CN107235642A - Plated film section for producing coated glass and application thereof - Google Patents
Plated film section for producing coated glass and application thereof Download PDFInfo
- Publication number
- CN107235642A CN107235642A CN201710533183.7A CN201710533183A CN107235642A CN 107235642 A CN107235642 A CN 107235642A CN 201710533183 A CN201710533183 A CN 201710533183A CN 107235642 A CN107235642 A CN 107235642A
- Authority
- CN
- China
- Prior art keywords
- targets
- isolation chamber
- plated film
- coated glass
- isolation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of plated film section for being used to produce coated glass and its application, and the plated film section at least includes：Some isolation chambers, transmission unit, gas barrier unit, cathode targets, vacuum unit and cooling unit；Each isolation chamber is sequentially connected, and the top of each isolation chamber sets openable cover plate, and each cover plate size and shape is consistent；The inside of each isolation chamber sets gas barrier unit or cathode targets；The transmission unit is arranged on the lower section in separate cavities room and all isolation chambers of insertion；Vacuum extractor each is set on the cover plate on the isolation chamber equipped with the gas barrier unit；The isolation chamber interior for being provided with the cathode targets also sets up cooling unit.Technology arrangement in the present invention can meet the production of a variety of single, double silver products；The different products of production, when target location needs to change, can it is easy, timely change；Future products update, and need to reserve certain technique upgrading space.
Description
Technical field
The present invention relates to a kind of plated film section for being used to produce coated glass and application thereof, production Low emissivity plating is particularly suitable for use in
Film glass, belongs to mechanical field.
Background technology
Low radiation coated glass, (Low-E glass) is used and either physically or chemically plated on the glass surface containing one
Layer or the two layers even metallic film or metal-oxide film of assembly of thin films, to reduce energy inside and outside energy absorption or control room
Exchange, ensure life, the comfortableness of work, and reach with this purpose of environmental protection and energy saving.
With advocating for energy-saving and emission-reduction policy, people propose higher requirement to low radiation coated glass.It is commonly used for life
Produce coated glass plated film section production product can not meet it has been proposed that requirements at the higher level.Large area magnetron sputtering plating
Production line includes many parts, and wherein nucleus is the technology arrangement of plated film high vacuum region, i.e. plated film section.
There is film coating unit in the prior art and install complicated, very flexible, isolating coefficient is low, vacuum environment is poor, cooling effect
The low problem of rate, for example, each institute's components to be mounted is fixed in isolation chamber, it is impossible to random fractionation, when whole
When equipment needs to be varied from, then virtually increase the costs such as unnecessary human and material resources and time to user, while isolating system
The low, vacuum environment of number is poor, cooling effect is low can have a strong impact on the film quality of preparation.
The content of the invention
The shortcoming of prior art, is used to produce coated glass it is an object of the invention to provide a kind of in view of the above
Plated film section and application thereof, the plated film section for solving to be used to produce in the prior art coated glass installs complicated, very flexible, every
Low from coefficient, vacuum environment is poor, the low problem of cooling effectiveness.
In order to achieve the above objects and other related objects, the present invention provides a kind of plated film section for being used to produce coated glass,
The plated film section at least includes：It is some isolation chambers, transmission unit, gas barrier unit, cathode targets, vacuum unit, with
And cooling unit；Each isolation chamber is sequentially connected, and the top of each isolation chamber sets openable cover plate, often
The individual cover plate size and shape is consistent；The inside of each isolation chamber sets gas barrier unit or cathode targets；
The transmission unit is arranged on the bottom in separate cavities room and all isolation chambers of insertion；The gas barrier unit is each housed
Isolation chamber on cover plate on vacuum extractor is set；The isolation chamber interior for being provided with the cathode targets also sets up cooling
Unit.
Preferably, bleeding point is set between adjacent two isolation chambers.
Preferably, each isolation chamber is 6 regular face bodies and in the same size.
Preferably, it is each that sealing ring is provided between the cover plate and the isolation chamber.
Preferably, the gas barrier unit includes the lateral partitions laterally set and longitudinally disposed longitudinal baffle, institute
The top that lateral partitions are located at transmission unit is stated, the longitudinal baffle upper end reaches the top of isolation chamber, and lower end reaches transverse direction
Dividing plate.
