CN107275513A - Preparation method, display panel and the display device of OLED negative electrode and display panel - Google Patents
Preparation method, display panel and the display device of OLED negative electrode and display panel Download PDFInfo
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- CN107275513A CN107275513A CN201710397125.6A CN201710397125A CN107275513A CN 107275513 A CN107275513 A CN 107275513A CN 201710397125 A CN201710397125 A CN 201710397125A CN 107275513 A CN107275513 A CN 107275513A
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- H—ELECTRICITY
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- H10K50/00—Organic light-emitting devices
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Abstract
The invention discloses preparation method, display panel and the display device of a kind of organic electroluminescence device negative electrode and display panel, the preparation method of the organic electroluminescence device negative electrode, including：Cathode material is dissolved in the solvent of fluorochemical and forms scattered suspension；Scattered suspension is formed on underlay substrate, and the solvent in the scattered suspension that volatilizees, to form cathode layer.The preparation method of negative electrode provided in an embodiment of the present invention, realize and negative electrode is made using solwution method, avoid and the caused various harmful effects of negative electrode meeting are made using cavity coating method, and cost of manufacture is relatively low, it is applicable to the underlay substrate of various sizes or various materials, glass can for example be used, plastics, the underlay substrate of the material such as metal or silicon, in addition, the solvent of fluorochemical will not produce harmful effect to the organic layer of organic electroluminescence device, it is also easier to dock with the technique that solwution method makes organic film, easily realize the volume production of organic electroluminescence device.
Description
Technical field
The present invention relates to display technology field, the making side of espespecially a kind of organic electroluminescence device negative electrode and display panel
Method, display panel and display device.
Background technology
In display field, organic electroluminescence device (Organic Light-Emitting Diode, OLED) has certainly
It is luminous, reaction is fast, visual angle is wide, brightness is high, color is gorgeous, it is frivolous the advantages of, it is considered to be Display Technique of future generation.
At present, in the manufacture craft of OLED, organic layer can be made using solwution method, but negative electrode needs to use
Cavity coating method makes, for example, can use vacuum vapour deposition plated film, or physical vapour deposition (PVD) (Physical Vapor
Deposition, PVD) method, both manufacture crafts are required for carrying out in vacuum cavity, thus in the prior art can't be complete
It is complete that OLED is made using solwution method, it is necessary to first using solwution method on underlay substrate during OLED is made
Organic layer is made, then the underlay substrate after making organic layer is transferred in vacuum cavity and makes negative electrode, this making
The method of OLED can cause a variety of harmful effects, including：
(1) it is restricted to substrate size：Using vacuum vapour deposition plated film, the size to substrate is required, general substrate
Size is within G5, if it exceeds this size, the problems such as glass sag, membrane thickness unevenness easily occur.Using PVD method plated film
Mode, it is contemplated that cavity size, sputtering target material size, the factor such as film thickness uniformity, it is also desirable to limit the size of substrate can not be too
Greatly；
(2) to the selection of material：The material that temperature is less than within 1300 degree can only be typically deposited in vacuum vapour deposition plated film, adopt
Although can have wider array of selection to material with PVD method plated film, the target of PVD method plated film must be prepared in advance, for example
Need to accomplish the negative electrode that many kinds of substance is combined, be difficult to complete；
(3) to the destruction of OLED：If using vacuum vapour deposition plated film or PVD method plated film, due to there is high temperature
Problem, may be destroyed OLED, be mainly shown as crystallization or decomposed；
(4) high-precision metal mask plate (Fine Metal Mask, FMM) makes difficult：Either vacuum vapour deposition plated film
Or PVD method plated film, can be highly difficult using FMM, because high temperature can make FMM, deformation is serious, and current negative electrode can only be made
Whole face covering, this can cause occur tilting electric field between negative electrode and anode, cause the horizontal leakage current of device；
(5) complex process：Flexible OLED devices are following development trends, and it is large scale that solwution method, which makes OLED,
One of trend of OLED, if the organic layer in OLED uses solwution method, and negative electrode is made using cavity coating method,
Concatenation process can be caused more complicated, one of the reason for this is also the device lifetime difference that solwution method makes in the prior art.
Therefore, how to overcome using harmful effect caused by cavity coating method making negative electrode, be that the technology for being badly in need of solving is asked
Topic.
The content of the invention
The embodiments of the invention provide a kind of organic electroluminescence device negative electrode and preparation method, the display surface of display panel
Plate and display device, to solve to use cavity coating method making negative electrode to cause a variety of harmful effects present in prior art
The problem of.
In a first aspect, the embodiments of the invention provide a kind of preparation method of organic electroluminescence device negative electrode, including：
Cathode material is dissolved in the solvent of fluorochemical and forms scattered suspension；
The scattered suspension is formed on underlay substrate, and the solvent in the scattered suspension that volatilizees, to be formed
Cathode layer.
Second aspect, the embodiment of the present invention additionally provides a kind of preparation method of organic EL display panel, including：
Anode layer is formed on underlay substrate, and forms on the anode layer each organic film；
Protective layer is formed on the organic film, and photoresist layer is formed on the protective layer；
The protective layer and the photoresist layer are handled, to form the pattern complementary of the cathode layer with that will be formed
Figure；
The cathode layer is made using the preparation method of above-mentioned organic electroluminescence device negative electrode；
Peel off the protective layer and the photoresist layer.
