CN107306099B - Magnetic suspension guiding device and its control method - Google Patents
Magnetic suspension guiding device and its control method Download PDFInfo
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- CN107306099B CN107306099B CN201610240783.XA CN201610240783A CN107306099B CN 107306099 B CN107306099 B CN 107306099B CN 201610240783 A CN201610240783 A CN 201610240783A CN 107306099 B CN107306099 B CN 107306099B
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- iron core
- slide unit
- guiding device
- mover
- magnetic suspension
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
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- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
The invention discloses a kind of magnetic suspension guiding device and its control methods.The magnetic suspension guiding device includes mover slide unit and rail unit, and mover slide unit is arranged in pairs in the two sides of rail unit.Mover slide unit includes iron core and coil windings, and coil winding wound is on iron core.Mover slide unit further comprises air gap adjusting device, and wherein air gap adjusting device is set to the pre-position of iron core, and in predetermined position, air gap adjusting device interrupts at least part of the magnetic line of force generated by coil windings.Magnetic suspension guiding device of the invention has bigger preload force, and preload force is adjustable and dynamic response capability with higher.
Description
Technical field
The present invention relates to a kind of magnetic suspension guiding devices, are suitable for high speed without the mute telecontrol equipment that rubs, such as semiconductor
Manufacturing equipment, liquid crystal display manufacturing equipment, the sports platform positioning device in detection device, carry on sports platform silicon wafer, mask,
Substrate of glass or similar substrate are to expose or detect.
Background technique
As the progress of photoetching technique and semi-conductor industry are fast-developing, there are four basic performances to refer to lithographic equipment
Mark: line width uniformity (CD, Critical Dimension Uniformity), depth of focus (Focus), alignment (Overlay) and production
Rate (Throughput).In order to improve line width uniformity, photo-etching machine work-piece platform mask platform must improve the standard to precision positioning energy
Power.In order to improve depth of focus error precision, workpiece platform mask platform must improve vertical precision positioning ability.In order to improve litho machine set
Error precision is carved, workpiece platform mask platform must improve its internal mode to promote dynamic positioning characteristic.In addition, lithographic equipment is necessary
Increase yield, therefore work stage must high-speed motion, quick start and stopping.The high speed of lithographic equipment high accelerates and high-accuracy
Stationkeeping ability be conflicting.In order to overcome this contradiction, current workpiece platform mask platform technology uses rough micro-moving mechanism structure,
Realize that high speed is separated with high-precision technology.Coarse motion structure is mainly made of linear motor, and big stroke and high speed may be implemented
Movement.Micropositioner is then laminated and is installed on coarse motion platform, can dynamically compensate deviations, micropositioner realizes nano-precision, and has
There is multifreedom motion to carry out photolithographic exposure and alignment.
Current this structure drives designing technique using air-bearing structure, cannot achieve multifreedom motion and actuator
Integrated Coupling Design, cause the quality of system motion structure to increase, driving force drives counter-force to be applied to system with increase
Residual oscillation also increase, to affect the dynamic property of system.Incline further, since productivity requirements high acceleration causes to add
Turn over torque increasing, workpiece platform mask platform air bearing Static stiffness constraint using high rigidity design, to guide surface degree, preload deformation,
Air-float technology parameter designing requires very high.Simultaneously, it is contemplated that matched electricity, gas and water, vacuum passage and cabinet, work stage mask
Platform system structure is complicated, huge, reliability is low, maintenance maintenance
Traditional precision air bearing sports platform is supported using high pressure air-bearing, guarantees that sports platform is made to transport without friction on platform
Dynamic, key part structure is mainly made of the high-accuracy gentle slick and frivolous block structure of air-float guide rail.Air floating structure is by offer positive pressure
Floating cushion and vacuum pretightning force (or magnetic attraction preload) structure it is integral by processing.When air bearing guiding device works, air bearing knot
Structure is passed through barotropic gas, forms air film between floating cushion and marble guide rail, makes floating cushion by the support of lift of gas N, protects
Card floating cushion makees frictionless motion in marble platform.Vacuum pre-fastening structure is then passed through negative-pressure gas, makes vacuum pretightning force
Structure is acted on by the vacuum pretightning force F contrary with lift of gas N.By adjusting the big of lift of gas N and vacuum pretightning force F
It is small, the air bearing rigidity of adjustable floating cushion and air bearing guiding device.If improving the air bearing rigidity of floating cushion, need to increase simultaneously
Pressure N and vacuum pretightning force F is floated in aerating, and is increased vacuum pretightning force F and be will lead to floating cushion generation precompressed bending, due to pneumatically supported
Air-film thickness δ generally only has several microns to more than ten microns, therefore, when amount of bow σ crosses ambassador's floating cushion and guide rail contact, air bearing
Pad movement will generate mechanical friction, keep air floating structure ineffective.When improving bearing capacity, need to further increase supply gas
Pressure, air bearing easily occurs gas shake, and the guiding device of air bearing and vacuum preload in the sports platform applied based on vacuum environment but
It cannot use.
Fig. 1 shows a kind of traditional guide rail guiding device.As shown in Figure 1, the guiding device includes: rail unit 100, moves
Sub- slide unit 101 and 102 three parts of guide rail pair unit collectively form.Rail unit 100 usually uses metal guide rail or rigidity
High ceramic guide rail.Mover slide unit 101 includes mainly mechanical slide or aerostatic slide, usually may be designed as mechanical part
(such as crossed roller guide rail) or air floatation component (such as floating cushion).Guide rail pair unit 102 is made of mechanical roller bearing or by high pressure
Gas suspension bearing composition, or be made of permanent-magnet suspension bearing.Guiding device has multiple freedom of motion, the first freedom of motion
Direction is X-direction, is directed toward the long axis direction of rail unit 100.Second freedom of motion direction is Y-direction, with rail unit 100
Long axis direction it is orthogonal orthogonal.The third freedom of motion direction of guiding device is Z-direction, it and the first freedom of motion
Direction and the second equal perpendicular quadrature in freedom of motion direction are directed toward mover slide unit 101.Wherein, mover slide unit 101 exists
It being capable of free movement along the first freedom of motion direction on rail unit 100.Mover slide unit 101 is in rail unit 100
On along the second freedom of motion direction have the function of free movement or have high rigidity constraint.Sliding block 101 is in rail unit 100
On along third freedom of motion direction with high rigidity constrain, moving loads can be undertaken.
Mechanical roller bearing 102 is directly contacted with rail unit 100 and mover slide unit 101, rigid with high structure
Property and bearing capacity, but High-speed Circumstance application under noise it is big, it is difficult to accomplish high-precision.High pressure gas suspension bearing and rail unit
100 with 101 non-direct contact of mover slide unit, structural rigidity with higher and bearing capacity, and noise is low, but to using ring
Border requires high.Permanent-magnet suspension bearing and rail unit 100 and 101 non-direct contact of mover slide unit have lower bearing rigid
Property and higher bearing capacity, noiseless, but be difficult in static state in stable suspersion state.
Traditional precise motion platform also utilizes mechanical bearing guide supporting sports platform to move, and typical mechanical bearing includes: ball
Bearing, roller bearing, sliding contact bearing.But it in order to reduce the vibration of sliding bearing or roller bearing and noise, is often used
Lubricating oil can generate particle contamination application environment in moving contact friction process, and contact friction force also will limit sports platform
Speed and precision.The enforcement difficulty of this scheme is big.
