CN107297357A - Chemical cleaner retracting device and the stain cleaning systems including it - Google Patents
Chemical cleaner retracting device and the stain cleaning systems including it Download PDFInfo
- Publication number
- CN107297357A CN107297357A CN201710243510.5A CN201710243510A CN107297357A CN 107297357 A CN107297357 A CN 107297357A CN 201710243510 A CN201710243510 A CN 201710243510A CN 107297357 A CN107297357 A CN 107297357A
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- CN
- China
- Prior art keywords
- chemical cleaner
- retracting device
- flowing
- clean room
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
Possess chemical cleaner retracting device and stain cleaning systems including it that body is confused in flowing the present invention relates to a kind of, the stain cleaning systems include：Holding vessel, it stores chemical cleaner；Clean room, it receives the chemical cleaner from the supply of above-mentioned holding vessel to clean cleaning object；Chemical cleaner retracting device, it houses the chemical cleaner for being used in and cleaning above-mentioned cleaning object, and the chemical cleaner of vaporization is liquefied；Ring blower, it sucks the chemical cleaner for the vaporization for being present in above-mentioned clean room and is blown into above-mentioned chemical cleaner retracting device, and will be blown into above-mentioned clean room by remaining gas after the recovery of above-mentioned chemical cleaner retracting device.
Description
Technical field
The present invention relates to a kind of chemical cleaner retracting device and the stain cleaning systems including it, in more detail, it is related to
It is a kind of to possess chemical cleaner retracting device and stain cleaning systems (spot cleaning including it that body is confused in flowing
System), wherein above-mentioned chemical cleaner retracting device can be high by improving volatility chemical cleaner (cleaning
Chemical) rate of recovery of (be used for cleaning object clean) makes the waste of chemical cleaner reach minimum.
Background technology
If when the surface attachment of the camera lens (Lense) for camera etc. has the foreign matters such as dust, for by passing through camera lens
The light of module and for the image that is taken, reduce the amount through light because of foreign matter so that the image of shooting it is integrally dimmed or
There is foreign matter shade.
Therefore, the lens cleaning cleaned to the foreign matter for being attached to camera lens surface must be included in camera lens manufacturing process
Operation, also, this cleaning operation typically utilizes air blowing (air blow) or chemical cleaner realization.
Because the chemical cleaner for being used in cleaning operation typically has very strong volatility, accordingly, there exist make in cleaning
The problem of substantial amounts of chemical cleaner is vaporized and is wasted in industry.
Also, the chemical cleaner wasted by vaporization causes the expense of cleaning operation to increase, and it can also thus bring mirror
The problem of head manufacturing expense increase.
[citation]
[patent document]
(patent document 0001) KR 10-1562206 B1
The content of the invention
The technical problem to be solved in the present invention
The present invention is used to solve existing issue, and possessing flowing its object is to providing one kind confuses body (Flow
Disturbance Objects) chemical cleaner retracting device and stain cleaning systems including it, it can be improved to camera lens
The rate of recovery of the chemical cleaner that cleaning is used, volatility is high of the cleaning such as (being used in camera etc.) object, to make
The waste of chemical cleaner reaches minimum.
But the purpose of the present invention is not limited to this, those skilled in the art can be clearly understood that from following record and not refer to
Other purposes.
Technical scheme
The chemical cleaner retracting device for confusing body is flowed to reach as above possessing for the object of the invention, including：
Main body, it is formed with receiving space, and the trapping of above-mentioned receiving space is used cleaning when object is cleaned
Chemical cleaner；Condenser pipe, it is arranged at main body, and the atmosphere of above-mentioned receiving space is maintained at into above-mentioned chemical cleaner
Temperature below liquefaction point so that the chemical cleaner for being trapped in the vaporization of above-mentioned receiving space realizes condensation；Multiple flowings are stirred
Random body, it is arranged at above-mentioned receiving space with particle shape, and the chemical cleaner of above-mentioned vaporization is carried out turbulent flow so that
The residence time increase of the chemical cleaner of above-mentioned vaporization；And discharge pipe, liquefied above-mentioned chemical cleaner is expelled to by it
The outside of above-mentioned receiving space.
