CN107175175B

CN107175175B - multi-nozzle device

Info

Publication number: CN107175175B
Application number: CN201610891687.1A
Authority: CN
Inventors: 邓志明
Original assignee: Els System Technology Co ltd
Current assignee: Els System Technology Co ltd
Priority date: 2016-03-11
Filing date: 2016-10-13
Publication date: 2019-11-26
Anticipated expiration: 2036-10-13
Also published as: TW201731593A; CN107175175A; TWI584882B

Abstract

A multi-nozzle device comprises a combination assembly and at least two nozzles, wherein the combination assembly comprises a combination vertical plate, the combination vertical plate is parallel to a vertical direction, the combination vertical plate comprises a plurality of combination points which are arranged at intervals, and the combination points are coplanar along the vertical direction; the spray head can be selectively combined on two combination points of the combination points, and the spray head can be detachably combined on the two combination points, so that the spray head can be fixed on the combination vertical plate and positioned at a required spraying angle position.

Description

More ejecting devices

Technical field

The present invention relates to a kind of more ejecting devices, the substrate more particularly to one kind to clean for example, semiconductor crystal wafer More ejecting devices.

Background technique

Semiconductor crystal wafer in the fabrication process can by the different processing procedure of multiple tracks, wafer after the processing of per pass processing procedure, Crystal column surface can remain the residue of for example, chemical agent, therefore, need to spray wafer by spray head in manufacturing process for cleaning Cleaning solution, to remove the residue on wafer.

However, be usually to be cleaned by single a spray head to wafer in existing manufacturing process for cleaning, therefore, speed when cleaning Degree leads to inefficient slowly, and cleaning effect is also bad.

Summary of the invention

The main object of the present invention, being to provide a kind of more ejecting devices can be selectively by the design of combined assembly It is assembled required amount of spray head, and spray angle needed for spray head selectively capable of being fixed on one, meanwhile, multiple sprays Head also can allow identical or different hydro-peening pressure, can promote cleaning speed, efficiency and cleaning effect whereby.

It the purpose of the present invention and solves the problems, such as that background technique adopts the following technical solutions to realize, mentions according to the present invention More ejecting devices out include a combined assembly and at least two spray heads, which includes one in conjunction with vertical plate, this combines vertical Plate is parallel to a vertical direction, and it includes multiple spaced binding sites that this, which combines vertical plate, and the binding site is upright along this Direction is coplanar, each spray head may be selectively incorporated on the two basic change point in the binding site, and each spray head It is detachably combined in two binding site, whereby, so that each spray head is capable of fixing needed for this combines vertical plate and is located in one Spray angle position.

It also includes a facade that this, which combines vertical plate, which bears against in the facade.

Each spray head includes multiple spaced locking points, it is described locking point two of them locking point with this two Binding site aligned in position, the combined assembly further include multiple locking parts, each locking part is by the corresponding binding site to lock It is fixed in the locking point with the binding site aligned in position.

Each locking point is a screw hole, each binding site is a perforation, each locking part is a screw.

This combine vertical plate in it is elongated and its grow to along one perpendicular to the vertical direction horizontal direction extend, this combine vertical plate Comprising a upper end and one in contrast to the upper end lower end, neighbouring upper end of a part in the binding site and another part is adjacent The nearly lower end.

There are two the upper binding site of spaced along the horizontal direction and neighbouring upper end and two for the binding site tool Binding site on the lower binding site of spaced along the horizontal direction and neighbouring lower end, each lower binding site and adjacent this In diagonal position, the locking point there is position to lock the one of diagonal position solid point and once lock a little for position, the locking solid point with The lower locking point is aligned in binding site and the lower binding site on adjacent this respectively.

This combines vertical plate to define a middle line for being parallel to the vertical direction, which is located at the middle line Opposite side, for binding site far from the middle line, each spray head is located in one to binding site under the middle line and each on each First obliquity.

This combines vertical plate to define a middle line for being parallel to the vertical direction, which is located at the middle line Opposite side, on each binding site far from the middle line and each lower binding site adjacent to the middle line, each spray head is located in one Second obliquity.

