CN107132706A - A kind of preparation method of display base plate, display base plate, display device - Google Patents
A kind of preparation method of display base plate, display base plate, display device Download PDFInfo
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- CN107132706A CN107132706A CN201710287363.1A CN201710287363A CN107132706A CN 107132706 A CN107132706 A CN 107132706A CN 201710287363 A CN201710287363 A CN 201710287363A CN 107132706 A CN107132706 A CN 107132706A
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- base plate
- display base
- transparent conductive
- electrode
- preparation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
Abstract
The present invention disclose a kind of preparation method of display base plate, display base plate, display device, be related to semiconductor devices and its manufacturing technology field, for solve due in display device copper electrode easily be oxidized, it is caused influence display device display picture quality the problem of.The preparation method of the display base plate includes：Prepare the mixed solution of graphene and nano silver wire；Using the mixed solution, the transparent conductive electrode of the display base plate is formed using paint-on technique or inkjet technology.The display base plate is obtained using the preparation method of above-mentioned display base plate.The preparation method for the display base plate that the present invention is provided is used for the transparent conductive electrode for preparing display base plate.
Description
Technical field
The present invention relates to semiconductor devices and its manufacturing technology field, more particularly to a kind of preparation method of display base plate,
Display base plate, display device.
Background technology
With being continuously increased for large scale display panel demand, the display quality of large scale display panel also increasingly by
To attention.One of the key factor for influenceing large scale display panel display quality be gate electrode in display panel, source electrode and
The resistivity of the electrodes such as drain electrode, and in display panel signal transmssion line resistivity, in order to avoid electrode and signal are transmitted
The influence that the resistivity of line is produced to display quality, is used as large scale display panel using the less copper of resistivity in the prior art
The wiring material of middle electrode and signal transmssion line, to form the copper wiring display panel for meeting display quality requirement.
But because the part copper electrode and copper signal transmssion line in copper wiring display panel can be with the pixels in display panel
Electrode and common electrode contact, and the common used material for making pixel electrode and public electrode is indium tin material, indium tin material with
When copper electrode or the contact of copper signal transmssion line, copper easily is aoxidized, causes the resistivity of copper electrode or copper signal transmssion line
Increase, influence the display picture quality of copper wiring display panel.
The content of the invention
It is an object of the invention to provide a kind of preparation method of display base plate, display base plate, display device, for solving
Because copper electrode in display device or copper signal transmssion line are easily oxidized, caused influence copper wiring display panel display picture matter
The problem of amount.
To achieve these goals, the present invention provides following technical scheme：
The first aspect of the present invention provides a kind of preparation method of display base plate, including：Prepare graphene and nano silver wire
Mixed solution；Using the mixed solution, the transparent of the display base plate is formed using paint-on technique or inkjet technology
Conductive electrode.
Further, it is described to prepare graphene and the mixed solution of nano silver wire is specifically included：According to every square millimeter
Solid graphene correspondence (0.63 × 104-9.3×104) root nano silver wire ratio, graphene, nano silver wire and solvent are mixed
Close, form the mixed solution.
Further, the solvent is ethanol or deionized water.
Further, the transparent conductive electrode for forming the display base plate using paint-on technique includes：Utilize the mixing
Solution, using spraying or spin coating proceeding formation transparent conductive film；Solidify the transparent conductive film, form transparent after solidification
Conductive film；Transparent conductive film after the solidification is patterned, the transparent conductive electrode of the display base plate is formed.
Further, the transparent conductive electrode for forming the display base plate using inkjet technology includes：Using ink-jet
The figure of printing technique technique formation transparent conductive film；Solidify the figure of the transparent conductive film, to form the display
The transparent conductive electrode of substrate.
Further, the display base plate is array base palte, and the transparent conductive electrode is the pixel electricity on array base palte
Pole, after the transparent conductive electrode is formed, the preparation method also includes：The first orientation is formed on the pixel electrode
Layer；
Or, the display base plate is color membrane substrates, the transparent conductive electrode is the public electrode on array base palte, in shape
Into after the transparent conductive electrode, the preparation method also includes：The second both alignment layers are formed on the public electrode.