Also, above-mentioned flowing is confused body and is characterised by, it is spherical, and forms empty between body is confused in multiple flowings
Gap.
Also, above-mentioned flowing is confused body and is characterised by, it is closely filled in above-mentioned receiving space.
Also, above-mentioned flowing is confused body and is characterised by, it is metal material.
Also, above-mentioned flowing is confused body and is characterised by, it is contacted with above-mentioned condenser pipe.
Including possessing the stain cleaning systems that the chemically cleaning retracting device of body is confused in flowing, including：
Holding vessel, it stores chemical cleaner；Clean room, it receives the chemical cleaner supplied from above-mentioned holding vessel and come pair
Cleaning object is cleaned；Chemical cleaner retracting device, it, which is housed, is used in the chemical clear of the above-mentioned cleaning object of cleaning
Clean dose, and the chemical cleaner of vaporization is liquefied；Ring blower, it sucks the chemistry for the vaporization for being present in above-mentioned clean room
Cleaning agent is simultaneously blown into above-mentioned chemical cleaner retracting device, and will be by remaining after the recovery of above-mentioned chemical cleaner retracting device
Gas is blown into above-mentioned clean room.
Also, possess discharge pipe and supply pipe opposite one another in the bottom of above-mentioned clean room, wherein, above-mentioned discharge pipe,
It discharges the chemical cleaner that is used in the cleaning of above-mentioned clean room from above-mentioned clean room, and makes above-mentioned to move chemical cleaner
Move to above-mentioned chemical cleaner retracting device；Above-mentioned supply pipe, its will by above-mentioned chemical cleaner retracting device reclaim after,
Remaining gas is supplied to above-mentioned clean room.
Also, above-mentioned discharge pipe corresponds to the inspiratory direction of above-mentioned ring blower, is connected in series above-mentioned annular blast machine
With chemical cleaner retracting device, and above-mentioned supply pipe correspond to above-mentioned annular blast machine discharge directions, be connected in series
State annular blast machine and chemical cleaner retracting device.
Beneficial effect
The flowing for possessing the present invention is confused the chemical cleaner retracting device of body and the stain cleaning systems including it and had
Following effect：
First, the chemical cleaner by increasing vaporization can improve vapour in the residence time of chemical cleaner retracting device
The amount of collected of the chemical cleaner of change.
Second, the chemical cleaner of vaporization is not discharged into outside, but returning for chemical cleaner can be made with circulation
Yield is maximized.
3rd, the chemical cleaner of the vaporization to being produced in the cleaning operation of cleaning object is condensed, and is reduced
To holding vessel, being minimized of waste of cleaning solution can be made.
4th, by condensing the chemical cleaner of vaporization and reducing, the waste of chemical cleaner can be made to reach minimum
Change, so as to reduce cleaning cost and clean the manufacture unit price of object.
Brief description of the drawings
Fig. 1 is the design drawing of stain cleaning systems according to a first embodiment of the present invention.
Fig. 2 is the stereogram of chemical cleaner retracting device according to a first embodiment of the present invention.
Fig. 3 is the profile of chemical cleaner retracting device according to a first embodiment of the present invention.
Fig. 4 is the side view and part detailed annotation figure of the bottom of display clean room according to a first embodiment of the present invention.
Description of reference numerals：
The structure of system：
10：Clean object；
100：Stain cleaning systems；
110：Clean room； 120：Holding vessel；
130：Separating tank； 140：Annular blast machine；
150：Chemical cleaner retracting device； 160：Cooler (Chiller)；
The partial structurtes of clean room：
111：Discharge pipe； 112：Supply pipe；
113：Shower nozzle； 114：Cooling water supply pipe；
115：Discharge pipe；
The partial structurtes of chemical cleaner retracting device：
151：Main body； 152：Condenser pipe；
153：Dividing plate； 154：Cooling water supply pipe；
155：Body is confused in flowing； 156：Discharge pipe；
157：Condensation water discharge pipe.
