioxide-amine concentration in the second measurement period, and all the components are monitored.
Further, the UV measurement mode is performed a plurality of times and then the titration measurement mode is performed, the number of times of performing the UV measurement mode is more than the number of times of performing the titration measurement mode, for example, the UV measurement mode is performed x1 times, the titration measurement mode is performed x2 times, and the measurement x1 times PR and H are performed2After the O concentration, x2 times of Amine and CO are measured2And (4) Amine concentration, so that the PR measurement period can be shortened under the condition of not modifying a hardware structure, and the PR concentration can be fed back in real time. Of courseIn order not to unduly delay the performance of the titration measurement, the total time spent by the UV measurement mode should not exceed the second measurement period of the titration measurement mode.
As an example, the first measurement period is 4 minutes. It is understood that the first measurement period is a time for measuring the photoresist concentration and the water concentration in the stripping solution of two Tank. As an example, the second measurement period is 40 minutes. It is understood that the second measurement period is a time for measuring amine and carbon dioxide-amine in the stripping solution of two Tank.
As can be seen from the above description, the embodiments of the present invention have the following beneficial effects: according to the characteristic of high UV measurement speed, measurement data can be fed back after the measurement is finished, and meanwhile, sampling is carried out again to immediately carry out next measurement, so that the output period of PR concentration data can be greatly shortened, the PR concentration can be measured in time, the consumption of liquid medicine is reduced, the PR concentration is maintained at a certain level, and the stability of the manufacturing process is improved; amine and CO2The Amine titration measurement time is long, so that the Amine titration measurement time can be independently measured, and the concentration of all components in the liquid medicine can be monitored.
The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention, and it is therefore to be understood that the invention is not limited by the scope of the appended claims.
Claims (8)
1. A method for measuring a composition of a stripping solution, comprising:
executing an ultraviolet spectrophotometry UV measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period, and feeding back measuring data;
executing a titration measurement mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measurement period, and feeding back measurement data;
the UV measurement mode is executed for a plurality of times and then the titration measurement mode is executed, the total time spent on executing the UV measurement mode does not exceed the second measurement period, or the UV measurement mode and the titration measurement mode are executed simultaneously.
2. A measuring method according to claim 1, wherein the titration measuring mode is performed while measuring the amine concentration and the carbon dioxide-amine concentration in the stripping solution and feeding back the measured data during the second measuring period.
3. The method of claim 1, wherein the UV measurement mode and the titration measurement mode are performed simultaneously, and the stripping solution for measurement is returned to the main bench after each UV measurement mode.
4. A measuring method according to claim 1, wherein the first measuring period is a time for measuring the photoresist concentration and the water concentration in the stripping liquid of the two tanks, and the second measuring period is a time for measuring the amine and the carbon dioxide-amine in the stripping liquid of the two tanks.
5. A measurement method according to claim 4, wherein the first measurement period is 4 minutes and the second measurement period is 40 minutes.
6. A system for measuring a composition of a stripping solution, comprising:
the ultraviolet spectrophotometry UV measuring unit is used for executing a UV measuring mode, measuring the photoresist concentration and the water concentration in the stripping liquid medicine in a first measuring period and feeding back measuring data;
the titration measuring unit is used for executing a titration measuring mode, measuring the amine concentration and the carbon dioxide-amine concentration in the stripping liquid medicine in a second measuring period and feeding back measuring data;
the UV measurement unit executes the titration measurement mode after executing for a plurality of times, wherein the total time spent in executing the UV measurement mode does not exceed the second measurement period, or the UV measurement mode and the titration measurement mode are executed simultaneously.
7. The measurement system of claim 6, wherein the titration measurement unit is further configured to measure the amine concentration and the carbon dioxide-amine concentration in the stripping solution and feed back measurement data during the second measurement period when the titration measurement mode is performed.
8. The measurement system of claim 6, wherein the UV measurement mode and the titration measurement mode are performed simultaneously, and the stripping solution for measurement is returned to the main bench after each UV measurement mode.
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| KR100390567B1 (en) * | 2000-12-30 | 2003-07-07 | 주식회사 동진쎄미켐 | method of controlling photoresist stripping process and method of regenerating photoresist stripping composition using near infrared spectrometer |
| US20030073242A1 (en) * | 2001-10-11 | 2003-04-17 | Kitchens Keith G. | Apparatus for controlling stripping solutions methods thereof |
| CN103308654B (en) * | 2013-06-13 | 2016-08-10 | 深圳市华星光电技术有限公司 | For testing the method for moisture in photoresistance stripper |
| CN103900978A (en) * | 2014-03-27 | 2014-07-02 | 深圳市华星光电技术有限公司 | Method for measuring concentration of light resistance in striping liquid |
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