CN107299323A - Magnetic drives large area evaporation coating machine - Google Patents
Magnetic drives large area evaporation coating machine Download PDFInfo
- Publication number
- CN107299323A CN107299323A CN201710741048.1A CN201710741048A CN107299323A CN 107299323 A CN107299323 A CN 107299323A CN 201710741048 A CN201710741048 A CN 201710741048A CN 107299323 A CN107299323 A CN 107299323A
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- China
- Prior art keywords
- vacuum chamber
- large area
- coating machine
- rail plate
- evaporation coating
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of magnetic drives large area evaporation coating machine, including vacuum chamber, evaporation source is set in vacuum chamber, vacuum chamber side wall is provided with magnetic drive device, the magnetic drive device includes driving block, outer rail plate, external magnet, interior rail plate, internal magnet, chip bench, the external magnet, internal magnet magnetic is opposite, the driving block, outer rail plate, external magnet is respectively positioned on outside the vacuum chamber, the external magnet is fixed on the driving block, the driving block can be slided in outer rail plate described in pushing meanss effect lower edge, the interior rail plate, internal magnet, chip bench is respectively positioned in the vacuum chamber, the chip bench is fixed on the internal magnet, the internal magnet can be slided in the presence of the external magnet on the interior rail plate.Magnetic drives large area evaporation coating machine of the present invention, stabilization of equipment performance is greatly improved, maintenance cost reduction, and large area exemplar plated film is evenly.
Description
Technical field
The present invention relates to a kind of coating machine, the large area evaporation coating machine of more particularly to a kind of magnetic drives.
Background technology
Large area exemplar plated film generally uses vacuum evaporating coating machine, is traditionally used for the vacuum evaporation coating of large area exemplar
Film machine uses magnetic fluid, gear drive, and engaged gears position therein is difficult to adjust, and the sealing of vacuum chamber
Difference, the inside and outside transmission tradition of vacuum chamber easily leaks air, interim card, the problems such as be driven not smooth, equipment stabilization of equipment performance is poor, maintenance
Cost is high, and large area exemplar plated film is uneven.
The content of the invention
It is an object of the invention to provide a kind of magnetic drives large area evaporation coating machine, exist to solve above-mentioned prior art
The problem of, its stabilization of equipment performance is greatly improved, maintenance cost reduction, and large area exemplar plated film is evenly.
To achieve the above object, the invention provides following scheme：A kind of magnetic drives large area evaporation coating of the present invention
Evaporation source is set in machine, including vacuum chamber, vacuum chamber, and vacuum chamber side wall is provided with magnetic drive device, described
Magnetic drive device includes driving block, outer rail plate, external magnet, interior rail plate, internal magnet, chip bench, the outer magnetic
Iron, internal magnet magnetic are on the contrary, the driving block, outer rail plate, external magnet are respectively positioned on outside the vacuum chamber, the outer magnetic
Ferropexy is on the driving block, and the driving block can be slided in outer rail plate described in pushing meanss effect lower edge, institute
State interior rail plate, internal magnet, chip bench to be respectively positioned in the vacuum chamber, the chip bench is fixed on the internal magnet,
The internal magnet can be slided in the presence of the external magnet on the interior rail plate.
Magnetic drives large area evaporation coating machine of the present invention, wherein, the pushing meanss include turn-screw, electric rotating
Mounting bracket is provided with machine, vacuum chamber side wall, described turn-screw one end is arranged at the installation branch by bearing
On frame, the electric rotating machine, which is installed on the wall of the vacuum chamber side, drives turn-screw rotation, and the driving block screw thread connects
It is connected on the turn-screw.
Magnetic drives large area evaporation coating machine of the present invention, wherein, in addition to pumped vacuum systems, the pumped vacuum systems position
Connected in outside the vacuum chamber and with the vacuum chamber inner chamber.
Magnetic drives large area evaporation coating machine of the present invention, wherein, in addition to aerating device, the aerating device is positioned at institute
State vacuum chamber it is outer and with the vacuum chamber inner chamber UNICOM.
