CN107134417B - 一种半自动多卡晶圆一体测试机台 - Google Patents
一种半自动多卡晶圆一体测试机台 Download PDFInfo
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- CN107134417B CN107134417B CN201710283754.6A CN201710283754A CN107134417B CN 107134417 B CN107134417 B CN 107134417B CN 201710283754 A CN201710283754 A CN 201710283754A CN 107134417 B CN107134417 B CN 107134417B
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- 238000012360 testing method Methods 0.000 title claims abstract description 67
- 238000003860 storage Methods 0.000 claims abstract description 22
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims description 55
- 230000006698 induction Effects 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 230000010354 integration Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 abstract description 38
- 230000007547 defect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710283754.6A CN107134417B (zh) | 2017-04-26 | 2017-04-26 | 一种半自动多卡晶圆一体测试机台 |
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CN201710283754.6A CN107134417B (zh) | 2017-04-26 | 2017-04-26 | 一种半自动多卡晶圆一体测试机台 |
Publications (2)
Publication Number | Publication Date |
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CN107134417A CN107134417A (zh) | 2017-09-05 |
CN107134417B true CN107134417B (zh) | 2023-06-16 |
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CN201710283754.6A Active CN107134417B (zh) | 2017-04-26 | 2017-04-26 | 一种半自动多卡晶圆一体测试机台 |
Country Status (1)
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CN (1) | CN107134417B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110988656B (zh) * | 2019-12-22 | 2022-12-02 | 苏州浪潮智能科技有限公司 | 一种服务器板卡fct治具及其自动升降滑台装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11111787A (ja) * | 1997-10-03 | 1999-04-23 | Eejingu Tesuta Kaihatsu Kyodo Kumiai | ウエハ用検査装置 |
CN202648883U (zh) * | 2012-07-03 | 2013-01-02 | 昆山迈致治具科技有限公司 | 半自动真空测试治具 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWM259165U (en) * | 2004-06-18 | 2005-03-11 | Optimum Care Int Tech Inc | Improved structure of electronic component testing machine |
US7750657B2 (en) * | 2007-03-15 | 2010-07-06 | Applied Materials Inc. | Polishing head testing with movable pedestal |
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2017
- 2017-04-26 CN CN201710283754.6A patent/CN107134417B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11111787A (ja) * | 1997-10-03 | 1999-04-23 | Eejingu Tesuta Kaihatsu Kyodo Kumiai | ウエハ用検査装置 |
CN202648883U (zh) * | 2012-07-03 | 2013-01-02 | 昆山迈致治具科技有限公司 | 半自动真空测试治具 |
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CN107134417A (zh) | 2017-09-05 |
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PB01 | Publication | ||
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Address after: 518000 the first floor to the third floor of No.7 Xinfa East Road, Xinqiao street, Bao'an District, Shenzhen City, Guangdong Province. The business premises are set up in No.2 workshop, zone a, xinfengze Industrial Zone, Shangnan East Road Applicant after: SHENZHEN SHICHUANGYI ELECTRONIC Co.,Ltd. Address before: Baoan District Shenzhen City manhole street 518000 Guangdong Province on the South East New fortress Industrial Park A District 2 Applicant before: SHENZHEN SHICHUANGYI ELECTRONIC Co.,Ltd. |
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CP03 | Change of name, title or address |
Address after: 518000 floor 1, floor 2 and floor 3, No. 7, Xinfa East Road, Xiangshan community, Xinqiao street, Bao'an District, Shenzhen, Guangdong Province; No.5 1st, 2nd and 3rd floors Patentee after: Shenzhen Shi Creative Electronics Co.,Ltd. Country or region after: China Address before: 518000 business premises are set up on the first to third floors, No. 7, Xinfa East Road, Xinqiao street, Bao'an District, Shenzhen, Guangdong Province, and at plant 2, zone a, xinfengze Industrial Zone, Shangnan East Road Patentee before: SHENZHEN SHICHUANGYI ELECTRONIC CO.,LTD. Country or region before: China |