The third aspect, the embodiment of the present invention additionally provides a kind of organic EL display panel, the organic electroluminescence hair
Light display panel is made using the preparation method of above-mentioned organic EL display panel.
Fourth aspect, the embodiment of the present invention additionally provides a kind of display device, including：Above-mentioned ORGANIC ELECTROLUMINESCENCE DISPLAYS face
Plate.
The present invention has the beneficial effect that：
The embodiments of the invention provide a kind of organic electroluminescence device negative electrode and preparation method, the display surface of display panel
Plate and display device, the preparation method of the organic electroluminescence device negative electrode, including：Cathode material is dissolved in fluorochemical
Scattered suspension is formed in solvent；Scattered suspension is formed on underlay substrate, and the solvent in the scattered suspension that volatilizees, with
Form cathode layer.The preparation method of negative electrode provided in an embodiment of the present invention, realizes and makes negative electrode using solwution method, it is to avoid adopt
Various harmful effects caused by negative electrode meeting are made with Vacuum Coating method, and cost of manufacture is relatively low, is applicable to various sizes or each
The underlay substrate of kind of material, such as can using glass, plastics, metal or silicon material underlay substrate, in addition, fluorine-containing chemical combination
The solvent of thing will not produce harmful effect to the organic layer of organic electroluminescence device, be also easier to make organic film with solwution method
The technique docking of layer, easily realizes the volume production of organic electroluminescence device.
Brief description of the drawings
Fig. 1 is one of flow chart of preparation method of organic electroluminescence device negative electrode provided in an embodiment of the present invention；
Fig. 2 a are the two of the flow chart of the preparation method of organic electroluminescence device negative electrode provided in an embodiment of the present invention；
Fig. 2 b are the three of the flow chart of the preparation method of organic electroluminescence device negative electrode provided in an embodiment of the present invention；
Fig. 3 a and Fig. 3 b are the chemical constitution schematic diagram of two kinds of fluorochemicals provided in an embodiment of the present invention；
Fig. 4 is the four of the flow chart of the preparation method of organic electroluminescence device negative electrode provided in an embodiment of the present invention；
Fig. 5 is the flow chart of the preparation method of organic electroluminescence device display panel provided in an embodiment of the present invention；
Fig. 6 a~Fig. 6 h are each for the preparation method of organic electroluminescence device display panel provided in an embodiment of the present invention
The corresponding structural representation of step；
Fig. 7 is the schematic diagram of the molecular formula for the chemical constitution for making protective layer；
Fig. 8 is the structural representation of organic EL display panel provided in an embodiment of the present invention；
Fig. 9 is the structural representation of display device provided in an embodiment of the present invention；
Wherein, 401, underlay substrate；402nd, anode layer；403rd, organic film；404th, protective layer；405th, photoresist layer；
406th, mask plate；407th, cathode layer.
Embodiment
For making the problem of negative electrode can cause a variety of harmful effects using cavity coating method present in prior art, this
Inventive embodiments provide preparation method, display panel and the display dress of a kind of organic electroluminescence device negative electrode and display panel
Put.
Below in conjunction with the accompanying drawings, to the making of organic electroluminescence device negative electrode provided in an embodiment of the present invention and display panel
The embodiment of method, display panel and display device is described in detail.The thickness and shape of each film layer in accompanying drawing
Do not reflect actual proportions, purpose is schematically illustrate present invention.
In a first aspect, the embodiments of the invention provide a kind of preparation method of organic electroluminescence device negative electrode, such as Fig. 1 institutes
Show, including：
S101, cathode material is dissolved in the solvent of fluorochemical and forms scattered suspension；
S102, scattered suspension is formed on underlay substrate, and the solvent in the scattered suspension that volatilizees, to form negative electrode
Layer.
The preparation method of organic electroluminescence device negative electrode provided in an embodiment of the present invention, is realized and is made using solwution method
Negative electrode, it is to avoid using cavity coating method make negative electrode can caused by various harmful effects, and cost of manufacture is relatively low, be applicable to
The underlay substrate of various sizes or various materials, such as can using glass, plastics, metal or silicon material underlay substrate,
In addition, the solvent of fluorochemical will not produce harmful effect to the organic layer of organic electroluminescence device, be also easier to it is molten
Liquid legal system makees the technique docking of organic film, easily realizes the volume production of organic electroluminescence device.
In above-mentioned steps S101, cathode material is dissolved in the solvent of fluorochemical, is subsequently used for making to be formed
The scattered suspension of cathode layer, the solvent of fluorochemical will not cause damage to the organic layer of organic electroluminescence device,
When it is implemented, unencapsulated OLED can be positioned in the solvent of fluorochemical, make one of the OLED
Divide and be soaked in the solvent of fluorochemical, another part is not soaked in the solvent of fluorochemical, soak certain time (example
Such as 3 days, 5 days, 6 days or for more time) after, the OLED is lighted, judges to contain by detecting the OLED display effect
Influence of the solvent of fluorine compounds to OLED, empirical tests, the OLED crossed by the solvent soaking of fluorochemical is not sent out
Now show abnormal, i.e., the solvent of fluorochemical will not damage OLED.
In actual applications, the granular size of cathode material is preferably 10nm~1um, because the particle of cathode material compares
It is small, cathode material is dissolved in the solvent of fluorochemical, cathode material can disperse and protect in the solvent of fluorochemical
The state of suspension is held, to form scattered suspension.It is scattered suspended state due to disperseing the cathode material in suspension, thus
Cathode material in the scattered suspension is substantially uniform, so in step s 102, scattered suspension is formed at into substrate
On substrate, i.e., cathode material is substantially uniform is distributed on underlay substrate, after the solvent in the scattered suspension of volatilization, can be formed
The uniform cathode layer of a layer thickness.