Preferably, the isolation chamber interior for being provided with the cathode targets also sets up cooling unit, the cooling unit bag
The cooling water pipeline for being arranged on lower section in the second separate cavities room is included, the cooling water pipeline is connected with external water source.
Preferably, the transmission unit uses transmission roller channel, and the transmission roller channel includes some rollers.
Preferably, the cathode targets be selected from SiAl targets, TiO targets, SnAl targets, ZnAl targets, ZnSn targets,
Any one or a few in AZO targets, Ni targets, Cr targets, NiCr targets, Ag targets
Preferably, the cathode targets according to SiAl targets, ZnAl targets, NiCr targets, Ag targets, NiCr targets,
SnZn targets, ZnAl targets, NiCr targets, Ag targets, NiCr targets, SnZn targets, SiAl targets order be separately mounted to every
From in chamber.
Sequence described above is the production technology order of the plated film on glass, uses above-mentioned target plated film successively on glass.Institute
State and be respectively mounted, refer to a cathode targets are installed in each isolation chamber.
Preferably, the isolation chamber totally 40, and be sequentially connected, wherein the 2nd isolation chamber and the 3rd isolation chamber
Middle setting SiAl targets, the 7th isolation chamber and the 8th isolation chamber are installed ZnAl targets, the 11st isolation chamber and installed
NiCr targets, the 13rd isolation chamber install Ag targets, the 15th isolation chamber install NiCr targets, the 18th isolation chamber and
19th isolation chamber install SnZn targets, the 22nd isolation chamber and the 23rd isolation chamber install ZnAl targets, the 26th
Isolate chamber installation NiCr targets, the 28th isolation chamber installation Ag targets, the 30th isolation chamber and NiCr targets, the 33rd are installed
Individual isolation chamber and the 34th isolation chamber are installed SnZn targets, the 38th isolation chamber and the 39th isolation chamber and installed
Gas barrier unit is installed in SiAl targets, remaining isolation chamber.
It is used to produce coated glass another aspect provides the above-mentioned plated film section for being used to produce coated glass
Purposes.
As described above, section of plated film for producing coated glass of the present invention and application thereof, has the advantages that：
It is in the same size because each isolation chamber uses standardized designs, therefore, the work in each cover plate and inside
Unit is suitable for other isolation chambers；Therefore gas barrier unit therein also applies to any one isolation chamber.
When technique needs adjustment, the position for the element wherein installed can be arbitrarily adjusted.Rational technology arrangement can be met：It is many
Plant the production of single, double silver products；The different products of production, when target location needs to change, can it is easy, timely change；Not
Carry out model change, certain technique upgrading space need to be reserved.
Brief description of the drawings
Fig. 1 is shown as structure overall structure diagram of the present invention.
Fig. 2 is shown as the structural representation of the 4th isolation chamber in Fig. 1.
Component label instructions
2 the 2nd isolation chambers
3 the 3rd isolation chambers
4 the 4th isolation chambers
41 cover plates
42 vacuum units
43 bleeding points
44 CD feeding ports
45 rollers
46 T-shaped dividing plates
403 longitudinal baffles
404 lateral partitions
7 the 7th isolation chambers
8 the 8th isolation chambers
11 the 11st isolation chambers
13 the 13rd isolation chambers
15 the 15th isolation chambers
33 the 33rd isolation chambers
34 the 34th isolation chambers
38 the 38th isolation chambers
39 the 39th isolation chambers
Embodiment
It should be clear that structure, ratio, size depicted in this specification institute accompanying drawings etc., only to coordinate specification to be taken off
The content shown, so that those skilled in the art is understood with reading, is not limited to enforceable qualifications of the invention, therefore
Do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influenceing this practicality
Under new effect that can be generated and the purpose that can reach, it all should still fall and obtain and can cover in disclosed technology contents
In the range of.Meanwhile, the term of cited such as " on ", " under " in this specification, "left", "right", " centre " and " one ", also
Only understanding for ease of narration, and be not used to limit enforceable scope of the invention, its relativeness is altered or modified, in nothing
Under essence change technology contents, when being also considered as enforceable category of the invention.