Embodiment
The preferred embodiments of the present invention of the purpose of the present invention can be implemented by describing in detail with reference to the accompanying drawings.To this
When inventive embodiments are illustrated, same names and same-sign are used for identical structure, and will omit to the attached of its
Plus explanation.
By the design drawing of Fig. 1 stain cleaning systems according to a first embodiment of the present invention, to real according to the present invention one
The overall structure for applying the stain cleaning systems 100 of example is illustrated.
Clean room 110 introduces the component in the space cleaned object 10 and realize cleaning to provide.For this clean room
For 110, as long as the component of the cleaning of cleaning object 10 can be realized, then realized by any structure also all harmless.
As one, can possess multiple shower nozzles 113 (Shower nozzle) in the inside of clean room 110, and by shower
The high-pressure injection chemical cleaner of shower nozzle 113 come to cleaning object 10 clean.Now, in clean room 110, as pair
The chemical cleaner that cleaning object 10 is cleaned, can use hydrofluoroether (Hydrofluorocarbon；HFE
Chemical)。
Holding vessel 120 is to clean room 110 when internally storing chemical cleaner and being cleaned in clean room 110
The device of inside supply chemical cleaner.Form and dimension of this holding vessel 120 etc. can be cleaned according to use state and stain
The difference of the setting place of system 100 etc. and realized with various shapes and size.
Separating tank 130 is set to realize clean room 110 and the storage of the cleaning to cleaning object with injection cleaning solution
Tank 120 is connected.This separating tank 130 is enabled to for the chemical cleaner that cleaning object 10 is cleaned and sprayed
In chemical cleaner that is unboiled and being flowed down with liquid condition reduce, and by moisture and foreign body etc. and chemical cleaner point
From, and the chemical cleaner for completing separation is restored to holding vessel 200.
For separating tank 130, as long as can chemically separation moisture and foreign body in cleaning agent, and can isolate
The device of pure chemical cleaner, then all harmless using any device, but preferably use water separating tank.
The chemical cleaner of vaporization passes through the (Ring of annular blast machine 140 that will illustrate in following part in the clean room 110
Blower) sucked by force, discharged by discharge pipe 111 from clean room 110 and deliver to chemical cleaner retracting device 150.
Annular blast machine 140 sucks the chemical cleaner for the vaporization for being present in clean room 110 and to following chemistry by force
Cleaning agent retracting device 150 is blown into, and will be blown into clean room by remaining gas after chemical cleaner retracting device 150 is reclaimed
110.As long as it may achieve this purpose, then also all harmless using any air-supply arrangement outside annular blast machine 140.
Chemical cleaner retracting device 150 is connected with clean room 110, sucks the chemically cleaning of the vaporization in clean room 110
Agent and be contained in inside, and make vaporization chemical cleaner liquefy and be restored to holding vessel 120.This chemical cleaner is returned
The structure of receiving apparatus 150 will be described in detail in Fig. 2 and Fig. 3.
Remaining gas is sucked by annular blast machine 140 again after the liquefaction of chemical cleaner retracting device 150, and is passed through
Supply pipe 112 is supplied to clean room 110 again.By making not liquefy and remaining gas does not flow out to outside, but make its
The interior circulation of system 100, so as to reclaim not liquefied chemical cleaner during circulation, to improve chemical cleaner
The rate of recovery.
The discharge pipe 111 and supply pipe 112 and annular blast machine 140 possessed in clean room 110 will be carried out in detail in Fig. 4
Explanation.
Hereinafter, the stereogram according to Fig. 2 and the chemical cleaner retracting device of Fig. 3 first embodiment of the present invention is passed through
And exploded view, chemical cleaner retracting device 150 is described in detail.
It is captured in the receiving space that is internally formed of main body 151, and in receiving space in clean room 110 to cleaning object
Chemical cleaner used in 10 cleaning.
