CN107177829B - AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process - Google Patents
AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process Download PDFInfo
- Publication number
- CN107177829B CN107177829B CN201710533151.7A CN201710533151A CN107177829B CN 107177829 B CN107177829 B CN 107177829B CN 201710533151 A CN201710533151 A CN 201710533151A CN 107177829 B CN107177829 B CN 107177829B
- Authority
- CN
- China
- Prior art keywords
- coating
- alnbc
- alnbcn
- depositing
- magnetically controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 40
- 238000003475 lamination Methods 0.000 title claims abstract description 24
- 239000011247 coating layer Substances 0.000 title claims abstract description 21
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 128
- 239000011248 coating agent Substances 0.000 claims abstract description 126
- 238000000151 deposition Methods 0.000 claims abstract description 67
- 239000011159 matrix material Substances 0.000 claims abstract description 30
- 238000007733 ion plating Methods 0.000 claims abstract description 27
- 230000007704 transition Effects 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 17
- 239000010410 layer Substances 0.000 claims abstract description 15
- 238000005520 cutting process Methods 0.000 claims abstract description 14
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 6
- 239000000956 alloy Substances 0.000 claims abstract description 6
- 239000007888 film coating Substances 0.000 claims abstract description 6
- 238000009501 film coating Methods 0.000 claims abstract description 6
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 4
- 239000010959 steel Substances 0.000 claims abstract description 4
- 150000002500 ions Chemical class 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 13
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- 238000004140 cleaning Methods 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000356 contaminant Substances 0.000 claims description 4
- 238000010891 electric arc Methods 0.000 claims description 4
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 3
- 229910052582 BN Inorganic materials 0.000 claims description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910001315 Tool steel Inorganic materials 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 abstract description 36
- 239000000463 material Substances 0.000 abstract description 10
- 229910052799 carbon Inorganic materials 0.000 abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 3
- 229910001018 Cast iron Inorganic materials 0.000 abstract description 2
- 229910001069 Ti alloy Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 8
- 230000005611 electricity Effects 0.000 description 6
- HSFWRNGVRCDJHI-UHFFFAOYSA-N Acetylene Chemical compound C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- QFUKUPZJJSMEGE-UHFFFAOYSA-N 5-(hydroxymethyl)-1-(3-methylbutyl)pyrrole-2-carbaldehyde Chemical compound CC(C)CCN1C(CO)=CC=C1C=O QFUKUPZJJSMEGE-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910003074 TiCl4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000003278 mimic effect Effects 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 235000015170 shellfish Nutrition 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to machine-building cutting tool fields, more particularly to a kind of AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process.The present invention uses non-balance magnetically controlled sputter+arc ion plating composite film coating method, directlys adopt AlNbC composition target and makees carbon source, and depositing temperature is controlled at 300 DEG C hereinafter, can prepare on more extensive cutter or tool base.Prepared AlNbC/AlNbCN lamination composite coating layer cutter, tool matrix surface are deposited with coating, and the coating is from inside to outside successively are as follows: Ti transition zone, AlNbC coating and the alternate laminated composite structure of AlNbCN coating, outermost layer are AlNbCN coating.The advantages of prepared AlNbC/AlNbCN lamination composite coating layer cutter combines AlNbC carbide coating, AlNbCN carboritride coating and laminated construction, with excellent physical mechanical property, the roughing and finishing of steel, stainless steel, cast iron, heat-resisting alloy, titanium alloy etc materials can be widely applied to.
Description
Technical field
The invention belongs to machine-building metal cutting tool fields, compound more particularly to a kind of AlNbC/AlNbCN lamination
Coated cutting tool and its preparation process.
Background technique
More stringent requirements are proposed for the fast-developing material and performance to cutter of contemporary Machining Technology for Cutting, dry type, height
Speed cutting becomes the direction of Tool in Cutting development.Become in tool surface deposition ganoine thin film and improves cutter service performance
Important channel.TiCN is most widely used at present ternary carboritride hard coat, and TiCN coating is due to having both TiC's
The excellent toughness of high rigidity and TiN, significantly improve its friction and wear behavior (Jinlong Li, Shihong Zhang,
Mingxi Li.Influence of the C2H2 flow rate on gradient TiCN films deposited by
Multi-arc ion plating [J] .Applied Surface Science, 2013 (283): 134-144.), it answers extensively
It is higher than the wearability of ordinary rigid alloy cutter in high-speed cutting for the processing of milling, tapping, punching press, molding and gear hobbing
5-8 times.Chinese patent " turbo rotor groove milling cutter surface TiCN multi-layer composite coatings preparation process " (patent No.