This combines vertical plate to define a middle line for being parallel to the vertical direction, and there are two combine on first for the binding site tool Point, binding site, two the first lower binding sites and two second lower binding sites on two second, the binding site on two first, second Spaced along the horizontal direction and neighbouring upper end, this on two first, second binding site be located at the middle line opposite side, And this on two second binding site be respectively separated positioned at this on two first on the outside of binding site, the two first, second lower binding site was along should Horizontal direction is spaced and adjacent to the lower end, which is located at the middle line opposite side, and should Two second lower binding sites are respectively separated on the outside of the two first lower binding site, this combines vertical plate to define positioned at the middle line the same side Have a connection binding site and the second lower binding site on first the first oblique line and a connection this on second binding site and this The second oblique line of binding site once, first, second oblique line intersect and press from both sides between the two an obtuse angle, and there are two the locking point tools It is spaced along the horizontal direction along the spaced locking solid point of the horizontal direction and two and be located at this on two The lower locking point of locking point lower section, each spray head define under the locking solid point that one is connected to one pair of them Angle Position and this Lock point the first diagonal line and one be connected to another diagonal position the locking solid point and the lower locking point it is second diagonal Line, first, second diagonal line is oblique respectively and presss from both sides a right angle between the two, first catercorner length be equal to this first Oblique line length, second catercorner length are equal to the second oblique line length.

A vertical range between each the first lower binding site and the middle line be less than each on first binding site with should A vertical range between middle line, vertical range between each the second lower binding site and the middle line be greater than each second A vertical range between upper binding site and the middle line.

Each spray head is optionally by position in wherein the locking solid point of a pair of of Angle Position and the lower locking point difference Alignment is located at binding site and the second lower binding site on first of the middle line the same side, to be located in one first obliquity, Or each spray head is optionally by position in the locking solid point of another diagonal position and lower locking point difference alignment bit Binding site and the first lower binding site on second in the middle line the same side, to be located in one second obliquity.

The binding site also has there are two binding site in the third of spaced along the horizontal direction and neighbouring upper end, And binding site under the thirds of two spaced along the horizontal direction and neighbouring lower ends, in two third binding site respectively between Every being located at this on two second on the outside of binding site, and height of the binding site on the vertical direction is lower than each in each third Height of the binding site on the vertical direction on second, binding site is respectively separated positioned at the two second lower binding sites under two third Outside, this combine vertical plate define positioned at the middle line the same side have a connection this on second under binding site and the third binding site the 4th oblique line of three oblique lines and a connection binding site in binding site and the third on second, the third oblique line be parallel to this One oblique line, first catercorner length are equal to the third oblique line length, each spray head has defined one and has been connected to this two lockings The connecting line of solid point, the connection line length are equal to the 4th oblique line length.

Each spray head is optionally by position in wherein the locking solid point of a pair of of Angle Position and the lower locking point difference Alignment is located at the binding site under binding site and the third on second of the middle line the same side, to be located in one first obliquity, Or the two lockings solid point optionally be aligned respectively and is located at this of the middle line the same side and combines on second by each spray head Point and binding site in the third, to be located in one second obliquity.

More ejecting devices include three spray heads, and the spray head is respectively an intermediate spray head and two outside spray heads, in this Between the two lockings solid point of spray head be aligned in the binding site on two first respectively, each outside spray head position pair of horns position wherein The locking solid point set and the lower locking point be aligned respectively positioned at the middle line the same side this on second under binding site and the third Binding site, each outside spray head are located in one first obliquity.

More ejecting devices include three spray heads, and the spray head is respectively an intermediate spray head and two outside spray heads, in this Between the two lockings solid point of spray head be aligned in binding site, the two lockings solid point point of each outside spray head on two first respectively This of the middle line the same side Dui Qi be located at, and binding site, each outside spray head are located in one in binding site and the third on second Second obliquity.

The beneficial effects of the present invention are: by the design of combined assembly, can selectively be assembled required amount of Spray head, and spray angle position needed for spray head selectively capable of being fixed on one, meanwhile, multiple spray heads also can allow identical Or different hydro-peening pressure, cleaning speed, efficiency and cleaning effect can be promoted whereby.