Specifically, in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention, above-mentioned the moon
Pole material be preferably silver, gold, graphite, CNT, graphene, nano metal, tin indium oxide or one kind in indium zinc oxide or
It is a variety of, and the granular size of cathode material is preferably 10nm~1um.In the specific implementation, cathode material can also use other
The preferable material of electric conductivity, is not defined to cathode material herein.
In the specific implementation, dispersive property of the cathode material of some species in the solvent of fluorochemical is preferable, example
Such as when cathode material is nano metal, the material such as Nanometer Copper, Nano Silver, because the particle of nano metal is in nanometer chi
Very little, dispersive property of the nano metal material in fluorochemical preferably, nano metal is positioned over the solvent of fluorochemical
In, the particle of nano metal can in a solvent disperse and maintain suspended state, by the auxiliary point such as ultrasonic vibration or stirring
Scattered means can become more readily available scattered suspension, and the scattered suspension is formed on underlay substrate, and this point that volatilize
Dissipate after the solvent in suspension, the particle of nano metal is brought together again, due to there is interaction force between particle, thus
One layer of dense film can be formed, and electric conductivity is also relatively good.
In the specific implementation, dispersiveness of the cathode material of some species in the solvent of fluorochemical may be less
Height, can improve dispersiveness of the cathode material in the solvent of fluorochemical using following several ways.
Mode one：
In actual applications, in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention,
Before above-mentioned steps S101, as shown in Figure 2 a, it can also include：
S100a, using organic matter wrap up cathode material.
In above-mentioned steps S100a, cathode material is wrapped up using organic matter, for example, using polymer, dispersant or can be led
The material coated metal material such as electric glue, it would however also be possible to employ other organic matters wrap up cathode material, do not limit herein.Specifically,
Cathode material can be first placed in the solvent of organic matter, so that organic matter wraps cathode material, so, in subsequent step
In S101, assemble between the particle that cathode material can be prevented, prevent the particle of cathode material from being precipitated after assembling, i.e.,
The dispersive property of cathode material is improved, the viscosity between the particle of cathode material can also be increased, is made in subsequent step S102
The flat better performances of the cathode layer of formation.
Mode two：
In actual applications, in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention,
Above-mentioned steps S101, can be specifically included：
Cathode material, Kynoar and dispersant are dissolved in the solvent of fluorochemical and form scattered suspension.
Above-mentioned Kynoar (Polyvinylidene Fluoride, PVDF) can weaken the aggregation of cathode material, prevent
Precipitated after only cathode material is brought together, and PVDF also has certain adhesive effect, is conducive to cathode material to be suspended in molten
In agent, dispersant can improve the dispersive property of cathode material in a solvent, therefore, by cathode material, PVDF and dispersant
It is dissolved in the solvent of fluorochemical, the dispersive property of cathode material is preferable in the scattered suspension of formation and is not susceptible to gather
Collection, in subsequent step S102, after the solvent volatilization of fluorochemical, the presence of PVDF and dispersant can be by cathode material
Stick to and film is formed on underlay substrate, and the flat better performances of the film.
Specifically, the mass fraction of cathode material, Kynoar and dispersant is as follows：
The mass fraction of cathode material is in the range of 50%~100%, and the mass fraction of Kynoar is less than 50%, point
The mass fraction of powder is less than 5%.
The mass fraction of cathode material is arranged in the range of 50%~100%, the moon formed in step S102 can be made
Pole layer has preferable electric conductivity, and the mass fraction of Kynoar is set smaller than into 50%, can weaken cathode material
Aggregation in the solvent of fluorochemical, 5% is set to by the mass fraction of dispersant, it is ensured that cathode material have compared with
Good dispersive property.
Specifically, above-mentioned dispersant can be lauryl sodium sulfate, polyacrylic acid, cellulose or polyvinyl alcohol.In tool
When body is implemented, above-mentioned dispersant can also be other materials, for example, can be other micromolecular compounds or high molecular polymerization
Thing, as long as the dispersive property of cathode material can be improved.
In the specific implementation, the above-mentioned solvent that cathode material, Kynoar and dispersant are dissolved in fluorochemical
It is middle to form scattered suspension, it can specifically include：
Cathode material, Kynoar and dispersant are dissolved in the solvent of fluorochemical, using ultrasonic oscillation
Or the mode of stirring forms scattered suspension.
By the way of ultrasonic vibration or stirring, cathode material can be promoted rapidly to be scattered in the solvent of fluorochemical
In, in the specific implementation, it can also combine ultrasonic vibration only with ultrasonic vibration or only with the mode of stirring and stir
Mix and (can for example use magnetic agitation), as long as the time of dispersion effect, specific ultrasonic vibration or stirring can be reached
It can set according to actual needs, the process to specific ultrasonic vibration or stirring is not defined.
Specifically, in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention, above-mentioned step
In rapid S102, scattered suspension is formed on underlay substrate, can be included：
By the way of film or spraying, scattered suspension is formed on underlay substrate.
It is the preferred embodiment of the embodiment of the present invention by the way of film or spraying, in the specific implementation, may be used also
To use other modes, such as inkjet printing or silk-screen printing, herein not to scattered suspension is formed on underlay substrate
Specific implementation be defined.
