CN107275434B - A kind of pure inorganic photovoltaic detector based on ZnO/CsPbBr3/MoO3 structure - Google Patents

A kind of pure inorganic photovoltaic detector based on ZnO/CsPbBr3/MoO3 structure Download PDF

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CN107275434B
CN107275434B CN201710262660.0A CN201710262660A CN107275434B CN 107275434 B CN107275434 B CN 107275434B CN 201710262660 A CN201710262660 A CN 201710262660A CN 107275434 B CN107275434 B CN 107275434B
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王浩
薛梦妮
周海
叶葱
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    • HELECTRICITY
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H01L31/101Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
    • H01L31/103Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PN homojunction type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
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    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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Abstract

The invention proposes a kind of FTO/ZnO nanometer rods/CsPbBr3/MoO3Pure inorganic photodetector of driving certainly of/Au structure and preparation method thereof, specific structure is FTO substrate layer, and ZnO nanorod is electron transfer layer, CsPbBr3Perovskite is light-absorption layer, conductor oxidate MoO3For hole transmission layer, metal electrode is made of Au.Using the methods of spin coating, water-bath, two-step method synthesis, vapor deposition preparation.Present invention utilizes ZnO nanorod/CsPbBr3The full-inorganic heterojunction structure of formation and with conductor oxidate MoO3For hole transmission layer, make the present invention that there is high stability and low cost, and responsiveness and detection degree are respectively 0.45A/W and 1.76 × 1013cmHz1/2/ W, while device has from driving capability, when work, do not need applying bias, and low-power consumption work is energy saving.Operation of the present invention step is simple, and experimental cost is cheap, with good application prospect.

Description

One kind being based on ZnO/CsPbBr3/MoO3The pure inorganic photovoltaic detector of structure
Technical field
The present invention relates to semiconductor nano material and photodetector technical fields, are based on ZnO/ more particularly, to one kind CsPbBr3/MoO3The photodetector from the driving pure inorganic perovskite material of high stability of structure.
Background technique
Organic inorganic hybridization lead halide perovskite material causes extensive concern in recent years, they have biggish absorption Coefficient, long carrier lifetime and diffusion length, thus have in solar battery, LED, photodetector and laser compared with It applies more.However, poor stability makes organic inorganic hybridization lead halide perovskite in air under the influence of water, oxygen molecule It is easy to decompose, limits its development [1] in the opto-electronic device.And pure inorganic perovskite material is proved to have higherization Stability and electric property [2-4] are learned, therefore is had based on the performance study of pure inorganic perovskite photodetector and is greatly ground Study carefully meaning, simultaneity factor studies its stability with important researching value.
【Bibliography】
[1]X.Tang,Z.Zu,H.Shao,W.Hu,M.Zhou,M.Deng,W.Chen,Z.Zang,T. Zhu and J.Xue,Nanoscale,2016,8,15158.
[2]R.J.Sutton,G.E.Eperon,L.Miranda,E.S.Parrott,B.A.Kamino,J.B. Patel, M.T.M.B.Johnston,A.A.Haghighirad,D.T.Moore and H.J. Snaith, Adv.Energy Mater.,2016,6,1502458.
[3]X.Li,D.Yu,F.Cao,Y.Gu,Y.Wei,Y.Wu,J.Song and H.Zeng,Adv.Funct. Mater.,2016,26,5903.
[4]M.Kulbak,S.Gupta,N.Kedem,I.Levine,T.Bendikov,G.Hodes and D. Cahen, J.Phys.Chem.Lett.,2016,7,167.
Summary of the invention
Based on above-mentioned technical background, the present invention provides a kind of based on FTO/ZnO nanometer rods/CsPbBr3/MoO3/ Au structure From driving pure inorganic photovoltaic detector of high stability and preparation method thereof.
The invention is realized in this way.It is mainly by transparent conducting glass, electron transfer layer, perovskite light-absorption layer, hole Transport layer, metal electrode composition, wherein electron transfer layer is by the ZnO nanometer bar construction that generates in ZnO seed layer, while It is hole blocking layer, perovskite light-absorption layer is the perovskite CsPbBr being synthesized by two-step process3Constitute, hole transmission layer be by MoO3It constitutes, while being also electronic barrier layer, metal electrode is Au film.
