CN107134399B - Radio frequency for high energy implanters accelerates tuner and control method - Google Patents
Radio frequency for high energy implanters accelerates tuner and control method Download PDFInfo
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- CN107134399B CN107134399B CN201710220775.3A CN201710220775A CN107134399B CN 107134399 B CN107134399 B CN 107134399B CN 201710220775 A CN201710220775 A CN 201710220775A CN 107134399 B CN107134399 B CN 107134399B
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- tuning
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- power supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Abstract
The invention discloses a kind of radio frequencies for high energy implanters to accelerate tuner, including radio-frequency power supply, tuning controller, tuning cylinder and tuning motor, tuning controller includes tuning controling unit, tuning motor control unit and resonance state detection unit, tuning controling unit is connected with tuning motor control unit and resonance state detection unit respectively, and tuning motor is connected with tuning motor control unit.Tuning control method of the invention includes S01, resonant state detection unit for detecting the output signal of radio-frequency power supply and being sent to tuning controling unit；S02, tuning controling unit are used to output control signals to tuning motor control unit according to the output signal of radio-frequency power supply；S03, tuning motor control unit are according to the resonance of control signal control tuning motor so that tuning cylinder is in resonant state.Radio frequency for high energy implanters of the invention accelerates tuner and control method to all have the advantages that easy to operate, control is accurate.
Description
Technical field
The invention mainly relates to ion implantation technique fields, refer in particular to a kind of radio frequency acceleration tune for high energy implanters
Humorous device and method.
Background technique
Early in the 1960s, ion implantation technique is just applied in the production of semiconductor devices.Ion implantation technique
Exactly the atom of certain element is ionized, and accelerates its ion in the electric field, is implanted into solid after obtaining higher speed
The surface of material, to change the physics of this material surface or a kind of technology of chemical property.
The ion acceleration mode of ion implantation apparatus has electrostatic field to accelerate and radio frequency accelerated mode.Electrostatic field accelerated mode is realized
Get up simple, but need enough insulating spaces, when energy is higher, the space needed is bigger, and the volume of equipment also can be increasingly
Greatly.Therefore, middle low energy ion beam implantation machine generally uses electrostatic field accelerated mode.When high energy ion beam to be obtained, it is necessary to use
Radio frequency accelerated method, ion beam carry out acceleration superposition in the electric field at times, change space with the time, obtain high energy ion beam.
But structure is complicated for used radio frequency acceleration tuner at present, it is inconvenient.
Summary of the invention
The technical problem to be solved in the present invention is that, for technical problem of the existing technology, the present invention provides one
Kind structure is simple, control accurately accelerates tuner for the radio frequency of high energy implanters, and accordingly provides a kind of operation
Accurately radio frequency accelerates tuning control method for easy, control.
In order to solve the above technical problems, technical solution proposed by the present invention are as follows:
A kind of radio frequency acceleration tuner for high energy implanters, including radio-frequency power supply, tuning controller, tuning
Cylinder and tuning motor, the tuning controller include tuning controling unit, tuning motor control unit and resonance state-detection list
Member, the tuning controling unit are connected with the tuning motor control unit and resonance state detection unit respectively, the tuning
Motor is connected with the tuning motor control unit；The resonant state detection unit is used to detect the output of the radio-frequency power supply
Signal is simultaneously sent to tuning controling unit；The tuning controling unit is used to be exported according to the output signal of the radio-frequency power supply and control
Signal processed to tuning motor control unit, the tuning motor control unit according to the resonance of control signal control tuning motor with
Tuning cylinder is set to be in resonant state.
As a further improvement of the above technical scheme:
The tuning controller further includes voltage magnitude detection unit, the voltage magnitude detection unit respectively with the tune
Humorous cylinder is connected with tuning controling unit, and the voltage magnitude detection unit is used to detect the voltage magnitude of tuning cylinder load signal simultaneously
Be sent to tuning controling unit, the tuning controling unit for voltage magnitude to be compared with predeterminated voltage amplitude, according to than
Relatively result controls the output voltage amplitude of the radio-frequency power supply.