Mode three：
When above-mentioned cathode material is graphene；
Before above-mentioned steps S101, as shown in Figure 2 b, it can also include：
S100b, cathode material is fluorinated.
When above-mentioned cathode material is graphene, in above-mentioned steps S100b, cathode material is fluorinated, that is, obtained
Fluorinated graphene, graphene is after fluorination obtains fluorinated graphene, and electric conductivity change is little, i.e., fluorinated graphene also has
Relatively good electric conductivity, and fluorinated graphene is compared to graphene, it is easier to it is scattered in the solvent of fluorochemical, that is, carries
High dispersive property of the cathode material in the solvent of fluorochemical.
Further, it is above-mentioned in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention
Step S102, can include：
Scattered suspension is formed on underlay substrate, while the solvent in the scattered suspension of volatilization, to form cathode layer；
Or,
Scattered suspension is formed on underlay substrate, the solvent in the scattered suspension that volatilizees afterwards, to form cathode layer.
In above-mentioned steps S102, scattered suspension can be formed at substrate by the solvent in the scattered suspension of volatilization
Carry out while on substrate or afterwards, can be with for example, scattered suspension is formed on underlay substrate by the mode according to spraying
The solvent flashing in spraying, can also first spray solvent flashing again, in the specific implementation, underlay substrate can be positioned over to heating
On plate, to realize the scattered suspension of side spraying, while underlay substrate is heated with solvent flashing, or first on underlay substrate
The scattered suspension of spraying, then underlay substrate is positioned over to the solvent heated in heater box with the scattered suspension that volatilizees, this
Place is not defined to concrete technology order.
Specifically, in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention, above-mentioned step
In rapid S102, the solvent in the scattered suspension of volatilization can be specifically included：
Scattered suspension is heated, with the solvent in the scattered suspension that volatilizees；Wherein,
The temperature of heating is 40 DEG C~60 DEG C, and the time of heating is 5min~30min.
In above-mentioned steps S102, the solvent in the scattered suspension that volatilized using relatively low temperature will not be sent out organic electroluminescence
Film layer on optical device produces influence, for example, will not produce influence to the performance of organic layer, using relatively low temperature solvent flashing,
The position of the particle of the cathode material in scattered suspension will not be made to produce larger floating, make the uniformity of cathode layer to be formed
Preferably.It is the preferred embodiment of the present invention that the temperature of above-mentioned heating, which is 40 DEG C~60 DEG C, in actual applications, can also be selected
Other temperature, as long as the cathode layer for not influenceing the performance of organic electroluminescence device and being formed is more uniform, above-mentioned heating
Time is the preferred embodiment that 5min~30min is also the embodiment of the present invention, and in actual applications, the time of heating can root
Determine, the temperature and time of heating is not defined herein according to the thickness of cathode layer.
Specifically, it is above-mentioned to contain in the preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention
Fluorine compounds are preferably polyfluoro or perfluoro alkane, polyfluoro or perfluor aromatic compound, polyfluoro or perfluoroether, or polyfluoro or perfluor alkene
Hydrocarbon.In actual applications, above-mentioned fluorochemical can also be other fluorochemicals, such as two kinds shown in Fig. 3 a and Fig. 3 b
Chemical constitution, is not defined to the specific material of fluorochemical herein.
Below in conjunction with Fig. 4, so that above-mentioned cathode material is graphene as an example, the optimal embodiment to the embodiment of the present invention is entered
Row explanation, as shown in figure 4, the preparation method of organic electroluminescence device negative electrode provided in an embodiment of the present invention, can include：
S201, cathode material, Kynoar and dispersant be dissolved in the solvent of fluorochemical；
S202, by the way of ultrasonic oscillation make cathode material, Kynoar and dispersant in containing fluorination
In the solvent of compound, to form scattered suspension；
S203, by scattered suspension spray on underlay substrate；
S204, the underlay substrate after the scattered suspension of spraying is heated, with the solvent in the scattered suspension that volatilizees, obtained
To cathode layer.
In actual applications, when making OLED, anode can be made using mode of the prior art and respectively had
Machine layer, and cathode layer is made using the preparation method of negative electrode provided in an embodiment of the present invention, obtained OLED is carried out
Test, to applying voltage between anode and negative electrode, and detects the luminous efficiency of the OLED, after tested, to using the present invention
The preparation method for the negative electrode that embodiment is provided makes the voltage for applying 12V between the anode and negative electrode of obtained OLED, should
The luminous efficiency of OLED can reach 15Cd/A, i.e., the preparation method of negative electrode provided in an embodiment of the present invention, relative to adopting
Negative electrode is made with the mode of vacuum evaporation, in the case of cost-effective, it is possible to achieve relatively good luminous efficiency.
The preparation method of above-mentioned organic electroluminescence device negative electrode provided in an embodiment of the present invention, realizes and uses solwution method
Make negative electrode, it is to avoid using cavity coating method make negative electrode can caused by various harmful effects, and cost of manufacture is relatively low, separately
Outside, the solvent of fluorochemical will not produce harmful effect to the organic layer of organic electroluminescence device, be also easier to and solution
Legal system makees the technique docking of organic film, easily realizes the volume production of organic electroluminescence device.In the embodiment of the present invention, also provide
The mode of a variety of dispersive propertys in the solvent of fluorochemical that improve cathode materials, it is ensured that negative electrode in obtained cathode layer
The distribution of material is than more uniform, and the flat better performances of cathode layer.