In conclusion traditional air bearing or mechanical guide bearing arrangement or method for supporting are not able to satisfy in precise motion platform
Application environment demand.
Summary of the invention
The object of the present invention is to provide a kind of with bigger preload force, and preload force is adjustable and dynamic with higher
The magnetic suspension guiding device of responding ability.
To achieve the above object, according to an aspect of the present invention, a kind of magnetic suspension guiding device is provided, including mover is slided
Module unit and rail unit, the mover slide unit are arranged in pairs in the two sides of the rail unit, the mover sliding block
Unit includes iron core and coil windings, and the coil winding wound is on the iron core.The mover slide unit further wraps
Air gap adjusting device is included, wherein the air gap adjusting device is set to the pre-position of the iron core, and in the pre-determined bit
It sets, the air gap adjusting device interrupts at least part of the magnetic line of force generated by the coil windings.
In one embodiment, the air gap adjusting device may include the pre-position being set on the side of the iron core
Notch and adjusting block with the notches fit, the adjusting block can move to adjust the adjusting block along the notch
With the gap between the notch.
In one embodiment, the surface of the iron core can be equipped with support plate, and the adjusting block is movably mounted to described
In support plate and extend into the notch.
In one embodiment, threaded hole can be equipped in the support plate, the adjusting block is installed on the support by bolt
On plate, wherein the bolt and the threaded hole cooperate, to adjust the distance that the adjusting block extends into the notch.
In one embodiment, in the support plate can be equipped with positioning device, the positioning device be used for the adjusting block into
Row positioning.
In one embodiment, the notch is conical notch and the adjusting block is cone；Alternatively, the notch
It is sphenoid for wedge-formed incision and the adjusting block.
In one embodiment, the adjustable clearance size between the adjusting block and the notch is 1 μm~200 μm.
One or more notch and respective numbers can be equipped in one embodiment, on one or more sides of the iron core
Adjusting block.
In one embodiment, the iron core of the mover slide unit can be for E shaped iron core and the coil winding wound is in the E
In the prominent branch of the centre of shaped iron core and the rail unit is I shaped iron core；Alternatively, the iron core of the mover slide unit can
For c-type iron core and the coil winding wound is on the middle part of the c-type iron core and the rail unit is I shaped iron core.
In one embodiment, iron core can be made of soft magnetic materials.
In one embodiment, rail unit can be by such as silicon steel or lamination silicon steel or the material with low remanent magnetism ability is processed
It is fabricated.
In one embodiment, the magnetic suspension guiding device may include multiple groups mover slide unit arranged in pairs, described more
Group mover slide unit is according to asymmetric topology structure, symmetrically circumferentially in the rail unit two sides.
In one embodiment, the cross section of the guide rail of the rail unit can be square shape, cross or I-shaped, described more
Group mover slide unit can be arranged in pairs on the opposite side of each cross section.
In one embodiment, the mover slide unit may also include gap measuring apparatus, and the gap measuring apparatus includes
The first gap measuring sensor and the second gap measuring sensor being set on the mover slide unit, first gap
Measurement sensor be used to measure between a mover slide unit and the iron core in a pair of mover slide unit away from
From and second gap measuring sensor for measuring this to another mover sliding block list in the mover slide unit
The distance between first and described iron core.
According to another aspect of the present invention, a kind of control method of magnetic suspension guiding device, the magnetic suspension are additionally provided
Guiding device includes mover slide unit and rail unit, and the mover slide unit is arranged in pairs in the rail unit
Two sides, the mover slide unit include iron core and coil windings, and the coil winding wound is on the iron core, the control
Method is used to control the adsorption capacity between the mover slide unit and the rail unit, which is characterized in that the controlling party
Method comprising steps of
Step 1: air gap adjusting device being set on the mover slide unit, wherein the air gap adjusting device is set to
The pre-position of the iron core, and in the predetermined position, the air gap adjusting device interruption is generated by the coil windings
The magnetic line of force at least part；
Step 2: the adsorption capacity is calculated by the following formula out:
Wherein, i10For the nominal current of winding, g10For in the magnetic circuit at the geometrically symmetric center of the magnetic suspension guiding device
Air gap and Δ g are the additional magnetic air gap that air gap adjusting device is adjusted.
In one embodiment, the g10It is calculated by following formula
Wherein, F0Static preload force between mover sliding block and guide rail is determined by design.
In one embodiment, the additional air gap Δ g is calculated by following formula
Wherein, M is the gross mass of moving loads on mover sliding block, and g is acceleration of gravity.
According to another aspect of the present invention, a kind of control system for magnetic suspension guiding device, the magnetic are additionally provided
Suspension guiding device includes mover slide unit and rail unit, and the mover slide unit is arranged in pairs in the guide rail list
The two sides of member, each pair of mover include the first mover slide unit and the second mover slide unit.The control system includes:
Position setting device, the position setting device is for setting what the mover slide unit suspended relative to the rail unit
Elemental height；Gap measuring sensor, the gap measuring sensor is for measuring the mover slide unit and the guide rail
Levitation gap height between unit；And control circuit, the control circuit and the position setting device and the gap
Measurement sensor communication connection, and be used for according to the position setting device and the obtained value of the gap measuring sensor,
Come expectation electric current needed for obtaining the mover slide unit.
In one embodiment, the control circuit may include the first summer, controller, preload force loader, the second summation
Device, third summer, the first non-linear compensator, the second non-linear compensator, the first current driver, the second current driver
And the 4th summer, wherein the input terminal of the output end of the position setting device and first summer communicates to connect,
The input terminal of the output end of first summer and the controller communicates to connect, the output end of the controller and described the
The communication connection of the input terminal of the input terminal of two summers and the third summer；The output end of the preload force loader and institute
State the input terminal communication connection of the input terminal and the third summer of the second summer；Second summer and the third
The communication connection of the input terminal of the output end of summer and the first non-linear compensator and the second linearity compensator；The clearance measurement
The input terminal of the input terminal of sensor and first non-linear compensator and the second non-linear compensator communicates to connect；Described
The output end of one non-linear compensator and second non-linear compensator respectively with first current driver and described
The input terminal of two current drivers communicates to connect；And the output of first current driver and second current driver
End is electrically connected with the first mover slide unit and the second mover slide unit respectively, for controlling first mover
The movement of slide unit and the second mover slide unit.
In one embodiment, the mover slide unit may include iron core and coil windings, and the coil winding wound is in institute
It states on iron core, wherein first current driver and second current driver are respectively the first mover slide unit
Coil windings and the second mover slide unit coil windings power supply.
In one embodiment, the gap measuring sensor may include the first gap being set on the mover slide unit
Measurement sensor and the second gap measuring sensor, first gap measuring sensor is for measuring a pair of mover sliding block
The distance between a mover slide unit and the iron core in unit and second gap measuring sensor are for surveying
This is measured to another mover slide unit and the distance between the iron core in the mover slide unit.
In one embodiment, the iron core of the mover slide unit can be for E shaped iron core and the coil winding wound is in the E
In the prominent branch of the centre of shaped iron core and the rail unit is I shaped iron core；Alternatively, the iron core of the mover slide unit can
For c-type iron core and the coil winding wound is on the middle part of the c-type iron core and the rail unit is I shaped iron core.