The tuning controller further includes frequency plot detection unit, and the frequency plot detection unit and the tuning are controlled
Unit processed is connected, and the frequency plot detection unit is used to detect the frequency plot of the tuning cylinder load signal and is sent to tune
Humorous control unit, the tuning controling unit is for comparing frequency plot with predeterminated frequency phase, according to comparison result control
Make the output frequency phase of the radio-frequency power supply.
It further include digital phase shifter, the digital phase shifter is connected with the tuning controling unit, for generating default frequency
Rate phase signal is simultaneously sent to tuning controling unit.
The tuning controller further includes pressure sensing cell, the pressure sensing cell respectively with the tuning cylinder and tune
Humorous control unit is connected.
Tuner is accelerated based on the radio frequency as described above for high energy implanters the invention also discloses a kind of
Control method, including resonant state control method, specifically includes the following steps:
S01, when radio frequency accelerates tuner operation, the resonant state detection unit is for detecting the radio-frequency power supply
Output signal and be sent to tuning controling unit；
S02, the tuning controling unit are used to output control signals to tuning according to the output signal of the radio-frequency power supply
Motor control unit；
S03, the tuning motor control unit are according to the resonance of control signal control tuning motor so that tuning cylinder is in
Resonant state.
As a further improvement of the above technical scheme:
It further include the control method of radio-frequency power supply output voltage amplitude, specifically includes the following steps:
S11, radio frequency accelerate tuner operation when, real-time detection tuning cylinder load signal voltage magnitude simultaneously be sent to
Tuning controling unit；
S12, the tuning controling unit are for comparing voltage magnitude with predeterminated voltage amplitude, according to comparison result control
Make the output voltage amplitude of the radio-frequency power supply.
It further include the control method of the frequency plot of radio-frequency power supply, specifically includes the following steps:
S21, when radio frequency accelerates tuner operation, the frequency plot of tuning cylinder load signal described in real-time detection is concurrent
It send to tuning controling unit；
S22, the tuning controling unit are for comparing frequency plot with predeterminated frequency phase, according to comparison result control
Make the output frequency phase of the radio-frequency power supply.
Compared with the prior art, the advantages of the present invention are as follows:
The radio frequency for high energy implanters of the invention accelerates that tuner structure is simple, easy to operate, Neng Gouyou
It imitates and the resonant state of tuning cylinder is monitored and is fed back, to accurately be controlled the resonant state of tuning cylinder.The present invention
Radio frequency accelerate tuning methods have many advantages, such as it is easy to operate, control it is accurate.
Detailed description of the invention
Fig. 1 is the frame principle figure of tuner of the invention.
Fig. 2 is the circuit diagram of resonant state detection unit of the invention.
Fig. 3 is the circuit diagram of frequency plot detection unit of the invention.
Fig. 4 is the circuit diagram of voltage magnitude detection unit of the invention.
Figure label indicates: 1, radio-frequency power supply；2, tuning controller；21, tuning controling unit；22, resonant state detects
Unit；23, voltage magnitude detection unit；24, frequency plot detection unit；25, motor control unit is tuned；26, pressure detecting
Unit；3, cylinder is tuned；31, voltage probe；4, motor is tuned；5, digital phase shifter.
Specific embodiment
Below in conjunction with Figure of description and specific embodiment, the invention will be further described.
As shown in Figures 1 to 4, the radio frequency for high energy implanters of the present embodiment accelerates tuner, including penetrates
Frequency power 1, tuning controller 2, tuning cylinder 3 and tuning motor 4, tuning controller 2 include tuning controling unit 21, tuning motor
Control unit 25 and resonance state detection unit 22, tuning controling unit 21 respectively with tuning motor control unit 25 and resonance shape
State detection unit 22 is connected, and tuning motor 4 is connected with tuning motor control unit 25；Resonant state detection unit 22 is for detecting
The output signal of radio-frequency power supply 1 is simultaneously sent to tuning controling unit 21；Tuning controling unit 21 is used for according to the defeated of radio-frequency power supply 1
Signal outputs control signals to tuning motor control unit 25 out, and tuning motor control unit 25 is according to control signal control tuning
The resonance of motor 4 is so that tuning cylinder 3 is in resonant state.Specifically, the measurement result of resonant state detection unit 22 passes through more
Way switch selection, AD conversion are sent to tuning controling unit 21(CPU, model PLCC HD64180RZ), and CPU is according to feedback
System resonance state, control tuning motor 4 move, and adjust load capacitance, system is made to reach resonant state, is i.e. resonant state is fed back
Value is zero.The radio frequency for high energy implanters of the invention accelerate tuner structure it is simple, it is easy to operate, can be effective
The resonant state of tuning cylinder 3 is monitored and is fed back, to accurately be controlled the resonant state of tuning cylinder 3.