Detailed description of the invention

Fig. 1 is a front view of the first embodiment of the more ejecting devices of the present invention, illustrate two spray heads in conjunction with its of vertical plate A kind of middle assembling mode；

Fig. 2 is a front view of the combination vertical plate of the first embodiment；

Fig. 3 is the side view diagram of the combination vertical plate of the first embodiment；

Fig. 4 is a front view of two spray heads of the first embodiment；

Fig. 5 is the cross-sectional view that the 5-5 line in Fig. 1 is intercepted；

Fig. 6 is a partial enlarged view of Fig. 1；

Fig. 7 is a front view of the first embodiment, illustrates two spray heads and combines another assembling mode of vertical plate；

Fig. 8 is a partial enlarged view of Fig. 7；

Fig. 9 is a front view of the combination vertical plate of the second embodiment of the more ejecting devices of the present invention；

Figure 10 is a front view of the second embodiment, illustrates to combine vertical plate for two spray head assemblings；

Figure 11 is a front view of the second embodiment, illustrates to combine vertical plate for two spray head assemblings；

Figure 12 is a front view of three spray heads of the second embodiment；

Figure 13 is a front view of the second embodiment, illustrates to combine vertical plate for three spray head assemblings；

Figure 14 is a partial enlarged view of Figure 13；

Figure 15 is a front view of the second embodiment, illustrates to combine vertical plate for three spray head assemblings；

Figure 16 is a partial enlarged view of Figure 15；

Figure 17 is a front view of the second embodiment, illustrates to combine vertical plate for two spray head assemblings；And

Figure 18 is a front view of the second embodiment, illustrates to combine vertical plate for two spray head assemblings.

Specific embodiment

The following describes the present invention in detail with reference to the accompanying drawings and embodiments.

It refering to fig. 1, is the first embodiment of the more ejecting devices of the present invention, more ejecting devices 200 are mainly applied and partly led In the processing procedure of body wafer, to clean one be, for example, wafer substrate 1.More ejecting devices 200 include a combined assembly 2, and extremely Few two spray heads 3,3 '.

Refering to fig. 1 and Fig. 2, combined assembly 2 include one in conjunction with vertical plate 21, this combines vertical plate 21 to be parallel to a vertical direction Z, It includes multiple spaced binding sites that this, which combines vertical plate 21, and the binding site is coplanar along vertical direction Z.Each Spray head 3,3 ' may be selectively incorporated on the two basic change point in the binding site, and each spray head 3,3 ' is removably tied Together in two binding site.Specifically, each spray head 3,3 ' includes multiple spaced locking points, the locking point Two of them locking point and the two binding sites aligned in position.The combined assembly 2 further includes multiple locking parts 22, each locking part 22 are locked in the locking point with the binding site aligned in position by the corresponding binding site.Whereby, so that each spray head 3, it 3 ' is capable of fixing in conjunction on vertical plate 21 and spray angle position needed for being located in one.

It is different according to 1 size of substrate in semiconductor crystal wafer processing procedure, needed for which can selectively be assembled The spray head 3,3 ' of quantity, and spray angle position needed for spray head 3,3 ' selectively capable of being fixed on one.Also, spray head 3,3 ' Also it can allow identical or different hydro-peening pressure.Whereby, cleaning speed, efficiency and the cleaning of more ejecting devices 200 can be promoted Effect.

It is described in detail below for the specific configuration and usage mode of more ejecting devices 200:

Refering to fig. 1, Fig. 2 and Fig. 3, this combine vertical plate 21 in it is elongated and its grow to along one perpendicular to vertical direction Z water Square extend to X, it includes two 210,210 ', one upper ends 211 of the facades being parallel to each other and one in contrast to upper that this, which combines vertical plate 21, The lower end 212 at end 211, the neighbouring upper end 211 of a part in the binding site and another part are adjacent to lower end 212.

Each binding site of the present embodiment runs through the perforation of the facade 210,210 ' in conjunction with vertical plate 21 for one.This combines vertical Plate 21 defines a middle line L for being parallel to vertical direction Z, and the binding site tool is there are two binding site 213, two second on first The lower binding site 215 of upper binding site 214, two first and two second lower binding sites 216.The binding site on two first, second 213,214 spaced along horizontal direction X and neighbouring upper end 211, this is 213,214 points of binding site on two first, second Not Wei Yu middle line L opposite side, and this on two second binding site 214 be respectively separated positioned at this 213 outside of binding site on two first. The two first, second lower binding sites 215,216 are spaced along horizontal direction X and the neighbouring lower end 212, this two first, Second lower binding site 215,216 is located at middle line L opposite side, and the two second lower binding site 216 is respectively separated to be located at and be somebody's turn to do Two first lower 215 outsides of binding site.