Specific preparation flow of the invention and technique are as follows:
(1) deionized water, acetone, alcohol sono-transparent electro-conductive glass FTO each 15 minutes are used respectively, then use UV ozone Environmental treatment 30 minutes.
(2) ZnO seed layer is prepared using the method for spin coating.It is dissolved in methanol solution then with the zinc acetate solution of 1.5M Stirring 10 minutes, is spin-coated on FTO using the revolving speed of 5000r/min, and the time is 20 seconds.10min is dried under the conditions of 100 DEG C, It is then transferred in muffle furnace and anneals, time 2h.Obtained ZnO seed layer thickness about 20nm~50nm, 30nm or so Preferably.
(3) ZnO nanorod is prepared using immersion method.150ml deionized water is added to 0.6g polyetherimide (PEI) Then 50mmol/L zinc nitrate hexahydrate (Zn (NO is added in middle stirring3)2·6H2) and 30mmol/L hexamethylenetetramine O (C6H12N4), it is sufficiently stirred 30 minutes, the sample after step (2) annealing is put into solution, reacts 10 under 88.5 degree of environment Minute, sample is sufficiently dried up after being taken out in solution.ZnO nanorod is transferred in muffle furnace and is annealed, temperature is 300 DEG C, time 2h.The length of obtained ZnO nanorod about 300nm~500nm, wherein 400nm or so is preferable.
(4) synthetic method of calcium titanium ore bed uses traditional two-step method.First by 1M PbBr2It is dissolved in Dimethyl Asian Maple DMSO In, 15h is kept the temperature under the conditions of 70 DEG C and is allowed to sufficiently dissolve, and is then filtered spare;CsBr is dissolved in methanol solution and stirs 30 Minute is spare;The first step is by above-mentioned PbBr2Solution is spin-coated on ZnO nanorod for 30 seconds using 3000 turns, is then baked in thermal station It is dry, second step is carried out after 30 minutes, is impregnated 10 minutes in CsBr methanol solution, is then dried for 250 degree;
(5) hole transmission layer is deposited again on calcium titanium ore bed.Here hole mobile material uses MoO3, using the side of vapor deposition Method, evaporation rate areThe MoO of vapor deposition3With a thickness of 5nm~30nm, wherein 12nm or so is preferable;
(6) last gold electrode is using the method being deposited, evaporation rateThe Au electrode of vapor deposition with a thickness of 50nm~70nm. optimum thickness is 60nm or so;
(7) it detects after photoelectric properties and stability up to the product.
In order to test the stability of device, we use following four method:
(1) photo-current intensity of the test device under long-time illumination;
(2) by device, exposure is in air and without any encapsulation for a long time, every 24 hours, to the photoelectric properties of device Once tested;
(3) device is heated to different temperature, DEG C every 10 DEG C intervals from 50 DEG C to 100, and measure respectively each At a temperature of device photoelectric properties;
(4) water resistance of device is tested.It immerses the device into ethanol solution, is taken out after 3 seconds first, find the photoelectricity of device Performance does not significantly decrease, thus attempts to that a certain amount of deionized water is added in ethanol solution.Ethyl alcohol and alcohol are set Solution be respectively 9:1,8:2,7:3 etc., it immerses the device into the identical time and takes out drying test.
Pattern and crystal structure use Field Emission Scanning Electron microscope (SEM) (JSM-7100F), X x ray diffraction (XRD) (Bruker D8Advance CuKa radiation), ultraviolet-visible (UV) spectrophotometer (UV3600) are examined It surveys.The photoelectric properties of detector are tested using corresponding method.These Measurement results are listed in attached drawing respectively.
The present invention is by ZnO nanorod, CsPbBr3And MoO3It combines, obtains a kind of high detection degree, high response It spends and pure inorganic from driving photodetector with higher stability.
The high stability of detection is as follows:Photoelectric current has almost no change after twenty minutes for illumination;After saving 30 days in air Also remain with the photoelectric current greater than 40%;Also with 100 times of on-off ratio at 70 DEG C;Ethyl alcohol and deionization water body can be immersed Product is than being 8:In 2 mixed solution, technical performance is not reduced significantly.