201510564738.5) utilize Ti, nitrogen (N2) and acetylene gas (C2H2) TiCN coating has been synthesized under 450 DEG C of depositing temperatures
Milling cutter solves 26NiCrMov145 material rotors processing problem.
Although TiCN coating has the advantages that high rigidity, low-friction coefficient, simultaneously because its thermal stability and red hardness compared with
Difference is suitable only for being applied to slow cutting or the occasion with good cooling condition, need to conventional Ti CN coating structure and preparation
Technique improves.Currently, diversification is that material improves mechanical property, the effective way of corrosion resistance and wearability, pass through preparation
Multicomponent composite coating, not only can be improved the bond strength of coating and matrix, but also take into account the comprehensive performance of a variety of single coatings, significantly improve
The performance of coated cutting tool.
The carboritrides such as TiCN mainly pass through the preparation of the technologies such as chemical vapour deposition technique (CVD) at present, that is, pass through
TiCl4(or Ti target), CH4(or C2H2) and N2Equal gas reactions generate, and depositing temperature is usually more than 400 DEG C, generate to matrix
Adverse effect, while gaseous carbon sources are easy to pollute coating apparatus, constrain its extensive use.
Laminar composite has been developed in recent years Material reinforcement toughening new technology, and this structure is by imitating shellfish
Shell, therefore it is called bionical laminated composite materials.The nacre of shell is a kind of natural layer structure material in nature,
Its fracture toughness is but higher by 3000 times or more than common single homogeneous texture.Therefore, pass through mimic biology material structure form
Interlayer design, the toughness, stability and antifriction that current carboritride coating can be improved in the lamination composite coating prepared are resistance to
The comprehensive performances such as mill property.
Summary of the invention
The deficiency of current existing carboritride coated cutting tool performance and preparation method, in conjunction with stratiform composite structure
Advantage provides a kind of AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process.
AlNbC/AlNbCN lamination composite coating layer cutter of the present invention, including tool matrix, tool matrix surface are heavy
Product has a coating, and the coating is from inside to outside successively are as follows: Ti transition zone, AlNbC coating and the alternate lamination of AlNbCN coating are compound
Structure, outermost layer are AlNbCN coating；
Wherein:
Tool matrix material is high-speed steel, in tool steel, mould steel, hard alloy, ceramics, diamond, cubic boron nitride
It is a kind of.
Cr, the 10-20wt% for being 65-80wt% comprising weight fraction in the non-balance magnetically controlled sputter AlNbC composition target
Nb and 10-15wt% C.
The preparation process of AlNbC/AlNbCN lamination composite coating layer cutter of the present invention, depositional mode are using non-flat
Weigh magnetron sputtering+arc ion plating composite film coating method, uses 2 non-balance magnetically controlled sputter AlNbC composition targets when deposition, and 2
Arc ion plating Ti target: using electric arc ion-plating deposition Ti transition zone first, is then replaced using non-balance magnetically controlled sputter method
Depositing Al NbC coating and AlNbCN coating, outermost layer are AlNbCN coating.
Al, the 20-30wt% for being 55-70wt% comprising weight fraction in the non-balance magnetically controlled sputter AlNbC composition target
Nb and 10-15wt% C, the non-balance magnetically controlled sputter AlNbC composition target using vacuum hot-pressing prepare, specific steps
Include the following:
(1) powder of Al, Nb and C that the good powder purity of weight proportion is 99.9% is mixed and is packed into mold, so
The mold equipped with powder is placed in vacuum hotpressing stove afterwards；
(2) it is rapidly heated first, and starts to apply 20~40MPa of initial pressure in heating, then rise to 1100 at a slow speed~
1500 DEG C, heat preservation, mixed powder forms to obtain sample after hot pressed sintering；
(3) be sintered after sample furnace cooling be cooled to 100 DEG C or less come out of the stove non-balance magnetically controlled sputter AlNbC is compound
Target.