Possesses condenser pipe 152 in the receiving space of main body 151.Internal flow of the cooling water in condenser pipe 152 so that house
The atmosphere in space is maintained at the temperature below the liquefaction point of chemical cleaner.Liquefaction point is maintained at the atmosphere of receiving space
Hereinafter, the chemical cleaner for being trapped in the vaporization of receiving space is condensed.
Condenser pipe 152 is connected with cooler 160 (chiller).Cooler 160 is to flow through condenser pipe for constantly reducing
The device of the temperature of 152 cooling water, as long as it may achieve the device of this purpose, then it is all harmless using any device.One
As for, the place of supply industrial water etc. is commonly the use environment for being not easy to supply cold water, accordingly, it would be desirable to which this be used for
Persistently reduce the device of cooling water temperature.
Possesses more than one dividing plate 153 in the receiving space of main body 151.Multiple holes, and gas are formed on dividing plate 153
Can be between insertion dividing plate.Dividing plate 153 increases the residence time of the chemical cleaner for the vaporization for being trapped in receiving space.
Flowing confuses body 155 to possess in multiple particles of the receiving space of main body.Body 155 is confused in flowing to be made to be trapped in receiving
The chemical cleaner for holding the vaporization in space carries out turbulent flow (turbulent flow) flowing, so that the chemical cleaner of vaporization
Residence time increases.The chemical cleaner of vaporization is cold due to the atmosphere in receiving space during receiving space is stopped
Solidifying therefore still uncooled, vaporization chemical cleaner can not be discharged because of the turbulent flow that body 155 is confused in flowing from receiving space,
But stop and be condensed, so that the rate of recovery of chemical cleaner is maximized.
Body 155 is confused in flowing to be made up of the particle of various shapes, and preferably spherical.Though body is confused to flowing with particle
155 shape is stated, but is not meant to that its size is only small as the broomcorn millet of cereal, or stone degree is big
The size (diameter 15cm or so) of small (diameter 5cm or so) or people palm degree, and as needed, or it is bigger than this
Size.Also, it is not entirely the same shape that body 155 is confused in multiple flowings of filling receiving space.
As long as i.e. body 155 is confused in flowing can form space, gas confuses body by the space of formation by flowing
The diffusing reflection face that 155 surface is formed can make the chemical cleaner for being trapped in the vaporization of receiving space carry out turbulation, then
It is enough.
Multiple flowings confuse body 155 and are closely filled in receiving space.Closely filling refers to again to stir flowing
The degree that random body 155 is filled in receiving space is filled, without referring to that gas does not have the space of flowing in receiving space
Mode be completely filled.If flowing is confused body 155 and is closely packed, turbulent flow forms interval and can increased so that chemistry
The residence time increase of cleaning agent.
The preferred metal material of body 155 is confused in flowing.Especially, the high metal of preferred thermal conductivity in metal.Also, flowing is stirred
The surface temperature of random body 155 is preferably below liquefaction point.With flowing confuse the chemical cleaner of the vaporization that body 155 is contacted by with
Flowing is confused the heat exchange of body 155 and is condensed, so that the rate of recovery of chemical cleaner is maximized.
Preferably, flowing confuses body 155 and is contacted with condenser pipe 152, so that the heat transfer that chemically cleaning agent absorbs be given
Condenser pipe 152.During confusing heat transfer that body 155 absorbs chemically cleaning agent to condenser pipe 155 compared to flowing
By way of being trapped in the gas of receiving space and being transmitted, preferably confuse the contact between body 155 to pass to by flowing
Condenser pipe 152.
The chemical cleaner being condensed in main body 151 is expelled to collecting by being arranged at the discharge pipe 156 of the bottom of main body 151
The outside in space.Discharge pipe 156 is connected to separating tank 130, and only isolates pure in the gas condensed in separating tank 130
Chemical cleaner, so as to be restored to holding vessel 120.
Further, since the outer wall of main body 151 is cooler than air, therefore can be in outer wall condensate steam, so as to can also possess collection
Gather these vapor and the condensation water discharge pipe 157 discharged.