The advantage of the invention is that:
(1) this method operating procedure is simple, and experimental cost is cheap, and prepared ZnO nanorod/CsPbBr3Hetero-junctions Overall structure it is clear, ZnO nanorod is uniformly neat, while stability with higher.
It is well known that the aerial stability of hybrid inorganic-organic perovskite material is poor, hydrone and oxygen in air Molecule makes perovskite be easy to decompose, and the present invention uses pure inorganic material, and then stability is good for inorganic perovskite material.Its Secondary, the hole mobile material of this device also uses inorganic material MoO3, than common hole mobile material spiro-OMe-TAD It is easy to form a film and cheap, environmental-friendly.
(2) stability test of device is more comprehensive.Influence of the long-time illumination to device photoelectric performance is tested respectively, No any encapsulation exposure is in air to device photoelectric performance, and the heat resistance of device and the water resistance of device are without larger shadow It rings.
(3) device has the performance from driving, does not need external bias to drive, low-power consumption work is energy saving.
Detailed description of the invention
Fig. 1 is structure chart of the invention.
Fig. 2 is the SEM figure of ZnO/ calcium titanium ore bed of the invention.(a), (b) is respectively:ZnO nanorod/perovskite table Face, ZnO nanorod/perovskite section.
Fig. 3 is that ZnO nanorod and ZnO nanorod/perovskite UV absorb.
Fig. 4 is 12nm MoO3The I-V characteristic curve of the detector of thickness.
Fig. 5 is 12nm MoO3The I-T characteristic curve of the detector of thickness.
Fig. 6 is different MoO3The responsiveness curve of the detector of thickness.
Fig. 7 is different MoO3The spy measure curve of the detector of thickness.
Wherein in structure chart 1,1---FTO layers, 2---ZnO seed layer, 3---ZnO nanometer rods layer, 4--- CsPbBr3Calcium Titanium ore layer, 5---MoO3Layer, 6---Au membrane electrode.
Specific embodiment
Below by embodiment it will be better understood that the present invention.
Embodiment 1:12nm thickness MoO3The preparation of the preparation of detector:
(1) deionized water, acetone, alcohol sono-transparent electro-conductive glass FTO each 15 minutes are used respectively, then use UV ozone Environmental treatment 30 minutes.
(2) ZnO seed layer is prepared using the method for spin coating.It is dissolved in methanol solution then with the zinc acetate solution of 1.5M Stirring 10 minutes, is spin-coated on FTO using the revolving speed of 5000r/min, and the time is 20 seconds.10min is dried under the conditions of 100 DEG C, It is then transferred in muffle furnace and anneals, time 2h.
(3) ZnO nanorod is prepared using immersion method.150ml deionized water is added to 0.6g polyetherimide (PEI) Then 50mmol/L zinc nitrate hexahydrate (Zn (NO is added in middle stirring3)2·6H2) and 30mmol/L hexamethylenetetramine O (C6H12N4), it is sufficiently stirred 30 minutes, the sample after step (2) annealing is put into solution, reacts 10 under 88.5 degree of environment Minute, sample is sufficiently dried up after being taken out in solution.ZnO nanorod is transferred in muffle furnace and is annealed, temperature is 300 DEG C, time 2h;
(4) synthetic method of calcium titanium ore bed uses traditional two-step method.First by 1M PbBr2Being dissolved in DMSO, (diformazan is sub- Maple) in, 15h is kept the temperature under the conditions of 70 DEG C and is allowed to sufficiently dissolve, and is then filtered spare;CsBr is dissolved in methanol solution and is stirred Mix 30 minutes it is spare;PbBr2Solution is spin-coated in ZnO nanometer rods for 30 seconds using 3000 turns, is then dried in thermal station, 30 points Zhong Hou is impregnated 10 minutes in CsBr methanol solution, is then dried for 250 degree;
(5) HTM layers are deposited again on calcium titanium ore bed.Here HTM layers of material uses MoO3, using the method for vapor deposition, steam Sending out rate isThe MoO of vapor deposition3Thickness 12nm;
(6) last gold electrode is using the method being deposited, evaporation rateThe thickness of the Au electrode of vapor deposition is most It is eventually 60nm or so;
(7) up to product after detecting.