Further, the method for the display base plate also includes：Using thin film transistor (TFT) of the copper for the display base plate
Electrode and signal transmssion line.
The technical scheme of preparation method based on above-mentioned display base plate, the second aspect of the present invention provides a kind of display base
Plate, is obtained using the preparation method of above-mentioned display base plate.
Further, the transparent conductive electrode in the display base plate is pixel electrode and/or public electrode.
Based on the technical scheme of above-mentioned display base plate, the third aspect of the present invention provides a kind of display device, including above-mentioned
Display base plate.
In the preparation method for the display base plate that the present invention is provided, using graphene and the mixed solution of nano silver wire, use
The transparent conductive electrode of paint-on technique or inkjet technology formation display base plate.Due to grapheme material have flatness it is good,
Stable chemical performance, work function are adjustable, pliability is good, carrier mobility is high and the features such as good visible light wave range translucency, silver
The features such as nano wire has small square resistance, good pliability and good visible light wave range translucency, therefore, using graphene and Yin Na
The transparent conductive electrode of the mixed solution formation of rice noodles, can have the advantage of two kinds of materials concurrently, make the transparent conductive electrode to be formed
With pliability is good, translucency is good, square resistance can reach application demand and is not susceptible to the features such as ion spreads, this
Sample connects when the transparent conductive electrode of the mixed solution formation using graphene and nano silver wire with copper electrode or copper signal transmssion line
When touching, copper electrode is not easily caused or copper signal transmssion line is aoxidized, it is ensured that the display picture quality of copper wiring display panel.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the present invention, this hair
Bright schematic description and description is used to explain the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is the flow chart of use paint-on technique provided in an embodiment of the present invention formation transparent conductive electrode；
Fig. 2 is the flow chart of use inkjet technology provided in an embodiment of the present invention formation transparent conductive electrode；
Fig. 3 is the structural representation of display device provided in an embodiment of the present invention.
Reference：
1- copper wiring array base paltes, 2- pixel electrodes,
The both alignment layers of 3- first, 4- liquid crystal layers,
The both alignment layers of 5- second, 6- public electrodes,
7- color membrane substrates, 8- encapsulated layers.
Embodiment
In order to further illustrate preparation method, display base plate, the display device of display base plate provided in an embodiment of the present invention,
It is described in detail with reference to Figure of description.
Referring to Fig. 1, the preparation method of display base plate provided in an embodiment of the present invention includes：Prepare graphene and silver nanoparticle
The mixed solution of line；Using mixed solution, using paint-on technique or the electrically conducting transparent electricity of inkjet technology formation display base plate
Pole.
When this method is embodied, (0.63 × 10 can be corresponded to according to every square millimeter of solid graphene first4-9.3
×104) root nano silver wire ratio, graphene, nano silver wire are mixed with solvent, mixed solution is formed, wherein mixing is used
Solvent can be for deionized water or ethanol etc.；Then using the mixed solution prepared, using paint-on technique or inkjet printing
Technology forms transparent conductive electrode on display base plate.
In the preparation method of display base plate provided in an embodiment of the present invention, the mixing using graphene and nano silver wire is molten
Liquid, using the transparent conductive electrode of paint-on technique or inkjet technology formation display base plate.Put down because grapheme material has
It is whole spend, stable chemical performance, work function is adjustable, pliability is good, carrier mobility is high and visible light wave range translucency is good etc.
Feature, the features such as nano silver wire has small square resistance, good pliability and good visible light wave range translucency, therefore, using graphite
The transparent conductive electrode of the mixed solution formation of alkene and nano silver wire, can have the advantage of two kinds of materials concurrently, make to be formed is transparent
Conductive electrode has that pliability is good, translucency is good, square resistance can reach application demand and is not susceptible to ion diffusion etc.
Feature, so when the transparent conductive electrode of the mixed solution formation using graphene and nano silver wire is passed with copper electrode or copper signal
During defeated linear contact lay, copper electrode is not easily caused or copper signal transmssion line is aoxidized, it is ensured that the display picture of copper wiring display panel
Face quality.In addition, the aboundresources of graphene and nano silver wire, price is relatively low, the mixing using graphene and nano silver wire is molten
Liquid prepares transparent conductive electrode, and production cost is relatively low.