The preparation process of the AlNbC/AlNbCN lamination composite coating layer cutter, specifically includes the following steps:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, it is miscellaneous to remove surface and oil contaminant, rusty stain etc.
Then matter is sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 50min, removes tool surface greasy dirt and other attachments, electricity are blown
Air-dry it is dry sufficiently after be put into coating machine rapidly, be evacuated to 6.0 × 10-3Pa is heated to 250 DEG C, keeps the temperature 30min；
(2) clean to tool matrix surface ion: logical Ar gas, adjusting its pressure is 1.2Pa, opens grid bias power supply, voltage
600V, duty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 450V, and duty ratio 0.2 opens ion source Ion Cleaning
35min opens arc ion plating Ti target power supply, Ti target current 55A, bias 300V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone is plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias drop
To 200V, arc ion plating Ti target current 80A is adjusted, 200 DEG C of depositing temperature, 5~6min of depositing Ti transition zone；
(4) it uses non-balance magnetically controlled sputter depositing Al NbC coating on Ti transition zone: closing arc ion plating Ti target electricity
Source, adjusts 0.9~1.0Pa of Ar air pressure, and bias is adjusted to 120V, 170 DEG C of depositing temperature, it is compound to open non-balance magnetically controlled sputter AlNbC
Target current 30A, 3~4min of depositing Al NbC coating；
(5) it uses non-balance magnetically controlled sputter depositing Al NbCN coating on AlNbC coating: opening N2, N2Air pressure is 1.2Pa,
Ar 0.7~0.8Pa of air pressure, bias 150V adjust the compound target current 30A of non-balance magnetically controlled sputter AlNbC, 170 DEG C of depositing temperature, multiple
Depositing Al NbCN 3~4min of coating is closed, deposition is completed to close N2；
(6) it uses non-balance magnetically controlled sputter depositing Al NbC coating on AlNbCN coating: adjusting 0.9~1.0Pa of Ar air pressure,
Bias is adjusted to 120V, 170 DEG C of depositing temperature, opens the compound target current 30A of non-balance magnetically controlled sputter AlNbC, depositing Al NbC coating
3~4min；
(7) (5), (6), (5) ... (5), alternating deposit AlNbCN coating, AlNbC coating, AlNbCN coating ... are repeated
AlNbCN coating is co-deposited 70min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
AlNbC/AlNbCN lamination composite coating layer cutter prepared by the present invention, tool matrix surface are deposited with coating, institute
State coating from inside to outside successively are as follows: Ti transition zone, AlNbC coating and the alternate laminated composite structure of AlNbCN coating, outermost layer
For AlNbCN coating, the Ti transition zone main function on tool matrix is inter-laminar stress caused by slowing down because of coating composition mutation,
The binding performance between coating and tool matrix is improved, the Al in coating not only plays solution strengthening effect, moreover it is possible to oxygen combination shape
At fine and close Al2O3Protective film, can improve the high temperature oxidation resistance of coating, and Nb element improves the hardness of coating, intensity and anti-
It presses, wear-resisting, corrosion resisting property, the C element in coating reduces the coefficient of friction of coating surface, and coating is made to have excellent antifriction profit
Sliding and wear resistance.The interface layer of the laminated composite structure can prevent the growth of coating column crystal simultaneously, hinder to split
The extension of line and defect improves the hardness, toughness and impact resistance of coating.
Compared with prior art, the present invention having the advantages that.
The present invention uses non-balance magnetically controlled sputter+arc ion plating composite film coating method, directlys adopt AlNbC composition target
Make carbon source, and depositing temperature is controlled at 300 DEG C hereinafter, can prepare on more extensive cutter or tool base.Prepared
AlNbC/AlNbCN lamination composite coating layer cutter combines AlNbC carbide coating, AlNbCN carboritride coating and lamination
The advantages of structure, has very high hardness and toughness, and surface is smooth, and skin-friction force is very low, flows fast through convenient for chip, resistance to
Mill property is more preferable, and blade face is not likely to produce built-up edge, the integrality with high thermal deformation resistant performance and cutting edge, excellent
High temperature oxidation resistance and stripper-resistance, good antifriction lubrication and wear resistance.Prepared AlNbC/AlNbCN is folded
Layer composite coating layer cutter, compares conventional Ti CN coated cutting tool, and 50% or more cutting speed can be improved, and reduces tool abrasion 70%
More than, improve one times of coating service life or more.The AlNbC/AlNbCN lamination composite coating layer cutter can be widely applied to steel,
The roughing and finishing of stainless steel, cast iron, heat-resisting alloy, titanium alloy etc materials.