Obtained device is subjected to XRD, SEM phenetic analysis, assembled photodetector is tested into its I-V characteristic song Line, I-T characteristic curve, photoelectric respone curve and response speed.These Measurement results are listed in attached drawing respectively.
Embodiment 2:Different-thickness MoO3The preparation of detector:
(1) deionized water, acetone, alcohol sono-transparent electro-conductive glass FTO each 15 minutes are used respectively, then use UV ozone Environmental treatment 30 minutes.
(2) ZnO seed layer is prepared using the method for spin coating.It is dissolved in methanol solution then with the zinc acetate solution of 1.5M Stirring 10 minutes, is spin-coated on FTO using the revolving speed of 5000r/min, and the time is 20 seconds.10min is dried under the conditions of 100 DEG C, It is then transferred in muffle furnace and anneals, time 2h.
(3) ZnO nanorod is prepared using immersion method.150ml deionized water is added to 0.6g polyetherimide (PEI) Then 50mmol/L zinc nitrate hexahydrate (Zn (NO is added in middle stirring3)2·6H2) and 30mmol/L hexamethylenetetramine O (C6H12N4), it is sufficiently stirred 30 minutes, the sample after step (2) annealing is put into solution, reacts 10 under 88.5 degree of environment Minute, sample is sufficiently dried up after being taken out in solution.ZnO nanorod is transferred in muffle furnace and is annealed, temperature is 300 DEG C, time 2h;
(4) synthetic method of calcium titanium ore bed uses traditional two-step method.First by 1M PbBr2Being dissolved in DMSO, (diformazan is sub- Maple) in, 15h is kept the temperature under the conditions of 70 DEG C and is allowed to sufficiently dissolve, and is then filtered spare;CsBr is dissolved in methanol solution and is stirred Mix 30 minutes it is spare;PbBr2Solution is spin-coated in ZnO nanometer rods for 30 seconds using 3000 turns, is then dried in thermal station, 30 points Zhong Hou is impregnated 10 minutes in CsBr methanol solution, is then dried for 250 degree;
(5) HTM layers are deposited again on calcium titanium ore bed.Here HTM layers of material uses MoO3, using the method for vapor deposition, steam Sending out rate isThe MoO of vapor deposition3Thickness be respectively 0nm, 6nm, 12nm 24nm and 48nm;
(6) last gold electrode is using the method being deposited, evaporation rateThe thickness of the Au electrode of vapor deposition is most It is eventually 60nm or so;
(7) it detects.
Obtained device is subjected to XRD, SEM phenetic analysis, assembled photodetector is tested into its I-V characteristic song Line, I-T characteristic curve, photoelectric respone curve and response speed.These Measurement results are listed in attached drawing respectively.

Claims (3)

1. one kind is based on ZnO/CsPbBr3/MoO3The pure inorganic photovoltaic detector of structure, it mainly by transparent conducting glass, have ZnO nanorod electron transfer layer, the CsPbBr of hole barrier effect3Inorganic perovskite light-absorption layer, with electronic blocking effect MoO3Hole transmission layer, metal Au membrane electrode assembly are 300nm at, it is characterised in that the electron transfer layer ZnO nanorod length ~500nm, ZnO nanorod are grown in ZnO seed layer, and ZnO seed layer thickness is 20nm~50nm, the light-absorption layer CsPbBr3Perovskite is on ZnO nanorod, the hole transmission layer MoO3With a thickness of 5nm~30nm, the metal Au film Electrode with a thickness of 50nm~70nm, selected materials are entirely inorganic material;The detector prepare with the following method and At including the following steps:(1) FTO uses deionized water, acetone, alcohol each ultrasonic 15 minutes respectively, then uses UV ozone environment Processing 30 minutes;
(2) ZnO seed layer is prepared with spin coating;It is dissolved in methanol solution and is subsequently agitated for 10 minutes with the zinc acetate solution of 1.5M, It is spin-coated on FTO using the revolving speed of 5000r/min, the time is 20 seconds;10min is dried under the conditions of 100 DEG C, is then transferred to horse boiling It anneals in furnace, temperature is 300 DEG C, time 2h;