Specifically, resonant state detection unit 22 is as shown in Fig. 2, 1 output signal of radio-frequency power supply is carried out by negative sensor T1
Current phasor sampling carries out voltage vector sampling by capacitor C5, then, by subsequent circuit to current phasor and voltage vector
Deflection be compared, when current phasor deflection is identical as voltage vector deflection, resonant state signal output electricity
Ordinary mail number is zero, shows that system is in resonant state.When current phasor deflection is greater than voltage vector deflection, resonant state
Signal exports positive voltage, and vice versa, and angle difference is bigger, and the voltage value of output is higher, and resonant state signal feeds back to tuning
Motor control unit 25, the capacitor of regulating system, makes system reach resonant state.
In the present embodiment, tuning controller 2 further includes voltage magnitude detection unit 23, and voltage magnitude detection unit 23 is distinguished
It is connected with tuning cylinder 3 and tuning controling unit 21, voltage magnitude detection unit 23 is used to detect the voltage of tuning 3 load signal of cylinder
Amplitude is simultaneously sent to tuning controling unit 21, and tuning controling unit 21 is used to compare voltage magnitude with predeterminated voltage amplitude,
The output voltage amplitude of radio-frequency power supply 1 is controlled according to comparison result.As shown in figure 4, specifically, tuning in cylinder 3 and being equipped with voltage
Probe 31, voltage magnitude detection unit 23 obtain the voltage magnitude of load signal by voltage probe 31, the voltage given with CPU
Amplitude is compared, and is controlled signal for comparison result as the voltage magnitude of radio-frequency power supply 1, is controlled the load voltage amplitude of actual measurement
It is consistent with CPU setting voltage magnitude.By D1, D2 to the RF signal that voltage probe 31 acquires back carry out rectification and by C17, C29 into
Row filtering, while pressure is powered on to C17, C29 by U6, U10 and carries out differential amplification, on the output voltage and electrode of U10 RF amplitude at
Direct ratio.Meanwhile the setting of RF voltage magnitude is converted to analog signal through D/A, becomes using a phase inverter U4 by voltage is set
Negative voltage samples with RF voltage magnitude as reference control voltage and carries out summation operation, is carried out by difference of the U3 to two signals
Amplification, output directly control RF power supply power output, are finally reached a stable state, so that RF output amplitude and setting on electrode
Value is consistent.Stablize to reach electrode voltage.
In the present embodiment, tuning controller 2 further includes frequency plot detection unit 24, frequency plot detection unit 24 and tune
Humorous control unit 21 is connected, and frequency plot detection unit 24 is used to detect the frequency plot of tuning 3 load signal of cylinder and is sent to
Tuning controling unit 21, tuning controling unit 21 is for comparing frequency plot with predeterminated frequency phase, according to comparison result
Control the output frequency phase of radio-frequency power supply 1.As shown in figure 3, specifically, tuning in cylinder 3 and being equipped with voltage probe 31, frequency phase
Position detection unit 24 obtains the frequency plot of load signal, the load radiofrequency signal (load signal of acquisition by voltage probe 31
Frequency plot) input A5 simultaneously with reference amble signal (predeterminated frequency phase) and carry out phase bit comparison, comparison result produces by A5
Raw voltage signal output, this voltage signal are amplified by U8 and control the control that signal together functions as U19 with CPU afterwards
System input.Wherein, reference amble signal is the radiofrequency signal that a frequency is 13.56MHZ, and U19 is that fundamental frequency is that 27.12MHZ is penetrated
The radio frequency signal frequency of frequency signal generator, output is controlled by input signal, and the frequency and control of the radiofrequency signal exported
Input voltage is linearly proportional.The radiofrequency signal of U19 output is output into radio frequency electrical after carrying out 0.5 times of frequency reducing by U18
1 frequency plot of source controls signal.When loading, radiofrequency signal phase is more advanced than the phase of reference amble signal, then reduces radio-frequency power supply
The frequency of 1 control signal, makes feedback signal reach same phase with reference amble signal, vice versa.Wherein predeterminated frequency phase by
Digital phase shifter 5 generates.
