CN107132253A - The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate - Google Patents
The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate Download PDFInfo
- Publication number
- CN107132253A CN107132253A CN201710452847.7A CN201710452847A CN107132253A CN 107132253 A CN107132253 A CN 107132253A CN 201710452847 A CN201710452847 A CN 201710452847A CN 107132253 A CN107132253 A CN 107132253A
- Authority
- CN
- China
- Prior art keywords
- cnt
- metal
- preparation
- gas
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
Abstract
To solve the problems that existing VOCs gas sensors are present, the gas sensitive based on modified CNT/ metal nanoparticles (MNPs)/metal oxide nanoparticles (MONPs) hybrid material is prepared the invention provides a kind of novel method, the material can be used for preparing low-power consumption, high sensitivity VOCs gas sensors.A kind of preparation method of the VOCs gas sensors based on CNT/MNPs/MONPs gas sensitives is also provided while of the invention.The preparation method can minimize VOC gas sensors, and uniformity is good, super fast response, while realizing extremely low detection power consumption.Preparation technology flow is simple simultaneously, it is possible to achieve the production of scale.The gas sensor of the present invention, it is characterised in that structure includes polyimides (PI) flexible base layer after being handled for hydrophily, metal electrode layer and CNT/MNPs/MONPs gas sensitives layer successively from bottom to up.
Description
Technical field
The application is related to a kind of preparation method of the gas sensitive film based on flexible substrate, and more specifically, this is a kind of base
In the preparation method of the new air-sensitive material membrane of modified carbon nano-tube/nano particle hybrid material.The material can be for manufacture
Flexible, without micro-hotplate, low-power consumption VOCs gas sensors.The sensor is used as rapidly detecting VOCs gases
Small change in concentration, such as acetone, benzene,toluene,xylene, butadiene, ethanol, dichloromethane, ethylene glycol.
Background technology
VOCs gases are a series of general names of VOCs with high vapour pressure under common room temperature.They
Include naturally occurring organic compound, also the organic compound including artificially synthesizing.The volatile organic artificially produced
Compound mostlys come from oil and natural gas production and manufacture field (such as oil plant and chemical plant), burning fuel field (such as
Vapour oil and gas), organic solvent field (as paint and glue) discharge.Most of VOCs gases are dangerous and have poison gas
Body, will greatly influence health.VOCs is also inflammable gas, and leakage also results in fire hazard or the blast at scene.Cause
This, the detection sensing technology of VOCs gases is the key technology for detecting the change of VOCs gases such small concentrations.
In past 50 years, the various technology branches of gas sensing techniques are had been set up by different research.Mesh
Preceding most common gas sensing technology is the sensing technology based on metal-oxide semiconductor (MOS), and it has, and cost is low, be simple to manufacture
Etc. multiple advantages.However, this kind of technology needs that sensor is heated to certain hot environment by special micro-hotplate structure
It is lower to work, it is necessary to which more costs and complicated construction, are limited so compared with the sensor that some work at room temperature
The development of this kind of sensor.This also promotes researcher to develop newly based on advanced composite material (ACM), while having relatively low work(
The gas sensitive of consumption and preferable chemo-selective.
CNT (CNT) is had been considered to available for high sensitivity gas sensor due to its unique gas-sensitive property
One of most promising material.In addition, CNT is in gas sorption ability, specific surface area and response time aspect are also superior to traditional
Gas sensitive, causes the change of electric property such as electric capacity and resistance more notable.So far, CNT is frequently used for detection such as
NO2, SO2, NH3 gas.
On the other hand, at present relatively conventional sensor be all based on can not deformation silicon chip and prepare, although processing
Technical maturity, but in chemical enterprise scene, VOCs leakage, can not shape typically from connectors such as pipe flange and valves
The silicon chip of change also reduces the flexibility of sensor arrangement.Sensor based on flexible material can solve this problem, convenient
Sensor arrangement shop equipment each irregular surface and fine gap (such as curved arrangement is near valve flanges),
Improve the accuracy of detection.Such as Application No. 201010274741.0,201210558369.5 and 201210105297.9
Patent disclose flexibility CNT material gas sensor sensing films preparation method, but above method be all based on it is conventional
Single CNT materials, and VOC gases are various due to species, and all VOCs gases can not be carried out completely based on single CNT materials
Recognition detection, while response sensitivity is all relatively low.