Further, this combine vertical plate 21 define positioned at the same side middle line L have a connection this on first binding site 213 with The connection of the first oblique line L1 and one of the second lower binding site 216 binding site 214 and the first lower binding site 215 on second Second oblique line L2, the first, second oblique line L1, the L2 intersect and press from both sides an obtuse angle a1 between the two.Wherein, first straight line L1 has One first length D1, and the second oblique line L2 has one second length D2.

More specifically, the vertical range d1 between each first lower binding site 215 and middle line L is less than each A vertical range s1 on first between binding site 213 and middle line L, between each second lower binding site 216 and middle line L A vertical range d2 be greater than each vertical range s2 on second between binding site 214 and middle line L.

Refering to fig. 1, the structure of Fig. 2 and Fig. 4, two spray heads 3,3 ' are identical, and each spray head 3,3 ' is to spray cleaning solution to substrate 1 4, with clean or remove 1 surface of substrate the remaining residue such as chemical agent.Each spray head 3,3 ' includes one to be resisted against The surface 31 of facade 210 (as shown in Figure 3), the screw hole that each locking point of the present embodiment is formed in surface 31 for one.It is described There are two alternate along horizontal direction X along horizontal direction X spaced locking solid point 32,32 ' and two for locking point tool Every lower locking point 33,33 ' for arranging and being located at below the two lockings solid point 32,32 '.In the present embodiment, two spray heads 3,3 ' two locking solid points 32 and 2 lower locking points 33 are in adjoining side, and two locking solid points 32 ' and the 2 lower points that lock 33 ' positions are in mutually separate side.

Each spray head 3,3 ' defines locking solid point 32 and the lower locking point 33 ' that one is connected to one pair of them Angle Position There is one first length E1, the first length E1 to be equal to first length D1 by first diagonal line C1, the first diagonal line C1.Also, Each spray head 3,3 ' defines second diagonal line of the locking solid point 32 ' that one is connected to another diagonal position and the lower locking point 33 C2, first, second diagonal line C1, C2 are oblique respectively and press from both sides a right angle a2 between the two.Second diagonal line C2 has One second length E2, the second length E2 are equal to second length D2.

Each spray head 3,3 ' is optionally by position in wherein the locking solid point 32 of a pair of of Angle Position and the lower locking Alignment is located at binding site 213 and the second lower binding site 216 or each on first of the same side middle line L to point 33 ' respectively Alignment bit is optionally distinguished in the locking solid point 32 ' of another diagonal position and the lower locking point 33 in position by a spray head 3,3 ' Binding site 214 and the first lower binding site 215 on second in the same side middle line L.Whereby, each spray head 3,3 ' can be according to The one of which of aforementioned two kinds of assembling modes is selected to be assembled in conjunction with vertical plate 21 according to demand.

Refering to fig. 1, Fig. 2, Fig. 4 and Fig. 5, the one of which between each spray head 3,3 ' and combination vertical plate 21 are assembled Mode is as follows: firstly, the surface 31 of the spray head 3 is resisted against the facade 210 in conjunction with vertical plate 21, due to first, second oblique line A1 angle in obtuse angle folded by L1, L2 the two is greater than right angle a2 angle folded by the first, second diagonal line C1, C2 the two, so that The slope of first diagonal line C1 is greater than the slope of first oblique line L1 before the spray head 3 not yet assembles, and therefore, which needs to revolve Turn the locking solid point 32 and the lower locking after an appropriate angle put 33 ' could be aligned respectively positioned at the same side middle line L this Binding site 213 and the second lower binding site 216 on one.It then, is, for example, that the locking part 22 of screw is arranged in this on first by one Binding site 213 is simultaneously locked in the locking solid point 32 with 213 aligned in position of binding site on first, and by another locking part 22 It is arranged in the second lower binding site 216 and is locked in the lower locking point 33 ' with second lower 216 aligned in position of binding site, i.e., The spray head 3 can be locked in this in conjunction with vertical plate 21.The spray head 3 ' can be assembled according to aforementioned assembling mode and be fixed on middle line L Binding site 213 and the second lower binding site 216 on first of the other side.