Second aspect, the embodiments of the invention provide a kind of preparation method of organic EL display panel, such as Fig. 5 with
And shown in Fig. 6 a~Fig. 6 h, including：
S301, the formation anode layer 402 (as shown in Figure 6 a) on underlay substrate 401, and form each on anode layer 402
Organic film 403 (as shown in Figure 6 b)；
S302, the formation protective layer 404 (as fig. 6 c) on organic film 403, and the shape on protective layer 404
Into photoresist layer 405 (as shown in fig 6d)；
S303, protective layer 404 and photoresist layer 405 are handled, to form the figure of the cathode layer 407 with that will be formed
The complementary figure (reference picture 6e, Fig. 6 e ＇ and Fig. 6 f) of shape；
S304, the preparation method making cathode layer 407 (as shown in figure 6g) using above-mentioned organic electroluminescence device negative electrode；
S305, stripping protective layer 404 and photoresist layer 405 (as shown in figure 6h).
The preparation method of above-mentioned organic EL display panel provided in an embodiment of the present invention, on organic film 403
Protective layer 404 is formed, and photoresist layer 405 is formed on protective layer 404, by entering to protective layer 404 and photoresist layer 405
Row processing, with the figure for the pattern complementary for forming the cathode layer 407 with that will be formed, is obtained using the preparation method of above-mentioned negative electrode
Protective layer 404 and photoresist layer 405 are peeled off again after cathode layer 407, to obtain the figure of cathode layer 407.And in the prior art,
The cathode layer 407 of flood is directly made on organic film 403, the pattern for obtaining cathode layer 407 is etched using etching liquid, due to
Acidic materials are typically contained in etching liquid, can there is damage, organic electroluminescent provided in an embodiment of the present invention to organic film 403
The preparation method of display panel, without using etching liquid etching cathode layer 407, will not produce damage to organic film 403.
In the specific implementation, in above-mentioned steps S301, anode layer 402 is formed on underlay substrate 401, cavity can be used
Coating method (such as vacuum vapour deposition plated film, or physical vaporous deposition), it would however also be possible to employ with it is provided in an embodiment of the present invention
The solwution method that the preparation method of above-mentioned negative electrode is similar makes, preferably using cavity coating method.The material of anode layer 402 can be
Transparent tin indium oxide ((Indium tinoxide, ITO)) or indium zinc oxide (Indium zinc oxide, IZO) etc., also may be used
Think other materials, the production method and material of anode layer 402 are not defined herein.Can be using evaporation or solution
Method, forms each organic film 403 on anode layer 402, and organic film 403 at least includes：The hair made on anode layer 402
Photosphere, anode buffer layer, hole injection layer, hole transmission layer, electronic barrier layer, hole barrier can also be made according to demand
One or more of film layers such as layer, electron transfer layer, electron injecting layer, cathode buffer layer, for example according to cathode material
Work function it is higher when, electron injecting layer can be added, to improve electron transport ability.
Specifically, in the preparation method of above-mentioned organic EL display panel provided in an embodiment of the present invention, above-mentioned step
In rapid S302, protective layer 404 is formed on organic film 403, including：
By the way of spin coating or inkjet printing, protective layer 404 is formed on organic film 403.
In the embodiment of the present invention, by the way of spin coating or inkjet printing, protective layer is made on organic film 403
404, without making the protective layer 404 using cavity coating method, will not bring mentioned in background technology organic film 403 it
Upper use cavity coating method makes the various harmful effects of cathode layer 407.
In above-mentioned steps S302, protective layer 404 is set between organic film 403 and photoresist layer 405, is in order to follow-up
Make cathode layer 407 after photoresist layer 405 can be removed, if being not provided with protective layer 404, i.e., organic film 403 it
It is upper directly to make photoresist layer 405, it is exposed to photoresist layer 405 after development, photoresist layer 405 can solidify,
Part photoresist layer 405 insoluble in developer solution has no idea to remove, saturating corresponding to mask plate 406 by taking negative photoresist as an example
The part photoresist layer 405 in light region, dissolubility is changed after exposure, can not be gone insoluble in corresponding developer solution
Remove.In the embodiment of the present invention, protective layer 404 is set between organic film 403 and photoresist layer 405, so, negative electrode is being made
After layer 407, protective layer 404 can be removed using the solvent that can dissolve protective layer 404, thus photoresist layer 405, and
Cathode layer 407 on photoresist layer 405 is also removed together, obtains the figure of cathode layer 407.In actual applications, remove and protect
The solvent of sheath 404 is preferably that selection does not have influential solvent to organic film 403 and cathode layer 407.
Specifically, in the preparation method of above-mentioned organic EL display panel provided in an embodiment of the present invention, above-mentioned step
Rapid S303, can include：
Photoresist layer 405 is handled using photoetching process, to form the figure with the pattern complementary of cathode layer 407
(as shown in Fig. 6 e or Fig. 6 e ＇)；
Protective layer 404 is handled using etching technics, to form the figure consistent with the figure of photoresist layer 405
(as shown in Figure 6 f).
It should be noted that " the complementary figure " mentioned in the embodiment of the present invention, can refer to the figure of Absolute complementarity,
It can refer to due to inevitable technological reason or other reasonses, obtained substantially complementary figure.Carried in the embodiment of the present invention
" the consistent figure " arrived, can refer to definitely consistent figure, can also refer to due to inevitable technological reason or other originals
Cause, obtained substantially uniform figure.