Magnetic drives large area evaporation coating machine of the present invention, wherein, in addition to film thickness detecting device, the thickness detection dress
Install and be placed in the vacuum chamber.
Magnetic drives large area evaporation coating machine of the present invention, wherein, it is provided with observation window on the wall of the vacuum chamber side.
Magnetic drives large area evaporation coating machine of the present invention, wherein, vacuum chamber side wall is provided with lighting device.
The present invention achieves following technique effect relative to prior art：Evaporated and plated due to magnetic drives large area of the present invention
The vacuum chamber of film machine be provided with magnetic drive device, magnetic drive device include driving block, outer rail plate, external magnet,
Interior rail plate, internal magnet, chip bench, external magnet, internal magnet magnetic are on the contrary, driving block, outer rail plate, external magnet are located at
Outside vacuum chamber, interior rail plate, internal magnet, chip bench are respectively positioned in vacuum chamber, and chip bench is fixed on internal magnet, interior magnetic
Iron can be slided in the presence of external magnet on rail plate, be realized straight in the Linear transmission to vacuum chamber outside vacuum chamber
Line is driven, and reaches vacuum chamber without the sealed purpose of perforate, the problems such as being not susceptible to gas leakage, interim card, be driven not smooth, and reduction is set
Standby maintenance cost, increases stabilization of equipment performance, and make large area exemplar plated film evenly in the case of evaporation source is less.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to institute in embodiment
The accompanying drawing needed to use is briefly described, it should be apparent that, drawings in the following description are only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1 is the general structure schematic diagram of magnetic drives large area evaporation coating machine of the present invention；
Fig. 2 is the structural representation of magnetic drive device in magnetic drives large area evaporation coating machine of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
In order to facilitate the understanding of the purposes, features and advantages of the present invention, it is below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is further detailed explanation.
As shown in figure 1, magnetic drives large area evaporation coating machine of the present invention, including vacuum chamber 11, in vacuum chamber 11
Evaporation source 19 is set, and vacuum chamber 11 is outer to set pumped vacuum systems 14, and pumped vacuum systems 14 is connected with the inner chamber of vacuum chamber 11, very
The side wall of plenum chamber 11 be provided with magnetic drive device 12, magnetic drive device 12 include driving block 123, outer rail plate 124,
External magnet 125, interior rail plate 120, internal magnet 126, chip bench 127, external magnet 125, the magnetic of internal magnet 126 are on the contrary, transmission
Sliding block 123, outer rail plate 124, external magnet 125 are respectively positioned on outside vacuum chamber 11, and external magnet 125 is fixed on by carbon steel backboard
On driving block 123, driving block 123 rail plate 124 can horizontally slip outside pushing meanss effect lower edge, interior rail plate
120th, internal magnet 126, chip bench 127 are respectively positioned in vacuum chamber 11, and the upper end of internal magnet 126 is arranged at interior cunning by carbon steel backboard
Dynamic guide rail 120, lower end connection chip bench 127, chip bench 127 are used to place large area exemplar, when driving block 123 is promoting dress
When putting the outer rail plate 124 of effect lower edge and moving left and right, due to magnet principle of opposite sex attraction, in the magneticaction of external magnet 125
Lower internal magnet 126 is moved left and right on interior rail plate 120, so that the large area exemplar on chip bench 127 is attached in evaporation source
Nearly bilateral reciprocation, makes large area exemplar plated film evenly.
As shown in Figure 1, 2, pushing meanss include setting on turn-screw 121, electric rotating machine 122, the side wall of vacuum chamber 11
There is mounting bracket 13, the one end of turn-screw 121 is arranged in mounting bracket 13 by bearing, and electric rotating machine 122 is installed on vacuum
On the side wall of chamber 11, driving block 123 is threadedly connected on turn-screw 121, and electric rotating machine 122 drives turn-screw when starting
121 rotations, make driving block 123 be moved left and right on turn-screw 121；Pushing meanss can be also used in addition to turn-screw simultaneously
Other structures form.