Detailed description of the invention
The coating structure schematic diagram of Fig. 1, AlNbC/AlNbCN lamination composite coating layer cutter of the invention.
In figure: 1, tool matrix 2, Ti transition zone 3, AlNbC coating 4, AlNbCN coating 5, AlNbC coating with
The alternate laminated composite structure of AlNbCN coating.
Specific embodiment
Two most preferred embodiments of the invention are given below:
Embodiment 1
AlNbC/AlNbCN lamination composite coating layer cutter described in the present embodiment, the cutter are common turning insert, base
Body material are as follows: hard alloy M10, tool matrix surface are deposited with coating, and the coating is from inside to outside successively are as follows: Ti transition zone,
AlNbC coating and the alternate laminated composite structure of AlNbCN coating, outermost layer are AlNbCN coating.
The preparation process of AlNbC/AlNbCN lamination composite coating layer cutter described in the present embodiment, depositional mode are using non-
Unbalanced magnetron sputtering+arc ion plating composite film coating method, uses 2 non-balance magnetically controlled sputter AlNbC composition targets when deposition, and 2
A arc ion plating Ti target: using electric arc ion-plating deposition Ti transition zone first, is then handed over using non-balance magnetically controlled sputter method
For depositing Al NbC coating and AlNbCN coating, outermost layer is AlNbCN coating.
In the non-balance magnetically controlled sputter AlNbC composition target comprising weight fraction be 55wt% Al, 30wt% Nb and
The C of 15wt%.
The preparation process of the AlNbC/AlNbCN lamination composite coating layer cutter, specifically includes the following steps:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, it is miscellaneous to remove surface and oil contaminant, rusty stain etc.
Then matter is sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 50min, removes tool surface greasy dirt and other attachments, electricity are blown
Air-dry it is dry sufficiently after be put into coating machine rapidly, be evacuated to 6.0 × 10-3Pa is heated to 250 DEG C, keeps the temperature 30min；
(2) clean to tool matrix surface ion: logical Ar gas, adjusting its pressure is 1.2Pa, opens grid bias power supply, voltage
600V, duty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 450V, and duty ratio 0.2 opens ion source Ion Cleaning
35min opens arc ion plating Ti target power supply, Ti target current 55A, bias 300V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone is plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias drop
To 200V, arc ion plating Ti target current 80A is adjusted, 200 DEG C of depositing temperature, 5~6min of depositing Ti transition zone；
(4) it uses non-balance magnetically controlled sputter depositing Al NbC coating on Ti transition zone: closing arc ion plating Ti target electricity
Source, adjusts 0.9~1.0Pa of Ar air pressure, and bias is adjusted to 120V, 170 DEG C of depositing temperature, it is compound to open non-balance magnetically controlled sputter AlNbC
Target current 30A, 3~4min of depositing Al NbC coating；
(5) it uses non-balance magnetically controlled sputter depositing Al NbCN coating on AlNbC coating: opening N2, N2Air pressure is 1.2Pa,
Ar 0.7~0.8Pa of air pressure, bias 150V adjust the compound target current 30A of non-balance magnetically controlled sputter AlNbC, 170 DEG C of depositing temperature, multiple
Depositing Al NbCN 3~4min of coating is closed, deposition is completed to close N2；
(6) it uses non-balance magnetically controlled sputter depositing Al NbC coating on AlNbCN coating: adjusting 0.9~1.0Pa of Ar air pressure,
Bias is adjusted to 120V, 170 DEG C of depositing temperature, opens the compound target current 30A of non-balance magnetically controlled sputter AlNbC, depositing Al NbC coating
3~4min；
(7) (5), (6), (5) ... (5), alternating deposit AlNbCN coating, AlNbC coating, AlNbCN coating ... are repeated
AlNbCN coating is co-deposited 70min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
Embodiment 2
AlNbC/AlNbCN lamination composite coating layer cutter described in the present embodiment, the cutter are common brazed carbide turning tool,
Basis material are as follows: high speed steel W18Cr4V, tool matrix surface are deposited with coating, and the coating is from inside to outside successively are as follows: Ti transition
Layer, AlNbC coating and the alternate laminated composite structure of AlNbCN coating, outermost layer are AlNbCN coating.