Above-mentioned photoresist layer 405 is the film layer that Other substrate materials are made, and photoresist is also known as photoresist, by photosensitive tree
The photosensitive mixing liquid of fat, three kinds of main component compositions of sensitizer and solvent, photosensitive resin, can be soon after illumination
Generation photocuring reaction so that significant change occurs for the physical property of photoresist, particularly dissolubility, affinity etc., through appropriate
Solvent processing, soluble part can be dissolved, required image is obtained.Photoresist can be divided into negative photoresist and positive-tone photo
Glue, wherein, it is changed into the material insoluble in developer solution after the exposed solidification of negative photoresist, becomes after the exposed solidification of positive photoresist
To dissolve in the material of developer solution.
Fig. 6 e are the schematic diagram for carrying out photoetching treatment to photoresist layer 405 using negative photoresist, in order to obtain cathode layer
407 figure, when being exposed to photoresist layer 405, it is necessary to make light be irradiated to photoresist layer 405 by mask plate 406
On, after photoresist layer 405 corresponding with the transmission region of mask plate 406 is irradiated by light, the material insoluble in developer solution is formed,
And the corresponding photoresist layer 405 in alternatively non-transparent region of mask plate 406 is not irradiated by light, its dissolubility does not change,
Developer solution can be dissolved in, after exposition, the photoresist layer 405 after exposure is carried out using negative photoresist corresponding developer solution
Processing, makes the photoresist layer 405 in correspondence alternatively non-transparent region be dissolved in developer solution, consistent with the transparent area of mask plate 406 to obtain
Figure, from Fig. 6 e, it can be seen that the figure of the figure of the mask plate 406 of negative photoresist and the cathode layer 407 that will be formed
It is complementary.
Fig. 6 e ＇ are the schematic diagram for carrying out photoetching treatment to photoresist layer 405 using positive photoresist, similar with Fig. 6 e, are
The figure of cathode layer 407 is obtained, when being exposed to photoresist layer 405, it is necessary to make light be irradiated to by mask plate 406
On photoresist layer 405, after photoresist layer 405 corresponding with the transmission region of mask plate 406 is irradiated by light, formation dissolves in aobvious
The material of shadow liquid, and the corresponding photoresist layer 405 in the alternatively non-transparent region of mask plate 406 is not irradiated by light, its dissolubility does not have
Change, insoluble in developer solution, after exposition, using the corresponding developer solution of positive photoresist to the photoresist after exposure
Layer 405 is handled, and the photoresist layer 405 of correspondence transmission region is dissolved in developer solution, to obtain the transparent area with mask plate 406
Complementary figure, from Fig. 6 e ＇, it can be seen that the figure of the mask plate 406 of positive photoresist and the cathode layer 407 that will be formed
Figure it is consistent.
Therefore, in above-mentioned steps S303, above-mentioned photoresist layer 405 can be that positive photoresist can also be negative photo
Glue is made, and the figure for obtaining cathode layer 407 can be made using both photoresists, simply positive photoresist and negativity
The pattern complementary for the mask plate 406 that photoresist is used, comparison diagram 6e and Fig. 6 e ＇ this it appears that.
Reference picture 6f, it is necessary to be handled using etching technics protective layer 404 in above-mentioned steps S303, to be formed
The figure consistent with the figure of photoresist layer 405, etching technics will not change the physical property of protective layer 404, subsequently may be used
So that protective layer 404 to be removed by corresponding solvent.
In above-mentioned steps S304, reference picture 6g makes cloudy using the preparation method of above-mentioned organic electroluminescence device negative electrode
Pole layer 407, i.e., make cathode layer 407 using solwution method, cathode material is dissolved in the solvent of fluorochemical and forms scattered outstanding
Supernatant liquid, scattered suspension is formed on photoresist layer 405, and heats the solvent in the scattered suspension of volatilization, due to photoetching
Glue-line 405 has the figure with the pattern complementary of cathode layer 407 with protective layer 404, so removing photoresist layer 405 and protective layer
After 404, the figure of cathode layer 407 can be obtained.
In above-mentioned steps S305, protective layer 404 and photoresist layer 405 are peeled off, can specifically be included：Make cathode layer 407
Underlay substrate 401 (structure as shown in figure 6g) afterwards is placed in the solvent that can dissolve protective layer 404, is kept for a period of time
(such as 30min), after layer 404 to be protected wholly or largely dissolves, the moon on photoresist layer 405 and photoresist layer 405
Pole layer 407 can also be removed together, to obtain the figure (as shown in figure 6h) of cathode layer 407.
In the specific implementation, in above-mentioned steps S302, the material for making protective layer 404 is preferably that molecular formula is such as Fig. 7 institutes
The chemical constitution shown, wherein, R1=half-perfluoroalkyl, R2=butyloxycarbonyl, the chemical constitution can be dissolved in fluorochemical
Solvent in, the fluorochemical can be fluorine-containing ether, such as containing shown in hydrofluoroether (HFE) or Fig. 3 a or Fig. 3 b
Fluorine compounds or other fluorochemicals, further, it is also possible to dissolve protective layer, such as alkyl ether using other materials
Or ethyl tert-butyl ether (ETBE) etc., in actual applications, the material for making protective layer 404 can also be other materials, not limit herein
It is fixed.In step S305, protective layer 404 and photoresist layer 405 can be peeled off using the solvent of fluorochemical.In stripping process
The fluorochemical used, can be identical with the fluorochemical used during making cathode layer 407, can also be different, this
Place is not limited.