As shown in figure 1, magnetic drives large area evaporation coating machine of the present invention also includes aerating device 15, film thickness detecting device
16th, lighting device 18, glove box 20, aerating device 15, lighting device 18, glove box 20 may be contained within outside vacuum chamber 11, film
Thickness detector 16 is located in vacuum chamber 11, aerating device 15 and the inwall UNICOM of vacuum chamber 11, on the side wall of vacuum chamber 11
It is provided with observation window 17.
During magnetic drives large area evaporation coating machine work of the present invention, large area exemplar is fixed on chip bench, passed through
Vacuum system is evacuated to high vacuum to vacuum chamber, and electrode of the chip bench by magnetic drive device around evaporation source is back and forth transported repeatedly
It is dynamic, exemplar and evaporation source situation can be observed by observation window and lighting device in the process, be detected by film thickness monitoring device
Thickness, so as to realize large area exemplar evaporation coating.Exemplar can be realized because this equipment is equipped with glove box 20 and inflation system 15
Atmosphere protection.
Set using the model ZHD450 of magnetic drives large area evaporation coating machine structure of the present invention large area evaporation coating
It is standby, tried out after assembling half a year, plated film 100-200 time repeatedly, during which magnetic drive device runs smooth, no interim card, without gas leakage, than
Conventional magnetic fluid sealed gearing device performance is more stable, reduces maintenance cost.
Using the unit type ZHD450 large area evaporation coatings of magnetic drives large area evaporation coating machine structure of the present invention
Equipment, is equipped with 2 groups of 100*10mm tungsten evaporation sources, evaporation source area is in 50*10mm, through experiment test, 400*200mm can be achieved big
Area print uniform coated, film thickness uniformity is tested 5 times, uniformity is good repeatedly within 5% with technique.
Using the unit type ZHD450 large area evaporation coatings of magnetic drives large area evaporation coating machine structure of the present invention
Equipment, can increase evaporation source quantity and and chamber length, so as to realize the uniform coated of more large area exemplar.
Specific case is applied in the present invention to be set forth the principle and embodiment of the present invention, above example
Illustrate the method and its core concept for being only intended to help to understand the present invention；Simultaneously for those of ordinary skill in the art, according to
According to the thought of the present invention, it will change in specific embodiments and applications.In summary, this specification content
It should not be construed as limiting the invention.
Claims (7)
1. evaporation source is set in a kind of magnetic drives large area evaporation coating machine, including vacuum chamber (11), vacuum chamber (11)
(19), it is characterised in that：Vacuum chamber (11) side wall is provided with magnetic drive device (12), the magnetic drive device
(12) driving block (123), outer rail plate (124), external magnet (125), interior rail plate (120), internal magnet are included
(126), chip bench (127), the external magnet (125), internal magnet (126) magnetic are on the contrary, the driving block (123), outer cunning
Dynamic guide rail (124), external magnet (125) are respectively positioned on the vacuum chamber (11) outside, and the external magnet (125) is fixed on the transmission
On sliding block (123), the driving block (123) can be slided in outer rail plate (124) described in pushing meanss effect lower edge, described
Interior rail plate (120), internal magnet (126), chip bench (127) are respectively positioned in the vacuum chamber (11), the chip bench
(127) it is fixed on the internal magnet (126), the internal magnet (126) can be in the presence of the external magnet (125) described
Slided on interior rail plate (120).
2. magnetic drives large area evaporation coating machine according to claim 1, it is characterised in that：The pushing meanss include
Mounting bracket (13), the transmission are provided with turn-screw (121), electric rotating machine (122), vacuum chamber (11) side wall
Leading screw (121) one end is arranged in the mounting bracket (13) by bearing, and the electric rotating machine (122) is installed on the vacuum
Turn-screw (121) rotation is driven on the wall of chamber (11) side, the driving block (123) is threadedly connected to the turn-screw
(121) on.