The content of the invention
To solve the problems that existing VOCs gas sensors are present, the invention provides a kind of novel method preparation
, should based on the gas sensitive of modified CNT/ metal nanoparticles (MNPs)/metal oxide nanoparticles (MONPs) hybrid material
Material can be used for preparing low-power consumption, high sensitivity VOCs gas sensors.
A kind of VOCs gas sensors based on CNT/MNPs/MONPs gas sensitives are also provided while of the invention
Preparation method.The preparation method can minimize VOC gas sensors, and uniformity is good, super fast response, while realizing extremely low
Detect power consumption.Preparation technology flow is simple simultaneously, it is possible to achieve the production of scale.
The gas sensor of the present invention, it is characterised in that structure includes the polyamides after being handled for hydrophily successively from bottom to up
Imines (PI) flexible base layer, metal electrode layer and CNT/MNPs/MONPs gas sensitives layer.
Described hydrophily processing comprises the following steps：PI substrates are respectively placed in acetone or alcohol first and rinsed
30min-5h, the contact angle for being finally reached PI substrate surface water secondly by the method for vacuum oxygen plasma surface treatment reaches
To less than 15 °.
The control parameter of described vacuum oxygen plasma surface treatment method is：Plasma power 20-100W, processing
Time 10-100s, pressure 3-7Pa, frequency 13.56MHz.
Described metal electrode layer can be formed by various metal materials, by micro Process optical lithography in substrate shape
Into finger electrode, finger electrode can have various shapes.
Described micro Process optical lithography refers to：By being coated with the flexible liner of the photoresist with interdigital electrode pattern
Basal surface jet deposition different metal nano particle successively, ultimately forms metal electrode.Described metal nanoparticle is diameter
Metal nanoparticle between 1-120nm.The metal is Ti, Pt, Au, Ag, Cr, Ni, Cu, Co, Pd one kind.
Described finger electrode comprises at least 2 pairs of electrodes, and finger electrode key dimension parameter includes：Thickness 100-
10000nm, 1-2000 μm of adjacent electrode interval, the length of electrode is 0.1-10mm.
CNT/MNPs/MONPs gas sensitives layer preparation method described in novel processing step comprises the following steps：
Step 1, CNT the and MNPs mixed solutions of dispersed functionalization are equably sprayed by electro-spray ionization technology
Overlay on the electrode layer surface of PI substrates.Electron spray can more effectively control the uniformity and thickness relative to traditional painting method
Degree, preferable adhesive attraction power.
Step 2, step 1 is handled after substrate be dipped in metal front liquid, pass through electrochemical process depositing metal oxide
Particle forms the carbon nano-tube material of metal oxide cladding in carbon nano tube surface.The technique can ensure that being deposited on carbon receives
The metal oxide particle uniform, controllable of nanotube surface, while metal oxide materials can improve CNT to detection gas
Sensitivity and selectivity.
After step 3, the substrate cleaning that step 2 is obtained, drying process, made annealing treatment, table is finally given on substrate
Bread covers MNPs and MONPs carbon nano-tube gas-sensitive material.
CNT the and MNPs mixed solutions of described functionalization, solution concentration is in the range of 0.01-5mg/ml, solvent bag
Include but be not limited to dimethylformamide (DMF), chloroform, glycerine, ethanol and ethylene glycol, the CNT's and MNPs of functionalization is mole dense
Degree ratio is 1:1-100:1 scope, the CNTs and MNPs of functionalization ratio change can change its spirit to different VOC gases
Sensitivity.
The CNT of described functionalization can include but is not limited to the CNT that the CNT and amine of carboxylation are modified.
Described MNPs includes but is not limited to Au NPs, the metal nanoparticle such as Pd NPs, and MNPs diameter is in 1-50nm
Between.
Described metal front liquid solution is the aqueous solution of at least one of the metal ions such as titaniferous, tungsten, tin, zinc.Metal
The molar concentration of solion is in 0.01-1mol/L.
Described electrochemical process deposition scanning voltage scope deposits sweep speed 10-500mv/s, during deposition in -5~5V
Between 1s-1h.