In the specific implementation, because the material of protective layer 404 can be dissolved in fluorochemical, in step s 304, system
During making cathode layer 407, fluorochemical may have a certain impact to protective layer 404, can be by improving negative electrode material
The concentration of material, adjusts the heat time in the technological parameter and volatilization process of spraying or coating processes to alleviate to protective layer
404 influence.
In actual applications, in above-mentioned steps S304, cathode material is dissolved in the solvent of fluorochemical and forms scattered
Suspension, and cathode material is suspended in the solvent of fluorochemical by way of ultrasonic oscillation or stirring, for dividing
Dispersant can also be added by dissipating the bad cathode material of performance, and cathode material is only dispersed in the solvent of fluorochemical, cloudy
Pole material and fluorochemical are not chemically reacted, and scattered suspension is formed on photoresist layer 405, and is heated
After solvent in the scattered suspension of volatilization, the cathode material in the solvent of fluorochemical occurs aggregation and precipitated, due to negative electrode
Interaction force between the particle of material, moreover, dispersant also has certain adhesive effect, so that cathode material is formed
One layer of fine and close film, in follow-up step S305, when being peeled off to protective layer 404, will make cathode layer 407 after
Underlay substrate 401 is positioned in the solvent of fluorochemical, now, and the particle of the cathode material in cathode layer 407 is to be gathered in
State together, moreover, underlay substrate 401 to be simply soaked in the solvent of fluorochemical during being peeled off in step S305
In, ultrasonic oscillation or stirring are not carried out to underlay substrate 401, will not destroy mutual between particle in cathode layer 407
Cathode material in active force, thus cathode layer 407 will not be re-dissolved in fluorochemical, i.e., stripping process is to cathode layer 407
Do not have harmful effect.
The preparation method of organic EL display panel provided in an embodiment of the present invention, by organic film and photoetching
Layer protective layer is formed between glue-line, and forms the figure of the pattern complementary of the cathode layer with that will be formed, cathode layer is being made
Afterwards, protective layer and photoresist layer are removed by the way of stripping, in the case where not influenceing the performance of organic film, realized
Cathode layer it is graphical.Further, since making cathode layer using solwution method, the lining of various sizes or various materials is applicable to
Substrate, such as can using glass, plastics, metal or silicon material underlay substrate, in addition, make that cathode layer uses contains
The solvent of fluorine compounds will not produce harmful effect to the organic layer of organic electroluminescence device, be also easier to make with solwution method
The technique docking of organic film, easily realizes the volume production of organic electroluminescence device.
The third aspect, based on same inventive concept, the embodiment of the present invention additionally provides a kind of ORGANIC ELECTROLUMINESCENCE DISPLAYS face
Plate, the organic EL display panel is made using the preparation method of above-mentioned organic EL display panel.The Organic Electricity
The structural representation of photoluminescence display panel is as shown in figure 8, DATA represents data wire in figure, and SCAN represents scan line, and VDD is represented
The pixel being arranged in array is arranged in power end, figure with four rows five to be illustrated, the quantity to pixel is not defined, due to this
The principle that organic EL display panel solves problem is similar to the preparation method of above-mentioned organic EL display panel, because
The implementation of this organic EL display panel may refer to the reality of the preparation method of above-mentioned organic EL display panel
Apply, repeat part and repeat no more.
Fourth aspect, the embodiment of the present invention additionally provides a kind of display device, including：Above-mentioned ORGANIC ELECTROLUMINESCENCE DISPLAYS face
Plate.The display device can apply to any product or part with display function, such as mobile phone, as shown in figure 9, the mobile phone
Display panel can use organic EL display panel provided in an embodiment of the present invention, the section that AA ＇ locate in figure is illustrated
Figure can as shown in figure 6h, in addition, the display device can also be applied to tablet personal computer, television set, display, notebook electricity
In the products such as brain, DPF, navigator or device.Because the display device solves the principle and above-mentioned organic electroluminescence hair of problem
Light display panel is similar, therefore the implementation of the display device may refer to the implementation of above-mentioned organic EL display panel, weight
Multiple part is repeated no more.
Preparation method, the display surface of a kind of organic electroluminescence device negative electrode and display panel provided in an embodiment of the present invention
Plate and display device, the preparation method of the organic electroluminescence device negative electrode, including：Cathode material is dissolved in fluorochemical
Scattered suspension is formed in solvent；Scattered suspension is formed on underlay substrate, and the solvent in the scattered suspension that volatilizees, with
Form cathode layer.The preparation method of negative electrode provided in an embodiment of the present invention, realizes and makes negative electrode using solwution method, it is to avoid adopt
Various harmful effects caused by negative electrode meeting are made with cavity coating method, and cost of manufacture is relatively low, is applicable to various sizes or each
The underlay substrate of kind of material, such as can using glass, plastics, metal or silicon material underlay substrate, in addition, fluorine-containing chemical combination
The solvent of thing will not produce harmful effect to the organic layer of organic electroluminescence device, be also easier to make organic film with solwution method
The technique docking of layer, easily realizes the volume production of organic electroluminescence device.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (17)
1. a kind of preparation method of organic electroluminescence device negative electrode, it is characterised in that including：
Cathode material is dissolved in the solvent of fluorochemical and forms scattered suspension；
The scattered suspension is formed on underlay substrate, and the solvent in the scattered suspension that volatilizees, to form negative electrode
Layer.