Refering to fig. 1 and Fig. 6, after the assembling of two spray heads 3,3 ' is fixed in conjunction with vertical plate 21, each spray head 3,3 ' is located in Just like the first obliquity shown in FIG. 1.At this point, axis A, A ' defined in each spray head 3,3 ' respectively with a plate of substrate 1 Body 11 tilts, and two spray heads 3,3 ' are in being flared out shape and bottom end is located remotely from each other.Due to axis A, A of each spray head 3,3 ' ' Tilt angle will affect the spray angle of cleaning solution 4, therefore, by the spray angle for the cleaning solution 4 that two spray heads 3,3 ' are sprayed Difference can effectively increase cleaning area and spraying swath.When the cleaning solution 4 that two spray heads 3,3 ' are sprayed is in the plate of cleaning base plate 1 When the one of 11 surface of body is in concave-convex undulated and uneven line pattern 12, the cleaning solution 4 that is sprayed by two spray heads 3,3 ' The different design method of spray angle can form the hydro-peening effect without dead angle, whereby, can be effectively removed example on line pattern 12 The for example residue 13 of chemical agent.Also, two spray heads 3,3 ' also can allow identical or different hydro-peening pressure.By two spray heads 3, 3 ' design method can promote the speed, efficiency and cleaning effect of cleaning base plate 1.It should be noted that the route that Fig. 6 is drawn Pattern 12 and residue 13 are schematic diagrames, in order to see its relevant position.

The another kind side of being assembled refering to Fig. 2, Fig. 4, Fig. 7 and Fig. 8, between each spray head 3,3 ' and combination vertical plate 21 Formula is as follows: firstly, the surface 31 of the spray head 3 is resisted against the facade 210 (as shown in Figure 5) in conjunction with vertical plate 21, due to this first, Obtuse angle a1 angle folded by second oblique line L1, L2 the two is greater than the right angle angle a2 folded by the first, second diagonal line C1, C2 the two Degree, so that the slope that the spray head 3 not yet assembles preceding second diagonal line C2 is greater than the slope of second oblique line L2, therefore, the spray First 3 need to rotate an appropriate angle after the locking solid point 32 ' could be aligned respectively with the lower locking point 33 positioned at the same side middle line L Binding site 214 and the first lower binding site 215 on second.Then, a locking part 22 is arranged in the binding site on second 214 and it is locked in the locking solid point 32 ' with 214 aligned in position of binding site on second, and another locking part 22 is worn In the first lower binding site 215 and it is locked in the lower locking point 33 with first lower 215 aligned in position of binding site, it can should Spray head 3 is locked in this in conjunction with vertical plate 21.The spray head 3 ' can be assembled according to aforementioned assembling mode and be fixed on the other side middle line L Binding site 214 and the first lower binding site 215 on second.

After the assembling of two spray heads 3,3 ' is fixed in conjunction with vertical plate 21, each spray head 3,3 ' is located in just like shown in Fig. 7 Second obliquity.At this point, axis A, A ' defined in each spray head 3,3 ' is tilted with the plate body 11 of substrate 1 respectively, two spray heads 3,3 ' in inwardly shape is folded and bottom end is close to each other, whereby, so that two spray heads 3,3 ' can be with different spray angle cleaning base plates 1 The line pattern 12 on surface.

It should be noted that combined assembly 2 is assembled in together by combining vertical plate 21 and locking part 22 to combine two spray heads 3,3 ' The mode of one facade 210 so that two spray heads 3,3 ' can compactly it is adjacent together, whereby, more ejecting devices 200 can be reduced along water Length square on X, with reduce more ejecting devices 200 volume and its occupied space.Furthermore by combining vertical plate 21 First, second on the arrangement of binding site 213,214 and first, second lower binding site 215,216 lay mode, spray head 3,3 ' Mode, and the mutually matched assembling mode of collocation the two are laid in the arrangement of locking solid point 32,32 ' and lower locking point 33,33 ', So that spray head 3,3 ' can be optionally secured to the first obliquity or the second obliquity, whereby, more cartridge nozzles can be increased Set the 200 applicable occasion of elasticity and its institute in use.

The second embodiment of the more ejecting devices of the present invention refering to Fig. 9, the overall structure of more ejecting devices 200 substantially with First embodiment is identical, is different in conjunction with vertical plate 21 '.