The temperature of described annealing is 100-400 DEG C, and the time is 0.5h-24h, and the atmosphere of annealing is nitrogen
The one or more combination of the inert gases such as gas, argon gas.
The invention provides a kind of preparation method of the gas sensitive based on modified CNT/MNPs/MONP hybrid materials, together
When also provide a kind of VOCs gas sensors based on the gas sensitive.Flexible substrate enables the sensor to adapt to more
Environment, is doped with the functionalized carbon nanotubes material of metal nanoparticle and metal oxide nanoparticles so that sensor pair
The susceptibility and response speed of VOCs gases are all improved.Sensor operations temperature is low, it is possible to achieve normal temperature is detected, is eliminated
Micro-hotplate structure, reduces the complexity and cost of sensor production, while greatly reducing biosensor power consumption.
Brief description of the drawings
Fig. 1 is the structural representation of the VOCs gas sensors of one embodiment of the invention.
Fig. 2 is the finger electrode shape top view of one embodiment of the invention.
Fig. 3 is exposed to the voltage under the toluene vapor of various concentrations for the cycle sensor of one embodiment of the invention
Response.There is good response to the toluene of various concentrations the figure illustrates the sensor in the present invention, for 1ppm concentration all
It can be detected well, and concentration and response are in good linear relationship.
Fig. 4 for one embodiment of the invention sensor to the electrical response of the concentration of different VOCs gases.The figure is shown
Sensor in the present invention has to different VOCs gases a good response, and concentration and responding all have it is extraordinary linear
Relation.
Fig. 5 is that voltage of the sensor of one embodiment of the invention under the toluene vapor for being repeatedly exposed to same concentrations rings
Ying Tu.The figure illustrates have good stability with sensor of the invention.
Wherein 1 is CNT/MNPs/MONPs gas sensing layers, and 2 be electrode, and 3 be substrate, and 4 be Electrode electrodes
Embodiment
Embodiments of the invention are elaborated below, the present embodiment is carried out lower premised on technical solution of the present invention
Implement, give detailed embodiment and specific operating process, but protection scope of the present invention is not limited to following implementations
Example.CNT represents CNT in this application, and MNPs represents metal nanoparticle, and MONPs represents metal oxide particle, this
It is well-known to those skilled in the art.
It should be noted that, although being chatted in embodiment disclosed below with the order of step to the embodiment of this method
State, but this does not represent the absolute order relation in operating procedure.Following steps are carried out with appropriate adjustment combination, these are all still
Not unconventional scope of the invention should be considered as.
Step 1：A flexible polyimide (PI) substrate is chosen, rinse 1h by acetone solvent carries out surface to flexible parent metal
Hydrophilic pretreatment, then carries out oxygen plasma processing (plasma power：50W, processing time：30 seconds, pressure：3Pa, frequency
Rate：13.56MHz).
Step 2：Photoresist is coated on the substrate of the PI substrates after surface hydrophilic processing, and carrying out photoetching to the photoresist shows
Shadow, surface forms interdigital electrode pattern.Titanium (Ti) and golden (Au) nano particle are sprayed on flexible PI surfaces successively, pass through light
Lithography removes photoresist, obtains final Au interdigitated electrode structures.Fig. 2 is shown according to the embodiment of the present invention to flexible liner
Photoresist on bottom peeled off after Au interdigital electrode schematic diagrames.The thickness of finger electrode is 1000nm, adjacent electrode interval
10 μm, the length of electrode is 1mm.
Step 3：Amidized many wall CNT (length 4um, diameter 10nm) and Au NPs (nano particle size 2nm) are mixed
Close ultrasonic disperse and CNT/MNPs mixed solutions are formed in DMF solvent, amidized CNT and Au NPs ratio is 20:1, rub
Your concentration is 0.05mg/ml.CNT/MNPs mixed solutions are coated in the electrode layer of PI substrates by electro-spray ionization technology
Surface.Electron spray time 30s, voltage 3.5kV.