The preparation process of AlNbC/AlNbCN lamination composite coating layer cutter described in the present embodiment, depositional mode are using non-
Unbalanced magnetron sputtering+arc ion plating composite film coating method, uses 2 non-balance magnetically controlled sputter AlNbC composition targets when deposition, and 2
A arc ion plating Ti target: using electric arc ion-plating deposition Ti transition zone first, is then handed over using non-balance magnetically controlled sputter method
For depositing Al NbC coating and AlNbCN coating, outermost layer is AlNbCN coating.
In the non-balance magnetically controlled sputter AlNbC composition target comprising weight fraction be 70wt% Al, 20wt% Nb and
The C of 10wt%.
The preparation process of the AlNbC/AlNbCN lamination composite coating layer cutter, specifically includes the following steps:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, it is miscellaneous to remove surface and oil contaminant, rusty stain etc.
Then matter is sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 50min, removes tool surface greasy dirt and other attachments, electricity are blown
Air-dry it is dry sufficiently after be put into coating machine rapidly, be evacuated to 6.0 × 10-3Pa is heated to 250 DEG C, keeps the temperature 30min；
(2) clean to tool matrix surface ion: logical Ar gas, adjusting its pressure is 1.2Pa, opens grid bias power supply, voltage
600V, duty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 450V, and duty ratio 0.2 opens ion source Ion Cleaning
35min opens arc ion plating Ti target power supply, Ti target current 55A, bias 300V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone is plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias drop
To 200V, arc ion plating Ti target current 80A is adjusted, 200 DEG C of depositing temperature, 5~6min of depositing Ti transition zone；
(4) it uses non-balance magnetically controlled sputter depositing Al NbC coating on Ti transition zone: closing arc ion plating Ti target electricity
Source, adjusts 0.9~1.0Pa of Ar air pressure, and bias is adjusted to 120V, 170 DEG C of depositing temperature, it is compound to open non-balance magnetically controlled sputter AlNbC
Target current 30A, 3~4min of depositing Al NbC coating；
(5) it uses non-balance magnetically controlled sputter depositing Al NbCN coating on AlNbC coating: opening N2, N2Air pressure is 1.2Pa,
Ar 0.7~0.8Pa of air pressure, bias 150V adjust the compound target current 30A of non-balance magnetically controlled sputter AlNbC, 170 DEG C of depositing temperature, multiple
Depositing Al NbCN 3~4min of coating is closed, deposition is completed to close N2；
(6) it uses non-balance magnetically controlled sputter depositing Al NbC coating on AlNbCN coating: adjusting 0.9~1.0Pa of Ar air pressure,
Bias is adjusted to 120V, 170 DEG C of depositing temperature, opens the compound target current 30A of non-balance magnetically controlled sputter AlNbC, depositing Al NbC coating
3~4min；
(7) (5), (6), (5) ... (5), alternating deposit AlNbCN coating, AlNbC coating, AlNbCN coating ... are repeated
AlNbCN coating is co-deposited 70min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
Claims (1)
1. a kind of AlNbC/AlNbCN lamination composite coating layer cutter, it is characterised in that: tool matrix material is high-speed steel, tool
Steel, mould steel, hard alloy, ceramics, diamond, a kind of in cubic boron nitride, tool matrix surface is deposited with coating, coating from
It is interior to arrive outside successively are as follows: Ti transition zone, AlNbC coating and the alternate laminated composite structure of AlNbCN coating, outermost layer AlNbCN
Coating；
Coated cutting tool depositional mode is using non-balance magnetically controlled sputter+arc ion plating composite film coating method, and when deposition uses 2
2 arc ion plating Ti targets: non-balance magnetically controlled sputter AlNbC composition target uses electric arc ion-plating deposition Ti transition zone, so first