As shown in Fig. 1~2, the present invention provides a kind of plated film section for being used to produce coated glass, described to be used to produce plated film
The plated film section of glass is included to being not limited to：40 isolation chambers, each isolation chambers use standardized designs, are all the 6 of rule
Face body, therefore, size is identical, and shape is consistent.Each isolation the chamber long 3900mm, wide 900mm, high 1000mm.Certainly, institute
Stating the number of isolation chamber can be adjusted as needed, and its size and specific shape are also to adjust.
Fig. 2 is shown in the structural representation of the 4th isolation chamber 4.Because other isolation chambers are similar with its structure,
It therefore, it can as reference.The lower section of each isolation chamber sets CD feeding port 44, is also set up out in last isolation chamber
Bleeding point 43 is also set up between two adjacent isolation chambers of piece mouthful.The area of the CD feeding port is about 0.07m2, the pumping
The area in hole is about 0.24m2.Therefore adjacent two isolation chambers are connected by CD feeding port with bleeding point.
The top of each isolation chamber sets openable cover plate 41, and each size of cover plate 41 is equal.
Preferably, it is additionally provided with sealing ring between the cover plate and the isolation chamber so that sealing effectiveness is more preferable.
In the lower section of the inside of each isolation chamber, transmission unit is set, therefore, all isolation of insertion during transmission unit
Chamber.In the present embodiment, the transmission unit uses transmission roller channel, and the transmission roller channel includes several rollers
45, the horizontal lower section for being arranged on isolation chamber CD feeding port of each roller, it is ensured that the glass come in from CD feeding port can be transmitted
To next isolation chamber.In the present embodiment, 3 rollers are installed in the lower section of each isolation chamber.
In other embodiments, the transmission unit can also use transmission belt.
In the present embodiment, the isolation chamber totally 40, and be sequentially connected, wherein the 2nd isolation chamber 2 and the 3rd
Isolate in chamber 3 and set SiAl targets, the 7th isolation chamber 7 and the 8th isolation chamber 8 that ZnAl targets, the 11st isolation are installed
Chamber 11 install NiCr targets, the 13rd isolation chamber 13 install Ag targets, the 15th isolation chamber 15 install NiCr targets,
18th isolation chamber and the 19th isolation chamber install SnZn targets, the 22nd isolation chamber and the 23rd isolation chamber peace
Fill ZnAl targets, the 26th isolation chamber and NiCr targets, the 28th isolation chamber installation Ag targets, the 30th isolation chamber are installed
NiCr targets, the 33rd isolation chamber 33 and the 34th isolation chamber 34 are installed SnZn targets, the 38th isolation chamber 38 are installed
SiAl targets are installed with the 39th isolation chamber 39, gas barrier unit is installed in remaining isolation chamber.
The coated glass prepared using above-described embodiment, it is not only had good optically and thermally performance, (U values are less than
1.5)。
General, the order and number of the installation of above-mentioned target are adjusted according to the required glass prepared.Such as
2 and the 3rd installations are SiAl targets, and are continuously installed, but can only be mounted with one in other embodiments
SiAl targets, can also install more SiAl targets, now can discontinuously install.
In the present invention, it is equal in magnitude due to cover plate, therefore can arbitrarily adjust.
The species and number for the cathode targets typically installed are as needed and adjusted.According to the present invention it is possible to
Plated film is carried out on glass successively.
General, the cathode targets can be planar cathode, can be rotating cathode.In the present embodiment, the 11st,
13rd, 15,26,28,30 mounting plane negative electrode, other are all rotating cathodes.Wherein rotating cathode can prepare Jie of coated glass
Matter layer, plays the effect such as anti-reflection, anti-reflection；Planar cathode can prepare metal level and functional layer, and metal level plays defencive function layer
Effect, functional layer can play reduction radiance effect.
In the present embodiment, in the lower section installing handle target fixture of cover plate, cathode targets or rotary target material pass through target
Material fixture is arranged on the lower section of cover plate.In the present embodiment, the target fixture includes 4 terminations, and each two termination is
One group, respectively the two ends positioned at cover plate cathode targets are fixed.Transmission component is contained in the termination, can fixed negative pole target and with
Cavity cover plate insulate.