(3) ZnO nanorod is prepared using immersion method;It is added in 150ml deionized water and is stirred with 0.6g polyetherimide PEI, Then 50mmol/L zinc nitrate hexahydrate Zn (NO is added3)2·6H2O and 30mmol/L hexamethylenetetramine C6H12N4, it is sufficiently stirred 30 minutes, the sample after step (2) annealing is put into solution, is reacted 10 minutes under 88.5 degrees Celsius of environment, from solution Sample is sufficiently dried up after taking out;ZnO nanorod is transferred in muffle furnace and is annealed, temperature is 300 DEG C, and the time is 2h;
(4) calcium titanium ore bed is synthesized using traditional two-step method;First by 1M PbBr2It is dissolved in Dimethyl Asian Maple DMSO, in 70 DEG C of items 15h is kept the temperature under part to be allowed to sufficiently dissolve, and is then filtered spare;CsBr is dissolved in methanol solution stir 30 minutes it is spare; PbBr2Solution is spin-coated on ZnO nanorod for 30 seconds using 3000 turns, is then dried in thermal station, after 30 minutes, in CsBr methanol It impregnates 10 minutes in solution, then dries for 250 degree;
(5) spin coating HTM layers again are finished after calcium titanium ore bed;Here HTM layers of material uses MoO3;Using the method for evaporation vapor deposition, steam Sending out rate is
(6) method that last gold electrode is deposited using evaporation, evaporation rate are
(7) it detects, so far, a complete pure inorganic photovoltaic detector can be fabricated to.
2. according to claim 1 a kind of based on ZnO/CsPbBr3/MoO3The pure inorganic photovoltaic detector of structure, feature It is that the electron transfer layer ZnO nanorod length is 400nm, ZnO nanorod is grown in ZnO seed layer, ZnO seed thickness Degree is 30nm, the light-absorption layer CsPbBr3Perovskite is on ZnO nanorod, the hole transmission layer MoO3With a thickness of 12nm, the metal Au membrane electrode with a thickness of 60nm, selected materials are entirely inorganic material.
3. one kind is based on ZnO/CsPbBr3/MoO3The preparation method of the pure inorganic photovoltaic detector of structure, it is characterised in that step It is as follows:
(1) FTO uses deionized water, acetone, alcohol each ultrasonic 15 minutes respectively, then uses UV ozone environmental treatment 30 minutes;
(2) ZnO seed layer is prepared with spin coating;It is dissolved in methanol solution and is subsequently agitated for 10 minutes with the zinc acetate solution of 1.5M, It is spin-coated on FTO using the revolving speed of 5000r/min, the time is 20 seconds;10min is dried under the conditions of 100 DEG C, is then transferred to horse boiling It anneals in furnace, temperature is 300 DEG C, time 2h;
(3) ZnO nanorod is prepared using immersion method;It is added in 150ml deionized water and is stirred with 0.6g polyetherimide PEI, Then 50mmol/L zinc nitrate hexahydrate Zn (NO is added3)2·6H2O and 30mmol/L hexamethylenetetramine C6H12N4, it is sufficiently stirred 30 minutes, the sample after step (2) annealing is put into solution, is reacted 10 minutes under 88.5 degrees Celsius of environment, from solution Sample is sufficiently dried up after taking out;ZnO nanorod is transferred in muffle furnace and is annealed, temperature is 300 DEG C, and the time is 2h;
(4) calcium titanium ore bed is synthesized using traditional two-step method;First by 1M PbBr2It is dissolved in Dimethyl Asian Maple DMSO, in 70 DEG C of items 15h is kept the temperature under part to be allowed to sufficiently dissolve, and is then filtered spare;CsBr is dissolved in methanol solution stir 30 minutes it is spare; PbBr2Solution is spin-coated on ZnO nanorod for 30 seconds using 3000 turns, is then dried in thermal station, after 30 minutes, in CsBr methanol It impregnates 10 minutes in solution, then dries for 250 degree;
(5) spin coating HTM layers again are finished after calcium titanium ore bed;Here HTM layers of material uses MoO3;Using the method for evaporation vapor deposition, steam Sending out rate is
(6) method that last gold electrode is deposited using evaporation, evaporation rate are
(7) it detects, so far, a complete pure inorganic photovoltaic detector can be fabricated to.
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