In one embodiment, iron core can be made of soft magnetic materials.
In one embodiment, the magnetic suspension guiding device may include multiple groups mover slide unit arranged in pairs, described more
Group mover slide unit is according to asymmetric topology structure, symmetrically circumferentially in the rail unit two sides.
In one embodiment, the cross section of the guide rail of the rail unit is square shape, cross or I-shaped, the multiple groups
Mover slide unit is arranged in pairs on the opposite side of each cross section.
In one embodiment, the mover slide unit may also include air gap adjusting device, wherein the air gap adjusting device
Be set to the pre-position of the iron core, and in the predetermined position, the air gap adjusting device interrupt by the coil around
At least part for the magnetic line of force that group generates.
In one embodiment, the air gap adjusting device may include the pre-position being set on the side of the iron core
Notch and adjusting block with the notches fit, the adjusting block can move to adjust the adjusting block along the notch
With the gap between the notch.
In one embodiment, the surface of the iron core can be equipped with support plate, and the adjusting block is movably mounted to described
In support plate and extend into the notch.
In one embodiment, the support plate is equipped with threaded hole, and the adjusting block is installed on the support plate by bolt
On, wherein the bolt and the threaded hole cooperate, to adjust the distance that the adjusting block extends into the notch.
In one embodiment, the support plate is equipped with positioning device, and the positioning device is used to carry out the adjusting block
Positioning.
According to another aspect of the invention, a kind of magnetic suspension guiding device, the magnetic suspension guiding device packet are additionally provided
Include above-mentioned control system.
According to another aspect of the invention, a kind of control method of magnetic suspension guiding device, the magnetic suspension are additionally provided
Guiding device includes mover slide unit and rail unit, and the mover slide unit is arranged in pairs in the rail unit
Two sides, each pair of mover include the first mover slide unit and the second mover slide unit, the control method comprising steps of
Step 1: the preload force of the sliding block of setting mover slide unit；
Step 2: the height set that setting mover slide unit suspends relative to rail unit；
Step 3: the clearance height between measurement mover slide unit and rail unit；
Step 4: being summed above-mentioned clearance height and above-mentioned height set to obtain a deviation；
Step 5: the deviation being handled to obtain control force output；
Step 6: being summed control force output and above-mentioned preload force to obtain desired output power；
Step 7: expectation electric current is obtained according to above-mentioned desired output power and above-mentioned clearance height；And
Step 8: mover slide unit is driven according to above-mentioned expectation electric current.
In one embodiment, the processing is carried out by PID controller, and the control force exports Gcs(s) by as follows
Formula calculates:
Wherein, KpFor controller gain, fiFor integration frequencies, fdFor differential-frequency, controller gain KpBy deviation ratio
Linear relationship is converted to control force,The cumulative departure of control deviation value is converted to linear static difference according to linear relationship to adjust
Power, 2 π fdControl deviation value is converted to linear damping power according to linear relationship by s differentiator.
In one embodiment, the calculation formula of the expectation electric current is as follows:
Wherein, i1It is expectation electric current, g1It is the gap between mover slide unit and rail unit, F1It is mover sliding block list
Adsorption capacity between member and rail unit, K1It is the electromagnetic constant of mover slide unit.
Advantageous effects of the invention:
(1) it proposes a kind of new magnetic gap regulating device, can manually or automatically adjust the magnetic resistance in magnetic circuit, into
The improvement of one step easily carries out hoverheight adjusting during heavily loaded guide rail adjustment, is particularly suitable for the scene of load variation；
(2) " E " type or " C " type electromagnet core structure proposed, can be as desired in the freedom of motion direction of guide rail
Periodic array expansion is carried out, can effectively promote the ability that magnetic suspended guide carries out heavily loaded suspension, and then promote non-athletic freedom
The anti-torsion ability of degree；
(3) nonlinear control techniques proposed actively adjust suspension dynamic stiffness and suspension air gap height, enable to suspend
Positioning kinematic system obtain low guide rail Static stiffness and higher dynamic response capability, can effectively deaden external vibration biography
Enter the resided in system of moving slide block.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the guide rail guiding device of traditional form.
Fig. 2 is the knot of " E " type magnetic suspension guiding device with air gap adjusting device of an embodiment according to the present invention
Structure schematic diagram.
Fig. 2A shows the structural schematic diagram of the air gap adjusting device of an embodiment according to the present invention.
Fig. 3 is array " E " type magnetic suspension guiding device with air gap adjusting device of an embodiment according to the present invention
Structural schematic diagram.
Fig. 4 is the control system block diagram of an embodiment " E " magnetic suspension guiding device according to the present invention.
Fig. 5 is the simulation calculated curve figure of the adsorption capacity of an embodiment " E " magnetic suspension guiding device according to the present invention.
Fig. 6 is the schematic layout pattern of " E " magnetic suspension guiding device according to another embodiment of the present invention.
Fig. 7 is the schematic layout pattern of " E " magnetic suspension guiding device according to still another embodiment of the invention.
Fig. 8 is the schematic layout pattern of " E " magnetic suspension guiding device according to still another embodiment of the invention.
Fig. 9 is " C " type magnetic suspension guiding device with air gap adjusting device according to another embodiment of the present invention
Structural schematic diagram.
Figure 10 is " C " type magnetic suspension guiding device with air gap adjusting device array of an embodiment according to the present invention
Structural schematic diagram.
Figure 11 is the schematic layout pattern of " C " magnetic suspension guiding device according to another embodiment of the present invention.
Figure 12 is the schematic layout pattern of " C " magnetic suspension guiding device according to still another embodiment of the invention.
Figure 13 is the schematic layout pattern of " C " magnetic suspension guiding device according to still another embodiment of the invention.
Specific embodiment
Presently preferred embodiments of the present invention is described in detail below with reference to attached drawing, it is of the invention to be clearer to understand
Objects, features and advantages.It should be understood that embodiment shown in the drawings does not limit the scope of the present invention, and only it is
Illustrate the connotation of technical solution of the present invention.
Fig. 2 shows the structural schematic diagrams of the magnetic suspension guiding device 200 of an embodiment according to the present invention.As shown in Fig. 2,
Magnetic suspension guiding device 200 includes rail unit 25, slide unit 201 and magnetic suspension control system (also referred to as active levitation
Control unit), wherein rail unit 25 includes the first I shaped iron core 26 and the 2nd I shaped iron core 36.Slide unit includes the first E type
Iron core winding 20 and the 2nd E shaped iron core winding 30.First E shaped iron core winding 20 is by the first E shaped iron core 21 and first coil winding
24 and first gap measuring sensor 22, air gap adjusting device 23 form.2nd E shaped iron core winding 30 is by the 2nd E shaped iron core
31 and second coil winding 34 and the second gap measuring sensor 32 composition.First gap measuring sensor 22 measures the first E
The distance between shaped iron core 21 and the first I shaped iron core 26.Second gap measuring sensor 32 measures the 2nd E shaped iron core 31 and second
The distance between I shaped iron core 36.Guiding device has 2 freedom of motion, and the first freedom of motion direction is X-direction, is directed toward
The long axis direction of rail unit 25, the second freedom degree direction is Y-direction, orthogonal just with the long axis direction of rail unit 25
It hands over, the third freedom of motion direction of guiding device is Z-direction, it and the first freedom of motion direction and the second freedom of motion
The equal perpendicular quadrature in direction is directed toward the 2nd E shaped iron core winding 30, far from the first E shaped iron core winding 20.Here, the first clearance measurement
Sensor and the second gap measuring sensor may, for example, be capacitance sensor, current vortex sensor or the measurement of proximity position
Sensor etc. measures 0~10mm of stroke range.