Vacuum unit 42 each is set on the cover plate on the isolation chamber equipped with the gas barrier unit.In this implementation
Vacuum unit selects molecular pump (purchased in market) described in example.Be mounted with four molecular pumps altogether in the present embodiment, it is general can be with
1~6 molecular pump is installed.The molecular pump can will isolate chamber vacuum state.
In another embodiment, the gas barrier unit includes the lateral partitions 404 laterally set and longitudinally disposed
Longitudinal baffle 403, the lateral partitions are located at the top of transmission unit, and the longitudinal baffle upper end reaches the top of isolation chamber
Portion, lower end reaches lateral partitions.Gas isolator will isolate chamber and be divided into the two completely isolated spaces in left and right, will can be passed through
Process gas it is relative be sealed in insulating space, prevent process gas between mutual play, influence adjacent film layers quality.It is horizontal
It is fixed on to the two ends of dividing plate using screw on divider wall, longitudinal baffle is stood in using clamping plate and separate cavities are fixed in lateral partitions
In room.The lateral partitions level is arranged on place above CD feeding port, the middle position that longitudinal baffle makes positioned at separate cavities, therefore
Isolation chamber is divided into the insulating space of two almost identical sizes.
In another embodiment, the isolation chamber interior for being provided with the cathode targets also sets up cooling unit, described cold
But unit includes being arranged on the cooling water pipeline (not shown) of lower section in separate cavities room, the cooling water pipeline and external water
Source is connected.The cooling water pipeline is coiled between roller.The cooling unit can reduce the temperature of isolation chamber interior, make
Obtain more uniform during plated film.
In the present embodiment, the T-shaped dividing plate 46 that cross section is T-shaped is set between roller.The longitudinal component insertion of T-shaped dividing plate
Between roller, lateral part is located between two adjacent rollers, and the T-shaped dividing plate is sealed the hole between roller,
Improve the sealing property of whole device.The horizontal component of the T-shaped dividing plate is slightly below the peak of roller.
In another embodiment, the water distribution pipe is made using copper material, because the heat conductivility of copper is preferably, therefore
Function with preferable transmission heat.
It, for the plated film section to coated glass plated film, is one of whole Coated Glass Line that plated film section above, which is,
Point.
Embodiment above is, in order to illustrate embodiment disclosed by the invention, can not to be interpreted as the limit to the present invention
System.In addition, method, the change of composition in various modifications listed herein and invention, are not departing from the scope of the present invention
Be obvious for those skilled in the art on the premise of spirit.Although having combined a variety of specific of the present invention
Preferred embodiment has carried out specific description to the present invention, it is to be understood that, the present invention should not be limited only to these specific embodiments.
In fact, various modifications obvious for those skilled in the art as described above should all include to obtain invention
Within the scope of the invention.
Claims (10)
1. a kind of plated film section for being used to produce coated glass, it is characterised in that the plated film section at least includes：Some separate cavities
Room, transmission unit, gas barrier unit, cathode targets, vacuum unit and cooling unit；
Each isolation chamber is sequentially connected, and the top of each isolation chamber sets openable cover plate, each described
Cover plate size and shape is consistent；
The inside of each isolation chamber sets gas barrier unit or cathode targets；
The transmission unit is arranged on the bottom in the separate cavities room and all isolation chambers of insertion；
Vacuum extractor each is set on the cover plate on the isolation chamber equipped with the gas barrier unit；
The isolation chamber interior for being provided with the cathode targets also sets up cooling unit.
2. the plated film section according to claim 1 for being used to produce coated glass, it is characterised in that：Two adjacent separate cavities
Bleeding point is set between room.
3. the plated film section according to claim 1 for being used to produce coated glass, it is characterised in that：Each isolation chamber
All it is 6 regular face bodies and in the same size；Sealing ring is each provided between the cover plate and the isolation chamber.
4. the plated film section according to claim 1 for being used to produce coated glass, it is characterised in that：The gas barrier unit
Including the lateral partitions laterally set and longitudinally disposed longitudinal baffle, the lateral partitions are located at the top of transmission unit, institute
The top that longitudinal baffle upper end reaches isolation chamber is stated, lower end reaches lateral partitions.
5. the plated film section according to claim 1 for being used to produce coated glass, it is characterised in that：The cooling unit includes
The cooling water pipeline of bottom in separate cavities room is arranged on, the cooling water pipeline is connected with external water source.