Step 4：It is coated with after the drying of the substrate of CNT/MNPs mixed solutions, is dipped in the 0.1mol/L of preformulation SnCl4
With 1mol/L Na2SO4In, temperature controlled water baths are in 40 DEG C, electrochemical deposition sweep speed 50mV/s, time 1min, voltage
2.5V。
Step 5：After the substrate cleaning after electrochemical deposition, drying, it is put into 250 DEG C of vacuum tube furnace and makes annealing treatment
4h, atmosphere is 99.9% argon gas, finally gives the gas sensing based on amination CNT/Au NPs/SnO2 gas sensitives
Device.
Because the preparation technology used in step 2 above is the micro fabrication of electrode, the size of electrode is in micron order
Not, there is miniaturization.
CNT/MNPs/MONPs gas sensitives layer preparation method described in novel processing step comprises the following steps：
Step 1, CNT the and MNPs mixed solutions of dispersed functionalization are equably sprayed by electro-spray ionization technology
Overlay on the electrode layer surface of PI substrates.Electron spray can more effectively control the uniformity and thickness relative to traditional painting method
Degree, preferable adhesive attraction power.
Step 2, step 1 is handled after substrate be dipped in metal front liquid, pass through electrochemical process depositing metal oxide
Particle forms the carbon nano-tube material of metal oxide cladding in carbon nano tube surface.The technique can ensure that being deposited on carbon receives
The metal oxide particle uniform, controllable of nanotube surface, while metal oxide materials can improve CNT to detection gas
Sensitivity and selectivity.
After step 3, the substrate cleaning that step 2 is obtained, drying process, made annealing treatment, table is finally given on substrate
Bread covers MNPs and MONPs carbon nano-tube gas-sensitive material.
CNT the and MNPs mixed solutions of described functionalization, solution concentration is in the range of 0.01-5mg/ml, solvent bag
Include but be not limited to dimethylformamide (DMF), chloroform, glycerine, ethanol and ethylene glycol, the CNT's and MNPs of functionalization is mole dense
Degree ratio is 1:1-100:1 scope, the CNTs and MNPs of functionalization ratio change can change its spirit to different VOC gases
Sensitivity.
The CNT of described functionalization can include but is not limited to the CNT that the CNT and amine of carboxylation are modified.
Described MNPs includes but is not limited to Au NPs, the metal nanoparticle such as Pd NPs, and MNPs diameter is in 1-50nm
Between.
Described metal front liquid solution is the aqueous solution of at least one of the metal ions such as titaniferous, tungsten, tin, zinc.Metal
The molar concentration of solion is in 0.01-1mol/L.
Described electrochemical process deposition scanning voltage scope deposits sweep speed 10-500mv/s, during deposition in -5~5V
Between 1s-1h.
The temperature of described annealing is 100-400 DEG C, and the time is 0.5h-24h, and the atmosphere of annealing is nitrogen
The one or more combination of the inert gases such as gas, argon gas.
It can show that the uniformity of sensor is good from Figure of description 5, can show that arrival T90 is (tested from accompanying drawing
The concentration of gas 90%) time be 10 seconds within.And due to no micro-hotplate, it is not necessary to the air-sensitive material on heating sensor
Material, is detected at normal temperatures.So, heater circuit is not needed when designing sensor interlock circuit, power consumption can drop
It is low by 90% or so.
The foregoing is only the preferred embodiment of the application, not to limit the application, it is all in spirit herein and
Within principle, any modification, equivalent substitution and improvements made etc. should be included within the protection domain of the application.
Claims (8)
1. a kind of preparation method of CNT/metal nanoparticle/metal oxide particle air-sensitive film based on flexible substrate,
Characterized in that, this method comprises the following steps：
Step 1, the CNT of dispersed functionalization and metal nanoparticle mixed solution passed through into electro-spray ionization skill
Art equably sprays the electrode layer surface in polyimide substrate；
Step 2, step 1 is handled after substrate be dipped in metal front liquid solution, pass through electrochemical process depositing metal oxide
Particle forms the carbon nano-tube material of metal oxide cladding in carbon nano tube surface；
After step 3, the substrate cleaning that step 2 is obtained, drying process, made annealing treatment, carbon modified is finally given on substrate
CNT/metal nanoparticle/gold of nanotube and metal nanoparticle and metal oxide nanoparticles hybrid material
Belong to oxide particle air-sensitive film.