3. magnetic drives large area evaporation coating machine according to claim 2, it is characterised in that：Also include pumped vacuum systems
(14), the pumped vacuum systems (14) is located at the vacuum chamber (11) outside and connected with the vacuum chamber (11) inner chamber.
4. magnetic drives large area evaporation coating machine according to claim 3, it is characterised in that：Also include aerating device
(15), the aerating device (15) be located at the vacuum chamber (11) outside and with the vacuum chamber (11) inner chamber UNICOM.
5. magnetic drives large area evaporation coating machine according to claim 4, it is characterised in that：Also include thickness and detect dress
Put (16), the film thickness detecting device (16) is arranged in the vacuum chamber (11).
6. magnetic drives large area evaporation coating machine according to claim 5, it is characterised in that：The vacuum chamber (11)
Observation window (17) is provided with the wall of side.
7. magnetic drives large area evaporation coating machine according to claim 6, it is characterised in that：The vacuum chamber (11)
Side wall is provided with lighting device (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710741048.1A CN107299323A (en) | 2017-08-25 | 2017-08-25 | Magnetic drives large area evaporation coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710741048.1A CN107299323A (en) | 2017-08-25 | 2017-08-25 | Magnetic drives large area evaporation coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107299323A true CN107299323A (en) | 2017-10-27 |
Family
ID=60132583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710741048.1A Pending CN107299323A (en) | 2017-08-25 | 2017-08-25 | Magnetic drives large area evaporation coating machine |
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| Country | Link |
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| CN (1) | CN107299323A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010026748A1 (en) * | 1998-05-20 | 2001-10-04 | Wendell T. Blonigan | Substrate transfer shuttle having a magnetic drive |
| KR20120062309A (en) * | 2010-12-06 | 2012-06-14 | 주식회사 태한이엔씨 | Transfer apparatus using magnetic force |
| CN103185122A (en) * | 2012-03-31 | 2013-07-03 | 北京普纳森电子科技有限公司 | Magnetically-coupled vacuum transmission device applicable to plasma processing equipment |
| CN103420165A (en) * | 2013-08-06 | 2013-12-04 | 中国电子科技集团公司第四十八研究所 | Substrate conveying device |
| CN203728924U (en) * | 2013-12-16 | 2014-07-23 | 湘潭宏大真空技术股份有限公司 | Vacuum coating production line |
| CN204325488U (en) * | 2014-12-23 | 2015-05-13 | 洛阳康耀电子有限公司 | A kind of vacuum magnetron sputtering coating film magnetic suspension driving gear |
| CN207418850U (en) * | 2017-08-25 | 2018-05-29 | 北京泰科诺科技有限公司 | Magnetic drives large area evaporation coating machine |
-
2017
- 2017-08-25 CN CN201710741048.1A patent/CN107299323A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010026748A1 (en) * | 1998-05-20 | 2001-10-04 | Wendell T. Blonigan | Substrate transfer shuttle having a magnetic drive |
| KR20120062309A (en) * | 2010-12-06 | 2012-06-14 | 주식회사 태한이엔씨 | Transfer apparatus using magnetic force |
| CN103185122A (en) * | 2012-03-31 | 2013-07-03 | 北京普纳森电子科技有限公司 | Magnetically-coupled vacuum transmission device applicable to plasma processing equipment |
| CN103420165A (en) * | 2013-08-06 | 2013-12-04 | 中国电子科技集团公司第四十八研究所 | Substrate conveying device |
| CN203728924U (en) * | 2013-12-16 | 2014-07-23 | 湘潭宏大真空技术股份有限公司 | Vacuum coating production line |
| CN204325488U (en) * | 2014-12-23 | 2015-05-13 | 洛阳康耀电子有限公司 | A kind of vacuum magnetron sputtering coating film magnetic suspension driving gear |
| CN207418850U (en) * | 2017-08-25 | 2018-05-29 | 北京泰科诺科技有限公司 | Magnetic drives large area evaporation coating machine |
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