6. the plated film section according to claim 1 for being used to produce coated glass, it is characterised in that：The transmission unit is used
Transmission roller channel, the transmission roller channel includes some rollers.
7. the plated film section according to claim 1 for being used to produce coated glass, it is characterised in that：The cathode targets are selected from
SiAl targets, TiO targets, SnAl targets, ZnAl targets, ZnSn targets, AZO targets, Ni targets, Cr targets, NiCr targets, Ag
Any one or a few in target.
8. the plated film section according to claim 7 for being used to produce coated glass, it is characterised in that：The cathode targets according to
SiAl targets, ZnAl targets, NiCr targets, Ag targets, NiCr targets, SnZn targets, ZnAl targets, NiCr targets, Ag targets,
NiCr targets, SnZn targets, SiAl targets order are separately mounted in the separate cavities room.
9. the plated film section according to claim 8 for being used to produce coated glass, it is characterised in that：The isolation chamber totally 40
It is individual, and be sequentially connected, wherein set in the 2nd isolation chamber and the 3rd isolation chamber SiAl targets, the 7th isolation chamber and
8th isolation chamber installs ZnAl targets, the 11st isolation chamber installation NiCr targets, the 13rd isolation chamber and installs Ag targets
Material, the 15th isolation chamber install NiCr targets, the 18th isolation chamber and the 19th isolation chamber and install SnZn targets, the 22nd
Individual isolation chamber and the 23rd isolation chamber install ZnAl targets, the 26th isolation chamber and install NiCr targets, the 28th isolation
Chamber is installed Ag targets, the 30th isolation chamber installation NiCr target, the 33rd isolation chamber and the 34th isolation chamber and installed
SnZn targets, the 38th isolation chamber and the 39th isolation chamber install SiAl targets, and gas is installed in remaining isolation chamber
Isolated location.
10. the plated film section that being used for according to any one of claim 1~9 produces coated glass is used to produce coated glass
Purposes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710533183.7A CN107235642A (en) | 2017-07-03 | 2017-07-03 | Plated film section for producing coated glass and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710533183.7A CN107235642A (en) | 2017-07-03 | 2017-07-03 | Plated film section for producing coated glass and application thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107235642A true CN107235642A (en) | 2017-10-10 |
Family
ID=59991411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710533183.7A Pending CN107235642A (en) | 2017-07-03 | 2017-07-03 | Plated film section for producing coated glass and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107235642A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102220559A (en) * | 2010-04-15 | 2011-10-19 | 甘国工 | Production method and production device of flat solar-energy heat-absorbing film-coated plate |
| EP1786947B1 (en) * | 2004-09-03 | 2012-12-19 | Cardinal CG Company | Coater and method for applying films on a substrate |
| CN103204637A (en) * | 2012-01-12 | 2013-07-17 | 上海北玻玻璃技术工业有限公司 | Transparent conducting oxide coated glass coating line vacuum system |
| CN104060236A (en) * | 2014-05-14 | 2014-09-24 | 中国科学院广州能源研究所 | Continuous coating production system of sheet substrates |
| CN207031269U (en) * | 2017-07-03 | 2018-02-23 | 中国建材国际工程集团有限公司 | For producing the plated film section of coated glass |
-
2017
- 2017-07-03 CN CN201710533183.7A patent/CN107235642A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1786947B1 (en) * | 2004-09-03 | 2012-12-19 | Cardinal CG Company | Coater and method for applying films on a substrate |
| CN102220559A (en) * | 2010-04-15 | 2011-10-19 | 甘国工 | Production method and production device of flat solar-energy heat-absorbing film-coated plate |
| CN103204637A (en) * | 2012-01-12 | 2013-07-17 | 上海北玻玻璃技术工业有限公司 | Transparent conducting oxide coated glass coating line vacuum system |
| CN104060236A (en) * | 2014-05-14 | 2014-09-24 | 中国科学院广州能源研究所 | Continuous coating production system of sheet substrates |
| CN207031269U (en) * | 2017-07-03 | 2018-02-23 | 中国建材国际工程集团有限公司 | For producing the plated film section of coated glass |
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Application publication date: 20171010 |