2. the preparation method of air-sensitive film according to claim 1, it is characterised in that the carbon of the functionalization described in step 1
Nanotube includes the CNT that the CNT and amine of carboxylation are modified.
3. the preparation method of air-sensitive film according to claim 1, it is characterised in that the carbon of the functionalization described in step 1
The concentration of nanotube and metal nanoparticle mixed solution is in the range of 0.01-5mg/ml, and solvent is dimethylformamide, chlorine
One kind in imitative, glycerine, ethanol, ethylene glycol, the CNT of functionalization and the molar concentration ratio of metal nanoparticle are 1:
1-100:In the range of 1.
4. the preparation method of air-sensitive film according to claim 1, it is characterised in that the metal nano described in step 1
Grain includes Au NPs, Pd NPs metal nanoparticles, and the diameter of metal nanoparticle is between 1-50nm.
5. the preparation method of air-sensitive film according to claim 1, it is characterised in that the metal precursor described in step 2
Solution is the aqueous solution of at least one of titaniferous, tungsten, tin, zinc metal ion, and the molar concentration of solution is in 0.01-1mol/L.
6. the preparation method of air-sensitive film according to claim 1, it is characterised in that the electrochemical process described in step 2 is sunk
Product scanning voltage scope deposits sweep speed 10-500mv/s, sedimentation time is in the range of 1 second to 1 hour in -5~5V.
7. the preparation method of air-sensitive film according to claim 1, it is characterised in that annealing described in step 3
Temperature is 100-400 DEG C, and the time is -24 hours 0.5 hour, and the atmosphere of annealing is nitrogen, argon inert gas
The combination of one or more of gases.
8. a kind of gas sensor, its structure includes the polyimide flex substrate after being handled for hydrophily successively from bottom to up
Layer, metal electrode layer, CNT/metal nanoparticle/metal oxide particle gas sensitive layer, it is characterised in that described
CNT/metal nanoparticle/metal oxide particle gas sensitive layer is as described in any one of claim 1 to 7
Air-sensitive film preparation method be made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710452847.7A CN107132253A (en) | 2017-06-15 | 2017-06-15 | The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710452847.7A CN107132253A (en) | 2017-06-15 | 2017-06-15 | The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107132253A true CN107132253A (en) | 2017-09-05 |
Family
ID=59733999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710452847.7A Pending CN107132253A (en) | 2017-06-15 | 2017-06-15 | The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107132253A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108333227A (en) * | 2018-01-12 | 2018-07-27 | 五邑大学 | A kind of flexible gas sensor and preparation method thereof |
| WO2019085166A1 (en) * | 2017-11-02 | 2019-05-09 | 中山大学 | Hydrogen sensor and preparation method therefor, and method for implementing hydrogen detection |
| CN110031512A (en) * | 2019-04-28 | 2019-07-19 | 湖州师范学院 | A kind of single particle sensitive gas sensor and its preparation method and application |
| CN110806429A (en) * | 2019-08-08 | 2020-02-18 | 杭州市富阳区浙工大银湖创新创业研究院 | Resistance-type flexible gas sensor with resistance compensation function in bending state and preparation method thereof |
| CN111007114A (en) * | 2019-11-25 | 2020-04-14 | 西南民族大学 | Preparation method of gas-sensitive film based on photosynthesis mechanism and gas sensor |
| CN111090177A (en) * | 2018-10-24 | 2020-05-01 | 奇景光电股份有限公司 | Diffraction optical element module |
| CN111781271A (en) * | 2020-07-14 | 2020-10-16 | 电子科技大学 | Flexible surface acoustic wave gas sensor and preparation method thereof |
| CN112964680A (en) * | 2019-12-12 | 2021-06-15 | 有研工程技术研究院有限公司 | Flexible monomolecular film detector and preparation method thereof |
