CN107247388B - 曝光装置、器件制造***及器件制造方法 - Google Patents
曝光装置、器件制造***及器件制造方法 Download PDFInfo
- Publication number
- CN107247388B CN107247388B CN201710421666.8A CN201710421666A CN107247388B CN 107247388 B CN107247388 B CN 107247388B CN 201710421666 A CN201710421666 A CN 201710421666A CN 107247388 B CN107247388 B CN 107247388B
- Authority
- CN
- China
- Prior art keywords
- light
- substrate
- projected
- optical system
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/24—Curved surfaces
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012276139 | 2012-12-18 | ||
JP2012-276139 | 2012-12-18 | ||
CN201380066736.2A CN104871091B (zh) | 2012-12-18 | 2013-11-29 | 基板处理装置、器件制造***及器件制造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380066736.2A Division CN104871091B (zh) | 2012-12-18 | 2013-11-29 | 基板处理装置、器件制造***及器件制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107247388A CN107247388A (zh) | 2017-10-13 |
CN107247388B true CN107247388B (zh) | 2018-09-18 |
Family
ID=50978197
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710421666.8A Active CN107247388B (zh) | 2012-12-18 | 2013-11-29 | 曝光装置、器件制造***及器件制造方法 |
CN201380066736.2A Active CN104871091B (zh) | 2012-12-18 | 2013-11-29 | 基板处理装置、器件制造***及器件制造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380066736.2A Active CN104871091B (zh) | 2012-12-18 | 2013-11-29 | 基板处理装置、器件制造***及器件制造方法 |
Country Status (6)
Country | Link |
---|---|
JP (4) | JP6217651B2 (ja) |
KR (6) | KR101861905B1 (ja) |
CN (2) | CN107247388B (ja) |
HK (1) | HK1208915A1 (ja) |
TW (3) | TWI596438B (ja) |
WO (1) | WO2014097859A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105425553B (zh) * | 2011-12-20 | 2018-08-28 | 株式会社尼康 | 基底处理装置、器件制造***、以及器件制造方法 |
WO2021193360A1 (ja) | 2020-03-24 | 2021-09-30 | 株式会社カネカ | 膵臓α細胞への分化誘導方法 |
CN114070971A (zh) * | 2020-07-27 | 2022-02-18 | 奥林巴斯株式会社 | 观察装置、光偏转单元、像形成方法 |
CN117031720B (zh) * | 2023-09-28 | 2023-12-29 | 微纳动力(北京)科技有限责任公司 | 一种自动化集成光学装置及*** |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101208570A (zh) * | 2005-06-28 | 2008-06-25 | 伊斯曼柯达公司 | 带有组合光程的uv固化装置 |
CN101276157A (zh) * | 2007-03-28 | 2008-10-01 | 株式会社Orc制作所 | 曝光绘图装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0864501A (ja) | 1994-08-25 | 1996-03-08 | Nikon Corp | 投影光学系及びそれを備えた露光装置 |
JP2002258489A (ja) * | 2000-04-20 | 2002-09-11 | Nikon Corp | 露光装置および露光方法 |
KR101483791B1 (ko) * | 2005-06-02 | 2015-01-16 | 칼 짜이스 에스엠티 게엠베하 | 마이크로리소그래피 투영 대물 렌즈 |
DE102005030839A1 (de) * | 2005-07-01 | 2007-01-11 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage mit einer Mehrzahl von Projektionsobjektiven |
CN102253477B (zh) * | 2006-03-20 | 2014-05-28 | 株式会社尼康 | 反射折射投影光学***、扫描曝光装置、微元件的制造方法 |
JP4984631B2 (ja) | 2006-04-28 | 2012-07-25 | 株式会社ニコン | 露光装置及び方法、露光用マスク、並びにデバイス製造方法 |
US8379187B2 (en) * | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
JP2009231311A (ja) * | 2008-03-19 | 2009-10-08 | Nikon Corp | 照明装置、露光装置、露光方法及びデバイス製造方法 |