As shown in Figure 2, wherein the first E shaped iron core winding 20 is when coil is powered, electric current i wound coil flowing, according to the right side
Hand rule generates magnetic line of force access as shown in Figure 2 in the iron core of hub of a spool, and magnetic line of force access makes the first E shaped iron core
The generation adsorption capacity F1 of winding 20 and the first I shaped iron core 26 is directed toward along third freedom degree direction far from 26 table of the first I shaped iron core
Face direction；2nd E shaped iron core winding 30 is when coil is powered, electric current i wound coil flowing, according to the right-hand rule in hub of a spool
Iron core in generate magnetic line of force access as shown in Figure 2, magnetic line of force access makes the 2nd E shaped iron core winding 30 and the 2nd I type
The generation adsorption capacity F2 of iron core 36 is directed toward along third freedom degree direction far from direction 36 surface direction of the 2nd I shaped iron core；Power
Load gravity F on F1, F2 and sliding blockPreloadWhen in equilibrium state, sliding block stable suspersion is in 25 upper surface of guide rail.
FPreload=F1-F2
Power F (F1 or F2) shown in Fig. 2 is the magnetic by being generated between E type winding iron core and I shaped iron core by magnetic gap g
Power, magnetic attraction calculate following formula:
Wherein, μ0For air permeability (h/m)
ApFor the area (m2) of magnetic gap
G is magnetic gap (m)
I is electric current (A)
N is the coil turn on E shaped iron core；
K is electromagnetic constant
First E shaped iron core winding, 20 coil galvanization size is modulated supply by the current driver of 83a in Fig. 4,
2nd E shaped iron core winding, 30 coil galvanization size is modulated supply by the current driver of 83b in Fig. 4.
As shown in Fig. 2, a pair of EI iron core actuator group, equilibrant force description are as follows:
F1=F10+ΔF1
F2=F20-ΔF2
Wherein, F10And F20For bias force, Δ F1For the dynamic balancing force that the controller of the first E shaped iron core winding exports, Δ
F2The dynamic balancing force exported for the controller of the 2nd E shaped iron core winding.The nominal force F of each EI actuator10And F20Source respectively
In the nominal current i that actuator gives10And i20.The dynamic balancing force Δ F of each EI actuator output1With Δ F2Amplitude is equal,
Symbol is opposite.On theoretical place-centric line, Δ F1=Δ F2=0, FPreload=F10-F20。
Air gap adjusting device 23 is designed as a Wedge device, carries out position shifting along perpendicular to 21 surface of the first E shaped iron core
It is dynamic.Air gap adjusting device 23 includes adjusting block 231 and the notch 211 on iron core 21.Adjusting block can be moved relative to notch 211
It is dynamic, and then change the gap between the notch 211 on adjusting block 231 and iron core, and then can change loop air gap Δ g, in turn
Change the magnetic resistance of the magnetic circuit, and then change adsorption capacity between the first E shaped iron core 21 of sliding block and guide rail 25, and then can change the
Power between the adsorption capacity F1 of one E shaped iron core 21 and the adsorption capacity F2 of the 2nd E shaped iron core winding 30 is poor, and then can change sliding block
On load force (preload force) size.It is as follows that first E shaped iron core winding can be changed adsorption capacity calculating:
It is as follows that 2nd E shaped iron core winding can be changed adsorption capacity calculating:
Wherein, i10、i20For the nominal current that the actuator of the first and second E shaped iron cores inputs, g10、g20For in theoretical position
Magnetic air gap on center line is set, Δ g is the additional air gap that air gap adjusting device is adjusted, and Δ g minimum value is 0.
g10、g20It is calculated by following formula:
Wherein, F0Static preload force between mover sliding block and guide rail is determined by design.
Δ g is calculated by following formula:
Wherein, M is the gross mass of moving loads on mover sliding block, and g is acceleration of gravity.
In one embodiment, adjusting block 231 is designed as a sphenoid.Correspondingly, the notch on iron core is wedge-formed incision.
In another embodiment, the notch on iron core is conical notch.Correspondingly, adjusting block is cone.
In one embodiment, as shown in Figure 2 A, the surface of iron core is equipped with support plate 48.Adjusting block 23 is movably mounted to
In support plate, and the notch on iron core can be extended by bolt 49.
Specifically, adjusting block 23, which is fixedly connected with, adjusts bolt 49.Support plate 48 is equipped with threaded hole, to adjust bolt
Cooperate with threaded hole, adjusting block 53 is moved relative to support plate, and then adjusts adjusting block 23 and protrude into cutting on iron core
The depth of mouth, and then adjust the gap between the outer surface of adjusting block and the surface for forming notch.
It should be pointed out that the positioning of adjusting block on the supporting plate can be by known in the art or leaved for development any
Suitable positioning device is realized, as long as the positioning device can be after being moved to predetermined position for adjusting block, to adjusting block
It is positioned.
(not shown) in another embodiment, air gap adjusting device include the adjustment sheet for being affixed on iron core surface, and adjustment sheet by
Diamagnetic material is made.The structure setting of the adjustment sheet covers iron core surface at that can change its size, so as to adjust it
Area.
It should be understood that air gap adjusting device of the invention is primarily used to change the magnetic resistance of magnetic circuit, and then change sliding block
Adsorption capacity between unit and guide rail, and then can change between the adsorption capacity of the first slide unit and the second slide unit adsorption capacity
Power it is poor, or the equilibrant force size between sliding block gravity load.Under above-mentioned principle, air gap adjusting device can use any conjunction
Suitable structure.
Fig. 3 is array " E " the type magnetic suspension guide with air gap adjusting device of an embodiment according to the present invention to dress
The structural schematic diagram set.As shown in figure 3, array " E " the type magnetic suspension guiding device includes I shaped iron core 700, array " E "
Shaped iron core winding, gap measuring sensor 710 and air gap adjusting device 720.One as stator guiding track of I shaped iron core 700
Point.Array " E " shaped iron core winding 730 be used as Slipper comprising E shaped iron core array 730, coil windings 711, coil around
Group 712 and coil windings 713.The coil windings of array " E " shaped iron core winding can be 1 group, 2 groups, 3 groups, 4 groups, 5 groups, 6
Group, 7 groups, 8 groups, are extended with this and are analogized.Gap measuring sensor 710 measures between E shaped iron core array 730 and I shaped iron core 700
Distance.
Guiding device has 2 freedom of motion, and the first freedom of motion direction is X-direction, is directed toward I shaped iron core 700
Long axis direction, the second freedom degree direction is Y-direction, orthogonal orthogonal with the long axis direction of I shaped iron core 700, guiding device
Third freedom of motion direction is Z-direction, it with the first freedom of motion direction and the second freedom of motion direction it is vertical just
It hands over, is directed toward E shaped iron core around group pattern.
E shaped iron core array winding 711,712,713 is when coil is powered, electric current i wound coil flowing, according to the right-hand rule
Generate magnetic line of force access as shown in Figure 3 in the iron core of hub of a spool, magnetic line of force access make E shaped iron core winding 711,
712,713 with the generation adsorption capacity F of I shaped iron core 700, be directed toward along third freedom degree direction far from 700 surface side of I shaped iron core
To.