It should be noted that when forming the mixed solution of graphene and nano silver wire, graphene and nano silver wire it is mixed
Composition and division in a proportion example can be set according to actual needs, it is preferred that according to every square millimeter of solid graphene correspondence (0.63 × 104-
9.3×104) root nano silver wire ratio, graphene, nano silver wire are mixed with solvent, formed mixed solution.Using according to upper
When the mixed solution for stating ratio formation makes transparent conductive electrode, the square resistance of the transparent conductive electrode formed is less than 100
Ohm, reduces the square resistance of transparent conductive electrode, and the visible light transmissivity of the transparent conductive electrode formed well
For more than 85%, it is ensured that display effect, further, since with the mixed solution of ratio formation, only with a small amount of Yin Na
Rice noodles so that the transparent conductive electrode surface roughness using mixed solution formation is smaller, and going out for short circuit problem is not easily caused
It is existing.
In addition, there are multiple choices for dissolving the solvent of graphene and nano silver wire, such as：Deionized water, ethanol etc.,
But it is not limited only to this.
After the mixed solution of graphene and nano silver wire is formed, it can be formed thoroughly on display base plate by multiple technologies
Bright conductive electrode, below by taking paint-on technique and inkjet technology as an example, is described in detail using the mixed of graphene and nano silver wire
Solution is closed, the detailed process of transparent conductive electrode is formed on display base plate.
Referring to Fig. 1, being included using the transparent conductive electrode of paint-on technique formation display base plate：
Step 101, using mixed solution, using paint-on technique technique formation transparent conductive film.
Step 102, transparent conductive film is solidified, the transparent conductive film formed after solidification.
Step 103, the transparent conductive film after solidification is patterned, forms the transparent conductive electrode of display base plate.
Specifically, in a step 101, electrically conducting transparent can be formed on display base plate thin using spraying or spin coating proceeding
Film.In a step 102, transparent conductive film can be solidified by a variety of methods, for example：Heating, infrared radiation etc..
In step 103, one layer of photoresist is coated on transparent conductive film after hardening, photoresist is exposed using mask plate
Light, makes the photoresist formation non-reservation region of photoresist and photoresist reservation region, wherein, photoresist reservation region corresponds to transparent
The figure region of conductive electrode, the region that the non-reservation region of photoresist corresponds to beyond above-mentioned figure；Carry out development treatment,
The photoresist of the non-reservation region of photoresist is completely removed, and the photoresist thickness of photoresist reservation region keeps constant；By carving
Etching technique etches away the transparent conductive film of the non-reservation region of photoresist completely, peels off remaining photoresist, forms electrically conducting transparent
Electrode.
Referring to Fig. 2, being included using the transparent conductive electrode of inkjet technology formation display base plate：
Step 201, using mixed solution, using the figure of inkjet technology technique formation transparent conductive film.
Step 202, the figure of transparent conductive film is solidified, to form the transparent conductive electrode of display base plate.
Specifically, in step 201, mixed solution being ejected on display base plate using inkjet technology technique and wants shape
Into the region of transparent conductive electrode, to form the figure of transparent conductive film.In step 202., shone using heating or infrared ray
Penetrate mode to solidify the figure of transparent conductive film, to form the transparent conductive electrode of display base plate.
It should be noted that the mixed solution that graphene and nano silver wire are obtained is dissolved by ethanol when using, to be formed
During bright conductive electrode, in above-mentioned steps 102 and step 202, the temperature of solidification is chosen as 40 DEG C -80 DEG C, and the time of solidification can
Elect 1-15min as.
Not only technique is simple for the method for the transparent conductive electrode of above two formation display base plate, and can form any
The transparent conductive electrode of size, the need for meeting practical application well.
Referring to Fig. 3, in the preparation method for the display base plate that above-described embodiment is provided, when the display base plate is array
Substrate, when the transparent conductive electrode formed on display base plate is pixel electrode 2, after transparent conductive electrode is formed, display
The preparation method of substrate, which is additionally included on pixel electrode 2, forms the first both alignment layers 3.When the display base plate is color membrane substrates 7, shape
Into the transparent conductive electrode on display base plate be public electrode 6 when, formed transparent conductive electrode after, the system of display base plate
Preparation Method, which is additionally included on public electrode 6, forms the second both alignment layers 5.Forming the method for both alignment layers has a variety of, can equally use
Above-mentioned paint-on technique or inkjet technology, but it is not limited only to both technologies.