Uncooled and remaining gas is sucked by annular blast machine 140 in chemical cleaner retracting device 150, and is passed through
Possess the supply pipe 112 in the bottom of clean room 110 and be transferred to clean room 110 again.
By the side view and part detailed annotation figure of Fig. 4 bottom for showing clean room according to a first embodiment of the present invention,
To observe the structure that the chemical cleaner of vaporization is circulated in clean room 110.
Discharge pipe 111 and supply pipe 112 are constituted opposite one another in the bottom of clean room 110.Usually, chemical cleaner
Gas molecule weight in molecular proportion air, therefore, discharge be used in cleaning chemical cleaner discharge pipe 111 be preferably provided with
The bottom of clean room 110.
The hydrofluoroether (HFE) used as chemical cleaner is due to high volatility, so being vaporized when clean room 110 is opened
Hydrofluoroether (HFE) releasably arrive its exterior, therefore the inside of clean room 110 should be compared to atmospheric pressure or possess clean room
The 110 low low-pressure state of broom closet (Clean Room) pressure.
Due to the strong inhalation power of annular blast machine 140, the chemical cleaner for being used to clean in clean room 110 passes through row
Outlet pipe 111 is discharged, and after the recovery of chemical cleaner retracting device 150 remaining gas by supply pipe 112 to clean room
110 bottom is strongly supplied, and now occurs the strength flowing of gas in the lower space of clean room 110, therefore compared to cleaning
Other space pressures of room 110 can reduce.Accordingly, there exist bottom from the fluid in clean room 110 to clean room 110 movement and to
Discharge pipe 112 flows.
Possesses the cooling water supply pipe 114 being connected with cooler 160 in the bottom of clean room 110, so that during being vented
So that the chemical cleaner for cleaning is liquefied.
The chemical cleaner of liquid condition is by possessing under clean room 110 in the fluid do not discharged to discharge pipe 111
The discharge pipe 115 in portion is discharged, so as to be expelled to the outside of clean room 110.Discharge pipe 115 is connected to separating tank 130, and is dividing
Holding vessel 120 is restored to from chemical cleaner pure in the gas that groove 130 isolates condensation.
Discharge pipe 111 connects clean room 110 and chemical cleaner retracting device 150, and annular blast machine 140 corresponds to air-breathing
Direction, with the connection for clean room 110 and chemical cleaner retracting device 150 in series, be connected to chemical cleaner recovery
Device 150, also, corresponding to the discharge directions of annular blast machine 140, it is connected in series in the supply pipe 112 of clean room 110.By
This, the knot that chemical cleaner is circulated in clean room 110 and chemical cleaner retracting device 150 is realized by annular blast machine 140
Structure, so as to may be such that chemical cleaner does not flow out to its exterior, and makes the rate of recovery of chemical cleaner reach maximization.
As above observe according to a preferred embodiment of the present invention, for those skilled in the art, before removing
Beyond the embodiment that face illustrates, the present invention, also can quilt by other specific modalities in the case where not departing from its purport or category
The fact that materialization is obvious.Therefore, above-described embodiment is not limited, but example.Therefore, it is of the invention
Described above is not limited to, and can also be changed in appended the claims book and its equivalents.
Claims (8)
1. a kind of possess the chemical cleaner retracting device that body is confused in flowing, it includes：
Main body, it is formed with receiving space, and receiving space trapping is to cleaning usedization when object is cleaned
Learn cleaning agent；
Condenser pipe, it is arranged at main body, and by the atmosphere of the receiving space be maintained at the liquefaction point of the chemical cleaner with
Under temperature so that be trapped in the receiving space vaporization chemical cleaner realize condensation；
Body is confused in multiple flowings, and it is arranged at the receiving space with particle shape, and enters the chemical cleaner of the vaporization
Row turbulent flow so that the residence time increase of the chemical cleaner of the vaporization；And
Discharge pipe, the liquefied chemical cleaner is expelled to the outside of the receiving space by it.
2. according to claim 1 possess the chemical cleaner retracting device that body is confused in flowing, it is characterised in that
The flowing confuses body for spherical, so as to form space between body is confused in multiple flowings.