2. preparation method as claimed in claim 1, it is characterised in that the solvent that cathode material is dissolved in fluorochemical
It is middle to be formed before scattered suspension, in addition to：
The cathode material is wrapped up using organic matter.
3. preparation method as claimed in claim 1, it is characterised in that the solvent that cathode material is dissolved in fluorochemical
Middle formed disperses suspension, including：
Cathode material, Kynoar and dispersant are dissolved in the solvent of fluorochemical and form scattered suspension.
4. preparation method as claimed in claim 3, it is characterised in that the mass fraction of the cathode material 50%~
In the range of 100%, the mass fraction of the Kynoar is less than 50%, and the mass fraction of the dispersant is less than 5%.
5. preparation method as claimed in claim 3, it is characterised in that the dispersant is lauryl sodium sulfate, polypropylene
Acid, cellulose or polyvinyl alcohol.
6. preparation method as claimed in claim 3, it is characterised in that described by cathode material, Kynoar and scattered
Agent, which is dissolved in the solvent of fluorochemical, forms scattered suspension, specifically includes：
It is described that cathode material, the Kynoar and the dispersant are dissolved in the solvent of fluorochemical, using super
Sound wave shock or the mode of stirring form the scattered suspension.
7. preparation method as claimed in claim 1, it is characterised in that described that the scattered suspension is formed at underlay substrate
On, including：
By the way of film or spraying, the scattered suspension is formed on the underlay substrate.
8. preparation method as claimed in claim 1, it is characterised in that described that the scattered suspension is formed at underlay substrate
On, and the solvent in the scattered suspension that volatilizees, to form cathode layer, including：
The scattered suspension is formed on the underlay substrate, while the solvent in the volatilization scattered suspension, with shape
Into cathode layer；Or,
The scattered suspension is formed on the underlay substrate, the solvent in the scattered suspension that volatilizees afterwards, with shape
Into cathode layer.
9. the preparation method as described in claim 1~8, it is characterised in that the solvent in the volatilization scattered suspension,
Specifically include：
The scattered suspension is heated, with the solvent in the scattered suspension that volatilizees；Wherein,
The temperature of heating is 40 DEG C~60 DEG C, and the time of heating is 5min~30min.
10. the preparation method as described in any one of claim 1~8, it is characterised in that the fluorochemical is polyfluoro or complete
Fluothane hydrocarbon, polyfluoro or perfluor aromatic compound, polyfluoro or perfluoroether, or polyfluoro or perfluoroolefine.
11. the preparation method as described in any one of claim 1~8, it is characterised in that the cathode material is silver, gold, stone
One or more in ink, CNT, graphene, nano metal, tin indium oxide or indium zinc oxide.
12. preparation method as claimed in claim 11, it is characterised in that the cathode material is graphene；
It is described to be dissolved in cathode material in the solvent of fluorochemical before forming scattered suspension, in addition to：
The cathode material is fluorinated.
13. a kind of preparation method of organic EL display panel, it is characterised in that including：
Anode layer is formed on underlay substrate, and forms on the anode layer each organic film；
Protective layer is formed on the organic film, and photoresist layer is formed on the protective layer；
The protective layer and the photoresist layer are handled, with the figure for the pattern complementary for forming the cathode layer with that will be formed
Shape；
Using negative electrode as described in the preparation method making of the organic electroluminescence device negative electrode as described in any one of claim 1~12
Layer；
Peel off the protective layer and the photoresist layer.
14. preparation method as claimed in claim 13, it is characterised in that described to enter to the protective layer and the photoresist layer
Row processing, with the figure for the pattern complementary for forming the cathode layer with that will be formed, including：
The photoresist layer is handled using photoetching process, to form the figure with the pattern complementary of the cathode layer；
The protective layer is handled using etching technics, to form the figure consistent with the figure of the photoresist layer.
15. the preparation method as described in claim 13 or 14, it is characterised in that described formed on the organic film protects
Sheath, including：
By the way of spin coating or inkjet printing, protective layer is formed on the organic film.
16. a kind of organic EL display panel, it is characterised in that the organic EL display panel uses such as right
It is required that the preparation method of the organic EL display panel described in 13~15 any one makes.
17. a kind of display device, it is characterised in that including：Organic EL display panel as claimed in claim 16.
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| CN109810567A (en) * | 2017-11-21 | 2019-05-28 | Tcl集团股份有限公司 | Inorganic nano material prints ink and its preparation method and application |
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| CN109810573A (en) * | 2017-11-21 | 2019-05-28 | Tcl集团股份有限公司 | Inorganic nano material prints ink and its preparation method and application |
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| CN107275513B (en) | 2020-07-10 |
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Effective date of registration: 20211020 Address after: No.8 liufangyuan Road, Dongyi Industrial Park, Donghu New Technology Development Zone, Wuhan, Hubei Province Patentee after: WUHAN TIANMA MICRO-ELECTRONICS Co.,Ltd. Patentee after: Wuhan Tianma Microelectronics Co.,Ltd. Shanghai Branch Address before: Room 509, building 1, 6111 Longdong Avenue, Pudong New Area, Shanghai 201201 Patentee before: SHANGHAI TIANMA AM-OLED Co.,Ltd. |