Because above-mentioned mixed solution is to use aqueous solvent or organic solvent (ethanol), dissolving graphene and nano silver wire are obtained
, therefore, comprising hydration hydroxyl in the mixed solution of formation, so that the transparent conductive electrode formed by the mixed solution
Surface is hydrophily, when so forming both alignment layers on the surface of the transparent conductive film, not only contributes to the preparation of both alignment layers, also
The adhesiveness between both alignment layers and transparent conductive film can be improved, thus improve well display device service life and
Display effect.
The preparation method for the display base plate that above-described embodiment is provided also includes：Using film crystal of the copper for display base plate
The electrode and signal transmssion line of pipe, to form copper wiring array base palte 1 and copper signal transmssion line.Because the resistivity of copper is relatively low,
Therefore, copper wiring array base palte 1 and copper signal transmssion line are more preferable to the transmission performance of electric signal so that by above-mentioned display base plate structure
Into display device in, the voltage of each pixel is uniform, improves the homogeneity that display device is shown.It is additionally, since and copper
Journey array base palte 1 and the transparent conductive electrode of copper signal transmssion line contact are the mixed solution systems by graphene and nano silver wire
Into, and use the transparent conductive electrode of the mixed solution formation of graphene and nano silver wire to be not susceptible to ion diffusion, it will not lead
Copper wiring array base palte 1 and copper signal transmssion line is caused to aoxidize, it is ensured that the service life of the display base plate of copper wiring.
Further, since above-mentioned transparent conductive electrode will not cause copper wiring array base palte 1 and copper signal transmssion line to occur oxygen
Change, and the resistivity of copper product in itself is relatively low, therefore, it can the display base plate of copper wiring being applied to large-sized display surface
In plate, the application of copper wiring display base plate is improved.
The embodiment of the present invention additionally provides a kind of display base plate, is prepared using the preparation method of above-mentioned display base plate.
Specifically, in the display base plate prepared using above-mentioned preparation method, transparent conductive electrode is by the mixed of graphene and nano silver wire
Close solution to be made, the advantage of two kinds of materials can be had concurrently, having the transparent conductive electrode to be formed, pliability is good, translucency
Good, square resistance can reach application demand and be not susceptible to the features such as ion spreads, so when transparent conductive electrode and copper
Electrode or copper signal transmssion line contact when, copper electrode is not easily caused or copper signal transmssion line is aoxidized, it is ensured that copper into show
Show the display picture quality of panel.
It is preferred that, the transparent conductive electrode in above-mentioned display base plate is pixel electrode 2 and/or public electrode 6.When display dress
When pixel electrode 2 and/or public electrode 6 in putting are formed by graphene and nano silver wire mixed solution, pixel electrode 2 and/or
Public electrode 6, when being contacted with copper wiring array base palte 1 or copper signal transmssion line, will not cause copper wiring array base palte 1 and copper to be believed
Number transmission line is aoxidized, and extends the service life of the display device of copper wiring.
The embodiment of the present invention additionally provides a kind of display device, including the display base plate that above-described embodiment is provided, described aobvious
The corresponding beneficial effect of showing device is identical with above-mentioned display base plate, and here is omitted.
Referring to Fig. 3, above-mentioned display device may particularly include the copper wiring array base palte 1 and color membrane substrates being arranged oppositely,
In copper wiring array base palte 1 on the surface of color membrane substrates, the both alignment layers 3 of pixel electrode 2 and first are disposed with, in color film
Substrate is disposed with the both alignment layers 5 of public electrode 6 and second, in the first both alignment layers on the surface of copper wiring array base palte 1
3 and second are provided with liquid crystal layer 4 between both alignment layers 5, and envelope is provided with surface of the color membrane substrates away from copper wiring array base palte 1
Fill layer 8.
