CN107121073A - High-precision three-degree-of-freedom real-time measurement method and device based on laser interferometer - Google Patents
High-precision three-degree-of-freedom real-time measurement method and device based on laser interferometer Download PDFInfo
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- 238000000691 measurement method Methods 0.000 title abstract 2
- 238000005259 measurement Methods 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000005096 rolling process Methods 0.000 claims abstract description 5
- 230000033001 locomotion Effects 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 230000008054 signal transmission Effects 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000009466 transformation Effects 0.000 claims description 3
- 239000013598 vector Substances 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000000644 propagated effect Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 description 6
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- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000005094 computer simulation Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 238000002366 time-of-flight method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention provides a high-precision three-degree-of-freedom real-time measurement method and device based on a laser interferometer, and solves the problem of real-time measurement of three degrees of freedom, namely a pitch angle, a rolling angle and axial displacement of a moving object. The device comprises a high-precision laser interference distance meter, an external reflection angle cone prism, a plane reflector, a shutter and a control and data processing system. Three points of different coordinates of the moving object are measured by using a laser interference distance meter, an external reflection pyramid prism and a shutter, the coordinate change of the three points on the moving object is calculated by using the three distance information and the position information of the three coordinates obtained by measurement, and finally the pitching, rolling angle and axial displacement of the target are solved by using the method for constructing the ideal plane provided by the invention. The method has the characteristics of high precision, simple structure, small data processing amount and good real-time property.
Description
Technical field
The invention belongs to field of precision measurement, and in particular to a kind of high-precision Three Degree Of Freedom based on laser interferometer is real-time
The method and device of measurement.
Background technology
Measurement is all scientific researches and industrial basis, in fields of measurement, distance, displacement, angle and angle position
Shifting is fundamental measurement physical quantity.With the development of technology, various measuring methods are occurred in that, in terms of high-acruracy survey,
Optical means, which has, can trace to the source and non-contacting advantage, and time-of-flight method and laser interference ranging are conventional linear measure longimetry hands
Section, autocollimation method, laser interferance method, loop laser method and internal reflection method are conventional angle-measuring methods, and these methods are typically used
In the measurement of single one physical amount.With the development of technology, single one physical measurement can not meet scientific research and industry life
The demand of production, this requires measuring instrument to have multiple degrees of freedom while the ability measured.
It is general that various dimensions measurement is implemented in combination with using multiple sensors and measuring method in multivariant measuring method,
Such measuring system is very complicated and has a negative impact due to increase measuring apparatus to measurement target, causes measurement result to be missed
Poor source increase.With the development of computer, laser speckle interference measuring, digital hologram measurement and computer vision are in multiple degrees of freedom
Fields of measurement starts to occur, but this method based on image procossing need to handle substantial amounts of image information and can not be real at a high speed
When measure, and its measurement accuracy is limited to the Pixel size of imaging sensor.
In view of the shortcomings of the prior art, high-precision range information can be obtained using the method for laser interferometry, so as to obtain
More accurate coordinate points information is obtained, realizes that an interferometer is used for the purpose of multimetering using multiple reflection face prism；With reference to
The movable information of target, is converted to the rotation between plane normal vector and the translation of plane by ideal plane structured approach, so as to obtain
Obtain high-precision three-degree-of-freedom motion information.This method has the simple in construction and small advantage of data operation quantity, but in other texts
The method was not yet used in offering.
The content of the invention
The present invention is devised a kind of dry based on laser for the complicated in the prior art and not high deficiency of measurement accuracy
The high-precision Three Degree Of Freedom measuring method and device of interferometer, with precision is high, simple in construction, data processing amount is small and real-time is good
The characteristics of.
The technical solution adopted by the present invention is：The dress that a kind of high-precision Three Degree Of Freedom based on laser interferometer is measured in real time
Put, including：High precision laser range finder, external reflectance prism of corner cube, right angle roof prism, shutter, control and data handling system,
The transmission direction control of light, shutter control signal interface, signal transmission system and mechanism shell；High-precision laser in measurement apparatus
Rangefinder and external reflectance prism of corner cube to be co-axially mounted, wherein the minute surface of external reflectance prism of corner cube successively with right angle roof prism
Crestal line is parallel and makes the incident light of right angle roof prism and reflected light orthogonal；Three right angle ridges in same plane
It is fixed between prism with the position two-by-two at a distance of 120 ° on mechanism shell；Control and processing system are received to be surveyed by high-precision laser
The range information d that distance meter is surveyed1、d2And d3, computing is carried out to it and obtains three-degree-of-freedom motion information, while control and processing system
System sends control instruction and controls fast door state to complete measurement.
Wherein, the collimated light beam along axis is divided into the three-beam propagated along different directions by external reflectance prism of corner cube, and this three
120 ° and perpendicular to axis each other of the Shu Guang direction of propagation；External reflectance prism of corner cube combines three positions, 120 ° of right angle room each other
Ridge prism realizes three diverse location points apart from d1、d2And d3Measurement.