0 and Figure 11 refering to fig. 1, the combination vertical plate 21 ' of the present embodiment are applicable to for two assemblings of spray head 3,3 ' either It assembles for three spray heads, wherein two spray heads 3,3 ' shown in Figure 10 are assembled in mode and first embodiment in conjunction with vertical plate 21 ' Assembling mode disclosed in Fig. 1 is identical, and two spray heads 3,3 ' shown in Figure 11 are assembled in conjunction with the mode of vertical plate 21 ' and first in fact It is identical to apply assembling mode disclosed in Fig. 7 of example, therefore, does not repeat to repeat herein.

Refering to Fig. 9, in the present embodiment, also have in conjunction with the binding site of vertical plate 21 ' there are two along horizontal direction X phase Be alternatively arranged and in the third of the neighbouring upper end 211 binding site 217 and two it is spaced and neighbouring along horizontal direction X Binding site 218 under the third of the lower end 212.Binding site 217 is respectively separated positioned at this binding site 214 on two second in two third Outside, and in each third height of the binding site 217 on vertical direction Z lower than each 214 edge of binding site on second Height on vertical direction Z.Binding site 218 is respectively separated positioned at two second lower 216 outside of binding site under two third.

Further, in conjunction with vertical plate 21 ' define positioned at the same side middle line L have a connection this on second binding site 214 with The connection of the third oblique line L3 of binding site 218 and one binding site 217 in binding site 214 and the third on second under the third 4th oblique line L4.There is the third oblique line L3 third length D3, third oblique line L3 to be parallel to first oblique line L1, and this Four oblique line L4 have one the 4th length D4.

Refering to Fig. 9, Figure 12 and Figure 13, more ejecting devices 200 include three spray heads, and the structure of three spray heads is identical.In order to Convenient for explanation, the spray head is divided into an intermediate spray head 3 " and two outside spray heads 3,3 ' respectively.Two of intermediate spray head 3 " Locking solid point 32,32 ' is respectively to be aligned in binding site 213 on two first that combine vertical plate 21 ', whereby, intermediate spray head 3 " A defined axis A " can be perpendicular to substrate 1.First length of first diagonal line C1 of each outside spray head 3,3 ' E1 is equal to third length D3.Also, each outside spray head 3,3 ' has defined one and has been connected to two locking solid points 32,32 ' centers Connecting line C3, connecting line C3 have a third length E3, the third length E3 be equal to the 4th length D4.

Each outside spray head 3,3 ' is optionally by position under wherein the locking solid point 32 and this of a pair of of Angle Position Alignment is located at the binding site 218 under binding site 214 and the third on second of the same side middle line L to locking point 33 ' respectively, or The two lockings solid point 32,32 ' be aligned respectively and is located at this of the same side middle line L and is tied in binding site 214 and the third on second Chalaza 217.Whereby, each outside spray head 3,3 ' can select the one of which of aforementioned two kinds of assembling modes to be assembled according to demand In conjunction with vertical plate 21 '.

One of assembling refering to Fig. 9, Figure 12 and Figure 13, between each outside spray head 3,3 ' and combination vertical plate 21 ' Combination is as follows: firstly, the surface 31 of the outside spray head 3 is resisted against the facade 210 (as shown in Figure 5) in conjunction with vertical plate 21, Since third oblique line L3 is parallel to first oblique line L1, so that the outside spray head 3 not yet assembles preceding first diagonal line C1's Slope is greater than the slope of third oblique line L3, and therefore, which need to rotate after an appropriate angle locking solid point 32 and this Lower locking point 33 ' could be aligned the binding site under binding site 214 and the third on second positioned at the same side middle line L respectively 218.Then, after the locking for carrying out locking part 22, which can be assembled and is fixed on this in conjunction with vertical plate 21 '.According to preceding State assembling mode the outside spray head 3 ' can be assembled be fixed on the other side middle line L this on second binding site 214 and this Three lower binding sites 218.

3 and Figure 14 refering to fig. 1, after three spray heads are completed, intermediate 3 " position of spray head is in a stand up position, and two outsides Position is in the first obliquity respectively for spray head 3,3 ', whereby, so that intermediate spray head 3 " and two outside spray heads 3,3 ' can be with different sprays Spill the line pattern 12 on 1 surface of angle cleaning base plate.