| CN113960123A (en) * | 2021-11-03 | 2022-01-21 | 北京印刷学院 | Ammonia-sensitive flexible intelligent package for detecting freshness of fish |
| WO2022019794A1 (en) * | 2020-07-21 | 2022-01-27 | Huawei Technologies Co., Ltd | Gas sensing structure and method of fabrication thereof |
| WO2022163231A1 (en) * | 2021-01-27 | 2022-08-04 | 株式会社村田製作所 | Structural body and field effect transistor |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1769881A (en) * | 2004-11-05 | 2006-05-10 | 广州大学 | Tin dioxide based nano gas sensitive material and preparation method thereof |
| US20100055568A1 (en) * | 2008-09-04 | 2010-03-04 | Kim Dong-Wan | Transition metal oxides/multi-walled carbon nanotube nanocomposite and method for manufacturing the same |
| CN101935010A (en) * | 2010-09-07 | 2011-01-05 | 上海交通大学 | Preparation method of carbon nano tube nasaltube type gas-sensitive sensor based on polyimide flexible substrate |
| WO2011143777A1 (en) * | 2010-05-19 | 2011-11-24 | The Governors Of The University Of Alberta | Production of decorated carbon nanotubes |
| CN102561007A (en) * | 2011-12-14 | 2012-07-11 | 天津大学 | Metal oxide and CNT(carbon nano-tube) composite fibre as well as preparation method thereof |
| CN102965622A (en) * | 2012-12-19 | 2013-03-13 | 中国科学院微电子研究所 | Preparation method of sensitive film doped with Au or Pt nanocrystals on surface |
| CN103033537A (en) * | 2012-12-20 | 2013-04-10 | 中国科学院微电子研究所 | Preparation method of gas sensor sensitive film based on flexible substrate |
-
2017
- 2017-06-15 CN CN201710452847.7A patent/CN107132253A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1769881A (en) * | 2004-11-05 | 2006-05-10 | 广州大学 | Tin dioxide based nano gas sensitive material and preparation method thereof |
| US20100055568A1 (en) * | 2008-09-04 | 2010-03-04 | Kim Dong-Wan | Transition metal oxides/multi-walled carbon nanotube nanocomposite and method for manufacturing the same |
| WO2011143777A1 (en) * | 2010-05-19 | 2011-11-24 | The Governors Of The University Of Alberta | Production of decorated carbon nanotubes |
| CN101935010A (en) * | 2010-09-07 | 2011-01-05 | 上海交通大学 | Preparation method of carbon nano tube nasaltube type gas-sensitive sensor based on polyimide flexible substrate |
| CN102561007A (en) * | 2011-12-14 | 2012-07-11 | 天津大学 | Metal oxide and CNT(carbon nano-tube) composite fibre as well as preparation method thereof |
| CN102965622A (en) * | 2012-12-19 | 2013-03-13 | 中国科学院微电子研究所 | Preparation method of sensitive film doped with Au or Pt nanocrystals on surface |
| CN103033537A (en) * | 2012-12-20 | 2013-04-10 | 中国科学院微电子研究所 | Preparation method of gas sensor sensitive film based on flexible substrate |
Non-Patent Citations (3)
| Title |
|---|
| CIHAT TASALTIN 等: "Preparation of flexible VOC sensor based on carbon nanotubes and gold nanoparticles", 《SENSORS AND ACTUATORS B》 * |
| 何钢: "《检测与控制器件》", 31 May 1996 * |
| 彭军等: "《传感器与检测技术》", 30 November 2003 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019085166A1 (en) * | 2017-11-02 | 2019-05-09 | 中山大学 | Hydrogen sensor and preparation method therefor, and method for implementing hydrogen detection |
| US11567050B2 (en) | 2017-11-02 | 2023-01-31 | Sun Yat-Sen University | Hydrogen sensor and preparation method therefor, and method for implementing hydrogen detection |
| CN108333227A (en) * | 2018-01-12 | 2018-07-27 | 五邑大学 | A kind of flexible gas sensor and preparation method thereof |
| CN111090177A (en) * | 2018-10-24 | 2020-05-01 | 奇景光电股份有限公司 | Diffraction optical element module |
| CN110031512A (en) * | 2019-04-28 | 2019-07-19 | 湖州师范学院 | A kind of single particle sensitive gas sensor and its preparation method and application |
| CN110031512B (en) * | 2019-04-28 | 2021-09-07 | 湖州师范学院 | Single particle sensitive gas sensor and preparation method and application thereof |
| CN110806429A (en) * | 2019-08-08 | 2020-02-18 | 杭州市富阳区浙工大银湖创新创业研究院 | Resistance-type flexible gas sensor with resistance compensation function in bending state and preparation method thereof |