Array " E " type magnetic suspension guiding device with adjustable air gap device unilateral can be applied, can also be in I sections
The symmetrical two sides of core use the winding common combination application of the first and second arrays " E " shaped iron core simultaneously.Array " E " type magnetic suspension
Guiding device in unilateral side in application, the adsorption capacity F generated between EI can be contrary with the load gravity on sliding block, amplitude phase
With with balancing gravity, when the two is in equilibrium state, " E " type array iron core 730 is as Slipper stable suspersion in I shaped iron core
700 as guide rail hair upper surface.
When work, the winding common combination application of the first and second arrays " E " shaped iron core, the 2nd E shaped iron core is around group pattern
It is opposite with the first E shaped iron core winding array direction.When coil is powered, the flowing of electric current i wound coil is online according to the right-hand rule
Magnetic line of force access as shown in Figure 3, the first and second array of magnetic line of force access " E " shaped iron core are generated in the iron core of circle center
Winding with generation the adsorption capacity F1 and F2 of I shaped iron core 700, is directed toward along third freedom degree direction far from 700 table of I shaped iron core respectively
The direction in face.When load gravity FPreload on power F1, F2 and sliding block is in equilibrium state, sliding block stable suspersion is in I sections
Guide rail upper surface where core 700.
First E shaped iron core is driven around 730 coil galvanization size of group pattern by the electric current of the first EI device 84a in Fig. 4
Device 83a is modulated supply, the 2nd E shaped iron core winding array midline circle galvanization size by the 2nd EI device 84b in Fig. 4 electricity
Stream driver 83b is modulated supply.
Air gap adjusting device 720 can change the magnetic resistance of the magnetic circuit, and then change sliding block E shaped iron core around group pattern 730
The adsorption capacity between I shaped iron core 700, so can change E shaped iron core around group pattern 730 adsorption capacity F and the 2nd E shaped iron core around
Power between group pattern adsorption capacity is poor, or the equilibrant force size between sliding block gravity load.
Fig. 4 shows the control system block diagram of the magnetic suspension guiding device of an embodiment according to the present invention.As shown in figure 4,
The control system includes position setting device 60, summer 80, controller 81, preload force loader 88, summer 90, summer
89, non-linear compensator 82a, 82b, current driver 83a, 83b, summer 86 and gap measuring sensor module 91.It should
Control system is mainly used for controlling the first mover slide unit 84a and the second mover slide unit 84b.Here, position setting dress
Set the height to suspend for setting slide unit relative to rail unit.This highly can be presetting when leaving the factory.Clearance measurement
Sensor module 91 includes above-mentioned gap measuring sensor 22 and 32.Controller 81 is common PID controller, for passing through
Gain amplification and tuning obtain control force output.Summer 89, summer 90, non-linear compensator 82a, 82b and electric current drive
Dynamic device 83a, 83b can use any suitable device known in the art, as long as it is able to achieve function described below.
The output end of preload force loader 88 and the input terminal of summer 89 and 90 communicate to connect.Position setting device 60
The input terminal of input terminal and summer 80 communicates to connect.The output end of summer 80 and the input terminal of controller 81 communicate to connect.
The output end of controller 81 and the input terminal of summer 89 and 90 communicate to connect.The output end of summer 89 and 90 respectively with it is non-thread
Property compensator 82a and 82b input terminal communication connection.Meanwhile the output end of gap measuring sensor module 91 and non-linear benefit
Repay the input terminal communication connection of device 82a and 82b.The output end of non-linear compensator 82a and 82b respectively with current driver 83a
It is communicated to connect with 83b.Current driver 83a and 83b are electrically connected with the first mover slide unit and the second mover slide unit respectively
It connects, for controlling the movement of the first mover slide unit and the second mover slide unit.
When work, above-mentioned FpreloadSliding block gravity preload force setting value is written in preload force loader 88, mover sliding block list
In the height set writing position setting device 60 that first opposite rail unit suspends (pre-set value when factory).Clearance measurement passes
Sensor 22,32 measure between mover slide unit and rail unit levitation gap height (i.e. between E iron core and I iron core away from
From), measurement obtains position and height set and deviation is calculated by summer 80, inputs to controller 81, passes through
Gain amplification and tuning obtain control force output.Control force output inputs to summer 89 with preload force setting value jointly and asks
With device 90, calculate separately to obtain the first mover slide unit 84a and the second mover slide unit 84b the first expectation power output and
Second expectation power output.First expectation power output inputs to the first non-linear compensator 82a, and the second expectation power output inputs to the
Two non-linear compensator 82b.Meanwhile first E iron core and I iron core on mover slide unit 84a and the second mover slide unit 84b
The distance between by gap measuring sensor 22,32 measurement inputed to non-linear compensator 83a and 83b respectively, respectively
Expectation electric current required for the first mover slide unit 84a and the second mover slide unit 84b is calculated, calculation formula is as follows:
Expectation electric current required for first mover slide unit 84a and the second mover slide unit 84b inputs to electricity respectively
Flow driver 83a and 83b.First mover slide unit 84a and the second mover slide unit 84b are in current driver 83a and 83b
Under the current excitation of offer, practical driving force collective effect is exported on magnetic suspended guide 85.Two driving forces pass through summer
86 formed power vector superposed and, so that sliding block stable suspersion is on guide rail.
As shown in figure 5, changing in air gap (Gap) adjustable range from 200 μm~500 μm under given typical set-up parameter
When, when being passed through electric current (Current) 0A~5A variation in E type coil, the absorption between E type coil sliding block and I shaped iron core guide rail
Power (Force) can be from 0N~7600N, quickly according to exponential variation.It carries out gravity by a pair of of EI symmetric configuration to preload, energy
It is enough that heavy load carrying capacity is realized with lower energy consumption and sliding block volume.
The control method of an embodiment according to the present invention, the magnetic suspension guiding device of the application may include following steps:
Step 1: the preload force of the sliding block of setting mover slide unit；
Step 2: the height set that setting mover slide unit suspends relative to rail unit；
Step 3: the clearance height between measurement mover slide unit and rail unit；
Step 4: being summed above-mentioned clearance height and above-mentioned height set to obtain a deviation；
Step 5: the deviation being handled to obtain control force output；
Step 6: being summed control force output and above-mentioned preload force to obtain desired output power；
Step 7: expectation electric current is obtained according to above-mentioned desired output power and above-mentioned clearance height；And
Step 8: mover slide unit is driven according to above-mentioned expectation electric current.
Wherein, step 3 is carried out by the gap measuring sensor being set on mover slide unit.Step 4 pass through by
Above-mentioned clearance height and above-mentioned height set input summer and are handled to obtain.Step 5 is by inputting deviation
PID controller carries out.Step 6 is carried out by summer.Step 7 is by inputting desired output power and above-mentioned clearance height
Corresponding non-linear compensator carries out.Step 8 is by by above-mentioned expectation electric current input current driver, and by current driver
Mover slide unit is driven to carry out.