Realize that pitching, the angular displacement of rolling and axial piston displacement are surveyed simultaneously using the method for construction ideal plane in addition
Amount, specific measuring method comprises the following steps：
1st, the normal of reference planes is determined according to the position of three plane mirrors；
2nd, the normal of object under test reflecting surface is calculated according to the range information of measurement；
3rd, amount of exercise of the moving object in the angle of pitch, roll angle and axial displacement is solved using coordinate transformation relation.
The present invention is compared to the advantage of prior art：
1. the present invention proposes the control that beam direction is realized using multiaspect reflection-type prism (such as external reflectance prism of corner cube),
Solve needs the problem of multiple interferometers carry out multimetering in the prior art so that measurement apparatus it is simple and compact for structure.
2. the method proposed by the present invention using construction ideal plane realizes pitching, the angular displacement of rolling and axial piston position
Move and measure simultaneously.
3. the characteristics of the method for the present invention has high, simple in construction precision, small data processing amount and good real-time.
Brief description of the drawings
Fig. 1 is apparatus of the present invention structure chart；
Fig. 2 is measuring method flow chart of the present invention；
Fig. 3 is angle displacement measurement error curve diagram；
Fig. 4 is displacement measurement error curve diagram；
Reference implication is in figure：1 is high-precision laser interfeerometry ranging instrument, and 2 be external reflectance prism of corner cube, and 3 be right angle
Roof prism, 4 be shutter, and 5 be control and data handling system, and 6 control for the transmission direction of light, and 7 connect for shutter control signal
Mouthful, 8 be signal transmission system, and 9 be mechanism shell.
Embodiment
To make the object, technical solutions and advantages of the present invention become apparent from understanding, specific implementation example is once combined, with reference to
The present invention is further described for accompanying drawing.
High-precision Three Degree Of Freedom measurement apparatus of Fig. 1 introductions based on laser interferometer is combined first.Measurement apparatus it is main
Part has at high-precision laser interfeerometry ranging instrument 1, external reflectance prism of corner cube 2, right angle roof prism 3, shutter 4, control and data
Reason system 5, the transmission direction of light control 6, shutter control signal interface 7, signal transmission system 8 and mechanism shell 9；Measurement apparatus
Middle high precision laser range finder 1 and external reflectance prism of corner cube 2 to be co-axially mounted, wherein the minute surface of external reflectance prism of corner cube successively with
The crestal line of right angle roof prism 3 is parallel and makes the incident light of right angle roof prism and reflected light orthogonal；In same plane
It is fixed between three interior right angle roof prisms 3 with the position two-by-two at a distance of 120 ° on mechanism shell；External reflectance prism of corner cube
The distance between axis and speculum are set to 81.65mm；Control and data handling system 5 are received by high precision laser range finder 1
The range information d surveyed1、d2And d3, computing is carried out to it and obtains three-degree-of-freedom motion information, while control and data processing system
System 5 sends control instruction and controls fast door state to complete measurement.
With reference to Fig. 2, the Three Degree Of Freedom measuring method step of the invention based on laser interferometer is as follows：
Step 1), according to the specific size of measurement apparatus, calculate the center position coordinates A of three plane mirrors0(x1,
y1,z1)、B0(x2,y2,z2)、C0(x3,y3,z3), and preserved as reference data.According to device design parameter and assume survey
First quartile positive direction of the device in three Cartesian coordinates is measured, the special coordinates for obtaining plane mirror center is A0
(100,0,0)、B0(0,100,0)、C0(0,0,100), not Dui Zhun three secondary mirrors with measurement distance information d1、d2And d3。
Step 2), substitute into d1、d2And d3Calculate the coordinate A (x of three points in target face1,y1,z1)、B(x2,y2,z2)、C
(x3,y3,z3), two not conllinear vectors in target face are determined according to the point coordinates of A, B, C tri-WithBy followingExpression
Formula obtains current goal plane normal
Step 3), repeat step 1 and step 2, obtain post exercise objective plane normal
Step 4), according to coordinate conversion relationThe anglec of rotation difference P and R of both direction, then both direction is all
Deposit when rotated, transformation matrix T is：
Calculating is obtained：
Wherein,
Step 5), according to the angular displacement P and R that obtain, be updated in former coordinate data and obtain only by rotation without work
Fill in mobile dbjective state coordinate A1 (x1,y1,z1)、B1(x2,y2,z2)、C1(x3,y3,z3), and calculate coordinate points before and after correspondence
Distance | A1-A |, | B1-B | and | C1-C | and their average, approximately replace piston to move d with the range difference of three points.
Step 6), by A (x1,y1,z1)、B(x2,y2,z2)、C(x3,y3,z3) store away primary plane as next wheel measurement
Data, according to step 1) in proceeding measurement d1、d2And d3, and repeat step 2) step 6) row measurement.