Afterwards using non-balance magnetically controlled sputter method alternating deposit AlNbC coating and AlNbCN coating, outermost layer is AlNbCN coating；It is non-flat
The magnetron sputtering AlNbC composition target that weighs includes the C of the Nb and 10-15wt% of Al, 20-30wt% that weight fraction is 55-70wt%；
Its preparation process are as follows:
(1) to tool matrix surface pretreatment: first by tool matrix surface polishing, removing the impurity such as surface and oil contaminant, rusty stain, so
After be sequentially placed into alcohol and acetone, be cleaned by ultrasonic each 50min, remove tool surface greasy dirt and other attachments, hair dryer is dry
It is dry sufficiently after be put into coating machine rapidly, be evacuated to 6.0 × 10-3Pa is heated to 250 DEG C, keeps the temperature 30min；
(2) clean to tool matrix surface ion: logical Ar gas, adjusting its pressure is 1.2Pa, opens grid bias power supply, and voltage 600V is accounted for
Empty ratio 0.4, Glow Discharge Cleaning 40min；Reduction is biased into 450V, and duty ratio 0.2 is opened ion source Ion Cleaning 35min, opened
Open arc ion plating Ti target power supply, Ti target current 55A, bias 300V, duty ratio 0.2,2~3min of ion bombardment；
(3) tool matrix surface depositing Ti transition zone being plated in using arc ions: adjusting 0.8~0.9Pa of Ar air pressure, bias is down to
200V, adjust arc ion plating Ti target current 80A, 200 DEG C of depositing temperature, 5~6min of depositing Ti transition zone；
(4) it uses non-balance magnetically controlled sputter depositing Al NbC coating on Ti transition zone: closing arc ion plating Ti target power supply, adjust
Ar 0.9~1.0Pa of air pressure, bias are adjusted to 120V, 170 DEG C of depositing temperature, open the compound target current of non-balance magnetically controlled sputter AlNbC
30A, 3~4min of depositing Al NbC coating；
(5) it uses non-balance magnetically controlled sputter depositing Al NbCN coating on AlNbC coating: opening N2, N2Air pressure is 1.2Pa, Ar gas
0.7~0.8Pa, bias 150V are pressed, the compound target current 30A of non-balance magnetically controlled sputter AlNbC is adjusted, it is 170 DEG C of depositing temperature, compound heavy
Product 3~4min of AlNbCN coating, deposition are completed to close N2；
(6) it uses non-balance magnetically controlled sputter depositing Al NbC coating on AlNbCN coating: adjusting 0.9~1.0Pa of Ar air pressure, bias
It is adjusted to 120V, 170 DEG C of depositing temperature, opens the compound target current 30A of non-balance magnetically controlled sputter AlNbC, depositing Al NbC coating 3~
4min；
(7) (5), (6), (5) ... (5), alternating deposit AlNbCN coating, AlNbC coating, AlNbCN coating are repeated
AlNbCN coating is co-deposited 70min:
(8) it post-processes: closing each target power supply, ion source and gas source, coating terminates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710533151.7A CN107177829B (en) | 2017-07-03 | 2017-07-03 | AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710533151.7A CN107177829B (en) | 2017-07-03 | 2017-07-03 | AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107177829A CN107177829A (en) | 2017-09-19 |
| CN107177829B true CN107177829B (en) | 2019-08-06 |
Family
ID=59845937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710533151.7A Active CN107177829B (en) | 2017-07-03 | 2017-07-03 | AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107177829B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104540624A (en) * | 2012-08-10 | 2015-04-22 | 株式会社图格莱 | Coated tool |
| CN106086787A (en) * | 2016-06-15 | 2016-11-09 | 济宁学院 | Ti TiN+MoS2/ Ti lamination composite coating layer cutter and preparation technology thereof |
| CN106163708A (en) * | 2014-04-10 | 2016-11-23 | 株式会社图格莱 | Coating tool |
| CN106460152A (en) * | 2014-06-24 | 2017-02-22 | 株式会社神户制钢所 | Laminated hard film and cutting tool |
| CN106573313A (en) * | 2014-07-25 | 2017-04-19 | 株式会社图格莱 | Coated cutting tool |
-
2017
- 2017-07-03 CN CN201710533151.7A patent/CN107177829B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104540624A (en) * | 2012-08-10 | 2015-04-22 | 株式会社图格莱 | Coated tool |