In one embodiment, in step 5, the processing is carried out by typical PID controller.The processing includes controller ratio
Example gain, controller integral gain and the controller differential gain, control force Gcs(s) it is calculated by following formula:
Wherein, KpFor controller gain, fiFor integration frequencies, fdFor differential-frequency, controller gain KpBy deviation ratio
Linear relationship is converted to control force,The cumulative departure of control deviation value is converted to linear static difference according to linear relationship to adjust
Power, 2 π fdControl deviation value is converted to linear damping power according to linear relationship by s differentiator.
Fig. 6 is the schematic layout pattern of " E " magnetic suspension guiding device according to another embodiment of the present invention.The present embodiment with
Above-described embodiment is essentially identical, be in place of main difference the mover Slipper of the present embodiment have 4 E sections core coils around
Group is distributed in the surrounding of guide rail, including E shaped iron core coil windings 1001, E shaped iron core coil windings 1002, E shaped iron core according to 90 °
Coil windings 1003, E shaped iron core coil windings 1004.Rail sections are built into the iron core guide rail of rectangular-ambulatory-plane by 4 I shaped iron cores
1000.Sliding block can make big stroke in the first freedom degree direction along guide rail as movable part and move, along second or third from
Make Bit Shift compensation adjustment by spending direction.First freedom of motion direction is X-direction, is directed toward the long axis side of rail unit 1000
To, the second freedom of motion direction is Y-direction, it is orthogonal orthogonal with the long axis direction of rail unit 1000, guiding device
Third freedom degree direction is Z-direction, it and the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction refer to
To sliding block 1001,1002,1003,1004.Wherein, the edge on rail unit 1000 of mover sliding block 1001,1002,1003,1004
The first freedom of motion direction have the function of free movement and/or sliding block 1001,1002,1003,1004 in rail unit
With micro-displacement motor function or there is high rigidity constraint along second or third freedom of motion direction on 1000.
Wherein, the structure of mover sliding block 1001,1002,1003,1004 configures on rail unit 1000 along the first fortune
Dynamic freedom degree direction can according to 2 groups, 3 groups, 4 groups, and so on carry out expansion configuration.
The structure and its control mode and working principle of the mover slide unit of the present embodiment are same as the previously described embodiments,
This is no longer described in detail.
Fig. 7 is the schematic layout pattern of " E " magnetic suspension guiding device according to still another embodiment of the invention.As shown in fig. 7,
The magnetic suspension guiding device of the present embodiment includes mover slide unit and rail unit 2000, and wherein rail unit 2000 is by 1
Cross guide rail is constituted, and each spider constitutes I shaped iron core structure, has one group of pairs of E in each arm branch of cross guide rail
Shaped iron core coil windings (i.e. mover slide unit), total 4 groups of E shaped iron core coil windings are distributed in the four of guide rail according to 90 °
Week, including E shaped iron core coil windings to 2001,2002, E shaped iron core coil windings to 2003,2004, E shaped iron core coil windings
To 2005,2006 and E shaped iron core coil windings to 2007,2008.Mover slide unit can be along guide rail as movable part
Make big stroke movement in the first freedom degree direction, makees bit shift compensation adjustment along second or third freedom degree direction.First movement
Freedom degree direction is X-direction, is directed toward the long axis direction of rail unit 2000, the second freedom of motion direction is Y-direction, with guide rail
The long axis direction of unit 2000 is orthogonal orthogonal, and the third freedom degree direction of guiding device is Z-direction, it is moved certainly with first
By degree direction and the second equal perpendicular quadrature in freedom of motion direction, be directed toward sliding block 2001,2002,2003,2004,2005,2006,
2007 and 2008.Wherein, sliding block 2001,2002,2003,2004,2005,2006,2007 and 2008 is on rail unit 2000
Have the function of free movement along the first freedom of motion direction, with or sliding block 2001,2002,2003,2004,2005,2006,
2007 and 2008 have micro-displacement motor function or tool along second or third freedom of motion direction on rail unit 2000
There is high rigidity constraint.
Wherein, the structure of mover sliding block 2001,2002,2003,2004,2005,2006,2007 and 2008 is configured in guide rail
On unit 2000 along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, and so on carry out expansion configuration.
The structure and its control mode and working principle of the mover slide unit of the present embodiment are same as the previously described embodiments,
This is no longer described in detail.
Fig. 8 is the schematic layout pattern of " E " magnetic suspension guiding device according to still another embodiment of the invention.As shown in figure 8,
Magnetic suspension guiding device includes mover sliding block and rail unit 3000, and wherein rail unit 3000 is made of 1 I-shaped guide rail,
The beam of each I-shaped constitutes I shaped iron core structure, have in each arm branch of I-beam guide rail one group of pairs of E sections core coil around
Group, total 6 groups of E shaped iron core coil windings are distributed in the surrounding of guide rail according to 90 °, including E shaped iron core coil windings to 3001,
For 3002, E shaped iron core coil windings to 3003,3004, E shaped iron core coil windings to 3005,3006, sliding block can as movable part
Make big stroke in the first freedom degree direction along guide rail to move, makees bit shift compensation adjustment along second or third freedom degree direction.
First freedom of motion direction is X-direction, is directed toward the long axis direction of rail unit 3000, and the second freedom of motion direction is the side Y
To, orthogonal orthogonal with the long axis direction of rail unit 3000, the third freedom degree direction of guiding device is Z-direction, it with
First freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction, be directed toward mover sliding block 3001,3002,3003,
3004,3005 and 3006.Wherein, the edge on rail unit 3000 of mover sliding block 3001,3002,3003,3004,3005 and 3006
The first freedom of motion direction have the function of free movement, with or mover sliding block 3001,3002,3003,3004,3005 and
3006 with micro-displacement motor function or have Gao Gang along second or third freedom of motion direction on rail unit 3000
Property constraint.
Wherein, the structure of mover sliding block 3001,3002,3003,3004,3005 and 3006 configures on rail unit 3000
Along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, and so on carry out expansion configuration.The mover of the present embodiment is sliding
The structure and its control mode of module unit are same as the previously described embodiments with working principle, and this will not be detailed here.
Fig. 9-13 shows the structural schematic diagram and schematic layout pattern of " C " magnetic suspension guiding device according to the present invention.Fig. 9-
It is the shape of iron core in place of magnetic suspension guiding device shown in 13 and the main difference of embodiment shown in Fig. 1-8.Specifically,
In embodiment shown in Fig. 1-8, iron core 21 is E shape, and the iron core of embodiment shown in Fig. 9-13 is C-shaped.
As shown in figure 9, magnetic suspension guiding device 300 includes rail unit 25, slide unit 201 and magnetic suspension control system
It unites (also referred to as active levitation control unit), wherein rail unit 25 includes the first I shaped iron core 26 and the 2nd I shaped iron core 36.It is sliding
Module unit includes the first c-type iron core winding 50 and the second c-type iron core winding 60.First c-type iron core winding 50 is by the first c-type iron core
51 and first coil winding 54 and the first gap measuring sensor 52, air gap adjusting device 53 form, wherein air gap adjusts dress
Set 53 identical as air gap adjusting device 23 shown in Fig. 2, this will not be detailed here.Second c-type iron core winding 60 is by the second c-type iron core
61 and second coil winding 64 and the second gap measuring sensor 62 composition.First gap measuring sensor 52 measures the first C
The distance between shaped iron core 51 and the first I shaped iron core 26.Second gap measuring sensor 62 measures the second c-type iron core 61 and second
The distance between I shaped iron core 36.Guiding device has 2 freedom of motion, and the first freedom of motion direction is X-direction, is directed toward
The long axis direction of rail unit 25, the second freedom degree direction is Y-direction, orthogonal just with the long axis direction of rail unit 25
It hands over, the third freedom of motion direction of guiding device is Z-direction, it and the first freedom of motion direction and the second freedom of motion
The equal perpendicular quadrature in direction is directed toward the second c-type iron core winding 60, far from the first c-type iron core winding 50.Here, the first clearance measurement
Sensor and the second gap measuring sensor may, for example, be capacitance sensor, current vortex sensor or the measurement of proximity position
Sensor etc. measures 0~10mm of stroke range.The magnetic suspension guiding device 300 and its air gap adjusting device of the present embodiment and
The working method of gap measurement sensor is identical as embodiment illustrated in fig. 2, and this will not be detailed here.