Pixel electrode 2 and public electrode 6 in above-mentioned display device can be using the mixing materials of graphene and nano silver wire
Material is made so that pixel electrode 2 and public electrode 6 can be with pliability is good, translucency is good, square resistance can reach application
Demand and the advantages of ion spreads is not susceptible to, so when pixel electrode 2 connects with the copper electrode on copper wiring array base palte 1
When touching, and public electrode 6 with copper signal transmssion line when being contacted, and copper electrode is not easily caused and copper signal transmssion line is aoxidized,
It ensure that the display picture quality of display device.
The mixed solution to form pixel electrode 2 and public electrode 6 is additionally, since, graphite can be dissolved by organic solvent
Alkene and nano silver wire are obtained so that the surface of pixel electrode 2 and public electrode 6 is hydrophily, the so surface in pixel electrode 2
The first both alignment layers 3 are formed, and when forming the second both alignment layers 5 on the surface of public electrode 6, it is possible to increase both alignment layers and pixel electricity
Adhesiveness between pole 2 or public electrode 6, so as to improve the service life and display effect of display device well.
In the description of above-mentioned embodiment, specific features, structure, material or feature can be in any one or many
Combined in an appropriate manner in individual embodiment or example.
The foregoing is only a specific embodiment of the invention, but protection scope of the present invention is not limited thereto, any
Those familiar with the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be contained
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. a kind of preparation method of display base plate, it is characterised in that including：
Prepare the mixed solution of graphene and nano silver wire；
Using the mixed solution, the electrically conducting transparent electricity of the display base plate is formed using paint-on technique or inkjet technology
Pole.
2. the preparation method of display base plate according to claim 1, it is characterised in that described to prepare graphene and silver nanoparticle
The mixed solution of line is specifically included：
According to every square millimeter of solid graphene correspondence (0.63 × 104-9.3×104) root nano silver wire ratio, by graphite
Alkene, nano silver wire are mixed with solvent, form the mixed solution.
3. the preparation method of display base plate according to claim 2, it is characterised in that the solvent is ethanol or deionization
Water.
4. the preparation method of the display base plate according to any one of claims 1 to 3, it is characterised in that use paint-on technique
Forming the transparent conductive electrode of the display base plate includes：
Using the mixed solution, using paint-on technique technique formation transparent conductive film；
Solidify the transparent conductive film, the transparent conductive film formed after solidification；
Transparent conductive film after the solidification is patterned, the transparent conductive electrode of the display base plate is formed.
5. the preparation method of the display base plate according to any one of claims 1 to 3, it is characterised in that use inkjet printing
The transparent conductive electrode that technology forms the display base plate includes：
Using the mixed solution, using the figure of inkjet technology technique formation transparent conductive film；
Solidify the figure of the transparent conductive film, to form the transparent conductive electrode of the display base plate.
6. the preparation method of the display base plate according to any one of claims 1 to 3, it is characterised in that
The display base plate is array base palte, and the transparent conductive electrode is the pixel electrode on array base palte, described being formed
After transparent conductive electrode, the preparation method also includes：
The first both alignment layers are formed on the pixel electrode；
Or, the display base plate is color membrane substrates, the transparent conductive electrode is the public electrode on array base palte, is forming institute
State after transparent conductive electrode, the preparation method also includes：
The second both alignment layers are formed on the public electrode.
7. the preparation method of the display base plate according to any one of claims 1 to 3, it is characterised in that methods described is also wrapped
Include：
Using electrode and signal transmssion line of the copper for the thin film transistor (TFT) of the display base plate.
8. a kind of display base plate, it is characterised in that obtained using the preparation method as described in any one of claim 1~7.
9. display base plate according to claim 8, it is characterised in that the transparent conductive electrode in the display base plate is picture
Plain electrode and/or public electrode.
10. a kind of display device, it is characterised in that including display base plate as claimed in claim 8 or 9.
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| CN201710287363.1A CN107132706A (en) | 2017-04-27 | 2017-04-27 | A kind of preparation method of display base plate, display base plate, display device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114171706A (en) * | 2021-12-08 | 2022-03-11 | 深圳市华星光电半导体显示技术有限公司 | Cathode, flexible organic light emitting diode and preparation method thereof |
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