In the present embodiment, tuning controller 2 further includes pressure sensing cell 26, pressure sensing cell 26 respectively with tuning cylinder
3 are connected with tuning controling unit 21.
The present invention further correspondingly discloses a kind of based on the radio frequency acceleration tuning as described above for high energy implanters
The control method of device, including resonant state control method, specifically includes the following steps:
S01, when radio frequency accelerates tuner operation, resonant state detection unit 22 is for detecting the defeated of radio-frequency power supply 1
Signal and it is sent to tuning controling unit 21 out；
S02, tuning controling unit 21 are used to output control signals to tuning motor control according to the output signal of radio-frequency power supply 1
Unit 25 processed；
S03, tuning motor control unit 25 are according to the resonance of control signal control tuning motor 4 so that tuning cylinder 3 is in
Resonant state.
It further include the control method of 1 output voltage amplitude of radio-frequency power supply in the present embodiment, specifically includes the following steps:
S11, radio frequency accelerate tuner operation when, real-time detection tune 3 load signal of cylinder voltage magnitude and transmission
To tuning controling unit 21；
S12, tuning controling unit 21 are controlled for comparing voltage magnitude with predeterminated voltage amplitude according to comparison result
The output voltage amplitude of radio-frequency power supply 1.
It further include the control method of the frequency plot of radio-frequency power supply in the present embodiment, specifically includes the following steps:
S21, radio frequency accelerate tuner operation when, real-time detection tune 3 load signal of cylinder frequency plot and transmission
To tuning controling unit 21；
S22, tuning controling unit 21 are controlled for comparing frequency plot with predeterminated frequency phase according to comparison result
The output frequency phase of radio-frequency power supply 1.
The above is only the preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-described embodiment,
All technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
For those of ordinary skill, several improvements and modifications without departing from the principles of the present invention should be regarded as protection of the invention
Range.
Claims (7)
1. a kind of radio frequency for high energy implanters accelerates tuner, which is characterized in that including radio-frequency power supply (1), adjust
Humorous controller (2), tuning cylinder (3) and tuning motor (4), the tuning controller (2) include tuning controling unit (21), tuning
Motor control unit (25) and resonance state detection unit (22), the tuning controling unit (21) respectively with the tuning motor
Control unit (25) is connected with resonance state detection unit (22), the tuning motor (4) and the tuning motor control unit
(25) it is connected；The resonant state detection unit (22) is used to detect the output signal of the radio-frequency power supply (1) and is sent to tune
Humorous control unit (21)；The tuning controling unit (21) is used to be exported according to the output signal of the radio-frequency power supply (1) and control
Signal is to tuning motor control unit (25), and the tuning motor control unit (25) is according to control signal control tuning motor
(4) resonance adjusts load capacitance, so that tuning cylinder (3) is in resonant state；The tuning controller (2) further includes voltage
Amplitude detection unit (23), the voltage magnitude detection unit (23) respectively with the tuning cylinder (3) and tuning controling unit
(21) it is connected, the voltage magnitude detection unit (23) is used to detect the voltage magnitude of tuning cylinder (3) load signal and is sent to
Tuning controling unit (21), the tuning controling unit (21) are used to compare voltage magnitude with predeterminated voltage amplitude, according to
Comparison result controls the output voltage amplitude of the radio-frequency power supply (1).
2. the radio frequency according to claim 1 for high energy implanters accelerates tuner, which is characterized in that described
Tuning controller (2) further includes frequency plot detection unit (24), and the frequency plot detection unit (24) and the tuning are controlled
Unit (21) processed is connected, and the frequency plot detection unit (24) is used to detect the frequency phase of described tuning cylinder (3) load signal
Position is simultaneously sent to tuning controling unit (21), and the tuning controling unit (21) is used for frequency plot and predeterminated frequency phase phase
Compare, the output frequency phase of the radio-frequency power supply (1) is controlled according to comparison result.