| CN111007114A (en) * | 2019-11-25 | 2020-04-14 | 西南民族大学 | Preparation method of gas-sensitive film based on photosynthesis mechanism and gas sensor |
| CN112964680B (en) * | 2019-12-12 | 2022-12-02 | 有研工程技术研究院有限公司 | Flexible monomolecular film detector and preparation method thereof |
| CN112964680A (en) * | 2019-12-12 | 2021-06-15 | 有研工程技术研究院有限公司 | Flexible monomolecular film detector and preparation method thereof |
| CN111781271A (en) * | 2020-07-14 | 2020-10-16 | 电子科技大学 | Flexible surface acoustic wave gas sensor and preparation method thereof |
| WO2022019794A1 (en) * | 2020-07-21 | 2022-01-27 | Huawei Technologies Co., Ltd | Gas sensing structure and method of fabrication thereof |
| WO2022163231A1 (en) * | 2021-01-27 | 2022-08-04 | 株式会社村田製作所 | Structural body and field effect transistor |
| CN113960123A (en) * | 2021-11-03 | 2022-01-21 | 北京印刷学院 | Ammonia-sensitive flexible intelligent package for detecting freshness of fish |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107132253A (en) | The preparation method and gas sensor of a kind of air-sensitive film based on flexible substrate | |
| Kim et al. | Chemiresistive sensing behavior of SnO2 (n)–Cu2O (p) core–shell nanowires | |
| Ayesh | Metal/metal-oxide nanoclusters for gas sensor applications | |
| Mubeen et al. | Palladium nanoparticles decorated single-walled carbon nanotube hydrogen sensor | |
| Choi et al. | Bimetallic Pd/Pt nanoparticle-functionalized SnO2 nanowires for fast response and recovery to NO2 | |
| Abdelhalim et al. | Metallic nanoparticles functionalizing carbon nanotube networks for gas sensing applications | |
| Song et al. | Ionic‐activated chemiresistive gas sensors for room‐temperature operation | |
| Lee et al. | A hydrogen gas sensor employing vertically aligned TiO2 nanotube arrays prepared by template-assisted method | |
| Choi et al. | Prominent reducing gas-sensing performances of n-SnO2 nanowires by local creation of p–n heterojunctions by functionalization with p-Cr2O3 nanoparticles | |
| Septiani et al. | The development of gas sensor based on carbon nanotubes | |
| Ding et al. | Aerosol assisted chemical vapour deposition of nanostructured ZnO thin films for NO2 and ethanol monitoring | |
| Jung et al. | Fast-response room temperature hydrogen gas sensors using platinum-coated spin-capable carbon nanotubes | |
| KR101701917B1 (en) | Method for fabricating gas sensor | |
| Mane et al. | Palladium (Pd) sensitized molybdenum trioxide (MoO3) nanobelts for nitrogen dioxide (NO2) gas detection | |
| Steinhauer et al. | Single CuO nanowires decorated with size-selected Pd nanoparticles for CO sensing in humid atmosphere | |
| CN107024516A (en) | A kind of rhenium disulfide nano-chip arrays film adsorbed sensor and preparation method | |
| CN108535337B (en) | Flexible gas sensor based on tin oxide/gallium oxide heterojunction nano array and preparation method thereof | |
| Song et al. | Downsizing gas sensors based on semiconducting metal oxide: Effects of electrodes on gas sensing properties | |
| CN106317091B (en) | Sandwich type mixes porphyrin phthalocyanine double-level-metal complex nanotube and its preparation method and application | |
| CN105319242A (en) | Application of tungsten oxide-vanadium oxide heterojunction nanowire array as gas sensitive material | |
| Wang et al. | Methanol sensing properties of honeycomb-like SnO2 grown on silicon nanoporous pillar array | |
| Peng et al. | Boron-doped diamond nanowires for CO gas sensing application | |
| CN104198532A (en) | Molybdenum disulfide thin film device with ammonia sensitive effect as well as preparation method and application thereof | |
| CN110823965B (en) | Room temperature detection NO2Preparation method of gas sensitive material | |
| Chou et al. | Oxygen sensor utilizing ultraviolet irradiation assisted ZnO nanorods under low operation temperature |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170905 |