Certainly in this example, the installation requirement for externally reflecting prism of corner cube, interferometer and plane mirror is strict, if
Measurement result can be impacted in the case of there is angular error in installation, therefore to control alignment error in certain scope
It is interior to ensure measurement accuracy.Fig. 3 and Fig. 4 Computer Simulation can be seen that in operating distance as under 800mm configuration
0.01 ° of angle displacement measurement error and piston displacement error is respectively 10-6° and 10-14mm。
Although illustrative embodiment of the invention is described above, in order to the technology people of this technology neck
Member understands the present invention, it should be apparent that protection scope of the present invention is not limited thereto, especially external reflectance type pyramid, algorithm
Flow and light path on-off system shutter, it is any to be familiar with the people of the technology in disclosed technical scope, it will be appreciated that to think
To conversion or replacement be encompassed by within the scope of the present invention includes.
Claims (4)
1. a kind of high-precision Three Degree Of Freedom real-time measurement apparatus based on laser interferometer, it is characterised in that：Swash including high accuracy
Optar (1), external reflectance prism of corner cube (2), right angle roof prism (3), shutter (4), control and data handling system (5),
Transmission direction control (6), shutter control signal interface (7), signal transmission system (8) and the mechanism shell (9) of light；Measurement apparatus
Middle high-precision laser interfeerometry ranging instrument (1) and external reflectance prism of corner cube (2) are to be co-axially mounted, wherein the mirror of external reflectance prism of corner cube
Face is parallel with the crestal line of right angle roof prism (3) successively and makes the incident light of right angle roof prism and reflected light orthogonal；Place
It is fixed between three right angle roof prisms (3) in same plane with the position two-by-two at a distance of 120 ° on mechanism shell；Control
System and data handling system (5) receive the range information d surveyed by high precision laser range finder (1)1、d2And d3, it is transported
Calculation obtains three-degree-of-freedom motion information, while control and data handling system (5) send control instruction control shutter on off operating mode
Complete measurement.
2. the high-precision Three Degree Of Freedom real-time measurement apparatus based on laser interferometer according to claim 1, it is characterised in that：
Collimated light beam along axis is divided into the three-beam propagated along different directions, the propagation of this three-beam by external reflectance prism of corner cube (2)
120 ° and perpendicular to axis each other of direction；External reflectance prism of corner cube (2) combines three positions, 120 ° of right angle roof prism each other
Realize three diverse location points apart from d1、d2And d3Measurement.
3. a kind of high-precision Three Degree Of Freedom method for real-time measurement based on laser interferometer, sharp using being based on described in claim 1
The high-precision Three Degree Of Freedom real-time measurement apparatus of optical interferometer, it is characterised in that：The measuring method comprises the following steps：
Step 1), according to the specific size of measurement apparatus, calculate the center position coordinates A of three secondary mirrors0(x1,y1,z1)、
B0(x2,y2,z2)、C0(x3,y3,z3), control and data handling system (5) send the logical of control instruction control three shutters successively
It is disconnected so that three-beam passes sequentially through shutter and measures measurement distance information d1、d2And d3；
Step 2), substitute into d1、d2And d3Calculate the coordinate A (x of three points in target face1,y1,z1)、B(x2,y2,z2)、C(x3,
y3,z3), two not conllinear vectors in target face are determined according to the point coordinates of A, B, C tri-WithBy followingExpression formula
Obtain current goal plane normal
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A1-A |, | B1-B | and | C1-C | and their average, approximately replace piston to move d with the range difference of three points；
Step 6), by A (x1,y1,z1)、B(x2,y2,z2)、C(x3,y3,z3) store away primary plane number as next wheel measurement
According to according to step 1) in proceeding measurement d1、d2And d3, and repeat step 2)-step 6) row measurement.
4. the high-precision Three Degree Of Freedom method for real-time measurement based on laser interferometer according to claim 3, it is characterised in that：
An ideal plane is determined by three points, resolves the position relationship between front and rear preferable face to obtain target in pitching, rolling
Angular displacement and axial piston displacement movement.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109059777A (en) * | 2018-08-08 | 2018-12-21 | 中国十七冶集团有限公司 | A kind of method of fully-automatic laser interference displacement observation |
| CN109373906A (en) * | 2018-09-05 | 2019-02-22 | 三英精控（天津）仪器设备有限公司 | Method that is a kind of while measuring distance, flexion-extension and beat |
| CN110455277A (en) * | 2019-08-19 | 2019-11-15 | 哈尔滨工业大学 | High-precision attitude measuring device and method based on internet of things data fusion |
| CN113028987A (en) * | 2021-03-03 | 2021-06-25 | 中国科学院光电技术研究所 | High-precision six-degree-of-freedom measuring method and device based on laser range finder |
| CN113390337A (en) * | 2021-06-03 | 2021-09-14 | 合肥工业大学 | X-Y-theta three-degree-of-freedom measuring method based on field separation |
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