| CN106163708A (en) * | 2014-04-10 | 2016-11-23 | 株式会社图格莱 | Coating tool |
| CN106460152A (en) * | 2014-06-24 | 2017-02-22 | 株式会社神户制钢所 | Laminated hard film and cutting tool |
| CN106573313A (en) * | 2014-07-25 | 2017-04-19 | 株式会社图格莱 | Coated cutting tool |
| CN106086787A (en) * | 2016-06-15 | 2016-11-09 | 济宁学院 | Ti TiN+MoS2/ Ti lamination composite coating layer cutter and preparation technology thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107177829A (en) | 2017-09-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107201499B (en) | A kind of titanium alloy cutting component gradient TiAlXN coated cutting tool and preparation method thereof | |
| CN105624618B (en) | TiAlSiZrN base composite coatings, the gradient ultra-fine cemented carbide cutter with the composite coating and preparation method thereof | |
| CN108220880B (en) | A kind of high rigidity high corrosion-resistant high-entropy alloy nitride coatings and preparation method thereof | |
| CN105112858B (en) | A kind of nano combined cutter coat of sandwich construction | |
| CN105088127B (en) | A kind of coating and preparation method thereof | |
| CN107523790A (en) | A kind of AlCrSiCuN nano laminated coatings and preparation method thereof | |
| CN110158044A (en) | A kind of multiple elements design gradient coating cutter and preparation method thereof | |
| CN107338411B (en) | More first gradient composite coating cutters of AlNbCN and preparation method thereof | |
| CN110129741A (en) | A kind of polynary nanometer laminated coating cutter and preparation method thereof | |
| CN107177827B (en) | SiNbC/SiNbCN lamination composite coating layer cutter and its preparation process | |
| CN109097731A (en) | A kind of AlCrN/AlCrYN multi-component multi-layer coating and its preparation method and application | |
| CN108118301A (en) | A kind of AlCrSiN coatings in the interlayer with the variation of Si concentration gradients, preparation method | |
| CN107177828B (en) | SiZrCN gradient composite coating cutter and preparation method thereof | |
| CN106893975B (en) | AlC/AlCN laminated coating cutter and its preparation process | |
| CN107177825B (en) | ZrNbC/ZrNbCN laminated coating cutter and its preparation process | |
| CN103938157B (en) | A kind of ZrNbAlN superlattice coating and preparation method | |
| CN107130221B (en) | A kind of preparation method of hard alloy multi-gradient rare earth composite coating | |
| CN107338412A (en) | CrNbC/CrNbCN laminations composite coating layer cutter and its preparation technology | |
| CN107177826B (en) | MoNbC/MoNbCN lamination composite coating layer cutter and its preparation process | |
| CN107177829B (en) | AlNbC/AlNbCN lamination composite coating layer cutter and its preparation process | |
| CN107354431A (en) | TiMoCN gradient composite coating cutters and preparation method thereof | |
| CN107354432A (en) | ZrCrCN gradient composite coating cutters and preparation method thereof | |
| CN107419229A (en) | CrMoC/CrMoCN laminated coatings cutter and its preparation technology | |
| CN107400864A (en) | AlMoC/AlMoCN laminated coatings cutter and its preparation technology | |
| CN107058951B (en) | ZrAlC/ZrAlCN lamination composite coating layer cutter and its preparation process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201102 Address after: 246700 Zongyang Town, Zongyang County, Tongling City, Anhui Patentee after: Tongling huaran Technology Service Co.,Ltd. Address before: 272001 Shandong city of Jining province high tech Zone Haichuan Road No. 16 Jining high tech Zone University Park Patentee before: JINING University |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231201 Address after: Room 101, Unit 2, No. 1, Xin'an Maiyuan Road, Chang'an Town, Dongguan City, Guangdong Province, 523000 Patentee after: Dongguan Nawei New Material Technology Co.,Ltd. Address before: 246700 Qishan Road, Zongyang Town, Zongyang County, Tongling City, Anhui Province Patentee before: Tongling huaran Technology Service Co.,Ltd. |
|
| TR01 | Transfer of patent right |