Refering to Fig. 9, Figure 12 and Figure 15, another assembling between each outside spray head 3,3 ' and combination vertical plate 21 ' is tied Conjunction mode is as follows: firstly, the surface 31 of the outside spray head 3 is resisted against the facade 210 (as shown in Figure 5) in conjunction with vertical plate 21, by In height of the binding site 217 in the third on vertical direction Z lower than this on second binding site 214 along vertical direction Z Height, therefore, which need to rotate the two lockings solid point 32,32 ' after an appropriate angle could be aligned that be located at should respectively The binding site 217 in binding site 214 and the third on second of the same side middle line L.Then, after the locking for carrying out locking part 22, The outside spray head 3 can be assembled and be fixed on this in conjunction with vertical plate 21 '.It can be by the 3 ' group of outside spray head according to aforementioned assembling mode Dress is fixed on the binding site 217 in binding site 214 and the third on second of the other side middle line L.

5 and Figure 16 refering to fig. 1, after three spray heads are completed, intermediate 3 " position of spray head is in stand up position, and two outer side sprays First 3,3 ' difference positions are in the second obliquity, whereby, so that intermediate spray head 3 " and two outside spray heads 3,3 ' can be with different sprinklings The line pattern 12 on 1 surface of angle cleaning base plate.

7, Figure 17 is another state sample implementation of the present embodiment refering to fig. 1, is applicable in conjunction with vertical plate 21 ' for an outer side spray First 3 and intermediate spray head 3 " assemble.

8, Figure 18 is another state sample implementation of the present embodiment refering to fig. 1, is applicable in conjunction with vertical plate 21 ' for an outer side spray First 3 ' and intermediate spray head 3 " assemble.

It is designed by the combination vertical plate 21 ' of the present embodiment, can selectively be assembled required amount of spray head, whereby, The elasticity made can further be increased.

It concludes above-mentioned, is designed by the combination vertical plate 21,21 ' of the combined assembly 2 of two embodiments, so that user can be according to The number of spray head quantity selects the combination vertical plate 21,21 ' appropriate to use.Such as the usage quantity of spray head is when only needing two, it can The combination vertical plate 21 of selection collocation first embodiment uses, so as to reducing the volume of more ejecting devices 200 and its occupied Space.Such as the usage quantity of spray head when being three, then the combination vertical plate 21 ' that collocation second embodiment may be selected uses.Again Person, in order to clean various various forms of line patterns 12 on various substrates 1, by the design of combined assembly 2, so that User can selectively be assembled required amount of spray head according to the form of the line pattern 12 for the substrate 1 to be cleaned, And spray angle position needed for spray head is selectively fixed on one, by the spray for the cleaning solution 4 that multiple spray heads are sprayed Angle difference is spilt, can effectively increase cleaning area and spraying swath, and the hydro-peening effect without dead angle can be formed.Also, multiple spray heads It can allow identical or different hydro-peening pressure.Whereby, for example, residual of chemical agent can be effectively removed on line pattern 12 Object 13, and cleaning speed, efficiency and cleaning effect can be effectively promoted, it can achieve the purpose that institute's demand of the present invention really.

Claims

1. a kind of more ejecting devices；It is characterized by:

More ejecting devices include a combined assembly and at least two spray heads, which includes one combining vertical plate and multiple Locking part, this combines vertical plate to be parallel to a vertical direction, and it includes multiple spaced binding sites and one that this, which combines vertical plate, A facade, the binding site is coplanar along the vertical direction, and the spray head is born against in the facade, each spray head may be selected It is incorporated on the two basic change point in the binding site to property, each spray head includes multiple spaced locking points, institute State locking point two of them locking point with the two binding sites aligned in position, each locking part by the corresponding binding site with It is locked in the locking point with the binding site aligned in position, each spray head is made to be detachably combined in two binding site, whereby, So that each spray head is capable of fixing spray angle position needed for combining vertical plate at this and be located in one；

This combine vertical plate in it is elongated and its grow to along one perpendicular to the vertical direction horizontal direction extend, this includes in conjunction with vertical plate One upper end and one in contrast to the upper end lower end, neighbouring upper end of a part in the binding site and another part is neighbouring should Lower end；