3. the radio frequency according to claim 2 for high energy implanters accelerates tuner, which is characterized in that also wrap
It includes digital phase shifter (5), the digital phase shifter (5) is connected with the tuning controling unit (21), for generating predeterminated frequency
Phase signal is simultaneously sent to tuning controling unit (21).
4. the radio frequency as claimed in any of claims 1 to 3 for high energy implanters accelerates tuner,
Be characterized in that, the tuning controller (2) further includes pressure sensing cell (26), the pressure sensing cell (26) respectively with institute
Tuning cylinder (3) is stated to be connected with tuning controling unit (21).
5. a kind of accelerate tuning dress based on the radio frequency for being used for high energy implanters described in any one of Claims 1-4
The control method set, which is characterized in that including resonant state control method, specifically includes the following steps:
S01, when radio frequency accelerates tuner operation, the resonant state detection unit (22) is for detecting the radio-frequency power supply
(1) output signal is simultaneously sent to tuning controling unit (21)；
S02, the tuning controling unit (21) are used to output control signals to tune according to the output signal of the radio-frequency power supply (1)
Humorous motor control unit (25)；
S03, tuning motor control unit (25) are according to the resonance of control signal control tuning motor (4) so that tuning cylinder
(3) it is in resonant state.
6. control method according to claim 5, which is characterized in that further include radio-frequency power supply (1) output voltage amplitude
Control method, specifically includes the following steps:
S11, radio frequency accelerate tuner operation when, real-time detection tuning cylinder (3) load signal voltage magnitude simultaneously be sent to
Tuning controling unit (21)；
S12, the tuning controling unit (21) are for comparing voltage magnitude with predeterminated voltage amplitude, according to comparison result control
Make the output voltage amplitude of the radio-frequency power supply (1).
7. control method according to claim 5, which is characterized in that further include the control of the frequency plot of radio-frequency power supply (1)
Method processed, specifically includes the following steps:
S21, when radio frequency accelerates tuner operation, the frequency plot of tuning cylinder (3) load signal described in real-time detection is concurrent
It send to tuning controling unit (21)；
S22, the tuning controling unit (21) are for comparing frequency plot with predeterminated frequency phase, according to comparison result control
Make the output frequency phase of the radio-frequency power supply (1).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710220775.3A CN107134399B (en) | 2017-04-06 | 2017-04-06 | Radio frequency for high energy implanters accelerates tuner and control method |
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| CN201710220775.3A CN107134399B (en) | 2017-04-06 | 2017-04-06 | Radio frequency for high energy implanters accelerates tuner and control method |
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| Publication Number | Publication Date |
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| CN107134399A CN107134399A (en) | 2017-09-05 |
| CN107134399B true CN107134399B (en) | 2019-06-25 |
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Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2860266B2 (en) * | 1995-05-30 | 1999-02-24 | 株式会社日立製作所 | Variable energy type high frequency quadrupole accelerator and ion implanter |
| EP3557956A1 (en) * | 2004-07-21 | 2019-10-23 | Mevion Medical Systems, Inc. | A programmable radio frequency waveform generator for a synchrocyclotron |
| US7777152B2 (en) * | 2006-06-13 | 2010-08-17 | Applied Materials, Inc. | High AC current high RF power AC-RF decoupling filter for plasma reactor heated electrostatic chuck |
| US7811410B2 (en) * | 2008-06-19 | 2010-10-12 | Lam Research Corporation | Matching circuit for a complex radio frequency (RF) waveform |
| US8576013B2 (en) * | 2011-12-29 | 2013-11-05 | Mks Instruments, Inc. | Power distortion-based servo control systems for frequency tuning RF power sources |
| JP2013143432A (en) * | 2012-01-10 | 2013-07-22 | Tokyo Electron Ltd | Plasma processing apparatus |
| US9294100B2 (en) * | 2012-12-04 | 2016-03-22 | Advanced Energy Industries, Inc. | Frequency tuning system and method for finding a global optimum |
| CN105470086B (en) * | 2015-12-11 | 2017-08-04 | 中国电子科技集团公司第四十八研究所 | A kind of high energy pouring of polyatomic element machine |
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