3. according to claim 1 possess the chemical cleaner retracting device that body is confused in flowing, it is characterised in that
The flowing confuses body and is closely filled in the receiving space.
4. according to claim 1 possess the chemical cleaner retracting device that body is confused in flowing, it is characterised in that
The flowing confuses body for metal material.
5. according to claim 1 possess the chemical cleaner retracting device that body is confused in flowing, it is characterised in that
The flowing confuses body and is contacted with the condenser pipe.
6. a kind of stain cleaning systems, it includes：
Holding vessel, it stores chemical cleaner；
Clean room, it receives the chemical cleaner from holding vessel supply to clean cleaning object；
Chemical cleaner retracting device described in claim 1, it houses the change for being cleaned to the cleaning object
Cleaning agent is learned, and the chemical cleaner of vaporization is liquefied；
Ring blower, it sucks the chemical cleaner for the vaporization for being present in the clean room and is blown into the chemical cleaner and returns
Receiving apparatus, and the clean room will be blown into by remaining gas after chemical cleaner retracting device recovery.
7. stain cleaning systems according to claim 6, it is characterised in that
Possess discharge pipe and supply pipe opposite one another in the bottom of the clean room, wherein,
The discharge pipe, it discharges the chemical cleaner used in the cleaning of the clean room from the clean room, and makes institute
Stating makes chemical cleaner be moved to the chemical cleaner retracting device；
The supply pipe, remaining gas is supplied to the cleaning after it will be reclaimed by the chemical cleaner retracting device
Room.
8. stain cleaning systems according to claim 7, it is characterised in that
The discharge pipe corresponds to the inspiratory direction of the ring blower, is connected in series the annular blast machine and claim
Chemical cleaner retracting device described in 1, and the supply pipe corresponds to the discharge directions of the annular blast machine, and series connection connects
Connect the annular blast machine and the chemical cleaner retracting device described in claim 1.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2016-0045859 | 2016-04-15 | ||
| KR1020160045859A KR101698559B1 (en) | 2016-04-15 | 2016-04-15 | Cleaning chemical recovery apparatus comprising flow disturbance objects and spot cleaner system including the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107297357A true CN107297357A (en) | 2017-10-27 |
| CN107297357B CN107297357B (en) | 2020-12-18 |
Family
ID=57989603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710243510.5A Active CN107297357B (en) | 2016-04-15 | 2017-04-14 | Chemical cleaning agent recovery device and spot cleaning system comprising same |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101698559B1 (en) |
| CN (1) | CN107297357B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101998254B1 (en) * | 2017-03-27 | 2019-10-01 | 김현태 | Spot Cleaner System |
| KR102163293B1 (en) * | 2018-10-10 | 2020-10-08 | (주)엘케이시스템즈 | Flux cleaning system for semiconductor wafer |
| KR102163298B1 (en) * | 2018-10-10 | 2020-10-08 | (주)엘케이시스템즈 | Flux cleaning method for semiconductor wafer |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3538983A (en) * | 1968-06-07 | 1970-11-10 | Reiert Gmbh J | Heat exchanger for the condensation or vaporization of fluids |
| JPH0754174A (en) * | 1993-08-18 | 1995-02-28 | Tousei Denki Kk | Washing and drying device for parts or the like |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101562206B1 (en) | 2014-10-20 | 2015-10-22 | 김현태 | Spot cleaning system |
-
2016
- 2016-04-15 KR KR1020160045859A patent/KR101698559B1/en active IP Right Grant
-
2017
- 2017-04-14 CN CN201710243510.5A patent/CN107297357B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3538983A (en) * | 1968-06-07 | 1970-11-10 | Reiert Gmbh J | Heat exchanger for the condensation or vaporization of fluids |
| JPH0754174A (en) * | 1993-08-18 | 1995-02-28 | Tousei Denki Kk | Washing and drying device for parts or the like |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107297357B (en) | 2020-12-18 |
| KR101698559B1 (en) | 2017-01-20 |
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