Similarly with Fig. 3, the magnetic suspension guiding device of the present embodiment may also comprise array " C " type magnetic suspension guiding device
Structural schematic diagram.As shown in Figure 10, which includes I shaped iron core 620, array " C " type
Iron core winding, gap measuring sensor 610 and air gap adjusting device 640, wherein air gap adjusting device and air gap shown in Fig. 2
Regulating device is identical, and this will not be detailed here.The a part of I shaped iron core 620 as stator guiding track.Array " C " shaped iron core winding
730 are used as Slipper comprising c-type iron core array 630, coil windings 611, coil windings 612, coil windings 613 and line
Enclose winding 614, wherein coil windings 611, coil windings 612, coil windings 613 and coil windings 614 respectively with corresponding iron
Core section constitutes iron core winding 621,622,623 and 624.The coil windings of array " C " shaped iron core winding can be 1 group, 2 groups, 3
Group, 4 groups, 5 groups, 6 groups, 7 groups, 8 groups, are extended with this and are analogized.Gap measuring sensor 610 measures c-type iron core array 630 and I type
The distance between iron core 620.
Figure 11 is the schematic layout pattern of " C " magnetic suspension guiding device according to another embodiment of the present invention.The present embodiment
Essentially identical with embodiment shown in fig. 6, as shown in Figure 10, mover Slipper has 4 c-type iron-core coil windings according to 90 °
It is distributed in the surrounding of guide rail, including c-type iron-core coil winding 4001, c-type iron-core coil winding 4002, c-type iron-core coil winding
4003, c-type iron-core coil winding 4004.Rail sections are built into the iron core guide rail 4000 of rectangular-ambulatory-plane by 4 I shaped iron cores.Sliding block
It can make big stroke in the first freedom degree direction along guide rail as movable part to move, make along second or third freedom degree direction
Bit Shift compensation adjustment.First freedom of motion direction is X-direction, is directed toward the long axis direction of rail unit 4000, the second movement
Freedom degree direction is Y-direction, orthogonal orthogonal with the long axis direction of rail unit 4000, the third freedom degree side of guiding device
To for Z-direction, it and the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction, be directed toward sliding block 4001,
4002,4003,4004.Wherein, mover sliding block 4001,4002,4003,4004 moves certainly on rail unit 4000 along first
Have the function of free movement and/or sliding block 4001,4002,4003,4004 on rail unit 4000 along second by spending direction
Or third freedom of motion direction with micro-displacement motor function or has high rigidity constraint.
Wherein, the structure of mover sliding block 4001,4002,4003,4004 configures on rail unit 4000 along the first fortune
Dynamic freedom degree direction can according to 2 groups, 3 groups, 4 groups, and so on carry out expansion configuration.
The structure and its control mode and working principle of the mover slide unit of the present embodiment are same as the previously described embodiments,
This is no longer described in detail.
Figure 12 is the schematic layout pattern of " C " magnetic suspension guiding device according to still another embodiment of the invention.The present embodiment
Essentially identical with embodiment shown in Fig. 7, as shown in figure 11, magnetic suspension guiding device includes mover slide unit and rail unit
5000, wherein rail unit 5000 is made of 1 cross guide rail, and each spider constitutes I shaped iron core structure, cross guide rail it is every
There is one group of pairs of c-type iron-core coil winding (i.e. mover slide unit) in Ge Bei branch, amounts to 4 groups of c-type iron-core coil
Winding is distributed in the surrounding of guide rail according to 90 °, including c-type iron-core coil winding is to 5001,5002, c-type iron-core coil winding pair
5003,5004, c-type iron-core coil winding is to 5005,5006 and c-type iron-core coil winding to 5007,5008.Mover sliding block list
Member can make big stroke in the first freedom degree direction along guide rail as movable part and move, along second or third freedom degree direction
Make bit shift compensation adjustment.First freedom of motion direction is X-direction, is directed toward the long axis direction of rail unit 5000, the second movement
Freedom degree direction is Y-direction, orthogonal orthogonal with the long axis direction of rail unit 5000, the third freedom degree side of guiding device
To for Z-direction, it and the first freedom of motion direction and the second equal perpendicular quadrature in freedom of motion direction, be directed toward sliding block 5001,
5002,5003,5004,5005,5006,5007 and 5008.Wherein, sliding block 5001,5002,5003,5004,5005,5006,
5007 and 5008 have the function of free movement along the first freedom of motion direction on rail unit 5000, with or sliding block
5001, it 5002,5003,5004,5005,5006,5007 and 5008 is moved certainly on rail unit 5000 along second or third
With micro-displacement motor function or there is high rigidity constraint by degree direction.
Wherein, the structure of mover sliding block 5001,5002,5003,5004,5005,5006,5007 and 5008 is configured in guide rail
On unit 5000 along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, and so on carry out expansion configuration.
The structure and its control mode and working principle of the mover slide unit of the present embodiment are same as the previously described embodiments,
This is no longer described in detail.
Figure 13 is the schematic layout pattern of " C " magnetic suspension guiding device according to still another embodiment of the invention.The present embodiment
Essentially identical with embodiment shown in Fig. 8, as shown in figure 13, magnetic suspension guiding device includes mover sliding block and rail unit 6000
Part, wherein rail unit 6000 is made of 1 I-shaped guide rail, and the beam of each I-shaped constitutes I shaped iron core structure, I-beam guide rail
Each arm branch on have one group of pairs of c-type iron-core coil winding, amount to 6 groups of c-type iron-core coil winding according to 90 ° points
Cloth is in the surrounding of guide rail, including c-type iron-core coil winding is to 6001,6002, and c-type iron-core coil winding is to 6003,6004, c-type
To 6005,6006, sliding block can make big stroke in the first freedom degree direction along guide rail as movable part and move iron-core coil winding
It is dynamic, make bit shift compensation adjustment along second or third freedom degree direction.First freedom of motion direction is X-direction, is directed toward guide rail
The long axis direction of unit 6000, the second freedom of motion direction is Y-direction, orthogonal with the long axis direction of rail unit 6000
Orthogonal, the third freedom degree direction of guiding device is Z-direction, it and the first freedom of motion direction and the second freedom of motion side
To equal perpendicular quadrature, it is directed toward mover sliding block 6001,6002,6003,6004,6005 and 6006.Wherein, mover sliding block 6001,
6002,6003,6004,6005 and 6006 have free movement function along the first freedom of motion direction on rail unit 6000
Can, with or mover sliding block 6001,6002,6003,6004,6005 and 6006 on rail unit 6000 along second or third transport
Dynamic freedom degree direction is with micro-displacement motor function or has high rigidity constraint.