DE102009037077B3 (de) * | 2009-08-13 | 2011-02-17 | Carl Zeiss Smt Ag | Katadioptrisches Projektionsobjektiv |
JP5724564B2 (ja) * | 2010-04-13 | 2015-05-27 | 株式会社ニコン | マスクケース、マスクユニット、露光装置、基板処理装置及びデバイス製造方法 |
JP2012004564A (ja) * | 2010-06-11 | 2012-01-05 | Nikon Corp | 露光方法、露光装置、デバイス製造方法 |
WO2013035661A1 (ja) | 2011-09-07 | 2013-03-14 | 株式会社ニコン | 基板処理装置 |
CN105425553B (zh) | 2011-12-20 | 2018-08-28 | 株式会社尼康 | 基底处理装置、器件制造***、以及器件制造方法 |
-
2013
- 2013-11-29 CN CN201710421666.8A patent/CN107247388B/zh active Active
- 2013-11-29 KR KR1020157016021A patent/KR101861905B1/ko active IP Right Grant
- 2013-11-29 KR KR1020197016087A patent/KR102009138B1/ko active IP Right Grant
- 2013-11-29 JP JP2014553056A patent/JP6217651B2/ja active Active
- 2013-11-29 KR KR1020177032390A patent/KR101934228B1/ko active IP Right Grant
- 2013-11-29 KR KR1020187037259A patent/KR101988820B1/ko active IP Right Grant
- 2013-11-29 KR KR1020187010045A patent/KR101903941B1/ko active IP Right Grant
- 2013-11-29 KR KR1020197022704A patent/KR102075325B1/ko active IP Right Grant
- 2013-11-29 WO PCT/JP2013/082185 patent/WO2014097859A1/ja active Application Filing
- 2013-11-29 CN CN201380066736.2A patent/CN104871091B/zh active Active
- 2013-12-06 TW TW102144736A patent/TWI596438B/zh active
- 2013-12-06 TW TW106123484A patent/TWI639896B/zh active
- 2013-12-06 TW TW107133825A patent/TWI687779B/zh active
-
2015
- 2015-09-30 HK HK15109649.9A patent/HK1208915A1/xx not_active IP Right Cessation
-
2017
- 2017-09-15 JP JP2017178348A patent/JP6414303B2/ja active Active
-
2018
- 2018-09-28 JP JP2018186122A patent/JP6635167B2/ja active Active
-
2019
- 2019-12-10 JP JP2019222657A patent/JP2020052420A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101208570A (zh) * | 2005-06-28 | 2008-06-25 | 伊斯曼柯达公司 | 带有组合光程的uv固化装置 |
CN101276157A (zh) * | 2007-03-28 | 2008-10-01 | 株式会社Orc制作所 | 曝光绘图装置 |
Also Published As
Publication number | Publication date |
---|---|
KR102009138B1 (ko) | 2019-08-08 |
JPWO2014097859A1 (ja) | 2017-01-12 |
CN104871091A (zh) | 2015-08-26 |
TWI596438B (zh) | 2017-08-21 |
TW201426202A (zh) | 2014-07-01 |
KR101934228B1 (ko) | 2018-12-31 |
CN107247388A (zh) | 2017-10-13 |
JP6414303B2 (ja) | 2018-10-31 |
JP2019049723A (ja) | 2019-03-28 |
KR20190000398A (ko) | 2019-01-02 |
TWI639896B (zh) | 2018-11-01 |
KR20190093699A (ko) | 2019-08-09 |
TW201740218A (zh) | 2017-11-16 |
KR101861905B1 (ko) | 2018-05-28 |
JP6635167B2 (ja) | 2020-01-22 |
WO2014097859A1 (ja) | 2014-06-26 |
KR101988820B1 (ko) | 2019-06-12 |
KR20180040730A (ko) | 2018-04-20 |
KR101903941B1 (ko) | 2018-10-02 |
CN104871091B (zh) | 2017-06-30 |
KR20190067258A (ko) | 2019-06-14 |
HK1208915A1 (en) | 2016-03-18 |
TWI687779B (zh) | 2020-03-11 |
JP2020052420A (ja) | 2020-04-02 |
KR20170127053A (ko) | 2017-11-20 |
KR102075325B1 (ko) | 2020-02-07 |
JP2017227916A (ja) | 2017-12-28 |
TW201905603A (zh) | 2019-02-01 |
JP6217651B2 (ja) | 2017-10-25 |
KR20150097514A (ko) | 2015-08-26 |
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