This combines vertical plate to define a middle line for being parallel to the vertical direction, and there are two binding sites, two on first for the binding site tool Binding site on a second, two the first lower binding sites and two second lower binding sites, this on two first, second binding site it is alternate Every arrangement and the neighbouring upper end, this on two first, second binding site be located at the middle line opposite side, and this is combined on two second Point is respectively separated positioned at this on two first on the outside of binding site, and the two first, second lower binding sites are spaced and neighbouring under this End, which is located at the middle line opposite side, and the two second lower binding site is respectively separated to be located at and be somebody's turn to do On the outside of two first lower binding sites, this combine vertical plate define positioned at the middle line the same side have a connection this on first binding site and this Second oblique line of the first oblique line of two lower binding sites and a connection binding site and the first lower binding site on second, this first, The intersection of second oblique line, the locking point have and difference positions spaced there are two spaced locking solid point and two Lower locking point below the two lockings solid point, each spray head define one and are connected to locking on this of one pair of them Angle Position Point and the first diagonal line of the lower locking point and one be connected to another diagonal position the locking solid point and the lower locking the Two diagonal lines, first, second diagonal line difference is oblique, which is equal to the first oblique line length, should Second catercorner length is equal to the second oblique line length.

2. more ejecting devices according to claim 1, it is characterised in that: each locking point is a screw hole, each knot Chalaza is a perforation, each locking part is a screw.

3. more ejecting devices according to claim 1, it is characterised in that: this on two first, second binding site along the level Direction is spaced, and the two first, second lower binding site is spaced along the horizontal direction, first, second oblique line two An obtuse angle is pressed from both sides between person, the locking solid point is spaced along the horizontal direction, and the lower locking point is along the horizontal direction phase It is alternatively arranged, which presss from both sides a right angle between the two.

4. more ejecting devices according to claim 3, it is characterised in that: between each the first lower binding site and the middle line A vertical range be less than each vertical range on first between binding site and the middle line, each second lower binding site A vertical range between the middle line is greater than each vertical range on second between binding site and the middle line.

5. more ejecting devices according to claim 3 or 4, it is characterised in that: each spray head optionally exists position The locking solid point of one pair of them Angle Position and the lower locking point are aligned respectively to be combined on first positioned at this of the middle line the same side Point and the second lower binding site, to be located in one first obliquity or each spray head optionally by position another The locking solid point of diagonal position and the lower locking point be aligned respectively positioned at the middle line the same side this on second binding site with should First lower binding site, to be located in one second obliquity.

6. more ejecting devices according to claim 4, it is characterised in that: the binding site also has there are two along the level side To in the third of the spaced and neighbouring upper end binding site and two it is spaced along the horizontal direction and neighbouring under this Binding site under the third at end, binding site is respectively separated positioned at this on two second on the outside of binding site in two third, and each the Height of the binding site on the vertical direction is lower than each height of the binding site on the vertical direction on second on three, this two Binding site is respectively separated on the outside of the two second lower binding site under third, this combines vertical plate to define has positioned at the middle line the same side The one connection third oblique line of binding site and a connection binding site and the third on second under binding site and the third on second 4th oblique line of upper binding site, the third oblique line are parallel to first oblique line, which is equal to the third oblique line Length, each spray head define a connecting line for being connected to this two locking solid points, which is equal to the 4th tiltedly Line length.

7. more ejecting devices according to claim 6, it is characterised in that: each spray head optionally by position wherein The locking solid point of a pair of of Angle Position and the lower locking point be aligned respectively positioned at the middle line the same side this on second binding site with Binding site under the third, to be located in one first obliquity or each spray head optionally for the two lockings solid point Alignment is located at the binding site in binding site and the third on second of the middle line the same side respectively, to be located in one second inclination position It sets.

8. more ejecting devices according to claim 6, it is characterised in that: more ejecting devices include three spray heads, described Spray head be respectively an intermediate spray head and two outside spray heads, the intermediate spray head this two locking solid point be aligned in respectively this two first Upper binding site, each outside spray head position is aligned in wherein locking solid point of a pair of of Angle Position with the lower locking point respectively to be located at Binding site, each outside spray head are located in one first inclination position under binding site and the third on second for this of the middle line the same side It sets.

9. more ejecting devices according to claim 6, it is characterised in that: more ejecting devices include three spray heads, described Spray head be respectively an intermediate spray head and two outside spray heads, the intermediate spray head this two locking solid point be aligned in respectively this two first Upper binding site, the two lockings solid point of each outside spray head be aligneds the binding site on second for being located at the middle line the same side respectively With binding site in the third, each outside spray head is located in one second obliquity.