Wherein, the structure of mover sliding block 6001,6002,6003,6004,6005 and 6006 configures on rail unit 6000
Along the first freedom of motion direction can according to 2 groups, 3 groups, 4 groups, and so on carry out expansion configuration.The mover of the present embodiment is sliding
The structure and its control mode of module unit are same as the previously described embodiments with working principle, and this will not be detailed here.
The magnetic suspension guiding device of the application has air gap adjusting device, and air gap adjusting device can increased or decrease " E "
Magnetic circuit reluctance size in shaped iron core, and then change the adsorption capacity between mover slide unit and rail unit, and then can be advantageously
Manually adjust relative gap position between mover slide unit and rail unit, with or the payload size of adjustable guide rail in turn.
Especially in rail unit assembling stage, movement mechanism adjustment easily can be carried out using air gap adjusting device.
Further, the magnetic suspension guiding device of the application is Low rigidity, heavy load in suspension direction, while outstanding using active
Floating control unit has the active of highly-responsive, is particularly suitable for high-accuracy sports platform structure of guide-rail, can reduce non-athletic side
To conduct vibrations enter in mover.
The magnetic suspension guiding device of the application can provide stable basic buoyancy under fully loaded transportation condition and biggish gap is asked
Topic.The mover slide unit and rail unit of the application has the air gap (i.e. gap) higher than the air gap of air-float guide rail.Typically,
The air gap of air-float guide rail is 5um~20um, and the maglev air gap height of the application is 10um~2mm.It, can for different counterweights
To change buoyancy in a wider scope by adjusting inside magnetic path structure, achieve the purpose that adjustment gap.Meanwhile it solving in weight
Adjustment problem in the case of load.The present invention is suitable for the application of the motion positions platform of high speed High acceleration and high precision.
Presently preferred embodiments of the present invention has already been described in detail above, it is understood that having read of the invention above-mentioned say
After awarding content, those skilled in the art can make various modifications or changes to the present invention.Such equivalent forms equally fall within this
Apply for the appended claims limited range.
Claims (16)
1. a kind of magnetic suspension guiding device, including mover slide unit and rail unit, mover slide unit cloth in couples
Be placed in the two sides of the rail unit, the mover slide unit includes iron core and coil windings, the coil winding wound in
On the iron core, which is characterized in that the mover slide unit further comprises air gap adjusting device, wherein the air gap is adjusted
Device is set to the pre-position of the iron core, and in the predetermined position, the air gap adjusting device is interrupted by the line
Enclose at least part for the magnetic line of force that winding generates.
2. magnetic suspension guiding device according to claim 1, which is characterized in that the air gap adjusting device includes being set to
The notch of pre-position on the side of the iron core and adjusting block with the notches fit, the adjusting block being capable of edge
The notch is mobile to adjust the gap between the adjusting block and the notch.
3. magnetic suspension guiding device according to claim 2, which is characterized in that the surface of the iron core is equipped with support
Plate, the adjusting block are movably mounted in the support plate and extend into the notch.
4. magnetic suspension guiding device according to claim 3, which is characterized in that the support plate is equipped with threaded hole, institute
It states adjusting block to be installed in the support plate by bolt, wherein the bolt and the threaded hole cooperate, to adjust the tune
Locking nub extends into the distance of the notch.
5. magnetic suspension guiding device according to claim 3, which is characterized in that the support plate is equipped with positioning device,
The positioning device is for positioning the adjusting block.
6. magnetic suspension guiding device according to claim 2, which is characterized in that the notch is conical notch, and
The adjusting block is cone；Alternatively, the notch is wedge-formed incision and the adjusting block is sphenoid.
7. magnetic suspension guiding device according to claim 2, which is characterized in that between the adjusting block and the notch
Adjustable clearance size is 1 μm~200 μm.
8. magnetic suspension guiding device according to claim 2, which is characterized in that on one or more sides of the iron core
Adjusting block equipped with one or more notch and respective numbers.
9. magnetic suspension guiding device according to claim 1, which is characterized in that the iron core of the mover slide unit is E
Shaped iron core and the coil winding wound are in the prominent branch of the centre of the E shaped iron core and the rail unit is I sections
Core；Alternatively, the iron core of the mover slide unit is c-type iron core and the coil winding wound is in the middle part of the c-type iron core
On and the rail unit be I shaped iron core.
10. magnetic suspension guiding device according to claim 1, which is characterized in that the iron core is made of soft magnetic materials.
11. magnetic suspension guiding device according to claim 1, which is characterized in that the magnetic suspension guiding device includes more
Group mover slide unit arranged in pairs, the multiple groups mover slide unit according to asymmetric topology structure, symmetrically circumferentially in
The rail unit two sides.
12. magnetic suspension guiding device according to claim 11, which is characterized in that the guide rail of the rail unit it is transversal
Face is square shape, cross or I-shaped, and the multiple groups mover slide unit is arranged in pairs on the opposite side of each cross section.
13. magnetic suspension guiding device according to claim 1, which is characterized in that between the mover slide unit further includes
Gap measuring device, the gap measuring apparatus include the first gap measuring sensor for being set on the mover slide unit and
Second gap measuring sensor, first gap measuring sensor are used to measure one in a pair of mover slide unit
The distance between mover slide unit and the iron core and second gap measuring sensor are for measuring this to described dynamic
The distance between another mover slide unit and the iron core in sub- slide unit.
14. a kind of control method of magnetic suspension guiding device, the magnetic suspension guiding device include mover slide unit and guide rail
Unit, the mover slide unit are arranged in pairs in the two sides of the rail unit, and the mover slide unit includes iron core
And coil windings, the coil winding wound is on the iron core, and the control method is for controlling the mover slide unit
With the adsorption capacity between the rail unit, which is characterized in that the control method comprising steps of
Step 1: air gap adjusting device is set on the mover slide unit, wherein the air gap adjusting device be set to it is described
The pre-position of iron core, and in the predetermined position, the air gap adjusting device interrupts the magnetic generated by the coil windings
At least part of the line of force；
Step 2: the adsorption capacity is calculated by the following formula out:
Wherein, i10For the nominal current of winding, g10For in the magnetic air gap at the geometrically symmetric center of the magnetic suspension guiding device,
And Δ g is the additional magnetic air gap that air gap adjusting device is adjusted, K1It is the electromagnetic constant of the mover slide unit.
15. control method according to claim 14, which is characterized in that the g10It is calculated by following formula
Wherein, F0Static preload force between mover sliding block and guide rail is determined by design.
16. control method according to claim 14, which is characterized in that the additional magnetic air gap Δ g is by following formula
It is calculated
Wherein, M is the gross mass of moving loads on mover sliding block, and g is acceleration of gravity.
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| CN108964521A (en) * | 2018-07-18 | 2018-12-07 | 南京航空航天大学 | A kind of the inclination external magnetic field driving apparatus and method of Small-scale Space bend pipe |
| CN109067254A (en) * | 2018-07-18 | 2018-12-21 | 南京航空航天大学 | A kind of the plane external magnetic field driving apparatus and method of Small-scale Space pipeline |
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| CN113922546B (en) * | 2021-10-08 | 2022-08-05 | 复旦大学 | Differential reluctance motor device |
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